KR20220007233A - Non-dust cable system for clean room automation system robot - Google Patents

Non-dust cable system for clean room automation system robot Download PDF

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KR20220007233A
KR20220007233A KR1020200085179A KR20200085179A KR20220007233A KR 20220007233 A KR20220007233 A KR 20220007233A KR 1020200085179 A KR1020200085179 A KR 1020200085179A KR 20200085179 A KR20200085179 A KR 20200085179A KR 20220007233 A KR20220007233 A KR 20220007233A
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cable
etfe
dust
sheath
clean room
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KR1020200085179A
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Korean (ko)
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KR102570282B1 (en
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태남기
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(주) 티엠텍
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/17—Protection against damage caused by external factors, e.g. sheaths or armouring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J21/00—Chambers provided with manipulation devices
    • B25J21/005—Clean rooms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C08L27/18—Homopolymers or copolymers or tetrafluoroethene
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/22—Sheathing; Armouring; Screening; Applying other protective layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/44—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins
    • H01B3/443—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins from vinylhalogenides or other halogenoethylenic compounds
    • H01B3/445—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins from vinylhalogenides or other halogenoethylenic compounds from vinylfluorides or other fluoroethylenic compounds
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/30—Installations of cables or lines on walls, floors or ceilings
    • H02G3/32—Installations of cables or lines on walls, floors or ceilings using mounting clamps

Abstract

The present invention relates to a dust-free cable system for a clean room automation system robot, which is optimized to a clean room environment. According to the present invention, the dust-free cable system comprises: an ethylene tetrafluoro ethylene (ETFE) cable sheath (30) wrapping a cable (40) to protect a cable sheath and holding movement; an ETFE sheath (20) wrapping around a bundle of ETFE cable sheaths (30) to bind and protect the same; and a clamp disposed near both end parts of the ETFE sheath (20) and firmly clamping and fixing the ETFE cable sheath (30). Accordingly, the structure of a POD for a clean room system is formed by additionally wrapping a cable holder tied to a plurality of separate spaces, thereby providing an effect of effectively maintaining and managing a cable.

Description

클린룸 자동화 설비 로봇용 무분진 케이블 시스템{NON-DUST CABLE SYSTEM FOR CLEAN ROOM AUTOMATION SYSTEM ROBOT}Dust-free cable system for clean room automation equipment robot {NON-DUST CABLE SYSTEM FOR CLEAN ROOM AUTOMATION SYSTEM ROBOT}

본 발명은 클린룸 자동화 설비 로봇용 무분진 케이블 시스템에 관한 것으로서, 보다 구체적으로는, 클린 시스템용 POD의 구조를 복수개의 분리된 공간에 묶여있는 케이블 홀더를 추가적으로 감싸는 형태로 POD를 구성하여 케이블을 효과적으로 유지 및 관리할 수 있는 새로운 형태의 클린룸 자동화 설비 로봇용 무분진 케이블 시스템에 관한 것이다.The present invention relates to a dust-free cable system for a clean room automation facility robot, and more specifically, the POD structure for a clean system is configured to additionally wrap a cable holder tied to a plurality of separate spaces to configure the cable. It relates to a dust-free cable system for a new type of cleanroom automation facility robot that can be effectively maintained and managed.

분진에 민감한 클린룸 공정에서 클린룸 전용 케이블이 사용되고 있다. 이러한 케이블은 내마모성과 내열성이 우수하고, 일명 POD(무분진 CABLE JACKET)라 칭하며, 이는 PTFE(폴리테트라플루오로에틸렌) MEMBRANE을 주 구성원으로 하는 클린룸 전용 케이블이다. 이러한 케이블은 무분진 무빙 시스템의 구현을 위한 구성품이다.In a dust-sensitive cleanroom process, a dedicated cleanroom cable is used. These cables have excellent abrasion resistance and heat resistance, and are also called POD (Dust-Free Cable JACKET), which is a cleanroom exclusive cable with PTFE (polytetrafluoroethylene) MEMBRANE as the main member. Such a cable is a component for the realization of a dust-free moving system.

POD는 PTFE(Polytetrafluoroethylene, 또는 Teflon®-테프론) 수지로 제조된 다공질 막으로 구성되며, 용도는 케이블 보호용 커버이고, 특징은 고내열, 내화학성, 내부식성을 가진다. 이렇게 제조된 무분진 케이블 보호형 커버에서 POD수는 1~7 설정가능하고, 구조는 우레탄과 테프론으로 구성된 다층(6층 이상)구조로 되어있다.POD is composed of a porous membrane made of PTFE (Polytetrafluoroethylene, or Teflon®-Teflon) resin, and is used as a cable protection cover. In the dust-free cable protection type cover manufactured in this way, the number of PODs can be set from 1 to 7, and the structure is a multi-layer (more than 6 layers) structure composed of urethane and Teflon.

