KR20170085209A - Apparatus for measuring of contact resistance of thermoelectric device and method thereof - Google Patents

Apparatus for measuring of contact resistance of thermoelectric device and method thereof Download PDF

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KR20170085209A
KR20170085209A KR1020160004520A KR20160004520A KR20170085209A KR 20170085209 A KR20170085209 A KR 20170085209A KR 1020160004520 A KR1020160004520 A KR 1020160004520A KR 20160004520 A KR20160004520 A KR 20160004520A KR 20170085209 A KR20170085209 A KR 20170085209A
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conductor
thermoelectric element
contact resistance
measured
measuring
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KR101798854B1 (en
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박상현
유충열
김홍수
서민수
김동국
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한국에너지기술연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/20—Measuring earth resistance; Measuring contact resistance, e.g. of earth connections, e.g. plates
    • G01R27/205—Measuring contact resistance of connections, e.g. of earth connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • H01L35/02—
    • H01L35/30—

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  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

The present invention relates to an apparatus and method for measuring the contact resistance of a thermoelectric element that can precisely measure the contact resistance of a thermoelectric element as a premise for developing a high-efficiency thermoelectric power generating module with reduced contact resistance. A second conductor arranged in alignment with the first conductor; A digital current source connected between the first conductor and the second conductor to supply a pulse current to the first conductor and the second conductor; And a measuring unit that receives a voltage for resistance measurement and scans the surface of the measured thermoelectric element interposed between the first conductor and the second conductor to measure the contact resistance.

Description

TECHNICAL FIELD [0001] The present invention relates to an apparatus and a method for measuring a contact resistance of a thermoelectric element,

The present invention relates to an apparatus and a method for measuring the contact resistance of a thermoelectric element, and more particularly, to an apparatus and method for measuring a contact resistance of a thermoelectric element which can precisely measure the contact resistance of the thermoelectric element as a premise for developing a high- And more particularly, to a resistance measuring apparatus and method.

Thermoelectric power generation technology, known as low-efficiency energy conversion technology for several decades, has been reported to be capable of efficiency of more than 10% in the mid-temperature range (300 to 700 ° C) and has been actively studied at home and abroad. In the process of manufacturing the thermoelectric module, the thermoelectric material and the electrode are bonded to each other. Reducing the contact resistance here is an essential technology for manufacturing the high-efficiency thermoelectric module.

Therefore, it is important to precisely measure the contact resistance of the thermoelectric element as a precondition for manufacturing a module with high efficiency. As shown in Fig. 1, the contact resistance measuring method by the extrapolation of the prior art is a method in which a sintered body of Mo- Element-in

Figure pat00001
A predetermined voltage V is applied between the reference point D on the thermoelectric element where titanium (Ti, Titanium) is used and the contact point C of the probe between the one side B of the electrode sintered body and one side (R) by measuring the contact resistance (R) according to the equation of V = IR by applying a predetermined current so that a current flows between the probe (A) and increasing the position value (x) . Thereafter, a continuous resistance value can be extrapolated according to a trend line obtained by approximating the obtained result values as described above.

However, according to the conventional method described above, the resistance of the bonded interface is obtained by measuring the resistance while increasing the position value x at predetermined intervals, and using a trend line approximately corresponding to the measured value, Since the contact resistance is very small, there is a problem that when the resistance measurement frequency is small, even if one of the measurement values for calculating the trend line is slightly changed, the error is very large.

In addition, according to the conventional method, there is a temperature difference between both ends of a sample to be measured due to the Peltier effect of the thermoelectric element depending on the current used for measuring the resistance, which causes an error in the measurement of the contact resistance.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a contact resistance measuring system of a direct measuring method for measuring the contact resistance of a thermoelectric element to reduce the error of the extrapolation method and reduce the temperature difference across the thermoelectric elements The present invention provides an apparatus and method for measuring the contact resistance of a thermoelectric element that reduces the error of contact resistance measurement by eliminating the Peltier effect.

According to an aspect of the present invention, there is provided an apparatus for measuring a contact resistance of a thermoelectric device, comprising: a first conductor; A second conductor arranged in alignment with the first conductor; A digital current source connected between the first conductor and the second conductor to supply a pulse current to the first conductor and the second conductor; And a measuring unit that receives a voltage for resistance measurement and scans the surface of the measured thermoelectric element interposed between the first conductor and the second conductor to measure the contact resistance.

Here, the measuring unit may include a spring probe having pins that contact the surface of the thermoelectric element to be measured.

The measurement unit may further include a micro-positioner for controlling the spring probe to be tilted with respect to the surface of the measured thermoelectric element.

In order to achieve the above object, the apparatus for measuring the contact resistance of a thermoelectric transducer of the present invention further includes a drive stage for moving the first conductor and the second conductor with the measured thermoelectric element in a scanning direction of the measurement unit .

Here, the first conductor and the second conductor may be copper (Cu).

The size of each vertical section of the first conductor and the second conductor may be 4 to 19 times the size of the vertical section of the thermoelectric element to be measured.

According to another aspect of the present invention, there is provided an apparatus for measuring a contact resistance of a thermoelectric device, the apparatus further comprising a metal housing accommodating the first conductor, the second conductor, the digital current source, the measurement unit, and the driving stage .

According to another aspect of the present invention, there is provided a method of measuring a contact resistance of a thermoelectric element to be measured interposed between a first conductor and a second conductor using a spring probe, Interposing the measured thermoelectric element between the first conductor and the second conductor; Supplying a pulse current between the first conductor and the second conductor; Contacting the spring probe with the surface of the to-be-measured thermoelectric element tilted; And moving the first conductor and the second conductor with the measured thermoelectric element in a scanning direction, and measuring a contact resistance through the spring probe.

In the present invention, a contact resistance measurement system of a direct measurement type is used to measure a contact resistance of a thermoelectric device, and a trend line approximation process is not required. An error occurring when an extrapolation method is applied, that is, It is possible to eliminate the error generated in the process of using the trend line obtained by approximating the resistance value and to accurately grasp the position and thickness where the interface is formed.

Meanwhile, the present invention has the effect of reducing the error of the contact resistance measurement by reducing the temperature difference across the thermoelectric elements and eliminating the Peltier effect, by using the pulse current during resistance measurement.

In addition, the present invention provides a thermoelectric transducing device in which the size of a conductor for applying a current to a thermoelectric element sample is made larger than the size of a sample, thereby facilitating heat absorption and heating through the conductor, thereby reducing a temperature difference between both ends of the thermoelectric element, So that the error of the contact resistance measurement can be reduced.

1 is a view showing a conventional apparatus for measuring contact resistance of a thermoelectric element.
2 is a view illustrating an apparatus for measuring the contact resistance of a thermoelectric device according to an embodiment of the present invention.
3A to 3D are graphs showing examples of pulse currents applied to the device of the present invention.
4A and 4B are diagrams showing a temperature difference generated between both ends of a thermoelectric element to be measured in a conventional apparatus for measuring a contact resistance of a thermoelectric element by a thermal imager.
FIGS. 5A and 5B are views showing a temperature difference generated between both ends of a thermoelectric element to be measured in a device for measuring the contact resistance of the thermoelectric element according to an embodiment of the present invention, using a thermal imager.
6A to 6D are graphs showing contact resistance measurement results when a DC current is supplied to a thermoelectric element.
7A and 7B are graphs showing contact resistance measurement results when a pulsed current is supplied to a thermoelectric element.
8 is a flowchart illustrating a method of measuring a contact resistance of a thermoelectric device according to an embodiment of the present invention.

The description of the disclosed technique is merely an example for structural or functional explanation and the scope of the disclosed technology should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the disclosed technology should be understood to include equivalents capable of realizing technical ideas.

Meanwhile, the meaning of the terms described in the present application should be understood as follows.

The terms " first ", " second ", and the like are used to distinguish one element from another and should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It is to be understood that the singular " include " or "have" are to be construed as including the stated feature, number, step, operation, It is to be understood that the combination is intended to specify that it is present and not to preclude the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

Each step may take place differently from the stated order unless explicitly stated in a specific order in the context. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the disclosed technology belongs, unless otherwise defined. Terms defined in commonly used dictionaries should be interpreted to be consistent with meaning in the context of the relevant art and can not be construed as having ideal or overly formal meaning unless expressly defined in the present application.

FIG. 2 is a view showing an apparatus for measuring the contact resistance of a thermoelectric transducer according to an embodiment of the present invention. The apparatus for measuring the contact resistance of a thermoelectric transducer according to an embodiment of the present invention includes a first conductor 110, A digital current source 200, a measuring unit 300, and a driving stage 400.

