KR20130139172A - Jig for substrate inspection and substrate inspection apparatus - Google Patents

Abstract

The present invention provides a substrate inspection jig and a substrate inspection device which can considerably reduce the time for inspecting the insulation properties of a condenser installed in a continuous substrate prepared by connecting multiple unit substrates. The continuous substrate (2), which is an object to be inspected by the substrate inspection device (1), is formed by connecting the multiple unit substrates (3) each having at least one condenser (4a, 4b) installed. Each leading end of multiple probes (P) of the substrate inspection jig (11) can be in contact with a contact (5) electrically connected with the condenser (4) installed in at least two unit substrates (3) of the continuous substrate (2). Currents flowing in the condensers (4a, 4b) of at least two unit substrates (3) of the continuous substrate (2) are detected by multiple current detectors (AM) respectively, and the insulation properties of the condensers (4a, 4b) in at least two unit substrates (3) of the continuous substrate (2 ) are be inspected according to the detection results.

Description

Substrate inspection fixture and substrate inspection device {JIG FOR SUBSTRATE INSPECTION AND SUBSTRATE INSPECTION APPARATUS}

TECHNICAL FIELD This invention relates to the board | substrate test fixture and board | substrate test apparatus with which the board | substrate test apparatus which examines the insulation characteristic of the capacitor | condenser provided in the board | substrate is provided.

The board inspection apparatus is provided with a control unit including a power supply for supplying an electrical signal to inspect the electrical characteristics of the board, and an ammeter for detecting an electrical signal of the board. It is common for this control part to have only one power supply and an ammeter. For this reason, when inspecting a substrate provided with a plurality of capacitors (for example, a continuous substrate formed by connecting a plurality of unit substrates), it is necessary to inspect the capacitors one by one in order. There was a problem that needs.

Moreover, patent document 1 is mentioned as a prior art document regarding this kind of board | substrate inspection apparatus.

Japanese Unexamined Patent Publication No. 2008-305891

The problem to be solved by the present invention is to provide a substrate inspection jig and a substrate inspection apparatus that can significantly reduce the time required for the inspection of the insulating properties of a capacitor installed in a continuous substrate that is connected to a plurality of unit substrates. It is.

In order to solve the above problems, in the first aspect of the present invention, a plurality of unit substrates are connected to each other, and at least one condenser is installed on each unit substrate, and the surface of each unit substrate is The condenser provided on each unit substrate in the continuous substrate with respect to a continuous substrate having a plurality of contact points connected through two electrode terminals of each capacitor and connected through wiring. A substrate inspection jig provided in a substrate inspection device for inspecting insulation characteristics of a substrate, the tip of which is in contact with the contact points of two or more of the unit substrates of the continuous substrate. A plurality of probes arranged, a probe supporting member supporting the plurality of probes, and the probe A plurality of electrode portions at which rear ends of the respective probes supported by the support members are electrically contacted with each other, an electrode supporting member supporting the plurality of electrode portions, and the respective electrode portions, A plurality of lead portions connected to the connection switching portion for switching the electrical connection relationship between the probe and the apparatus main body side of the substrate inspection apparatus are provided.

In the second aspect of the present invention, the condenser of the two or more unit substrates of the continuous substrate is provided through the contact point between the substrate inspection jig according to the first aspect, the probe of the substrate inspection jig and the continuous substrate. Flowing through the condenser of the two or more unit substrates of the continuous substrate through a power supply unit for supplying electric power for inspecting insulation characteristics to the insulating substrate, and the contact points of the probe of the substrate inspection fixture and the continuous substrate. A plurality of current detection sections for detecting currents, a connection switching section for switching an electrical connection relationship between the probe of the substrate inspection fixture, the power supply section and the current detection section, and the current detection section Image of the two or more unit substrates of the continuous substrate based on the detection result; And a determination processing section (判定 處理 部) for inspecting an insulation property of the capacitor.

