KR20210052143A - 열처리 장치 - Google Patents

열처리 장치 Download PDF

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Publication number
KR20210052143A
KR20210052143A KR1020200028164A KR20200028164A KR20210052143A KR 20210052143 A KR20210052143 A KR 20210052143A KR 1020200028164 A KR1020200028164 A KR 1020200028164A KR 20200028164 A KR20200028164 A KR 20200028164A KR 20210052143 A KR20210052143 A KR 20210052143A
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KR
South Korea
Prior art keywords
door
tube
support member
opening
support
Prior art date
Application number
KR1020200028164A
Other languages
English (en)
Korean (ko)
Inventor
유야 나카니시
요헤이 쓰지모토
마사히로 니시오카
게이타 아오야기
나오키 나카쿠보
가쓰히사 가사나미
마코토 아사노
Original Assignee
고요 써모 시스템 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고요 써모 시스템 가부시끼 가이샤 filed Critical 고요 써모 시스템 가부시끼 가이샤
Publication of KR20210052143A publication Critical patent/KR20210052143A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F27D1/1858—Doors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Details (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Heat Treatment Of Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020200028164A 2019-10-31 2020-03-06 열처리 장치 KR20210052143A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-199264 2019-10-31
JP2019199264A JP7386045B2 (ja) 2019-10-31 2019-10-31 熱処理装置

Publications (1)

Publication Number Publication Date
KR20210052143A true KR20210052143A (ko) 2021-05-10

Family

ID=75645138

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200028164A KR20210052143A (ko) 2019-10-31 2020-03-06 열처리 장치

Country Status (4)

Country Link
JP (1) JP7386045B2 (ja)
KR (1) KR20210052143A (ja)
CN (1) CN112747601A (ja)
TW (1) TW202119501A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7339853B2 (ja) * 2019-10-31 2023-09-06 株式会社ジェイテクトサーモシステム 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014053550A (ja) 2012-09-10 2014-03-20 Koyo Thermo System Kk 熱処理装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2533708Y2 (ja) * 1987-11-28 1997-04-23 東京エレクトロン東北 株式会社 処理チューブの開閉装置
JP2639723B2 (ja) * 1988-02-05 1997-08-13 東京エレクトロン株式会社 ボート搬送方法及び熱処理装置
JPH0734318Y2 (ja) * 1990-05-21 1995-08-02 石川島播磨重工業株式会社 ガス雰囲気炉における加熱室の扉開閉機構
JP4354371B2 (ja) * 2004-09-08 2009-10-28 Ｄｏｗａホールディングス株式会社 金属材料の表面改質熱処理装置
JP5091296B2 (ja) * 2010-10-18 2012-12-05 東京エレクトロン株式会社 接合装置
JP5681253B1 (ja) * 2013-09-13 2015-03-04 中外炉工業株式会社 管材の熱処理装置
JP6263407B2 (ja) * 2014-02-10 2018-01-17 光洋サーモシステム株式会社 熱処理装置
JP6839009B2 (ja) * 2017-03-22 2021-03-03 Ykk Ap株式会社 換気装置及び建具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014053550A (ja) 2012-09-10 2014-03-20 Koyo Thermo System Kk 熱処理装置

Also Published As

Publication number Publication date
TW202119501A (zh) 2021-05-16
JP7386045B2 (ja) 2023-11-24
JP2021071260A (ja) 2021-05-06
CN112747601A (zh) 2021-05-04

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E601 Decision to refuse application