KR20200073328A - Vaporization system using canister with effective cell group - Google Patents

Abstract

A canister having a plurality of cells for storing sources according to an embodiment includes: an inlet; an outlet; a plurality of cells that can store sources; and an internal flow path through which a carrier gas introduced through the inlet moves sequentially through the plurality of cells and then is discharged through the outlet. The canister is characterized in that the plurality of cells are partitioned from each other, and a first cell through which the carrier gas passes among the plurality of cells has the largest size.

Description

VAPORIZATION SYSTEM USING CANISTER WITH EFFECTIVE CELL GROUP which can minimize the remaining amount using canister with effective cell group

The present invention relates to a vaporizer system capable of minimizing the residual amount using a canister with an effective cell group.

Various raw materials (sources) used in processing equipment, such as chemical vapor deposition (CVD) or atomic layer deposition (ALD), which coat thin films, which are essential in the manufacturing process of electronic materials such as semiconductors, displays, and light emitting diodes, are gases, liquids, or It is supplied in the form of a solid.

In the case of a raw material in the form of gas, it is used as a method that can supply a certain amount by controlling the pressure, but in the case of liquids or solids, since its own pressure is very low, it is mostly contained in ampoules called canisters, and carrier gas (inert gas) is used A method of supplying to the reaction chamber after vaporization through steam generation through bubbling or heating is used.

Various techniques are known for a method of evaporating and using a predetermined amount of a liquid raw material in a canister, and various techniques are also known for vaporizing a solid raw material. For example, Korean Patent Publication No. 10-2010-0137016 (2010. 12. 29) as one of the prior art for vaporizing a solid raw material ("carburetor, how to use a vaporizer, how to use a vaporizer, container, vaporizer unit, and Method for Steam Generation for Semiconductor Process Chambers").

1 is a view for explaining a conventional vaporizer.

Referring to FIG. 1, a conventional vaporizer discharges an inlet, a vaporized material, and a carrier gas for injecting fluid into a canister (B) having a source storage space and a flow path for storing a source, and a canister (B). Outlet for doing, includes various valves (V1, V2, V3, V4, V5, V6) and lines (L1, L2).

The canister (B) is located adjacent to the flow path in the storage space filled with the source, and the carrier gas moves through the flow path to promote vaporization of the source. The source filled in the flow path is vaporized at a predetermined pressure and temperature, and the vaporization of the source can be promoted by contact with the carrier gas.

The vaporizer has a vaporization mode and a purge mode, and in the vaporization mode, when the canister B is heated and carrier gas is injected into the inlets via valves V1 and V5, as shown in FIG. 2, the canister B ), the operation of moving the vaporized source and the carrier gas to the treatment facility via the valves V6 and V4 is performed. In the vaporization mode, the valves V2 and V3 are closed to prevent fluid from flowing.

On the other hand, the vaporization pattern in the flow path gradually increases as saturation increases as it passes through the flow path (ie, as it moves away from the point where the carrier gas flows in), and vaporization hardly occurs in the second half of the flow path (see FIG. 3). Here, the saturation degree is for a source and can be defined as follows.

Saturation = (current vaporized amount / maximum vaporizable amount) * 100 (%)

As the amount of the source decreases as the source evaporates in the flow path, the surface area of the source located in the flow path (the part in contact with the carrier gas) decreases from a certain moment. That is, the surface area of the source remaining in the flow path (the source in a non-vaporized state) starts to be smaller than the saturated surface area, and from this time, the amount of vaporization starts to decrease rapidly (see FIG. 4 ). Here, the saturation surface area means the surface area of the source where the saturation of the source approaches 100%.

From the moment the amount of vaporization starts to decrease, even if the source remains in the canister, the canister can no longer be used (because a certain amount of vaporization is required in the processing facility), and the amount of the source remaining in the canister is called the remaining amount. The higher the residual amount, the less economical, so the canister is designed to minimize the residual amount of the sauce.

For example, Korean Patent Publication No. 10-2014-0133641 discloses a curved and stacked vaporizer designed to have a sufficiently long flow path in order to reduce a residual amount of a sauce and ensure a stable vaporization amount (see FIG. 5). Referring to FIG. 5, it can be seen that a path (indicated by an arrow) through which the carrier gas introduced into conduit 3 moves is designed as long as possible from the bottom to the top. For reference, since the reference numerals in FIG. 5 are given in Korean Patent Publication No. 10-2014-0133641, those skilled in the art should understand that the reference numerals mentioned in the detailed description of the present specification are irrelevant.

For another example, Korean Patent Registration No. 10-1247824 discloses a vaporizer designed to have a long flow path. It can be seen that the vaporizer is also designed in a direction in which the surface area where the substance to be vaporized is exposed to the gas (eg, carrier gas) is increased.

According to an embodiment of the present invention, a vaporizer system capable of minimizing the remaining amount using a canister having an effective cell group is provided.

According to another embodiment of the present invention, a vaporizer system is provided in which the residual amount of a source is minimized by using the vaporizers connected in series.

According to one embodiment, a canister having a plurality of cells for storing a source, comprising: an inlet; Outlets; A plurality of cells capable of storing a source; And an internal flow path through which the carrier gas flowing through the inlet is sequentially moved through the plurality of cells and then discharged through the outlet. The plurality of cells are partitioned from each other, and among the plurality of cells, a canister may be provided, characterized in that a size of the first cell through the carrier gas is the largest.

According to another embodiment, in a canister having a plurality of cells for storing a source,

Inlets; Outlets; A plurality of cells capable of storing a source; And an internal flow path through which the carrier gas flowing through the inlet is sequentially moved through the plurality of cells and then discharged through the outlet. A canister may be provided, among which cells have the largest size of a cell through which the carrier gas first passes, and the effective cell group includes at least two or more of the plurality of cells.

According to another embodiment, the first flow path, which is a path through which the fluid can move, is in communication with the first flow path, and the first inlet for injecting fluid into the first flow path, and the vaporized material in communication with the first flow path to the outside. A first vaporizer comprising a first canister with a first outlet for discharging; And a second flow path through which the fluid can move, a second inlet communicating with the second flow path to inject fluid into the second flow path, and a second inlet communicating with the second flow path and discharging vaporized material to the outside. A second vaporizer comprising a second canister with an outlet; And

Includes; connection line connecting the first vaporizer and the second vaporizer in series,

At least one of the first canister and the second canister is the above-described canister,

A vaporization system may be provided in which the vaporized material in the first vaporizer is transferred to the second vaporizer through the connecting line.

According to an embodiment of the present invention, it is possible to minimize the remaining amount of the source by using the vaporizers connected in series.

According to an embodiment of the present invention, the residual source stored in each cell is not biased in a canister composed of a plurality of cells.

1 to 5 are views for explaining a conventional vaporizer.
6 and 7 are diagrams for explaining a vaporizer system according to an embodiment of the present invention.
8 is a view for explaining the technical effect of the vaporizer system according to an embodiment of the present invention.
9 is a view for explaining a vaporization system according to a second embodiment.
10 is a view for conceptually explaining the effect of the embodiment of FIG. 9.

The above objects, other objects, features and advantages of the present invention will be readily understood through the following preferred embodiments associated with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed contents are thorough and complete and that the spirit of the present invention is sufficiently conveyed to those skilled in the art.

In the drawings of the present specification, the thickness of the components is exaggerated or reduced for effective description of the technical content.

In various embodiments of the present specification, terms such as first and second are used to describe various components, but these components should not be limited by these terms. These terms are only used to distinguish one component from another component. The embodiments described and illustrated herein also include its complementary embodiments.

The terminology used herein is for describing the embodiments and is not intended to limit the present invention. In the present specification, the singular form also includes the plural form unless otherwise specified in the phrase. As used herein,'comprises' and/or'comprising' does not exclude the presence or addition of one or more other components.

Terms

In the present specification, the term'euro' means a space through which gas can be moved. The gas can be, for example, a carrier gas or a vaporized gas.

In the present specification, the term'serial' refers to a method of connecting a plurality of vaporizers. For example, when it is mentioned that the vaporizer A and the vaporizer B are connected in series, it means that the vaporized material discharged from the outlet of the vaporizer A is connected to be introduced into the inlet of the vaporizer B.

In the present specification, the term'connection' (or'communication') includes direct connection (or direct communication) and indirect connection (or indirect communication). A direct connection is one in which other elements are not placed between connected elements, and an indirect connection is one in which one or more other elements are placed between connected elements.

In the present specification,'regulating the flow' is a concept including blocking the flow, allowing the flow, or controlling the amount of the flow. For example, a component capable of regulating the flow of fluid is a component that prevents the flow of fluid, allows the flow of fluid, or regulates the amount of fluid flowing, and may have a valve or fluid load.

In the present specification,'valve' refers to a component capable of regulating the flow of fluid, and a component capable of blocking the flow of fluid, allowing the flow of fluid, or regulating the amount of fluid flowing, for example on- Devices such as off valves and control valves.

In the present specification,'on-off valve' means a valve that blocks the flow of fluid or allows the flow of fluid, and'control valve' means the flow of fluid or allows the flow of fluid or the amount of fluid flowing. It means an adjustable valve.

In the present specification,'upstream' and'downstream' are terms for indicating a position in a line ('flow path') through which a fluid flows, and component A is located upstream of component B. It means that at least a part of the fluid that reaches component A and reaches component A reaches component B. In addition, that component A is located downstream of component B means that the fluid first reaches component B and at least some of the fluid that reaches component B reaches component A.

In the present specification, the term “size” of a cell is used to collectively refer to the “depth” of the cell or the “volume” (volume) of the cell.

The present inventors noted that in the case of a canister having a long flow path, vaporization starts from the fluid inlet and gradually increases to saturation to the outlet, and when the saturation is sufficiently increased, sources located at the outlet side of the canister are rarely used in the vaporization process.

Examples according to the present invention derived on the basis of such attention are as follows.

First, a vaporization system configured to connect two or more vaporizers in series (hereinafter referred to as the'first embodiment')

Second, in a canister having a plurality of cells (a space filled with a source), a vaporization system configured to have different sizes of cells (hereinafter referred to as'second embodiment')

Third, an embodiment combining the first and second embodiments ('third embodiment')

Hereinafter, these embodiments will be sequentially described.

Embodiment 1

According to the vaporization system according to the first embodiment, it is possible to completely use the source filled in the first canister, and even if the source filled in the first canister is completely used, the source filled in the second canister remains enough to ensure a constant amount of vaporization. There will be. Therefore, the ratio of the residual amount to the total source usage can be minimized.

That is, when two canisters with long flow paths are connected in series, the amount of vaporization is kept constant by the surface area of the source of the second canister even when the source of the first canister is completely used. When the first canister is completely used, the second canister is only partially used, and if the first canister is repeatedly used, the ratio of the remaining amount to the total usage can be significantly reduced.

On the other hand, in the embodiments described in detail with reference to FIGS. 6 to 8 below, the case where two canisters are connected in series has been described, but the technical effect of the present invention is also obtained when three or more canisters are connected in series. Is exerted. When three or more canisters are connected in series, the ratio of the residual amount to the amount of the source used is further reduced.

The vaporization system according to the first embodiment of the present invention includes a first vaporizer and a second vaporizer, and the first vaporizer and the second vaporizer can be connected in series by a connection line-providing a path through which fluid can move- . That is, the first vaporizer and the second vaporizer are configured such that the vaporized material discharged from the outlet of the first vaporizer flows into the inlet of the second vaporizer.

According to the first embodiment of the present invention, the connecting line connects the outlet of the first vaporizer and the inlet of the second vaporizer, and the material vaporized in the first vaporizer can be moved to the second vaporizer through the connection line.

According to the first embodiment of the present invention, the type or configuration of the first vaporizer and the type or configuration of the second vaporizer need not be the same, and the objectives of the present invention can be achieved even if they have different types or configurations. .

According to the first embodiment of the present invention, at least one flow path of the flow path of the first vaporizer and the flow path of the second vaporizer is a sufficiently long flow path. For example, a sufficiently long flow path satisfies R≥4, where R = L/A, L is the length of the flow path through which the carrier gas is moved, and A is the cross-sectional area of the flow path through which the carrier gas is moved.

According to the first embodiment of the present invention, at least one of the first vaporizer and the second vaporizer is a stacked vaporizer. Such a stacked vaporizer has a sufficiently long flow path and has a configuration in which the flow paths are stacked up and down.

According to the first embodiment of the present invention, at least one of the first vaporizer and the second vaporizer is a bubble-type vaporizer. Such a bubble type vaporizer has a configuration having a sufficiently long flow path.

According to the first embodiment of the present invention, at least one of the first vaporizer and the second vaporizer is a vaporizer having a curved flow path. The carburetor having such a curved flow path may have a configuration having a sufficiently long flow path.

6 and 7 are views for explaining the vaporization system according to the first embodiment of the present invention.

6 and 7, the vaporization system according to the first embodiment of the present invention may include a first vaporizer and a second vaporizer. Here, the first vaporizer and the second vaporizer are connected in series.

The first vaporizer and the second vaporizer are devices for vaporizing a source and providing it to a treatment facility.

Here, the treatment facility may be, for example, devices such as a process chamber of semiconductor processing equipment such as a chemical vapor deposition (CVD) device or an ion implanter.

Referring to FIG. 6, the first vaporizer has a cylindrical shape capable of storing a source, a canister (B1) having an inlet capable of receiving fluid from the outside, and an outlet capable of discharging vaporized gas to the outside, and the fluid can be moved. It may include lines that provide a possible path, components for regulating the flow of fluids flowing in the lines.

The canister B1 includes a source storage space (not shown) in which a source can be stored, and a flow path ('first flow path') (not shown) in which a fluid can move adjacent to the source storage space. An inlet (“first inlet”) for injecting fluid (eg, carrier gas) into the first channel in communication with the flow channel, and a fluid (eg, vaporized source and carrier gas) in communication with the first channel. The outlet ('first outlet') for discharging to the outside is located at the top of the canister (B1). Through the first flow path described above, fluids such as carrier gas or vaporized source are moved.

According to an embodiment of the present invention, the source may be a solid source or a liquid source, for example, boron (B: boron), phosphorus (P: phosphorous), copper (Cu: copper), gallium (Ga: gallium) , Arsenic (As:arsenic), ruthenium (Ru), indium (In: indium), antimony (Sb: antimony), lanthanum (La: lanthanum), tantalum (Ta: tantalum), iridium (Ir: iridium), Decaborane (B10H14), hafnium tetrachloride (HfCl4), zirconium tetrachloride (ZrCl4), indium trichloride (InCl3), metal organic β-diketonate complex ), cyclopentadienyl cycloheptatriethyl titanium (CpTiChT:cyclopentadienyl titanium), aluminum trichloride (AlCl3), titanium iodide (TixIy:titanium iodide), cyclooctatetraene cyclopentadienyl titanium ((CotTi) )(Cp)Ti: cyclooctatetraene cyclopentadienyltitanium), bis(cyclopentadienyl)titanium diazide [bis(cyclopentadienyl)titanium diazide], tungsten carbonyl (Wx(CO)y: tungsten carbonyl), where x and y are natural numbers ), bis(cyclopentadienyl)ruthenium(II)[Ru(Cp)2: bis(cyclopentadienyl)ruthenium (II)], ruthenium trichloride (RuCl3), and/or tungsten chloride (WxCly), where x and y may be materials including natural numbers. It should be understood by those skilled in the art that the aforementioned sources are exemplary and the present invention is not limited to such sources.

According to an embodiment of the present invention, the carrier gas may be, for example, a fluid such as N2, Ar, and/or He.

The first vaporizer may further include a heater (not shown), and the heater may apply heat to the canister B1 to vaporize the source stored inside the canister B1.

The inlet of the first vaporizer includes an inlet for injecting fluid. The injection hole may be formed on the upper portion of the canister B1. The inlet of the first vaporizer may further include a valve V105. The valve V105 may be, for example, an on-off valve coupled to the inlet to block or allow the flow of fluid injected into the inlet.

The outlet of the first vaporizer includes an outlet for discharging fluid. Here, the outlet may be formed on the upper portion of the canister (B1). The outlet of the first vaporizer may further include a valve (V106). The valve V106 may be, for example, an on-off valve coupled to the outlet and capable of blocking or allowing the flow of fluid discharged to the outlet.

Lines providing a path through which the fluid provided in the first vaporizer can move may include a first line L111, a second line L112, and a branch line L113.

The first line L111 may provide a path through which the fluid can move to the inlet of the canister B1.

In the present embodiment, the mass flow controller MFC (not shown) and the valve V101 may be located in the first line L111. Here, the mass flow controller MFC is located upstream of the valve V101. The valve V101 is a component located between the inlet from the branch point P11 where the branch line L113 branches. Meanwhile, the valve V101 may be implemented as an on-off valve or a control valve.

The mass flow controller MFC is positioned at the first line L111 before the branch point P11 at which the branch line L113 branches off, so that the amount of fluid flowing in the first line L111 is constant.

The second line L112 may provide a path through which fluid can move from the outlet of the canister B1 to the second vaporizer.

The valve V104 is located in the second line L112. The valve V104 may be an on-off valve or a control valve. Meanwhile, the valve V104 located in the second line L112 is not an essential component, and a person skilled in the art may or may not install the valve V104 as needed in the second line L112.

The present vaporizer system includes couplers (C301, C303), and the couplers (C301, C303) are for detachably coupling the first vaporizer and the second vaporizer. If it is desired to separate the first vaporizer and the second vaporizer, it will be possible by releasing the couplers C301, C303.

For purposes of explanation of the present invention, the portion between the coupler C301 and the coupler C302 will be referred to as a connecting line. On the other hand, the part connected to the first carburetor in the connection line is called an'entrance' and the part connected to the second carburetor is called an'outlet'.

The outlet of the first vaporizer and the inlet of the second vaporizer are communicated by a connection line, and the fluid discharged through the outlet of the first vaporizer is passed through the valves V106, V104, V201, V205 to the inlet of the second vaporizer. Can be introduced.

In this embodiment, the inlet of the connecting line is detachably coupled to the first vaporizer by the first coupler, and the outlet of the connecting line is detachably coupled to the second vaporizer by the second coupler.

A valve V103 may be additionally located in the branch line L113, and the valve V103 is located downstream of the valve V102. For example, the valve V103 is located between the valve V102 and the confluence point P12. The valve V103 may be an on-off valve or a control valve. On the other hand, the valve V103 located in the branch line L113 is not an essential component, and a person skilled in the art may or may not install the valve V103 in the branch line L113 as necessary.

The first vaporizer according to an embodiment may include couplers C101 and C102. The coupler C101 has a structure that can be separated and coupled, and is located on the first line L111 to connect the inlet and the valve V101. In addition, the coupler C102 also has a structure that can be separated and coupled, and is located on the second line L112 to connect the outlet and the valve V104.

6, the second vaporizer has a cylindrical shape that can store a source, a canister (B2) having an inlet capable of receiving fluid from the outside, and an outlet capable of discharging vaporized gas to the outside, the fluid Lines providing a path for movement, and components for regulating the flow of fluids flowing in the lines may be included.

The canister B2 includes a source storage space (not shown) in which a source can be stored, and a flow path ('second flow path') (not shown) in which a fluid can move adjacent to the source storage space. An inlet (“second inlet”) for injecting a fluid (eg, carrier gas) into the second channel in communication with the flow channel, and a fluid (eg, vaporized source and carrier gas) in communication with the second channel. The outlet ('second outlet') for discharging to the outside is located at the top of the canister (B2). Through the second flow path, fluids such as carrier gas or vaporized source are moved.

The second vaporizer may further include a heater (not shown), and the heater may apply heat to the canister B2 to vaporize the source stored inside the canister B2.

The inlet of the second vaporizer includes an inlet for injecting fluid. The injection hole may be formed on the upper portion of the canister B2.

The inlet of the second vaporizer may further include a valve V205. The valve V205 may be, for example, an on-off valve coupled to the inlet and blocking or allowing the flow of fluid injected into the inlet.

The outlet of the second vaporizer includes an outlet for discharging fluid. Here, the outlet may be formed on the upper portion of the canister (B2). The outlet of the second vaporizer may further include a valve (V206). The valve V206 may be, for example, an on-off valve coupled to the outlet and capable of blocking or allowing the flow of fluid discharged to the outlet.

Lines providing a path through which the fluid provided in the second vaporizer can move may include a third line (L211), a fourth line (L212), and a branch line (L213).

The third line L211 may provide a path through which the fluid can move to the inlet of the canister B2.

In this embodiment, the valve V201 may be located on the third line L211. Here, the valve V201 is a component positioned between the inlet from the branch point P21 where the branch line L213 branches. Meanwhile, the valve V201 may be implemented as an on-off valve or a control valve.

The fourth line L212 may provide a path through which fluid can move from the outlet of the canister B2 to the treatment facility.

The valve V204 is positioned in the fourth line L212. The valve V204 may be an on-off valve or a control valve. Meanwhile, the valve V204 located in the fourth line L212 is not an essential component, and a person skilled in the art may or may not install the valve V204 in the fourth line L212.

A valve V203 may be additionally positioned in the branch line L213, and the valve V203 is located downstream of the valve V202. For example, the valve V203 is located between the valve V202 and the confluence point P22. The valve V203 may be an on-off valve or a control valve. Meanwhile, the valve V203 located in the branch line L213 is not an essential component, and a person skilled in the art may or may not install the valve V203 in the branch line L213.

The second vaporizer according to an embodiment may include couplers C201 and C202. The coupler C201 has a structure that can be separated and coupled, and is located on the third line to connect the inlet and the valve V201. In addition, the coupler C202 also has a structure that can be separated and coupled, and is located on the fourth line to connect the outlet and the valve V204.

Meanwhile, in the first embodiment, although the first vaporizer and the second vaporizer have the same configuration as an example, the configurations of the first vaporizer and the second vaporizer need not be the same.

The vaporization system according to an embodiment of the present invention may include a vaporization mode and a fuzzy mode, and these operation modes will be sequentially described.

Vaporization mode

6 and 7, the vaporization mode is a mode in which an operation in which a source stored in the canisters B1 and B2 is vaporized, and heat for vaporization of the source canisters B1 by a heater (not shown). , B2).

In the vaporization mode, the first vaporizer, the valve (V101) and the valve (V105) located in the first line (L111) is open to the carrier gas to the canister (B1) in the first line (L111), branch The control valve V102 located in the line L113 is closed to prevent fluid from flowing into the branch line L113, the valve V103 is closed, and the valves V104 and V106 are canisters B1. In the open state, the vaporized source flows in the direction of the treatment facility.

The mass flow controller (MFC) (not shown) operates so that a certain amount of carrier gas flows through the first line L111.

In addition, in the vaporization mode, the second vaporizer, the valves V201 and V205 located in the third line L211 are opened so that carrier gas flows to the canister B2 in the third line L211. , The control valve V202 located in the branch line L213 is closed to prevent fluid from flowing in the branch line L213, the valve V203 is closed, and the valve V204 is vaporized in the canister B2. The source is open to flow in the direction of the treatment plant.

Fudge mode

The purge mode is a mode in which operations for cleaning the lines L111, L112, L113, L211, L212, and L213 and valves connected to the canisters B1 and B2 are performed.

The purge mode may be performed for each vaporizer in a state in which the first vaporizer and the second vaporizer are not connected (the third line is removed), or may be performed in a state in which the first vaporizer and the second vaporizer are connected in series.

First, an operation in which the purge mode is performed for each vaporizer based on the first vaporizer will be described.

In the purge mode, all of the carrier gas flows into the branch line L113.

In the purge mode, the valves V101 and V104 are closed and the valve V102 and the valve V103 are open. Therefore, the purge gas is discharged to the outside through the branch line.

Now, the operation in which the purge mode is performed while the first vaporizer and the second vaporizer are connected in series will be described.

In the purge mode, all of the carrier gas flows into the branch lines L113 L213.

In the purge mode, the valves V101 and V104 are closed and the valve V102 and the valve V103 are open. Also, the valves V201 and V204 are closed and the control valve V202 and the valve V203 are open. Therefore, the purge gas moves along the first line L111 and then moves to the branch line L113 when it meets the branch point P11, moves along the branch line L113 and then moves along the connection line when it meets the confluence point P12. 2 Move to the carburetor. The purge gas moving along the connection line moves to the branch line L213 when it meets the branch point P21, moves along the branch line L213 and then moves along the fourth line L212 when it meets the confluence point P22, and then moves to the outside. Is discharged. The purge mode is performed through the above-described operations.

8 is a view for explaining the effect of the vaporization system according to the first embodiment of the present invention.

FIG. 8 is a view for explaining a degree in which the amount of sources remaining in each of the first vaporizer and the second vaporizer changes with time when the vaporization system described with reference to FIGS. 6 and 7 operates in the vaporization mode. .

FIG. 8(a) is a diagram for explaining the remaining amount over time of the first vaporizer, and (b) is a diagram for explaining the remaining amount over time of the second vaporizer.

On the other hand, for purposes of explanation of the present invention, it is assumed that the length of each source storage space of the first vaporizer and the second vaporizer is L1, and the height is H1, and the first vaporizer and the second vaporizer may each be used alone. It is assumed that the remaining amount of time is 25%.

Referring back to FIG. 8, time T=0 indicates the source state in the source storage space of the first vaporizer and the second vaporizer before the vaporization system operates.

At time T=1, 25% of the sources of the first vaporizer are used, and the source of the second vaporizer is unused.

At time T=2, 75% of the sources of the first vaporizer are used (ie, 25% of the sources of the first vaporizer are left), and the source of the second vaporizer is unused.

At time T=3, all the sources of the first vaporizer are used, and 25% of the sources of the second vaporizer are used.

At time T=4, all sources of the first vaporizer are used, and 75% of the second vaporizer is used (ie, 25% of the first vaporizer is left).

That is, even if the source of the first vaporizer remains 25% or less, the surface of the source for the desired amount of vaporization (the area in contact with the carrier gas) can be obtained from the surface of the source of the second vaporizer, so that the residual amount of the first vaporizer It can be used until there is no remaining.

According to the first embodiment of the present invention, in order to exhibit a technical effect of minimizing the remaining amount, at least one vaporizer of the first vaporizer and the second vaporizer must have a sufficiently long flow path.

Example 2

According to the vaporization system according to the second embodiment, a canister composed of a plurality of cells of different sizes, wherein the plurality of cells are partitioned from each other as a space in which the source is stored.

According to one embodiment of the second embodiment, in the vaporization mode, the carrier gas is sequentially passed through a plurality of cells, and is configured to have the largest size of a cell where the carrier gas first meets among the plurality of cells. Here, the size of the cell means the volume of the cell or the depth of the cell. For example, among the plurality of cells, the depth of the cell where the carrier gas meets first may be configured to be the deepest, or the volume of the cell where the carrier gas first meets may be largest.

In the vaporization system according to another embodiment of the second embodiment, the plurality of cells included in the canister consists of N cells (S1, S2, S3, ..., SN/2, ..., SN), where S1 is a carrier When the gas is injected into the canister, it is the cell that meets first, S2 is the cell where the carrier gas meets second, S3 is the cell where the carrier gas meets third, and SN/2 is the cell where the carrier gas meets the N/2th (If N is odd, it means rounding or rounding up to the decimal point in the calculation result of N/2), SN is the cell where the carrier gas meets last, and the rest of the cells are also arranged in the manner described above.

In the N cells described above, the size of the cell satisfies at least S1> S2> S3, and the amount of the source (filling amount) filled in the cells as defined in Equations 1) or 2) below is 50% of the total filling amount or More than 60% is configured to fill up to the SN/2 th cell.

One) C_S1 + C_S2 + C_S3 +… + C_SN/2 ≥ (C_total)/2

2) C_S1 + C_S2 + C_S3 +… + C_SN/2 ≥ (C_total)*0.6

Here, C_S1 is the amount charged in cell S1, C_S2 is the amount charged in cell S2, C_S3 is the amount charged in cell S2, C_SN/2 is the amount charged in cell SN/2, and C_total is the amount filled in N cells Total filling amount)

The vaporization system according to another embodiment of the second embodiment includes a canister composed of a plurality of cells (S1, S2, S3, …, SN/2, …, SN), as defined in Equation (3) below. The size of the first cell that the carrier gas injected into the canister meets is 20% or more of the sum of the sizes of the remaining cells.

(3) V_S1 ≥ (V_total)*0.2

Here, V_S1 is the size of cell S1, V_total is the sum of the size of N cells)

On the other hand, the above 1), 2), and 3) equations are those empirically derived by various embodiments of the present invention by the present inventors.

According to another embodiment of the second embodiment, in the effective cell group, the size of the cell where the carrier gas first meets is the deepest. Here, the size of the cell means the volume of the cell or the depth of the cell. For example, the depth of the cell in which the carrier gas first meets the deepest among the plurality of cells included in the effective cell group, or the volume of the cell in which the carrier gas meets first among the plurality of cells included in the effective cell group It can be configured to be the largest.

On the other hand, in the present specification, an effective cell group means cells that greatly affect the source remaining amount. The effective cell group may be determined and determined empirically by a person belonging to the technical field to which the present invention pertains (hereinafter referred to as “the person”) according to the total number or arrangement of cells.

The effective cell group may be defined as, for example, a cell in which a carrier gas is first injected into a canister and a second encountering cell.

The effective cell group may be defined as, for example, a cell in which a carrier gas first meets, a cell in which it meets second, and a cell in which it meets third.

The number of cells included in the effective cell group is exemplary, and the scope of the present invention is not limited to the number of such cells.

In the present specification, the term'canister having an effective cell group' means a canister having a plurality of cells, and means a canister configured to have the largest cell size that the carrier gas first encounters among cells belonging to the effective cell group. .

Hereinafter, for the purpose of explanation, the second embodiment will be described with an example of a canister composed of six cells.

9 is a view for explaining a vaporization system according to a second embodiment.

Referring to FIG. 9, the vaporization system according to the second embodiment has a cylindrical shape capable of storing a source and a canister (B3) having an inlet capable of receiving fluid from the outside and an outlet capable of discharging vaporized gas to the outside. ), lines providing a path through which the fluid can travel, and components (eg valves) for regulating the flow of fluid flowing in the lines.

The canister B3 includes a plurality of cells capable of storing a source therein, and an internal flow path (not shown) that provides a path through which the carrier gas can travel, and fluid (eg, an internal flow path) For example, an inlet for injecting a carrier gas and an outlet for communicating a fluid (for example, a vaporized source and a carrier gas) in communication with the internal flow path are located at the top of the canister B3. Through the internal flow path described above, fluids such as carrier gas or vaporized source are moved.

The inner flow path (not shown) of the canister B3 provides a function for the carrier gas flowing through the inlet to be sequentially discharged through a plurality of cells and then discharged through the outlet.

The vaporization system according to the second embodiment can also operate in the vaporization mode and the purge mode, and the operation in the vaporization mode and the purge mode is the same as that of the first embodiment, so refer to the description of the first embodiment.

Referring to FIG. 9, the canister B3 according to the second embodiment may include a plurality of cells S1, S2, S3, S4, S5, and S6 having different depths, and the plurality of cells are stored in a source. It is divided into spaces. Since the number and arrangement of the plurality of cells illustrated in FIG. 9 are exemplary, those skilled in the art will readily understand that the scope of the present invention is not limited to such a number and arrangement.

Inside the canister B3, an internal flow path (not shown) is formed to allow carrier gas flowing through the inlet to pass through (move) a plurality of cells S1, S2, S3, S4, S5, and S6 sequentially. It is.

Since the configuration of the internal flow path (not shown) can be easily implemented by those skilled in the art, detailed descriptions thereof will be omitted herein. The internal flow path (not shown) may vary depending on the size of the canister, the number of the plurality of cells, the arrangement of the plurality of cells, etc., and may be configured such that the carrier gas sequentially passes through the plurality of cells.

In the present specification, by sequentially passing through a plurality of cells means sequentially passing through cells one by one (via cell S1, then via cell S2, then via cell S3, and then cell S4). Via, then via cell S5, and via cell S6), as well as sequentially passing two or more cells simultaneously. For example, it may be possible to pass through cells S1 and S2 at the same time, then via cell S3, then via cells S4 and S5, and via cell S6.