The first conductor 110 and the second conductor 120 are arranged in alignment with each other to fix the measured thermoelectric transducer 10 and are supplied with a pulse current from the digital current source 200, A pulse current is applied to the element 10. Here, the first conductor 110 and the second conductor 120 are preferably made of a copper (Cu) block, but the present invention is not limited thereto. For example, And a tin / copper (Sn / Cu) alloy.

The first conductor 110 and the second conductor 120 may have a function of heating and absorbing heat to decrease the temperature difference generated across the measured thermoelectric transducer 10, It is possible to perform a heat dispersing function for dispersing the heat at the portion where the heat is generated to make the temperature of the thermoelectric element 10 uniform as a whole. For this purpose, the size of the vertical cross- To 4 times the size of the < RTI ID = 0.0 > If the vertical cross section of the first conductor 110 and the second conductor 120 is too small, the heat dissipation effect can not be obtained. If the vertical cross section of the first conductor 110 and the second conductor 120 is too large, The horizontal and vertical lengths (E, F) and the weight of the frame are increased.

For example, when the size of the vertical cross section of the measured thermoelectric element 10 is about 0.3 x 0.8 = 0.24 cm 2, the size of the vertical section of the copper block which is the first conductor 110 and the second conductor 120 is When the temperature is about 1.15 cm 2 to 4.5 cm 2, preferably about 2.25 cm 2, the heating and endothermic effect can be observed.

Here, elastic members 111 and 112, for example, a spring constant of about 7.84 are formed at the other end where the first and second conductors 110 and 120 are not in contact with the measured thermoelectric element 10. [ N / cm can be provided to improve fixation and contact between the first conductor 110 and the second conductor 120 and the measured thermoelectric element 10.

The digital current source 200 is also connected between the first conductor 110 and the second conductor 120 to supply a pulse current to the first conductor 110 and the second conductor 120. That is, the digital current source 200 acts to apply a pulse current to the measured thermoelectric element 10 fixed between the first conductor 110 and the second conductor 120. Here, the digital current source 200 may apply a direct current (DC) current or an alternating current (AC) current as well as a pulse shape current.

That is, when the digital current source 200 for applying the pulsed current is used, the direction of the current is applied while changing in a short time interval, so that a temperature difference is not formed in the measured thermoelectric element 10 in a certain direction. In other words, by using the pulsed current as the measuring current, the Peltier effect generated in the measured thermoelectric element 10 can be relaxed.

On the other hand, the measuring unit 300 scans the surface of the measured thermoelectric element 10, which is received between the first conductor 110 and the second conductor 120, do. The measuring unit 300 may include a spring probe 310 and a micro-positioner 320.

The spring probe 310 has a pin that contacts the surface of the measured thermoelectric element 10 and can measure the contact resistance corresponding to the distance between the first conductor 110 and the pin by the equation V = IR . At this time, a probe of tungsten (W, Tungsten) may be used as a probe of the measuring unit 300. However, by using the spring probe 310, it is possible to prevent the surface of the thermoelectric transducer 10 from being scratched during scanning, It is possible to prevent an error caused by surface damage during measurement.

On the other hand, a camera (not shown) may be installed near the spring probe 310 to check whether the spring probe 310 is in contact with the surface of the measured thermoelectric element 10 and whether the spring probe 310 is bent under pressure .

Further, the micro positioner 320 controls the spring probe 310 to be tilted with respect to the surface of the measured thermoelectric element 10. At this time, the micro positioner 320 can be fixed to the floor separately from the driving stage 400, and the spring probe 310 can be tilted to smoothly perform the scanning measurement.

The driving stage 400 moves the first conductor 110 and the second conductor 120 with the measured thermoelectric element 10 in the scanning direction of the measuring unit 300. Here, the driving stage 400 preferably has a resolution of about 2 탆 or less for fine scanning. At this time, a screw (not shown) connected to the driving stage 400 may be rotated to apply a pressure for fixing to the measured thermoelectric element 10. In order to fix the thermoelectric element 10 to be measured while not damaging it, The pressure is preferably about 500 kPa or less.

That is, the spring probe 310 is in contact with the surface of the measured thermoelectric element 10 while being fixed to the micro positioner 320, and the measuring unit 300 moves the contact resistance It is measured continuously.

The entire equipment is connected to a metal shield (not shown) through a metal housing (not shown) that accommodates the first conductor 110, the second conductor 120, the digital current source 200, the measuring unit 300, (Metal Shield), so that the measurement can be performed. That is, interference with equipment such as white noise can be prevented through the metal housing.

