KR20210070931A - 측정 방법, 관리 방법 및 광학 부품의 제조 방법 - Google Patents
측정 방법, 관리 방법 및 광학 부품의 제조 방법 Download PDFInfo
- Publication number
- KR20210070931A KR20210070931A KR1020200167750A KR20200167750A KR20210070931A KR 20210070931 A KR20210070931 A KR 20210070931A KR 1020200167750 A KR1020200167750 A KR 1020200167750A KR 20200167750 A KR20200167750 A KR 20200167750A KR 20210070931 A KR20210070931 A KR 20210070931A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- member layer
- laminate
- distance
- laminated body
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims description 147
- 238000007726 management method Methods 0.000 title claims description 67
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 238000000691 measurement method Methods 0.000 title claims description 4
- 238000000034 method Methods 0.000 claims abstract description 94
- 238000007689 inspection Methods 0.000 claims abstract description 50
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000004364 calculation method Methods 0.000 claims abstract description 7
- 239000010410 layer Substances 0.000 claims description 236
- 239000011347 resin Substances 0.000 claims description 70
- 229920005989 resin Polymers 0.000 claims description 70
- 239000011248 coating agent Substances 0.000 claims description 67
- 238000000576 coating method Methods 0.000 claims description 67
- 239000000853 adhesive Substances 0.000 claims description 43
- 239000011247 coating layer Substances 0.000 claims description 40
- 238000003475 lamination Methods 0.000 claims description 32
- 230000001070 adhesive effect Effects 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 29
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract 1
- 239000012790 adhesive layer Substances 0.000 description 27
- 238000003384 imaging method Methods 0.000 description 23
- 238000005259 measurement Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 230000001681 protective effect Effects 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 229920002284 Cellulose triacetate Polymers 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229920003050 poly-cycloolefin Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920001289 polyvinyl ether Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8411—Application to online plant, process monitoring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8427—Coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8438—Mutilayers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Coating Apparatus (AREA)
- Polarising Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2019-220647 | 2019-12-05 | ||
| JP2019220647A JP7460359B2 (ja) | 2019-12-05 | 2019-12-05 | 測定方法、管理方法及び光学部品の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20210070931A true KR20210070931A (ko) | 2021-06-15 |
Family
ID=76162619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020200167750A KR20210070931A (ko) | 2019-12-05 | 2020-12-03 | 측정 방법, 관리 방법 및 광학 부품의 제조 방법 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7460359B2 (zh) |
| KR (1) | KR20210070931A (zh) |
| CN (1) | CN112924457A (zh) |
| TW (1) | TW202129254A (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000024565A (ja) | 1998-07-14 | 2000-01-25 | Toray Eng Co Ltd | 回転ロール型塗工装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4810809B2 (ja) * | 2004-08-11 | 2011-11-09 | 株式会社村田製作所 | 積層セラミック電子部品の製造方法及び製造装置 |
| JP4613086B2 (ja) | 2005-03-25 | 2011-01-12 | 倉敷紡績株式会社 | 欠陥検査装置 |
| JP6774641B2 (ja) | 2016-04-27 | 2020-10-28 | 大日本印刷株式会社 | 塗布装置および塗布方法 |
| JP6752483B2 (ja) | 2016-05-24 | 2020-09-09 | エリーパワー株式会社 | 電気化学セル用電極の端部位置検出システムおよび製造方法 |
| JP2019141822A (ja) | 2018-02-23 | 2019-08-29 | 株式会社Ｓｃｒｅｅｎホールディングス | 塗工膜測定装置、塗工膜測定方法、塗工装置および塗工方法 |
| JP7090447B2 (ja) | 2018-03-22 | 2022-06-24 | 株式会社キーエンス | 画像処理装置 |
-
2019
- 2019-12-05 JP JP2019220647A patent/JP7460359B2/ja active Active
-
2020
- 2020-11-23 TW TW109140977A patent/TW202129254A/zh unknown
- 2020-11-27 CN CN202011367256.8A patent/CN112924457A/zh active Pending
- 2020-12-03 KR KR1020200167750A patent/KR20210070931A/ko active Search and Examination
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000024565A (ja) | 1998-07-14 | 2000-01-25 | Toray Eng Co Ltd | 回転ロール型塗工装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2021089240A (ja) | 2021-06-10 |
| TW202129254A (zh) | 2021-08-01 |
| CN112924457A (zh) | 2021-06-08 |
| JP7460359B2 (ja) | 2024-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination |