KR20200145056A - A deposition apparatus - Google Patents

Abstract

A deposition device system according to one embodiment of the present invention can comprise: a vacuum chamber; at least one viewport provided on one surface of the vacuum chamber; a deposition device accommodated in the vacuum chamber and including a crucible having a deposition raw material accommodated therein, a heater unit for heating the crucible, and at least one nozzle through which a deposition material evaporated from the deposition raw material passes; a camera which is positioned outside the viewport and photographs the nozzle through the viewport; a laser which is positioned outside the viewport and outputs a laser beam toward the nozzle through the viewport; a laser moving means for moving, toward one point of the nozzle, the laser beam output from the laser; and a control part for receiving a nozzle image photographed by the camera and controlling the operations of the laser and the laser moving means according to the result of having sensed clogging in the nozzle image. According to the present invention, it is possible to shorten the time required for a deposition process.

Description

Evaporation system {A DEPOSITION APPARATUS}

The present invention relates to a deposition apparatus system for depositing a deposition material onto an object to be deposited, and more particularly, to a deposition apparatus system capable of quickly detecting and effectively preventing an initial clogging phenomenon of a nozzle from which a deposition material is discharged.

Deposition is a method of depositing gaseous particles onto the surface of an object such as metal or glass.

Recently, as the use of OLED (Organic Light Emitting Diodes) displays in electronic devices such as TVs and mobile phones increases, research on devices for manufacturing OLED display panels is active. In particular, the OLED display panel manufacturing process includes a process of depositing an organic material on a glass substrate in a vacuum state.

Specifically, the deposition process includes a process of evaporating an organic material to a gaseous state by heating a crucible containing an organic material, and a process of depositing the organic material in a gaseous state on a substrate through a nozzle.

However, during the deposition process, a gaseous organic material may not move to the substrate, and may be deposited around a nozzle to form a film, or a clogging phenomenon may occur in which a hole of the nozzle is blocked.

When the clogging phenomenon occurs, the organic material is unevenly deposited on the glass substrate, or when the clogging phenomenon seriously occurs, there is a problem in that the deposition process must be stopped to clean the nozzle.

Korean Patent Laid-Open No. 2015-0114098 (applied on March 31, 2014) relates to a linear evaporation source from which a heater is detached, a first heater unit detachable from the nozzle of a crucible, and a second heater corresponding to the upper and lower sides of the crucible. It has a part and a third heater part.

As the second heater and the third heater respectively heat the upper and lower portions of the crucible, the deposition material filled in the lower portion of the crucible is evaporated from the top of the crucible, and the first heater unit heats the nozzle of the crucible, thereby evaporating the deposition material from the crucible. When sprayed through the nozzle of this crucible, it is possible to increase the temperature uniformity of the deposition material.

Therefore, when the clogging phenomenon occurs during the deposition process, the temperature of the first heater is increased to melt the organic material around the nozzle, thereby suppressing the clogging phenomenon.

However, according to the prior art, it is difficult to detect the occurrence of a clogging phenomenon around a nozzle at an early stage, and it is difficult to respond quickly.

In addition, when the first heater unit is operated by sensing the clogging phenomenon, the evaporation amount of the evaporation material emitted from the nozzle may be excessively increased temporarily, and there is a problem that may affect the quality of the OLED display manufactured by the deposition process. .

In addition, when it is necessary to remove the first heater unit on the nozzle side in order to detach the crucible, there is a problem that many disconnections of the first heater unit occur.

In addition, when the first heater unit is operated to suppress clogging, the amount of heat discharged through the entire nozzle increases, and the temperature of the display substrate inside the vacuum chamber increases. To prevent this, a separate cooling device must be provided. have.

The present invention was devised to solve the problems of the prior art described above, and quickly detects the initial clogging phenomenon of the nozzle from which the deposition material is discharged, and effectively prevents the clogging phenomenon within a range that does not affect the deposition process. Its purpose is to provide a vapor deposition apparatus system capable of.

A deposition apparatus system according to an embodiment of the present invention includes a vacuum chamber; At least one viewport provided on one surface of the vacuum chamber; A deposition apparatus including a crucible accommodated in the vacuum chamber and receiving a deposition material, a heater unit for heating the crucible, and at least one nozzle through which deposition material evaporated from the deposition material passes; A camera located outside the viewport and photographing the nozzle through the viewport; A laser positioned outside the viewport and outputting a laser beam toward the nozzle through the viewport; Laser moving means for moving the laser beam output from the laser to a point of the nozzle; And a control unit for receiving the nozzle image photographed by the camera and controlling the operation of the laser and the laser moving means according to a result of detecting clogging in the nozzle image.

The viewport may include a first viewport, which is a transparent window on which the camera is installed, and a second viewport, which is a transparent window provided adjacent to the first viewport and on which the laser is installed.

The viewport further includes a first coating layer coated on the first viewport to prevent reflection of light incident from the camera, and a second coating layer coated on the second viewport to transmit the laser beam irradiated from the laser. Can include.

The deposition apparatus system of the present invention may further include a lighting unit located outside the viewport and irradiating light toward the nozzle through the viewport.

The illumination unit may irradiate light having a wavelength of a specific band that increases the luminance of the deposition material.

The viewport may further include a third viewport that is provided adjacent to the first viewport and is a transparent window on which the lighting unit is installed.

The viewport may further include a third coating layer coated on the third viewport to transmit light irradiated from the lighting unit.

The laser moving means may include a reflector for reflecting the laser beam of the laser toward the nozzle, and a rotation motor for adjusting an angle of the reflector.

The control unit may control the output intensity and time of the laser beam according to the degree of clogging of the nozzle.

The deposition apparatus system of the present invention may further include a glass that is interchangeably provided between the viewport and the nozzle and protects the viewport from the deposition material.

It is preferable that the glass is disposed closer to the viewport than the nozzle.

The deposition apparatus system of the present invention may further include a shutter unit provided to be openable and closed between the viewport and the nozzle, and to protect the viewport from the deposition material.

The shutter unit may include a shutter that is provided to face at least a portion of the viewport, opens and closes a view of the viewport, and a shutter driver that controls movement of the shutter.

It is preferable that the shutter is disposed closer to the viewport than the nozzle.

The control unit may control an operation of the shutter driving unit so that the shutter opens a field of view of the viewport when at least one of the camera, the illumination unit, and the laser is operated.

The deposition apparatus system of the present invention may further include a monitor displaying a nozzle image photographed by the camera.

When the control unit detects clogging in the nozzle image, the control unit may generate an alarm in the monitor.

According to an embodiment of the present invention, the camera monitors the nozzle from which the deposition material is discharged in real time, so that the initial clogging of the nozzle can be quickly detected, and it is possible to respond quickly.

Further, by supplying thermal energy to a desired position on the nozzle side, the initial clogging of the nozzle can be quickly eliminated, and the clogging phenomenon can be prevented. Accordingly, it is possible to shorten the deposition process time and prevent waste of the deposition material.

In addition, apart from the heater unit for generating the deposition material, the laser supplies thermal energy only to a point where the initial clogging of the nozzle occurs, so that the evaporation amount of the deposition material is uniformly maintained and the clogging phenomenon can be prevented. Therefore, it is possible to stably maintain the quality of the OLED display manufactured by the deposition process.

In addition, since a camera and a laser are provided outside the vacuum chamber, it can be easily applied to existing products without modification of the deposition apparatus, and cost can be reduced.

1 to 2 are views schematically showing the interior of a vacuum chamber of a deposition apparatus system according to an embodiment of the present invention as viewed from the top and the front.
3 is an exploded perspective view showing a deposition apparatus according to an embodiment of the present invention.
Figure 4 is a schematic configuration diagram of a clogging prevention module according to an embodiment of the present invention.
5 and 6 are a perspective view and a side view showing an upper portion of the anti-clogging module applicable to FIG. 4.
7A and 7B are nozzle images displayed on a monitor before/after removing clogging by the clogging prevention module according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings with respect to the present embodiment will be described in detail.

1 to 2 are views schematically showing a view of the inside of a vacuum chamber of a deposition apparatus system according to an embodiment of the present invention as viewed from the top and the front.

The deposition apparatus system according to an embodiment of the present invention includes a vacuum chamber 1 as shown in FIGS. 1 to 2, a deposition apparatus 100 installed to be transportable inside the vacuum chamber 1, and a vacuum chamber. (1) It may include a clogging detection removal module 200 that is detachably provided on the upper side.

The support part 10 is provided in the lower part of the inside of the vacuum chamber 1, the first and second driving parts 11 and 12 are disposed on both sides of the support part 10 in an elongated front and rear direction, and the third driving part 13 is It is disposed elongated in both directions so as to cross the first and second driving units 11 and 12, and the deposition apparatus 100 may be provided on the third driving unit 13.

