KR20210134605A - 반사형 마스크 블랭크, 반사형 마스크 및 그 제조 방법, 그리고 반도체 장치의 제조 방법 - Google Patents

반사형 마스크 블랭크, 반사형 마스크 및 그 제조 방법, 그리고 반도체 장치의 제조 방법 Download PDF

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Publication number
KR20210134605A
KR20210134605A KR1020217020635A KR20217020635A KR20210134605A KR 20210134605 A KR20210134605 A KR 20210134605A KR 1020217020635 A KR1020217020635 A KR 1020217020635A KR 20217020635 A KR20217020635 A KR 20217020635A KR 20210134605 A KR20210134605 A KR 20210134605A
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KR
South Korea
Prior art keywords
film
reflective mask
absorber
mask blank
reflective
Prior art date
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Ceased
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KR1020217020635A
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English (en)
Korean (ko)
Inventor
미즈끼 카따오까
Original Assignee
호야 가부시키가이샤
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Publication date
Application filed by 호야 가부시키가이샤 filed Critical 호야 가부시키가이샤
Publication of KR20210134605A publication Critical patent/KR20210134605A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • G03F1/24—Reflection masks; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020217020635A 2019-03-13 2020-03-06 반사형 마스크 블랭크, 반사형 마스크 및 그 제조 방법, 그리고 반도체 장치의 제조 방법 Ceased KR20210134605A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019046108 2019-03-13
JPJP-P-2019-046108 2019-03-13
PCT/JP2020/009828 WO2020184473A1 (ja) 2019-03-13 2020-03-06 反射型マスクブランク、反射型マスク及びその製造方法、並びに半導体装置の製造方法

Publications (1)

Publication Number Publication Date
KR20210134605A true KR20210134605A (ko) 2021-11-10

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Application Number Title Priority Date Filing Date
KR1020217020635A Ceased KR20210134605A (ko) 2019-03-13 2020-03-06 반사형 마스크 블랭크, 반사형 마스크 및 그 제조 방법, 그리고 반도체 장치의 제조 방법

Country Status (6)

Country Link
US (1) US20220091498A1 (https=)
JP (1) JPWO2020184473A1 (https=)
KR (1) KR20210134605A (https=)
SG (1) SG11202107980SA (https=)
TW (1) TW202044339A (https=)
WO (1) WO2020184473A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230103925A (ko) * 2021-12-31 2023-07-07 에스케이엔펄스 주식회사 블랭크 마스크 및 이를 이용한 포토마스크
KR20240024293A (ko) * 2022-07-05 2024-02-23 에이지씨 가부시키가이샤 반사형 마스크 블랭크, 반사형 마스크, 반사형 마스크 블랭크의 제조 방법, 및 반사형 마스크의 제조 방법

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* Cited by examiner, † Cited by third party
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CN113238455B (zh) 2020-05-22 2024-12-20 台湾积体电路制造股份有限公司 Euv光掩模及其制造方法
US11829062B2 (en) * 2020-05-22 2023-11-28 Taiwan Semiconductor Manufacturing Company, Ltd. EUV photo masks and manufacturing method thereof
JP6966013B1 (ja) * 2020-10-14 2021-11-10 凸版印刷株式会社 反射型マスク及び反射型マスクの製造方法
JP7346527B2 (ja) * 2021-11-25 2023-09-19 Hoya株式会社 マスクブランク、転写用マスク、マスクブランクの製造方法、転写用マスクの製造方法、及び表示装置の製造方法
JP7482197B2 (ja) * 2021-12-31 2024-05-13 エスケー エンパルス カンパニー リミテッド ブランクマスク及びそれを用いたフォトマスク
WO2023190360A1 (ja) * 2022-04-01 2023-10-05 Ａｇｃ株式会社 反射型マスクブランク、反射型マスク、反射型マスクブランクの製造方法、および反射型マスクの製造方法
WO2024009809A1 (ja) * 2022-07-05 2024-01-11 Ａｇｃ株式会社 反射型マスクブランク、反射型マスク、反射型マスクブランクの製造方法、および反射型マスクの製造方法
JP2024142177A (ja) * 2023-03-29 2024-10-10 Hoya株式会社 反射型マスクブランク及び反射型マスク、並びに反射型マスク及び半導体装置の製造方法
TWI880298B (zh) * 2023-04-03 2025-04-11 韓商Ｓ＆Ｓ技術股份有限公司 具有吸收膜之用於ｅｕｖ微影的空白遮罩及使用其製造的光遮罩
JP7681153B1 (ja) 2024-04-11 2025-05-21 テクセンドフォトマスク株式会社 反射型フォトマスクブランク、反射型フォトマスク及び反射型フォトマスクの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
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JP2004039884A (ja) 2002-07-04 2004-02-05 Hoya Corp 反射型マスクブランクス及び反射型マスク並びに反射型マスクの製造方法
JP2007273678A (ja) 2006-03-31 2007-10-18 Hoya Corp 反射型マスクブランクス及び反射型マスク並びに半導体装置の製造方法
JP2009099931A (ja) 2007-09-27 2009-05-07 Toppan Printing Co Ltd 反射型フォトマスクブランク及びその製造方法、反射型フォトマスク及びその製造方法並びに半導体素子の製造方法

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JP3078163B2 (ja) * 1993-10-15 2000-08-21 キヤノン株式会社 リソグラフィ用反射型マスクおよび縮小投影露光装置
WO2006030627A1 (ja) * 2004-09-17 2006-03-23 Asahi Glass Company, Limited Ｅｕｖリソグラフィ用反射型マスクブランクスおよびその製造方法
JP5332741B2 (ja) * 2008-09-25 2013-11-06 凸版印刷株式会社 反射型フォトマスク
JP6223756B2 (ja) * 2013-09-10 2017-11-01 Hoya株式会社 多層反射膜付き基板、ｅｕｖリソグラフィー用反射型マスクブランク、ｅｕｖリソグラフィー用反射型マスク及びその製造方法、並びに半導体装置の製造方法
TWI774375B (zh) * 2016-07-27 2022-08-11 美商應用材料股份有限公司 具多層吸收劑的極紫外遮罩坯料及製造方法
JP6861095B2 (ja) * 2017-03-03 2021-04-21 Hoya株式会社 反射型マスクブランク、反射型マスク及び半導体装置の製造方法
KR102666821B1 (ko) * 2017-07-05 2024-05-16 가부시키가이샤 토판 포토마스크 반사형 포토마스크 블랭크 및 반사형 포토마스크
JP6863169B2 (ja) * 2017-08-15 2021-04-21 Ａｇｃ株式会社 反射型マスクブランク、および反射型マスク
JP6965833B2 (ja) * 2017-09-21 2021-11-10 Ａｇｃ株式会社 反射型マスクブランク、反射型マスク及び反射型マスクブランクの製造方法
JP7263908B2 (ja) * 2018-06-13 2023-04-25 Ａｇｃ株式会社 反射型マスクブランク、反射型マスク及び反射型マスクブランクの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004039884A (ja) 2002-07-04 2004-02-05 Hoya Corp 反射型マスクブランクス及び反射型マスク並びに反射型マスクの製造方法
JP2007273678A (ja) 2006-03-31 2007-10-18 Hoya Corp 反射型マスクブランクス及び反射型マスク並びに半導体装置の製造方法
JP2009099931A (ja) 2007-09-27 2009-05-07 Toppan Printing Co Ltd 反射型フォトマスクブランク及びその製造方法、反射型フォトマスク及びその製造方法並びに半導体素子の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230103925A (ko) * 2021-12-31 2023-07-07 에스케이엔펄스 주식회사 블랭크 마스크 및 이를 이용한 포토마스크
KR20240024293A (ko) * 2022-07-05 2024-02-23 에이지씨 가부시키가이샤 반사형 마스크 블랭크, 반사형 마스크, 반사형 마스크 블랭크의 제조 방법, 및 반사형 마스크의 제조 방법

Also Published As

Publication number Publication date
US20220091498A1 (en) 2022-03-24
JPWO2020184473A1 (https=) 2020-09-17
TW202044339A (zh) 2020-12-01
SG11202107980SA (en) 2021-09-29
WO2020184473A1 (ja) 2020-09-17

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Patent event date: 20210701

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