표 1은 POD는 특성을 나타낸 표이다.Table 1 is a table showing the characteristics of the POD.

항목Item 스펙Specifications 내열성heat resistance 335℃이하 열변형 거의 없음Less than 335℃ No thermal deformation 내부식성corrosion resistance 테프론+우레탄 소재로 구성되어 부식 거의 없음Almost no corrosion as it is made of Teflon + urethane material 내마찰력 friction resistance 테프론 소재의 특성으로 인하여 마찰계수가 낮음Low coefficient of friction due to the characteristics of Teflon material 내화학성chemical resistance 열접착 구조의 단순설계로 인한 화학물질 발생없음. 클린 공정의 최적화 특성No chemical substances generated due to the simple design of the heat bonding structure. Optimizing Characteristics of Clean Processes 유연성flexibility 0.1T 수준의 필름을 이용한 합지구조로 인하여 우수한 유연성 확보
Securing excellent flexibility due to laminated structure using 0.1T level film
 PODPOD 1~7개의 POD 설정가능1-7 PODs can be set

한편, 종래 기술에 따른 폭 조절형 롤러의 장착을 통한 개별 폭 적용 케이블보호커버 제작에 대하여 설명한다.On the other hand, the manufacturing of the cable protection cover applying an individual width through the installation of the width-adjustable roller according to the prior art will be described.

이는, 1~7 POD의 개별 폭을 조절할 수 있도록 하는 제품 개발에 관한 것으로서, 케이블의 종류에 따른 폭 맞춤형 보호커버 제작이 가능하며, 10~200mm이내 자유로운 폭 설정이 가능하다. 종래 기술에서, POD간 접착을 위한 가변 폭 롤러가 개발되었으나, 기존 롤러는 케이블에 따른 구간별 폭 조절이 불가능하여, 이에 사용자들의 다양한 요구를 충족시키기 위해서는 롤러를 요구에 맞게 제작하고 장착하여 제품을 생산하여야 하는 문제점이 있었다. 개선방안으로는, 롤러 자체에서 구간별 폭을 조절할 수 있는 롤러를 개발하고, 롤러의 탈부착 공정이 없어지고 관련 공정변수도 제거하였다.This relates to the development of a product that allows the individual width of 1-7 PODs to be adjusted, and it is possible to manufacture a width-customized protective cover according to the type of cable, and it is possible to freely set the width within 10 to 200mm. In the prior art, variable width rollers for adhesion between PODs have been developed, but the existing rollers cannot adjust the width for each section according to the cable. There was a problem with the production. As an improvement plan, a roller that can control the width of each section was developed on the roller itself, and the process of attaching and detaching the roller was eliminated and related process variables were also removed.

한편, 클린케이블 이란 클램프, 케이블, 에어호스, 체인, POD를 포함하며, 클램프는 케이블 및 포드를 묶어주는 역할을 하고, POD는 케이블을 보호하고 분진을 방지한다. 체인은 가동곡률유지 및 케이블 하중지지용도로 사용된다.On the other hand, clean cables include clamps, cables, air hoses, chains, and PODs. The clamps bind cables and pods together, and the POD protects cables and prevents dust. The chain is used for maintaining the movable curvature and supporting the cable load.

클린케이블의 용도는 장비 구동시 함께 구동되는 케이블의 자체 분진을 최소화하고, 반도체라인과 같은 클린 공정에 적용하여 불량률 최소화하며, 무결점 공정이 많아지는 생산라인 또는 검사장비 분야에 사용되는 반도체 검사장비이다.The purpose of the clean cable is to minimize the dust of the cable that is driven together when the equipment is running, minimize the defect rate by applying it to a clean process such as a semiconductor line, and is a semiconductor inspection equipment used in the production line or inspection equipment field where there are many defect-free processes. .

상기한 바와 같은 클린 시스템용 POD를 사용함에 있어서, 클린 케이블과 같은 다양한 구성요소를 효과적으로 케이블을 유지할 수 있도록 하는 새로운 기술개발이 요구되고 있는 실정이다.In using the POD for a clean system as described above, there is a need for new technology development for effectively maintaining cables of various components such as clean cables.

