JPH06300719A - Method and apparatus for measuring thermoelectric conversion characteristic - Google Patents

Abstract

PURPOSE:To provide a new measuring method which measures the thermoelectric conversion characteristic of a sample piece precisely and simply and to provide an apparatus which is used for its measurement. CONSTITUTION:A sample stand 5 in which the support face of a sample piece 1 is constituted of a heating support face A composed of a metal body 2 having an insulator layer 17 on the surface and of a non-heated support face B composed of an insulator 3, a plurality of pairs of thermocouples 6, 7 and an electron-flux generating device 4 are provided in a vacuum chamber 11. The thermocouples 6, 7 of one pair are arranged on the heated support face A and the other thermocouples are arranged on the non-heated support face B so as to be capable of being moved respectively up and down. The electron-flux generating device 4 is arranged in a position in which the metal 2 constituting the heated support face A can be irradiated with an electron flux. A voltmeter 12 is connected across the thermocouples on the heated support face and the other thermocouples. The individual thermocouples 6, 7 are connected respectively to voltage-to-temperature converters 13, 14. The measuring apparatus, of a thermoelectric conversion characteristic, which has been constituted so as to be capable of measuring the temperature difference between the thermocouples brought into contact with the sample piece 1 place on the support stand and a potential difference in each point is used, and the potential difference and the temperature difference between two points of a high-temperature part and a low-temperature part of the sample piece 1 are measured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides a novel measuring method for accurately and simply measuring the thermoelectric conversion characteristics of a sample piece, and an apparatus used for the measurement.

[0002]

2. Description of the Related Art As a method for measuring thermoelectric conversion characteristics of a substance,
There is a method of forming two points having different temperatures in a sample piece and measuring a temperature difference (ΔT) and a potential difference (E) between the two points. That is, the Seebeck coefficient (S), which is one of the indexes of the thermoelectric conversion characteristics of the substance, is calculated by the following equation based on the temperature difference and the potential difference.

S (unit: V / K or V / ° C.) = E / ΔT In the above method, it is extremely difficult to form two points having different temperatures on a sample piece, which is extremely difficult for such a technique. Various studies have been made.

For example, Japanese Patent Application Laid-Open No. 4-125458 discloses that
As a method of generating a temperature difference in a sample piece, a method of forming a high temperature portion by bringing an electric heater and a Peltier element into contact with one end of the sample piece to heat the sample piece is described.

Further, the document also describes a method of forming a high temperature portion by irradiating an end of a sample piece with an infrared lamp and heating it.

Then, the thermocouple terminals are respectively brought into contact with the high temperature portion and the low temperature portion of the other end of the sample piece formed by the above method, and the potential difference generated between them, that is, the thermoelectromotive force and the temperature difference are measured.

According to the above-mentioned document, by such a method,
Since the terminals of the thermocouple are brought into contact with the high temperature part and the low temperature part of the sample piece respectively and the potential difference and the temperature difference between the two points are measured using the circuit of the thermocouple, the measurement can be performed with high accuracy. It is said to be possible.

[0008]

However, as a method of generating a temperature difference in the sample piece, a method of forming a high temperature portion by bringing an electric heater or a Peltier element into contact with one end of the sample piece to heat the sample piece is adopted. In this case, the heating rate of the electric heater and the Peltier element itself is slow, and it takes a considerable time to heat one end of the sample piece to a predetermined temperature.
Therefore, it becomes difficult to quickly measure the potential difference and the temperature difference.
Also, depending on the material and size of the sample, the low temperature side is also heated by the heat conduction in the sample piece before the high temperature part is heated, and as a result, the temperature difference between the two points of the high temperature part and the low temperature part. It becomes difficult to make the value sufficiently large. Therefore, only a slight temperature difference occurs in the sample piece, and there is still room for improvement in the accuracy of the measured potential difference and temperature difference. In particular, when the sample to be measured has poor moldability and sinterability, it is difficult to produce a large molded body and sintered body, or when using a sample piece with high thermal conductivity Was noticeable.

Also, when the sample piece is heated by using an infrared lamp, the same problem as above is encountered. That is, the method using the infrared lamp has a poor heating efficiency of the sample piece, and the heating rate of the sample piece cannot be sufficiently increased.
In addition, in order to increase the heating efficiency, it is common to collect light with a collection mirror, but in this case, when measuring a very small disk or a long rectangular rod-shaped sample piece, the light cannot be collected completely. The light heats the peripheral portion of the sample piece, for example, the support of the sample piece, so that even the portion of the sample piece that does not require heating is heated, and the temperature difference between the high temperature portion and the low temperature portion of the sample piece is reduced. In some cases.

[0010]

The present inventor has conducted earnest research to solve the problems of the above-mentioned method for measuring thermoelectric conversion characteristics that employs a conventional heating method.

As a result, a metal body is brought into contact with a part of the sample piece through the insulating layer, and the metal body is heated by irradiation of electron flux, so that the sample piece is heated in a very narrow range at high speed. By forming the high temperature portion by this, it is possible to secure a large temperature difference with the low temperature portion, the potential difference and temperature difference between the high temperature portion and the low temperature portion can be extremely increased by the thermocouples in contact with each other. The present invention has been completed by finding that the Seebeck coefficient of a sample piece can be accurately calculated from the measured values.

That is, according to the present invention, a metal body is brought into contact with a part of a sample piece through an insulator layer, and the metal body is irradiated with an electron flux under vacuum to heat the sample body. A thermoelectric conversion characteristic measuring method, characterized in that a thermocouple terminal is brought into contact with a portion apart from the heated portion, and a temperature difference and a potential difference generated between two points where the thermocouple terminal is brought into contact are measured.

In the present invention, the sample whose thermoelectric conversion characteristics are to be measured is not particularly limited as long as it can be molded into a sample piece. Commonly mentioned are metals, semiconductors, and other inorganic and organic solid materials. Among them, what is considered to be promising as a thermoelectric conversion material is a semiconductor or a composite material of a semiconductor and another material, and the present invention is suitable for measuring thermoelectric conversion characteristics of such a material.

The shape of the sample piece made of the above-mentioned sample is not particularly limited, but in order to facilitate contact with a metal body having an insulating layer and contact with a thermocouple, it is composed of at least two flat surfaces. It is preferable that the shape is In particular, the thickness is 0.1
5 mm plate is recommended.

Also, the area of the sample piece is not particularly limited, but according to the method of the present invention, the thermoelectric conversion characteristics of the small sample piece such that the distance between the high temperature portion and the low temperature portion for contacting the thermocouple can be secured to be 8 mm or less. It is possible to accurately measure the above.

In the present invention, the heating of the sample piece is performed by contacting a part of the sample piece, generally an end, with a metal body via an insulating layer, and irradiating the metal body with an electron flux under vacuum. Done by

According to such a heating method, the rate of temperature rise of the metal body is extremely high, so that the sample piece which is brought into contact with the metal body via the insulator layer is also rapidly heated, and the other portion not heated is heated. It is possible to increase the temperature difference between.

As the metal body, any metal can be used without particular limitation as long as it is a metal that generates heat when irradiated with an electron flux. In particular,
Electric resistivity at room temperature is 1 × 10 ⁻⁶ to 1 × 10 ⁻³ Ωc
A metal body within the range of m has high heat generation efficiency due to the electron flux, and is suitable in the present invention. Specific examples of the material of the metal body include refractory metals such as molybdenum, tungsten, tantalum, and niobium, precious metals such as gold, silver, and platinum, copper, iron, and alloys containing the above metals. .

The insulator layer formed on the surface of the metal body is provided to prevent the electrons of the electron flux irradiated on the metal body from flowing through the sample piece to the thermocouple. The thickness of the insulator layer may be such that it has a function of substantially blocking the flow of electrons. However, if the insulator layer is too thick, it tends to reduce the conduction of heat from the heated metal body. In general, the thickness of the insulator layer varies depending on the material of the insulator, but is 0.1
About 3 mm is suitable.