In the third aspect of the present invention, in the substrate inspection apparatus according to the second aspect, the connection switching portion includes a plurality of switching electrical connections between the probe of the substrate inspection fixture, the power supply portion, and the current detection portion. A switching element and a substrate member provided with the plurality of switching elements, wherein the plurality of current detection portions are provided in the substrate member of the connection switching portion.

According to the substrate inspection jig according to the first aspect of the present invention, the tip portions of the plurality of probes are brought into contact with the contact terminals electrically connected to the electrode terminals of the condenser provided on the unit substrate with respect to two or more unit substrates in the continuous substrate. Can be. Therefore, the plurality of unit substrates provided in the continuous substrate can be simultaneously inspected for the insulation characteristics of the capacitors provided on the unit substrate, and the time required for the inspection of the insulation characteristics of the capacitors can be greatly shortened.

According to the substrate inspection apparatus according to the second aspect of the present invention, the substrate inspection fixture according to the first aspect and a plurality of current detection portions for detecting currents flowing through the capacitors of two or more unit substrates of the continuous substrate are provided. have. Therefore, the plurality of unit substrates provided in the continuous substrate can be simultaneously inspected for the insulation characteristics of the capacitors provided on the unit substrate, and the time required for the inspection of the insulation characteristics of the capacitors can be greatly shortened.

According to the board | substrate test | inspection apparatus concerning 3rd aspect of this invention, the some current detection part is provided in the board member in which the some switching element of a connection switching part is provided. For this reason, the wiring path between the current detector and the probe can be shortened, and noise (for example, the influence of the resistance value of the wiring path, etc.) can be suppressed to accurately detect the current supplied to the capacitor.

In addition, since the number of installation of the current detection unit and the like have a strong relationship with the installation status (number of installations) of the probe of the board inspection fixture and the switching element of the connection switching unit, the configuration of the inspection apparatus main body is provided by providing the current detection unit in the substrate member of the connection switching unit. It is possible to easily cope with a change in the specification of the substrate to be inspected while maintaining.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows typically the partial structure of the board | substrate inspection apparatus which concerns on one Embodiment of this invention.
FIG. 2 is a cross-sectional view showing a partial configuration of a substrate inspection jig provided in the substrate inspection apparatus of FIG.
3 is a diagram showing the electrical configuration of the substrate inspection apparatus of FIG.
4 is a diagram showing a continuous substrate as an inspection target of the substrate inspection apparatus of FIG.
FIG. 5 is a diagram showing a circuit configuration when an inspection is performed by the substrate inspection apparatus of FIG.
Fig. 6 is a diagram showing a time change and the like of the current supplied to the capacitor during the inspection.

1 to 6, a description will be given of a substrate inspection apparatus according to an embodiment of the present invention. As shown in FIG. 1, the substrate inspection apparatus 1 includes a substrate inspection fixture 11, a connection switching unit 12, and an inspection processing unit ( 13) and condensers 4a and 4b (generally referred to as two or more unit substrates 3 in the continuous substrate 2 shown in FIG. 4). (4 is used) (see Fig. 5) to examine the insulation characteristics. As shown in Fig. 3, the connection switching unit 12 includes a connection switching unit 14 and a plurality of current detection units AM1 to AMn (these are generically referred to as " AM ") is installed. In addition, the inspection processing unit 13 includes a power supply unit 15, a voltage detection unit VM, and a control unit 16 as a determination processing unit.

As shown in Fig. 4, the continuous substrate 2 is formed by connecting a plurality of unit substrates 3 having the same configuration in a continuous manner (for example, in a matrix shape). ), A plurality of unit substrates 3 are obtained. Each unit substrate 3 is provided with at least one capacitor 4a, 4b in the present embodiment, as shown in FIG. In the present embodiment, two capacitors 4a and 4b are provided on each unit substrate 3. For example, each unit substrate 3 is a component embedded substrate in which a capacitor 4 is incorporated.

