KR20190093983A - Detaching apparatus and detaching method - Google Patents

Abstract

The present invention relates to an apparatus for detaching a sheet attached onto a basic material, which is provided with a suction unit capable of sucking and supporting the sheet through vacuum suction force therein and includes a roller unit capable of horizontal movement. The suction unit is provided on a partial portion in the roller unit and is intermittently formed with vacuum in accordance with rotation movement of the roller unit. Therefore, according to one embodiment of the present invention, the apparatus does not need to replace a tape providing adhesive force because of supporting the sheet by the vacuum suction force without using the tape or the adhesive force as in the past. Accordingly, the present invention reduces time required for replacement of the tape or repair of the roller unit, thereby increasing an operation rate of the sheet detaching apparatus and reducing costs for replacement. In addition, the present invention reduces generation of leakage when forming the vacuum suction force, thereby being possible to more stably suck and support the sheet. In addition, the present invention reduces generation of leakage when forming the vacuum suction force, thereby more stably sucking and supporting the sheet.

Description

Peeling device and peeling method {DETACHING APPARATUS AND DETACHING METHOD}

TECHNICAL FIELD The present invention relates to a peeling apparatus and a peeling method, and more particularly, to a peeling apparatus and a peeling method capable of improving the operation rate of a sheet peeling apparatus for peeling a sheet from a base material and more easily peeling the sheet.

Various types of display devices, such as organic light emitting display devices and liquid crystal display devices, are used for TVs, portable terminals, computers, and monitors of various information devices. Such display devices attach a display panel for displaying an image and a film for protecting the display panel in a direction in which the image or light is emitted.

Sheets to protect the upper and lower surfaces of the film are attached to the panel (hereinafter, attached surface) attached to the panel. Thus, after peeling off the sheet from the film before attaching it to the panel, a bonding step of bonding the panel and the attaching surface of the film from which the sheet is peeled off is performed.

On the other hand, in peeling a sheet from a film, the peeling apparatus which is rotatable and provided with the roller which has an adhesion function is used. In order for the roller to have an adhesive function, an adhesive tape is attached to the outer peripheral surface of the roller.

For peeling the sheet, the peeling device is moved to move the roller to one end of the sheet, for example the top of the corner region of any of the four corners in the case of a square shaped sheet. When the roller is lowered, a part of the sheet adheres to the roller by the adhesive force. Then, when the peeling apparatus is moved horizontally, other regions of the sheet are gradually peeled from the film from the region attached to the roller.

As mentioned above, although the sheet is peeled off using the adhesive force of the roller, when peeling a certain number of times, the adhesive force is lowered, and the tape needs to be replaced. In addition, since the peeling apparatus cannot be driven to replace the tape, the operation rate of the peeling apparatus is lowered, which causes a decrease in product production rate.

In order to solve the problem caused by the above-mentioned tape replacement, the sheet was peeled off using a roller configured to have a function of vacuum suction force. The roller has a plurality of vacuum holes are formed in the circumferential direction of the outer circumferential surface, the plurality of vacuum holes communicate with the empty space inside the roller. Here, the plurality of vacuum holes are formed to be arranged radially with respect to the entire outer circumferential surface of the roller, and the empty space inside the roller is connected to the vacuum pump.

By the way, when the vacuum pump is operated with the roller in contact with the sheet, the vacuum holes corresponding to or in contact with the sheet are closed by the sheet, but the other plurality of vacuum holes are opened without being closed. Thereby, a leak is generated by the other plurality of vacuum holes. Therefore, it is not easy to adsorb and support the seat by the vacuum suction force, and there is a problem in that the pumping size of the vacuum pump must be adjusted considerably in order to compensate for the amount of leak generation or to adsorb and support the seat.

Korea Patent Publication 10-2007-0094435

This invention provides the peeling apparatus and the peeling method which improved the operation rate.

The present invention provides a peeling apparatus and a peeling method including a roller unit with improved bearing capacity.

The present invention provides a peeling apparatus and a peeling method in which leak generation by a vacuum hole is prevented in supporting a sheet by a vacuum suction force.

The present invention is a device for peeling the sheet attached to the substrate, the suction unit is provided with a suction unit for adsorbing and supporting the sheet with a vacuum suction force therein, comprises a horizontally movable roller unit, the suction unit in the roller unit The suction unit is provided in a partial region, and the vacuum is formed intermittently according to the rotational operation of the roller unit.

The roller unit may include a rotating roller rotatable and provided with the suction part therein; And a fixing part inserted into the rotating roller and provided with a pocket communicating with the suction part at an inner portion thereof, wherein the rotating roller is rotatable in a state of being installed to surround an outer circumferential surface of the fixing part.

The suction part includes a vacuum hole formed to extend in the direction of the fixing part from the outer peripheral surface of the rotating roller.

The vacuum holes are provided in plural and arranged in the circumferential direction of the rotating roller.

The plurality of vacuum holes are arranged side by side in one region which is a partial region in the circumferential direction of the rotary roller.

The length of the pocket in the circumferential direction is longer than the distance from the vacuum hole at one end to the vacuum hole at the other end of the plurality of vacuum holes.

The pocket is located corresponding to the plurality of vacuum holes in the thickness direction.

The length of the pocket in the thickness direction is the same as or longer than the diameter of the vacuum hole.

On the outer circumferential surface of the rotating roller is coated a coating layer for generating adhesion or electrostatic force.

On the outer circumferential surface of the rotating roller, the peripheral area of the vacuum hole located at one outermost end of the plurality of vacuum holes is planar.

On the outer circumferential surface of the rotating roller, the peripheral region of each of the plurality of vacuum holes is planar.

The rotating roller is rotatable such that the plurality of vacuum holes sequentially communicate with the pocket.

In order to peel the sheet from the substrate, when the rotating roller and the sheet are brought into contact with each other, the rotating roller is held in a standby state such that only a vacuum hole located at one end of the plurality of vacuum holes communicates with the pocket. And the plurality of vacuum holes are sequentially communicated with the pocket by an operation in which the rotating roller continuously rotates in the direction in which the pocket is located.

And a return member connected to the rotary roller to rotate the rotary roller to the standby state when the sheet is separated and the sheet is separated from the rotary roller.

The return member has a spring connected to the rotating roller.

The return member has a motor or cylinder connected to the rotating roller.

