KR20150057372A

KR20150057372A - Device handler

Info

Publication number: KR20150057372A
Application number: KR1020130140657A
Authority: KR
Inventors: 유홍준
Original assignee: (주)제이티
Priority date: 2013-11-19
Filing date: 2013-11-19
Publication date: 2015-05-28

Abstract

The present invention relates to a device handler. Specifically, the present invention relates to a device handler, which loads a device onto a device loading member, for example a carrier tape and a tray. The present invention provides the device handler, which comprises: a loading member cassette unit onto which multiple device loading members with a number of devices attached are loaded; a device loading member table, which is provided with device loading members from the loading member cassette unit to move device loading members in a horizontal direction; an unloading unit installed with a device unloading member, which is installed at a distance from the device loading member table in a horizontal direction to get devices from device loading members and load devices; a first pickup tool installed at the top of the device loading member table to pick up the devices from device loading members sitting on the device loading member table and rotates to turn devices upside down, so that the base of devise face upward; and one or more second pick tools to pick up devices, which are turned upside down by the first pickup tool, and deliver devices to the device unloading member of the unloading unit through linear locomotion.

Description

Device handler

The present invention relates to a device handler, and more particularly, to a device handler for loading devices on an element loading member such as a carrier tape or a tray.

Semiconductor devices (hereinafter referred to as "devices") such as SD RAM, flash ram, LSI, and LED are generally shipped to the market after completion of the semiconductor process, the sowing process, and the packaging process.

In order to ensure the reliability of the products shipped to the market, products of good products are selected and shipped to the market through inspection, classification, inspection and sorting devices, etc. according to automatic inspection and inspection results.

On the other hand, chip types such as SDRAM, flash RAM, LSI, lead frame, BGA, etc. are getting various.

In addition, the device has a tendency to increase the productivity through the final inspection after the packaging process, the device inspection in the wafer state after the semiconductor process, and the device classification process according to the inspection result.

Furthermore, recently, it has been increasingly witnessed that the device is finally made into a final product at the wafer level without undergoing a molding process using a resin or the like in accordance with a demand for miniaturization of the device.

It is also necessary to inspect both the top and bottom surfaces of the device depending on the type of the device.

An object of the present invention is to provide a device handler capable of picking up an element from an element loading member and inverting it, and transferring the inverted element to quickly load the element in the element unloading member.

It is another object of the present invention to provide a device handler capable of selectively performing stacking without inverting or reversing a device in accordance with the above trend.

SUMMARY OF THE INVENTION The present invention has been made in order to accomplish the above-mentioned object of the present invention, and it is an object of the present invention to provide a loading device cassette unit in which a plurality of device loading members, An element loading member table for receiving the element loading member from the loading member cassette and moving the element loading member in a horizontal direction; An unloading unit installed horizontally spaced apart from the element loading member table and provided with an element unloading member for loading and receiving an element from the element loading member; A first pick-up tool installed on the element loading member table for picking up an element from an element loading member seated on the element loading member table and rotating the inverted element so that the bottom surface of the picked up element faces upward; And at least one second pick-up tool for picking up the element inverted by the first pick-up tool and transferring the element to the element unloading member of the unloading unit by linear movement.

The device handler according to the present invention includes a first transfer tool for picking up and inverting a device and a second transfer tool for picking up and moving the device in a linear manner and unloading the device with respect to the first transfer tool, There is an advantage that can be performed quickly.

A device handler according to the present invention includes a first transfer tool for picking up and inverting a device and a second transfer tool for picking up and moving the device in a linear manner and unloading the device with respect to the first transfer tool, There is an advantage that unloading of the device, unloading of the device, and unloading after the inversion and pick-up of the device are selectively performed.

