KR20190080044A - Crucible for linear evaporation source and Linear evaporation source having the same - Google Patents

Abstract

Disclosed are a crucible for a linear evaporation source capable of increasing deposition uniformity and a linear evaporation source thereof. According to one embodiment of the present invention, the crucible for a linear evaporation source linearly ejecting a deposition particle in the lateral direction of a substrate to perform deposition on the substrate comprises: a crucible body having an evaporation space with an opened upper part, having a deposition material filled in the evaporation space, and evaporating the deposition material by heating to eject a deposition particle; a nozzle cover coupled to the upper end of the crucible body to cover the evaporation space and including a first nozzle ejecting the deposition part and a plurality of second nozzles formed on both outer sides of the first nozzle and ejecting the deposition particle at intervals; a tubular nozzle tip coupled to the first nozzle; and a pair of nozzle boxes having a plurality of guide slits, which are outwardly penetrated with an upward inclination, formed therein corresponding to the second nozzles, respectively, and coupled to the nozzle cover to allow the guide slits to communicate with the second nozzles, respectively. To place the lowermost guide slit among the guide slits at a height greater than a parasitic deposition height performing deposition on the nozzle cover, the nozzle box outwardly protrudes from the upper surface of the nozzle cover with an upward inclination.

Description

Technical Field [0001] The present invention relates to a crucible for a linear evaporation source and a linear evaporation source,

The present invention relates to a crucible for a linear evaporation source and a linear evaporation source. More particularly, the present invention provides a crucible for linear evaporation source and a linear evaporation source capable of minimizing the shadow effect of evaporated particles ejected from the nozzles located on both sides of the linear evaporation source, thereby increasing the deposition uniformity.

Organic Luminescence Emitting Device (OLED) is a self-luminous self-luminous device that uses an electroluminescent phenomenon that emits light when a current flows through a fluorescent organic compound, and does not require a backlight for applying light to a non- Therefore, a lightweight thin flat panel display device can be manufactured.

A flat panel display device using such an organic electroluminescent device has a fast response speed and a wide viewing angle, and is emerging as a next generation display device.

The organic electroluminescent device comprises an organic thin film such as a hole injecting layer, a hole transporting layer, a light emitting layer, an electron transporting layer, and an electron injecting layer which are the remaining constituent layers except for the anode and the cathode. .

In the vacuum thermal evaporation method, a substrate is disposed in a vacuum chamber, a mask having a predetermined pattern is aligned on a substrate, and a crucible of an evaporation source is heated to evaporate organic substances evaporated in the crucible.

In recent years, a linear evaporation source has been used to uniformly deposit an organic thin film on a large-sized substrate as the substrate becomes large-sized.

In the deposition method using a linear evaporation source, a linear evaporation source in which the evaporation material is linearly ejected in the width direction of the substrate is disposed, and the linear evaporation source and the substrate are relatively moved in the longitudinal direction of the substrate to perform deposition of the evaporation material over the entire surface of the substrate .

1 is a view for explaining a deposition process of a preceding evaporation source according to the prior art. The linear evaporation source 106 includes a crucible main body 115 in which an evaporation material is contained and an upper end is opened and a crucible cover 112 which covers an upper end of the crucible main body 115 and in which a nozzle 107, (Not shown) for heating the crucible 104, and the like.

When the crucible 104 is heated by the heater, the evaporation material contained in the crucible 104 is evaporated, and the evaporation particles are linearly ejected toward the substrate 102 through the nozzle 107. The evaporated particles ejected from the linear evaporation source 106 are deposited on the substrate 102 through a mask 110 having a predetermined pattern. The evaporated particles ejected at a predetermined position are passed through the pattern of the mask 110 There is a problem that it is difficult to form a uniform thickness of deposition by a shadow effect.

1, when the evaporated particles ejected from the nozzle 107 located at the outermost position pass through the pattern with the largest slope when passing through the outermost pattern of the mask 110 in the diagonal direction, And the inclination of the deposition particles input into the pattern of the mask 110 becomes smaller as the nozzle 107 is moved toward the center, and the shadow effect is lowered.

Korean Patent Publication No. 10-2016-0087985 (published on July 25, 2016)

The present invention provides a linear evaporation source crucible and a linear evaporation source capable of minimizing the shadow effect of evaporated deposition particles at nozzles located on both sides of a linear evaporation source, thereby increasing deposition uniformity.

According to an aspect of the present invention, there is provided a crucible for use in a linear evaporation source for spraying evaporation particles linearly along a width direction of a substrate to perform deposition on the substrate, wherein an evaporation space is formed in which an upper portion is opened, A crucible body in which evaporation material is filled and evaporation material evaporates upon heating to eject evaporation particles; A plurality of second nozzle openings formed on outer sides of both sides of the first nozzle openings and through which the evaporated particles are ejected, the first nozzle openings being connected to an upper end of the crucible main body and covering the evaporation space, A nozzle cover spaced apart from the nozzle cover; A tubular nozzle tip coupled to the first nozzle opening; A plurality of induction slits extending upwardly outwardly inwardly corresponding to the plurality of second nozzle holes are formed, and a plurality of induction slits are coupled to the nozzle cover so as to be in communication with the second nozzle holes, respectively And the nozzle box is protruded upward from the upper surface of the nozzle cover so as to be positioned higher than the parasitic deposition height at which the lowermost induction slit of the plurality of induction slits is deposited on the nozzle cover Wherein the crucible for linear evapotranspiration is provided.

The nozzle box may be in the form of a rectangular box having a rectangular cross section in which a slit corresponding to the induction slit is formed. In this case, the nozzle box may include a first inclined surface at an obtuse angle with respect to an upper surface of the nozzle cover, And a second inclined surface located at an acute angle with respect to an upper surface of the nozzle cover, wherein an extension length of the second inclined surface on the upper surface of the nozzle cover is longer than an extension length of the first inclined surface on the upper surface of the nozzle cover It can be long.

The angle formed by the upper surface of the nozzle cover and the upper surface of the nozzle box may be 90 degrees or less.

The upward inclination angle of the induction slit may be 35 to 50 degrees with respect to the upper surface of the nozzle cover.

The second nozzle hole may have a slit shape elongated in the lateral direction of the nozzle cover, and the induction slit may have the same cross section to communicate with the slit.

The evaporation space may have a rectangular parallelepiped shape with an upper portion opened, and the nozzle cover may have a rectangular shape so as to cover an upper surface of the rectangular parallelepiped.

The nozzle cover includes a nozzle cover body having a long slot formed at the center thereof; And a nozzle unit detachably coupled to the nozzle cover body to cover the elongated hole and to which the nozzle tip and the nozzle box are coupled.

The crucible for linear evapotranspiration includes a baffle box having an opening formed in a bottom surface thereof and having an upper portion formed with a plurality of baffle holes, the baffle box being inserted into an upper portion of the evaporation space; The baffle plate may further include a baffle plate coupled to an upper end of the recess to cover the recess of the baffle box and having a plurality of baffle holes formed therein.

The evaporation space may be divided into a plurality of evaporation spaces by forming a plurality of partition walls in the longitudinal direction so that the evaporation materials are accommodated, respectively.

The crucible main body can be divided into two, and the distance between the two crucible bodies that are separated from each other can be adjusted according to the length of the width of the substrate.

The nozzle cover is divided into two portions corresponding to the crucible body divided into two portions, and the first nozzle hole and the second nozzle hole may be formed to be symmetrical to the two segmented nozzle covers.

According to another aspect of the present invention, there is provided a crucible for linear evapotranspiration; A heater unit installed to surround the crucible and applying heat to the crucible; And a housing installed to surround the heater unit.

The linear evaporation source includes a reflector disposed between the heater and the housing to surround the heater and reflecting the heat of the heater toward the crucible; An annular thermocouple thermometer positioned on the inner wall of the reflector toward the heater; And a fastener for coupling to the inner wall of the reflector using a ring of the thermometer thermocouple.

A cooling line may be formed in which the nozzle tip and the through-hole through which the nozzle box passes, and the coolant is circulated, and a cooling plate coupled to the upper surface of the nozzle cover.

According to the embodiment of the present invention, the shadow effect of the ejected deposition particles in the nozzles located on both sides of the linear evaporation source can be minimized, and the deposition uniformity can be increased.

1 is a view for explaining a deposition process of a preceding evaporation source according to the prior art.
2 is a perspective view illustrating a crucible for a linear evaporation source according to an embodiment of the present invention;
3 is a cross-sectional view illustrating a linear evaporation source crucible according to an embodiment of the present invention.
4 is a view illustrating a nozzle cover of a crucible for linear evapotranspiration according to an embodiment of the present invention.
5 is a cross-sectional view of a portion of a nozzle unit of a crucible for linear evacuation sources in accordance with an embodiment of the present invention.
6 is a view for explaining a method of determining a geometric shape of a nozzle unit of a crucible for linear evapotranspiration according to an embodiment of the present invention.
7 illustrates a linear evaporation source having a crucible for a linear evaporation source according to one embodiment of the present invention.
8 is a view illustrating a cooling plate of a crucible for a linear evaporation source according to an embodiment of the present invention.
FIG. 9 is a diagram illustrating an annular thermocouple thermometer of a linear evaporation source having a crucible for linear evapotranspiration according to an embodiment of the present invention. FIG.
10 is a view showing a combined state of an annular thermocouple thermometer of a linear evaporation source having a crucible for linear evapotranspiration according to an embodiment of the present invention.
11 is a view illustrating a crucible for a linear evaporation source according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a crucible for linear evapotranspiration and a linear evaporation source according to the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals designate like or corresponding components A duplicate description thereof will be omitted.

FIG. 2 is a perspective view illustrating a crucible for a linear evaporation source according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view illustrating a linear evaporation source crucible according to an embodiment of the present invention. FIG. 4 is a view illustrating a nozzle cover of a crucible for linear evaporation source according to an embodiment of the present invention, and FIG. 5 is a cross-sectional view illustrating a portion of a nozzle unit of a crucible for linear evaporation source according to an embodiment of the present invention. 6 is a view for explaining a method of determining a geometric shape of a nozzle unit of a crucible for linear evapotranspiration according to an embodiment of the present invention.

2 to 6 show a crucible 10 for a linear evaporation source, a substrate 11, a crucible body 12, an evaporation space 13, an evaporation material 15, a nozzle cover 16, a mask 17, The cover body 18, the pattern 19, the nozzle unit 20, the first nozzle opening 22, the second nozzle opening 24, the slit 26, the nozzle tip 28, the induction slit 30, The nozzle box 32, the upper end 33, the partition wall 34, the cooling plate 36, the baffle box 38, the depression 40, the baffle plate 42, the first inclined surface 60, (62), and a lowermost slit (64).

The crucible 10 for a linear evaporation source according to the present embodiment is a crucible 10 used in a linear evaporation source for performing vapor deposition on the substrate 11 by spraying evaporation particles linearly along the width direction of the substrate 11 And an evaporation space 13 in which an upper portion is opened are formed in the evaporation space 13. The crucible main body 12 in which the evaporation material 15 is filled in the evaporation space 13 and the evaporation material 15 is evaporated by heating, Wow; A first nozzle hole 22 which is coupled to an upper end of the crucible main body 12 and covers the evaporation space 13 and through which the deposition particles are ejected and a second nozzle hole 22 which is formed on both sides of the first nozzle hole 22 A nozzle cover (16) having a plurality of second nozzle openings (24) through which the deposition particles are ejected; A tubular nozzle tip 28 coupled to the first nozzle orifice 22; A plurality of induction slits (30) penetrating upwardly outwardly are formed corresponding to the plurality of second nozzle holes (22), and a plurality of the induction slits (30) are formed in the second nozzle holes And a pair of nozzle boxes 32 coupled to the nozzle cover 16 to communicate with the nozzle cover 22, respectively. At this time, the nozzle box 32 is positioned so that the lowermost induction slit 64 of the plurality of induction slits 30 is positioned higher than the parasitic deposition height at which the nozzle slit is deposited on the nozzle cover 16 And is protruded upward from the upper surface to the outside.

The linear evaporation sources are arranged in the transverse direction with respect to the longitudinal direction of the substrate 11 such that the evaporated particles linearly ejected from the linear evaporation source are ejected along the width direction of the substrate 11. [

When the linear evaporation source or the substrate 11 is relatively moved along the longitudinal direction of the substrate 11 in a state in which the linear evaporation sources are arranged in the transverse direction in the width direction of the substrate 11, As shown in FIG.

The crucible body 12 is provided with an evaporation space 13 in which an upper portion is opened and an evaporation material 15 is filled in the evaporation space 13. The evaporation material 15 is filled in the evaporation space 13 of the crucible main body 12. When the crucible 10 is heated by the heater portion 48 on the outer circumference of the crucible 10, The evaporated particles formed as the evaporated particles 15 are ejected to the upper end of the crucible 10.

In the crucible body 12 according to the present embodiment, the evaporation space 13 having a rectangular parallelepiped shape, which is adjacent to the one side, is formed. The evaporation space 13 is formed in a rectangular parallelepiped shape so that more evaporation material 15 can be accommodated and the nozzle cover 16 is coupled to the opened upper end of the crucible body 12 to form one crucible 10 .

3, the evaporation space 13 may be divided into a plurality of evaporation spaces 13 by forming a plurality of partition walls 34 in the longitudinal direction so that the evaporation materials 15 are accommodated, respectively .

When the crucible 10 is heated by the heater portion (48 in Fig. 7) outside the crucible 10 in the case where the evaporation material 15 is filled in the large evaporation space 13, the evaporation material 13 The heat of the heater unit 48 may not be constantly transferred to the evaporation space 13 due to the wide evaporation space 13, The evaporated particles may not evaporate evenly over the entire surface of the substrate.

Therefore, in this embodiment, the wide evaporation space is partitioned into the plurality of evaporation spaces 13 by the partition wall 34, so that the heat of the heater portion 48 is evenly distributed to the respective evaporation spaces 13, So that evaporation of the evaporated material 15 can be performed.

