KR20140004663A - 기판보관장치 - Google Patents

기판보관장치 Download PDF

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Publication number
KR20140004663A
KR20140004663A KR1020137016405A KR20137016405A KR20140004663A KR 20140004663 A KR20140004663 A KR 20140004663A KR 1020137016405 A KR1020137016405 A KR 1020137016405A KR 20137016405 A KR20137016405 A KR 20137016405A KR 20140004663 A KR20140004663 A KR 20140004663A
Authority
KR
South Korea
Prior art keywords
substrate
board
roller
window
container
Prior art date
Application number
KR1020137016405A
Other languages
English (en)
Korean (ko)
Inventor
도모히데 하마다
도루 기우치
도모나리 스즈키
Original Assignee
가부시키가이샤 니콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Publication of KR20140004663A publication Critical patent/KR20140004663A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H75/00—Storing webs, tapes, or filamentary material, e.g. on reels
    • B65H75/02—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks
    • B65H75/34—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks specially adapted or mounted for storing and repeatedly paying-out and re-storing lengths of material provided for particular purposes, e.g. anchored hoses, power cables
    • B65H75/38—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks specially adapted or mounted for storing and repeatedly paying-out and re-storing lengths of material provided for particular purposes, e.g. anchored hoses, power cables involving the use of a core or former internal to, and supporting, a stored package of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H75/00—Storing webs, tapes, or filamentary material, e.g. on reels
    • B65H75/02—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks
    • B65H75/34—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks specially adapted or mounted for storing and repeatedly paying-out and re-storing lengths of material provided for particular purposes, e.g. anchored hoses, power cables
    • B65H75/36—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks specially adapted or mounted for storing and repeatedly paying-out and re-storing lengths of material provided for particular purposes, e.g. anchored hoses, power cables without essentially involving the use of a core or former internal to a stored package of material, e.g. with stored material housed within casing or container, or intermittently engaging a plurality of supports as in sinuous or serpentine fashion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Storing, Repeated Paying-Out, And Re-Storing Of Elongated Articles (AREA)
KR1020137016405A 2010-12-15 2011-12-14 기판보관장치 KR20140004663A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US42319810P 2010-12-15 2010-12-15
US61/423,198 2010-12-15
PCT/JP2011/078876 WO2012081605A1 (ja) 2010-12-15 2011-12-14 基板保管装置

Publications (1)

Publication Number Publication Date
KR20140004663A true KR20140004663A (ko) 2014-01-13

Family

ID=46244702

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137016405A KR20140004663A (ko) 2010-12-15 2011-12-14 기판보관장치

Country Status (5)

Country Link
JP (1) JPWO2012081605A1 (zh)
KR (1) KR20140004663A (zh)
CN (1) CN103261066A (zh)
TW (1) TW201233606A (zh)
WO (1) WO2012081605A1 (zh)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445650A (en) * 1981-07-22 1984-05-01 Megatape Corporation High speed bidirectional magnetic tape transport with constant tension
JPH0514373Y2 (zh) * 1987-12-28 1993-04-16
JPH07248463A (ja) * 1994-03-10 1995-09-26 Fuji Photo Film Co Ltd フィルムビュアー
US6258408B1 (en) * 1999-07-06 2001-07-10 Arun Madan Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassette

Also Published As

Publication number Publication date
JPWO2012081605A1 (ja) 2014-05-22
TW201233606A (en) 2012-08-16
CN103261066A (zh) 2013-08-21
WO2012081605A1 (ja) 2012-06-21

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid