KR20220144558A - chamber tray device - Google Patents

chamber tray device Download PDF

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Publication number
KR20220144558A
KR20220144558A KR1020210051020A KR20210051020A KR20220144558A KR 20220144558 A KR20220144558 A KR 20220144558A KR 1020210051020 A KR1020210051020 A KR 1020210051020A KR 20210051020 A KR20210051020 A KR 20210051020A KR 20220144558 A KR20220144558 A KR 20220144558A
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KR
South Korea
Prior art keywords
carrier
tray device
inspection panel
chamber
fixing member
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KR1020210051020A
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Korean (ko)
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KR102539663B1 (en
Inventor
윤병길
허영욱
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주식회사 에이피솔루션
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Priority to KR1020210051020A priority Critical patent/KR102539663B1/en
Publication of KR20220144558A publication Critical patent/KR20220144558A/en
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Publication of KR102539663B1 publication Critical patent/KR102539663B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

Abstract

The present invention relates to a chamber tray device, and more specifically, to a chamber tray device, which utilizes a space in a narrow chamber more efficiently when inspecting a normal operation of an inspected object such as an OLED in a closed chamber, and can be easily attached or detached regardless of the type of the inspected object. In addition, the chamber tray device includes: a fixing jig in which the inspected object is fixed in order to check whether the inspected object operates normally in a closed chamber; an inspection panel on which the fixing jig is arranged; a carrier to which the inspection panel is attached and detached; and a slide part for sliding withdrawal of the carrier.

Description

챔버 트레이 장치{chamber tray device}chamber tray device

본 발명은 챔버 트레이 장치에 관한 것으로, 보다 상세하게는 밀폐된 챔버 내에서 OLED와 같은 피 검사체의 정상 동작여부를 검사할 때, 협소한 챔버 내의 공간을 보다 효율적으로 활용하고, 피 검사체의 종류에 관계없이 간단하게 탈부착이 가능한 챔버 트레이 장치에 관한 것이다.The present invention relates to a chamber tray device, and more particularly, when inspecting whether an object to be tested, such as an OLED, operates normally in a closed chamber, the space in a narrow chamber is more efficiently utilized, and the It relates to a chamber tray device that can be simply attached and detached regardless of the type.

일반적으로 가혹한 환경에서의 정상동작 여부를 확인하기 위한 검사는 외부 환경과 격리되밀폐된 챔버 내에서 실시되고 있다.In general, an inspection to check whether a normal operation in a harsh environment is carried out in a sealed chamber isolated from the external environment.

하지만 종래의 챔버는 작업자가 피 검사체에 수작업으로 케이블을 연결하고, 배치시킴에 따라, 시간이 많이 소요되고, 번거로운 문제점이 있었다.However, in the conventional chamber, as the operator manually connects and arranges the cable to the object to be inspected, it takes a lot of time and is cumbersome.

특히, 작업자가 수작업으로 케이블의 연결과 해제를 반복하면서 케이블의 단자가 파손되거나, 파손으로 인한 연결 불량이 자주 발생하는 문제점이 있었다.In particular, there is a problem in that the terminal of the cable is damaged while the operator manually connects and disconnects the cable, or a connection defect due to the breakage frequently occurs.

이에 따라, 한국공개특허 제10-2010-0002877호 "에이징 검사 수량 조절이 가능한 엘씨디 에이징 챔버"와 같이 피 검사체가 슬라이드식으로 수납가능한 기술이 개발되었다Accordingly, a technology in which an object to be inspected can be accommodated in a slide type has been developed, such as Korean Patent Application Laid-Open No. 10-2010-0002877 "LCD aging chamber capable of adjusting the amount of aging test".

하지만, 다른 제품의 검사가 어렵고, 피 검사체를 하나씩 장착하거나, 수거해야만 하는 번거러움이 있으며, 피 검사체를 장착하거나 수거하는 동안 검사를 진행하지 못하여 생산성이 떨어지는 문제점이 있었다.However, there are problems in that it is difficult to inspect other products, there is a hassle of having to mount or collect the inspected object one by one, and the productivity is lowered because the inspection cannot be performed while the inspected object is mounted or collected.

또한, 여전히 각 피 검사체 별로 케이블의 연결 및 해제를 반복함에 따라 단자의 파손이 자주 발생되는 문제점이 있었다In addition, there was a problem in that the terminal was frequently damaged as the cable connection and disconnection were repeated for each subject.

이에 따라, 복수 개의 피 검사체를 한번에 장착하고, 수거하여 검사 준비시간을 크게 감소시키면서, 케이블의 연결 및 해제로 인한 단자 파손을 효과적으로 방지하기 위한 기술 개발의 필요성이 제기되고 있다.Accordingly, there is a need for technology development for effectively preventing terminal damage due to connection and disconnection of cables while significantly reducing test preparation time by mounting and collecting a plurality of objects at once.

한국공개특허 제10-2010-0002877호 "에이징 검사 수량 조절이 가능한 엘씨디 에이징 챔버"Korean Patent Laid-Open Patent No. 10-2010-0002877 "LCD Aging Chamber with Aging Test Quantity Control"

본 발명의 목적은 상술한 바와 같은 문제점을 해결하기 위해 안출된 것으로서, 검사를 진행할 피 검사체의 장착에 소요되는 검사 준비시간 및 복잡한 케이블의 연결 및 단자의 파손을 방지하기 위한 챔버 트레이 장치를 제공하는 것이다.It is an object of the present invention to provide a chamber tray device for preventing the test preparation time required for mounting the test object to be tested and the complicated cable connection and terminal damage will do

상기 목적을 달성하기 위해 본 발명에 따른 챔버 트레이 장치는 밀폐된 챔버 내에서 피 검사체의 정상 동작여부를 검사하기 위해 피 검사체가 고정되는 고정지그와 상기 고정지그가 배열된 검사 패널과 상기 검사 패널이 탈부착되는 캐리어와 상기 캐리어의 슬라이딩 인출을 위한 슬라이드부를 포함하는 것을 특징으로 한다.In order to achieve the above object, the chamber tray device according to the present invention includes a fixing jig to which an object to be inspected is fixed, an inspection panel in which the fixing jig is arranged, and the inspection panel in order to inspect whether the inspection object operates normally in a closed chamber. It is characterized in that it comprises a slide part for sliding extraction of the carrier and the detachable carrier.

또한, 상기 슬라이드부는 캐리어의 하단에 배치되는 제1 슬라이드부와 캐리어의 후면에 배치되는 제2 슬라이드부로 구성되며, 제1 슬라이드부와 제2 슬라이드부는 폭방향이 상호 수직하게 배치된 것을 특징으로 한다.In addition, the slide part is composed of a first slide part disposed at the lower end of the carrier and a second slide part disposed on the rear surface of the carrier, and the first slide part and the second slide part are arranged in a width direction perpendicular to each other. .

또한, 상기 캐리어의 상단에 배치되어 검사 패널의 고정을 위한 고정부재와 상기 고정부재의 하부에 배치되어 검사 패널을 검사장치와 전기적으로 연결시키기 위한 단자부를 포함하여 구성되는 것을 특징으로 한다.In addition, it is disposed on the upper end of the carrier is characterized in that it is configured to include a fixing member for fixing the inspection panel and a terminal portion disposed under the fixing member for electrically connecting the inspection panel to the inspection device.

또한, 상기 고정부재의 일측은 캐리어의 일측에 회동되도록 결합되고, 고정부재의 타측에는 캐리어의 타측에 돌출된 가이드핀이 삽입되어 위치를 정렬시키도록 가이드홀이 형성되어 있는 것을 특징으로 한다.In addition, one side of the fixing member is coupled to rotate to one side of the carrier, and the other side of the fixing member is characterized in that the guide pin protruding from the other side of the carrier is inserted and a guide hole is formed to align the position.

또한, 상기 고정부재의 하부에 배치되어 검사 패널의 위치를 정렬시켜주기 위한 위치정렬부를 더 포함하며, 상기 위치정렬부는 삼각형 또는 사다리꼴 형태의 골이 길이방향을 따라 형성되어 검사 패널의 상단부가 골의 경사면을 따라 미끄러지면서 위치가 정렬되도록 구성된 것을 특징으로 한다.In addition, it is disposed on the lower portion of the fixing member to further include a positioning unit for aligning the position of the inspection panel, wherein the positioning unit is a triangular or trapezoid-shaped valley is formed along the longitudinal direction of the upper end of the inspection panel of the valley It is characterized in that it is configured to be aligned while sliding along the slope.

