KR20130138667A - Pressure sensor and manufacturing method thereof - Google Patents

Abstract

Provided is a pressure sensor which comprises fewer parts, requires less time and effort for assembly, also can reduce costs owing to simple structure, and accurately detects pressure without insulation failure or pressure detection device corrosion due to moisture penetration and damage to the pressure detection device due to thermal stress applied to sealing resin. The pressure sensor comprises: a joint member (14) including a fluid path (12); a pressure detection device (16) which is arranged to face the fluid path (12) of the joint member (14); a terminal support (38) which is positioned close to the pressure detection device (16); a cover member (54) which is positioned close to the terminal support in order to form a space for covering the pressure detection device (16) with the terminal support (38); a cover member (66) which is installed on the joint member side, whose one end is open, and whose other base end comes into contact with the joint member (14); and a sealing resin unit (68) which fills a clearance formed inside the cover member (66) and constitutes an adhesive

Description

Pressure sensor and manufacturing method

The present invention relates to a liquid sealing type pressure sensor and a manufacturing method of the pressure sensor.

DESCRIPTION OF RELATED ART Conventionally, as a pressure sensor for fluid pressure detection, the liquid sealing type pressure sensor etc. are disclosed by patent document 1 (Japanese Patent No. 4908411), patent document 2 (international publication WO2009 / 087767).

14 is a longitudinal sectional view showing the liquid-tight pressure sensor 100 as described above.

As shown in FIG. 14, the liquid sealing type pressure sensor 100 is comprised by the combination of the pressure detection element 102, the joint member 104, and the cover member 106. As shown in FIG.

The pressure detecting element 102 includes a metal element body 108, and a hermetic glass 112 is inserted into and fixed to a central opening 110 formed in the element body 108.

In addition, the element body 108 of the pressure detecting element 102, the metal diaphragm 114, and the diaphragm protective cover 118 in which the communication hole 116 is formed are integrally welded at the outer peripheral portion thereof. It is fixed.

With this structure, a liquid sealing chamber 120 in which oil is sealed between the hermetic glass 112 and the diaphragm 114 is formed in the central opening 110 portion of the element body 108.

On the other hand, as shown in FIG. 14, the sensor chip 124 of a one-chip structure is fixed to the liquid sealing chamber 120 side surface of the hermetic glass 112 by an adhesive agent.

The sensor chip 124 is disposed in the liquid sealing chamber 120 and is configured as a pressure sensor chip in which a pressure element for detecting pressure and an integrated electronic circuit for processing an output signal of the pressure detection element are integrally formed.

In addition, the hermetic glass 112 has a plurality of lead pins 126 and an oil filling pipe 130 for inputting and outputting signals to and from the sensor chip 124, respectively. It is fixed.

As shown in FIG. 14, the lead pin 126 is electrically connected to the sensor chip 124 by gold or aluminum wire 128 to constitute an external output terminal or an external input terminal of the sensor chip 124. For example, one end of the FPC (flexible print circuit) 134 is electrically connected to the lead pin 126, and the other end of the FPC 134 is electrically connected to one end of the contact pin 131. The other end of the contact pin 131 is electrically connected to the external lead wire 132 by, for example, soldering or welding.

On the other hand, in such a liquid-sealed pressure sensor 100, the oil filling pipe 130 is provided to fill the liquid sealing chamber 120 of the pressure sensor 100. After the oil is filled in the liquid sealing chamber 120 through the oil filling pipe 130, the tip 136 of the oil filling pipe 130 serving as the oil introduction opening is sealed by welding or the like.

14, the resin cover part 138 is provided and the pressure detection element 102 is covered. By caulking the cylindrical caulking plate 140, the pressure detecting element 102, the joint member 104, and the cover member 106 are integrally fixed to form the pressure sensor 100.

In addition, the cover member 106 is molded by the sealing material (molding resin) 150, such as an epoxy resin and a silicone resin, for example.

On the other hand, between the resin cover part 138 and the pressure detection element 102, it seals with sealing material 142, such as an O-ring, for example.

The fluid pressure transmitted from the passage 146 into the pressure chamber 148 presses the surface of the diaphragm 114 through the communication hole 116 of the diaphragm protective cover 118, and the pressure is applied to the liquid sealing chamber ( It is detected by the sensor chip 124 in 120.

Patent Document 1: Japanese Patent No. 4908411 Patent Document 2: International Publication No. WO2009 / 087767 Patent Document 3: Japanese Patent Application Laid-Open No. 2012-68105

However, in the liquid sealing type pressure sensor 100 as described in such conventional patent document 1 and patent document 2, as shown in FIG. 14, the cover member 106 and the cylindrical caulking plate 140 are shown. In addition, a complicated configuration such as the sealing material 142 is required, and a large number of parts are required, which requires caulking and the like, which requires time and effort for assembly, thereby increasing costs.

In addition, when moisture penetrates the gap 144, airtightness is impaired under the influence of freezing and thawing. For this reason, when moisture penetrates from the outside as indicated by arrow G of FIG. 14, insulation failure occurs and a sensor does not function, and accurate pressure cannot be detected.

For this reason, patent document 3 (Unexamined-Japanese-Patent No. 2012-68105) discloses the liquid sealing type pressure sensor 200 which was set as the structure without gap so that moisture may not permeate from the exterior.

The pressure sensor 200 is comprised by the combination of the pressure detection element 202, the joint member 204, and the cover member 206, as shown in FIG.

And the outer peripheral part of the metal diaphragm 208 is airtightly fixed to the one end surface (bottom surface) of the pressure detection element 202 by welding. The lead pin 214 is connected to the sensor chip 210 provided on the bottom surface of the pressure detection element 202 through wire bonding 212.

As shown in FIG. 15, the lead pin 214 is connected to the substrate 216 and connected to the external lead wire 218. The space in the cover 220 is sealed with a sealing resin 222 made of an adhesive, and the space between the cover 220 and the joint member 204 is also sealed with a sealing resin 224 made of an adhesive. Thereby, there is no gap and the liquid, such as moisture, is prevented from penetrating inside.

However, in the pressure sensor 200 of this patent document 3, the sealing resins 222 and 224 expand | expand by heat, and the pressure detection element 202 may be damaged or damaged by the thermal stress, and accurate detection of pressure is carried out. May not be possible.

In addition, it is not only time-consuming to inject the sealing resin 224 but also requires filling the sealing resins 222 and 224 up and down, thereby increasing the complexity and cost.

In view of such a phenomenon, the present invention does not require a complicated configuration, requires fewer parts, requires no time and effort for assembly, and can reduce costs. Furthermore, moisture penetrates from the outside, and insulation failure and pressure detection can be achieved. It is an object of the present invention to provide a pressure sensor and a method of manufacturing the pressure sensor that do not affect the element, such as corrosion, and do not damage or damage the pressure detecting element due to thermal stress of the sealing resin. do.

The present invention has been invented to attain the objects and objects in the prior art as described above, and the pressure sensor of the present invention includes: a joint member having a flow path formed therein; A pressure detecting element fixed to the joint member and arranged to face the flow path of the joint member for detecting a pressure of the fluid in the flow path; It is provided from the said joint member side, It is equipped with the cover member which one side is opened and the other base end part contacts with a joint member.

The pressure sensor manufacturing method of the present invention further includes the steps of: fixing the pressure detecting element to the joint member so as to face the flow passage formed in the joint member, in order to detect the pressure of the fluid in the flow passage formed in the joint member; And a step of mounting the cover member on which one of the openings and the other proximal end abuts against the joint member from the joint member side.

With this configuration, since only one of the openings is opened and the other proximal end portion is in contact with the joint member, the cover member only needs to be mounted from the joint member side, so that a complicated configuration is unnecessary.

In addition, as in Patent Document 3, it is not necessary to fill the sealing resins 222 and 224 up and down, so that the process is simple and the cost can be reduced. can do.

Moreover, since the cover member which one side is opened and the other base end part abuts with a joint member is attached from the joint member side, even if the tension force is applied to an external lead wire, the base end part of a cover member will come into contact with a joint member.

As a result, even if a force is applied to the sealing resin, no cracking or the like occurs in the sealing resin, and moisture does not penetrate from the outside, so that the insulation failure and corrosion of the pressure detecting element are not affected. Detection can be performed.