3A to 3D are graphs showing an example of a pulse current applied to the device of the present invention. The pulse current applied by the digital current source 200 is generated in various forms as long as the temperature difference between both ends of the thermoelectric device can be reduced. .

3A, the time at which the pulse current applied by the digital current source 200 stays at the maximum value (I-High), that is, the time at which the pulse width Width and the minimum value I-low stay the same And the absolute values of the maximum value and the minimum value are set to be the same. At this time, it is preferable, but not limited, to perform the measurement at the point (M1 and M3) where the current falls from the highest value to the lowest value and at the point (M2) where the current rises from the lowest value to the highest value .

3B, the pulsed current shown in FIG. 3A is similar to other characteristics such as the pulse width. However, unlike the pulse-like current shown in FIG. 3A, the maximum value of the current is doubled and the lowest value of the current is set to 0 . ≪ / RTI >

3C, the time at which the pulse current applied to the digital current source 200 stays at the maximum value (I-High), that is, the time at which the pulse width Width and the minimum value I- And it is found that the absolute values of the maximum value and the minimum value are set differently, that is, the absolute value of the maximum value is set to be larger than the absolute value of the minimum value.

3C, the pulse current applied by the digital current source 200 is different from the time at which the pulse current remains at the maximum value (I-High), that is, the time at which the pulse width Width and the minimum value I- These pulse widths and the like are setting conditions that can be appropriately modified according to the actual environment of the equipment.

FIGS. 4A and 5B are diagrams illustrating a case where a current is supplied to the measured thermoelectric element by electric wires as in the conventional case, and when current is supplied using the first conductor 110 and the second conductor 120 of the present invention, As shown in FIG. 4A, the temperature difference between both ends of the element 10 was measured using a thermocouple, and a current of 50 mA was applied to the thermoelectric transducer 10 having a vertical section size of 0.24 cm 2 using a tin / copper wire The temperature difference ΔT between both ends is about 0.5 ° C. On the other hand, as shown in FIG. 5A, when the current of 50 mA is supplied by using the above-described copper block, the temperature difference between both ends is reduced to about 0.2 ° C. Meanwhile, as shown in FIG. 4B, when a current of 500 mA is supplied to the thermoelectric transducer 10 having a vertical section size of 0.24 cm 2 using a tin / copper wire, the temperature difference between both ends is about 2.3 ° C., As a result, when the current of 500 mA is supplied to the copper block using the above-described copper block, the temperature difference between both ends is reduced to about 0.3 캜. In other words, even if the current value supplied from 50 mA to 500 mA is increased 10 times by adopting the copper block having the wide vertical section for the first conductor 110 and the second conductor 120, It is possible to obtain a heat dispersion effect such that the temperature difference between the both ends of the thermoelectric element 10 increases only by 0.1 占 폚 compared with an increase of 1.8 占 폚.

FIGS. 6A to 6D are graphs showing contact resistance measurement results when a DC current is supplied to a thermoelectric element, FIGS. 7A and 7B are graphs showing contact resistance measurement results when a pulse current is supplied to the thermoelectric element, This will be described as follows.

At this time, the nonmetal portion is made of a bismuth telluride (BiTe) system, and the metal portion to be bonded is a copper (Cu) thermoelectric element.

6A is a graph showing the relationship between the distance from the thermoelectric element to the spring probe 310 and the distance from the probe 30 to the measuring probe 30 when the DC current of 40 mA to 100 mA is applied to the thermoelectric element at intervals of 10 mA, 300). As the current intensity increases, the Peltier effect increases. As a result, the resistance value increases as the temperature difference increases.

6B shows the resistance at both ends of the thermoelectric elements of each current size of 40 mA to 100 mA when the contact resistance is measured under the same conditions as in Fig.

Figure pat00002
,
Figure pat00003
) And the resistance difference (? R). It can be seen that the resistance difference between both ends greatly changes as the current intensity increases.

6C and 6D are measurement results after applying a current in the opposite direction to FIGS. 6A and 6B. As can be seen from FIG. 6D, it can be seen that the resistance difference at both ends greatly changes.

7A is a graph showing the relationship between the distance from the thermoelectric element to the spring probe 310 and the distance from the surface of the thermoelectric element to the probe probe 310 when the pulsed current of 40 mA to 100 mA is applied to the thermoelectric element at intervals of 10 mA. 300). It can be seen that the resistance value is almost constant because the temperature difference due to the Peltier effect is removed in spite of the increase of the current intensity.