또한, 상기 위치정렬부는 회동시 점진적으로 검사 패널의 위치를 정렬시키기 위해 회동 축방향측 골의 폭이 반대측 골의 폭보다 더 넓게 형성된 것을 특징으로 한다.In addition, in order to gradually align the position of the inspection panel during rotation of the alignment unit, the width of the axial side of the rotational bone is formed to be wider than the width of the opposite side of the bone.

상술한 바와 같이, 본 발명에 따른 챔버 트레이 장치에 의하면, 피 검사체가 고정되는 고정지그가 배열된 검사 패널을 탈부착하여 한번에 복수 개의 피 검사체를 교체하여 검사 준비시간을 크게 줄이고, 검사 패널을 통해 한번에 케이블을 연결함으로써 간편하고, 단자의 파손을 효과적으로 방지할 수 있는 효과가 있다.As described above, according to the chamber tray device according to the present invention, the inspection panel on which the fixing jig to which the inspected object is fixed is attached and detached, and a plurality of inspected objects are replaced at a time to greatly reduce the inspection preparation time, and through the inspection panel By connecting the cables at once, it is simple and effective to prevent damage to the terminals.

도 1은 본 발명에 따른 챔버 트레이 장치의 실시예를 도시한 도면.
도 2는 본 발명에 따른 챔버 트레이 장치를 도시한 도면.
도 3은 본 발명에 따른 챔버 트레이 장치의 고정부재를 도시한 도면.
도 4는 본 발명에 따른 챔버 트레이 장치의 위치정렬부를 도시한 도면.1 is a view showing an embodiment of a chamber tray device according to the present invention.
Figure 2 is a view showing a chamber tray device according to the present invention.
Figure 3 is a view showing a fixing member of the chamber tray device according to the present invention.
Figure 4 is a view showing the alignment portion of the chamber tray device according to the present invention.

본 명세서에 개시되어 있는 본 발명의 개념에 따른 실시 예들에 대해서 특정한 구조적 또는 기능적 설명은 단지 본 발명의 개념에 따른 실시 예들을 설명하기 위한 목적으로 예시된 것으로서, 본 발명의 개념에 따른 실시 예들은 다양한 형태들로 실시될 수 있으며 본 명세서에 설명된 실시 예들에 한정되지 않는다.The specific structural or functional description of the embodiments according to the concept of the present invention disclosed in this specification is only illustrated for the purpose of explaining the embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention are It may be implemented in various forms and is not limited to the embodiments described herein.

본 발명의 개념에 따른 실시 예들은 다양한 변경들을 가할 수 있고 여러 가지 형태들을 가질 수 있으므로 실시 예들을 도면에 예시하고 본 명세서에서 상세하게 설명하고자 한다. 그러나, 이는 본 발명의 개념에 따른 실시 예들을 특정한 개시 형태들에 대해 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변경, 균등물, 또는 대체물을 포함한다.Since the embodiments according to the concept of the present invention may have various changes and may have various forms, the embodiments will be illustrated in the drawings and described in detail herein. However, this is not intended to limit the embodiments according to the concept of the present invention to specific disclosed forms, and includes all modifications, equivalents, or substitutes included in the spirit and scope of the present invention.

이하, 본 발명의 바람직한 실시예를 첨부된 도면을 참조하여 설명하면 다음과 같다.Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

도 1은 본 발명에 따른 챔버 트레이 장치의 실시예를 도시한 도면이며, 도 2는 본 발명에 따른 챔버 트레이 장치를 도시한 도면이고, 도 3은 본 발명에 따른 챔버 트레이 장치의 고정부재를 도시한 도면이며, 도 4는 본 발명에 따른 챔버 트레이 장치의 위치정렬부를 도시한 도면이다.Figure 1 is a view showing an embodiment of the chamber tray device according to the present invention, Figure 2 is a view showing the chamber tray device according to the present invention, Figure 3 shows a fixing member of the chamber tray device according to the present invention One view, Figure 4 is a view showing the alignment portion of the chamber tray device according to the present invention.

도 1에 도시된 바와 같이, 본 발명에 따른 챔버 트레이 장치는 밀폐된 챔버 내에서 피 검사체(1)의 정상 동작여부를 검사하기 위해 피 검사체(1)가 고정되는 고정지그(2)와 상기 고정지그(2)가 배열된 검사 패널(3)과 상기 검사 패널(3)이 탈부착되는 캐리어(4)와 상기 캐리어(4)의 슬라이딩 인출을 위한 슬라이드부(5)를 포함하여 구성된다.As shown in FIG. 1, the chamber tray device according to the present invention includes a fixing jig 2 to which the inspected object 1 is fixed in order to inspect whether the inspected object 1 operates normally in a closed chamber; It is configured to include an inspection panel 3 on which the fixing jig 2 is arranged, a carrier 4 to which the inspection panel 3 is detachably attached, and a slide part 5 for slidingly withdrawing the carrier 4 .