In addition, the pressure sensor of the present invention is filled with a space forming member disposed to form a space covering the pressure detecting element, and a gap formed inside the cover member outside the space forming member to form an adhesive. It is characterized by including a resin part.

Moreover, the manufacturing method of the pressure sensor of this invention includes the process of arrange | positioning a space formation member so that the space which covers the said pressure detection element may be formed; And a step of filling the gap formed in the cover member with the sealing resin constituting the adhesive and forming the sealing resin portion outside the space forming member.

In addition, the pressure sensor of the present invention is configured such that the connecting portion of the lead pin of the pressure detecting element and the terminal connected to the external lead wire is formed by the space forming member so as to be located in the space where the sealing resin is not filled. It features.

Moreover, the manufacturing method of the pressure sensor of this invention arrange | positions so that the connection part of the terminal connected to the lead pin and the external lead wire of the said pressure detection element may be formed in the said space formation member, and is filled in the said space which is not filled with sealing resin. It is characterized by comprising a step to.

With such a configuration, a space covering the pressure detecting element is formed by the space forming member only by disposing the space forming member adjacent to the pressure detecting element in the pressure detecting element arranged to face the flow path of the joint member.

And one side is opened and the cover member which the other base end part contacts a joint member is attached from the joint member side. Next, the sealing resin which comprises an adhesive agent is filled in the clearance gap formed in the inside of a cover member outside the space formation member, and a sealing resin part is formed.

In this state, the connecting portion of the terminal connected to the lead pin of the pressure detecting element and the external lead wire is formed by the space forming member so as to be disposed in a space where the sealing resin is not filled.

This state is a state where the connection part of the terminal connected to the lead pin of the pressure detection element and the external lead wire is located in space, and is not a state covered with sealing resin like conventionally. Therefore, even when the pressure sensor is repeatedly heated or cooled, the thermal stress does not occur and thus is resistant to the heat shock test, and no insulation failure or short is generated, which does not affect the pressure detecting element. The pressure can be detected.

The joint member, the pressure detecting element, the terminal connected to the lead pin of the pressure detecting element and the external lead wire, and the space forming member are integrally sealed.

Therefore, since a complicated configuration is unnecessary as in the conventional pressure sensor, the number of parts is small, eliminating the need for time and labor for assembly, and the cost can be reduced, and the configuration can be made without a gap by simply injecting the sealing resin from one direction. can do.

In addition, the sealing resin constituting the adhesive bonds the joint member, the pressure detecting element, the terminal connected to the lead pin of the pressure detecting element and the external lead wire, and the space forming member to be integrally sealed. The insulation failure and the pressure detection element are not affected by corrosion or the like, and accurate pressure can be detected.

Moreover, since the space which covers the pressure detection element is formed by the space formation member, the sealing resin does not penetrate inside and contact the pressure detection element, and the pressure detection element is not damaged or damaged by the thermal stress of the sealing resin, Accurate pressure can be detected.

Moreover, this invention is characterized by the said space formation member being comprised by the 1st space formation member and the 2nd space formation member arrange | positioned above the said 1st space formation member.

By configuring in this way, the space which covers a pressure detection element can be formed by the space formation member only by arrange | positioning a 1st space formation member and a 2nd space formation member above the said 1st space formation member.

In addition, the pressure sensor of the present invention includes: a first space forming member disposed adjacent to the pressure detecting element for supporting a terminal connected to the lead pin and the external lead of the pressure detecting element; And a second space forming member disposed adjacent to the first space forming member so as to form a space covering the pressure detecting element together with the first space forming member.

The pressure sensor manufacturing method of the present invention further includes the steps of: arranging a first space forming member adjacent to the pressure detecting element to support a terminal connected to the lead pin and the external lead of the pressure detecting element; And arranging a second space forming member adjacent to the first space forming member so as to form a space covering the pressure detecting element together with the first space forming member.

In this configuration, the first space forming member is disposed adjacent to the pressure detecting element and the second space forming member is disposed adjacent to the pressure detecting element in the pressure detecting element disposed to face the flow path of the joint member. Only the space which covers a pressure detection element is formed by a 2nd space formation member and a 1st space formation member.