The first and second driving units 11 and 12 are configured to move the deposition apparatus 100 and the third driving unit 13 in the front and rear direction of the vacuum chamber 1, and the third driving unit 13 is a deposition apparatus ( 100) may be configured to be able to move in both directions of the vacuum chamber 1.

At least one to-be-deposited (14, 15) may be mounted inside the vacuum chamber (1), which is fixed to the upper side of the deposition apparatus (100) by an aligner (16) provided on the ceiling of the vacuum chamber (1). I can. Of course, the deposits 14 and 15 may be variously configured, including a glass substrate.

Accordingly, the deposition apparatus 100 is moved in the front and rear directions of the vacuum chamber 1 by the first and second driving units 11 and 12, or in both directions of the vacuum chamber 1 by the third driving unit 13 During the process, a deposition material emitted from the deposition apparatus 100 may be deposited on at least one of the deposition targets 14 and 15.

As described above, the deposition apparatus 100 is moved, and the deposition process is performed in an in-line manner in which the deposition targets 14 and 15 are fixed, or conversely, the deposition targets 14 and 15 are moved, and the deposition device ( The deposition process may be performed in a cluster method in which 100) is fixed, and is not limited.

3 is an exploded perspective view illustrating a deposition apparatus according to an embodiment of the present invention.

The deposition apparatus 100 applied to the present invention includes a crucible 110 in which a deposition material is accommodated, a heater 120 provided to surround the crucible 110, and a heater 120 as shown in FIG. 3. A cooling unit 130 provided to surround it, a nozzle cover 140 disposed on an upper surface of the crucible 110, and a guide 150 disposed on an upper surface of the nozzle cover 140 may be included.

The crucible 110 has a shape of a container with an open top surface, can accommodate a deposition material, can be heated by the heater 120, and evaporate the deposition material into a deposition material.

The deposition material is a material filled in the crucible 110, and the deposition material is a material evaporated in the crucible 110, and the deposition material and the deposition material are the same, and for convenience of explanation, a material in a liquid/solid state and a material in a gas state Since it is only a name to distinguish between, there is no need to be limited.

At least one nozzle 111 may be positioned on the crucible 110, and the nozzle 111 may be formed in various shapes such as holes and slits through which the deposition material can pass. The crucible 110 is elongated in the front-rear direction inside the vacuum chamber (1: shown in Fig. 2), and the nozzles 111 are spaced apart at a predetermined distance in the front-rear direction inside the vacuum chamber (1: shown in Fig. 2) Can be arranged.

The heater unit 120 may include a heater frame accommodating the crucible 110, a heater generating heat toward the crucible 110, and a reflector reflecting heat generated from the heater toward the crucible 110. The heater frame is installed to surround the crucible 110, the reflector is mounted inside the heater frame, and the heater is mounted inside the reflector, so that the heater may be installed closest to the crucible 110.

The cooling unit 130 may accommodate the heater unit 120 and may be configured as a type of heat insulation unit that minimizes the heat emitted from the heater unit 120 from being leaked to the outside.

The nozzle cover 140 is a cover covering the periphery of the nozzle 111 formed on the crucible 110, and may be located between the upper portion of the crucible 110 and the lower portion of the guide 150. The nozzle cover 140 minimizes the transfer of heat formed in the crucible 110 to the guide 150, so that the guide 150 is heated to minimize the effect on the deposits 14 and 15 (shown in FIG. 2). I can.

The guide 150 guides the deposition material discharged from the nozzle 111, guides the deposition material toward the deposition targets 14 and 15 (shown in FIG. 2), and the deposition targets 14 and 15: shown in FIG. ) To be uniformly deposited.

The guide 150 can minimize the effect of the deposition material on the vacuum chamber 1, and the incident angle at which the material sprayed from the nozzle 111 is deposited on the deposited objects 14 and 15 (shown in FIG. 2) Can be limited.

4 is a schematic configuration diagram of a clogging prevention module according to an embodiment of the present invention, and FIGS. 5 and 6 are a perspective view and a side view illustrating an upper portion of the clogging prevention module applicable to FIG. 4.

The anti-clogging module 200 applied to the present invention may be mounted on the upper part of the vacuum chamber 1 in a module form, and the clogging generated in the nozzles 141 and 142 inside the vacuum chamber 1 is prevented from the vacuum chamber 1 It can be detected from the outside of the device and removed at the same time.