이때, 상기 슬라이드부(5)에 의해 인출되는 캐리어(4)는 복수 개가 배열되도록 구성될 수 있다.In this case, a plurality of carriers 4 drawn out by the slide unit 5 may be arranged.

또한, 상기 상기 슬라이드부(5)는 도 2에 도시된 정면도와 같이, 캐리어(4)의 하단에 배치되는 제1 슬라이드부(11)와 캐리어(4)의 후면에 배치되는 제2 슬라이드부(12)로 구성되며, 수직방향 하중과 수평방향 하중에 복합적으로 안정적인 지지력을 가질 수 있도록 제1 슬라이드부(11)와 제2 슬라이드부(12)는 폭방향이 상호 수직하게 배치됨이 바람직하다.In addition, as shown in the front view of FIG. 2 , the slide unit 5 includes a first slide unit 11 disposed at the lower end of the carrier 4 and a second slide unit disposed at the rear side of the carrier 4 ( 12), and the first slide portion 11 and the second slide portion 12 are preferably disposed perpendicular to each other in the width direction so as to have a complex and stable bearing capacity for vertical and horizontal loads.

즉, 제1 슬라이드부(11)와 제2 슬라이드부(12)는 레일의 형성 방향이 상호 수직하도록 배치되는 것이다.That is, the first slide part 11 and the second slide part 12 are arranged so that the rail formation directions are perpendicular to each other.

또한, 상기 캐리어(4)는 "ㄴ"자 형태로 검사 패널(3)이 올려져 거치되도록 구성되며, 상부에 위치한 고정부재(13) 또는 별도의 클램프와 같은 고정수단을 통해 고정되도록 구성될 수 있다.In addition, the carrier 4 is configured to be mounted on the inspection panel 3 in a "L" shape, and can be configured to be fixed through a fixing member such as a fixing member 13 located on the upper portion or a separate clamp. have.

보다 상세하게는, 도 3에 도시된 바와 같이 상기 캐리어(4)의 상단에 고정부재(13)가 배치되어 검사 패널(3)을 고정시키게 된다.More specifically, as shown in FIG. 3 , a fixing member 13 is disposed on the upper end of the carrier 4 to fix the inspection panel 3 .

상기 고정부재(13)의 일측은 캐리어(4)의 일측에 회동되도록 결합되어, 고정부재(13)의 회동 동작에 의해 검사 패널(3)의 고정 및 해제가 실시된다.One side of the fixing member 13 is rotatably coupled to one side of the carrier 4 , and fixing and releasing of the inspection panel 3 are performed by the rotational operation of the fixing member 13 .

또한, 상기 고정부재(13)의 하부에는 검사 패널(3)의 단자(3a)를 검사장치와 전기적으로 연결시키기 위한 단자부(14)가 배치된다.In addition, a terminal portion 14 for electrically connecting the terminal 3a of the inspection panel 3 to the inspection device is disposed under the fixing member 13 .

또한, 상기 고정부재(13)의 타측에는 캐리어(4)의 타측에 돌출된 가이드핀(15)이 삽입되어 회동되는 고정부재(13)의 위치를 정렬시키도록 가이드홀(16)이 형성됨이 바람직하다.In addition, it is preferable that a guide hole 16 is formed on the other side of the fixing member 13 to align the position of the fixing member 13 which is rotated by inserting a guide pin 15 protruding from the other side of the carrier 4 . do.

이를 통해, 상기 고정부재(13)는 단자와 연결된 검사 패널(3)과 캐리어(4) 양측에 결합되어 그 위치를 정렬시켜주게 된다.Through this, the fixing member 13 is coupled to both sides of the inspection panel 3 and the carrier 4 connected to the terminal to align their positions.

또한, 도 4에 도시된 바와 같이 상기 고정부재(14)의 하부에 배치되어 검사 패널(3)의 위치를 정렬시켜주기 위한 위치정렬부(17)를 더 포함하도록 구성될 수도 있다.In addition, as shown in FIG. 4 , it may be configured to further include a positioning unit 17 disposed under the fixing member 14 to align the position of the inspection panel 3 .

