KR20150112120A - Crucible Assembly - Google Patents

Abstract

The present invention relates to a crucible device wherein a source is received; a crucible heating unit formed on an outer circumferential side of a crucible; a crucible housing receiving the crucible and the crucible heating unit; a crucible supporting member supporting and fixating the crucible received in the crucible housing on an outer circumferential side of the crucible heating unit; a reflective member formed between the crucible supporting member and the crucible housing; and a cooling unit installed in an outer circumferential side of the crucible housing.

Description

Crucible Assembly

The present invention relates to a crucible for providing a source for thin film deposition.

Generally, a process for manufacturing a semiconductor or a flat panel display (FPD) includes a thin film deposition process for depositing a thin film on a substrate. In the thin film deposition step, a chamber having an evaporation chamber in which a vacuum atmosphere can be formed and into which a substrate is introduced, and a crucible for providing a source (thin film material) evaporated on a substrate of the evaporation chamber are used.

The crucible apparatus includes a crucible and a heating unit. The crucible contains a source therein, and the heating unit provides heat for evaporating the source contained in the crucible on the outer circumferential side of the crucible. The source evaporated by the action of the heating unit is ejected from the crucible and moved to the substrate side, and is deposited on the substrate to form a thin film.

In such a crucible apparatus, since the heating unit includes the heating wire, it is difficult and difficult to install the heating wire on the outer circumferential side of the crucible.

In addition, since there is a large difference (L1> L2) between the distance L1 from the heating unit to the source located at the center of the crucible and the distance from the heating unit to the source located at the edge of the crucible, There is a problem in that it can not be uniformly transmitted to the source. According to this, since the heating temperature H1 transmitted to the source on the center side of the crucible and the heating temperature H2 transmitted to the source on the edge side of the crucible are different (H1 <H2), the evaporated source has uniform characteristics and thermal distribution The splash phenomenon occurs in which the source reaching from the substrate splashes, and the uniformity of the thin film is lowered.

It is an object of the present invention to provide a crucible device or the like which is improved so as to be more advantageous in terms of performing a thin film deposition process.

The problems to be solved by the present invention are not limited thereto, and other matters which are not mentioned can be understood by those skilled in the art from the following description.

According to an embodiment of the present invention, a crucible containing a source for thin film deposition; A crucible heating unit for providing heat for evaporating a source contained in the crucible at an outer peripheral side of the crucible; A crucible housing for containing the crucible heating unit together with the crucible; And a crucible supporting member for supporting the crucible in the crucible housing and fixing the position of the crucible received in the crucible housing.

The crucible may be provided with a source outlet for emitting a vaporized source on the upper side, and a flange may be provided on an outer circumference on the source outlet side. The crucible supporting member may be composed of a single or a plurality of supporting walls positioned between the crucible heating unit and the crucible housing and supporting a flange of the crucible in a state of being raised on the bottom of the crucible housing.

The support wall may be provided with a stepped portion for supporting an edge portion of the flange at an upper end thereof. In addition, the supporting wall may be formed so that a part or all of at least one of the inner wall and the outer wall has a concave-convex structure.

The crucible apparatus according to an embodiment of the present invention may further include a single or multi-layered reflecting member provided between the crucible housing and the crucible supporting member for reflecting heat and / or a cooling unit provided on the outer circumferential side of the crucible housing .

The crucible may be provided with a source storage chamber in a lower region and a radiation direction switching means for guiding a movement direction of radiant heat radiated into the upper portion into the source chamber. The crucible heating unit includes: a lower heater disposed on an outer periphery of a lower region side of the crucible; And an upper heater of a multi-layer structure disposed on the upper side of the upper region of the crucible at an upper side of the lower heater and having a larger number of heater layers than the lower heater.

According to an embodiment of the present invention, a crucible containing a source for thin film deposition; And a heating unit for providing heat for evaporating the source contained in the crucible on the outer circumferential side of the crucible, wherein the heating unit is arranged in a zigzag manner along the circumferential direction of the crucible, A heater; And a heater holder for supporting the heating wire on an outer circumferential side of the crucible, wherein the heater holder is spaced apart from each other and formed in an annular shape so that the crucible is positioned at a center portion thereof and spaced apart from each other in a circumferential direction And the heating wire is hooked on the locking protrusions of the upper and lower rims so as to be arranged in a staggered manner.

Wherein the heating wire is composed of an inner heating wire and an outer heating wire disposed outside the inner heating wire, the locking protrusion being provided along the inner periphery and the outer periphery of the upper and lower rims, respectively, And the outer heat ray can be caught by the outer circumferential side locking projections of the upper and lower rims.

The heater holder may further include a finishing rim that covers the upper side of the upper rim and the lower side of the lower rim, respectively, to fix the position of the heating wire hooked on the locking projection.

According to an embodiment of the present invention, a crucible containing a source for thin film deposition; And a heating unit for providing heat for evaporating a source contained in the crucible on the outer circumferential side of the crucible, wherein a source storage chamber is provided in a lower region of the crucible, and an upper region of the crucible And a radiating direction switching means for guiding the moving direction of the radiant heat to the source chamber, wherein the heating unit comprises: a lower heater for heating a lower region of the crucible; And a top heater which heats the upper region of the crucible on the upper side of the lower heater and has a larger number of heaters than the lower heater.

Here, the heaters of the upper and lower heaters are composed of heating wires, and the upper heater has a larger number of heaters than the lower heater, and has a larger number of heaters than the lower heaters, The inner and outer heat lines may be arranged in a zigzag manner along the outer circumferential direction of the crucible so as to surround the upper region of the crucible in a multi-layered structure .

In the crucible, the crucible having the radiating direction switching means may have a source outlet from which the evaporated source is discharged from the source containing chamber. The radiating direction switching means may be configured to guide the moving direction of radiant heat to the inside of the crucible to the source outlet side.

Wherein the radiation direction switching means comprises: a first inclined portion whose periphery is reduced toward the source outlet side from the source accommodation chamber side and whose inside is directed toward the source accommodation chamber side; And a second inclined portion which is disposed so as to have the first inclined portion between the source accommodating chamber and the source accommodating chamber and whose periphery is reduced from the source exit side toward the source accommodating chamber side and whose inside is directed toward the source exit side and is connected to the first inclined portion can do.

The crucible may be provided with a plurality of ribs spaced along the circumferential direction in grooves between the first inclined portion and the second inclined portion on the outer circumference.

The crucible may have a heat transfer column protruding from the bottom of the source chamber to the center. The heat transfer column may have a cross-section of a radial structure and be formed to have a pointed end.

According to an embodiment of the present invention, there is provided a crucible apparatus comprising: a crucible apparatus for evaporating a source and having a configuration as described above; A source spray device for receiving a source of evaporated material from the crucible and spraying it onto the surface (deposition surface) of the substrate; And a crucible moving device for moving the crucible device so that the crucible device can be detached from the source spray device. Such a thin film deposition apparatus includes: a deposition chamber having a gate and the source spray apparatus accommodated; And a source chamber having a gate facing the gate of the deposition chamber and receiving the crucible. Specifically, the crucible is movable in a direction away from and approaching the source injector, and can be attached to and detached from the source injector according to the direction of movement of the crucible moving device.

The source spraying apparatus comprising: a neck coupled to the crucible and having an introduction flow path through which the evaporated source from the crucible is introduced; A distribution pipe connected to the neck and having a plurality of distribution channels having a structure branched from the introduction channel and a source nozzle communicated with the distribution channel; And a heater for heating a source moved along at least one of the introduction channel and the distribution channel. Preferably, both the neck heater for heating the source moved along the introduction path and the distribution pipe heater for heating the source moved along the distribution path are all included.

The distribution pipe heater may be composed of a plurality of linear heaters arranged on the outer circumference of the distribution pipe in the longitudinal direction of the distribution pipe and spaced apart from each other along the outer circumferential direction of the distribution pipe. At least one of the plurality of linear heaters may be disposed at a position adjacent to the source injection port.

The source spray device includes a distribution pipe housing in which the distribution pipe is accommodated; And a reflection member disposed between the distribution pipe and the distribution pipe housing. The distribution pipe heater may be disposed between the distribution pipe and the reflection member.

And a guide portion for guiding the flow of the outflowing source toward the plurality of distribution channels may be provided at the outlet side of the introduction channel.

The thin film deposition apparatus according to an embodiment of the present invention includes pressure measuring means for measuring a force (pressure) applied to the source injector by the crucible when the crucible is moved and combined with the source injector; And a control unit that determines whether or not the measured pressure from the pressure measuring unit belongs to a predetermined set pressure.

Preferably, the control unit controls the operation of the crucible moving device according to the determination result. More specifically, the control unit may stop the operation of the crucible moving apparatus when it is determined that the measured pressure from the pressure measuring unit exceeds the set pressure.

The pressure measuring means includes: a pressing member; And a pressure sensor for measuring a pressing force by the pressing member. More specifically, one of the pressure member and the pressure sensor (which may be a pressure member) is provided to move together with the crucible, and the other one of the pressure member and the pressure sensor (which may be a pressure sensor) The crucible can be placed in contact with the source injection device when the crucible is engaged with one of the pressure member and the pressure sensor (which may be a pressing member).

Here, the crucible moving device includes: an operating member connected to the crucible device and moved together with the crucible device; And one of the pressing member and the pressure sensor (which may be a pressing member) is installed on the operating member and can move together with the crucible.

The thin film deposition apparatus according to an embodiment of the present invention may further include a sensor for sensing whether a crucible moved in a direction to approach the source spray device for engagement with the source spray device has deviated from a predetermined travel path ; And a control unit that determines whether or not the crucible apparatus has deviated from the movement path through the detection result from the detection sensor.

Preferably, the control unit controls operation of the crucible moving device in accordance with the determination result. Specifically, when the crucible is determined to have departed from the movement path, the control unit may stop the operation of the crucible moving device.

Wherein the detection sensor is constituted by a plurality of contact sensors arranged around the gate of the source chamber in the source chamber and the control unit controls the crucible to move to the source spray device side It can be determined that the crucible is detached from the movement route when the contact is made with the contact sensor.

The thin film deposition apparatus according to an embodiment of the present invention may further include a shock absorber for absorbing an impact generated when the crucible is coupled to the source spray apparatus.

Wherein the buffer device comprises: a movable member movably installed between the crucible device and the operating member in a direction away from and approaching the crucible device; And an impact absorbing member that acts as a buffer between the crucible device and the movable member.

Means for solving the problems will be more specifically and clarified through the embodiments, drawings, and the like described below. In addition, various solution means other than the above-mentioned solution means may be further proposed.

According to the embodiment of the present invention, the source contained in the crucible can be evaporated more effectively, the crucible can be more easily manufactured, maintained, and repaired, and the heating wire can be installed more easily on the outer circumferential side of the crucible.

1 and 2 are cross-sectional views illustrating a thin film deposition apparatus according to an embodiment of the present invention.
Fig. 3 is a cross-sectional view taken along line AA of Fig. 1, which shows a source injector.
4 is an enlarged view of a portion B in Fig.
5 is a perspective view showing part C of Fig.
Fig. 6 is a cross-sectional view showing a modified example of the source injection device shown in Figs. 1 and 2. Fig.
Fig. 7 is a sectional view showing the crucible shown in Figs. 1 and 2. Fig.
8 is a cross-sectional view showing the crucible shown in Fig.
9 is a sectional view taken along line DD of Fig.
10 is a perspective view showing the radiant heat transfer member shown in Figs. 7 and 8. Fig.
11 is a plan view showing the upper heater shown in Fig.
12 is a plan view showing the lower heater shown in Fig.
13 is a perspective view showing the upper heater holder shown in Figs. 7 and 11. Fig.
14 is a developed view showing the upper heater shown in Figs. 7, 11 and 13. Fig.
Fig. 15 is a perspective view showing the lower heater holder shown in Figs. 7 and 12. Fig.
16 is a cross-sectional view showing the source chamber, the crucible apparatus and the crucible moving apparatus shown in Figs. 1 and 2. Fig.
17 is a plan view showing driving means of a thin film deposition apparatus according to an embodiment of the present invention.
18 is a sectional view taken along line BB of Fig.
19 is a block diagram showing a control apparatus of a thin film deposition apparatus according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. For the sake of convenience, it is to be understood that the present invention is not limited to the above embodiments, and various changes and modifications may be made without departing from the scope of the present invention. Further, the terms used to describe the embodiments of the present invention are mainly defined in consideration of the functions of the present invention, and thus may be changed depending on the intentions and customs of the user and the operator. Therefore, the terminology should be interpreted based on the contents of the present specification throughout.

Embodiments of the present invention can be mainly used for manufacturing semiconductors, flat panel displays (FPD), solar cells, and the like. In particular, as a kind of flat panel display, it can be more suitable for manufacturing organic light emitting diodes (OLED), which are attracting attention as a next generation display due to high quality and simple manufacturing process.

1 and 2 are cross-sectional views illustrating a thin film deposition apparatus according to an embodiment of the present invention.

1 and 2, a thin film deposition apparatus according to an embodiment of the present invention includes a deposition chamber 10 having a gate 11 on the lower side, a deposition chamber 10 on the lower side of the deposition chamber 10, A source chamber 20 provided above the deposition chamber 10 and provided with a gate 21 facing the gate 11 of the deposition chamber 10 on the upper side, A gate valve 30 for hermetically connecting or disconnecting the substrates 11 and 21 to and from the vacuum chamber 10; a vacuum apparatus 40 connected to the source chamber 20; a source injector 50 installed inside the deposition chamber 10; A crucible device 60 installed vertically movably in the source chamber 20 and detachable from the source spray device 50 in accordance with the moving direction and a crucible moving device 70 for moving the crucible device 60 . For reference, the mounting surface 3 may be a floor (ground surface) or a base frame.

The substrate 5 is brought into the deposition chamber 10 and is positioned above the source injection device 50 inside the deposition chamber 10. [ Although not shown, the deposition chamber 10 has a substrate entry / exit port through which the substrate 5 is loaded / unloaded, and the substrate entry / exit port can be opened / closed by an opening / closing device. Further, although not shown, the substrate 5 loaded into the deposition chamber 10 can be supported by the substrate holding apparatus.

When the gate valve 30 is operated to open the two gates 11 and 21 opposed to each other and the vacuum apparatus 40 is operated, the deposition chamber 10 and the source chamber 20 are brought together in a vacuum atmosphere . The vacuum device 40 may include a vacuum pump.