And a grip positioned outside the roller unit and movable to move closer to the roller unit or to move away from the roller unit so that the sheet adsorbed and supported on the roller unit outer circumferential surface can be pressed toward the roller unit.

The present invention provides a method for peeling a sheet attached to a substrate, the process of supporting the portion of the sheet by suction suction vacuum suction provided in a portion of the inside of the rotatable rotating roller; Raising the rotating roller; And raising the rotating roller; And horizontally moving the rotating roller on which the sheet is adsorbed and supported. In the case of adsorbing a part of the sheet on the rotating roller, the rotating roller is rotated so that the suction part sequentially vacuums in the extending direction. Is formed.

In order to form a vacuum sequentially in the extending direction of the suction part, the rotary roller is rotated around a fixed part inserted into the rotary roller about a central axis, and the suction part is provided on an inner part of the fixed part. And sequentially communicate with the pocket in which the vacuum suction force is generated.

Before adsorbing and supporting a part of the sheet on the rotating roller, only one end portion which is a part of the suction part communicates with the pocket, and the remaining roller is kept in the standby state so as not to communicate with the pocket.

The suction part includes a plurality of vacuum holes, and the process of suction-supporting a portion of the sheet to the rotating roller includes: rotating the roller in a state in which only a vacuum hole at one end of the plurality of vacuum holes is in communication with the pocket. Lowering, adsorbing and supporting the sheet by the vacuum suction force of the vacuum hole communicating with the pocket; And rotating the rotating roller in a direction in which the pocket is positioned so that the plurality of vacuum holes are sequentially communicated with the pocket, thereby adsorbing and supporting the sheet by vacuum suction force of the plurality of vacuum holes.

The step of adsorbing and supporting a part of the sheet on the rotating roller may include rotating the rotating roller such that the sheet supported by the vacuum suction force of the plurality of vacuum holes corresponds to a grip located outside the rotating roller; And moving the grip in the direction in which the rotary roller is located, and pressing and fixing the sheet suctioned and supported by the rotary roller.

When the peeling of the sheet is completed, releasing the vacuum of the pocket and moving the grip to be separated from the rotating roller; And returning the rotating roller to the standby state.

According to the embodiment of the present invention, since the sheet is supported by the vacuum suction force without using the tape or the adhesive force as in the prior art, it is not necessary to replace the tape providing the adhesive force. Therefore, the time according to the tape replacement or the maintenance of the roller unit is saved, and the operation rate of the sheet peeling apparatus can be improved, and the cost according to the replacement can be reduced.

In addition, by providing a pocket in a part of the fixing portion, it is possible to prevent the occurrence of leaks due to a plurality of vacuum holes during vacuum formation. That is, according to the embodiment, since the vacuum is not formed in the entire inner circumferential direction of the fixing part, but the pocket is formed in a part of the circumferential direction, the plurality of vacuum holes are sequentially communicated with the pocket by the rotation of the rotating roller, whereby It is possible to prevent the occurrence of leakage through the vacuum hole that is not corresponding to the position.

1 is a view three-dimensionally showing a film with a sheet attached to one surface.
2 is a view showing three-dimensionally a state in which a part of the sheet is peeled from the film.
3 and 4 are three-dimensional views showing the bonding equipment having a peeling apparatus according to an embodiment of the present invention.
5 and 6 are cross-sectional views for conceptually explaining the bonding process between the film and the panel in the chamber in the bonding facility according to an embodiment of the present invention.
7 is a three-dimensional view showing a traction device according to an embodiment of the present invention.
8 is a three-dimensional view showing a roller unit according to an embodiment of the present invention.
9 is a transparent perspective view of the roller unit according to the embodiment of the present invention.
10 is a cross-sectional view taken along the line AA ′ of the roller unit of FIG. 8.
FIG. 11 is a cross-sectional view illustrating a state in which a rotating roller of the roller unit of FIG. 10 is rotated.
12 to 14 are three-dimensional views of the peeling process of the sheet according to the operation of the roller unit according to an embodiment of the present invention.
15 is a cross-sectional view sequentially showing a peeling process of the sheet according to the operation of the roller unit and the grip according to an embodiment of the present invention.
16 is a view showing a roller unit according to a first modification of the present invention.
17 is a view showing a roller unit according to a second modification of the present invention.
18 is a view showing a roller unit according to a third modification of the present invention.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention in more detail. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art to fully understand the scope of the invention. It is provided to inform you. Like numbers refer to like elements in the figures.

1 is a view three-dimensionally showing a film with a sheet attached to one surface. 2 is a view showing three-dimensionally a state in which a part of the sheet is peeled from the film. 3 and 4 are three-dimensional views showing the bonding equipment having a peeling apparatus according to an embodiment of the present invention. 5 and 6 are cross-sectional views for conceptually explaining the bonding process between the film and the panel in the chamber in the bonding facility according to an embodiment of the present invention. 7 is a three-dimensional view showing a traction device according to an embodiment of the present invention. 8 is a three-dimensional view showing a roller unit according to an embodiment of the present invention. 9 is a transparent perspective view of the roller unit according to the embodiment of the present invention. 10 is a cross-sectional view taken along the line AA ′ of the roller unit of FIG. 8. FIG. 11 is a cross-sectional view illustrating a state in which a rotating roller of the roller unit of FIG. 10 is rotated. 12 to 14 are three-dimensional views of the peeling process of the sheet according to the operation of the roller unit according to an embodiment of the present invention. 15 is a cross-sectional view sequentially showing a peeling process of the sheet according to the operation of the roller unit and the grip according to an embodiment of the present invention. 16 is a view showing a roller unit according to a first modification of the present invention. 17 is a view showing a roller unit according to a second modification of the present invention. 18 is a view showing a roller unit according to a third modification of the present invention.

First, with reference to FIG. 1 and FIG. 2, the base material F applied to the bonding apparatus which concerns on an Example is demonstrated. The substrate F is attached with a sheet S for protecting the substrate F on a surface (hereinafter, attached surface) attached to the panel among upper and lower surfaces. The substrate F may be, for example, a flexible film.

In the bonding apparatus according to the embodiment of the present invention, the sheet S is peeled from the substrate F (see FIG. 2), and the substrate F from which the sheet S is peeled off and the panel P serving as the display device are bonded. Facility.