상기 위치정렬부(17)는 삼각형 또는 사다리꼴 형태의 골이 길이방향을 따라 형성되어 검사 패널(3)의 상단부가 골의 경사면을 따라 미끄러지면서 위치가 정렬되도록 구성된다.The positioning unit 17 is configured such that a triangular or trapezoidal valley is formed along the longitudinal direction so that the upper end of the inspection panel 3 slides along the slope of the valley to align the position.

특히, 상기 위치정렬부(17)는 회동시 점진적으로 검사 패널(3)의 위치를 정렬시키기 위해 회동 축방향측 골의 폭이 반대측 골의 폭보다 더 넓게 형성될 수도 있다.In particular, in order to gradually align the position of the inspection panel 3 during rotation, the aligning part 17 may be formed so that the width of the trough in the axial direction of rotation is wider than the width of the rib on the opposite side.

즉, 고정부재(13)의 회동을 고려하여 검사 패널(3)과 처음 접하게 되는 회동 축방향측 골의 폭이 더 넓게 형성되어 아직 정렬되지 않은 검사 패널(3)이 보다 쉽게 골에 수용되며, 반대측 골은 검사 패널(3)을 정위치시키기 위해 골이 협소하게 형성되는 것이다.That is, in consideration of the rotation of the fixing member 13, the width of the trough on the axial direction of rotation that first comes into contact with the inspection panel 3 is formed wider, so that the inspection panel 3 that is not yet aligned is more easily accommodated in the trough, The contralateral bone is narrowly formed in order to place the examination panel 3 in place.

이상과 같이 본 발명은 첨부된 도면을 참조하여 바람직한 실시예를 중심으로 기술되었지만 당업자라면 이러한 기재로부터 본 발명의 범주를 벗어남이 없이 많은 다양한 자명한 변형이 가능하다는 것은 명백하다. 따라서 본 발명의 범주는 이러한 많은 변형의 예들을 포함하도록 기술된 청구범위에 의해서 해석되어져야 한다.As described above, the present invention has been described based on preferred embodiments with reference to the accompanying drawings, but it is apparent to those skilled in the art that many various obvious modifications are possible without departing from the scope of the present invention from these descriptions. Accordingly, the scope of the present invention should be construed by the appended claims including examples of many such modifications.

1 : 피 검사체
2 : 고정지그
3 : 검사 패널
4 : 캐리어
5 : 슬라이드부
11 : 제1 슬라이드부
12 : 제2 슬라이드부
13 : 고정부재
14 : 단자부
15 : 가이드핀
16 : 가이드홀
17 : 위치정렬부1: blood test object
2: Fixing jig
3: Inspection panel
4: carrier
5: slide part
11: first slide part
12: second slide part
13: fixing member
14: terminal part
15: guide pin
16: guide hole
17: positioning unit

Claims (6)

