KR20160136970A - A mask frame assembly having a manual alignment means - Google Patents
A mask frame assembly having a manual alignment means Download PDFInfo
- Publication number
- KR20160136970A KR20160136970A KR1020150071287A KR20150071287A KR20160136970A KR 20160136970 A KR20160136970 A KR 20160136970A KR 1020150071287 A KR1020150071287 A KR 1020150071287A KR 20150071287 A KR20150071287 A KR 20150071287A KR 20160136970 A KR20160136970 A KR 20160136970A
- Authority
- KR
- South Korea
- Prior art keywords
- mask
- frame
- workpiece
- alignment means
- axis direction
- Prior art date
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- H01L51/56—
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- H01L27/32—
Abstract
Description
The present invention relates to a mask frame assembly having a manual alignment means, and more particularly, to a mask frame assembly having a manual alignment means, and more particularly, To a mask frame assembly having passive alignment means capable of precisely coating the pattern of the mask.
Recently, as demand for displays such as smart phones, tablet PCs, notebooks, and large-sized TVs has increased, thin-walled and lightweight flat-panel displays have made remarkable progress. The flat panel display may be an LCD (Liquid Crystal Display Device), an OLED (Organic Light Emitting Diode Display Device), a PDP (Plasma Display Display Device), a SED (Surface-conduction Electron- emitter display device, and surface electric field display device).
Among them, an organic light emitting diode (OLED) device is a device that recombines electrons and holes to form an exciton, and emits light of a specific wavelength by energy from excitons. . Particularly, the display characteristics such as contrast ratio and response time are excellent, and flexible display is easily realized, and thus it is attracting attention as an ideal next generation display.
The organic electroluminescent device of the organic light emitting display includes a cathode, an organic layer, and a cathode formed on a substrate in a laminated manner. The substrate usually uses glass, but in some cases, a bendable plastic or film may be used. As the anode, ITO (Indium Tin Oxide) is used, which is formed by vacuum evaporation or sputtering. As the cathode, magnesium (Mg) and lithium (Li), which have a small work function, are mainly used. The organic film layer may be formed of various organic materials and may be doped with a fluorescent dye or a phosphorescent dye to improve the luminous efficiency. The organic layer includes an organic light emitting layer (EML). In the organic light emitting layer, holes and electrons are recombined to form excitons and light is generated. In order to further increase the luminous efficiency, holes and electrons must be transported more smoothly to the organic light emitting layer. For this purpose, an electron transport layer (ETL) may be disposed between the cathode and the organic light emitting layer, A hole transport layer (HTL) may be disposed. In addition, a hole injection layer (HIL) may be disposed between the anode and the hole transporting layer, or an electron injection layer (EIL) may be disposed between the cathode and the electron transporting layer.
The process of forming the organic electroluminescent device typically comprises a pre-process, a post-process, and a sealing process. The entire process is a process of forming an ITO electrode on a substrate through a sputtering process and the like. The post process is a process of forming an organic light emitting layer and a metal electrode by an evaporation method in a high vacuum state, And the like. The sealing process is a process of inserting a desiccant in a vacuum or nitrogen atmosphere to seal the organic light emitting device to increase the durability of the organic light emitting device, which is very weak to moisture and oxygen in the air. Particularly, it is important to rapidly deposit an organic material or a metal material on the substrate while maintaining a high vacuum in the chamber during the post-process. At this time, if an unexpected bend occurs between the metal mask and the substrate, the organic material or the metal material can not be deposited on the substrate at a desired position, so that deflection of the metal mask due to thermal expansion and deflection of the substrate due to its own weight must be minimized .
Conventionally, aligning the mask with the substrate moves the substrate or mask using an automatic alignment apparatus after arranging the substrate on the mask. Then, using a CCD camera (Charged Coupled Device Camera), the alignment marks formed on the substrate and the mask are checked, and the alignment between the substrate and the mask is completed. However, there is a structural problem in that alignment error between the substrate and the mask may occur during the process of closely contacting the substrate with the mask after the alignment is confirmed, so that the substrate and the mask can not be aligned accurately.
The present invention relates to a mask having a manual alignment means capable of solving the problem caused by the conventional automatic alignment by aligning the workpiece placed on the frame by a worker in the X-axis and Y- Frame assemblies. It is an object of the present invention to provide a mask frame assembly with manual alignment means configured to precisely align workpieces to the pattern of the mask by finely adjusting the workpieces fed to a plurality of alignment means provided on the frame . It is another object of the present invention to provide a mask frame assembly with manual alignment means configured to facilitate alignment of the alignment of the mask with the workpiece.
A mask frame assembly having a manual alignment means according to the present invention is a mask frame assembly provided with manual alignment means for aligning a workpiece placed on a frame with a pattern of a mask and tilting the workpiece to adjust the X- Alignment means.
The mask frame assembly with manual alignment means according to the present invention can be adjusted by tilting and aligning the workpiece with the X and Y axes using a plurality of manual alignment means. Accordingly, the workpiece and the mask can be precisely matched so that the pattern of the mask can be precisely coated on the workpiece. Further, since the plurality of aligning means are structurally simple and easy to operate, the overall working process is shortened to improve the productivity. In addition, since an expensive automatic aligning device is not required in the past, the manufacturing cost can be reduced.
1 is a perspective view illustrating an embodiment of a mask frame assembly with manual alignment means according to the present invention.
2 is a front view of Fig.
Fig. 3 is a rear view of Fig. 1. Fig.
4 is an enlarged view of a portion A shown in Fig.
5 is an enlarged view of a portion B shown in Fig.
FIG. 6 is a schematic cross-sectional view illustrating a use state of a mask frame assembly having a manual alignment means according to the present invention.
Other objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments with reference to the accompanying drawings.
Hereinafter, preferred embodiments of a mask frame assembly with manual alignment means according to the present invention will be described in detail with reference to the accompanying drawings.
Referring first to FIG. 1, a
The first and second alignment means 130 and 140 are mounted on the left and right sides of the
The third and fourth alignment means 150 and 160 are respectively installed at a lower portion of the
In addition, the mask frame assembly with the manual alignment means according to the present invention has a hole in the mask, so that the hole can be checked by the vision camera to confirm the alignment state of the mask and the workpiece.
To describe a specific operation state, the
The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.
100: mask frame assembly 110: frame
120: mask 130: first alignment means
140: second alignment means 150: third alignment means
160: fourth alignment means
Claims (4)
An X-axis alignment unit mounted on the frame so as to support a side end of the work disposed on the other side of the frame, the X-axis alignment unit moving the work along the X-axis direction for alignment of the work;
Axis alignment unit including a pair of Y-axis alignment units mounted at intervals on the frame so as to support the lower end of the workpiece and moving the workpiece along the Y-axis direction for alignment of the workpiece, Wherein the mask frame assembly comprises:
The X-axis alignment unit includes:
A support plate disposed at an edge of the frame so as to be movable along the X-axis direction while supporting a side end of the workpiece;
And a micrometer head coupled to the support plate to move the support plate along the X-axis direction.
And the X-axis alignment unit is mounted so as to be opposed to the left and right edges of the frame.
The pair of Y-axis aligning units may include:
A support plate disposed on a lower edge of the frame so as to be movable along the Y axis direction while supporting a lower end of the workpiece;
And a micrometer head coupled to the support plate to move the support plate along the Y-axis direction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150071287A KR20160136970A (en) | 2015-05-21 | 2015-05-21 | A mask frame assembly having a manual alignment means |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150071287A KR20160136970A (en) | 2015-05-21 | 2015-05-21 | A mask frame assembly having a manual alignment means |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20160136970A true KR20160136970A (en) | 2016-11-30 |
Family
ID=57707550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150071287A KR20160136970A (en) | 2015-05-21 | 2015-05-21 | A mask frame assembly having a manual alignment means |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20160136970A (en) |
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2015
- 2015-05-21 KR KR1020150071287A patent/KR20160136970A/en not_active Application Discontinuation
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E601 | Decision to refuse application |