In addition, on the surface of each unit board 3, a plurality of contact points 5a to 5c (generally referred to in the case of these) are connected to two electrode terminals of each capacitor 4 via wiring. "5" is used). The contact points 5a are electrically connected to the first electrode terminals of the two condensers 4 through wiring, and the contact points 5b and 5c are electrically connected to the second electrode terminals of the condenser 4 respectively through the wiring. It is. As a modification, the same number of contact points 5a as the capacitor 4 may also be formed on the first electrode terminal of the capacitor 4, and the contact points 5a may be electrically connected to each other. Here, the contact points 5a to 5b are constituted by land portions of the wiring pattern formed on the unit substrate 3 or solder balls applied to the land portions. In addition, in the present embodiment, only two capacitors 4 and wirings associated therewith among the components provided on each unit board 3 for simplicity are described. And wirings associated therewith are also provided.

As shown in Figs. 1 and 2, the substrate inspection jig 11 includes a plurality of probes P1 to Pn (in the case of generic terms, reference numeral “P”), the front end side, and the rear end side. Probe support members 111 and 112, a plurality of electrode portions 113, an electrode support member 114, and a plurality of conductor portions 115 are provided. have. For simplicity, in this embodiment, only the upper substrate inspection jig 11 contacting the upper surface of the continuous substrate 2 is described, but in general, the lower side contacting the lower surface of the continuous substrate 2 is described. Inspection fixtures are also installed.

Each of the plurality of probes P1 to Pn may be in contact with contact points of the unit substrates 3 of two or more (in this embodiment, all of the continuous substrates 2) of the continuous substrate 2, respectively. It is arranged to be. The front end side and rear end probe support members 111 and 112 are formed with support holes 111a and 112a through which the front end side portion and the rear end side portion of the probe P are inserted and supported, respectively. The tip and rear end probe supporting members 111 and 112 have the probe P curved by a load when the tip of the probe P contacts the contact points 5a to 5c of the continuous substrate 2 (buckle). It is connected and fixed by a connecting member 116 at intervals from each other to allow buckling.

The electrode portion 113 is disposed at a position corresponding to each probe P supported by the front end side and rear end probe support members 111 and 112, so that the rear ends of the corresponding probes P are in contact with each other. Is connected. The electrode support member 114 has a plurality of support holes 114a penetrating up and down, and the electrode portions 113 are supported by the support holes 114a. The conductive wire 115 is connected to each electrode portion 113 or continuously connected to each of the electrode portions 113, and the electrode switching portion 113 is connected to the connection switching unit 14 of the connection switching unit 12. Connect to In addition, in this embodiment, the electrode part 113 is comprised by the front-end | tip of the conductor part of the wire-shaped conductor part 115. As shown in FIG.

The connection switching unit 14 of the connection switching unit 12 includes a plurality of switch groups SWG1 to SWGn. Each of the switch groups SWG1 to SWGn includes two first and second switching elements (for example, semiconductor switching elements) SW1 and SW2 that are turned on and off by the control of the controller 16. It is installed. The switch groups SWG1 to SWGn are provided with one set for each probe P, for example. Then, the switching elements SW1 and SW2 of the switch groups SWG1 to SWGn of the connection switching unit 14 are switched on and off, so that the respective probes P, the power supply unit 15 and the current detection unit AM described later. ) And the electrical connection relationship between the voltage detection unit VM is switched. When the first switching element SW1 is turned on, the corresponding probe P is connected to the first output terminal 15a of the power supply unit 15 through the first switching element SW1. When the second switching element SW2 is turned on, the corresponding probe P is connected to the second output terminal 15b of the power supply unit 15 via the second switching element SW2.

The power supply unit 15 outputs insulation test power (for example, DC current) of the condenser 4 through paired first and second output terminals 15a and 15b under the control of the control unit 16. . In addition, with respect to the polarity of the first and second output terminals 15a and 15b, the first output terminal 15a is set on the positive side, and the second output terminal 15b is set on the negative side.

The current detection units AM1 to AMn are provided in plural (the same number as the number of capacitors 4 to be installed and to be inspected at the same time in the continuous substrate 2), and a plurality of switches in the connection switching unit 12. It is provided in the board | substrate member which is not shown in figure in which group SWG1-SWGn is provided. As a circuit, the current detection unit AM is inserted into a wiring connecting the second switching element SW2 of each switch group SWG1 to SWGn and the second output terminal 15b of the power supply unit 15. Then, currents supplied from the power supply unit 15 to the plurality of capacitors 4 in the continuous substrate 2 through the probes P and the contact points 5 are detected, and the detection results are sent to the control unit 16.

The voltage detection unit VM detects a voltage given to each condenser 4 in the continuous substrate 2 through the contact point 5 of the probe P and the continuous substrate 2, and outputs the detection result to the controller 16. Send to. In addition, the voltage detection unit VM can be omitted.

The control unit 16 controls the substrate inspection apparatus 1 and inspects the insulation characteristics of the capacitors 4 provided on the plurality of unit substrates 3 in the continuous substrate 2. Hereinafter, the inspection by the control unit 16 will be described.

In the inspection, the tip of each probe P of the substrate inspection jig 11 is brought into contact with the corresponding contact point 5 of each unit substrate 3 of the continuous substrate 2, and each of the connection switching portions 14 is connected. The first switching element SW1 of the switch groups SWG1 to SWGn corresponding to the probe P in contact with the contact point 5a of each unit substrate 3 among the switch groups SWG1 to SWGn is turned on, and the second The switching element SW2 is turned off. In addition, the second switching element SW2 of the switch groups SWG1 to SWGn corresponding to the probe P in contact with the contact points 5b and 5c of each unit substrate 3 is turned on, and the first switching element SW1 is turned on. Is off. Accordingly, as shown in FIG. 5, the current output from the power supply unit 15 can be simultaneously supplied to the capacitors 4a and 4b of each unit substrate 3 in the continuous substrate 2 through the contact points 5a to 5c. In addition, the current supplied to each of the capacitors 4a and 4b can be detected by the current detection unit AM, respectively.

And the insulation test of each capacitor 4 is supplied to each capacitor 4, for example, when predetermined time elapses from the start of the electric current supply to each capacitor 4 by the power supply part 15, for example. The state of the current (for example, the current value) is detected through each current detection unit AM, and a good judgment is made regarding the insulation characteristics of each capacitor 4 based on the detection result. More specific details of the determination of the quality of the insulating properties of the capacitor 4 will be described below with reference to FIG.

In the case where there is no problem in the insulation characteristics of the capacitor 4, as shown in the graph G1 of FIG. 6, when the current supply by the power supply unit 15 starts at the time T1, the capacitor 4 immediately after that. The supply current value with respect to the rated value rises, and charging between the electrodes of the condenser 4 is performed. When the charging of the condenser 4 is almost completed at time T2, the value of the current supplied to the condenser 4 is rapidly lowered toward zero. On the other hand, when there is a problem in the insulation such as the short between the electrodes of the capacitor 4, as shown in the graph G2 of FIG. Since it does not advance, even if time T2 passes, the value of the electric current supplied to the capacitor | condenser 4 will remain at a constant value without falling.

For this reason, at the time T3 (time after the time T2) which has passed a predetermined time since the start of supply of current to each capacitor 4, the value of the current supplied to each capacitor 4 is converted into each current. By detecting through the detection unit AM and determining whether the detected current value is equal to or less than the predetermined determination reference value Ia, for example, it is possible to determine whether the insulation characteristics of each capacitor 4 are positive. In this case, if the detected current value at time T3 is equal to or less than the determination reference value Ia, the capacitor 4 is determined to be normal. If the detected current value exceeds the determination reference value Ia, the capacitor 4 Is determined to be abnormal.