The crucible 60 is lifted by the crucible moving device 70 while the two gates 11 and 21 are in communication with each other to couple the source spray device 50 and the crucible device 60 and the crucible device 60 The source of the thin film material is evaporated in the crucible device 60 and the source injector 50 receives the evaporated source from the crucible 60 and injects it, The source is moved to the upper substrate 5 and then deposited on the substrate 5 to form a thin film (see FIG. 2). At this time, an organic material may be used as a source which is a thin film material.

When the source is exhausted, the crucible 60 is lowered by the crucible moving device 70 to be separated from the source injection device 50, and the gate valve 30 is operated (closed operation) The vacuum atmosphere of the deposition chamber 10 is maintained as it is and the vacuum atmosphere of the source chamber 20 is discarded so that the source is supplied to the crucible 60 Rechargeable.

FIG. 3 is a sectional view taken along the line AA in FIG. 1, FIG. 4 is an enlarged view of a portion B in FIG. 1, FIG. 5 is a perspective view showing a portion C in FIG. .

3 to 5, the source injection device 50 includes a connection neck 51 having an introduction flow path 511 through which a source evaporated from the crucible 60 flows, an introduction flow path 511, A distribution pipe 52 having a plurality of distribution channels 521 having a structure branched from the distribution channel 521 and a source jet opening 525 communicated with the distribution channel 521, a neck housing 53 in which the connection neck 51 is accommodated, A distributor pipe housing 54 in which the distributing pipe 52 is accommodated, a neck heater 55 for heating a source moved along the introducing duct 511, a distribution pipe heater for heating a source moved along the distributing channel 521, (56).

The connecting neck 51 and the distribution pipe 52 may be made of a metal such as stainless steel, molybdenum, Mo, tungsten, W or titanium. Alternatively, the connection neck 51 and the distribution pipe 52 may be made of alumina, zirconia, boron nitride (BN), pyrolytic boron nitride (PBN), aluminum nitride ) May be applied, or graphite or coated graphite may be applied.

The neck housing 53 and the distribution pipe housing 54 may also be made of the same or similar material as the connection neck 51 and the distribution pipe 52.

The introduction flow path 511 is formed so as to penetrate the connecting neck 51 in the vertical direction. 4, the connecting neck 51 is installed so that the inlet 512 of the introduction flow path 511 is opposed to the gate 11 of the deposition chamber 10 in the deposition chamber 10. Accordingly, the crucible 60 is coupled to the inlet 512 of the connection channel 51 at the inlet channel 511 side. For reference, a flange member for coupling the connecting neck 51 and the crucible 60 may be provided at the lower end of the connecting neck 51.

The distribution pipe 52 is connected to the upper end of the connection neck 51 which is the outlet 513 side of the introduction flow path 511. The distribution pipe 52 has a structure elongated in both the left and right directions from the outlet 513 of the introduction flow path 511. The distribution pipe 52 has a distribution channel 521 therein and the distribution channel 521 has a structure branched from the outlet 513 of the introduction channel 511 to the left and right. The distribution pipe 52 may be integrally formed with the connection neck 51.

The branching direction of the distribution passage 521 and the number of branching distribution passages 521 are not limited thereto and can be variously changed within a range capable of spraying the source to the substrate 5. [ In one example, the distribution flow path 521 may be provided in three or more and be disposed radially.

A flow of the source flowing out through the outlet 513 of the introduction flow path 511 is provided on the side of the outlet 513 of the introduction flow path 511 between the introduction flow path 511 and the plurality of distribution flow paths 521, And guide portions 515 for guiding each of them to the guide portion 521 side. The guide portion 515 is formed on the side of the outlet 513 of the introduction flow path 511 with inclined surfaces inclined to the left and right sides in the extension direction of the distribution flow path 521. [

A plurality of source injection ports 525 are provided. The source injection ports 525 are spaced apart from each other along the longitudinal direction of the distribution pipe 52 at the upper side of the distribution pipe 52. The source injection ports 525 may be arranged in a plurality of rows.

A nozzle 57 is detachably coupled to each of the source injection ports 525. And the discharge port of the nozzle 57 is exposed to the outside of the distribution pipe housing 54. A type in which some of the plurality of nozzles 57 have different injection quantities can be applied. Of course, by appropriately combining the nozzles 57 having different injection quantities through the replacement of the nozzles 57, the injection of the source may be performed in different amounts for each region.

The neck housing 53 and the distribution pipe housing 54 may be integrally formed. The neck heater 55 is composed of a plurality of linear heaters provided between the connection neck 51 and the neck housing 53 and located outside the connection neck 51. The distribution pipe heater 56 is connected to the distribution pipe 52 And a plurality of linear heaters provided between the distribution pipe housing 54 and the outside of the distribution pipe 52. The connection neck 51 and the distribution pipe 52 are heated by the neck heater 55 and the distribution pipe heater 56 and the source moved along the introduction channel 511 and the distribution channel 521 is heated by the heated connection neck The heat is radiated from the heat exchanger 51 and the distribution pipe 52, or the like.

For reference, as a linear heater constituting the neck heater 55 or constituting the distribution pipe heater 56, there is a sheath heater (a heater in which a heating wire is inserted into a metal pipe and sealed with magnesium powder or aluminum oxide powder) A catridge heater, or the like may be applied.

The plurality of linear heaters constituting the neck heater 55 are arranged in the outer circumferential direction of the connection neck 51 and are spaced apart from each other along the longitudinal direction (vertical direction) of the introduction channel 511.

The plurality of linear heaters constituting the distribution pipe heater 56 are arranged in the longitudinal direction (lateral direction) of the distribution pipe 52 and spaced apart from each other along the outer peripheral direction of the distribution pipe 52.

3, at least one of the plurality of linear heaters constituting the distribution pipe heater 56 is disposed at a position close to the source injection port 525 on the upper side of the distribution pipe 52, and is arranged on the nozzle 57 side .

5, one or both ends of the plurality of linear heaters constituting the distribution pipe heater 56 are fixed in position through the ends of the distribution pipe housing 54, and the distribution pipe housing 54 May be coupled to a finishing cover 541 that protects the linear heater penetrating through the end portion.

The heat from the neck heater 55 and the distribution pipe heater 56 is reflected between the neck housing 53 and the neck heater 55 and between the distribution pipe housing 54 and the distribution pipe heater 56 to prevent heat loss Is disposed on the other side of the reflecting member (58, 59). The reflective members 58 and 59 may be attached to the inner surface of the neck housing 53 and the inner surface of the distribution pipe housing 54.

The vaporized source from the crucible device 60 is heated by the neck heater 55 in the process of passing through the introduction flow path 511 and flows into the distribution path 521 And is heated again by the distributor pipe heater 56 in the course of moving along the nozzle 57. In the process of being sprayed through the nozzle 57, the heater disposed on the nozzle 57 side among the linear heaters constituting the distributor pipe heater 56 And is heated again.

Therefore, even when the source supplied from the crucible apparatus 60 to the source injector 50 is not uniformly distributed and has no uniform thermal distribution, It is possible to obtain uniform characteristics and thermal distribution as it is continuously heated to a high temperature. Of course, it is also possible to prevent the characteristics of the source and the thermal distribution from being unevenly deteriorated in the process of being injected into the source spraying device 50 and being sprayed.