And one side is opened and the cover member which the other base end part contacts a joint member is attached from the joint member side. Next, the sealing resin which comprises an adhesive agent is filled in the clearance gap formed in the cover member, and a sealing resin part is formed.

As a result, the joint member, the pressure detecting element, the first space forming member supporting the terminal connected to the lead pin of the pressure detecting element and the external lead wire, and the second space forming member are integrally sealed.

Therefore, since a complicated configuration is unnecessary as in the conventional pressure sensor, the number of parts is small, eliminating the need for time and effort for assembly, and the cost can be reduced, and the configuration can be made without a gap by simply injecting the sealing resin from one direction. can do.

Moreover, the sealing member which comprises an adhesive bonds a joint member, a pressure detection element, the 1st space formation member which supports the terminal connected to the lead pin of a pressure detection element, and an external lead wire, and the 2nd space formation member. As the seal is sealed, moisture does not penetrate from the outside, so that it does not affect insulation failure or corrosion on the pressure detecting element, and thus accurate pressure can be detected.

In addition, since the space covering the pressure detecting element is formed by the first space forming member and the second space forming member, the sealing resin does not penetrate inside and come into contact with the pressure detecting element. The pressure detection element is not damaged by damage, and accurate pressure can be detected.

Moreover, this invention is characterized by the adhesive strength between the said sealing resin part and a 1st space formation member being smaller than the adhesive strength between the said sealing resin part and a pressure detection element.

With such a configuration, even when the sealing resin portion shrinks due to thermal stress when used at a low temperature, since the adhesive strength between the sealing resin portion and the first space forming member is small, peeling between the sealing resin portion and the first space forming member Will be generated.

Therefore, the sealing property is maintained between the sealing resin part forming the sealing part, that is, the sealing part, and the pressure detecting element, so that moisture is penetrated from the outside, thereby affecting insulation failure or corrosion on the pressure detecting element. There is no work, and accurate pressure can be detected.

Moreover, this invention is characterized by the adhesive strength between the said sealing resin part and a 1st space formation member being smaller than the adhesive strength between the said sealing resin part and a 2nd space formation member.

With such a configuration, even when the sealing resin portion shrinks due to thermal stress when used at a low temperature, since the adhesive strength between the sealing resin portion and the first space forming member is small, peeling between the sealing resin portion and the first space forming member Will be generated.

Therefore, the sealing property is maintained between the sealing resin part and the second space forming member which are involved in waterproofing, that is, the sealing part, and accordingly, moisture penetrates from the outside and influences such as poor insulation and corrosion on the pressure detecting element. The pressure can be detected accurately and the pressure can be detected accurately.

The present invention is also characterized in that a space is formed between the side of the pressure detecting element and the inner wall of the cover member, and a sealing resin portion into which the sealing resin portion flows into the space is formed.

By this configuration, as shown in Fig. 9 showing the stress analysis in the case of changing from 100 ° C to -40 ° C, the sealing resin part is in a compressive stress state.

That is, the compression state in the sealing resin part means that a force is applied in the direction which is hard to peel between the sealing resin part between the side part of a pressure detection element, and between the inner wall of a cover member.

As a result, moisture does not penetrate from outside and affects poor insulation and pressure detection elements, so that accurate pressure can be detected.

The present invention is also characterized in that a crack preventing protrusion is formed on the sidewall of the second space forming member so as to protrude in the outer circumferential direction.

Thus, since the crack prevention protrusion part is formed in the side wall of the 2nd space formation member in the outer periphery direction, even if it receives a thermal stress repeatedly in the range of 100 degreeC -40 degreeC, for example, The generation | occurrence | production of the crack K which arises in the outer peripheral direction toward upper direction is suppressed from the upper end vicinity of the part peeled between 1st space formation members.

Further, even if a crack K occurs, the crack K abuts the crack preventing protrusion and no further crack K proceeds.

Accordingly, moisture does not penetrate from the outside through the cracked portion K, the peeling portion between the sealing resin portion and the first space forming member, and does not affect the insulation failure or the corrosion of the pressure detecting element. Detection can be performed.

According to the present invention, since only one of the openings is opened and the other base end portion abuts against the joint member, the cover member only needs to be mounted from the joint member side, so that a complicated configuration is unnecessary.

In addition, as in Patent Document 3, it is not necessary to fill the sealing resins 222 and 224 up and down, so that the process is simple, the cost can be reduced, and there is no gap just by injecting the sealing resin from one direction. can do.

Moreover, since the cover member which one side is opened and the other base end contact | abuts with a joint member is mounted from the joint member side, even if a tension force is applied to an external lead wire, the base end part of a cover member will come into contact with a joint member.

Accordingly, even if a force is applied to the sealing resin, cracks or the like do not occur in the sealing resin, moisture penetrates from the outside and the insulation failure and the pressure detecting element are not affected by corrosion, .

In addition, according to the present invention, a space covering the pressure detecting element is formed by the space forming member only by arranging the space forming member adjacent to the pressure detecting element in the pressure detecting element arranged to face the flow path of the joint member. .

And one side is opened and the cover member which the other base end part contacts a joint member is attached from the joint member side. Next, the sealing resin which comprises an adhesive agent is filled in the clearance gap formed in the inside of a cover member outside the space formation member, and a sealing resin part is formed.

In this state, the connecting portion of the terminal connected to the lead pin and the external lead wire of the pressure detecting element is formed by the space forming member and is disposed so as to be located in a space where the sealing resin is not filled.

In this state, the connecting portion of the lead pin of the pressure detecting element and the terminal connected to the external lead wire is located in the space, and is not covered with the sealing resin as in the prior art. Therefore, even when the pressure sensor is repeatedly heated or cooled, the thermal stress does not occur and thus is strong in the thermal shock test, and the insulation failure or short does not occur and thus does not affect the pressure detecting element, thus making it possible to detect the correct pressure. I can do it.

The joint member, the pressure detecting element, the terminal connected to the lead pin of the pressure detecting element and the external lead wire, and the space forming member are integrally sealed.

Therefore, since a complicated configuration is unnecessary as in the conventional pressure sensor, the number of parts is small, eliminating the need for time and labor for assembly, and the cost can be reduced, and the configuration can be made without a gap by simply injecting the sealing resin from one direction. can do.

In addition, the sealing resin constituting the adhesive bonds the joint member, the pressure detecting element, the terminal connected to the lead pin of the pressure detecting element and the external lead wire, and the space forming member to be integrally sealed. The insulation failure and the pressure detection element are not affected by corrosion or the like, and accurate pressure can be detected.

Moreover, since the space which covers the pressure detection element is formed by the space formation member, sealing resin does not penetrate inside and contact a pressure detection element, and the pressure detection element does not damage damage by the thermal stress of a sealing resin, Accurate pressure can be detected.

1 is a longitudinal sectional view of a pressure sensor of the present invention.
2 is a top view of the pressure sensor of the present invention.
It is a longitudinal cross-sectional view explaining the outline of the manufacturing process of the pressure sensor of the present invention.
It is a longitudinal cross-sectional view explaining the outline of the manufacturing process of the pressure sensor of this invention.
It is a longitudinal cross-sectional view explaining the outline of the manufacturing process of the pressure sensor of this invention.
It is a longitudinal cross-sectional view explaining the outline of the manufacturing process of the pressure sensor of this invention.
7 is a longitudinal sectional view of another embodiment of the pressure sensor of the present invention.
8 is a partially enlarged cross-sectional view of FIG. 7.
9 is a diagram illustrating a stress analysis.
FIG. 10 is a longitudinal cross-sectional view of the pressure sensor illustrating a state in which the crack K occurs in the sealing resin portion 68 when the pressure sensor 10 of the present invention shown in FIG. 1 is repeatedly subjected to thermal stress.
FIG. 11 is a partially enlarged cross-sectional view of FIG. 10.
12 is a longitudinal sectional view of another embodiment of the pressure sensor of the present invention.
FIG. 13 is a partially enlarged cross-sectional view of FIG. 12.
14 is a longitudinal sectional view showing a conventional liquid-sealed pressure sensor 100.
15 is a longitudinal sectional view showing a conventional liquid-sealed pressure sensor 200.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment (Example) of this invention is described in detail based on drawing.