3 to 6, the cementation facility according to the embodiment of the present invention includes a chamber part 10 having an internal space, a lower stage positioned inside the chamber part 10, and capable of mounting the substrate F on one surface thereof. 22, a sheet S from the upper stage 21 and the substrate F, which is positioned opposite to the lower stage 22 in the chamber 10, and supports the panel P to be bonded to the substrate F. The peeling apparatus 3000 which peels off) is included.

The chamber unit 10 according to the embodiment is located on the upper side of the lower chamber 12 and the lower chamber 12 having an inner space, and includes an upper chamber 11 capable of lifting up and down. Of course, the lower chamber 12 may be lifted or lowered, or both the upper chamber 11 and the lower chamber 12 may be configured to be lifted up and down.

The lower stage 22 is installed in the lower chamber 12, and the substrate F is mounted on one surface thereof, that is, the upper surface. When the substrate F is seated on the lower stage 22, first, the sheet is peeled from the substrate F using the peeling apparatus 3000, and then the substrate F and the panel P from which the sheet S is peeled off. )).

The upper stage 21 is installed inside the upper chamber 11 so as to face the lower stage 22. The panel P, which is to be bonded to the substrate F, is supported on a surface of the upper stage 21 facing the lower stage 22, that is, the lower surface. The panel P may be, for example, an organic light emitting display device or a liquid crystal display device. The upper stage 21 can be raised and lowered, and when peeling of the sheet S from the substrate F on the lower stage 22 is completed, the upper stage 21 is lowered to bond the panel P and the substrate F together.

As described above, the lower chamber 12 and the upper chamber 11 according to the embodiment can be separated and mutually fastened, and the upper chamber 11 can be raised and lowered. In the bonding apparatus according to the embodiment, the upper chamber 11 is raised to separate the lower chamber 12 and the upper chamber 11 in peeling the sheet S from the substrate F with the peeling apparatus 3000. The sheet S is peeled off while the base material F is exposed to air.

In the above, the lower stage 22 and the upper stage 21, the upper stage 21 is configured to be able to move up and down, but is not limited to this, the lower stage 22 is capable of raising and lowering, or lower stage ( Both the 22 and the upper stage 21 can be configured to be liftable.

3, 4, and 7, the peeling apparatus 3000 according to the embodiment includes a sheet (S) so as to be able to pull the sheet S attached on the attachment surface of the substrate F. A traction device 3100 capable of supporting or gripping a portion of S) and capable of raising and lowering and horizontal movement, a first horizontal moving part 3500a for horizontally moving the traction device 3100 in one direction, and a traction device on one side A gantry 3600 mounted on the first horizontal moving part 3500a while being supported or mounted, and movable horizontally in one direction by the first horizontal moving part 3500a. The horizontal moving member mounted on the gantry 3600 with the towing device 3100 mounted on one side and horizontally movable in the other direction crossing the moving direction (one direction) by the first horizontal moving part 3500a. 3700, the driving force for moving the horizontal moving member 3700 supported by the traction device 3100 in the Y-axis direction is provided. The second comprises a horizontal moving part (3500b) that. In addition, the gantry 3600 may be positioned between the horizontal moving member 3700 and may include a fastening part 3800 to which the second horizontal moving part 3500b is fixed and fastened.

Hereinafter, the horizontal movement direction of the traction apparatus 3100 by the first horizontal movement unit 3500a is the X axis direction, and the horizontal movement direction of the traction apparatus 3100 by the second horizontal movement unit 3500b is the Y axis movement direction. This is defined as.

The first horizontal moving part 3500a extends in one direction, for example, in the X-axis direction, and is provided with a gantry 3600 so as to slide in the extension direction. The first horizontal moving part 3500a according to the embodiment includes a pair of first horizontal moving parts 3500a each extending in the X-axis direction, and the pair of first horizontal moving parts 3500a includes: They are arranged in the Y axis and spaced apart from each other. Each of the pair of first horizontal moving parts 3500a according to the exemplary embodiment may be a rail in which a lower portion of the gantry 3600, which will be described later, is fastened to slide.

As described above, the pair of first horizontal moving parts 3500a are spaced apart in the Y-axis direction, and the chamber part 10 is installed in the space. The length of the pair of first horizontal moving parts 3500a in the X-axis direction is longer than that of the chamber part 10 in the X-axis direction, and the separation between the pair of first horizontal moving parts 3500a is provided. The chamber portion 10 is located in the space. Accordingly, the pair of first horizontal moving parts 3500a extends to the outside of the chamber part 10 in the X-axis direction.

In addition, when the chamber part 10 is positioned in the spaced space between the pair of first horizontal moving parts 3500a, the lower stage 22 located inside the lower chamber 12 moves the pair of first horizontal moving parts. It is preferable to be installed to be located on one side of the portion (3500a). In other words, the first horizontal moving part 3500a so that the traction device 3100 mounted on the gantry 3600 installed on the first horizontal moving part 3500a can be positioned above the lower stage 22. The installation height of the can be adjusted. For example, the first horizontal moving part 3500a may be positioned below the upper surface of the lower stage 22, and the traction device 3100 may be positioned above the lower stage 22.

The gantry 3600 mounts a traction device 3100 to horizontally move the traction device 3100 in the X-axis direction. The gantry 3600 according to the embodiment extends downwardly from both ends in the extending direction of the first support 3610 and the first support 3610 extending in the Y-axis direction, and a lower portion thereof moves in the first horizontal direction. And a pair of second supports 3620 that can be fastened onto the portion 3500a. Here, the second support 3620 is configured to slide along the extending direction of the first horizontal moving part 3500a.

The horizontal moving member 3700 interconnects them between the gantry 3600 and the traction device 3100 and is horizontally movable in the Y axis direction. More specifically, the horizontal moving member 3700 is mounted on the first support 3610 so as to be located in front of the first support 3610 of the gantry 3600 and in front of the horizontal moving member 3700. Traction device 3100 is mounted.

The horizontal moving member 3700 according to the embodiment is a plate shape, but is not limited thereto. The horizontal moving member 3700 may be changed into various shapes capable of horizontally moving in the Y axis direction while supporting the traction device 3100.

One end of the second horizontal moving part 3500b is connected to the horizontal moving member 3700 to move the horizontal moving member 3700 in the Y-axis direction. The second horizontal moving part 3500b according to the embodiment is a device having a ball screw, and more specifically, is installed to be connected to the horizontal moving member 3700 and is movable in the Y axis direction together with the horizontal moving member 3700. Horizontal movement block 3510, one end is connected to the horizontal movement block 3510, the ball screw 3520 extending in the Y-axis direction, the other end of the ball screw 3520 is connected to the ball screw 3520 in the forward direction or It may include a motor 3520 for rotationally driving in the reverse direction. By the operation of the second horizontal moving part 3500b, the horizontal moving member 3700 moves horizontally in the Y axis direction, and thus the traction device 3100 mounted on the horizontal moving member 3700 is horizontal in the Y axis direction. Is moved.

The second horizontal moving part 3500b is not limited to the above-described embodiment, and various means capable of moving the horizontal moving member 3700 in the Y-axis direction are possible.

In the peeling apparatus 3000 according to the exemplary embodiment, a fastening part 3800 is installed between the gantry 3600 and the horizontal moving member 3700. In addition, the fastening part 3800 according to the embodiment has a box shape in which the front side toward the horizontal moving member 3700 is opened. In addition, at least a part of the horizontal moving block 3510 and the ball screw 3520 of the second horizontal moving part 3500b described above are accommodated inside the fastening part 3800 and include another end of the ball screw 3520. A part is installed and supported to penetrate the side wall of the fastening part 3800, and the motor 3520 is positioned outside the fastening part 3800.

The traction device 3100 supports or grips the sheet S so as to allow the traction of the sheet S attached on the substrate F. FIG. Traction device 3100 according to the embodiment is a retraction unit 3200 having a roller unit 3210 capable of supporting or gripping a portion of the sheet S covering the substrate F seated on the lower stage 22. ), The elevating unit 3300 which provides driving force for elevating the towing unit 3200, and is installed to connect between the elevating unit 3300 and the towing unit 3200, and elevating according to the operation of the elevating unit 3300 Possible support 3400.

The elevating part 3300 is mounted on the horizontal moving member 3700 to be located in front of the horizontal moving member 3700. In addition, the elevating rail 3310 which extends in an up and down direction is provided on one surface of the elevating unit 3300 where the traction unit 3200 or the support unit 3400 is located, and the movable elevating rail 3310 can slide along the elevating rail 3310. The falling movement block 3320 is mounted.

The support part 3400 is installed to support the lifting unit 3200 to connect between the lifting unit 3320 and the towing unit 3200 to allow the lifting unit 3200 to move up and down. The support 3400 may include a first support member 3410 mounted on the elevating moving block 3320, and a second support member 3420 installed to connect the first support member 3410 and the towing unit 3200. Include.

The second support member 3420 may be fastened and detached from the tow unit 3200, and when the tow unit 3200 is fastened to the second support member 3420, the angle of the tow unit 3200 may be adjusted.

According to the elevating unit 3300 and the support unit 3400 described above, the elevating movement block 3320 is connected to the elevating movement block 3320 by an operation of sliding in an up and down direction along the elevating rail 3310. The support part 3400 and the towing part 3200 connected to the support part 3400 move up and down.

Referring to FIG. 7, the towing unit 3200 may include a substrate unit mounted on a roller unit 3210 and a lower stage 22 capable of adsorbing and supporting a workpiece to be peeled off by a vacuum suction force, that is, the sheet S. When the roller unit 3210 contacts or collides with the sheet S on the F), the roller unit 3210 and the roller buffer unit 3220 that can be driven in an upward direction by the force are mounted, and the roller is rotatable. It is provided to connect between the roller support 3230, the roller support 3230, and the roller unit 3210 supporting the unit 3210, and the sheet S peeling process is completed, and the sheet S from the roller unit 3210 is completed. Is separated, the return member 3250 for returning the rotated roller unit 3210 to its original state and the sheet S which is adsorbed and supported by the roller unit 3210 are located on one side of the roller unit 3210. A grip 3240 fixed to the roller unit 3210 and a grip 3240 are connected so that the grip 3240 is rolled. And a grip moving part 3250 to move to approach or move away with the unit 3210.

The roller buffer unit according to the embodiment is mounted on the upper portion of the roller support, the buffer moving unit 3221, which is capable of moving up and down, the housing 3222 and the buffer moving unit 3221 spaced apart from the upper side of the buffer moving unit 3221 And a shaft 3223 installed to connect between the housing 3222. The operation of the roller buffer part 3220 will be briefly described. When the roller unit 3210 contacts or collides with the substrate F seated on the lower stage 22, the force is applied to the roller unit 3210. And a buffer moving part 3221 through the roller support 3230. Accordingly, the buffer moving part 3221 moves upward along the shaft 3223, and the roller support 3230 and the roller unit 3210 move upward. By the operation of the roller buffer part 3220, even if the roller unit 3210 collides with the seat S seated on the lower stage 22, the force can be buffered so that the force is dispersed.

The grip 3240 serves to more firmly fix the roller S 3210 to the roller unit 3210 when a part of the sheet S is attracted to the outer circumferential surface of the roller unit 3210 by the vacuum suction force of the roller unit 3210. The grip 3240 is positioned at one side, for example, an upper side of the roller unit 3210, and has a curved surface so that one surface facing the roller unit 3210 matches the shape of the roller unit 3210.

The grip moving part 3250 moves the grip 3240 toward the roller unit when a part of the sheet S is adsorbed and supported by the roller unit 3210, thereby moving the sheet S supported by the roller unit 3210. Support and fix more firmly. The grip moving unit 3250 according to the embodiment has a cylindrical shape, and a grip 3240 is mounted at one end thereof, and the grip support block 3251 and the grip support block 3325 are movable to move closer or away from the roller unit 3210. It is positioned to be spaced to one side of the grip driving unit 3252 and the grip support block 3325 that provides a driving force for moving the grip support block (3251) is installed to connect the grip driving unit (3252), the grip driving unit (3252) And a shaft 3253 movable by).

The roller unit 3210 is rotatable and adsorbs and supports the sheet S with a vacuum suction force. The roller unit 3210 according to the embodiment is an empty space and is provided in an inner partial region, and has a suction unit capable of adsorbing and supporting the sheet S by a vacuum suction force, and the suction unit is configured to rotate the roller unit 3210. Therefore, a vacuum may be formed intermittently. Here, the suction part may be a hole (hereinafter, referred to as a vacuum hole) formed to penetrate inward from the outer circumferential surface of the roller unit 3210, and a plurality of vacuum holes may be provided.

Hereinafter, in describing the roller unit 3210 according to the embodiment, the suction unit includes a vacuum hole or the suction is a vacuum hole.

8 to 15, the roller unit 3210 according to the embodiment is rotatable and has a hollow hollow shape, each extending in an inward direction from an outer circumferential surface thereof, and arranged in a circumferential direction. A pocket having a volume corresponding to or greater than an area in which the rotary roller 3211 and the rotary roller 3211 are provided, and the plurality of vacuum holes H are arranged in a row. And a fixing part 3212 connected to the vacuum forming part.

The rotary roller 3211 according to the embodiment may have a hollow shape having a circular cross section, and the rotary roller 3211 may have a sheet S of the substrate F on which the rotary roller 3211 is seated on the lower stage 22. In the contact-supported state, when the horizontal moving force is transmitted to the towing unit 3200, the force is rotatable by the force. A vacuum hole H is provided in a portion of an outer circumferential surface of the rotating roller 3211, and the vacuum hole H is a flow path or tubular shape formed extending from the outer circumferential surface of the rotating roller 3211 toward the fixing part 3212. The vacuum holes (H) are provided in plural, the plurality of vacuum holes (H) are arranged in the circumferential direction of the rotary roller (3211) to be spaced apart from each other. A plurality of vacuum holes (H) according to the embodiment is provided to be arranged in some areas in the circumferential direction of the rotary roller 3211, the vacuum hole (H) is not formed in the other areas. As a more specific example, when the area (width) of the circular rotating roller 3211 is divided by the radial direction of the rotating roller 3211, a plurality of vacuum holes H are arranged in a quarter area. The vacuum hole H is not formed in the remaining 3/4 region.

Here, the region in which the plurality of vacuum holes H are formed is one of the outermost regions of the region in which the plurality of vacuum holes H are continuously formed or the plurality of vacuum holes H arranged in the circumferential direction of the rotary roller 3211. It means the area from the vacuum hole (H) located to the vacuum hole (H) located at the outermost side. The area (or width) of the region in which the plurality of vacuum holes H is formed may be formed as one quarter of the area (or width) of the rotary roller 3211. Of course, the area (or width) of the area in which the plurality of vacuum holes H is formed is not limited to 1/4 of the area (or width) of the rotating roller 3211, and compared to the area (or width) of the rotating roller 3211. For small areas, it can be adjusted to be smaller or larger than 1/4.

In addition, the rotary roller 3211 as described above may be made of urethane.

The fixed part 3212 is a shape corresponding to the rotating roller 3211, for example, circular shape, and is inserted in the empty space of the center of the rotating roller 3211. The fixing part 3212 is provided inside the fixing part 3212 so as to penetrate in the thickness direction of the fixing part 3212, and has a flow path (hereinafter, referred to as a vacuum flow path 3212a) connected to the vacuum forming part 3900 described later. By the operation of the vacuum forming unit 3900, the inside of the vacuum flow path 3212a provided in the fixed part 3212 becomes a vacuum.

The inside of the fixing part 3212 is provided with a pocket PK for transmitting the vacuum suction force of the vacuum flow path 3212a to the plurality of vacuum holes H. The pocket PK may be an empty space provided by processing the inside of the fixing part 3212, and extends from the vacuum flow path 3212a in the direction of the outer circumferential surface of the fixing part 3212. Accordingly, one end of the pocket PK communicates with the vacuum flow path 3212a on the basis of the radial direction of the fixing part 3212, and the other end is in contact with the outer circumferential surface of the rotating roller 3211.

Of course, the pocket PK may be formed by separately inserting the pocket PK into the fixing part 3212 and not manufacturing the inside of the fixing part 3212.

Hereinafter, the pocket PK will be described in more detail. First, the pocket PK will be described based on the thickness direction of the fixing part 3212. The pocket PK is formed inside the fixing part 3212, and is not formed to penetrate both outer surfaces of the fixing part 3212 in the thickness direction, that is, from one side to the other side. It is formed to be located between the other side. In addition, in the thickness direction of the fixing portion 3212, the pocket PK is positioned to correspond to the plurality of vacuum holes H formed in the rotary roller 3211. This is to allow the pocket PK and the vacuum hole H to communicate with each other when the rotating roller 3211 rotates, so that the vacuum suction force of the pocket PK is transmitted to the vacuum hole H.

The length of the pocket PK in the thickness direction of the fixing portion 3212 is provided to be equal to or larger than the diameter of the vacuum hole H.

In forming the vacuum flow path 3212a in the fixing portion 3212, it is more effective to be located at the center of the radial direction of the fixing portion 3212. However, the present invention is not limited thereto and may be formed at various positions to communicate with the vacuum forming unit 3900 and the pocket PK.

As described above, the pocket according to the embodiment extends from the vacuum flow passage 3212a toward the rotating roller 3211, and the length in the circumferential direction gradually increases from the vacuum flow passage 3212a toward the rotation roller 3211. The shape is, for example, a fan shape. Of course, the shape of the pocket PK is not limited to the above-mentioned fan shape, and may be changed into the various forms which can communicate with the vacuum flow path 3212a and the some vacuum hole H. FIG.

In addition, the circumferentially extending length of the other end of the pocket PK in contact with the inner circumferential surface of the rotary roller 3211 is the length of the region where the plurality of vacuum holes H are formed, that is, the other side from the vacuum hole H located at one outermost side. It is formed to be equal to or greater than the length up to the vacuum hole (H) located at the outermost.

Hereinafter, the process of adsorbing and supporting a part of the sheet S on the roller unit 3210 and the process of peeling the sheet so that the sheet S can be pulled using the roller unit 3210 according to the embodiment will be described. do.

First, the tow portion 3200 is horizontally moved so that the sheet is in contact with the outer circumferential surface of the rotating roller 3211. Here, the part which is in direct contact with the rotating roller 3211 may be, for example, an edge of the sheet S as a part of the sheet S. More specifically, when the rectangular sheet, as shown in Figure 14 may be an area adjacent to any one of the four corners.

And before contacting the rotating roller 3211 to the sheet | seat S, the position of the some vacuum hole H with respect to the pocket PK should be adjusted beforehand. That is, as illustrated in FIGS. 10, 12, and 15A, only the vacuum holes H at one end of the plurality of vacuum holes H should be disposed to correspond to or communicate with the pocket PK. In other words, the vacuum hole H at one end thereof is located below the pocket PK, and the remaining plurality of vacuum holes H are arranged in the opposite direction to the position of the pocket PK. The vacuum hole H at one end includes at least the outermost vacuum hole H at one end.

Hereinafter, the rotating roller 3211 Only the vacuum hole H at one end communicates with the pocket, and the position of the plurality of vacuum holes H with respect to the pocket PK is adjusted so that the remaining vacuum holes H do not communicate with the pocket PK. Call it state.

Then, as described above, the positions of the plurality of vacuum holes H with respect to the pocket PK are adjusted, and the state in which the vacuum holes H at one end communicating with the pocket PK face the sheet S. When the towing unit 3200 is lowered, as shown in FIG. 15A, the vacuum hole H at one end in communication with the pocket PK is in contact with the sheet, and the vacuum hole at one end is made by the sheet S. (H) is closed. At this time, since the vacuum is formed in the pocket PK according to the operation of the vacuum forming unit 3900, the sheet corresponding to the vacuum hole H at one end is positioned by the vacuum suction force of the vacuum hole H at one end. The area is adsorbed and supported.

Subsequently, the traction part 3200 operates any one of the first horizontal moving part and the second horizontal moving part so that the rotary roller 3211 can rotate in the direction in which the pocket PK is positioned, thereby operating in the X-axis direction and Y. When a force to move in any one of the axial directions is applied, the rotating roller 3211 in contact with the sheet S rotates as shown in Figs. 11, 13, 15b and 15c by the force. . Accordingly, as shown in FIGS. 11, 13, 15b and 15c, the plurality of vacuum holes H are sequentially positioned in the pockets. At this time, the sheet S is wound around the outer circumferential surface of the rotary roller 3211 by the vacuum suction force by the plurality of vacuum holes H, and is firmly adsorbed and supported.

Subsequently, when one of the first horizontal moving part 3500a and the second horizontal moving part 3500b is operated to further rotate the rotating roller 3211, as shown in FIGS. 14 and 15D, a plurality of vacuum holes are provided. (H) and the sheet S adsorbed and supported thereon are moved to the position of the grip 3240 to face the grip 3240.

When the sheet S supported by the plurality of vacuum holes H is rolled up to the grip position by being rolled up by the rotary roller 3211, the grip moving part 3250 is operated to rotate the grip 3240 as shown in FIG. 15E. The sheet S is fixed or gripped by moving toward the roller 3211.

Thereafter, the elevating unit 3300 is operated to raise the tow unit 3200 as shown in FIG. 15F, and then at least one of the first horizontal moving unit 3500a and the second horizontal moving unit 3500b is operated. It is horizontally moved as shown in Figs. 14 and 15G. As the towing portion 3200 moves horizontally while a part of the sheet S is towed by the roller unit 3210, the sheet S on the substrate F moves in the horizontal movement direction of the towing portion 3200. It is gradually peeled off from the substrate (F).

Thus, in the embodiment of the present invention Since the sheet S is supported by the vacuum suction force without using the tape or the adhesive force as in the related art, there is no need to replace the tape providing the adhesive force. Therefore, the time according to the tape replacement or the repair of the roller unit 3210 is saved, and the operation rate of the sheet peeling apparatus can be improved, and the cost according to the replacement can be reduced.

In addition, by providing a pocket in a part of the fixing portion 3212, leakage of a plurality of vacuum holes can be prevented from being formed during vacuum formation. That is, according to the embodiment, since the vacuum is not formed in the entire inner circumferential direction of the fixing part 3212, but the pocket PK is formed in a part of the circumferential direction, the plurality of vacuum holes are caused by the rotation of the rotating roller 3211. By sequentially communicating (H) with the pocket PK, it is possible to prevent the occurrence of leaks through the vacuum hole H which does not correspond to the pocket PK.

On the other hand, as mentioned above, in the operation | movement in which the sheet | seat S of the rotating roller 3211 adsorb | sucks and supports, since the said rotating roller 3211 rotates, for the peeling of the next sheet | seat S, the rotating roller 3211 ) Must be returned to the standby state (see FIGS. 10 and 15A).

Therefore, in the embodiment, the return member 3250 is connected to the rotary roller 3211 to return the rotary roller 3211 to the standby state. The return member 3250 according to the embodiment is, for example, a spring (see FIG. 7), one end of which is connected to the rotating roller 3211 and the other end of which may be fixed to the roller support. Thus, when the peeling of the sheet is finished and the vacuum suction force is released and the grip 3240 is raised, the sheet S is separated from the traction part 3200, and at this time, the force applied to the roller unit 3210 is released. The rotating roller 3211 rotates automatically and returns to a standby state.

Of course, the return member 3250 is not limited to a spring, and may use various means, such as a cylinder and a motor, capable of rotating the rotary roller 3211 to the standby state. When the cylinder or motor is used as the return member 3250, when the seat S is separated from the towing portion 3200, the cylinder or motor is operated to rotate the rotary roller 3211 so as to be in a standby state.

The above-described roller unit 3210 has been described to adsorb and support the sheet S only by the vacuum suction force. However, the present invention is not limited thereto, and the roller unit 3210 may have an adhesive force together with a vacuum suction force. To this end, as in the first modification illustrated in FIG. 16, a coating layer (hereinafter, referred to as an adhesive coating layer) C having an adhesive function may be formed on the outer circumferential surface of the rotating roller 3211. That is, a material having an adhesive function, for example, polybutadiene is coated on the surface of the rotary roller 3211 to form an adhesive coating layer.

Thus, the roller unit 3210 has a vacuum suction force by the plurality of vacuum holes (H) and the adhesion ability by the coating layer (C), thereby supporting the sheet more firmly with the vacuum suction force and the adhesive force.

In addition, an electrostatic function may be provided to the roller unit 3210 along with a vacuum suction force. To this end, as shown in FIG. 16, a coating layer (hereinafter referred to as an electrostatic coating layer) C having an electrostatic function is provided to surround the outer circumferential surface of the rotating roller 3211. The electrostatic coating layer may be in the form of a film, and may be configured to alternately pattern positive and negative electrodes on an insulating layer formed on the film. When power is applied to the positive electrode and the negative electrode of the electrostatic coating layer as described above, an electrostatic force is generated, and the sheet S is supported by the electrostatic force.