As the insulator forming the above-mentioned insulator layer, a known material may be used without particular limitation. Examples of suitable insulator materials include high thermal conductivity ceramics such as aluminum nitride, alumina, silicon dioxide, or composite ceramics containing these, with 0.1 to 0.1% on the surface.
Examples thereof include a metal having an insulating film of 3 μm formed thereon. Among them, aluminum nitride, which has a high thermal conductivity, has an extremely high rate of heat transfer to the sample piece and is particularly preferably used in the present invention.

The method of bringing the sample piece into contact with the metal body via the insulating layer is not particularly limited as long as a part of the sample piece, preferably the surface including the end portion, is brought into contact with the metal body. In the aspect in which the sample piece is installed so that the surface including the end portion of the sample piece is in contact with the sample piece, the distance between the heated portion and the other end can be maximized, and the sample piece is relatively small. However, it is possible to secure a sufficient temperature difference from the other end.

The area where the above-mentioned sample piece is brought into contact with the metal body is
It is sufficient if the area allows heat conduction, but generally 2 mm ² or more is preferable.

Further, in order to improve the thermal conductivity to the sample piece, it is preferable that the sample piece is fixed by a fixing means such as a stopper so as to be in close contact with the insulator layer.

In the present invention, in order to prevent the electron flux from being blocked by the residual gas and to prevent the sample piece, the metal body, etc. from being oxidized, the metal body is irradiated with the electron flux under vacuum. Be implemented. The degree of the vacuum may be appropriately determined within a range in which the above phenomenon can be prevented, but is generally 1.3 × 10 ⁻³ Pa (pascal) or less. The degree of vacuum can be measured using a commercially available vacuum gauge and vacuum gauge.

In the present invention, the electron flux can be applied to the metal body by a known method. For example,
A typical method is to irradiate a metal body with thermoelectrons generated by an electron impact heating device. The electron impact heating device is generally composed of a heating unit including a coil-shaped electric wire serving as a cathode, a heating power source, a temperature control unit, and the like. It is performed by connecting the heating power source with a conductor or the like so that the potential becomes higher than that. By doing so, an electron bundle of thermoelectrons is generated from the coil-shaped electric wire, radiated to the high-potential metal body, and the metal body is heated by the impact. Then, heat conduction occurs from the metal body to the sample piece through the insulating layer, and the portion of the sample piece that contacts the metal body is heated.

The heating temperature of the metal body by the electron flux is
The thermoelectric conversion characteristics are appropriately determined according to the measurement temperature on the high temperature side of the sample piece to be measured. Such temperature is generally 50 to 1
It is 000 ° C. The heating temperature can be freely controlled by controlling the voltage and current of the coil-shaped electric wire, the potential of the metal body, and the like, and changing the amount of thermoelectrons generated, that is, the amount of electron flux. In order to measure and calculate the Seebeck coefficient with high accuracy, it is preferable that the electrical resistivity of the metal body be smaller than that of the sample piece.

As described above, the portion of the sample piece that comes into contact with the heated metal body is the high temperature portion, and the portion that does not come into contact is the low temperature portion. Then, due to the temperature difference between these portions, a potential difference, that is, a thermoelectromotive force is generated between the two points.

In the present invention, two of the parts having a temperature difference are
The temperature difference and the potential difference between the points can be measured by bringing a thermocouple terminal into contact with each part.

Known thermocouples can be used without particular limitation. For example, B presented in Japanese Industrial Standards
(Platinum rhodium alloy-platinum rhodium alloy), R (platinum rhodium alloy-platinum), S (platinum rhodium alloy-platinum),
K (nickel chrome alloy-nickel alloy), E (nickel chrome alloy-copper nickel alloy), J (iron-copper nickel alloy), T (copper-copper nickel alloy), and the like are mentioned. The optimum one may be selected in consideration of the reactivity of the above, the thermal conductivity of the thermocouple, and the like.