9, in the canister B3 according to the second embodiment, the carrier gas passes through the cell S1, then through the cell S2, then through the cell S3, and then through the cell S4, Next, an internal flow path (not shown) is formed to pass through the cell S5 and via the cell S6.

In the canister B3 according to the second embodiment, among the plurality of cells S1, S2, S3, S4, S5, and S6, the depth of the cell where the carrier gas first meets is the deepest. That is, the depth h1 of the cell S1 is deeper than the depth of the remaining cells.

In the embodiment of FIG. 9, the depth of cell S1 where the carrier gas first meets (ie, passes) is the deepest, the depth of cell S2 where the carrier gas meets second is shallower than the depth of cell S1, and the carrier gas meets third The depth of cell S3 is shallower than that of cell S2.

Since the residual amount of the source of the canister (B3) is closely related to the depth of the cells where the carrier gas initially meets, the depths of the cells S1, S2, and S3 that meet initially are adjusted as above, and the subsequent cells S4, S5 , And S6 did not have a large influence, and thus was kept constant without depth adjustment.

As described above, since the residual amount of the source of the canister B3 in the vaporization mode is closely related to the size of the cells where the carrier gas initially meets, an effective cell group is defined herein. An effective cell group is defined as cells in which the carrier gas initially meets. The size of cells not belonging to the effective cell group may be arbitrarily adjusted by a person skilled in the art to fit the size of the canister or the number of cells.

On the other hand, it is preferable that a person skilled in the art configures the size of the remaining cells not belonging to the effective cell group to be shallower than the cells belonging to the effective cell group for optimization of the second embodiment.

According to an embodiment of the second embodiment, when comparing the sizes of the cells belonging to the effective cell group, the size of the cell that first encounters the carrier gas is largest and is configured to sequentially decrease the size of the cell. For example, the depth of the cell that meets the carrier gas first may be the largest, and the depth of the cell may be sequentially reduced.

For example, an effective cell group may be defined such that the carrier gas is composed of the first cell S1 and the second cell S2. In this case, the depth h1 of the cell S1 is the deepest among all cells, and the depth h2 of the cell S2 is configured to be shallower or equal to the depth h1 of the cell S1.

For another example, the effective cell group may be defined to be composed of cell S1 where the carrier gas meets first, cell S2 where the second meets, and cell S3 that meets the third. In this case, the depth h1 of the cell S1 is the deepest among all cells, the depth h2 of the cell S2 is configured to be shallower than the depth h1 of the cell S1, and the depth h3 of the cell S3 is the depth of the cell S2. (h2). In this way, the cells constituting the effect cell group are configured such that the depth of the cell where the carrier gas first meets is the deepest, and the depths of the subsequent cells are sequentially shallow or equal.

The embodiment of FIG. 9 is a case in which an effective cell group is defined and composed of cells S1, S2, and S3. The depths of the remaining cells S4, S5, and S6 not belonging to the effective cell group may be arbitrarily adjusted by a person skilled in the art according to the size or number of canisters.

As described above, for optimization of the second embodiment, it is preferable to configure the depths of the remaining cells not belonging to the effective cell group to be sequentially shallower than the depths of the cells belonging to the effective cell group.

For another optimization of the second embodiment, the depth of a plurality of cells through which the carrier gas sequentially passes is shallowly configured (i.e., the depth of the cell through which the carrier gas first passes is always deeper than the depth of the cells through later pass) Configured).

For another optimization of the second embodiment, the depth of a plurality of cells through which the carrier gas passes sequentially is shallow (i.e., the depth of the cell through which the carrier gas first passes is always deeper than the depth of the cells through later). Configured), so that the surface area of the plurality of cells (the area in contact with the source when the carrier gas moves) is also sequentially reduced (i.e., the surface area of the cell through which the carrier gas first passes is always larger than the surface area of the cell through later) Can be configured.

10 is a view for conceptually explaining the effect of the embodiment of FIG. 9.

Referring to FIG. 10, FIG. 10(a) is a conceptual representation of a residual amount of a source (a result of operation in a vaporization mode) in a canister composed of a plurality of cells having the same depth, and FIG. 10(b) is a view of FIG. According to an embodiment, the remaining amount of the source in the canister configured to have the deepest depth of the cell through which the carrier gas first passes is conceptually displayed.

The second embodiment described with reference to FIGS. 9 to 10 has been described as an example in which a plurality of cells are arranged in six, but those skilled in the art can easily understand that the present invention is not limited to the number or arrangement of such cells. There will be.

Embodiment 3

The third embodiment is an embodiment in which the first embodiment described with reference to FIGS. 6 to 8 and the second embodiment described with reference to FIGS. 9 to 10 are combined.

According to the third embodiment, there is a configuration in which at least one of the canisters B1 and B2 connected in series in the first embodiment is replaced with the canister B3 in the second embodiment.

According to an example of the third embodiment, the canister B1 among the canisters B1 and B2 connected in series in the first embodiment may be replaced with the canister B3 in the second embodiment.

According to another example of the third embodiment, the canister B2 among the canisters B1 and B2 connected in series in the first embodiment can be replaced with the canister B3 in the second embodiment.

According to another example of the third embodiment, the canisters B1 and B2 connected in series in the first embodiment can be replaced with the canister B3 in the second embodiment.

