KR20150125935A - 기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법 - Google Patents
기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법 Download PDFInfo
- Publication number
- KR20150125935A KR20150125935A KR1020157022665A KR20157022665A KR20150125935A KR 20150125935 A KR20150125935 A KR 20150125935A KR 1020157022665 A KR1020157022665 A KR 1020157022665A KR 20157022665 A KR20157022665 A KR 20157022665A KR 20150125935 A KR20150125935 A KR 20150125935A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- mask
- nozzle
- bending deformation
- amount
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
- B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
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- H01L51/0096—
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- B05B15/045—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
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- H01L51/0097—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
Landscapes
- Electroluminescent Light Sources (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2013-036229 | 2013-02-26 | ||
JP2013036202A JP6018522B2 (ja) | 2013-02-26 | 2013-02-26 | 基板処理装置、膜形成装置およびマスクのセット方法 |
JPJP-P-2013-036202 | 2013-02-26 | ||
JP2013036229A JP6023610B2 (ja) | 2013-02-26 | 2013-02-26 | 塗布装置および塗布方法 |
PCT/JP2014/053681 WO2014132831A1 (ja) | 2013-02-26 | 2014-02-18 | 基板処理装置、マスクのセット方法、膜形成装置および膜形成方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20150125935A true KR20150125935A (ko) | 2015-11-10 |
Family
ID=51428103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020157022665A KR20150125935A (ko) | 2013-02-26 | 2014-02-18 | 기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20150125935A (ja) |
CN (1) | CN105026051A (ja) |
WO (1) | WO2014132831A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11207707B2 (en) | 2017-03-22 | 2021-12-28 | Hefei Boe Optoelectronics Technology Co., Ltd. | Curved surface coating device for curved surface display panel and glue coating apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108284032B (zh) * | 2018-03-30 | 2019-10-01 | 宁波高新区神台德机械设备有限公司 | 喷涂工业机器人 |
JP7269000B2 (ja) * | 2018-12-26 | 2023-05-08 | キヤノントッキ株式会社 | 基板載置方法、成膜方法、成膜装置、および有機elパネルの製造システム |
JP7113861B2 (ja) * | 2020-03-13 | 2022-08-05 | キヤノントッキ株式会社 | マスク取付装置、成膜装置、マスク取付方法、成膜方法、電子デバイスの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5665980A (en) * | 1979-11-05 | 1981-06-04 | Hitachi Ltd | Vacuum deposition device |
JP2003133069A (ja) * | 2001-10-29 | 2003-05-09 | Ritsuo Inaba | 有機el素子の製造方法 |
JP4418262B2 (ja) * | 2004-03-12 | 2010-02-17 | 三井造船株式会社 | 基板・マスク固定装置 |
JP4773834B2 (ja) * | 2006-02-03 | 2011-09-14 | キヤノン株式会社 | マスク成膜方法およびマスク成膜装置 |
JP2007224396A (ja) * | 2006-02-27 | 2007-09-06 | Canon Inc | 成膜方法および成膜用マスク |
JP5258278B2 (ja) * | 2007-12-13 | 2013-08-07 | キヤノントッキ株式会社 | 成膜用マスク及びマスク密着方法 |
JP5531674B2 (ja) * | 2009-05-19 | 2014-06-25 | 株式会社リコー | 画像形成方法 |
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2014
- 2014-02-18 WO PCT/JP2014/053681 patent/WO2014132831A1/ja active Application Filing
- 2014-02-18 CN CN201480010240.8A patent/CN105026051A/zh active Pending
- 2014-02-18 KR KR1020157022665A patent/KR20150125935A/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11207707B2 (en) | 2017-03-22 | 2021-12-28 | Hefei Boe Optoelectronics Technology Co., Ltd. | Curved surface coating device for curved surface display panel and glue coating apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN105026051A (zh) | 2015-11-04 |
WO2014132831A1 (ja) | 2014-09-04 |
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E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |