KR20140056057A - 기판들을 국부적으로 구별 가능하게 증착하기 위한 방법 및 장치 - Google Patents

기판들을 국부적으로 구별 가능하게 증착하기 위한 방법 및 장치 Download PDF

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Publication number
KR20140056057A
KR20140056057A KR1020130129209A KR20130129209A KR20140056057A KR 20140056057 A KR20140056057 A KR 20140056057A KR 1020130129209 A KR1020130129209 A KR 1020130129209A KR 20130129209 A KR20130129209 A KR 20130129209A KR 20140056057 A KR20140056057 A KR 20140056057A
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KR
South Korea
Prior art keywords
layer
substrate
transfer mask
locally
depositing
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KR1020130129209A
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English (en)
Korean (ko)
Inventor
마르쿠스 부르크하르트
게오르그 하제만
Original Assignee
폰 아르데네 게엠베하
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Application filed by 폰 아르데네 게엠베하 filed Critical 폰 아르데네 게엠베하
Publication of KR20140056057A publication Critical patent/KR20140056057A/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
KR1020130129209A 2012-10-29 2013-10-29 기판들을 국부적으로 구별 가능하게 증착하기 위한 방법 및 장치 KR20140056057A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201210110343 DE102012110343A1 (de) 2012-10-29 2012-10-29 Verfahren und Vorrichtung zur lokal differenzierbaren Bedampfung von Substraten
DE102012110343.7 2012-10-29

Publications (1)

Publication Number Publication Date
KR20140056057A true KR20140056057A (ko) 2014-05-09

Family

ID=50479531

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130129209A KR20140056057A (ko) 2012-10-29 2013-10-29 기판들을 국부적으로 구별 가능하게 증착하기 위한 방법 및 장치

Country Status (2)

Country Link
KR (1) KR20140056057A (de)
DE (1) DE102012110343A1 (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4034834C2 (de) * 1990-11-02 1995-03-23 Heraeus Noblelight Gmbh Verfahren zur Herstellung metallischer Schichten auf Substraten und Verwendung der Schichten
WO1995026852A1 (de) * 1994-03-31 1995-10-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und vorrichtung zur herstellung einer lötbaren metallisierungsschicht auf einer nichtlötbaren oberfläche
US6376806B2 (en) * 2000-05-09 2002-04-23 Woo Sik Yoo Flash anneal
DE102009041324A1 (de) 2009-09-15 2011-03-24 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Herstellung von organischen photoaktiven Bauelementen, insbesondere von organischen Leuchtdioden
DE102011082956B4 (de) 2011-09-19 2015-10-15 Von Ardenne Gmbh Transfermasken zur lokalen Bedampfung von Substraten und Verfahren zu deren Herstellung

Also Published As

Publication number Publication date
DE102012110343A1 (de) 2014-04-30

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