밀폐된 챔버 내에서 피 검사체의 정상 동작여부를 검사하기 위해 피 검사체가 고정되는 고정지그와;
상기 고정지그가 배열된 검사 패널과;
상기 검사 패널이 탈부착되는 캐리어와;
상기 캐리어의 슬라이딩 인출을 위한 슬라이드부를 포함하는 것을 특징으로 하는
챔버 트레이 장치.
a fixing jig to which the test object is fixed in order to check whether the test object operates normally in the closed chamber;
an inspection panel on which the fixing jig is arranged;
a carrier to which the inspection panel is detachably attached;
It characterized in that it comprises a slide part for sliding withdrawal of the carrier.
chamber tray device.
 제 1항에 있어서,
상기 슬라이드부는
캐리어의 하단에 배치되는 제1 슬라이드부와;
캐리어의 후면에 배치되는 제2 슬라이드부로 구성되며,
제1 슬라이드부와 제2 슬라이드부는 폭방향이 상호 수직하게 배치된 것을 특징으로 하는
챔버 트레이 장치.
The method of claim 1,
the slide part
a first slide portion disposed at the lower end of the carrier;
Consists of a second slide portion disposed on the rear side of the carrier,
The first slide portion and the second slide portion characterized in that the width direction is disposed perpendicular to each other
chamber tray device.
 제 1항에 있어서,
상기 캐리어의 상단에 배치되어 검사 패널의 고정을 위한 고정부재와;
상기 고정부재의 하부에 배치되어 검사 패널을 검사장치와 전기적으로 연결시키기 위한 단자부를 포함하여 구성되는 것을 특징으로 하는
챔버 트레이 장치.
The method of claim 1,
a fixing member disposed on the upper end of the carrier for fixing the inspection panel;
Disposed under the fixing member, characterized in that it comprises a terminal portion for electrically connecting the inspection panel and the inspection device
chamber tray device.
 제 3항에 있어서,
상기 고정부재의 일측은 캐리어의 일측에 회동되도록 결합되고, 고정부재의 타측에는 캐리어의 타측에 돌출된 가이드핀이 삽입되어 위치를 정렬시키도록 가이드홀이 형성되어 있는 것을 특징으로 하는
챔버 트레이 장치.
4. The method of claim 3,
One side of the fixing member is coupled to be rotated to one side of the carrier, and the other side of the fixing member is inserted with a guide pin protruding from the other side of the carrier, characterized in that a guide hole is formed to align the position.
chamber tray device.
 제 4항에 있어서,
상기 고정부재의 하부에 배치되어 검사 패널의 위치를 정렬시켜주기 위한 위치정렬부를 더 포함하며,
상기 위치정렬부는 삼각형 또는 사다리꼴 형태의 골이 길이방향을 따라 형성되어 검사 패널의 상단부가 골의 경사면을 따라 미끄러지면서 위치가 정렬되도록 구성된 것을 특징으로 하는
챔버 트레이 장치.
5. The method of claim 4,
It is disposed under the fixing member and further comprises a positioning unit for aligning the position of the inspection panel,
The positioning unit is characterized in that the triangular or trapezoidal valley is formed along the longitudinal direction so that the upper end of the inspection panel slides along the slope of the valley to align the position.
chamber tray device.
 제 5항에 있어서,
상기 위치정렬부는 회동시 점진적으로 검사 패널의 위치를 정렬시키기 위해 회동 축방향측 골의 폭이 반대측 골의 폭보다 더 넓게 형성된 것을 특징으로 하는
챔버 트레이 장치.
6. The method of claim 5,
In order to gradually align the position of the inspection panel during rotation of the positioning unit, the width of the bone on the axis of the rotation is wider than the width of the bone on the opposite side.
chamber tray device.
KR1020210051020A 2021-04-20 2021-04-20 chamber tray device KR102539663B1 (en)

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Citations (7)

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KR20070019416A (en) * 2005-08-12 2007-02-15 삼성전자주식회사 burn-in test system having device for assembling of burn-in board
KR20100002877A (en) 2008-06-30 2010-01-07 (주)테이크시스템즈 Lcd aging chamber adjustable of aging test capacity
KR101249018B1 (en) * 2012-08-10 2013-04-02 (주)디지털프론티어 Ejector and ejecting system using ejector
KR101249011B1 (en) * 2012-08-21 2013-04-02 (주)디지털프론티어 Board removable apparatus of burn-in tester
KR101717264B1 (en) * 2016-11-22 2017-03-17 (주)앤츠 Assistance apparatus for test
JP2018028526A (en) * 2017-05-07 2018-02-22 合同会社Ｐｌｅｓｏｎ Tray-replaceable burn-in test unit
KR102070007B1 (en) * 2019-02-13 2020-02-17 (주) 피티씨 Burn-In Board Rack Unit and Semiconductor Inspection Apparatus having the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070019416A (en) * 2005-08-12 2007-02-15 삼성전자주식회사 burn-in test system having device for assembling of burn-in board
KR20100002877A (en) 2008-06-30 2010-01-07 (주)테이크시스템즈 Lcd aging chamber adjustable of aging test capacity
KR101249018B1 (en) * 2012-08-10 2013-04-02 (주)디지털프론티어 Ejector and ejecting system using ejector
KR101249011B1 (en) * 2012-08-21 2013-04-02 (주)디지털프론티어 Board removable apparatus of burn-in tester
KR101717264B1 (en) * 2016-11-22 2017-03-17 (주)앤츠 Assistance apparatus for test
JP2018028526A (en) * 2017-05-07 2018-02-22 合同会社Ｐｌｅｓｏｎ Tray-replaceable burn-in test unit
KR102070007B1 (en) * 2019-02-13 2020-02-17 (주) 피티씨 Burn-In Board Rack Unit and Semiconductor Inspection Apparatus having the same

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