1 is a plan view showing the concept of a device handler according to the present invention.
Fig. 2 is a perspective view showing an example of an element loading member used in the element handler of Fig. 1; Fig.
3A and 3B are a perspective view and a cross-sectional view showing a wafer ring as a modification of the element loading member used in the element handler of FIG.
Fig. 4 is a cross-sectional view showing a part including the pocket portion in the element handler of Fig. 1; Fig.
5 is a conceptual view showing a configuration of a vibrating part in the element handler of FIG.
Fig. 6 is a cross-sectional view of the carrier tape and the vibrating portion of the element handler of Fig. 1 in a direction perpendicular to the moving direction of the carrier tape. Fig.
Fig. 7 is a perspective view showing a part including the first pick-up tool of the element handler of Fig. 1; Fig.
FIG. 8 is a perspective view showing a part including the first pick-up tool and the second pick-up tool of the element handler of FIG. 1; FIG.
Fig. 9 is a side view of a portion of the element handler of Fig. 1, including a first pick-up tool and a second pick-up tool, viewed in the X-axis direction.
10 is a partial plan view of the element handler of FIG. 1 including the first pick-up tool and the second pick-up tool, and is a plan view viewed from the Z direction.
Figs. 11A to 11C are views showing a part including the second pick-up tool of Fig. 1, which is a side view seen from the X-axis direction, Fig. 11A is a view before descending, Fig. 11B is a view before Y- Are views showing the state after the movement and the descent of the Y axis.

Hereinafter, a device handler according to the present invention will be described in detail with reference to the accompanying drawings.

1 to 11C, a device handler according to the present invention includes a loading member cassette unit 100 on which a plurality of element loading members 10 to which a plurality of elements 1 are attached are loaded; A device loading member table 200 for receiving the device loading member 10 from the loading member cassette 100 and moving the device loading member 10 horizontally; An unloading unit 300 provided with a device unloading member 20 installed horizontally spaced apart from the device loading member table 200 to receive and load the device 1 from the device loading member 10; The element 1 is picked up from the element loading member 10 mounted on the element loading member table 200 and placed on the element loading member table 200 and the bottom surface of the picked up element 1 is rotated upward A first pick-up tool (400) for inverting the first pick-up tool One or more second pickups for picking up the inverted element 1 by the first pick-up tool 400 and then transferring the element 1 to the element unloading member 20 of the unloading unit 300 by linear movement, And a tool 500.

The loading member cassette unit 100 may have various configurations as a configuration in which a plurality of element loading members 10 to which a plurality of elements 1 are attached are stacked.

Here, it is a device which has finished a semiconductor process and sowing process such as a semiconductor device, an LED device, and a solar cell device mounted on the device loading member 10.

Particularly, the device 1 can be a wafer-level device that has completed a semiconductor process and a packaging process, as well as a semiconductor process and a sowing process.

On the other hand, the element loading member 10 can be configured as a tray, a wafer ring, or the like as long as it is a member on which a plurality of elements 1 are loaded, and can be loaded with the element 1. [

2 and 3A and 3B, the element loading member 10 is a structure in which the element 1 after the semiconductor processing and sowing processes is loaded, in which the element 1 is attached And a frame member 12 for fixing the tape 11 and the tape 11. [

The tape 11 can be any member as long as the elements 1 can be attached thereto, and a so-called blue tape can be used.

The frame member 12 may have various configurations such as a square ring, a circular ring (wafer ring), and the like for fixing the tape 11 to which the elements 1 are attached.

The loading member cassette unit 100 may have any configuration as long as the element loading members 10 can be stacked up and down as a configuration for loading a plurality of element loading members 10. [

The device loading member table 200 may be configured in various ways as long as the device loading member 10 is supplied from the loading member cassette unit 100 and the device loading member 10 is moved in the horizontal direction.

For example, the element loading member table 200 receives the element loading member 10 from the loading member cassette unit 100 by a wafer ring loading unit (not shown) The XY table, the XY-theta table, or the like can be used as the configuration for moving the element loading member 10 in the horizontal direction so that the element loading member 10 can be picked up.

On the other hand, the element loading member loading portion for transferring the element loading member 10 from the loading member cassette portion 100 to the element loading member table 200 is configured to draw the element loading member 10 from the loading member cassette portion 100 And the device loading member table 200 can be transferred to the device loading member table 200. [

The unloading unit 300 includes an element unloading member 20 installed to be spaced from the element loading member table 200 in the horizontal direction and to receive and load the element 1 from the element loading member 10 Various configurations are possible

Particularly, the configuration of the unloading portion 300 is determined according to the configuration of the element unloading member 20 for unloading the element 1 such as a combination of a carrier tape and a cover tape (tape or can) and a tray.

For example, the unloading section 300 is an example in which a combination of a carrier tape and a cover tape is used. As shown in Figs. 1 and 4, the pocket section 21 on which the element 1 is loaded has a length And the carrier tape sealed by the cover tape (not shown) after the device loading constitutes the device unloading member 20, the carrier tape on which the device 1 is to be loaded is rotatably installed at one end, A roll roll 312 provided with a roll roll 311 provided with a roll reel (not shown), a reel (not shown) rotatably installed at the other end and wound with a carrier tape sealed by the tape after being loaded, And a carrier tape guide portion 313 for guiding the movement of the carrier tape so that the carrier tape unreeled from the unloading roll portion 311 passes the loading position 3 & cir &.

4, the device unloading member 20 may have a plurality of holes 22 formed on the bottom surface of the pocket portion 21 in which the device 1 is accommodated.

When the device unloading member 20 is located at the loading position 3, a vacuum pressure forming device 24 that forms a vacuum pressure directly below the device unloading member 20 is provided, 500 so that the element 1 can be stably loaded.

4, the carrier tape guide portion 313 includes a pair of roller members 28 provided to guide the wing portions of the carrier tape, guides (not shown) of the support members 29 to which the roller members are fixed, It can be guided by its movement.

4, the unloading portion 300 is provided at a front side of a sealing portion (not shown) for sealing the carrier tape by a cover tape (not shown) during the movement path of the carrier tape, A tape loading guide portion 314 for guiding the element 1 picked up by the second pick-up tool 500 to the pocket 21 of the carrier tape may be additionally provided.

The tape loading guide portion 314 is provided on the carrier tape in front of the sealing portion of the movement path of the carrier tape so that the element 1 picked up by the second pick- So that various configurations are possible.

As shown in Fig. 1 and Fig. 4, for example, the tape stacking guide 314 is configured such that the element 1 passes over the position corresponding to the pocket 21 of the carrier tape on the movement path of the carrier tape And may include an aperture plate in which a guide opening 314a is formed.

The opening plate may be supported by a pair of support brackets, and may be installed variously. The support bracket and the opening plate may be integrally formed.

The guide opening 314a is formed such that the upper portion thereof is formed larger than the plane size of the element 1 so that the element 1 picked up by the second pick-up tool 500 can guide the drop when the element 1 is dropped, Portion is formed to be slightly larger than the plane size of the element 1 and the inner circumferential surface thereof is formed to be an inclined surface.

When the element unloading member 20 is a carrier tape, as shown in Figs. 5 and 6, when the element unloading member 20 is positioned at the loading position 3 & cir & A vibrating part 600 for vibrating the carrier tape may be installed in the room.

The vibration unit 600 is provided on the movement path of the carrier tape between the unloading roll unit 311 and the winding roll unit 312 so that the device 10 can be positioned at the predetermined position of the pocket unit 21 of the carrier tape. Various configurations are possible as a configuration for applying vibration to the carrier tape.

The vibrating unit 600 may employ various constructions capable of generating vibration on the carrier tape. For example, the vibration unit 600 may be a variety of configurations such as a mechanical vibrating unit physically connected to the carrier tape to generate vibration on the carrier tape, an ultrasonic vibrating unit, and the like.