Accordingly, the roller unit 3210 has a vacuum suction force by the plurality of vacuum holes H and an electrostatic force by the coating layer C, thereby supporting the sheet by vacuum suction force and adhesive force.

As for the rotary roller 3211 which concerns on embodiment, all the outer peripheral surfaces are curved surfaces. Accordingly, when the roller unit 3210 placed in the standby state is lowered, the outer circumferential surface of the rotating roller 3211 is in contact with the sheet, and the rotating roller 3211 is in line contact with the sheet S at this time.

However, the present invention is not limited thereto, and as in the second modification illustrated in FIG. 17, when the rotating roller 3211 is in the standby state, a vacuum at one end of the outer peripheral surface of the rotating roller 3211 communicating with the pocket PK is provided. The area around the hole may be formed to be a plane A rather than a curved surface. Then, when the rotating roller 3211 according to the second modification is lowered and brought into contact with the sheet S, the area around the vacuum hole H and the sheet S at one end of the outer circumferential surface of the rotating roller 3211 are faced. Contact. Therefore, when the rotating roller 3211 and the sheet S are in contact and supported, the bearing force by the roller unit 3210 according to the second modification in surface contact is compared with the roller unit 3210 according to the embodiment in which the linear contact is made. There is an effect to be improved.

In the second modification described above, the area around the vacuum hole H at one end of the outer circumferential surface of the rotary roller 3211 communicating with the pocket PK in the standby state is described as being processed into the plane A. FIG. However, the present invention is not limited thereto, and as in the third modified example illustrated in FIG. 18, the periphery of each of the plurality of vacuum holes H may be processed into the plane A of the outer circumferential surface of the rotating roller 3211.

Although not shown, adhesive force or electrostatic force is generated on the outer circumferential surface of each of the rotary roller 3211 according to the second modification shown in FIG. 17 and the rotary roller 3211 according to the second variant shown in FIG. Coating layer (C) can be coated.

Hereinafter, referring to FIGS. 1 to 16, a description will be given of an operation of the bonding apparatus according to an embodiment of the present invention, a peeling of the sheet through the bonding apparatus, and a method of bonding the film to the panel. In this case, the content overlapping with the above-described content is omitted or briefly described.

First, the upper chamber 11 is raised to separate the upper chamber 11 and the lower chamber 12, as shown in FIG. Subsequently, the substrate F to be attached to the panel P is seated on the lower stage 22 provided in the lower chamber 12.

Subsequently, the sheet S attached to the attachment surface of the base material F is peeled off using the peeling apparatus 3000 according to the embodiment. To this end, at least one of the first and second horizontal moving parts 3500b is operated so that the towing device 3100 located outside the lower chamber 12 is seated on the lower stage 22 above the seat S. Move to. At this time, when the traction device 3100 of the peeling device 3000 is the edge of the sheet S, for example, the sheet S is rectangular, as shown in FIG. It is located on the upper side. At this time, the rotary roller 3211 is in a standby state.

With the rotating roller 3211 in the standby state and the vacuum hole H at one end communicating with the pocket PK facing the sheet, the elevating portion is operated to operate the pocket as shown in FIG. 15A. When the traction part 3200 is lowered such that the vacuum hole H at one end communicating with PK is in contact with the seat S, the vacuum hole H at one end is closed by the seat S. Subsequently, when the vacuum forming unit 3900 is operated, the sheet region corresponding to the vacuum hole H at one end is formed by the vacuum suction force of the pocket PK and the vacuum hole H at one end thereof in communication therewith. Adsorption supported.

Thereafter, when the rotating roller 3211 operates any one of the first horizontal moving part 3500a and the second horizontal moving part 3500b so that the rotation part 3200 is rotatable in the direction in which the pocket PK is located. 11, 13, 15b and 15c rotate the rotating roller 3211 contacting the sheet S by the force. Accordingly, as shown in FIGS. 11, 13, 15b, and 15c, the plurality of vacuum holes H are sequentially positioned in the pockets, and at this time, the sheet ( S) is firmly adsorbed and supported while being wound on the outer circumferential surface of the rotary roller 3211.

Subsequently, when one of the first horizontal moving part 3500a and the second horizontal moving part 3500b is operated to further rotate the rotating roller 3211, as shown in FIGS. 14 and 15D, a plurality of vacuum holes are provided. (H) and the sheet S adsorbed and supported thereon face the grip 3240.

Next, the grip moving part 3250 is operated to move the grip 3240 toward the rotating roller 3211 to fix or grip the sheet S as shown in FIG. 15E.

Then, the lifting unit 3300 is operated to raise the towing unit 3200 as shown in FIG. 15F, and then at least one of the first horizontal moving unit 3500a and the second horizontal moving unit 3500b is operated. The towing device is horizontally moved as shown in FIGS. 14 and 15G. As the towing device 3100 moves horizontally while a part of the sheet S is towed by the roller unit 3210, the sheet S on the substrate F moves in the direction in which the towing device 3100 moves horizontally. It is gradually peeled off from the substrate (F).

When all the sheets S are peeled off from the base material F according to the horizontal movement of the traction apparatus 3100, the grip 3240 is moved away from the roller unit 3210, and the operation of the vacuum forming unit 3900 ends. When peeled, the peeled sheet S is carried out to the outside. At this time, the rotary roller 3211 is returned to the standby state by the return member 3250, for example, a spring. And, when peeling is complete | finished, the traction apparatus 3100 is moved to the chamber part 10 outer side.

On the lower stage 22, the base material F from which the sheet S was peeled off is placed. For bonding between the substrate F and the panel P, the panel is supported on the upper stage 21, the upper chamber 11 is lowered and sealed, and the panel P is lowered adjacent to the substrate F. . Thereafter, the inside of the chamber part 10 is formed in a vacuum atmosphere, and then the upper stage 21 is lowered to make the substrate F contact the panel P. At this time, since the attachment surface of the base material F from which the sheet S was peeled off has adhesive force, as the panel P contacts with the base material F, a film adheres to the panel P. As shown in FIG.

In the embodiment, since the sheet S is supported by the vacuum suction force without using the tape or the adhesive force as in the prior art, it is not necessary to replace the tape providing the adhesive force. Therefore, the time according to the tape replacement or the repair of the roller unit 3210 is saved, and the operation rate of the sheet peeling apparatus can be improved, and the cost according to the replacement can be reduced.

In addition, by providing the pocket PK in a part of the fixing part 3212, it is possible to prevent the leakage of the plurality of vacuum holes H from occurring during vacuum formation. That is, according to the embodiment, since the vacuum is not formed in the entire inner circumferential direction of the fixing part 3212, but the pocket PK is formed in a part of the circumferential direction, the plurality of vacuum holes are caused by the rotation of the rotating roller 3211. By sequentially communicating (H) with the pocket PK, it is possible to prevent the occurrence of leaks through the vacuum hole H that does not correspond to the pocket PK.

11: upper chamber 12: lower chamber
21: upper stage 22: lower stage
3100: towing unit 3200: towing unit
3210: roller unit 3211: rotating roller
H: vacuum hole 3212: fixing part
PK: pocket 3240: grip
3260: return member 3300: elevation
3500a: first horizontal moving part 3500b: second horizontal moving part

Claims (23)

An apparatus for peeling a sheet attached on a substrate,
It is provided with a suction unit for adsorbing and supporting the sheet with a vacuum suction force therein, and includes a horizontally movable roller unit,
The suction part is provided in a portion of the inside of the roller unit,
The suction unit is a peeling device in which a vacuum is formed intermittently in accordance with the rotation operation of the roller unit. The method according to claim 1,
The roller unit,
A rotary roller rotatable and provided with the suction part therein; And
A fixing part inserted into the rotating roller and provided with a pocket communicating with the suction part at an inner part of the rotary roller;
Including,
And the rotating roller is rotatable in a state of being installed to surround an outer circumferential surface of the fixing part. The method according to claim 1,
The suction unit includes a vacuum hole formed to extend in the direction of the fixing portion from the outer peripheral surface of the rotary roller. The method according to claim 3,
The vacuum hole is provided with a plurality, the peeling apparatus arranged in the circumferential direction of the rotating roller. The method according to claim 4,
The peeling apparatus of which the said some vacuum hole was arranged side by side in one area | region which is a partial area | region of the circumferential direction of the said rotating roller. The method according to claim 5,
The length of the pocket in the circumferential direction is longer than the distance from the vacuum hole at one end to the vacuum hole at the other end of the plurality of vacuum holes. The method according to claim 4,
The said pocket is a peeling apparatus located in correspondence with the said some vacuum hole in the thickness direction. The method according to claim 4,
The length of the thickness direction of the said pocket is equal to the diameter of the said vacuum hole, or long peeling apparatus. The method according to claim 4,
Peeling apparatus coated with a coating layer for generating an adhesive force or an electrostatic force on the outer peripheral surface of the rotating roller. The method according to claim 4,
The outer peripheral surface of the rotating roller, wherein the peripheral region of the vacuum hole located at one outermost end of the plurality of vacuum holes is a planar shape. The method according to claim 4,
The peeling apparatus of the outer peripheral surface of the said rotating roller WHEREIN: The peripheral area | region of each of the said several vacuum hole is planar shape. The method according to claim 4,
And the rotating roller is rotatable such that the plurality of vacuum holes sequentially communicate with the pocket. The method according to claim 12,
When contacting the rotating roller and the sheet to peel the sheet from the substrate,
Among the plurality of vacuum holes, only the vacuum hole located at one end of the plurality of vacuum holes maintains the rotary roller in the standby state so as to communicate with the pocket,
And the plurality of vacuum holes are sequentially communicated with the pocket by an operation in which the rotating roller continuously rotates in the direction in which the pocket is located. The method according to claim 13,
And a return member connected to the rotating roller to rotate the rotating roller to be in the standby state when the sheet is finished peeling off and the sheet is separated from the rotating roller. The method according to claim 14,
And the return member has a spring connected to the rotating roller. The method according to claim 14,
And the return member has a motor or cylinder connected to the rotating roller. The method according to claim 11,
A peeling apparatus positioned outside the roller unit and including a grip movable to move closer to the roller unit or to move away from the roller unit so that the sheet adsorbed and supported on the roller unit outer circumferential surface is pressurized in the roller unit direction; . As a method of peeling a sheet attached on a substrate,
Suction supporting a part of the sheet by a vacuum suction force of a suction part provided in a part of the rotatable rotating roller;
Raising the rotating roller; And
Raising the rotating roller; And
Horizontally moving the rotating roller on which the sheet is adsorbed and supported;
Including,
In adsorbing a portion of the sheet on the rotating roller,
A rotating method, wherein the rotating roller is rotated so that the suction part is sequentially formed with vacuum in its extending direction. The method according to claim 18,
In the suction portion so that the vacuum is formed sequentially in the extending direction,
A peeling method in which the rotating roller is rotated around a fixing part inserted into the rotating roller with a central axis, so that the suction part is provided in an inner part of the fixing part and sequentially communicates with a pocket in which a vacuum suction force is generated. . The method according to claim 18,
A peeling method of maintaining the rotating roller in the standby state so that only one end portion, which is a part of the suction part, communicates with the pocket, and the rest does not communicate with the pocket, before the part of the sheet is supported by the rotating roller by suction. The method of claim 20,
The suction part includes a plurality of vacuum holes,
The process of adsorbing and supporting a portion of the sheet on the rotating roller,
Adsorbing and supporting the sheet by the vacuum suction force of the vacuum hole communicating with the pocket by lowering the rotating roller in a state in which only the vacuum hole at one end of the plurality of vacuum holes is in communication with the pocket; And
Rotating the rotating roller in a direction in which the pocket is positioned so that the plurality of vacuum holes are sequentially communicated with the pocket, thereby adsorbing and supporting the sheet by the vacuum suction force of the plurality of vacuum holes;
Peeling method comprising a. The method according to claim 21,
The process of adsorbing and supporting a portion of the sheet on the rotating roller,
Rotating the rotary roller such that the sheet supported by the vacuum suction force of the plurality of vacuum holes corresponds to the grip positioned outside the rotary roller; And
Moving the grip in the direction in which the rotary roller is positioned, and pressing and fixing the sheet adsorbed and supported by the rotary roller;
Peeling method comprising a. The method according to claim 22,
When the peeling of the sheet is completed, releasing the vacuum of the pocket and moving the grip to be separated from the rotating roller; And
Returning the rotating roller to the standby state;
Peeling method comprising a.

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