JP2010532306A - 半導体デバイス構造及びその製造方法 - Google Patents
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0328—Inorganic materials including, apart from doping materials or other impurities, semiconductor materials provided for in two or more of groups H01L31/0272 - H01L31/032
- H01L31/0336—Inorganic materials including, apart from doping materials or other impurities, semiconductor materials provided for in two or more of groups H01L31/0272 - H01L31/032 in different semiconductor regions, e.g. Cu2X/CdX hetero- junctions, X being an element of Group VI of the Periodic Table
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
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- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
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Abstract
【選択図】図2
Description
これらは、分子線エピタキシ、化学気相成長、スパッタリング、有機金属化学気相成長(MOCVD)、有機金属気相エピタキシ、及び、液相エピタキシを含む。これらの方法はいずれも比較的遅い成長速度であるが、1つまたは1つ以上の界面層は非常に薄いので、層の成長速度は、全体の製造プロセスの中でそれほど重要でない。
第1のバルク結晶半導体材料を提供する工程と、
選択的に、第1のバルク結晶半導体材料の表面上に界面層を形成する工程と、
界面層上に第1のバルク結晶半導体材料と異なるII−VI族の材料の第2のバルク結晶半導体材料を形成する工程と、
少なくとも1つのバルク結晶材料のエリア、及び例えば少なくとも第2のバルク結晶半導体材料のエリアを選択的に除去し、除去されたバルク結晶半導体材料により減少された厚さのパターン化エリアを形成する、及びより具体的には他のバルク結晶半導体材料(または、存在する場合境界層)の表面が露出するパターン化エリアを形成する工程と、を含む半導体デバイスの製造方法が提供される。
Claims (24)
- 第1のバルク結晶半導体材料、及び前記第1のバルク結晶半導体材料の表面上に設けられた第2のバルク結晶半導体材料を備え、前記第2のバルク結晶半導体材料は前記第1のバルク結晶半導体材料とは異なるII−VI族の材料である半導体デバイス構造であって、そこにおいて、少なくとも1つのバルク結晶半導体材料の部分が選択的に除去され、前記除去されたバルク結晶半導体材料により減少された厚さを有するパターン化エリアを形成する半導体デバイス構造。
- 前記除去された材料の部分は、前記パターン化エリアの中で実質的に完全に除去され、前記他のバルク結晶半導体材料の表面のパターン化エリアを露出させる請求項1に記載の構造。
- 第1及び第2のバルク結晶材料の部分が選択的に除去された請求項1または2に記載の構造。
- 前記除去されたバルク結晶半導体構造のパターン化された部分は、有効なピクセル化された配列を生成するように選択的に除去された請求項1乃至3のいずれか1項に記載の構造。
- 前記配列は線形配列である請求項4に記載の構造。
- 前記配列はエリア配列である請求項4に記載の構造。
- 前記第1のバルク結晶材料は、シリコン、ガリウム砒素、炭化ケイ素またはゲルマニウムの基板を有する請求項1乃至6のいずれか1項に記載の構造。
- 前記第1のバルク結晶材料は、少なくとも100μmの厚さ、好ましくは少なくとも200μmの厚さを有する請求項1乃至7のいずれか1項に記載の構造。
- 前記第1のバルク結晶材料は、25mmより大きい直径を有する請求項1乃至8のいずれか1項に記載の構造。
- 前記第2のバルク結晶材料は、Cd1−(a+b)MnaZnbTeの組成であって、a及び/またはbは、ゼロでもよい組成を含む請求項1乃至9のいずれか1項に記載の構造。
- 前記第2のバルク結晶材料は、少なくとも0.5mmの厚さを有する請求項1乃至10のいずれか1項に記載の構造。
- 前記第2のバルク結晶材料は、少なくとも10mmの厚さを有する請求項11に記載の構造。
- 中間層は、II−VI族の材料を含む請求項1乃至12のいずれか1項に記載の構造。
- 前記第1のバルク結晶材料の上に形成され、前記第1のバルク結晶材料と格子構造互換性を有する意図的に形成される界面層を更に有する請求項1乃至13のいずれか1項に記載の構造。
- 前記意図的に形成される界面層は、25μmと1000μmの間の厚さを有する請求項1乃至14のいずれか1項に記載の構造。
- 前記意図的に形成される界面層と前記第2のバルク結晶材料の間に10μmと500μmの間の厚さの遷移領域が存在する請求項14または15のいずれか1項に記載の構造。
- 前記第1のバルク結晶及び/または前記第2のバルク結晶は、単結晶である請求項1乃至16のいずれか1項に記載の構造。
- 第1のバルク結晶半導体材料を提供する工程と、
選択的に、前記第1のバルク結晶半導体材料の表面上に界面層を形成する工程と、
その上に前記第1のバルク結晶半導体材料と異なるII−VI族の材料の第2のバルク結晶半導体材料を形成する工程と、
少なくとも1つの前記バルク結晶材料のエリアを選択的に除去し、除去された材料により実質的に減少された厚さのパターン化エリアを形成する工程と、を含む半導体デバイスの製造方法。 - 除去された材料のエリアを実質的に完全に除去し、前記他のバルク結晶半導体材料の表面が露出するパターン化エリアを形成する請求項18に記載の方法。
- 材料が除去され、ピクセル化された配列を形成する請求項18または19に記載の方法。
- 材料がフォトリソグラフ法によって除去される請求項18乃至20のいずれか1項に記載の方法。
- e−m放射線感応性フォトレジストが除去されるべきバルク結晶材料の受容面に適用され、適切なパターン特性を含むフォトマスクが配置され、フォトレジストはマスキングされてない部分を処理するために放射を浴び、更に適切な化学エッチングが適用され前記フォトレジスト上の被露出領域の下部の前記バルク結晶材料に露光パターンを掘り込む請求項21に記載の方法。
- 前記第1のバルク結晶材料は、シリコン、ガリウム砒素、炭化ケイ素またはゲルマニウムの基板である請求項18乃至22のいずれか1項に記載の方法。
- 前記第2のバルク結晶材料は、Cd1−(a+b)MnaZnbTeの組成であって、a及び/またはbは、ゼロでもよい組成を含む請求項18乃至23のいずれか1項に記載の方法。
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GBGB0712618.8A GB0712618D0 (en) | 2007-06-29 | 2007-06-29 | Semiconductor device structure and method of manufacture thereof |
PCT/GB2008/050521 WO2009004376A2 (en) | 2007-06-29 | 2008-06-30 | Semiconductor device structure and method of manufacture thereof |
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JP2015531862A (ja) * | 2012-08-15 | 2015-11-05 | クロメック リミテッドKromek Limited | 圧電素子を有する応力型半導体検出器 |
JP2019033080A (ja) * | 2017-08-04 | 2019-02-28 | エダックス インコーポレイテッドEDAX, Incorporated | 電子顕微鏡における高エネルギーx線検査システム及び方法 |
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CN101907576B (zh) * | 2010-06-11 | 2012-02-01 | 中国科学院上海技术物理研究所 | 一种检测碲锌镉材料缺陷空间延伸特性的方法 |
CN102071456B (zh) * | 2011-01-18 | 2012-09-05 | 山东舜亦新能源有限公司 | 一种多晶硅铸锭炉安全监控装置 |
GB2503606B (en) * | 2011-04-06 | 2018-04-04 | Int Crystal Laboratories | Radiation detector |
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GB201703785D0 (en) * | 2017-03-09 | 2017-04-26 | Univ Bristol | Radiation detector |
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US4956304A (en) * | 1988-04-07 | 1990-09-11 | Santa Barbara Research Center | Buried junction infrared photodetector process |
US4965649A (en) * | 1988-12-23 | 1990-10-23 | Ford Aerospace Corporation | Manufacture of monolithic infrared focal plane arrays |
EP0913002B1 (fr) * | 1997-04-29 | 2008-06-18 | Commissariat A L'energie Atomique | Detecteur infrarouge bicolore a coherence spatio-temporelle planaire |
WO2005060011A1 (ja) * | 2003-12-16 | 2005-06-30 | National University Corporation Shizuoka University | 広域エネルギーレンジ放射線検出器及び製造方法 |
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- 2007-06-29 GB GBGB0712618.8A patent/GB0712618D0/en not_active Ceased
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2008
- 2008-06-30 EP EP08762623.0A patent/EP2162924B1/en active Active
- 2008-06-30 ES ES08762623T patent/ES2432797T3/es active Active
- 2008-06-30 WO PCT/GB2008/050521 patent/WO2009004376A2/en active Application Filing
- 2008-06-30 US US12/452,313 patent/US20100133584A1/en not_active Abandoned
- 2008-06-30 JP JP2010514142A patent/JP2010532306A/ja active Pending
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JPS61214462A (ja) * | 1985-03-19 | 1986-09-24 | Nec Corp | 配列型赤外線検知器 |
JPH0492481A (ja) * | 1990-08-07 | 1992-03-25 | Mitsubishi Electric Corp | 光検知装置 |
JPH06163469A (ja) * | 1992-11-20 | 1994-06-10 | Fujitsu Ltd | 半導体のエッチング方法および該エッチング方法を用いた光検知素子の製造方法 |
JP2005159156A (ja) * | 2003-11-27 | 2005-06-16 | Nagoya Industrial Science Research Inst | 半導体放射線検出器 |
JP2009520676A (ja) * | 2005-12-21 | 2009-05-28 | ダーハム サイエンティフィック クリスタルズ リミテッド | 半導体デバイス及びその製造方法 |
Cited By (2)
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JP2015531862A (ja) * | 2012-08-15 | 2015-11-05 | クロメック リミテッドKromek Limited | 圧電素子を有する応力型半導体検出器 |
JP2019033080A (ja) * | 2017-08-04 | 2019-02-28 | エダックス インコーポレイテッドEDAX, Incorporated | 電子顕微鏡における高エネルギーx線検査システム及び方法 |
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WO2009004376A2 (en) | 2009-01-08 |
ES2432797T3 (es) | 2013-12-05 |
WO2009004376A3 (en) | 2009-02-26 |
GB0712618D0 (en) | 2007-08-08 |
EP2162924A2 (en) | 2010-03-17 |
EP2162924B1 (en) | 2013-08-14 |
WO2009004376A9 (en) | 2009-12-30 |
US20100133584A1 (en) | 2010-06-03 |
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