Of course, the installation location of the clogging prevention module 200 is not limited to the upper side inside the vacuum chamber 1, and is preferably provided inside the vacuum chamber 1 on one side opposite to the deposition apparatus 100, and vacuum It may be installed on both sides or below the chamber 1.

The clogging prevention module 200 includes a viewport (V1, V2, V3), a camera 210, an illumination unit 221, 222, a laser 230, and a laser moving means as shown in FIGS. 4 to 6 240), shutter units 251, 252, 253, a control unit 260, and a monitor 270 may be further included.

The viewports V1, V2, and V3 are provided in a form capable of transmitting light having a wavelength of a specific band, and at least one or more viewports may be provided on the upper surface of the vacuum chamber 1.

The first viewport V1 is a form capable of transmitting light having a wavelength suitable for the camera 210, and is provided at a position where the camera 210 is installed, and a first coating layer is provided on the outer surface of the first viewport V1. C1) can be formed. The first coating layer C1 may be an anti-reflective coating layer, and the first coating layer C1 reduces the amount of reflection even when the light from the camera 210 is incident, so that an image may be formed on the camera 210. To be.

The second viewport V2 may be provided at a position where the lighting units 221 and 222 are installed, and a second coating layer C2 may be formed on the outer surface of the second viewport V2. The second coating layer C2 may be a coating layer that allows only light of a specific band wavelength to pass, and allows the wavelength of light irradiated from the illumination units 221 and 222 to be transmitted.

The third viewport V3 may be provided at a position where the laser 230 is installed, and a third coating layer C3 may be formed on the outer surface of the third viewport V3. The third coating layer C3 may be a coating layer that allows the laser beam to pass therethrough, and allows the laser beam irradiated from the laser 230 to pass therethrough.

The first, second, and third viewports V1, V2, and V3 may each have a coating added as necessary, and are not limited thereto.

The first, second, and third viewports V1, V2, and V3 are all provided in close proximity. The first viewport V1 may be provided between a pair of second viewports V2, and the third viewport V3 ) May be provided on one side of the first viewport V1, but is not limited thereto.

The first, second, and third viewports (V1, V2, V3) can be easily contaminated by the evaporation material during evaporation. To prevent this, the first, second, and third view ports (V1, V2, V3) can be replaced separately. First, second, and third glasses G1, G2, and G3 may be provided.

The 1st, 2nd, 3rd glass (G1, G2, G3) is positioned to face the inside of the 1st, 2nd, 3rd viewport (V1, V2, V3), and the 1st, 2nd, 3rd viewport (V1) than the nozzle 111 ,V2,V3) is preferably located closer.

Each supporter member capable of supporting the first, second, and third glasses G1, G2, G3 inside the vacuum chamber 1 may be provided, and the first, second, and third glasses G1, G2, G3) can be replaced with new ones.

The camera 210 is installed outside the vacuum chamber, that is, outside the first viewport V1 toward the nozzle 111, and at least one nozzle 111 may be photographed at each preset period.

The camera 210 may be a vision camera capable of accurately photographing the nozzle 111 located inside the vacuum chamber 1 even outside the vacuum chamber 1, but is not limited thereto.

In addition, the camera 210 may communicate with the controller 260 by wireless or wired communication, and may transmit a nozzle image captured by the camera 210 to the controller 260.

The lighting units 221 and 222 may be interlocked with the camera 210, and the brightness around the nozzle 111 may be adjusted so that the camera 210 clearly photographs the nozzle 111. A pair of lighting units 221 and 222 are provided on both sides of the camera 210, and light may be irradiated toward the nozzle 111.

The lighting units 221 and 222 may irradiate light having a wavelength of a specific band, and the light may increase the luminance of the deposition material clogged to the nozzle 111 to cause fluorescence or phosphorescence. According to an embodiment, the lighting units 221 and 222 may be configured in the form of ultra violet (UV) light, and when UV light is illuminated, an organic material used in the OLED display manufacturing process may be fluorescent or phosphorescent, but is not limited thereto.

The laser 230 is configured to output a laser beam toward the nozzle 111, and the laser beam may supply thermal energy to the clogged portion of the nozzle 111. According to an embodiment, the laser 230 may be configured in the form of an ultra violet (UV) laser, but is not limited thereto.

In addition, the laser 230 may communicate with the controller 260 wirelessly or by wire, and may control the output intensity and time of the laser beam according to a control signal from the controller 260.

The laser moving means 240 may be configured to move the laser beam output from the laser 230 to one point of the nozzle 111.

According to the embodiment, the laser moving means 240 reflects the laser beam output from the laser 230 toward a point of the nozzle 111 and a rotation to adjust the angle of the reflector 241 It may be configured with a motor 242.

One surface of the reflector 241 may be provided to face between the laser 230 and the nozzle 111, and the other surface of the reflector 241 may be connected to the rotation motor 242.

Of course, the laser moving means 240 is briefly described, and a beam expander, a condensing device, etc. can be added, and the laser 230 is configured to move in the horizontal direction or to rotate the angle at which the laser 230 is directed. Can be, but is not limited to.

At least one shutter unit 251, 252, 253 is provided to protect the first, second, and third viewports V1, V2, and V3 from a vapor deposition material. The first, second, and third shutter units 251, 252, 253 are provided with the first, second, and third viewports. It may be provided to be open and close between the 3 viewports (V1, V2, V3) and the nozzle 111.

The first shutter unit 251 is provided to open and close the field of view of the first viewport V1, and a first shutter 251a provided below the first viewport V1 to face the first viewport V1 and , It may be configured with a first shutter driver 251b that controls the movement of the first shutter 251a.

The first shutter 251a is provided closer to the first viewport V1 than the nozzle 11, but may be located under the first glass G1. The first shutter driver 251b may be configured with a rotation shaft and a motor connected to one side of the first shutter 251a, but is not limited thereto.

The second shutter unit 252 is provided to open and close the view of the second viewport V2, and may include a second shutter 252a and a second shutter driver 252b.

The third shutter unit 253 is provided to open and close the view of the third viewport V3, and may include a third shutter 253a and a third shutter driving unit 253b.

Usually, the first, second, and third shutters 251a, 252a, and 253a remain closed.

Therefore, while the deposition material is discharged upward through the nozzle 111 during the deposition process, the first, second, and third shutters before the deposition material being evaporated are deposited to the first, second, and third viewports (V1, V2, V3). (251a, 252a, 253a) and the first, second, and third glasses (G1, G2, G3) are double blocked, so that the first, second, and third viewports (V1, V2, V3) can be kept in a clean state. .

When the camera 210 is operated, the first shutter 251a may temporarily open the first viewport V1, but the evaporation material being evaporated is blocked by the first glass G1, so that the first viewport ( V1) can be kept clean.

When the lighting units 221 and 222 are operated, the second shutter 252a may temporarily open the second viewport V2, but the evaporation material being evaporated is blocked by the second glass G2, so that the second viewport ( V2) can be kept clean.

When the laser 230 is operated, the third shutter 253a may temporarily open the third viewport V3, but the evaporation material being evaporated is blocked by the third glass G3. V3) can be kept clean.

The control unit 260 controls the operation of the camera 210, the lighting unit 221,222, the laser 230, the laser moving means 240, the first, second, and third shutter units 251,252,253 and the monitor 270. It can be, and control signals can be delivered by wire or wirelessly.

The control unit 260 controls the operation of the camera 210, the lighting units 221 and 222, and the first and second shutter units 251 and 252 to capture a nozzle image, receive the nozzle image, and process the nozzle image to monitor the image. It can be transmitted to 270.

The control unit 260 may analyze the nozzle image to detect an initial clogging phenomenon, or determine clogging according to a signal input by an operator's judgment, and monitor the clogging alarm in the form of text, sound, warning, etc. ).

The control unit 260, which detects the initial clogging, controls the operation of the laser 230, the laser moving means 240, and the third shutter unit 253, thereby directing the laser beam to one point of the nozzle 111, that is, the initial click. You can investigate where logging is detected.

The controller 260 may uniformly control the output intensity and time of the laser beam, but may variably control to increase the output intensity and time of the laser beam according to the degree of clogging of the nozzle 111, but is not limited thereto.

The monitor 270 may display a nozzle image transmitted from the controller 260 and a clogging alarm.

The operator can quickly determine the initial clogging phenomenon of the nozzle 111 through the nozzle image displayed on the monitor 270 or confirm that the clogging of the nozzle 111 has been removed.

7A and 7B are nozzle images displayed on a monitor before/after removing clogging by the clogging prevention module according to an embodiment of the present invention.

Before the clogging prevention module of the present invention removes clogging, it can be clearly confirmed that the hole of the nozzle 111 is blocked by the deposition material (a) through the nozzle image as shown in FIG. 7A.

However, after the clogging prevention module of the present invention removes clogging with a laser beam, it can be confirmed that the deposition material is completely removed from the hole of the nozzle 111 through the nozzle image as shown in FIG. 7B.

The above description is only illustrative of the technical idea of the present invention, and those of ordinary skill in the art to which the present invention pertains will be able to make various modifications and variations without departing from the essential characteristics of the present invention.

Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention, but to explain the technical idea, and the scope of the technical idea of the present invention is not limited by these embodiments.

The scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be interpreted as being included in the scope of the present invention.

1: vacuum chamber 100: evaporation apparatus
110: crucible 111: nozzle
120: heater unit 130: cooling unit
140: nozzle cover 150: guide
200: clogging prevention module 210: camera
221,222: lighting unit 230: laser
240: laser moving means 251,252,253: 1st, 2nd, 3rd shutter unit
260: control unit 270: monitor
G1,G2,G3: 1st, 2nd, 3rd glass V1,V2,V3: 1st, 2nd, 3rd viewport

Claims (17)

Vacuum chamber;
At least one viewport provided on one surface of the vacuum chamber;
A deposition apparatus including a crucible accommodated in the vacuum chamber and receiving a deposition material, a heater unit heating the crucible, and at least one nozzle through which the deposition material evaporated from the deposition material passes;
A camera located outside the viewport and photographing the nozzle through the viewport;
A laser positioned outside the viewport and outputting a laser beam toward the nozzle through the viewport;
Laser moving means for moving the laser beam output from the laser to a point of the nozzle; And
And a control unit configured to receive the nozzle image photographed by the camera and control the operation of the laser and the laser moving means according to a result of detecting clogging in the nozzle image. The method of claim 1,
The viewport,
A first viewport on which the camera is installed outside,
A deposition apparatus system including a second viewport provided close to the first viewport and installed outside the laser. The method of claim 2,
The viewport,
A first coating layer coated on the first viewport to prevent reflection of light incident from the camera,
The deposition apparatus system further comprising a second coating layer coated on the second viewport to transmit the laser beam irradiated by the laser. The method of claim 2,
A deposition apparatus system further comprising a; an illumination unit located outside the viewport and irradiating light toward the nozzle through the viewport. The method of claim 4,
The lighting unit,
A deposition apparatus system that irradiates light with a wavelength of a specific band that increases the luminance of the deposition material. The method of claim 5,
The viewport,
A deposition apparatus system further comprising a third viewport provided close to the first viewport and installed outside the lighting unit. The method of claim 6,
The viewport,
A deposition apparatus system further comprising a third coating layer coated on the third viewport to transmit light irradiated from the lighting unit. The method of claim 1,
The laser moving means,
A reflector for reflecting the laser beam of the laser toward the nozzle,
A deposition apparatus system including a rotation motor for adjusting the angle of the reflector. The method of claim 1,
The control unit,
A deposition apparatus system for controlling the output intensity and time of the laser beam according to the degree of clogging of the nozzle. The method of claim 1,
A deposition apparatus system further comprising a glass that is provided interchangeably between the viewport and the nozzle and protects the viewport from the deposition material. The method of claim 9,
The glass,
A deposition apparatus system disposed closer to the viewport than the nozzle. The method of claim 1,
A deposition apparatus system further comprising a shutter unit provided to be opened and closed between the viewport and the nozzle, and to protect the viewport from the deposition material. The method of claim 12,
The shutter unit,
A shutter that is provided to face at least a portion of the viewport and opens and closes a view of the viewport;
A deposition apparatus system including a shutter driving unit that controls the movement of the shutter. The method of claim 13,
The shutter,
A deposition apparatus system disposed closer to the viewport than the nozzle. The method of claim 13,
The control unit,
A deposition apparatus system for controlling an operation of the shutter driving unit so that the shutter opens a field of view of the viewport when at least one of the camera, the illumination unit, and the laser is operated. The method of claim 1,
The deposition apparatus system further comprising a; a monitor that displays the nozzle image captured by the camera. The method of claim 1,
The control unit,
When clogging is detected in the nozzle image, an alarm is generated on the monitor.

Images