6 is a cross-sectional view showing a modified example of the source injecting apparatus 50. In the modification of FIG. 6, the same reference numerals as those of the source injecting apparatus 50 shown in FIG. (515-1). That is, the guide portion 515-1 of the modification of Fig. 6 has a structure that can more smoothly guide the flow of the source flowing out from the introduction flow path 511 toward the distribution flow paths 521, respectively. The guide portion 515-1 connects the introduction flow path 511 and the plurality of distribution flow paths 521 between the introduction flow path 511 and the plurality of distribution flow paths 521, To the side of the distribution passage 521 side.

According to the guide portion 515-1 as described above, the modification of Fig. 6 is constituted by a flow path which is inclined as a whole between the introduction flow path 511 and the distribution flow path 521, and the flow path from the introduction flow path 511 to the distribution flow path 521, The flow of the source can be naturally induced to the distribution flow paths 521 side without a large resistance. That is, it is possible to prevent the flow of the source from being delayed between the introduction flow path 511 and the distribution flow path 521.

Fig. 7 is a sectional view showing the crucible 60. Fig.

7, the crucible device 60 includes a crucible 61 containing a source, a crucible heating unit 62 provided to be positioned on the outer peripheral side of the crucible 61, A crucible holding member 64 for holding the crucible 61 by supporting the crucible 61 housed in the crucible housing 63 and a crucible holding member 64 for holding the crucible 61 from the crucible heating unit 62 A reflecting member 65 for reflecting the heat of the crucible 61 toward the crucible 61 side, and a cooling unit 66 provided on the outer periphery of the crucible housing 63.

The crucible heating unit 62 provides heat for evaporating the source to the crucible 61 and the source contained in the crucible 61 is evaporated by the heating action of the crucible heating unit 62. That is, the crucible 61 is heated by the crucible heating unit 62, and the source is heated by radiant heat from the heated crucible 61, conductive heat or the like.

The crucible housing 63 includes a housing main body 631 having a top opened structure and a housing cover 632 detachably coupled to the opened upper side of the housing main body 631. [ Preferably, the housing main body 631 is constituted by a cylindrical wall formed along the edge portions of the circular bottom plate and the bottom plate. The housing cover 632 is provided at its center with an opening exposing an upper end side of the accommodated crucible 61 located inside the housing body 631. The housing main body 631 and the housing cover 632 may be made of metal or ceramics capable of withstanding high temperatures.

8 is a cross-sectional view showing the crucible 61. Fig.

The crucible 61 may be made of stainless steel or a metal such as molybdenum (Mo), tungsten (W), or titanium (Ti). Alternatively, ceramics such as alumina, zirconia, boron nitride (BN), pyrolytic boron nitride (PBN), and aluminum nitride (AIN) may be used as the material of the crucible 61, and graphite or coated graphite may be applied.

8, the crucible 61 is provided with a source storage chamber 611 in which a source is contained and a source outlet 613 in which vaporized source from the source storage chamber 611 is discharged. And the direction of movement of the radiant heat (negative heat to the crucible heating unit 62) emitted into the crucible 61 into the source storage chamber 611 is provided between the source storage chamber 611 and the source outlet 613, And a radiation direction switching means 614 for guiding the radiation direction to the source outlet 613 side.

The crucible 61 is formed to have a structure in which the upper side is opened by the source outlet 613. The shape of the crucible 61 is generally cylindrical in shape as a whole (see Fig. 9)

The crucible 61 can be divided into upper, lower, and intermediate parts, and when the part is damaged, only the corresponding part can be replaced. Specifically, the crucible 61 includes a crucible main body 61A having a source containing chamber 611, a source emitting member 61B having a source outlet 613, a crucible main body 61A having a source outlet 613, And a radiation heat transfer member 61C having a radiation direction switching means 614.

The crucible main body 61A is formed so as to have the structure of a cylindrical container which is long and open on the top and bottom, and serves as a source containing chamber 611 inside. Both the source emitting member 61B and the radiant heat transmitting member 61C are formed so as to have a cylindrical structure with the top and bottom opened. The source emitting member 61B is formed so as to be flat and the inside communicating with the open top and bottom is the source outlet 613. A flange 618 is provided on the upper end side of the source emissive member 61B and a connection neck 51 and a source emissive element 618 are provided on the upper side of the flange 618 when the source injector 50 and the crucible 60 are engaged, And a sealing member that maintains airtightness between the sealing portions 61B.

A radiating heat transfer member 61C is detachably coupled to the upper side of the crucible main body 61A and a source emitting member 61B is detachably coupled to the upper side of the radiant heat transmitting member 61C. The crucible main body 61A and the radiant heat transfer member 61C and the radiant heat transfer member 61C and the source emitting member 61B may be coupled to each other by a screw coupling method. For example, a male screw portion may be formed on the outer periphery of the upper side of the crucible main body 61A and a female screw portion may be formed on the inner circumference of the lower side of the radiating heat transfer member 61C to engage with the male screw portion on the upper side of the crucible main body 61A. A female screw portion may be formed on the inner circumference of the upper side of the radiant heat transmitting member 61C and a male screw portion may be formed on the outer circumference of the lower side of the source radiating member 61B to engage with the female screw portion of the upper side of the radiant heat transmitting member 61C.

Fig. 9 is a cross-sectional view taken along the line D-D in Fig. 8 (a cross-sectional view).

8 and 9, a heat transfer column 612 projecting at a predetermined height from the bottom of the source storage chamber 611 to the center of the source storage chamber 611 is provided in the crucible main body 61A do.

The heat transfer columns 612 are composed of a slender central portion erected in the vertical direction, a plurality of wing portions protruding from the central portion and spaced apart from each other along the outer circumferential direction and formed in a plate shape, thereby having a generally radial cross section. The heat transfer column 612 having such a radial structure has a heat transfer area that is further increased with respect to the source. Preferably, the heat transfer column 612 is formed with a pointed end.

When the wall and bottom of the crucible main body 61A are heated by the crucible heating unit 62, the heat transfer columns 612 receive heat mainly from the bottom of the crucible main body 61A by conduction phenomenon and are heated.

It is preferable that the heat transfer columns 612 are integrally formed in the crucible main body 61A on the effective heat conduction surface between the bottom of the crucible main body 61A and the heat transfer columns 612. [

According to such a crucible main body 61A, the sidewall located on the side of the edge portion of the source storage chamber 611 is mainly heated by the radiant heat and the conductive heat from the wall of the heated crucible main body 61A, 611 are heated mainly by the radiant heat and the conductive heat from the heated heat transfer columns 612. That is, the edge-side source and the center-side source of the source housing chamber 611 can be heated together.

10 is a perspective view showing the radiant heat transfer member 61C.

Referring to Figs. 8 and 10, the radiant heat transfer member 61C has a neck portion (refer to reference numerals 615 and 616) formed so that the intermediate portion has a constricted structure.

The neck portion of the radiant heat transmitting member 61C has a first inclined portion 615 formed in such a shape that its periphery gradually decreases from the upper side (the side of the source accommodating chamber 611 to the side of the source outlet 613), the first inclined portion 615, And a second inclined portion 616 which is disposed on the upper side of the first inclined portion 615 and has a circumferential shape gradually decreasing from the lower side (the side of the source outlet 613 to the side of the source accommodating chamber 611). The upper end of the first inclined portion 615 and the lower end of the second inclined portion 616 are connected to each other. According to such a neck portion, the radiant heat transfer member 61C has a constricted structure in the middle thereof, and thus has a larger absorption area for radiant heat from the crucible heating unit 62. [

The radiant heat emitted from the first inclined portion 615 to the inside of the crucible 61 is directed toward the source accommodation chamber 611 side since the inside of the first inclined portion 615 faces the side of the source accommodation chamber 611 . The radiant heat from the first inclined portion 615 mainly heats the source contained in the source storage chamber 611 and evaporates in the source storage chamber 611 to heat the source moved to the inside of the radiant heat transfer member 61C ). &Lt; / RTI &gt;

Since the inside of the second inclined portion 616 faces the side of the source outlet 613, the radiant heat emitted from the second inclined portion 616 to the interior of the crucible 61 is shifted toward the source outlet 613 side . Radiant heat from the second inclined portion 616 can be used to heat (prevent coagulation) of the evaporated source, which is mainly moved to the source outlet 613 side through the inside of the radiant heat transfer member 61C.

The first inclined portion 615 and the second inclined portion 616 that switch the moving direction of the radiant heat emitted from the neck portion to the inside of the crucible 61 toward the source housing chamber 611 side and the source outlet 613 side, (614).

The radiation heat transfer member 61C is formed with grooves along the outer circumferential direction between the first inclined portion 615 and the second inclined portion 616 on the outer circumference by the neck portion. The first inclined portion 615 and the second A plurality of ribs 617 are provided in the grooves between the inclined portions 616.

The plurality of ribs 617 may be spaced apart from each other along the circumferential direction of the radiant heat transfer member 61C in the groove between the first inclined portion 615 and the second inclined portion 616. [

According to the plurality of ribs 617, the radiant heat transfer member 61C has a structurally further improved strength and an increased absorption area for radiant heat from the crucible heating unit 62. [

The crucible device 60 having the crucible 61 as described has a heat transfer column 612 for heating the center side source in the source storage chamber 611 and a heat transfer column 612 for heating the center side source is provided between the source storage chamber 611 and the source outlet 613 A first inclined portion 615 and a second inclined portion 616 for switching the moving direction of the radiant heat emitted to the inside of the crucible 61 from the source accommodating chamber 611 side to the source outlet 613 side, A plurality of ribs 617 for increasing the absorption area with respect to heat between the first inclined portion 615 and the second inclined portion 616 are formed on the edge side source and the center side source of the source storage chamber 611, The heat from the heating unit 62 can be transmitted more uniformly and the heat from the crucible heating unit 62 can be efficiently used.

Therefore, the embodiment of the present invention can prevent a relatively large amount of the source from remaining in the center portion side of the source storage chamber 611, and a part of the source is evaporated incompletely or a part of the evaporated source is solidified It is possible to prevent the evaporated source from having uneven characteristics, thereby improving the uniformity of the thin film. Of course, in the embodiment of the present invention, since the source supplied from the crucible apparatus 60 to the source spray apparatus 50 is continuously heated by the neck heater 55 and the distribution pipe heater 56, And the thermal distribution can be more uniformly uniformed.

The crucible supporting member 64 is disposed between the crucible heating unit 62 and the crucible housing 63 on the outer peripheral side of the crucible heating unit 62. This crucible supporting member 64 is constituted by a cylindrical supporting wall body supporting the flange 618 of the crucible 61 in a state standing on the bottom plate of the housing main body 631. The crucible supporting member 64 may have a structure divided into a plurality of unit supporting walls depending on the operating conditions and the like.

The supporting wall constituting the crucible supporting member 64 is provided with a step portion 641 for supporting the edge portion of the flange 618 at the upper end. Such a support wall may be made of a heat insulating material. Preferably, the supporting wall is formed so that at least one of the inner wall and the outer wall has a concave-convex structure (refer to reference numeral 642 in Fig. 7) for improving thermal efficiency. The concave-convex structure may be provided on a part or the whole of the wall surface of the support wall. For example, the concavo-convex structure may be provided only on a portion of the wall surface of the support wall corresponding to the upper region (refer to reference numeral A1 in Fig. 8) of the crucible 61. [

The reflecting member 65 of the crucible 60 is installed on the inner wall side of the housing main body 631 by the mounting block 651 of the circular ring structure and is positioned between the housing main body 631 and the crucible supporting member 64 . The reflective members 65 are formed in a cylindrical shape and are provided in plural and are stacked on each other to have a multi-layer structure. The reflecting member 65 of the crucible housing 63 reflects the heat from the crucible heating unit 62 to the crucible 61 side to prevent heat loss.

The mounting blocks 651 are provided with a pair (two) and are spaced apart in the vertical direction. The upper mounting block is detachably coupled to the upper end of the inner wall of the housing main body 631 and the lower mounting block is fixed to the lower end side of the inner wall of the housing main body 631, . The two mounting blocks 651 are each provided with a groove portion in which the upper end and the lower end of the reflecting member 65 are fitted respectively and the reflecting member 65 is provided with the upper and lower end portions of the two mounting blocks 651 The position is fixed.

Although not specifically shown, the cooling unit 66 may include a cooling jacket that receives cooling fluid from the cooling fluid supply means. The cooling jacket cools the crucible 61 by cooling the crucible housing 63 by the cooling fluid from the cooling fluid supply means.

On the other hand, in the crucible apparatus 60, the radiating direction switching means 614 is constituted by the first inclined portion 615 and the second inclined portion 616, and the radiant heat emitted from the neck portion into the crucible 61 The movement direction is switched to both the direction of the source accommodating chamber 611 and the direction of the source exit 613, but the neck portion may be provided with only one of the first inclined portion 615 and the second inclined portion 616 The radiating direction switching means 614 switches the moving direction of the radiant heat radiated from the neck portion into the crucible 61 only in one of the source accommodating chamber 611 side and the source outlet 613 side .

Unlike the above description, the crucible 60 can have a structure in which at least one of the crucible housing 63, the crucible supporting member 64, the reflecting member 65, and the cooling unit 66 is excluded have. The crucible 61 has a structure in which the heat transfer columns 612 and the radiation direction switching means 614 are excluded but a general type having the source storage chamber 611 and the source outlet 613 as they are .

7, the crucible heating unit 62 includes an upper region (reference numeral A1 in Fig. 8) corresponding to the side of the source outlet 613 and the side of the radiating direction switching means 614 on the outer periphery of the crucible 61, (Refer to A2 in Fig. 8) corresponding to the side of the source accommodating chamber 611 from the outer periphery of the crucible 61. The upper heater 62A is disposed below the upper heater 62A, And a lower heater 62B for heating.

Figs. 11 to 15 show the crucible heating unit 62. Fig.

7, 11, 12 and 14, the upper heater 62A is arranged in a zigzag manner along the outer circumferential direction of the crucible 61 to form a heating wire 621A surrounding the upper region A1 of the crucible 61, And an upper heater holder 622A for supporting the heating wire 621A on the outer peripheral side of the crucible 61. [

The lower heater 62B also includes a heater composed of a heating wire 621B. The heating wires 621B of the lower heater 62B are arranged in a zigzag manner along the outer circumferential direction of the crucible 61 to surround the lower region A2 of the crucible 61. [ The lower heater 62B includes a lower heater holder 622B for supporting the heating wire 621B of the lower heater 62B on the outer peripheral side of the crucible 61. [

The heating wires 621A and 621B of the upper and lower heaters 62A and 62B arranged in a staggered manner include a plurality of linear portions arranged in the vertical direction and spaced apart from each other along the outer circumferential direction of the crucible 61, And a connecting portion for alternately connecting the upper end portion and the lower end portion of the neighboring rectilinear portions (refer to FIG. 14).

As shown in Figs. 11 and 12, the lower heater 62B has one heater, while the upper heater 62A has a plurality of heaters. That is, the upper heater 62A includes a plurality of heating wires 621A. Specifically, it is constituted by an inner heat line 621A1 and an outer heat line 621A2 disposed outside the inner heat line 621A1 and forming a multilayer structure with the inner heat line 621A1.

As shown in Fig. 13, the upper heater holder 622A includes upper and lower rims 623A and 624A. The upper and lower rims 623A and 624A are both formed in an annular shape having a size such that the crucible 61 can be located at the center thereof. The upper rim 623A is disposed at the upper end of the upper region A1 of the crucible 61 with the crucible 61 positioned at the center thereof and the lower rim 624A is located at the center thereof with the crucible 61 And is disposed on the lower end side of the upper region A1 of the crucible 61 in a state where the crucible 61 is in a state of being opened. Accordingly, the upper and lower rims 623A and 624A are vertically spaced from each other.

A plurality of locking projections 623A1 and 623A3 are provided on the inner periphery and the outer periphery of the upper and lower rims 623A and 624A so as to be spaced from each other along the inner circumferential direction and the outer circumferential direction, And between the outer circumferential side locking protrusions 623A3, insertion groove portions 623A2 and 623A4 are formed, which are opened upward and downward, respectively.

As shown in Fig. 14, the inner heat wire 621A1 has its straight portion inserted into the inner peripheral side insertion groove portion 623A2 of the upper and lower rims 623A and 624A, respectively, and the connecting portion thereof is connected to the upper and lower rims 623A, and 624A by being wound around the inner circumferential side locking protrusions 623A1 in a zigzag manner. The outer heat line 621A2 is also wound around the outer circumferential side lock protrusion 623A3 of the upper and lower rims 623A and 624A in the same manner as the inner heat line 621A1.

An upper finishing rim 625A is covered on the upper side of the upper rim 623A and a lower finishing rim 626A is covered on the lower side of the lower rim 624A. The connection of the inner and outer heat lines 621A1 and 621A2 protruded upward by the engagement with the inner circumferential side locking protrusion 623A1 and the outer circumferential side locking protrusion 623A3 of the upper rim 623A is connected to the upper finish rim 625A An inner hole 625A1 and an outer hole 625A2 to be inserted are provided. The connecting portions of the inner and outer heat lines 621A1 and 621A2 protruded downward by being caught by the inner circumferential side locking protrusion 624A1 of the lower rim 624A and the outer circumferential side locking protrusion 624A3 are formed in the lower finish rim 626A respectively An inner hole 626A1 and an outer hole 626A2 to be inserted are provided.

According to the upper and lower finishing rims 625A and 626A, the holes 625A1 and 625A2 (626A1 and 626A2) of the two finish rims 625A and 626A, which are respectively covered on the upper side of the upper rim 623A and the lower side of the lower rim 624A, The inner and outer heat lines 621A1 and 621A2 wound around the latching protrusions 623A1 and 623A3 (624A1 and 624A3) can be prevented from being separated from the inner and outer heat lines 621A1 and 621A2 have. That is, the position of the inner and outer heat lines 621A1 and 621A2 can be fixed.

As shown in Fig. 15, the lower heater holder 622B includes upper and lower rims 623B and 624B. The upper and lower rims 623B and 624B of the lower heater holder 622B are both formed in an annular shape having a size such that the crucible 61 can be positioned at the center thereof. The upper rim 623B of the lower heater holder 622B is disposed on the upper end side of the lower region A2 of the crucible 61 with the crucible 61 positioned at the center thereof and the upper rim 623B of the lower heater holder 622B The lower rim 624B is disposed at the lower end side of the lower region A2 of the crucible 61 with the crucible 61 positioned at the center thereof. Accordingly, the upper and lower rims 623B and 624B of the lower heater holder 622B are vertically spaced from each other.

A plurality of locking projections 623B1 are provided on the inner circumference of the upper and lower rims 623B and 624B of the lower heater holder 622B at intervals so as to be spaced apart from each other along the inner circumferential direction, The upper and lower rims 623A and 624B of the upper heater holder 622A are provided with an insertion groove 623B2 between the plurality of locking projections 623B1 in the inner periphery of the upper and lower ridges 623B and 624B, .

The heating wires 621B of the lower heater 62B are arranged in a staggered manner in the same manner as the inner heating wires 621A1. That is, both ends of the heating wire 621B of the lower heater 62B are inserted into the insertion groove portions 623B2 of the upper and lower rims 623B and 624B constituting the lower heater holder 622B, Is hooked on the engagement protrusions 623B1 of the upper and lower rims 623B and 624B constituting the lower heater holder 622B.

The lower heater holder 622B also includes an upper finish rim 625B covering the upper side of the upper rim 623B and a lower finish rim 626B covering the lower side of the lower rim 624B. The upper end rim 625B and the lower finish rim 626B of the lower heater holder 622B are wound around the engagement protrusions 623B1 of the upper and lower rims 623B and 624B constituting the lower heater holder 622B, The upper and lower rims 623B and 624B constituting the lower heater holder 622B are provided with holes 625B1 and 626B1 through which connection portions of the heating wires 621B of the lower heater 62B protruded upward and downward, The heating wire 621B of the lower heater 62B which is wound around the hooking protrusion 623B1 of the lower heater 62B is prevented from being separated.

The lower heater holder 622B may further include a single or a plurality of auxiliary rims 627B for supporting the heating wires 621B of the lower heater 62B between the upper rim 623B and the lower rim 624B . The auxiliary rim 627B may have the same structure as the upper rim 623B of the lower heater holder 622B and have a plurality of locking projections 627B1 provided along the inner periphery and an insertion groove 627B2 formed therebetween. The straight line portion of the heating wire 621B of the lower heater 62B is inserted into the insertion groove portion 627B2 without the heating wire 621B of the lower heater 62B being wound around the auxiliary rim 627B.

Although not shown, the upper heater holder 622A may further include an auxiliary rim having the same function as the auxiliary rim 627B of the lower heater holder 622B.

7, 13, and 15, the upper heater holder 622A and the lower heater holder 622B may be supported in a state of being connected to each other by a plurality of rod-shaped connecting members 62C.

A plurality of (four) engaging holes 625A3 are provided at the edges of the upper finishing rim 625A of the upper heater holder 622A at intervals so as to be spaced apart from each other along the edge portions, And the upper end portion can be respectively fitted and fitted into the fitting hole 625A3 of the upper finishing rim 625A of the upper heater holder 622A. A plurality of engaging holes 626B2 are provided at the edges of the lower finish rim 626B of the lower heater holder 622B at intervals such that the engaging holes 626B2 are spaced apart from each other along the edge portion, and the lower end of the connecting member 62C is provided to the lower heater holder 622B. Respectively, into engagement holes 626B2 of the lower finish rim 626B.

A plurality of (four) engagement grooves 623A5 and 624A5 may be provided on the edge portions of the upper and lower rims 623A and 624A of the upper heater holder 622A so as to be spaced apart from each other along the edge portion . The connection member 62C has a structure in which the circumferences are reduced at positions corresponding to the coupling grooves 623A5 and 624A5 of the upper and lower rims 623A and 624A of the upper heater holder 622A, 623A5, and 624A5, respectively. The engaging grooves 623A5 and 624A5 may be formed at the ends of selected portions of the outer circumference side engaging protrusions 624A3 of the upper and lower rims 623A and 624A of the upper heater holder 622A.

The edge portions of the lower finish rim 626A of the upper heater holder 622A and the edge portions of the upper rim 623B, lower rim 624B, upper finish rim 625B, and auxiliary rim 627B of the lower heater holder 622B 624B3, 624B3, 625B2, and 627B3 may be provided on the edge portion at intervals such that a plurality of (four may be each) engagement grooves 626A3 (623B3, 624B3, 625B2, 627B3) are spaced apart from each other along the edge portion. The lower end rim 626A of the upper heater holder 622A and the upper rim 623B of the lower heater holder 622B, the lower rim 624B, the upper finish rim 625B, 625B2, and 627B3 of the auxiliary rim 627B and the engagement grooves 626A3 (623B3, 624B3, 625B2, and 627B3) of the auxiliary rim 627B are formed in the engagement grooves 626A3 (623B3, 624B3, 625B2, and 627B3) A narrowing portion to be fitted can be provided.

According to the crucible heating unit 62 as described above, the embodiment of the present invention can separately control heating of the upper region A1 and the lower region A2 of the crucible 61, The source can be effectively evaporated by applying heat to the radiation direction switching means 614 of the region A1 more intensively. Further, the heating wires 621A and 621B can be easily installed on the outer circumferential side of the crucible 61. [

16 is a cross-sectional view showing the crucible moving device 70 and its peripheral configuration.

1, 2, 7 and 16, the crucible moving device 70 includes an operating member 71 connected to the bottom of the crucible housing 63 and moved together with the crucible 60, an operating member 71, (See reference numeral 72 in Fig. 17) for moving the crucible 60 by moving the crucible 60 in the vertical direction.

The operating member 71 includes an operating rod 711 extending downward from the crucible 60 and penetrating the source chamber 20 and having a lower end exposed to the outside, a central portion connected to the lower end of the operating rod 711, (Not shown).

The operation plate 712 is guided by the up-and-down movement guide 73 in the direction of motion. The up-and-down movement guide 73 may be composed of a plurality of guide rods penetrating the operation plate 712 in a state where the bottom surface of the source chamber 20 and both ends of the installation surface 3 are coupled to each other. Reference numeral 74 denotes a bellows.

The drive means 82 is shown in Fig. 17, the driving means 72 includes a screw rod 722 rotated in both directions (positive and negative directions) by a driving motor 721 and screwed into an actuation plate 712. Two screw rods 722 are provided so that the drive motor 721 rotates the two screw rods 722 together by means of power transmission means (see 723, 724, 725, 726, and 727).

Two screw rods 722 are disposed between the source chamber 20 and the mounting surface 3 and vertically arranged on the left and right sides, respectively, so as to sandwich the operating rod 711 therebetween. The two screw rods 722 are screwed to the actuating plate 712 in a rotatably mounted state on the mounting surface 3.

The power transmission means is installed on the lower side of the source chamber 20. The power transmission means may include a first bevel gear set 723, two second bevel gear sets 724 and 725, and two third bevel gear sets 726 and 727.

The first bevel gear set 723 may be disposed rearward (or forward) with respect to the operating rod 711. The first bevel gear set 723 includes a first gear that is rotated about an axis in the forward and backward direction and that is directly connected to the drive motor 721, two second gears that are respectively rotated about a left- Lt; / RTI &gt;

The third bevel gear set 726 and 727 may be composed of a sixth gear mounted on the upper end of the two screw rods 722 respectively and a fifth gear rotated about the longitudinal axis and engaged with the sixth gear .

The second bevel gear sets 724 and 725 may be composed of third gears respectively mounted on the shafts of the two second gears and fourth gears respectively mounted on the shafts of the fifth gears and meshing with the third gears .

For reference, depending on the combination of the gears constituting the power transmitting means, the male screw of the two screw rods 722 may be formed in different directions (right screw, left screw).

On the other hand, as the driving means 72, a type including a linear driving mechanism such as a pneumatic or hydraulic cylinder may be applied.

7, a shock absorber 80 is provided between the crucible housing 63 and the operating rod 711 to absorb shock generated when the crucible 60 is coupled to the source sprayer 50 .

The shock absorber 80 includes a movable member 81 provided so as to be movable in the up and down direction (in the direction away from and approaching the crucible housing 63) on the bottom surface of the housing main body 631 constituting the crucible housing 63, And a single or plural shock absorbing members 82 provided between the movable member 81 and the crucible housing 63.

The actuating rod 711 is coupled to the movable member 81. The shock absorbing member 82 may be a coil spring or a rubber pad capable of absorbing shock by using an elastic force.

The thin film deposition equipment according to the embodiment of the present invention further includes a control device for controlling the operation of the driving means 72 of the crucible moving device 70. [

Fig. 18 is a sectional view taken along the line E-E in Fig. 16, and Fig. 19 is a block diagram showing the control device.

16, 18, and 19, the control device displays the normal movement path (see the center line (dashed line) in Fig. 16) preset by the crucible 60 raised for engagement with the source injection device 50, A cruising device 60 that is raised when the crucible device 60 is raised to be coupled with the source spray device 50, , A pressure measurement means 92 for measuring a force applied to the source injection device 50 by the control means 92, a detection result from the path deviation detection sensor 91, And a control unit 93 for controlling the operation of the drive motor 721 of the drive motor 721.

Here, the control unit 93 determines whether or not the crucible 60 is deviated from the movement path based on the detection result from the path deviation detection sensor 91 and the role of the measurement pressure from the pressure measurement means 92 And also controls the operation of the drive motor 721 of the drive means 72 in accordance with the determination and determination result.

The path deviation detection sensor 91 is composed of a plurality of contact sensors disposed around the gate 21 of the source chamber 20 so as to be located inside the source chamber 20. [ Preferably, a plurality of contact sensors are mounted on the ceiling of the source chamber 20 and are spaced apart from one another along the periphery of the gate 21 of the source chamber 20.

As the path deviation detection sensor 91, an optical sensor including a light emitting portion and a light receiving portion may be used instead of the contact sensor. The light emitting portion of the light sensor is mounted on the ceiling of the source chamber 20 so as to be positioned around the gate 21 of the source chamber 20 and the light receiving portion of the light sensor is mounted on the bottom of the source chamber 20 to face the light emitting portion . Of course, the positions of the light emitting portion and the light receiving portion may be mutually changed.

The pressure measuring means 92 includes a pressing member 921 which is mounted on the operating plate 712 and moved together with the crucible 60 and the crucible 60 is raised on the bottom surface of the source chamber 20, And a pressure sensor 922 which is mounted to be pressurized by a pressure member 921 when the pressure sensor 921 is engaged with the pressure sensor 50. Of course, the positions of the pressure member 921 and the pressure sensor 922 can be changed from each other. The pressing member 921 may constitute a part of the crucible apparatus 60 or constitute a part of a component moving together with the crucible apparatus 60 so that the position of the pressure sensor 922 is appropriately changed .

