KR20150025186A - Cableveyor and Apparatus for Transferring Substrate having the same - Google Patents

Cableveyor and Apparatus for Transferring Substrate having the same Download PDF

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Publication number
KR20150025186A
KR20150025186A KR20130102501A KR20130102501A KR20150025186A KR 20150025186 A KR20150025186 A KR 20150025186A KR 20130102501 A KR20130102501 A KR 20130102501A KR 20130102501 A KR20130102501 A KR 20130102501A KR 20150025186 A KR20150025186 A KR 20150025186A
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KR
South Korea
Prior art keywords
substrate
divider
cable
arm
storage
Prior art date
Application number
KR20130102501A
Other languages
Korean (ko)
Inventor
김태현
김종욱
김동혁
김상현
Original Assignee
현대중공업 주식회사
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Application filed by 현대중공업 주식회사 filed Critical 현대중공업 주식회사
Priority to KR20130102501A priority Critical patent/KR20150025186A/en
Publication of KR20150025186A publication Critical patent/KR20150025186A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a storage body for storing a cable for supplying driving force to a driving source of a substrate transfer device for transferring a substrate, a storage hole for storing the cable, And a second divider coupled to the storage body so as to be spaced apart from the first divider in the first axial direction to divide the storage hole in the first axial direction, and a second divider The present invention relates to a substrate transfer apparatus,
According to the present invention, it is possible to reduce the foreign matter generated between the cables, which improves the quality of the substrate by preventing contamination of the substrate, can prevent the covering of the cable from being damaged, Industrial disasters such as fire can be prevented.

Description

TECHNICAL FIELD [0001] The present invention relates to a cable bearing and a substrate transfer device including the same,

The present invention relates to a substrate transfer apparatus for transferring a substrate.

Display devices, solar cells, semiconductor devices, etc. (hereinafter referred to as "electronic components") are manufactured through various processes. Such a manufacturing process is performed using a substrate for manufacturing the electronic component. For example, the manufacturing process may include a deposition process for depositing a thin film of a conductor, a semiconductor, a dielectric material or the like on a substrate, an etching process for forming a deposited thin film in a predetermined pattern, and the like. These manufacturing processes are performed in a process chamber that performs the process. The substrate transfer apparatus is for transferring the substrate between the process chambers.

1 is a schematic block diagram of a substrate transfer apparatus according to the prior art.

Referring to FIG. 1, a substrate transfer apparatus 100 according to the related art includes a transfer arm 110, a lift unit 120, a swivel unit 130, and a moving unit 140.

The transfer arm 110 is for supporting the substrate to transfer the substrate. The elevating unit 120 elevates the transfer arm 110 to elevate the substrate. The swivel part 130 rotates the elevation part 120 to rotate the direction in which the substrate is conveyed. The travel unit 140 is for moving the swivel unit 130 to transport the substrate along the traveling direction.

Here, the substrate transfer apparatus 100 according to the related art performs relative movement between the transfer arm 110, the elevation unit 120, the swivel unit 130, and the traveling unit 140. In order to perform each operation of each part of the substrate transfer apparatus 100 according to the related art, a control signal for controlling the power source and the operation must be supplied. Accordingly, cables for supplying power and control signals to the respective parts of the substrate transfer apparatus 100 according to the related art are installed.

Since the prior art substrate transfer apparatus 100 has a complex and elaborate coupling relationship with a plurality of parts, the cables are also installed in a considerable number. In the substrate transfer apparatus 100 according to the related art, a cableveyor is installed to store the cables in a bundle so that the respective parts are not disturbed by the plurality of cables in the respective operations.

The cable bear is constituted by a storage body for storing the cables so that a plurality of links and links are rotatably and repeatedly connected. The storage body moves to a position where the power is transmitted in accordance with the movement of the machine by rotating a plurality of links.

Cables are flexible enough to accommodate the operation of machines that typically implement dynamic operation. Thus, when cables with such flexibility are stored separately within the storage body, each cable is rubbed, and its position is changed, resulting in kinks. Then, foreign matter such as dust is generated between the cables, and the foreign substance contaminates the substrate supported by the substrate transfer device. Accordingly, the substrate transfer apparatus 100 according to the prior art has a problem of deteriorating the quality of the substrate in the process of manufacturing the substrate.

In addition, the cables maintained in a substantially straight state are changed into a curved state in the course of movement of the storage body, and frictional force and tensile force are repeatedly applied to the curved portion. Accordingly, the cable bear according to the prior art damages the covering of the cable and exposes the wires of the conductor located in the inside of the cover, thereby causing the problem of preventing the substrate conveying apparatus 100 from operating smoothly. Damaged cables, on the other hand, can not prevent electricity from being leaked, which causes large-scale fire due to personal injury such as electric shock accidents and electricity supplied to the ignition source.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a cable bail for reducing the crossing of cables and a substrate transfer apparatus including the same.

In order to solve the above-described problems, the present invention can include the following configuration.

A cable bail for a substrate transfer apparatus according to the present invention comprises: a storage body for storing a cable for supplying a driving force to a drive source of a substrate transfer device for transferring a substrate; a storage hole for storing a cable; And a second divider which is coupled to the storage body so as to be spaced apart from the first divider in the first axial direction to divide the storage hole in the first axial direction, And may include a divider.

In the cable bear for a substrate transfer apparatus according to the present invention, the first divider and the second divider may be coupled to the storage body so as to be spaced apart from each other in a second axial direction perpendicular to the first axial direction.

In the cable bear for a substrate transfer apparatus according to the present invention, a plurality of the first dividers and the second dividers may be alternately arranged in the first axis direction.

In the cable bear for a substrate transfer apparatus according to the present invention, the first divider divides the storage hole into a first storage space and a second storage space, and the second divider divides the storage space into a second storage space and a second storage space, It can be divided into 3 storage bins.

A substrate transfer apparatus according to the present invention includes a transfer arm for transferring a substrate, a lift portion for lifting and lowering the transfer arm, a turning portion for rotating the elevation portion, a traveling portion for moving the turning portion along the traveling direction, And a cable bearing for storing a cable for supplying a driving force to the cable.

The present invention can reduce foreign matter generated between cables by reducing the crossing of the cables, which can improve the quality of the substrate by preventing the substrate from being contaminated.

Further, by reducing the crossing of the cables, the present invention can prevent the covering of the cable from being damaged, and further, it is possible to prevent industrial disasters such as an electric shock accident or a large fire.

1 is a schematic block diagram of a prior art substrate transfer apparatus;
2 is a schematic perspective view for explaining a cable bail for a substrate transfer apparatus according to the present invention;
3 is a schematic perspective view for explaining a first embodiment of a cable bail for a substrate transfer apparatus according to the present invention;
4 is a schematic cross-sectional view for explaining a second embodiment of a cable bail for a substrate transfer apparatus according to the present invention
5 is a schematic cross-sectional view for explaining a third embodiment of a cable bail for a substrate transfer apparatus according to the present invention
6 is a schematic cross-sectional view for explaining a fourth embodiment of a cable bail for a substrate transfer apparatus according to the present invention
7 is a schematic perspective view for explaining a substrate transfer apparatus according to the present invention.

It should be noted that, in the specification of the present invention, the same reference numerals as in the drawings denote the same elements, but they are numbered as much as possible even if they are shown in different drawings.

Meanwhile, the meaning of the terms described in the present specification should be understood as follows.

The word " first, "" second," and the like, used to distinguish one element from another, are to be understood to include plural representations unless the context clearly dictates otherwise. The scope of the right should not be limited by these terms.

It should be understood that the terms "comprises" or "having" does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

It should be understood that the term "at least one" includes all possible combinations from one or more related items. For example, the meaning of "at least one of the first item, the second item and the third item" means not only the first item, the second item or the third item, but also the second item and the second item among the first item, Means any combination of items that can be presented from more than one.

FIG. 2 is a schematic perspective view for explaining a cable bail for a substrate transfer apparatus according to the present invention, FIG. 3 is a schematic perspective view for explaining a first embodiment of a cable bail for a substrate transfer apparatus according to the present invention, 4 is a schematic cross-sectional view for explaining a second embodiment of a cable bail for a substrate transfer apparatus according to the present invention, and Fig. 5 is a schematic view for explaining a third embodiment of a cable bail for a substrate transfer apparatus according to the present invention FIG. 6 is a schematic cross-sectional view for explaining a fourth embodiment of a cable bail for a substrate transfer apparatus according to the present invention, and FIG. 7 is a schematic perspective view for explaining a substrate transfer apparatus according to the present invention.

The substrate transfer apparatus 300 according to the present invention is for transferring the substrate 350. [ The substrate 350 is for manufacturing electronic components such as a display device, a solar cell, and a semiconductor device. For example, the substrate 350 may be a glass substrate for manufacturing the electronic component. The substrate 350 may be a metal substrate, a polyimide substrate, a plastic substrate, or the like. When the electronic component is a display device, the substrate 350 may be a bonded substrate having two or more substrates bonded together. The substrate transfer apparatus 300 according to the present invention can transfer the substrate 350 between process chambers performing a manufacturing process such as a deposition process, an etching process, and the like with respect to the substrate 350. The substrate transfer apparatus 300 according to the present invention may transfer the substrate 350 between the process chambers and a cassette in which the substrate 350 is stored.

Before describing the cable bear 200 for a substrate transfer apparatus according to the present invention, the driving source and the driving force will be described.

The substrate transfer apparatus 300 is composed of a plurality of parts and performs a certain relative movement to transfer the substrate. In order to transfer the substrate 350, the substrate transfer device 300 includes a transfer arm 310 for supporting and transferring the substrate 350, and a transfer arm 310 for transferring the substrate 350 to / A turning part 330 for rotating the elevating part 320 to rotate the direction in which the substrate 350 is conveyed and a conveying part 330 for conveying the substrate 350 between the processing chambers And the traveling unit 340 for moving the swing unit 330 for relative movement. Each part of the substrate transfer apparatus 300 must be supplied with a control signal for controlling the power source and the operation to perform the respective operations. Accordingly, the substrate transfer device 300 is provided with cables 250 for supplying power and control signals to the respective parts.

Hereinafter, each part of the substrate transfer device 300 such as the transfer arm 310, the elevation part 320, the swivel part 330, and the traveling part 340 is a driving source. The power source and the control signal A preferred embodiment of a cable bear 200 for a substrate transfer apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIGS. 2 and 3, the cable bear 200 for a substrate transfer apparatus according to the present invention is intended to reduce the crossing of the cables 250. FIG. To this end, the cable bear 200 for a substrate transfer apparatus according to the present invention includes a storage body 210 for storing a cable 250 for supplying a driving force to a driving source of a substrate transfer device for transferring a substrate, A first divider 230 coupled to the storage body 210 and a second divider 240 coupled to the storage body 210. The first divider 230 and the second divider 240 partition the storage hole 220 in the first axis direction (A axis direction). The second divider 240 is coupled to the storage body 210 so as to be spaced apart from the first divider 230 in the first axial direction (A-axis direction).

Accordingly, the cable bear 200 for a substrate transfer apparatus according to the present invention can achieve the following effects.

The cable bear 200 for a substrate transferring apparatus according to the present invention is installed in the storage body 210 by the first divider 230 and the second divider 240 coupled to the storage body 210, The crossing of the cables 250 can be reduced. Accordingly, the cable bear 200 for the substrate transferring apparatus according to the present invention can reduce the foreign substances generated by the contact of the cables 250 with each other, which can improve the quality of the substrate by preventing the substrate from being contaminated .

The cable bear 200 for a substrate transferring apparatus according to the present invention can reduce the crossing of the cables 250 by the first divider 230 and the second divider 240, Can be prevented from being damaged, and further, an industrial accident such as an electric shock accident or a large fire can be prevented.

Hereinafter, the storage body 210, the storage hole 220, the first divider 230, and the second divider 240 will be described in detail with reference to the accompanying drawings.

Referring to FIG. 2, the storage body 210 is for storing a cable 250 for supplying a driving force to the driving source. The storage body 210 is repeatedly rotatably connected with a plurality of links for storing the cable 250. The storage body 210 can be moved to a position where driving force is transmitted according to the movement of the driving source by rotating a plurality of links and interlocking with each other.

The storage space 220 refers to a space in which the cable 250 is stored. The storage hole 220 may be a space formed inside the storage body 210.

Referring to FIGS. 3 and 4, the first divider 230 is coupled to the storage body 210. The first divider 230 is coupled to the interior of the storage body 210. The first divider (230) divides the storage hole (220). The first divider 230 divides the storage hole 220 in the first axis direction (A axis direction). The first divider 230 divides the storage hole 220 with respect to the first axial direction (A-axis direction), so that the storage hole 220 is formed with respect to the first axial direction Axis direction (B-axis direction). In this case, the first divider 230 may divide the storage hole 220 into a first storage hole 221 and a second storage hole 222. The first divider 230 may extend from one end of the storage body 210 to the other end of the storage body 210 in the first axial direction (A-axis direction).

Referring to FIG. 4, the second divider 240 is coupled to the storage body 210. The second divider 240 is coupled to the inside of the storage body 210. The second divider 240 divides the storage hole 220. The second divider 240 divides the storage hole 220 in the first axis direction (A axis direction). The second divider 240 divides the storage hole 220 with respect to the first axial direction (A-axis direction) so that the storage hole 220 is spaced apart from the first axial direction Axis direction (B-axis direction).

The second divider 240 may be coupled to the storage body 210 to be spaced apart from the first divider 230. The second divider 240 may be spaced apart from the first divider 230 in the first axial direction (A-axis direction). The coupling position of the second divider 240 may be located on the first extension line A 'formed in the first axial direction (B-axis direction) at the coupling position of the one divider 230. In this case, the first divider 230 and the second divider 240 may be arranged in the first axis direction (A axis direction).

When the first divider 230 and the second divider 240 are arranged on the first extension line A ', the first divider 230 is arranged in the first axis direction (A-axis direction) And may be formed to have a shorter length than the one extending from one end of the storage body 210 to the other end of the storage body 210. The first divider 230 and the second divider 240 may be formed to have a short length according to the above description, and may be alternately arranged at a distance from each other. The first divider 230 and the second divider 240 are alternately arranged so as to extend from one end of the storage body 210 to the other end of the storage body 210 The following effects can be achieved.

The cable bear 200 for a substrate transfer apparatus according to the present invention is configured such that the first divider 230 extends from one end of the storage body 210 to the other end, 2 dividers 240 are formed to have a short length and are alternately arranged so as to be spaced apart from each other, it is possible to reduce an area of contact with the cable 250. Therefore, the cable bear 200 for a substrate transfer apparatus according to the present invention can reduce the contact area of the first divider 230 and the second divider 240 with respect to the cable 250, There is an effect of increasing the volume of the cable 250 stored in the housing. Alternatively, the cable bear 200 for a substrate transferring apparatus according to the present invention has the effect of reducing the size of the storage body 210, instead of increasing the volume of the cable 250.

Referring to FIG. 5, the first and second dividers 230 and 240 may be coupled to the storage body 210 such that the first and second dividers 230 and 240 are spaced apart from each other in the second axial direction (B-axis direction). In this case, the first divider 230 connects the storage hole 220 to the first storage hole 221 and the second storage hole 222, and the second divider 240 stores the storage hole 220 The second storage hole 222, and the third storage hole 223. The first storage hole 221, the second storage hole 222, and the third storage hole 223 may be arranged in the second axial direction (B-axis direction). In this case, the engagement position of the second divider 240 may be located on the second extension line B 'at the engagement position of the first divider 230. In this case, the first divider 230 and the second divider 240 may be arranged in the second axial direction (B-axis direction).

6, the second divider 240 is spaced apart from the first divider 230 in the first axial direction (A-axis direction) and at the same time, the second axial direction (B-axis direction) . In this case, the coupling position of the second divider 240 may be located avoiding the first extension line A 'and the second extension line B' at the coupling position of the first divider 230 . In this case, the first divider 230 and the second divider 240 may be positioned on a diagonal line where the first extension line A 'and the second extension line B' face each other.

For example, if both the first divider 230 and the second divider 240 are located on the first extension line A ', the space of the storage hole 220 on the first extension line A' It takes a lot. However, when the first divider 230 is positioned on the first extension line A 'and the second divider 240 is positioned on the diagonal line, the first extension line A' The space of the display unit 220 is relatively increased. The cable bear 200 for a substrate transfer apparatus according to the present invention is positioned on a different extension line of the first and second dividers 230 and 240, Thereby increasing the volume of the heat exchanger 250. Alternatively, the cable bear 200 for a substrate transferring apparatus according to the present invention has the effect of reducing the size of the storage body 210, instead of increasing the volume of the cable 250.

Referring to FIG. 6, a plurality of the first dividers 230 and the second dividers 240 may be alternately arranged in the first axis direction (A axis direction). Here, the second divider 240 may be spaced apart from the first divider 230 in the first axial direction (A-axis direction) and at the same time in the second axial direction (B-axis direction). Accordingly, the cable bear 200 for a substrate transfer apparatus according to the present invention can stably store the cable 250 by providing a plurality of the first dividers 230 and the second dividers 240.

The substrate transfer apparatus 300 according to the present invention includes a transfer arm 310 for transferring a substrate 350, a lift 320 for lifting and lowering the transfer arm 310, A traveling part 340 for moving the swivel part 330 along the traveling direction, and a cable bearing for storing a cable 250 for supplying a driving force to the driving source . The cable bear 200 is substantially the same as the cable bear 200 for a substrate transferring apparatus according to the present invention described above, so a detailed description thereof will be omitted.

Hereinafter, the transfer arm 310, the elevation part 320, the swing part 330, and the traveling part 340 will be described in detail with reference to the accompanying drawings.

The transfer arm 310 transfers the substrate 350. The transfer arm 310 is coupled to the lifting unit 320. Accordingly, the transfer arm 310 can be rotated together with the elevating and lowering unit 320 as it is rotated by the swinging unit 330. The transfer arm 310 may include an arm base 311, an arm body 312, an arm unit 313, and a supporting hand 316.

The arm base 311 is movably coupled to the lifting unit 320. The arm base 311 is lifted by the lifting unit 320. Accordingly, the height at which the transfer arm 310 is positioned can be changed.

The arm body 312 is coupled to the arm base 311. When one side of the arm base 311 is coupled to the elevation portion 320, the arm body 312 may be coupled to the other side of the arm base 311.

The arm unit 313 is movably coupled to the arm body 312. As the arm unit 313 moves, the supporting hand 316 can move together. The arm unit 313 can move the supporting hand 316 in a straight line. In this case, the arm unit 313 can move linearly, thereby moving the supporting hand 316 in a straight line. Although not shown, the arm unit 313 can be moved in a straight line by rotating the support hand 316. The arm unit 313 may include a first arm mechanism 314 and a second arm mechanism 315.

The first arm mechanism 314 is movably coupled to the arm body 312. The first arm mechanism 314 can be moved by a ball screw method using a motor and a ball screw. The first arm mechanism 314 includes a gear mechanism using a motor, a rack gear and a pinion gear, a belt mechanism using a motor, a pulley and a belt, a linear motor using a coil and a permanent magnet, (Linear Motor) method. When the arm unit 313 is configured to move linearly, the first arm mechanism 314 may be movably coupled to the arm body 312 in a straight line. When the arm unit 313 is rotationally moved, the first arm mechanism 314 may be rotatably coupled to the arm body 312.

The second arm mechanism (315) is movably coupled to the first arm mechanism (314). The first arm mechanism 314 can be moved in a belt manner using a motor, a pulley, and a belt. The first arm mechanism 314 may be moved by a ball screw system using a motor and a ball screw, a gear system using a motor, a rack gear, and a pinion gear, or a linear motor system using a coil and a permanent magnet. When the arm unit 313 is configured to move linearly, the second arm mechanism 315 may be movably coupled to the first arm mechanism 314 in a straight line. When the arm unit 313 is rotationally moved, the second arm mechanism 315 may be rotatably coupled to the first arm mechanism 314. The second arm mechanism 315 and the first arm mechanism 314 rotate in opposite directions to move the support hand 316 in a straight line.

The support hand 316 is coupled to the arm unit 313. The supporting hand 316 moves linearly as the arm unit 313 moves, so that the substrate 350 can be transferred. The support hand 316 may be coupled to the second arm mechanism 315.

The transfer arm 310 may be configured to transfer a plurality of substrates 350. In this case, the transfer arm 310 may include a plurality of the second arm mechanisms 315 and the support hands 316, respectively. For example, when the transfer arm 310 is configured to transfer two substrates 350, the transfer arm 310 may include two second arm mechanisms 315 and two support hands 316, . The second arm mechanisms 315 may be coupled to the first arm mechanism 314 so as to be positioned opposite to each other with reference to the first arm mechanism 314. The supporting hands 316 may be coupled to the second arm mechanisms 315 such that the elevating and lowering units 320 are positioned at different heights with respect to a direction in which the transfer arm 310 is moved up and down.

The lifting and lowering unit 320 moves the transfer arm 310 up and down. Accordingly, the elevation part 320 can change the height at which the transfer arm 310 is positioned. The elevating portion 320 is rotatably coupled to the swivel portion 330. The lift unit 320 can elevate the transfer arm 310 in a gear system using a motor, a rack gear, and a pinion gear. The lifting unit 320 may be a belt type using a motor, a pulley and a belt, a ball screw type using a motor and a ball screw, a linear motor type using a coil and a permanent magnet, have.

The swivel unit 330 rotates the lifting unit 320. Accordingly, the pivot portion 330 can change the direction in which the transfer arm 310 is directed. The swivel part 330 is rotatably coupled to the driving part 340. The swivel part 330 may rotate about the rotation axis in a state where it is coupled to the traveling part 340, thereby rotating the elevation part 320.

The travel unit 340 moves the swivel unit 330 along the traveling direction. Accordingly, the travel unit 340 can move the substrate 350 supported by the transfer arm 310 in the traveling direction.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be clear to those who have knowledge of.

200: Cable carrier for substrate transfer device 210: Storage body
220: Storage Balls 221: First Storage Balls
222: second storage ball 223: third storage ball
230: first divider 240: second divider
250: Cable
300: substrate transfer device 310: transfer arm
311: arm base 312: arm body
313: arm unit 314: first arm mechanism
315: second arm mechanism 316: supporting hand
320: elevating part 330:
340: traveling section 341: traveling base
342: traveling frame 350: substrate

Claims (5)

A storage body for storing a cable for supplying a driving force to a driving source of a substrate transfer device for transferring a substrate;
Storage space for cables;
A first divider coupled to the storage body for partitioning the storage bore in a first axial direction; And
And a second divider coupled to the storage body so as to be spaced apart from the first divider in the first axial direction to divide the storage hole in the first axial direction. The method according to claim 1,
Wherein the first and second dividers are coupled to the storage body in a second axial direction perpendicular to the first axis direction. 3. The method of claim 2,
Wherein a plurality of the first dividers and the second dividers are alternately arranged in the first axis direction. The method according to claim 1,
Wherein the first divider divides the storage hole into a first storage space and a second storage space,
And said second divider divides said storage hole into a second storage hole and said third storage hole. A transfer arm for transferring the substrate;
A lifting unit for lifting the transfer arm so that the height of the transfer arm is changed;
A swivel portion for rotating the elevating portion so that a direction of the transfer arm is changed;
A traveling portion for moving the pivot portion along a traveling direction; And
The substrate transfer apparatus according to any one of claims 1 to 4, for storing a cable for supplying a driving force to a driving source.
KR20130102501A 2013-08-28 2013-08-28 Cableveyor and Apparatus for Transferring Substrate having the same KR20150025186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR20130102501A KR20150025186A (en) 2013-08-28 2013-08-28 Cableveyor and Apparatus for Transferring Substrate having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20130102501A KR20150025186A (en) 2013-08-28 2013-08-28 Cableveyor and Apparatus for Transferring Substrate having the same

Publications (1)

Publication Number Publication Date
KR20150025186A true KR20150025186A (en) 2015-03-10

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KR20130102501A KR20150025186A (en) 2013-08-28 2013-08-28 Cableveyor and Apparatus for Transferring Substrate having the same

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Country Link
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