≪ Example 1 >

1 is a longitudinal sectional view of the pressure sensor of the present invention, FIG. 2 is a top view of the pressure sensor of the present invention, and FIGS. 3 to 6 are longitudinal sectional views illustrating an outline of a manufacturing process of the pressure sensor of the present invention.

In Figs. 1 and 2, the member number 10 represents the pressure sensor of the present invention in its entirety.

As shown in FIG. 1, the pressure sensor 10 of the present invention is a liquid-tight pressure sensor, and includes a joint member 14 having a flow path 12 formed therein, and a pressure detecting element for detecting pressure of a fluid in the flow path 12. (16) is provided.

The pressure detecting element 16 is disposed to face the flow passage 12 of the joint member 14, and is welded to the joint member 14 at its periphery to be fixed.

The pressure detecting element 16 has, for example, a metal element body 18 made of stainless steel, aluminum, etc., and the hermetic glass 22 is inserted into the central opening 20 formed in the element body 18. It is fixed.

In addition, as shown in FIG. 1, the element main body 18 of the pressure detection element 16, the metal diaphragm 24, and the diaphragm protective cover 28 in which the communication hole 26 were formed are welded in the outer peripheral part. It is fixed integrally by

This structure forms a liquid sealing chamber 30 in which oil is sealed between the hermetic glass 22 and the diaphragm 24 in the central opening 20 portion of the element body 18.

On the other hand, as shown in FIG. 1, the sensor chip 32 of a one-chip structure is fixed to the liquid sealing chamber 30 side surface of the hermetic glass 22 by an adhesive agent.

The sensor chip 32 is disposed in the liquid sealing chamber 30 and is configured as a pressure sensor chip in which a pressure element for detecting pressure and an integrated electronic circuit for processing an output signal of the pressure detection element are integrally formed.

In addition, a plurality of lead pins 34 for inputting and outputting signals to and from the sensor chip 32 are respectively fixed to the hermetic glass 22 by the hermetic process.

Although not shown in this embodiment, eight lead pins 34 are provided in total. That is, three lead pins 34 for the external lead wire 62a (Vout), the external lead wire 62b (Vcc), the external lead wire 62c (GND), and the sensor chip 32, which will be described later as input / output terminals. Five lead pins 34 are provided as adjustment terminals.

The lead pin 34 is electrically connected (wire bonded) to the sensor chip 32 by, for example, gold or aluminum wires 36 to constitute an external output terminal or an external input terminal of the sensor chip 32. .

The fluid pressure transmitted from the flow passage 12 of the joint member 14 into the pressure chamber 40 presses the surface of the diaphragm 24 through the communication hole 26 of the diaphragm protective cover 28. The pressing force is detected by the sensor chip 32 in the liquid sealing chamber 30.

1, the terminal block 38 which comprises the 1st space formation member of a space formation member is located above the element main body 18 of the pressure detection element 16 in the upper part of the pressure detection element 16. As shown in FIG. It is arrange | positioned adjacent to and fixed to the element main body 18 of the pressure detection element 16 by an adhesive agent, for example.

As shown in Fig. 1, the terminal block 38 has a substantially cylindrical shape, and a terminal fixing wall 42 having an insertion hole 42a for inserting the lead pin 34 in the center portion thereof is formed. The lower side wall 44 extending downward from the terminal fixing wall 42 and the upper side wall 46 extending upward from the terminal fixing wall 42 are formed.

As a result, as shown in FIG. 1, a first space S1 surrounded by the terminal fixing wall 42 and the lower sidewall 44 is formed between the pressure detecting element 16 and the terminal block 38.

The tip 34a of the lead pin 34 of the pressure detecting element 16 is inserted into the insertion hole 42a and connected to the terminal 48 provided to penetrate the upper sidewall 46 of the terminal block 38. 52), for example, electrically connected by welding.

On the other hand, although not shown in the present embodiment, as shown in FIG. 2 described later, three terminals for the external lead wire 62a (Vout), the external lead wire 62b (Vcc), and the external lead wire 62c (GND) are shown. 48 is provided.

1 and 2, a coupling step 50 is formed on the upper sidewall 46 of the terminal block 38, and the second space forming member is coupled to the coupling step 50. The lid member 54 constituting the space forming member is disposed adjacent to the terminal block 38.