As mentioned above, according to the board | substrate test | inspection apparatus 1 which concerns on this embodiment, the front-end | tip part of the some probe P of the board | substrate test jig 11 is carried out with respect to two or more unit boards 3 in the continuous board | substrate 2. The contact terminals 5 electrically connected to the electrode terminals of the capacitor 4 provided on the unit substrate 3 can be brought into contact with each other. In addition, the currents flowing through the capacitors 4 of the two or more unit substrates 3 of the continuous substrate 2 can be individually detected by the plurality of current detection units AM. Therefore, the plurality of unit substrates 3 provided in the continuous substrate 2 can be simultaneously inspected for the insulation characteristics of the capacitor 4 provided in the unit substrate 3, and the insulation characteristics of the capacitor 4 The time required for the inspection can be greatly reduced.

In addition, a plurality of current detection units AM are provided in the substrate member on which the plurality of switching elements SW1 and SW2 of the connection switching unit 14 are provided. Therefore, the wiring path between the current detection unit AM and the probe P can be shortened, and noise (for example, influence due to the resistance value of the wiring path) can be suppressed, so that the current supplied to the capacitor 4 can be accurately adjusted. Can be detected.

In addition, since the number of installations of the current detection unit AM has a strong relationship with the installation situation (number of installations) of the probes P of the board inspection fixture 11 and the switching elements SW1 and SW2 of the connection switching unit 14. By providing the current detection unit AM to the substrate member of the connection switching unit 14, it is possible to easily cope with the specification change of the substrate to be inspected while maintaining the structure of the inspection processing unit 13.

1: substrate inspection device
2: Continuous board 3: Unit board
4, 4a, 4b: condenser 5, 5a to 5c: contact point
11 substrate inspection jig 111 tip end support member
112: rear end side probe support member 113: electrode portion
114: electrode support member 115: wiring portion 12: connection switching unit
13: Inspection Processing Unit 14: Connection Switching Unit 15: Power Supply Unit
16 control unit AM, AM1-AMn current detection unit
P, P1-Pn: probe SW1: first switching element
SW2: second switching element SWG1 to SWGn: switch group
VM: Voltage detector

Claims (3)

A plurality of unit substrates are connected, at least one capacitor is provided on each unit substrate, and two electrode terminals and wirings of the respective capacitors are provided on the surface of each unit substrate. A substrate inspection apparatus for inspecting the insulation characteristics of the capacitors provided on the unit substrates in the continuous substrate, with respect to the continuous substrate having a plurality of contact points connected through the line. A substrate inspection fixture provided in the
A plurality of probes whose distal ends are arranged to be in contact with the contact points of two or more of the unit substrates of the continuous substrate, respectively;
A probe support member for supporting the plurality of probes,
A plurality of electrode portions at which rear ends of the respective probes supported by the probe supporting members are in electrical contact, respectively;
An electrode support member for supporting the plurality of electrode portions,
A plurality of lead portions connecting the electrode portions to a connection switching portion for switching the electrical connection relationship between the probe and the apparatus main body side of the substrate inspection apparatus;
Substrate inspection jig characterized in that it comprises.
A substrate inspection jig according to claim 1,
A power supply unit supplying electric power for inspecting insulation characteristics to the capacitors of the two or more unit substrates of the continuous substrate through the contact points of the probe and the continuous substrate of the substrate inspection fixture;
A plurality of current detectors for detecting currents flowing through the probes of the substrate inspection fixture and the contiguous substrates, respectively, of the two or more unit substrates of the continuous substrates;
A connection switching portion for transferring an electrical connection relationship between the probe of the substrate inspection jig, the power supply portion and the current detection portion;
A determination processing unit for inspecting the insulation characteristics of the capacitors of the two or more unit substrates of the continuous substrate on the basis of the detection result of the current detection unit;
Substrate inspection apparatus characterized in that it comprises.
3. The method of claim 2,
The connection switching unit includes a plurality of switching elements for switching an electrical connection relationship between the probe of the substrate inspection fixture, the power supply unit, and the current detection unit, and a substrate member provided with the plurality of switching elements. ),
And the plurality of current detection units are provided in the substrate member of the connection switching unit.

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