KR20160112436A - Large size electrostatic chuck - Google Patents
Large size electrostatic chuck Download PDFInfo
- Publication number
- KR20160112436A KR20160112436A KR1020150038180A KR20150038180A KR20160112436A KR 20160112436 A KR20160112436 A KR 20160112436A KR 1020150038180 A KR1020150038180 A KR 1020150038180A KR 20150038180 A KR20150038180 A KR 20150038180A KR 20160112436 A KR20160112436 A KR 20160112436A
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- KR
- South Korea
- Prior art keywords
- electrostatic chuck
- base substrate
- insulating layer
- present
- sag
- Prior art date
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- H01L51/56—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75723—Electrostatic holding means
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
One embodiment of the present invention relates to a large area electrostatic chuck.
The display industry is mainly developing technology to increase the size (area) and sharpness (image quality). One of the notable technologies for this is display technology using OLED (Organic Light Emitting Diode).
The current OLED technology is mainly applied to mobile smart devices, and the sizes are increasing to be applied to the smart TV and large display markets, which are large displays of the household appliance industry.
The key to such OLED technology is the technology of evaporating fluorescent organic materials to uniformly deposit thin films, and a bottom-up evaporative deposition process is generally used for the efficiency of the deposition process.
In the bottom-up evaporative deposition process, it is very important to act as a face-down type supporting device for fixing and transferring the glass to the supporting device. Conventionally, as the supporting device, the cohesive chucking method and the ceramic electrostatic chucking method have been used in the size of 5 generation or less.
However, in the 8th generation (for example, 2200 mm x 2500 mm) size, it is difficult to perform uniform chucking in the conventional adhesive chucking method, and dechucking due to over chucking ) There was a problem that the glass was broken.
In addition, the ceramic type electrostatic chuck has a problem in that it is difficult to manufacture a large ceramic material, and even if the ceramic type electrostatic chuck is manufactured by an assembling method, the phenomenon of sagging due to an increased self weight occurs.
One embodiment of the present invention is a lightweight large area electrostatic chuck having a weight of less than about 400 kg (preferably 320 kg) despite chucking an eighth generation glass that is about four times larger in size or area than the fifth generation .
In addition, one embodiment of the present invention provides a large-area electrostatic chuck having chucking of an eighth generation glass with a self-weight deflection of about 3 mm or less.
In addition, an embodiment of the present invention provides a large-area electrostatic chuck capable of preventing warpage and peeling between components due to a small difference in thermal expansion coefficient even at a high temperature process of about 50 ° C to 120 ° C.
A large area electrostatic chuck according to an embodiment of the present invention includes: a base substrate made of a titanium material having a first surface and a second surface opposite to the first surface; An insulating layer of a ceramic material coated on a first surface of the base substrate; And an anti-sag structure of aluminum attached to a second side of the base substrate.
The sag prevention structure may have a planar shape in the form of a lattice pattern.
The sagging prevention structure may include a plurality of transverse structures arranged in a horizontal direction and a plurality of longitudinal structures arranged in a longitudinal direction and intersecting the transverse structure.
The slack prevention structure may have a shape of a cross section of a square, a rectangle, a T shape, an I shape or a ⊥ shape.
The deflection preventing structure may be fixed to the base substrate by bolts.
The sag preventing structure may have a thickness of 30 mm to 45 mm.
The base substrate may have a thickness of 5 mm to 7 mm.
The insulating layer may have a thickness of 0.6 mm to 1.2 mm.
The insulating layer may include Al 2 O 3 .
The base substrate may be the same as the 8th generation glass having a width of 2200 mm x 2500 mm.
The electrostatic chuck is disposed such that the insulating layer faces downward, and the deflection amount due to the self weight of the electrostatic chuck may be less than 3 mm.
The electrostatic chuck may have a weight of less than 400 kg.
One embodiment of the present invention is a lightweight large area electrostatic chuck having a weight of less than about 400 kg (preferably 320 kg) despite chucking an eighth generation glass that is about four times larger in size or area than the fifth generation . That is, according to the present invention, a base substrate of a relatively thin titanium substrate is provided with a relatively high strength aluminum sag preventing structure in the form of a lattice pattern, thereby providing an electrostatic chuck with a minimized or reduced weight.
In addition, one embodiment of the present invention provides a large-area electrostatic chuck having chucking of an eighth generation glass with a self-weight deflection of about 3 mm or less. That is, in the present invention, a sag preventing structure in the form of a lattice pattern is further provided on the base substrate, so that the deflection due to its own weight is limited to about 3 mm or less, preferably 2 mm or less, more preferably 1 mm or less.
In addition, an embodiment of the present invention provides a large-area electrostatic chuck capable of preventing warpage and peeling between components due to a small difference in thermal expansion coefficient even at a high temperature process of about 50 ° C to 120 ° C. That is, in the present invention, since the base substrate made of titanium and the insulating layer made of the ceramic material have similar thermal expansion coefficients, the electrostatic chuck is not bent or the insulating layer is not peeled off from the base substrate in the organic material deposition process, which is a relatively high- .
1A and 1B are a cross-sectional view and a plan view showing a large area electrostatic chuck according to an embodiment of the present invention.
2A to 2E are cross-sectional views illustrating various structures of a sag preventing structure of a large area electrostatic chuck according to an embodiment of the present invention.
3 is a cross-sectional view illustrating an example of using a large area electrostatic chuck according to an embodiment of the present invention.
4A to 4E are views simulating the amount of deflection by the self weight of the large area electrostatic chuck according to the embodiment of the present invention.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified in various other forms, The present invention is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.
In the following drawings, thickness and size of each layer are exaggerated for convenience and clarity of description, and the same reference numerals denote the same elements in the drawings. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items. In the present specification, the term " connected "means not only the case where the A member and the B member are directly connected but also the case where the C member is interposed between the A member and the B member and the A member and the B member are indirectly connected do.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise "and / or" comprising "when used herein should be interpreted as specifying the presence of stated shapes, numbers, steps, operations, elements, elements, and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.
Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.
1A and 1B are a cross-sectional view and a plan view showing a large area
1A and 1B, an
The
In addition, the
For reference, the first-generation glass is 270 mm × 400 mm, the second-generation glass is 370 mm × 470 mm, the third-generation glass is 550 mm × 650 mm, the fourth-generation glass is 730 mm × 920 mm, The glass has a width or a size of 1100 mm x 1300 mm, the glass for sixth generation is 1500 mm x 1850 mm, the glass for seventh generation is 1870 mm x 2200 mm, and the glass for eighth generation is 2200 mm x 2500 mm.
The
Here, the
Since the aluminum base substrate used in the prior art has a thermal expansion coefficient of approximately 22 to 23 탆 · m -1 · K -1 at approximately 25 캜 to 150 캜 or 50 캜 to 120 캜, The bending phenomenon of the chuck largely occurred, and the insulating layer of the ceramic material was easily peeled off from the base substrate made of the aluminum material. In addition, since the electrostatic chuck made of Invar or stainless steel used in the prior art has a relatively heavy weight, it is difficult to use the electrostatic chuck in face down type electrostatic chuck.
Meanwhile, the insulating
In addition, in the present invention, in addition to the above-mentioned alumina, the insulating
The
The
The
In addition, a rail (not shown) made of stainless steel may be further formed along a square circumference of the
Subsequently, the
The number, pitch, thickness, and / or width of the
As described above, one embodiment of the present invention is to provide a
That is, in the case of a face-down electrostatic chuck generally used in a bottom-up evaporative deposition process, the specification is set so as to maintain a total weight of about 400 kg or less. When an electrostatic chuck is manufactured using only a titanium material having a high specific gravity, An unstable problem may occur when the electrostatic chuck is transported. Therefore, in the present invention, the anti-sag structure is made of an aluminum material which can maintain the rigidity while the specific gravity is low, and this anti-sag structure is bonded or bonded to the base substrate made of titanium, so that one electrostatic chuck is manufactured. Needless to say, the titanium material is manufactured in a plate shape capable of maintaining rigidity, and the aluminum material is manufactured in a protruded rib shape so that various parts of the rigid and electrostatic chuck can be mounted while minimizing the weight.
In addition, by using the
Therefore, the present invention not only provides the lightweight
2A to 2E are cross-sectional views illustrating various structures of a sag preventing structure of a large area
The cross-sectional structure of the sagging prevention structure formed on the
Meanwhile, the square, rectangular, T-shaped, I-shaped, or ⊥-shaped
The sagging preventing
3 is a cross-sectional view illustrating an example of using the large-area
3, the
As described above, in the present invention, the
Accordingly, in one embodiment of the present invention, when chucking the eighth-
4A to 4E are views simulating the amount of deflection by the self weight of the large area electrostatic chuck according to the embodiment of the present invention.
4A is a simulation result of a deflection amount of an electrostatic chuck made of a base substrate made of a titanium material having no sag prevention structure and an insulating layer made of a ceramic material. In the drawing, it means that a large amount of deflection occurred in the order of blue <sky blue <green <yellow <red. In the case of an electrostatic chuck without such an anti-sagging structure, the deflection was measured to be approximately 3.0 mm.
Next, FIG. 4B is a simulation result of the deflection amount of the electrostatic chuck including the base substrate of titanium material and the insulating layer of the ceramic material and including the anti-sag structure having a rectangular cross section as shown in FIG. 4A. In the case of an electrostatic chuck with a sagging-type anti-sagging structure, the deflection was measured to be approximately 1.6 mm.
4c is a simulation result of the deflection amount of the electrostatic chuck including the base substrate made of titanium, the insulating layer made of the ceramic material, and the anti-sagging structure having the rectangular cross section as shown in FIG. 4b. Here, the difference from FIG. 4B is that the pitch of the anti-sag structure is relatively smaller. In this electrostatic chuck, deflection was measured to be approximately 1.4 mm.
Next, FIG. 4D is a simulation result of the deflection amount of the electrostatic chuck including a base substrate made of a titanium material, an insulating layer made of a ceramic material, and a sag preventing structure having a T-shaped cross section, as shown in FIG. The deflection of the electrostatic chuck with the anti-sagging structure with a T-shaped cross section was measured to be approximately 1.2 mm. Here, the electrostatic chuck of FIG. 4D has a T shape in which the cross-sectional shape of the anti-seizure structure is not rectangular as shown in FIGS. 4B to 4C, and the total weight of the electrostatic chuck is reduced by about 10 kg or more. In addition, it is noted that the structure formed in the form of a ring in the figure is a hook for fixing the electrostatic chuck to another member, and does not greatly affect the deflection amount.
4E is a simulation result of the deflection amount of the electrostatic chuck including a base substrate made of a titanium material, an insulating layer made of a ceramic material, and a sag preventing structure having a T-shaped cross section as shown in FIG. 4D. Here, the difference from FIG. 4D is that the pitch of the anti-sag structure is relatively smaller. In this electrostatic chuck, deflection was measured to be approximately 1.0 mm.
Here, the electrostatic chuck shown in Fig. 4A has a circular shape at a substantially central portion, and the electrostatic chuck shown in Figs. 4B to 4E extends in a substantially horizontal direction to cause deflection. Since the amount of deflection formed at the center portion is measured to be approximately 3.0 mm, the risk of falling of the glass substrate from such an electrostatic chuck is large, but since the amount of deflection formed in the horizontal direction is approximately 1.0 mm to 1.6 mm, The risk of falling is reduced.
As described above, in the present invention, a lightweight large-area electrostatic chuck having a weight of about 400 kg (preferably 320 kg) or less despite chucking an eighth-generation glass which is about four times larger in size or area than the fifth generation Lt; / RTI >
Also, in the present invention, when chucking an eighth-generation glass, it is possible to provide a large-area electrostatic chuck having a deflection phenomenon due to its own weight of about 3 mm or less.
In addition, the present invention provides a large-area electrostatic chuck capable of preventing warpage and peeling between components due to a small difference in thermal expansion coefficient even at a high temperature process of about 50 to 120 캜.
As described above, the present invention is not limited to the above-described embodiments, but may be applied to a large area electrostatic chuck according to the present invention, It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
100; The electrostatic chuck
110; A base substrate 111; The first side
112;
121; A first insulating
130;
141; A
143; A
Claims (12)
An insulating layer of a ceramic material coated on a first surface of the base substrate; And
And an anti-sag structure of aluminum attached to the second surface of the base substrate.
Wherein the sag preventing structure has a planar shape in the form of a lattice pattern.
Wherein the deflection preventing structure includes a plurality of transverse structures arranged in a horizontal direction and a plurality of longitudinal structures arranged in a longitudinal direction and intersecting the transverse direction structures.
Wherein the sag preventing structure has a shape of a cross section of a square, a rectangle, a T shape, an I shape, or a ellipse shape.
Wherein the anti-sag structure is fixed to the base substrate by bolts.
Wherein the sag preventing structure has a thickness of 30 mm to 45 mm.
Wherein the base substrate has a thickness of 5 mm to 7 mm.
Wherein the insulating layer has a thickness of 0.6 mm to 1.2 mm.
Wherein the insulating layer comprises Al 2 O 3 .
Wherein the base substrate has a width equal to the width of the glass for 8th generation having a width of 2200 mm x 2500 mm.
Wherein the electrostatic chuck is disposed such that the insulating layer faces downward, wherein an amount of deflection by the self weight of the electrostatic chuck is less than 3 mm.
Wherein the electrostatic chuck is less than 400 kg in weight.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150038180A KR101661641B1 (en) | 2015-03-19 | 2015-03-19 | Large size electrostatic chuck |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150038180A KR101661641B1 (en) | 2015-03-19 | 2015-03-19 | Large size electrostatic chuck |
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Publication Number | Publication Date |
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KR20160112436A true KR20160112436A (en) | 2016-09-28 |
KR101661641B1 KR101661641B1 (en) | 2016-09-30 |
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KR1020150038180A KR101661641B1 (en) | 2015-03-19 | 2015-03-19 | Large size electrostatic chuck |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20070093583A (en) * | 2006-03-14 | 2007-09-19 | 주식회사 에이디피엔지니어링 | Esc, support table, chamber and the manufacture methods thereof |
KR101189815B1 (en) | 2012-02-24 | 2012-10-10 | (주)코리아스타텍 | Large size electrostatic chuck and manufacturing method thereof |
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2015
- 2015-03-19 KR KR1020150038180A patent/KR101661641B1/en active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20070093583A (en) * | 2006-03-14 | 2007-09-19 | 주식회사 에이디피엔지니어링 | Esc, support table, chamber and the manufacture methods thereof |
KR101189815B1 (en) | 2012-02-24 | 2012-10-10 | (주)코리아스타텍 | Large size electrostatic chuck and manufacturing method thereof |
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