The two types of thermocouples that are brought into contact with the high temperature portion and the low temperature portion of the sample piece are preferably of the same type because it is not necessary to correct the measured potential difference.

Further, in order to perform accurate temperature measurement, it is also a preferable embodiment to apply silver paste or the like having good thermal conductivity and electrical conductivity to the contact portion between the sample piece and the thermocouple terminal.

Regarding the temperature difference (ΔT) between the high temperature portion and the low temperature portion of the above-mentioned sample piece, the electric circuits of the two pairs of thermocouples whose terminals are in contact with the respective parts are attached to the zero compensation circuit or equivalent ones. It can be calculated from the measured temperatures, that is, T ₁ (high temperature portion) and T ₂ (low temperature portion) by connecting to the voltage-temperature converter.

Further, the measurement of the potential difference (E) between the high temperature part and the low temperature part of the sample piece is performed by using a voltmeter between the metal wires of the same kind among the metal wires constituting the two pairs of thermocouple terminals. It is preferable to perform the connection. At this time, due to the compensation lead wire,
If each metal wire of the thermocouple terminal is simultaneously connected to the voltage-temperature converter and the voltmeter, the temperature difference and the potential difference can be measured simultaneously. Of course, it is also possible to separately contact each part with a metal wire and connect a voltmeter to this to measure the potential difference.

The Seebeck coefficient (S) is calculated from the temperature difference and the potential difference between the high temperature portion and the low temperature portion of the sample piece measured as described above using the following equation.

S = E / ΔT (unit: V / K) A thermoelectric conversion characteristic measuring apparatus suitable for carrying out the method of the present invention is also provided.

The following description will be given with reference to FIG. 1, which shows a schematic diagram of a typical embodiment of the apparatus of the present invention, but the measuring apparatus of the present invention is not limited to the embodiment described in such drawings.

The thermoelectric conversion characteristic measuring apparatus of the present invention comprises a heating support surface A made of a metal body 2 having an insulating layer 17 on its surface and a non-heating support made of an insulator 3 in a chamber 11 capable of forming a vacuum. It has a sample table 5 in which a supporting surface for the sample piece is constituted by the surface B, a plurality of thermocouples 6 and 7 and an electron flux generating device 4 , and one pair of the thermocouples is provided on the heating supporting surface and the other. The thermocouples are vertically movable on the non-heating supporting surface, and the electron flux generator 4 is disposed at a position where the metal body 2 forming the heating supporting surface can be irradiated with the electron flux. A voltmeter 12 was connected between the thermocouple on the surface and the other thermocouple, and each thermocouple 6, 7 was connected to a voltage-temperature converter 13, 14, respectively, and placed on the support table. The temperature difference and the potential difference between the high temperature part and the low temperature part of the sample piece with which the thermocouple was contacted Configured to be measurable.

In the above apparatus of the present invention, the chamber 11 capable of forming a vacuum is not particularly limited as long as it is made of a material having strength and corrosion resistance under the use environment. For example, a metal alloy such as stainless steel or aluminum alloy, or a material having equivalent strength is suitable.
In addition, the size of the chamber is
Of the components such as the electron-impact-type heating device and the thermocouple, it is common to have a size capable of accommodating a portion that needs to be used under vacuum. The optimum chamber size is preferably 4 × 10 ⁴ cm ³ or less. That is, a chamber having a volume greater than that requires not only a large exhaust pump, but also a long time to form a vacuum.

Means for evacuating the chamber 11 is not particularly limited. Generally, known oil rotary pumps,
A vacuum pump 1 composed of an oil diffusion pump, a turbo molecular pump, a cryopump or the like, or a combination thereof as appropriate.
A method of exhausting the inside of the chamber by connecting 5 to the chamber 11 is suitable.

In the apparatus of the present invention, the heating support surface A of the sample table 5 is constructed by providing an insulating layer 17 on at least a portion of the surface of the metal body 2 which is in contact with the sample piece 1.

The heating support surface A and the non-heating support surface B are
It is preferable to determine the surface shape and arrangement according to the shape of the sample piece. For example, as shown in the drawing, when the sample piece 1 is a plate-shaped body, the heating support surface A and the non-heating support surface B are formed as smooth surfaces and are arranged so as to be located on the same plane. Further, the heating support surface A and the non-heating support surface B may be continuous, but the heat of the heated metal body 2 is transmitted to the support base to heat a portion where heating of the sample piece is unnecessary. In order to prevent the above, it is preferable to provide the sample piece 1 with a distance shorter than the length thereof.

Further, it is preferable that the heating supporting surface A and the non-heating supporting surface B are provided with stoppers 16 for holding the sample piece 1 on the surfaces.

In the apparatus of the present invention, the electron flux generator 4
Is arranged at a position where the metal body 2 is irradiated with an electron flux. An electron impact heating device is generally used as the electron flux generator. Such an electron impact heating device is generally composed of a heating unit including a coil-shaped electric wire 21 serving as a cathode, a temperature control unit 20 including a power source, and the like, so that the metal body 2 has a higher potential than the anode or the coil-shaped electric wire. Is composed of. In this case, the temperature control unit 20 and the metal body 2 are
It is electrically connected. Such connection may be made by directly connecting with an electric wire, or by forming the supporting base 5 with a conductor and maintaining the insulating property with respect to the chamber 11, the supporting base 5 and the temperature control unit 2 are connected.
This is done by connecting 0 and the like.

In order to efficiently irradiate the metal body 2 with the electron flux by using the electron impact type heating device, it is preferable to provide the shield plate 19 so that the electron flux does not leak to a portion other than the metal body. . In particular, when the leaked electron flux is applied to the sample piece 1, electricity may flow to the thermocouple,
A measurement error may occur in the potential difference and the temperature difference between the high temperature portion and the low temperature portion of the sample piece. Therefore, it is preferable to provide the shield plate 19 also in order to prevent such a phenomenon.

The material of the shielding plate is not particularly limited as long as its electric resistance is larger than that of the metal body.
Among them, those that reflect the electron flux or those that hardly absorb the electron flux are preferably used. Examples of suitable materials include glass having silicon dioxide as a main component, and insulators such as alumina. When a material having a low electric resistance is used as the material of the shield plate, it is necessary to maintain the insulating property between the shield plate and the electron flux generator and the chamber.

As the thermocouple used in the apparatus of the present invention, a combination of the metal wires of the above-mentioned materials can be used without any particular limitation. In particular, except the welded part of the metal wire which is the temperature detecting part, alumina or the like is used. It is preferable to have a structure covered with a protective tube made of the above material.

The thermocouples 6 and 7 are arranged so as to be movable up and down by holding them on a support frame 10 fixed to a head 18 which can move up and down independently or together.
Further, although not shown in the figure, a mechanism in which each thermocouple independently moves in the lateral direction may be provided in the support frame 10, if necessary. According to this aspect, the position of the thermocouple can be adjusted according to the measurement distance, the measurement location, the size, the position, etc. of the sample piece, which is preferable.

In the apparatus of the present invention, the thermocouples 6 and 7 are
Each is independently connected to the voltage-temperature converters 13 and 14. Further, the voltmeter 12 is connected to the metal wires that are connected to the measurement points. By using the same type of metal wire among the metal wires forming each thermocouple as the metal wire, it is possible to simultaneously form the temperature difference measuring circuit and the potential difference measuring circuit by the thermocouple. Can be simplified.

In the device of the present invention, other structures are not particularly limited, and various modifications can be made within a range that does not significantly reduce the effects of the present invention.

[0050]

As can be understood from the above description, according to the present invention, a metal body is brought into contact with a part of a sample piece through an insulating layer, and the metal body is heated by irradiation of electron flux. By doing so, it is possible to perform heating of the sample piece in a very narrow range at high speed, and by forming a high temperature part by this, it becomes possible to secure a large temperature difference between the sample piece and the low temperature part. The potential difference and temperature difference between the high temperature part and the low temperature part can be measured extremely accurately.

Therefore, it is not necessary to prepare a large sintered body as a sample piece, and the thermoelectric conversion characteristics can be accurately measured even with a sample piece formed of a small compact. Moreover,
It is not necessary to provide a mechanism such as a cooling water circulation for lowering the temperature of the low temperature part of the sample piece around the sample piece and the sample table, and it is a simple measuring device.

[0052]

EXAMPLES Examples will be shown below, but the present invention is not limited to these examples.

Example 1 As shown in FIG. 1, in a stainless steel chamber 11 (300 mm × 300 mm × 300 mm) connected to a vacuum pump 15 (oil rotary pump and turbo molecular pump), aluminum nitride ( The heating support surface A and the insulator 3 (26 mm ×) are provided by the molybdenum metal body 2 (50 mm × 50 mm × thickness 3 mm, partial thickness 2 mm) provided with the insulator layer 17 made of 20 mm × 20 mm × thickness 1 mm).
26 mm × thickness 3 mm), the non-heated supporting surfaces B were formed at intervals, and the supporting table 5 was formed. As the electron flux generating device 4 , an electron impact heating device (manufactured by Sukegawa Electric Industry Co., Ltd.) including a heating unit including the coiled electric wire 21 and a temperature control unit 20 including a power source was used. Further, the thermocouples 6 and 7 supported by the protection tubes 8 and 9 made of alumina were attached to the support frame 10 so as to be vertically movable.

On the above-mentioned supporting table, a sintered compact sample piece 1 (diameter 12 mm, thickness 1.5 m) containing β-FeSi ₂ as a main component.
m) so that one end thereof abuts on the heating support surface A formed by the insulator layer 17 and the other end abuts on the non-heating support surface B formed by the insulator 3,
It was fixed by a stopper 16. At this time, 40% of the area of the bottom surface of the sample piece 1 was brought into contact with the heating support surface.

The support frame 10 supporting the protective tubes 8 and 9 is lowered through the head 18 connected to the micrometer provided outside the upper part of the chamber 11, and the two thermocouples 6 and 7 of the thermocouples 6 and 7 are arranged above the sample piece 1. The terminals were contacted. A silver paste was applied to the contact portion between the two pairs of thermocouple terminals and the sample piece 1, and the silver paste was dried to improve the electrical conductivity and thermal conductivity.

The distance between the two pairs of thermocouple terminals was set to 7 mm, and the centers of both thermocouples were set to the center of the sample piece 1.

The chamber 11 was evacuated by the vacuum pump 15 to a vacuum degree of 8 × 10 ⁻⁷ Torr or less, and then the coil-shaped electric wire 21 of the electron flux generator 4 was energized to fix the sample piece 1 to the sample piece 1. Heated. The output at this time is about 0.5
It was KW. Three minutes after starting heating, the temperature of the low temperature part and the high temperature part of the sample piece 1 was measured by voltage-temperature converters 13 and 14 (manufactured by Vacuum Riko Co., Ltd.) with a zero compensation circuit (potential difference between the two points). Voltmeter 12 (manufactured by Keithley)
As a result of measurement by 380 ° C. and 400
C. and 4.4 mV.

The same measurement is carried out 5 times, and the average Seebeck coefficient at the measurement temperature calculated from the measured values is about 22.
0 μV / K, variation from the average value was within ± 5 μV / K.

Comparative Example 1 In Example 1, as shown in FIG. 2, the heating means was constructed by installing an insulating plate 25 constituting a heating support surface and an electric heater 26 installed under the insulating plate, and heating. A thermoelectric conversion characteristic measuring device having a similar structure was constructed except that the above was carried out by the heat generation of the electric heater. The electric heater 26 was made of molybdenum.

Using the above apparatus, the same sample piece 1 as in Example 1 was heated in the same vacuum degree until the temperature of the high temperature part of the sample piece reached 400 ° C. The time required to reach this temperature was 10 minutes, at which time the temperature of the low temperature part of the sample piece was 395 ° C. The voltage difference was 1.0 mV.

The same measurement was carried out 5 times, and the average value of Seebeck coefficient at the measurement temperature calculated from the measured values was about 20.
The deviation from the average value was 0 μV / K and ± 20 μV / K.

Comparative Example 2 Instead of the heating means by the electric heater of Comparative Example 1, FIG.
As shown in FIG. 1, a point focusing infrared lamp manufactured by Vacuum Riko Co., Ltd. is used, and the focused infrared light is passed through a window 30 made of quartz glass provided on the lower surface of the chamber 11 Of a thermoelectric conversion characteristic having a similar structure except that the sample table 33 has a circular hole with a diameter of 8 mm so that the lower surface of the end of the The measuring device was constructed.

Using the above apparatus, the same sample piece as in Example 1 was installed so that the center of the hole of the sample stand and the center of the sample piece were aligned, and the sample piece was heated in the same degree of vacuum as in Example 1. did. The output at this time was about 0.4 kW. After 15 minutes from the start of heating, the temperature and potential difference between the high temperature part and the low temperature part of the sample piece were measured, and the result was 400 ° C.
The temperature was 1.0 ° C at 1.0 ° C.

The same measurement is performed 5 times, and the average value of Seebeck coefficient at the measurement temperature calculated from the measured values is about 20.
The deviation from the average value was 0 μV / K and ± 22 μV / K.

[Brief description of drawings]

FIG. 1 is a schematic view showing a typical embodiment of a thermoelectric conversion characteristic measuring device of the present invention.

FIG. 2 is a schematic view showing a conventional thermoelectric conversion characteristic measuring device using a heating means by an electric heater.

FIG. 3 is a schematic view showing a conventional thermoelectric conversion characteristic measuring device using a heating means by an infrared lamp.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 sample piece 2 metal body 3 insulator 4 electron flux generator 5 support stand 6 thermocouple 7 thermocouple 8 protection tube 9 protection tube 10 support frame 11 chamber 12 voltmeter 13 voltage-temperature converter 14 voltage-temperature converter 15 Vacuum pump 16 Stopper 17 Insulator layer 18 Head 19 Shielding plate 20 Temperature control unit including power supply 21 Coiled wire 25 Insulating plate 26 Electric heater 27 Power supply and temperature control unit of electric heater 30 Window 31 Power supply and temperature control of infrared lamp Part 32 Infrared lamp 33 Sample stand 34 holes

Claims (2)

[Claims] 1. A metal body is brought into contact with a part of a sample piece through an insulating layer, and the metal body is irradiated with an electron flux under vacuum to be heated,
Thermoelectric conversion, characterized in that a thermocouple terminal is brought into contact with a heated portion of the sample piece and a portion distant from the heated portion, and a temperature difference and a potential difference generated between two points where the thermocouple terminal is brought into contact are measured. How to measure characteristics. 2. A sample stage in which a supporting surface of a sample piece is constituted by a heating supporting surface made of a metal body having an insulating layer on its surface and a non-heating supporting surface made of an insulating material in a chamber capable of forming a vacuum. , A plurality of pairs of thermocouples and electron flux generators, one pair of the thermocouples being arranged on the heating support surface, and the other thermocouples being arranged on the non-heating support surface so as to be movable up and down. The generator is arranged at a position where a metal body forming the heating support surface can be irradiated with electron flux, and a voltmeter is connected between the thermocouple on the heating support surface and another thermocouple, and each thermocouple is connected to the thermocouple. Each pair is connected to a voltage-temperature converter, and the temperature difference between the thermocouples brought into contact with the sample piece placed on the support table and the potential difference at each point can be measured. apparatus.