[선행기술문헌][Prior art literature]

대한민국특허등록번호 제10-1970827호(2019년04월15일등록)(발명의 명칭:무분진 클린 케이블 자켓 및 그 제조 방법)Republic of Korea Patent Registration No. 10-1970827 (registered on April 15, 2019) (Title of the invention: Dust-free clean cable jacket and manufacturing method thereof)

본 발명은 상술한 종래의 문제점을 극복하기 위한 것으로서, 본 발명의 목적은 클린 시스템용 POD의 구조를 복수개의 분리된 공간에 묶여있는 케이블 홀더를 추가적으로 감싸는 형태로 POD를 구성하여 케이블을 효과적으로 유지 및 관리할 수 있는 새로운 형태의 클린룸 자동화 설비 로봇용 무분진 케이블 시스템을 제공하는데 있다.The present invention is to overcome the above-mentioned conventional problems, and an object of the present invention is to configure the POD in the form of additionally wrapping the cable holder tied to a plurality of separate spaces to effectively maintain the cable and It is to provide a new type of controllable dust-free cable system for cleanroom automation equipment robots.

본 발명의 이러한 목적은 클린룸 환경에 최적화된 로봇용 무분진 케이블 시스템으로서, 케이블(40)을 감싸서 케이블 피복을 보호하고 유동을 잡아주는 역할을 하는 이티에프이(ETFE)(Ethylene Tetra fluoro Ethylene)) 케이블 외피(30),This object of the present invention is a dust-free cable system for robots that is optimized for a clean room environment, and it wraps the cable 40 to protect the cable sheath and hold the flow (ETFE) (Ethylene Tetra fluoro Ethylene)) cable sheath (30);

상기 ETFE 케이블 외피(30) 다발을 감싸서 묶어주고 보호하는 역할을 하는 ETFE 외피(20), 및ETFE sheath 20, which wraps around the ETFE cable sheath 30, and serves to bundle and protect the bundle, and

상기 ETFE 외피(20)의 양단부 근방에 위치하며, 상기 ETFE 케이블 외피(30)를 단단히 클램핑 하고 고정하는 역할을 하는 클램프(CLAMP)를 포함하는 로봇용 무분진 케이블 시스템을 통해 달성된다.It is achieved through a dust-free cable system for a robot that is located near both ends of the ETFE sheath 20, and includes a clamp (CLAMP) that firmly clamps and fixes the ETFE cable sheath 30 .

또한, 상기 ETFE 케이블 외피(30)는 서로 면접되어 위치된 복수개의 공압튜브(50)를 보호하고 유동을 잡아주는 역할을 하는 것을 특징으로 한다.In addition, the ETFE cable sheath 30 is characterized in that it serves to protect the plurality of pneumatic tubes 50 positioned to face each other and to hold the flow.

상술한 바와 같이, 본 발명에 따른 클린룸 자동화 설비 로봇용 무분진 케이블 시스템에 의하면, 클린 시스템용 POD의 구조를 복수개의 분리된 공간에 묶여있는 케이블 홀더를 추가적으로 감싸는 형태로 POD를 구성하여 케이블을 효과적으로 유지 및 관리할 수 있는 효과가 있다.As described above, according to the dust-free cable system for cleanroom automation equipment robots according to the present invention, the POD structure for the clean system is configured in a form that additionally wraps the cable holder tied to a plurality of separate spaces to connect the cables. It can be effectively maintained and managed.

도 1은 본 발명의 일실시 예에 따른 클린룸 자동화 설비 로봇용 무분진 케이블 시스템의 개략적인 사시도
도 2는 도 1의 부품 분리 상태를 나타낸 사시도
도 3은 도 1의 종단면도1 is a schematic perspective view of a dust-free cable system for a clean room automation facility robot according to an embodiment of the present invention;
Figure 2 is a perspective view showing a state in which the parts of Figure 1 are separated;
Fig. 3 is a longitudinal sectional view of Fig. 1;

이하, 본 발명의 바람직한 일실시 예에 따른 클린룸 자동화 설비 로봇용 무분진 케이블 시스템을 첨부한 도면을 참조하여 상세히 설명한다.Hereinafter, a dust-free cable system for a cleanroom automation facility robot according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

도 1 내지 도 3를 참조하면, 본 발명의 일실시 예에 따른 클린룸 자동화 설비 로봇용 무분진 케이블 시스템이 도시되어 있다.1 to 3 , a dust-free cable system for a clean room automation facility robot according to an embodiment of the present invention is shown.

도 1은 본 발명의 일실시 예에 따른 클린룸 자동화 설비 로봇용 무분진 케이블 시스템의 개략적인 사시도이고, 도 2는 도 1의 부품 분리 상태를 나타낸 사시도이고, 도 3은 도 1의 종단면도이다.1 is a schematic perspective view of a dust-free cable system for a cleanroom automation facility robot according to an embodiment of the present invention, FIG. 2 is a perspective view showing a state in which parts are separated in FIG. 1, and FIG. 3 is a longitudinal sectional view of FIG. .