In particular, when the gas ejection apparatus is configured as a gas ejection apparatus, the vibration section 600 ejects gas, particularly air, toward the carrier tape in a state where the element 10 is contained in the pocket section 21 of the carrier tape to some extent, . By the vibration of the carrier tape, the element 10 can be positioned in the correct position in the pocket portion 21 of the carrier tape.

The gas ejection apparatus may be constituted by a gas, that is, a single nozzle through which air is ejected. 5, may include a gas injection nozzle 611 which is elongated along the movement direction of the carrier tape and in which a plurality of gas injection holes 612 are formed along the longitudinal direction thereof.

Since the gas ejection apparatus 610 includes the gas ejection nozzles 611 having the plurality of gas ejection holes 612 as described above, the plurality of elements 10 are simultaneously ejected by the carrier along the longitudinal direction of the carrier tape, It can be positioned at the correct position of the pocket portion 21 of the tape.

22 is formed at the bottom of the pocket portion 21 of the carrier tape so that the element 10 can be moved more smoothly from the pocket portion 21 of the carrier tape. 22). &Lt; / RTI >

According to the above-described configuration, the carrier tape is vibrated by injecting a gas onto the carrier tape during the transportation of the carrier tape, so that the device 10, which is not properly seated in the pocket portion 21 of the carrier tape, (21).

The first pick-up tool 400 picks up the element 1 from the element loading member 10 mounted on the element loading member table 200 and mounted on the element loading member table 200, Various configurations are possible as a configuration for inverting the bottom surface of the element 1 so as to face upward.

1 and 7 to 10, the first pick-up tool 400 includes a pick-up position for picking up the element 1 from the element loading member 10, A plurality of first pickers 410 disposed between the first and second pickers 410 and 420 at predetermined intervals in the circumferential direction about a rotation axis of the first picker 410, And a rotation driving unit 420 for sequentially rotating the plurality of first pickers 410 so as to be positioned at the pickup position and the transfer position 2, respectively.

Each of the first pickers 410 may have various configurations as a configuration for picking up the element 1 from the element loading member 10 by the vacuum pressure.

Particularly, each of the first pickers 410 is coupled to a support member 430 protruding in the axial direction from the rotation axis of the rotation driving unit 420 in the radial direction.

The first picker 410 is coupled to the support member 430 such that the pick-up head picking up the element 1 in the direction of the rotation axis of the rotation drive unit 420 faces outward.

Meanwhile, the number of the first pickers 410 installed in the first pick-up tool 400 is determined according to the conveyance of the element 1, and the number of the first pickers 410 is preferably four.

In this case, the support member 430 may be disposed at regular intervals in the circumferential direction on the rotation axis of the rotation driving unit 420, that is, at equal intervals with a phase difference of 90 degrees.

The first picker 410 installed in the first pick-up tool 400 is configured to pick up the element 1 by the vacuum pressure. In general, the first picker 410 is configured to receive the pneumatic transfer line It is preferable to be configured to reciprocally rotate rather than to rotate in one direction to prevent twisting.

The second pick-up tool 500 picks up the element 1 inverted by the first pick-up tool 400 and then moves the element 1 to the element unloading member 20 of the unloading unit 300 by linear movement. 1), and various configurations are possible according to the movement mode.

As a specific example, the second pick-up tool is moved to the loading position 3 after picking up the element 1 at the transfer position 2, as shown in FIGS. 1, 8 to 11C, A second picker 510 for transferring the element 1 to the element unloading member 20 and a second picker 510 for picking up the element 1 inverted by the first pick tool 400 between the transfer position 2 and the loading position 3 And a picker moving unit 520 for moving the second picker 510 by linear movement.

The second picker 510 may be configured similar to the first picker 410 described above, and a detailed description thereof will be omitted.

Unlike the first pick-up tool 400 having a plurality of first pickers 410, the second pick-up tool 500 may include one second picker 510, The second picker 510 is moved between the transfer position 2 and the loading position 3 by linear driving by the eccentric portion 520.

The picker moving unit 520 can have various configurations according to the movement form of the second picker 510.

For example, the picker moving unit 520 may be configured to move the element 1 in two or more linear movements, that is, in the X-axis direction, in the Y-axis direction, and in the Z-axis direction May be configured to move the element 1 by two or three of the axial movements in the axial direction.

In this case, the picker moving part 520 may include linear moving parts (not shown) according to the number of linear movements.

For example, the picker moving part 520 may include a first linear movement part 521 for linearly moving the second picker 510 in the X-axis direction when a direction connecting the transfer position 2 and the loading position 3 is X- A second linear movement section 522 for linearly moving the second picker 510 in the Y-axis direction when the direction perpendicular to the X-axis direction and the horizontal direction is Y-axis, and a second linear movement section 522 perpendicular to the XY plane , And a third linear movement unit 523 that linearly moves the second picker 510 in the Z-axis direction when a direction perpendicular to the X-axis and the Y-axis is a Z-axis.

The first to third linear moving parts 521, 522, and 523 are configured to move the second picker 510 in the X-Y-Z axis direction, and various configurations are possible according to the combination thereof.

11A to 11C, the first linear moving part 521 and the second linear moving part 522 of the first linear moving part 521 and the second linear moving part 522 are fixed to the fixed structure 540 fixed to the structure, They can be installed to have the same structure.

The second picker 510 includes a first moving block 511 coupled to an XY table constituting a first linear moving part 521 and a second linear moving part 522, And a second moving block 512 which is coupled and installed linearly movably in the Z-axis direction.

In addition, the third linear moving part 523 has a first linear moving part 521 and a second linear moving part 522, particularly a first linear moving part 521, as shown in FIGS. 11A to 11C. Axis direction and the second picker 510 is movable in the X-axis direction and drives the movement in the Y-axis direction.

Specifically, the third linear moving part 523 is constrained to move together with the first moving block 511 in the X-axis direction and to move together in the Y-axis direction, and is coupled to the second moving block 512 in the X- And a third moving block 513 constrained to move together in the Y-axis direction and the Z-axis direction.

Meanwhile, as shown in FIGS. 1, 9 and 10, the second pick-up tool 500 may be installed as a pair, facing each other around the first pick-up tool 400.

As described above, the second pick-up tool 500 is constructed as a pair, so that the element 1 can be transferred quickly.

When the second pick-up tool 500 is formed as a pair, at least one direction of the X-axis and the Y-axis is preferable, so that interference can be prevented when the first and second pick-up tools 500 are moved.

On the other hand, the device handler may not require the use of the first pick-up tool 400 when the inversion of the element 1 is unnecessary.

In this case, after the first pick-up tool 400 is moved from the pick-up position to the third position, the second picker 510 of the second pick-up tool 500 moves up and down, It can be unloaded by moving the element (1) directly from the position 적 to the loading position ③.

1 and 7 to 11C, the first pick-up tool 400 is provided with a support member 430 protruding in the axial direction from the rotation axis of the rotation drive part 420 in the radial direction The second picker 510 of the second pick-up tool 500 can be moved to the pick-up position immediately without moving the first pick-up tool 400.

On the other hand, when the first picker 410 is rotated from the pick-up position to the delivery position 2, the element handler is placed on the element 1 for vision inspection of the bottom surface of the element 1 picked up by the first pick- The first image acquiring unit 810 may acquire an image of the bottom surface of the first lens group.

The first image obtaining unit 810 may be a camera or the like as a configuration for obtaining an image of the bottom surface of the element 1 for vision inspection of the bottom surface of the element 1. [

On the other hand, the image of the bottom surface of the element 1 obtained by the first image obtaining unit 810 is transmitted to the controller (not shown) and then analyzed. The device unloading member 20 of the unloading unit 300 judges that the device 1 is unsuitable when it is determined that the device 1 is not suitable for the device unloading device 20, (Not shown) or a device recovery unit (not shown) provided on the moving path of the pick-up tool 500.

At this time, the element 1 attached to the element loading member 10 may be in a state of being inspected beforehand by a separate inspection apparatus or in an unchecked state.

The element handler is further provided with a second picker 520 for picking up the element 1 with respect to the second picker 520 in order to align the stacking position 3 of the element 1 when the second picker 520 is moved from the delivery position 2 to the stacking position 3, And a second image acquiring unit 820 for acquiring an image of the state.

The second image acquiring unit 820 may be a camera or the like as a configuration for acquiring an image or the like with respect to the pickup state of the element 1 with respect to the second picker 520. [

The second image acquiring unit 820 aligns the stacking position 3 of the element 1 when the second picker 520 is moved from the delivery position 2 to the stacking position 3, It is also possible to install the apparatus for the visual inspection.

Meanwhile, the image obtained by the second image acquiring unit 820 is transmitted to the control unit, and the rotation and linear movement of the second picker 520 by the image analysis by the control unit and the linear movement of the second unloading member 20 It is possible to perform alignment of the loading position 3 & cir & of the element 1 of the element 1 picked up by the second picker 520 by various combinations such as a combination of movement.

The device handler further includes a third image acquiring unit (not shown) for acquiring an image of the stacking state after the second picker 520 is loaded on the device unloading member 20 at the stacking position 3 & cir & ). &Lt; / RTI >

The third image acquiring unit may be configured such that when the element 10 is loaded on the element unloading member 20 and then it is determined that the element 10 is improperly loaded on the element unloading member 20 by acquiring and analyzing the image of the loading state It may be possible to take proper measures such as stopping the system, informing that it has been improperly loaded through an acoustic or visual signal, re-picking up the device 10 by the second picker 520, .

The device handler may further include a fourth image acquiring unit (not shown) for acquiring an image of the carrier tape to which the cover tape is attached after the carrier tape is sealed by the cover tape (not shown).

The fourth image acquiring unit acquires and analyzes an image of the carrier tape on which the cover tape is attached after the carrier tape is sealed by the cover tape (not shown), thereby stopping the system when it is determined that the sealed state is inappropriate , It is possible to notify that it is improperly sealed through an acoustic or visual signal, or to take appropriate measures such as moving the carrier tape in reverse to re-execute the sealing.

On the other hand, for the pick-up state by the first pick-up tool 400, the state of the element 1, and the like, You need to acquire an image.

The first pick-up tool 400 includes a first picker 410 disposed on a support member 430 protruding in the axial direction from the rotation axis of the rotation driving part 420 in the radial direction, It is possible to expose the element 1 on the pick-up position 상 in the upward direction during the rotation of the pick-up position 하므로, so that the image acquisition for the element 1 on the pick-up position 이 is obtained by setting the fifth image acquiring unit (not shown) There is a possible advantage.

The unloading unit 300 includes a reel replacing unit for automatically unloading a reel after replacing a carrier tape with a cover tape joined thereto by a predetermined amount, Carrier tape fixing for fixing the carrier tape by tape after the first rewinding or rewinding of the carrier tape on the rewound reel. Printing of the label for printing of the label rewinding on the reel for indexing after the carrier tape is wrapped or wound And the like.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It is to be understood that both the technical idea and the technical spirit of the invention are included in the scope of the present invention.

100: loading member cassette part 200: loading member table
300: unloading unit 400: first pick-up tool
500: second pick-up tool

Claims

A loading member cassette unit on which a plurality of element loading members to which a plurality of elements are attached are loaded;
An element loading member table for receiving the element loading member from the loading member cassette and moving the element loading member in a horizontal direction;
An unloading unit installed horizontally spaced apart from the element loading member table and provided with an element unloading member for loading and receiving an element from the element loading member;
A first pick-up tool installed on the element loading member table for picking up an element from an element loading member seated on the element loading member table and rotating the inverted element so that the bottom surface of the picked up element faces upward;
And one or more second pick-up tools for picking up the elements inverted by the first pick-up tool and delivering the elements to the element unloading members of the unloading unit by linear movement.