As described above, the present invention is not limited to the described embodiments, and it is obvious to those skilled in the art that various modifications and modifications can be made without departing from the spirit and scope of the present invention. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

Canister: B, B1, B2, B3
Valves: V1, V2, V3, V4, V5, V101, V102, V103, V104. V105, V201, V202, V203, V204, V205
Lines: L1, L2, L111, L112, L113, L211, L212, L213

Claims (15)

In the canister having a plurality of cells for storing the source,
Inlets;
Outlets;
A plurality of cells capable of storing a source; And
An internal flow path through which the carrier gas flowing through the inlet is sequentially moved through the plurality of cells and then discharged through the outlet;
The plurality of cells are partitioned from each other, and among the plurality of cells, the size of the first cell through the carrier gas is the largest, characterized in that the canister. According to claim 1,
The size of the second cell through the carrier gas among the plurality of cells is the second deepest, the canister. According to claim 2,
The canister, wherein the surface area of the first cell-the part in contact with the carrier gas-is the largest. According to claim 1,
The plurality of cells is composed of N cells (S1, S2, S3, …, SN/2, …, SN), and S1 is the cell that meets first when carrier gas introduced through the inlet is injected into the canister , S2 is the cell where the carrier gas meets the second time, S3 is the cell where the carrier gas meets the third time, SN/2 is the cell where the carrier gas meets the N/2th time, and SN is the carrier gas last Means the cell that meets
Here, the size of the cell satisfies at least S1>S2> S3, and the cells are
C_S1 + C_S2 + C_S3 +… + C_SN/2 ≥ (C_total)/2
It is configured to satisfy, where, C_S1 is the amount charged in cell S1, C_S2 is the amount charged in cell S2, C_S3 is the amount charged in cell S2, C_SN/2 is the amount charged in cell SN/2, C_total is the total filling amount of N cells, the canister. According to claim 1,
The plurality of cells is composed of N cells (S1, S2, S3, …, SN/2, …, SN), and S1 is the cell that meets first when carrier gas introduced through the inlet is injected into the canister , S2 is the cell where the carrier gas meets the second time, S3 is the cell where the carrier gas meets the third time, SN/2 is the cell where the carrier gas meets the N/2th time, and SN is the carrier gas last Means the cell that meets
Here, the size of the cell satisfies at least S1>S2> S3, and the cells are
C_S1 + C_S2 + C_S3 +… + C_SN/2 ≥ (C_total)*0.6
It is configured to satisfy, where, C_S1 is the amount charged in cell S1, C_S2 is the amount charged in cell S2, C_S3 is the amount charged in cell S2, C_SN/2 is the amount charged in cell SN/2, C_total is the total filling amount of N cells, the canister. According to claim 1,
The plurality of cells is composed of N cells (S1, S2, S3, …, SN/2, …, SN), and S1 is the cell that meets first when carrier gas introduced through the inlet is injected into the canister , S2 is the cell where the carrier gas meets the second time, S3 is the cell where the carrier gas meets the third time, SN/2 is the cell where the carrier gas meets the N/2th time, and SN is the carrier gas last Means the cell that meets
Here, the size of the cells is the following formula
V_S1 ≥ (V_total)*0.2
Is configured to satisfy, where, V_S1 is the size of the cell S1, V_total is the sum of the size of the N cells, canister. In the canister having a plurality of cells for storing the source,
Inlets;
Outlets;
A plurality of cells capable of storing a source; And
It includes; an internal flow path that allows the carrier gas flowing through the inlet to be sequentially discharged through the plurality of cells and then discharged through the outlet;
The plurality of cells are partitioned from each other, and among cells belonging to the effective cell group, the size of the cell through which the carrier gas first passes is the largest,
The effective cell group includes at least two or more of the plurality of cells. The method of claim 7,
The effective cell group includes a cell through which a carrier gas passes first and a second cell among the plurality of cells. The method of claim 7,
The effective cell group includes a cell through a carrier gas first, a cell via a second cell, and a cell via a third cell among the plurality of cells. The first flow path, which is the path through which the fluid can move, is in communication with the first flow path, and a first inlet for injecting fluid into the first flow path, and a first outlet for communicating with the first flow path and discharging vaporized material to the outside. A first vaporizer comprising a first canister having a; And
A second flow path which is a path through which the fluid can move, a second inlet communicating with the second flow path to inject fluid into the second flow path, and a second outlet communicating with the second flow path and discharging vaporized material to the outside A second vaporizer comprising a second canister having a; And
Includes; connection line connecting the first vaporizer and the second vaporizer in series,
At least one of the first canister and the second canister is a canister according to any one of claims 1 to 9,
The vaporization system in which the material vaporized in the first vaporizer is transferred to the second vaporizer through the connecting line. The method of claim 10,
At least one of the first flow path and the second flow path is a vaporization system, which is a stacked flow path. The method of claim 10,
At least one of the first vaporizer and the second vaporizer is a vaporization system, which is a bubble-type vaporizer. The method of claim 10,
At least one of the first flow path and the second flow path will be a curved flow path, the vaporization system. The method of claim 10,
At least one of the first vaporizer and the second vaporizer
R≥ 4,
Here, R = L/A, L is the length of the flow path through which the carrier gas is moved, and A is the cross-sectional area of the flow path through which the carrier gas is moved, the vaporization system. The method of claim 14,
Further comprising a first coupler and a second coupler,
The inlet of the connection line is coupled to the first vaporizer detachably by a first coupler, and the outlet of the connection line is detachably coupled to the second vaporizer by a second coupler.

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