본 발명에 따른 무분진 케이블 시스템은 클린케이블이고, 테플론 재질의 외피(10)로 구성된다.The dust-free cable system according to the present invention is a clean cable, and is composed of an outer sheath 10 made of Teflon.

또한, 클린룸 자동화 설비 로봇용 무분진 케이블 시스템은 다방향으로 구성된다.In addition, the dust-free cable system for cleanroom automation equipment robots is configured in multiple directions.

종래 반도체 검사장비(레일)이 단방향으로만 되어 있어서 작업에 불편한 문제점이 있다.Conventional semiconductor inspection equipment (rail) is only unidirectional, there is a problem inconvenient to work.

본 발명에서, 로보트 케이블 즉, 로봇용 무분진 케이블 시스템 개요에 대해 설명한다.In the present invention, an overview of the robot cable, that is, the dust-free cable system for robots will be described.

로봇용 무분진 케이블 시스템 즉, 클린룸 환경에 최적화된 무 분진 케이블에 대하여 설명한다.A dust-free cable system for robots, that is, a dust-free cable optimized for a clean room environment will be described.

먼저, 무분진 케이블 시스템이란 분진에 민감한 클린룸 공정에서 제품 불량률을 줄이기 위한 신개념 케이블베어(Cableveyor)다.First, the dust-free cable system is a new concept cableveyor to reduce the product defect rate in the dust-sensitive cleanroom process.

내마모성과 내열성이 우수한 ETFE 소재 원단으로 된 재킷(POD)에 삽입해 마모와 분진을 최소화, 무빙 동작시 케이블 간 마찰과 당김현상 최소화로 가동수명을 향상시킨 케이블 베어이다.It is a cable bear that minimizes abrasion and dust by inserting it into a jacket (POD) made of ETFE material, which has excellent abrasion resistance and heat resistance, and improves operating life by minimizing friction and pulling between cables during moving operation.

이하 본 발명에 따른 로봇용 무분진 케이블 특장점에 대하여 설명한다.Hereinafter, the features and advantages of the dust-free cable for robots according to the present invention will be described.

기존 클린케이블은 한계가 있었는데, 단방향성과 구성부품으로 쓰이는 체인의 고 하중으로 유동성이 다양한 로봇용으로 구성이 부적합한 문제점이 있었다.Existing clean cables had limitations, but there was a problem that the composition was not suitable for robots with various fluidity due to the unidirectionality and the high load of the chain used as component parts.

도 1 내지 도 3을 참조하며, 로봇용 무분진 케이블 시스템에 대하여 살펴본다.Referring to FIGS. 1 to 3, a dust-free cable system for robots will be described.

로봇용 무분진 케이블 시스템은 클린룸 환경에 최적화된 무 분진 케이블이다.The dust-free cable system for robots is a dust-free cable optimized for cleanroom environments.

즉, ETFE(Ethylene Tetra fluoro Ethylene) 케이블 외피(30)는 케이블(40)과 공압 튜브(50)를 감싸 케이블 피복을 보호하고 유동을 잡아주는 역할을 한다.That is, the ETFE (Ethylene Tetra fluoro Ethylene) cable sheath 30 wraps the cable 40 and the pneumatic tube 50 to protect the cable sheath and catch the flow.

ETFE 외피(20)는 ETFE 케이블 외피(30) 다발을 감싸 묶어주고 보호하는 역할을 한다.The ETFE sheath 20 serves to wrap and bundle the ETFE cable sheath 30 bundle and protect it.

CLAMP(10)는 로봇에 로봇용 무분진 케이블 시스템을 고정하는 역할을 한다.The CLAMP (10) serves to fix the dust-free cable system for the robot to the robot.

상기 ETFE 케이블 외피(30)내에 다수의 케이블(40)이 서로 맞닿아 면접되어 설치된다. A plurality of cables 40 are installed in contact with each other in the ETFE cable sheath 30 and face-to-face.

또한, 상기 복수개의 ETFE 케이블 외피(30)는 서로 면접되어 위치되며, 이러한 복수개의 케이블 외피(30)를 감싸는 하나의 ETFE 외피(20)로 구성되었다. 상기 ETFE 외피(20)는 양단부 근처가 클램프(10)를 통해 각각 단단히 조여지게 된다.In addition, the plurality of ETFE cable sheaths 30 are positioned to face each other, and consist of a single ETFE sheath 20 surrounding the plurality of cable sheaths 30 . The ETFE shell 20 is tightly fastened to the vicinity of both ends through the clamps 10, respectively.

상술한 바와 같이, 본 발명에 따른 클린룸 자동화 설비 로봇용 무분진 케이블 시스템에 의하면, 클린 시스템용 POD의 구조를 복수개의 분리된 공간에 묶여있는 케이블 홀더를 추가적으로 감싸는 형태로 POD를 구성하여 케이블을 효과적으로 유지 및 관리할 수 있는 효과가 있다.As described above, according to the dust-free cable system for cleanroom automation equipment robots according to the present invention, the POD structure for the clean system is configured in a form that additionally wraps the cable holder tied to a plurality of separate spaces to connect the cables. It can be effectively maintained and managed.

본 발명의 기술 사상은 상기 바람직한 실시 예에 따라 구체적으로 기술되었으나, 상기한 실시 예는 그 설명을 위한 것이며 그 제한을 위한 것이 아님을 주의하여야 한다. 또한, 본 발명의 기술 분야의 통상의 전문가라면 본 발명의 기술 사상의 범위 내에서 다양한 실시 예가 가능함을 이해할 수 있을 것이다.Although the technical idea of the present invention has been specifically described according to the above preferred embodiment, it should be noted that the above-described embodiment is for the purpose of explanation and not for limitation thereof. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical spirit of the present invention.

10. 클램프 20. ETFE 외피
30. ETFE 케이블 외피 40. 케이블
50. 공압튜브10. Clamp 20. ETFE sheath
30. ETFE cable sheath 40. Cable
50. Pneumatic tube

Claims (2)

클린룸 환경에 최적화된 로봇용 무분진 케이블 시스템으로서,
케이블(40)을 감싸서 케이블 피복을 보호하고 유동을 잡아주는 역할을 하는 이티에프이(ETFE)(Ethylene Tetra fluoro Ethylene) 케이블 외피(30),
상기 ETFE 케이블 외피(30) 다발을 감싸서 묶어주고 보호하는 역할을 하는 ETFE 외피(20), 및
상기 ETFE 외피(20)의 양단부 근방에 위치하며, 상기 ETFE 케이블 외피(30)를 단단히 클램핑하고 고정하는 역할을 하는 클램프(CLAMP)를 포함하는 클린룸 자동화 설비 로봇용 무분진 케이블 시스템.
As a dust-free cable system for robots optimized for cleanroom environments,
Ethylene Tetra fluoro Ethylene (ETFE) cable sheath 30 that wraps the cable 40 to protect the cable sheath and hold the flow;
ETFE sheath 20, which wraps around the ETFE cable sheath 30, and serves to bundle and protect the bundle, and
A dust-free cable system for a cleanroom automation facility robot, which is located near both ends of the ETFE sheath 20 and includes a clamp that firmly clamps and fixes the ETFE cable sheath 30 .
 제 1 항에 있어서,
상기 ETFE 케이블 외피(30)는 서로 면접되어 위치된 복수개의 공압튜브(50)를 보호하고 유동을 잡아주는 역할을 하는 것을 특징으로 하는 클린룸 자동화 설비 로봇용 무분진 케이블 시스템.The method of claim 1,
The ETFE cable sheath 30 protects the plurality of pneumatic tubes 50 located in an interview with each other and serves to hold the flow.
KR1020200085179A 2020-07-10 2020-07-10 Non-dust cable system for clean room automation system robot KR102570282B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010052564A1 (en) * 2000-06-15 2001-12-20 Stefan Karlinger Apparatus for fixing a cable guidance hose
KR20170006258A (en) * 2015-07-07 2017-01-17 히타치 긴조쿠 가부시키가이샤 Flat cable for wiring of operation department
KR20170082102A (en) * 2016-01-05 2017-07-13 엘에스전선 주식회사 Multi tube for cables support apparatus and cables support apparatus comprising the same
KR102029308B1 (en) * 2019-02-25 2019-10-07 주식회사 토마스 케이블 A cables by using heat contractibility meterial

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010052564A1 (en) * 2000-06-15 2001-12-20 Stefan Karlinger Apparatus for fixing a cable guidance hose
KR20170006258A (en) * 2015-07-07 2017-01-17 히타치 긴조쿠 가부시키가이샤 Flat cable for wiring of operation department
KR20170082102A (en) * 2016-01-05 2017-07-13 엘에스전선 주식회사 Multi tube for cables support apparatus and cables support apparatus comprising the same
KR102029308B1 (en) * 2019-02-25 2019-10-07 주식회사 토마스 케이블 A cables by using heat contractibility meterial

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