Fig. 7B is a graph showing the relationship between the resistance at both ends of a thermoelectric element of each current size of 40 mA to 100 mA when the contact resistance is measured under the same conditions as Fig. 7A

Figure pat00004
,
Figure pat00005
) And the resistance difference [Delta] R, it can be seen that the resistance difference at both ends is constant despite the increase of the current intensity.

FIG. 8 is a flowchart illustrating a method of measuring a contact resistance of a thermoelectric device according to an embodiment of the present invention. Referring to FIGS. 2 to 8, a method of measuring a contact resistance of the thermoelectric device of the present invention will be described below.

First, the measured thermoelectric transducer 10 is interposed between the first conductor 110 and the second conductor 120 (S100). At this time, the measured thermoelectric element 10 can be fixed by the spring provided at the other end of the first conductor 110 and the second conductor 120, which are not in contact with the measured thermoelectric element 10.

Thereafter, the digital current source 200 is activated to supply the pulsed current between the first conductor 110 and the second conductor 120 (S200). The pulsed current is applied to the measured thermoelectric element 10 interposed between the first conductor 110 and the second conductor 120.

Next, the micro-positioner 320 is controlled to contact the spring probe 310 with the surface of the measured thermoelectric element 10 tilted (S300). At this time, a resistance measurement voltage is applied to the spring probe 310.

The driving stage 400 moves the first conductor 110 and the second conductor 120 with the measured thermoelectric element 10 in the scanning direction and the measuring unit 300 moves the spring probe 310 The contact resistance is measured according to the relational expression between the resistance measurement voltage and the pulse current (S400).

Although the disclosed method and apparatus have been described with reference to the embodiments shown in the drawings for the sake of understanding, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. I will understand that. Accordingly, the true scope of protection of the disclosed technology should be determined by the appended claims.

10: Thermoelectric element to be measured
110: first conductor
120: second conductor
200: Digital current source
300:
310: Spring probe
320: Micro Positioner
400: driving stage

Claims (8)

A first conductor;
A second conductor arranged in alignment with the first conductor;
A digital current source connected between the first conductor and the second conductor to supply a pulse current to the first conductor and the second conductor; And
And a measuring section which receives a voltage for resistance measurement and scans the surface of the measured thermoelectric element interposed between the first conductor and the second conductor to measure the contact resistance.
The method according to claim 1,
Wherein the measuring section includes a spring probe having a pin that contacts a surface of the measured thermoelectric element.
The method of claim 2,
Wherein the measuring unit further comprises a micro-positioner for controlling the spring probe to be tilted with respect to the surface of the measured thermoelectric element.
The method according to claim 1,
And a driving stage for moving the first conductor and the second conductor with the measured thermoelectric element in a scanning direction of the measurement unit.
The method according to claim 1,
Wherein the first conductor and the second conductor are copper (Cu).
The method of claim 5,
Wherein each of the first conductor and the second conductor has a size of a vertical cross section of 4 to 19 times the size of a vertical cross section of the thermoelectric element to be measured.
The method of claim 4,
Further comprising a metal housing for receiving the first conductor, the second conductor, the digital current source, the measurement unit, and the driving stage.
A method of measuring a contact resistance of a measured thermoelectric element interposed between a first conductor and a second conductor using a spring probe,
Interposing the measured thermoelectric element between the first conductor and the second conductor;
Supplying a pulse current between the first conductor and the second conductor;
Contacting the spring probe with the surface of the to-be-measured thermoelectric element tilted; And
And measuring a contact resistance through the spring probe while moving the first conductor and the second conductor with the measured thermoelectric element in a scanning direction.
KR1020160004520A 2016-01-14 2016-01-14 Apparatus for measuring of contact resistance of thermoelectric device and method thereof KR101798854B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190088718A (en) * 2018-01-19 2019-07-29 한국에너지기술연구원 Apparatus for measuring of contact resistance of thermoelectric device and method thereof
CN110514901A (en) * 2019-09-03 2019-11-29 福达合金材料股份有限公司 Welded type electrical contact member contact resistance device for quick testing and its test method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5511941B2 (en) * 2010-02-17 2014-06-04 アルバック理工株式会社 Thermoelectric conversion element evaluation apparatus and evaluation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190088718A (en) * 2018-01-19 2019-07-29 한국에너지기술연구원 Apparatus for measuring of contact resistance of thermoelectric device and method thereof
CN110514901A (en) * 2019-09-03 2019-11-29 福达合金材料股份有限公司 Welded type electrical contact member contact resistance device for quick testing and its test method

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