The nozzle cover 16 is coupled to the upper end of the crucible main body 12 to cover the evaporation space 13. 4, the nozzle cover 16 is provided with a first nozzle orifice 22 through which evaporated particles of the evaporation space 13 are ejected, and a second nozzle orifice 22 formed on both outer sides of the first nozzle orifice 22, A plurality of second nozzle orifices 24 through which the deposition particles are ejected are formed.

According to the present embodiment, the first nozzle orifice 22 is formed at the center of the nozzle cover 16, and a plurality of second nozzle orifices 24 are formed on both sides of the first nozzle orifice 22, respectively. A nozzle tip 28 of a tubular shape to be described later is coupled to a first nozzle hole 22 located at the center of the nozzle cover 16. A plurality of second nozzle holes 24 are formed with a nozzle box 32 .

The first nozzle orifice 22 is formed at the center of the nozzle cover 16 and is located opposite to the center of the width of the substrate 11. The first nozzle orifices 22 are located at the center in the width direction of the substrate 11 so that the evaporated particles ejected from the first nozzle orifices 22 are relatively small in the pattern 19 at both ends of the mask 17 a shadow effect is generated. On the other hand, the second nozzle openings 24 located on both sides of the first nozzle openings 22 are relatively large in the pattern 19 of the mask 17 located diagonally to each other.

The present embodiment minimizes the shadowing phenomenon in the diagonal pattern 19 of the evaporated particles ejected from the second nozzle orifice 24, thereby increasing the uniformity of the deposition.

The nozzle tip 28 is a tubular tube body having through holes formed at one end to the other end thereof and is coupled to the first nozzle orifice 22. [ The deposited particles having passed through the first nozzle orifice 22 pass through the through hole of the nozzle tip 28 and reach the substrate 11. [ The cross-sectional size of the through-holes of each nozzle tip 28 may vary depending on the length of the substrate 11 and the deposition rate.

A plurality of induction slits (30) passing through the nozzle box (32) with an upward inclination outward are formed corresponding to the plurality of second nozzle holes (24), and a plurality of induction slits (30) 2 nozzle openings 24, respectively. A plurality of second nozzle openings 24 are formed on both sides of the first nozzle openings 22 and a pair of nozzle openings 32 are respectively connected to the plurality of second nozzle openings 24 in communication.

The plurality of induction slits 30 are communicated with the plurality of second nozzle openings 24, respectively, in the nozzle box 32. The plurality of induction slits 30 pass through the nozzle box 32, 3, in the case of the left nozzle box 32, the induction slit 30 is formed on the outer side of the first nozzle orifice 22, that is, upward in the left direction with respect to the width of the substrate 11 In the case of the right nozzle box 32, the induction slit 30 is formed on the outer side of the first nozzle orifice 22, that is, upward in the right direction with respect to the width of the substrate 11.

The evaporated particles evaporated in the evaporation space 13 of the crucible main body 12 are guided to both ends of the substrate 11 through the induction slit 30 which is upwardly inclined outward through the second nozzle hole 24. [ At this time, the deposition particles having passed through the induction slit 30 having the upward inclination outward are limited in reaching the pattern 19 of the mask 17 located in the diagonal direction, so that the shadow phenomenon is minimized. 3, the induction slit 30 of the nozzle box 32 disposed on the left side is inclined upward to the left, and the mask 17, on which deposition particles having passed through the induction slit 30 are positioned on the right side, The reaching of the pattern 19 is limited so that the shadowing phenomenon in the right pattern 19 is minimized and the induction slit 30 of the nozzle box 32 disposed on the right side is inclined upward to the right, 30 reaching the mask 17 pattern 19 located on the left side is limited and the shadow phenomenon in the left pattern 19 is minimized.

The nozzle box 32 is upwardly raised from the upper surface of the nozzle cover 16 so that the lowermost induction slit 64 of the plurality of induction slits 30 is positioned higher than the parasitic deposition height at which the lowermost induction slit 64 is deposited on the nozzle cover 16 And is projected with an inclination. 6, a plurality of induction slits 30 formed in the nozzle box 32 are formed by stacking upwardly inclined layers so that the height h of the lowermost induction slit 64 among the induction slits 30 ) To be higher than the parasitic deposition height.

The deposition of particles on the upper surface of the nozzle cover 16 due to cooling or the like causes the deposition of particles on the surface of the nozzle cover When the height of the parasitic deposition increases to reach the lowermost induction slit 64, the entrance of the lowermost induction slit 64 may be blocked to prevent the deposition of the deposition particles. Therefore, in order to prevent the induction slit 64 from being closed due to parasitic deposition on the upper surface of the nozzle cover 16, the nozzle box 32 can protrude from the upper surface of the nozzle cover by a predetermined height or more. At this time, the height of the parasitic deposition on the top surface of the nozzle cover 16 can be predicted in advance through a simulation experiment of the actual deposition process, and accordingly, the height of the protrusion of the nozzle box 32 can be determined.

The nozzle box 32 according to the present embodiment is in the form of a rectangular box having a rectangular cross section in which slits corresponding to the induction slit 64 are formed.

6, the obtuse angle with respect to the upper surface of the nozzle cover 16 is set to be larger than the obtuse angle with respect to the upper surface of the nozzle cover 16, And a second inclined surface 62 positioned opposite to the first inclined surface 60 and having an acute angle with respect to the upper surface of the nozzle cover 16. The first inclined surface 60 and the second inclined surface 62, The extended length? 'Of the second inclined surface 62 on the upper surface of the nozzle cover 16 is longer than the extended length? Of the upper surface of the nozzle cover 16 of the first inclined surface 60 .

Since the extension length? 'Of the second inclined surface 62 on the upper surface of the nozzle cover 16 is longer than the extension length? Of the first inclined surface 60 on the upper surface of the nozzle cover 16, The upper end face 33 of the nozzle box 32 is inclined in the transverse direction with respect to the longitudinal direction of the induction slit 30. [

In this case, in order to prevent parasitic deposition of the deposited particles on the induction slit 30 due to the heat of the upper surface of the nozzle cover 16 reaching the upper end surface 33 of the nozzle box 32, Of the nozzle cover 16 on the upper surface of the nozzle cover 16 and the extension length delta of the first inclined surface 60 on the upper surface of the nozzle cover 16 may be determined. In this regard, in this embodiment, it is proposed that the angle formed by the upper surface of the nozzle cover 16 and the upper end surface 33 of the nozzle box 32 is set to 90 degrees or less. That is, the extension length delta of the second inclined surface 62 on the upper surface of the nozzle cover 16 is made longer than the extension length delta on the upper surface of the nozzle cover 16 of the first inclined surface 60, By setting the angle formed between the upper surface of the cover 16 and the upper end surface 33 of the nozzle box 32 to be 90 degrees or less, the extension length? 'Of the second inclined surface 62 on the upper surface of the nozzle cover 16, So that the heat of the nozzle cover 16 due to the heating of the linear crucible can reach the second inclined surface 62 widely.

5 and 6 show the nozzle box 32 on the right hand side. The induction slit 30 is formed with an upward slope to the right, and the second slope surface 62 of the nozzle cover 16 on the upper surface of the nozzle cover 16 The upper end surface 33 of the nozzle box 32 is formed to be longer than the extension length delta of the upper surface of the nozzle cover 16 of the first inclined surface 60, And are inclined in the transverse direction with respect to the longitudinal direction. Most of the deposited particles are ejected toward the right side of the substrate 11 induced by the induction slit 30 and part of the deposited particles move toward the left side of the substrate 11 in the diagonal direction. The upper end is inclined in the transverse direction with respect to the induction slit 30, so that the deposition particles are restricted from moving to the mask pattern 19 on the left side of the substrate 11, thereby minimizing the shadowing phenomenon in the pattern 19 on the left side. Conversely, in the case of the left nozzle box 32, deposition particles ejected to the induction slit 30 of the left nozzle box 32 are restricted from moving to the mask pattern 19 on the right side of the substrate 11, The shadow phenomenon in the pattern 19 is minimized.

The upward inclination angle of the induction slit 30 formed in the nozzle box 32 may be set to 35 to 50 degrees with respect to the upper surface of the nozzle cover 16. [ The angle of the induction slit 30 may vary depending on the length of the substrate and the linear evaporation source, the positions of the first nozzle hole 22 and the second nozzle hole 24, The deposition particles ejected from the nozzle box 32 are widely distributed at a low density and are susceptible to shadows. When the temperature is more than 50 degrees, the deposition particles are narrowly distributed at a high density, making it difficult to control the deposition amount on the substrate . In this embodiment, the upward sloping angle of the induction slit 30 is 40 degrees.

As shown in Figs. 3 and 4, the nozzle cover 16 includes a nozzle cover body 18 having a long elongated hole formed at the center thereof; And a nozzle unit 20 detachably coupled to the nozzle cover body 18 to cover a long slot and to which the nozzle tip 28 and the nozzle box 32 are coupled. In order to facilitate the replacement of the nozzle unit 20, various types of nozzle units 20 having different sizes of the nozzle tips 28, inclination angles of the induction slits 30, and the like are prepared, So that it can be used.

The nozzle cover body 18 is formed in a long plate shape and has a long hole for the nozzle unit 20 to be coupled to the center of the nozzle cover body 18. The nozzle unit 20 has a nozzle cover body 18 for covering the long hole of the nozzle cover body 18. [ As shown in Fig.

The second nozzle orifices 24 formed on the outer sides of the first nozzle orifices 22 may be formed in the form of slits 26 formed in the lateral direction of the nozzle cover 16. 4, the first nozzle orifice 22 is formed in the center of the nozzle cover 16 in a circular shape, and the second nozzle orifice 24 is formed in the lateral direction of the nozzle cover 16 by a slit 26 ) Of the first nozzle orifice 22, respectively.

When the second nozzle orifice 24 is formed in the form of the slit 26, there is an advantage that a plurality of slits 26 can be closely adjacent to each other and a plurality of the slits 26 can be continuously formed. In addition, the induction slit 30 communicating with the slit 26 can be constructed in a compact manner, so that the nozzle box 32 can be made compact. When the second nozzle orifice 24 is formed in the shape of the slit 26, the induction slit 30 is also made to have the same cross-sectional size so that the slit 26 of the second nozzle orifice 24 and the induction slit 30 can communicate with each other stepwise Can be configured.

The crucible 10 for a linear evaporation source according to the present embodiment includes a baffle box 30 having a plurality of baffle holes formed on a bottom surface thereof and having an upper portion opened therein, (38); The baffle plate 38 may further include a baffle plate 42 coupled to an upper end of the recessed portion 40 so that the recessed portion 40 of the baffle box 38 is covered and formed with a plurality of baffle holes.

The baffle box 38 has a container shape formed with a recess 40 into which an upper end is opened, and a plurality of baffle holes (not shown) are formed on the bottom surface. The container-shaped baffle box 38 is inserted into the crucible body 12 through the upper end of the opened crucible body 12, and the baffle box 38 is provided with a plurality of baffle holes ) Is formed in the baffle plate 42. As shown in Fig.

3, the deposition material 15 is accommodated in the evaporation space 13. When the deposition material 15 is evaporated as the heater portion 48 is heated, the deposition particles on the substrate are transferred to the baffle box 38, The deposition particles introduced into the baffle box 38 through the baffle hole on the bottom surface of the baffle plate 38 are discharged to the first nozzle hole 22 and the second nozzle orifice 24, respectively. The evaporated particles evaporated in the evaporation space 13 flow into the embedding section 40 of the baffle box 38 and spread evenly to the embedding section 40. The evaporated particles in the embedding section 40, And is ejected out through the first nozzle hole 22 and the second nozzle hole 24 while being spread widely again. The baffle box 38 and the baffle plate 42 are formed in such a manner that the evaporation material 15 protrudes out of the small lump shape in the process of evaporation of the evaporated particles due to the heating of the heater unit 48, Lt; RTI ID = 0.0 > 11). ≪ / RTI >

7 is a view showing a linear evaporation source having a crucible for a linear evaporation source according to an embodiment of the present invention. FIG. 8 is a view illustrating a cooling plate of a crucible for linear evapotranspiration according to an embodiment of the present invention, and FIG. 9 is a schematic view illustrating an annular thermocouple thermometer of a linear evaporation source having a crucible for linear evapillation according to an embodiment of the present invention. And FIG. 10 is a view showing a combined state of an annular thermocouple thermometer of a linear evaporation source having a crucible for linear evapotranspiration according to an embodiment of the present invention.

7 to 9 show a crucible 10 for a linear evaporation source, a cooling plate 36, a penetrating portion 44, a cooling line 46, a heater portion 48, a reflector 50, a housing 52, A portion 54, an annular thermocouple thermometer 56, and a fastener 58 are shown.

The linear evaporation source according to the present embodiment includes the aforementioned crucible for linear evapotranspiration 10; A heater unit 48 installed to surround the crucible 10 to apply heat to the crucible 10; A housing 52 installed to surround the heater unit 48; A reflector 50 disposed between the heater unit 48 and the housing 52 to surround the heater unit 48 and reflecting the heat of the heater unit 48 toward the crucible 10, .

The heater unit 48 is installed to surround the crucible 10 and applies heat to the crucible 10. The heater portion 48 may include a heat wire and may be wound in a spiral or zigzag form on a heat fixing portion (not shown) provided on the outer side of the crucible 10 to constitute the heater portion 48 .

The heater portion 48 may be disposed over the entire height of the crucible 10 or the heater portion 48 may be disposed corresponding to the upper and lower ends of the crucible 10 as shown in FIG.

The reflector 50 is provided to surround the heater unit 48 and reflects heat generated by the heater unit 48 toward the crucible 10. The radiant heat emitted from the heater unit 48 is reflected back to the crucible 10 side to minimize the waste of radiant heat energy emitted from the heater unit 48. Radiant heat energy is intensively discharged toward the crucible 10 The evaporation action of the evaporation material in the crucible 10 can be further promoted.

The housing 52 is provided to enclose the reflector 50 and protects the crucible 10, the heater unit 48, the reflector 50, and the like disposed inside. The crucible 10 is detachable with respect to the housing 52 so that the crucible 10 is pulled out of the housing 52 to replace or charge the evaporation material 15 when the evaporation material 15 is exhausted, To the housing (52).

In the linear evaporation source according to the present embodiment, a cooling line 46 is formed in which the nozzle tip 28 and the penetration portion 44 through which the nozzle box 32 passes and the coolant circulates. The nozzle cover 16 And a cooling plate 36 coupled to the upper surface of the cooling plate 36.

The heat of the crucible 10 is transmitted to the opposing substrate 11 or the mask 17 or the like due to the heating of the heater section 48 and the substrate 11 or the mask 17 is thermally expanded, There is a case. The cooling plate 36 may be coupled to the upper end of the crucible 10 to prevent the heat at the upper end of the crucible 10 from reaching the mask 17 or the substrate 11. [

8, since the cooling plate 36 is coupled to the upper end of the crucible 10, that is, the upper surface of the nozzle cover 16, the nozzle tip 28 and the nozzle box 32 The penetrating portion 44 is formed. A cooling line 46 through which coolant is circulated for cooling is formed in the inside of the crucible 10 to circulate the coolant to the cooling line 46 during the deposition process to cool the upper end of the crucible 10.

Fig. 10 shows an annular thermocouple thermometer 56 having an annulus 54 for measuring the heat of the crucible 10. In order to control the deposition rate on the substrate 11, the temperature of the heater section 48 inside the housing 52 should be measured at any time.

In the case of the conventional rod-shaped thermocouple thermometer, the tip of the thermocouple thermometer is disposed outside the housing 52 and opposed to the outer periphery of the heater portion 48 through the housing 52 and the reflector 50, And the fixation of the rod-shaped thermocouple thermometer passing through the reflector 50 was unstable, so that the accurate temperature measurement was not performed according to the change of the position of the thermometer.

In this embodiment, in the state that the annular thermo-optic thermometer 56 having the annular portion 54 is applied and the annular thermocouple thermometer 56 is disposed on the inner wall of the reflector 50 facing the heater portion 48, The temperature of the heater section 48 can be measured more accurately by fixing the position of the thermocouple thermometer 56 by fixing the fastener 58 such as a screw through the annulus of the annular thermocouple thermometer 56 to the reflector 50 Respectively.

11 is a view showing a crucible 10 for a linear evaporation source according to another embodiment of the present invention. 11 shows a crucible 10 for a linear evaporation source, crucible bodies 12 and 12 ', nozzle covers 16 and 16', a nozzle cover body 18, a nozzle unit 20, a nozzle tip 28, A slit 30, and a nozzle box 32 are shown.

The crucible 10 for a linear evaporation source according to the present embodiment is configured to adjust the length of the linear deposited particles ejected from the crucible 10 corresponding to the width of the substrate. That is, as shown in FIG. 11, by arranging the crucible bodies 12 and 12 'as a pair and adjusting the spacing distance of the pair of crucible bodies 12 and 12' in the width direction of the substrate, It is a form that is configured to respond.

In the crucible 10 for a linear evaporation source according to the present embodiment, the crucible main bodies 12 and 12 'are divided into two and two crucible bodies 12 and 12', which are separated from each other, So that they can be separated from each other. Accordingly, the nozzle covers 16 and 16 'are divided into two parts corresponding to the two divided crucible bodies 12 and 12', respectively, and the first nozzle hole and the second nozzle hole are divided into two divided nozzles Are formed to be symmetrical to the covers 16 and 16 '.

Since the two crucible bodies 12 and 12 'are linearly arranged with respect to the width of the substrate, the first nozzle orifice is symmetrical with respect to the center of the two crucible bodies 12 and 12' And the second nozzle orifices formed on both sides of the first nozzle orifice are respectively formed in the two nozzle covers 16 and 16 '. The tubular nozzle tip 28 is respectively coupled to a first nozzle opening formed in the two nozzle covers 16 and 16 'and two nozzle boxes 32 are connected to the two nozzle covers 16 and 16' Respectively.

The crucibles 10 for linear evaporation source divided into two parts can be disposed inside the housing in a state of being spaced apart from each other by a distance corresponding to the width of the substrate.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as set forth in the following claims It will be understood that the invention may be modified and varied without departing from the scope of the invention.

Many embodiments other than the above-described embodiments are within the scope of the claims of the present invention.

10: crucible for linear evaporation source 11: substrate
12, 12 ': Crucible body 13: Evaporation space
15: deposition material 16, 16 ': nozzle cover
17: mask 18: nozzle cover body
19: pattern 20: nozzle unit
22: first nozzle hole 24: second nozzle hole
26: Slit 28: Nozzle tip
30: induction slit 32: nozzle box
33: top 34: bulkhead
36: cooling plate 38: baffle box
40: penetration part 42: baffle plate
44: penetrating part 46: cooling line
48: heater part 50: reflector
52: housing 54:
56: annular thermocouple thermometer 58: fastener
60: first inclined plane 62: second inclined plane
64: lowest guiding slit

Claims (14)

A crucible for use in a linear evaporation source for spraying deposition particles linearly along a width direction of a substrate to perform deposition on the substrate,
A crucible body formed with an evaporation space in which an upper portion is opened, evaporation material is filled in the evaporation space, evaporation material evaporates upon heating, and evaporation particles are ejected;
A plurality of second nozzle openings formed on outer sides of both sides of the first nozzle openings and through which the evaporated particles are ejected, the first nozzle openings being connected to an upper end of the crucible main body and covering the evaporation space, A nozzle cover spaced apart from the nozzle cover;
A tubular nozzle tip coupled to the first nozzle opening;
A plurality of induction slits extending upwardly outwardly inwardly corresponding to the plurality of second nozzle holes are formed, and a plurality of induction slits are coupled to the nozzle cover so as to be in communication with the second nozzle holes, respectively A pair of nozzle boxes,
The nozzle box includes:
Wherein the lowermost induction slit of the plurality of induction slits protrudes upward from the upper surface of the nozzle cover so as to be positioned higher than a parasitic deposition height of the nozzle cover deposited on the nozzle cover.
The method according to claim 1,
The nozzle box includes:
A rectangular box shape having a rectangular cross section in which a slit corresponding to the induction slit is formed,
And a second inclined surface located opposite to the first inclined surface and having an acute angle with respect to an upper surface of the nozzle cover, wherein the first inclined surface is inclined at an obtuse angle with respect to the upper surface of the nozzle cover,
Wherein an extending length of the second inclined surface on the upper surface of the nozzle cover is longer than an extending length of the first inclined surface on the upper surface of the nozzle cover.
3. The method of claim 2,
Wherein the angle formed by the upper surface of the nozzle cover and the upper surface of the nozzle box is 90 degrees or less.
The method according to claim 1,
The upward inclination angle of the induction slit
Is 35 to 50 degrees with respect to the upper surface of the nozzle cover.
The method according to claim 1,
The second nozzle hole
A slit shape formed to be long in the lateral direction of the nozzle cover,
The induction slit
Wherein the slit is formed in the same cross-section as the slit.
The method of claim 1,
The evaporation space
A rectangular parallelepiped shape in which an upper portion is opened,
The nozzle cover
And a rectangular shape to cover the upper surface of the rectangular parallelepiped.
The method according to claim 1,
The nozzle cover
A nozzle cover body having a long slot formed at the center thereof;
And a nozzle unit detachably coupled to the nozzle cover body to cover the elongated hole and to which the nozzle tip and the nozzle box are coupled.
The method according to claim 1,
A baffle box formed in the bottom of the evaporation space, in which a plurality of baffle holes are formed;
Further comprising a baffle plate coupled to an upper end of the recess to cover the recess of the baffle box and having a plurality of baffle holes formed therein.
The method according to claim 1,
The evaporation space
Wherein a plurality of partition walls are formed in the longitudinal direction so as to accommodate the deposition materials, respectively, and are divided into a plurality of evaporation spaces.
The method according to claim 1,
The crucible body is divided into two,
Wherein the two crucible bodies that are separated from each other are spaced apart from each other in accordance with the length of the width of the substrate.
11. The method of claim 10,
The nozzle cover
And is divided into two corresponding to the crucible main body divided into two,
Wherein the first nozzle orifice and the second nozzle orifice are formed to be symmetrical to the two segmented nozzle covers.
11. A crucible for linear evapotranspiration according to any one of claims 1 to 11;
A heater unit installed to surround the crucible and applying heat to the crucible;
And a housing installed to surround the heater unit.
13. The method of claim 12,
A reflector disposed between the heater and the housing to surround the heater and reflecting the heat of the heater toward the crucible;
An annular thermocouple thermometer positioned on the inner wall of the reflector toward the heater;
Further comprising a fastener coupled to an inner wall of the reflector using a loop of the thermometer thermocouple.
13. The method of claim 12,
Further comprising a cooling plate formed with a nozzle tip and a penetrating portion through which the nozzle box passes, and a cooling line through which refrigerant circulates, and a cooling plate coupled to an upper surface of the nozzle cover.

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