KR20160136970A - A mask frame assembly having a manual alignment means - Google Patents

A mask frame assembly having a manual alignment means Download PDF

Info

Publication number
KR20160136970A
KR20160136970A KR1020150071287A KR20150071287A KR20160136970A KR 20160136970 A KR20160136970 A KR 20160136970A KR 1020150071287 A KR1020150071287 A KR 1020150071287A KR 20150071287 A KR20150071287 A KR 20150071287A KR 20160136970 A KR20160136970 A KR 20160136970A
Authority
KR
South Korea
Prior art keywords
mask
frame
workpiece
alignment means
axis direction
Prior art date
Application number
KR1020150071287A
Other languages
Korean (ko)
Inventor
박재환
Original Assignee
주식회사 네이션스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 네이션스 filed Critical 주식회사 네이션스
Priority to KR1020150071287A priority Critical patent/KR20160136970A/en
Publication of KR20160136970A publication Critical patent/KR20160136970A/en

Links

Images

Classifications

    • H01L51/56
    • H01L27/32

Abstract

The present invention relates to a mask frame assembly which includes manual alignment means and enables an operator to adjust the multiple alignment means installed on a frame to align a supplied workpiece to fit a mask installed on the frame, thereby precisely coating a pattern of the mask onto the workpiece. According to the present invention, the mask frame assembly including the manual alignment means include the multiple alignment means installed on side surfaces of the frame to enable an operator to tilt and adjust a workpiece arranged on the frame in x-axis and y-axis directions to fit the pattern of a mask.

Description

Field of the Invention [0001] The present invention relates to a mask frame assembly having a manual alignment means,

The present invention relates to a mask frame assembly having a manual alignment means, and more particularly, to a mask frame assembly having a manual alignment means, and more particularly, To a mask frame assembly having passive alignment means capable of precisely coating the pattern of the mask.

Recently, as demand for displays such as smart phones, tablet PCs, notebooks, and large-sized TVs has increased, thin-walled and lightweight flat-panel displays have made remarkable progress. The flat panel display may be an LCD (Liquid Crystal Display Device), an OLED (Organic Light Emitting Diode Display Device), a PDP (Plasma Display Display Device), a SED (Surface-conduction Electron- emitter display device, and surface electric field display device).

Among them, an organic light emitting diode (OLED) device is a device that recombines electrons and holes to form an exciton, and emits light of a specific wavelength by energy from excitons. . Particularly, the display characteristics such as contrast ratio and response time are excellent, and flexible display is easily realized, and thus it is attracting attention as an ideal next generation display.

The organic electroluminescent device of the organic light emitting display includes a cathode, an organic layer, and a cathode formed on a substrate in a laminated manner. The substrate usually uses glass, but in some cases, a bendable plastic or film may be used. As the anode, ITO (Indium Tin Oxide) is used, which is formed by vacuum evaporation or sputtering. As the cathode, magnesium (Mg) and lithium (Li), which have a small work function, are mainly used. The organic film layer may be formed of various organic materials and may be doped with a fluorescent dye or a phosphorescent dye to improve the luminous efficiency. The organic layer includes an organic light emitting layer (EML). In the organic light emitting layer, holes and electrons are recombined to form excitons and light is generated. In order to further increase the luminous efficiency, holes and electrons must be transported more smoothly to the organic light emitting layer. For this purpose, an electron transport layer (ETL) may be disposed between the cathode and the organic light emitting layer, A hole transport layer (HTL) may be disposed. In addition, a hole injection layer (HIL) may be disposed between the anode and the hole transporting layer, or an electron injection layer (EIL) may be disposed between the cathode and the electron transporting layer.

The process of forming the organic electroluminescent device typically comprises a pre-process, a post-process, and a sealing process. The entire process is a process of forming an ITO electrode on a substrate through a sputtering process and the like. The post process is a process of forming an organic light emitting layer and a metal electrode by an evaporation method in a high vacuum state, And the like. The sealing process is a process of inserting a desiccant in a vacuum or nitrogen atmosphere to seal the organic light emitting device to increase the durability of the organic light emitting device, which is very weak to moisture and oxygen in the air. Particularly, it is important to rapidly deposit an organic material or a metal material on the substrate while maintaining a high vacuum in the chamber during the post-process. At this time, if an unexpected bend occurs between the metal mask and the substrate, the organic material or the metal material can not be deposited on the substrate at a desired position, so that deflection of the metal mask due to thermal expansion and deflection of the substrate due to its own weight must be minimized .

Conventionally, aligning the mask with the substrate moves the substrate or mask using an automatic alignment apparatus after arranging the substrate on the mask. Then, using a CCD camera (Charged Coupled Device Camera), the alignment marks formed on the substrate and the mask are checked, and the alignment between the substrate and the mask is completed. However, there is a structural problem in that alignment error between the substrate and the mask may occur during the process of closely contacting the substrate with the mask after the alignment is confirmed, so that the substrate and the mask can not be aligned accurately.

The present invention relates to a mask having a manual alignment means capable of solving the problem caused by the conventional automatic alignment by aligning the workpiece placed on the frame by a worker in the X-axis and Y- Frame assemblies. It is an object of the present invention to provide a mask frame assembly with manual alignment means configured to precisely align workpieces to the pattern of the mask by finely adjusting the workpieces fed to a plurality of alignment means provided on the frame . It is another object of the present invention to provide a mask frame assembly with manual alignment means configured to facilitate alignment of the alignment of the mask with the workpiece.

A mask frame assembly having a manual alignment means according to the present invention is a mask frame assembly provided with manual alignment means for aligning a workpiece placed on a frame with a pattern of a mask and tilting the workpiece to adjust the X- Alignment means.

The mask frame assembly with manual alignment means according to the present invention can be adjusted by tilting and aligning the workpiece with the X and Y axes using a plurality of manual alignment means. Accordingly, the workpiece and the mask can be precisely matched so that the pattern of the mask can be precisely coated on the workpiece. Further, since the plurality of aligning means are structurally simple and easy to operate, the overall working process is shortened to improve the productivity. In addition, since an expensive automatic aligning device is not required in the past, the manufacturing cost can be reduced.

1 is a perspective view illustrating an embodiment of a mask frame assembly with manual alignment means according to the present invention.
2 is a front view of Fig.
Fig. 3 is a rear view of Fig. 1. Fig.
4 is an enlarged view of a portion A shown in Fig.
5 is an enlarged view of a portion B shown in Fig.
FIG. 6 is a schematic cross-sectional view illustrating a use state of a mask frame assembly having a manual alignment means according to the present invention.

Other objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments with reference to the accompanying drawings.

Hereinafter, preferred embodiments of a mask frame assembly with manual alignment means according to the present invention will be described in detail with reference to the accompanying drawings.

Referring first to FIG. 1, a mask frame assembly 100 according to the present invention includes a frame 110, a mask 120, and a plurality of alignment means 130 to 160. The frame 110 has a rectangular frame shape. The mask 120 has a pattern formed thereon and is fixed to the inside of the frame 110.

The first and second alignment means 130 and 140 are mounted on the left and right sides of the frame 110, respectively. Accordingly, the work placed on the frame 110 is finely moved in the left and right directions and aligned. According to the present invention, when the movement support provided at the ends of the first and second alignment means (130, 140) which are in close contact with the workpiece is enlarged, only one of the first and second alignment means (130, 140) .

The third and fourth alignment means 150 and 160 are respectively installed at a lower portion of the frame 110 at intervals. Therefore, the work placed on the frame 110 can be finely moved in the upper and lower directions. In addition, when only one of the third and fourth alignment means 150 and 160 is adjusted, the workpiece can be accurately aligned with the pattern of the mask while being tilted.

In addition, the mask frame assembly with the manual alignment means according to the present invention has a hole in the mask, so that the hole can be checked by the vision camera to confirm the alignment state of the mask and the workpiece.

To describe a specific operation state, the frame 110 on which the mask 120 is installed is placed on a workbench on which the vision camera is placed. Next, the workpiece to be aligned with the pattern of the mask 120 is placed on the frame 110. At this time, glass is used as the workpiece, but in some cases, bendable plastic or film may be used. Next, the first to fourth aligning means 130 to 160 are adjusted while viewing the vision camera to tilt the workpiece, or to align the workpiece with the left and right and upper and lower directions. Next, a plate magnet or a magnet processed in the form of a pattern position is attached to the rear side of the workpiece, and the workpiece and the mask 120 are closely fixed to each other. After the pattern area is coated, the workpiece and the mask frame assembly 100 are placed on the work surface. Next, the magnet is detached and the workpiece and the mask 120 are separated.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

100: mask frame assembly 110: frame
120: mask 130: first alignment means
140: second alignment means 150: third alignment means
160: fourth alignment means

Claims (4)

A frame having a mask fixed on one side thereof and having a Y axis direction orthogonal to the X axis direction and the X axis direction;
An X-axis alignment unit mounted on the frame so as to support a side end of the work disposed on the other side of the frame, the X-axis alignment unit moving the work along the X-axis direction for alignment of the work;
Axis alignment unit including a pair of Y-axis alignment units mounted at intervals on the frame so as to support the lower end of the workpiece and moving the workpiece along the Y-axis direction for alignment of the workpiece, Wherein the mask frame assembly comprises:
The method according to claim 1,
The X-axis alignment unit includes:
A support plate disposed at an edge of the frame so as to be movable along the X-axis direction while supporting a side end of the workpiece;
And a micrometer head coupled to the support plate to move the support plate along the X-axis direction.
3. The method of claim 2,
And the X-axis alignment unit is mounted so as to be opposed to the left and right edges of the frame.
The method according to claim 1,
The pair of Y-axis aligning units may include:
A support plate disposed on a lower edge of the frame so as to be movable along the Y axis direction while supporting a lower end of the workpiece;
And a micrometer head coupled to the support plate to move the support plate along the Y-axis direction.
KR1020150071287A 2015-05-21 2015-05-21 A mask frame assembly having a manual alignment means KR20160136970A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150071287A KR20160136970A (en) 2015-05-21 2015-05-21 A mask frame assembly having a manual alignment means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150071287A KR20160136970A (en) 2015-05-21 2015-05-21 A mask frame assembly having a manual alignment means

Publications (1)

Publication Number Publication Date
KR20160136970A true KR20160136970A (en) 2016-11-30

Family

ID=57707550

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150071287A KR20160136970A (en) 2015-05-21 2015-05-21 A mask frame assembly having a manual alignment means

Country Status (1)

Country Link
KR (1) KR20160136970A (en)

Similar Documents

Publication Publication Date Title
CN109837504B (en) Film forming apparatus, film forming method, and electronic device manufacturing method
EP2354270B1 (en) Thin film deposition apparatus
JP6393802B1 (en) Substrate placing apparatus, substrate placing method, film forming apparatus, film forming method, alignment apparatus, alignment method, and electronic device manufacturing method
CN113802106A (en) Substrate clamping device, film forming device, substrate carrying device and method thereof
KR102426712B1 (en) Apparatus and method of manufacturing display apparatus
KR101632298B1 (en) Flat panel display device and manufacturing method thereof
JP2019099914A (en) Film deposition device, film deposition method and production method of organic el display device using the same
KR101481095B1 (en) Apparatus for clamping substrate
KR101570072B1 (en) Thin layers deposition apparatus
CN107464770B (en) Mask plate storage device
KR20150089174A (en) Stretching apparatus for substrate
CN113637948B (en) Alignment device, film forming device, alignment method, method for manufacturing electronic device, and storage medium
KR20150092421A (en) Substrate align device and substrate align process
US20160079569A1 (en) Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
JP7202329B2 (en) Alignment Apparatus, Film Forming Apparatus, Alignment Method, Electronic Device Manufacturing Method, Program and Storage Medium
JP4712358B2 (en) Mask frame combination body, substrate using the same, and mask alignment method
KR20140146448A (en) Apparatus for organic layer deposition, and method for manufacturing of organic light emitting display apparatus using the same
KR20190022080A (en) Buffer chamber capable of aligning substrate
KR20160136970A (en) A mask frame assembly having a manual alignment means
KR102080480B1 (en) Substrate-clamping unit and apparatus for depositing organic material using the same
KR20080061674A (en) Alignment system of shadow mask and substrate and method for alignment using the same
KR20150144104A (en) Substrate holder and apparatus for depostion having the same
JP2019060027A (en) Substrate mounting device, film formation device, substrate mounting method, film formation method, and method for producing electronic device
CN219679167U (en) Organic light-emitting device production line
KR20180002345A (en) Substrate chucking apparatus and method of deposition device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application