The crucible device 60 raised by the crucible moving device 70 can not be moved along the movement path for coupling with the source injection device 50 and various factors (such as warping of the operation rod 711) The control unit 93 determines that the crucible 60 is separated from the movement path and stops the operation of the drive motor 721. In this case, Thereby preventing the crucible 60 from being collided against the gate 21 side of the source chamber 20 by continuously rising.

According to the path departure detection sensor 91 and the control unit 93, the elevated crucible apparatus 60 is collided with the gate 21 side of the source chamber 20 and the crucible apparatus 60 and the source It is possible to prevent the chamber 20 from being damaged. Of course, when the above-described optical sensor is applied as the path deviation detection sensor 91, it is detected whether or not the crucible device 60 is separated from the movement path, not only when the crucible device 60 is raised but also when it is descended, The operation of the mobile device 70 can be controlled.

When the crucible 60 is coupled to the source injector 50, the pressure sensor 922 measures the pressing force by the pressing member 921 and the control unit 93 measures the pressing force from the pressure sensor 922 And determines whether the measured pressure belongs to the set pressure. When the measured pressure exceeds the set pressure, the control unit 93 stops the operation of the drive motor 721 and applies excessive pressure to the source injector 50 by the crucible 60 rising, Thereby preventing the apparatus 50 or the crucible 60 from being damaged. Of course, it is also possible to prevent the vaporized source from leaking from the crucible device 60 by setting the set pressure to a level that can maintain the airtightness between the combined source spraying device 50 and the crucible device 60.

Reference numeral 94 denotes an alerting means for visually and / or audibly informing that the crucible 60 has deviated from the movement route in accordance with the control of the control unit 93. [

A gate valve 35 is provided between the source chamber 20 and the vacuum device 40 and a vacuum device 40 is provided inside the source chamber 20, The vacuum chamber 40 and the source chamber 20 are connected to each other so that the vacuum atmosphere forming action of the vacuum chamber 40 can be applied.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

A source injection apparatus 50 and a crucible apparatus 60 are applied to a thin film deposition apparatus having a deposition chamber 10 and a source chamber 20 so that the source injection apparatus 50 is provided with a crucible 60 The source injection device 50 and the crucible device 60 may be installed together in one chamber. That is, the loaded substrate is placed in the chamber (upper region), the crucible 60 is installed in a position (lower region) opposed to the substrate inside the chamber, and the source spraying device 50 And may be releasably coupled to the crucible device 60 to provide a vaporized source to the substrate.

5: substrate 10: deposition chamber
20: source chamber 30: gate valve
40: Vacuum device 50: Source injection device
51: connection neck 52: minute piping
60: Crucible device 61: Crucible
61A: Crucible main body 61B: Source emitting member
61C: Radiant heat transfer member 62: Crucible heating unit
62A: upper heater 621A:
621A1: inner heat line 621A2: outer heat line
622A: upper heater holder 62B: lower heater
621B: Heating wire 622B: Lower heater holder
63: crucible housing 64: crucible supporting member
65: reflection member 66: cooling unit
70: crucible moving device 71: operating member
72: drive means 80: shock absorber
81: movable member 82: shock-absorbing member
91: path deviation detection sensor 92: pressure measurement means
93: control unit 94:

Claims (12)

The source for the thin film deposition is a crucible;
A crucible heating unit for providing heat for evaporating a source contained in the crucible at an outer peripheral side of the crucible;
A crucible housing for containing the crucible heating unit together with the crucible;
And a crucible supporting member for supporting the crucible to the crucible housing and fixing the position of the crucible contained in the crucible housing.
Crucible device. The method according to claim 1,
Wherein the crucible is provided with a source outlet for discharging a vaporized source on the upper side, a flange is provided on the periphery of the source outlet side,
Wherein the crucible supporting member is composed of a single or a plurality of supporting walls positioned between the crucible heating unit and the crucible housing and supporting a flange of the crucible in a state of being erected on the bottom of the crucible housing,
Crucible device. The method of claim 2,
Wherein the support wall has a stepped portion provided on an upper end thereof for supporting an edge portion of the flange,
Crucible device. The method according to claim 2 or 3,
Wherein the support wall is formed so that at least one of the inner wall and the outer wall has a part or whole of a concavo-
Crucible device. The method of claim 2,
Wherein a reflecting member for reflecting heat is provided between the crucible housing and the crucible supporting member in a single layer or multi-
Crucible device. The method according to claim 1,
Further comprising a cooling unit provided on an outer circumferential side of the crucible housing,
Crucible device. The method according to claim 1,
The crucible is provided with a source storage chamber in a lower region and a radiation direction switching means for guiding a movement direction of radiant heat emitted to the inside into the source storage chamber in an upper region,
In the crucible heating unit,
A lower heater disposed on an outer periphery of the lower region side of the crucible;
And an upper heater of a multi-layer structure disposed on the upper side of the upper region side of the crucible at the upper side of the lower heater and having a larger number of heater layers than the lower heater.
Crucible device. The source for the thin film deposition is a crucible; And a heating unit for providing heat for evaporating a source contained in the crucible at an outer peripheral side of the crucible,
Wherein the heating unit comprises: a heater arranged in a staggered manner along an outer circumferential direction of the crucible to constitute a heating wire surrounding an outer periphery of the crucible; And a heater holder for supporting the heating wire on an outer circumferential side of the crucible,
The heater holder includes an upper rim and a lower rim spaced apart from each other and spaced apart from each other in a circumferential direction so that the crucible is positioned at the center of the crucible, Including,
Wherein the heating wires are arranged in a zigzag manner by being caught by a locking projection of the upper and lower rims,
Crucible device. The method of claim 8,
Wherein the heating wire is composed of an inner heating wire and an outer heating wire arranged outside the inner heating wire,
The locking protrusions are provided along the inner circumference and the outer circumference of the upper and lower rims, respectively,
The inner heat ray is caught by the inner circumferential side locking projections of the upper and lower rims,
Wherein the outer heat ray is caught by an outer circumferential side locking projection of the upper and lower rims,
Crucible device. The method according to claim 8 or 9,
Wherein the heater holder further comprises a finishing rim that covers the upper side of the upper rim and the lower side of the lower rim, respectively, to fix the position of the heating wire hooked on the locking projection,
Crucible device. The source for the thin film deposition is a crucible; And a heating unit for providing heat for evaporating a source contained in the crucible at an outer peripheral side of the crucible,
A source storage room is provided in a lower region of the crucible and a radiation direction switching means is provided in an upper region of the crucible for guiding a movement direction of radiant heat emitted into the crucible to the source accommodation chamber side,
The heating unit includes: a lower heater for heating a lower region of the crucible; And an upper heater which heats the upper region of the crucible above the lower heater and has a larger number of heaters than the lower heater,
Crucible device. The method of claim 11,
The heaters of the upper and lower heaters are composed of heating wires,
The upper heater includes a larger number of heaters than the lower heater, and has a larger number of heaters than the lower heater,
Wherein the heating wire of the upper heater includes an inner heating wire and an outer heating wire disposed outside the inner heating wire,
The inner and outer heat lines are arranged in a zigzag manner along the outer circumferential direction of the crucible to surround the upper region of the crucible in a multi-
Crucible device.

Images