KR20210007973A - 플라즈마에 의해 반사된 전력을 결정하기 위한 장치 및 방법 - Google Patents

플라즈마에 의해 반사된 전력을 결정하기 위한 장치 및 방법 Download PDF

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Publication number
KR20210007973A
KR20210007973A KR1020207031938A KR20207031938A KR20210007973A KR 20210007973 A KR20210007973 A KR 20210007973A KR 1020207031938 A KR1020207031938 A KR 1020207031938A KR 20207031938 A KR20207031938 A KR 20207031938A KR 20210007973 A KR20210007973 A KR 20210007973A
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KR
South Korea
Prior art keywords
frequency
variable
plasma
signal
high frequency
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Application number
KR1020207031938A
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English (en)
Korean (ko)
Inventor
크리스티안 보크
사이 가우탐 자나키 프레무마르
Original Assignee
트럼프 헛팅거 게엠베하 + 코 카게
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Application filed by 트럼프 헛팅거 게엠베하 + 코 카게 filed Critical 트럼프 헛팅거 게엠베하 + 코 카게
Publication of KR20210007973A publication Critical patent/KR20210007973A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
KR1020207031938A 2018-05-15 2019-05-10 플라즈마에 의해 반사된 전력을 결정하기 위한 장치 및 방법 KR20210007973A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102018111562.8 2018-05-15
DE102018111562.8A DE102018111562A1 (de) 2018-05-15 2018-05-15 Vorrichtung und Verfahren zur Ermittlung einer von einem Plasma reflektierten elektrischen Leistung
PCT/EP2019/062065 WO2019219537A1 (de) 2018-05-15 2019-05-10 Vorrichtung und verfahren zur ermittlung einer von einem plasma reflektierten elektrischen leistung

Publications (1)

Publication Number Publication Date
KR20210007973A true KR20210007973A (ko) 2021-01-20

Family

ID=66690297

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207031938A KR20210007973A (ko) 2018-05-15 2019-05-10 플라즈마에 의해 반사된 전력을 결정하기 위한 장치 및 방법

Country Status (4)

Country Link
JP (1) JP7443347B2 (ja)
KR (1) KR20210007973A (ja)
DE (1) DE102018111562A1 (ja)
WO (1) WO2019219537A1 (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5748204B2 (ja) 2011-03-03 2015-07-15 株式会社ダイヘン 高周波電源装置
DE102011080035A1 (de) * 2011-07-28 2013-01-31 Hüttinger Elektronik Gmbh + Co. Kg Verfahren und Vorrichtung zum Schutz von an einen Hochfrequenzgenerator angeschlossenen passiven Komponenten
JP5935116B2 (ja) 2011-12-16 2016-06-15 東京エレクトロン株式会社 プラズマ処理装置
EP3029711B1 (en) * 2014-12-03 2019-10-16 Comet AG Frequency tuning of a RF-generator within a plasma process

Also Published As

Publication number Publication date
JP2021524147A (ja) 2021-09-09
WO2019219537A1 (de) 2019-11-21
JP7443347B2 (ja) 2024-03-05
DE102018111562A1 (de) 2019-11-21

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