That is, the lid member 54 has a substantially cup shape having an upper plate portion 56 and a side wall 58, and the side wall 58 is formed on the coupling step 50 formed on the upper side wall 46 of the terminal block 38. Configured to combine.

Accordingly, as shown in FIG. 1, between the lid member 54 and the terminal block 38, the terminal fixing wall 42, the upper side wall 46 of the terminal block 38, and the upper plate portion 56 of the lid member 54. ) And a second space S2 surrounded by the sidewall 58 is formed.

That is, by configuring in this way, as shown in FIG. 1, the said space S1 which covers the pressure detection element 16 by the cover member 54 arrange | positioned adjacent to the terminal block 38 and the terminal block 38. As shown in FIG. A large space consisting of a space S2 is formed.

In other words, in the terminal fixing wall 42 of the terminal block 38, the spaces S1 and S2 are in a communication state, whereby the pressure detecting element 16 is provided by the terminal block 38 and the cover member 54. ), A large space is formed.

1 and 2, the lead wire fixing part 60 protruding outward is formed on the side wall 58 of the lid member 54. As shown in FIG. 2, the lead wire fixing part 60 is substantially rectangular, and has three external lead wires 62, that is, external lead wires 62a (Vout), external lead wires 62b (Vcc), and external lead wires ( 62c) (GND), the fixing part cutout grooves 60a, 60b, 60c of the lead wire fixing part 60 are formed, respectively.

That is, the external lead wire 62a (Vout), the external lead wire 62b (Vcc), and the external lead wire 62c (GND) are fixed part cutout grooves 60a as indicated by arrows A in FIGS. 1 and 2. , 60b, 60c) to be fixed.

On the other hand, as shown in FIG. 1, the outer lead wire 62 is connected to the outer end portion 48a of the terminal 48 provided to penetrate the upper sidewall 46 of the terminal block 38. Electrical connection by means of soldering, welding, or the like.

In addition, as indicated by arrow B in FIG. 1, an opening 66b side of the cover member 66 is inserted from the joint member 14 side, and a flange-shaped proximal end portion protruding inside the cover member 66 ( 66a comes into contact with the flange portion 14a of the joint member 14.

As a result, as shown in FIG. 1, the gap S3 is formed inside the cover member 66, and the sealing resin constituting the adhesive from the opening 66b side of the cover member 66 is formed in the gap S3. Is filled to form the sealing resin portion 68.

In this case, as shown in FIG. 1, the upper end 68a of the sealing resin portion 68 has a height equal to or less than the height of the upper surface 60d of the lead wire fixing portion 60 of the lid member 54, Preferably, it is located between the upper surface 60d and the lower surface 60e of the lead wire fixing part 60.

The pressure sensor 10 of this invention comprised in this way is manufactured by the process shown in FIGS.

That is, as shown in FIG. 3, the pressure detection element 16 integrated previously is prepared, and the joint member 14 is welded to this pressure detection element 16. As shown in FIG.

Next, as shown in FIG. 4, the lower side wall 44 of the terminal block 38 is arrange | positioned on the upper part of the element main body 18 of the pressure detection element 16, and is fixed by adhesive, for example. In this state, the tip 34a of the lead pin 34 of the pressure detecting element 16 is inserted into the insertion hole 42a of the terminal fixing wall 42 of the terminal block 38.

In this state, the tip 34a of the lead pin 34 of the pressure detecting element 16 is inserted into the insertion hole 42a, and is connected to the terminal 48 provided to penetrate the upper sidewall 46 of the terminal block 38. The tip 34a of the lead pin 34 is electrically connected to the connecting portion 52 by, for example, welding.

In this state, as shown in FIG. 4, a first space S1 surrounded by the terminal fixing wall 42 and the lower sidewall 44 is formed between the pressure detecting element 16 and the terminal block 38. .

And as shown in FIG. 5, the external lead wire 62 is connected to the outer end part 48a of the terminal 48 provided through the upper side wall 46 of the terminal block 38 by the connection part 64, for example, It is electrically connected by welding, soldering, or the like.

In addition, the cover member 54 is disposed adjacent to the terminal block 38 so as to be engaged with the coupling step 50 formed on the upper sidewall 46 of the terminal block 38.

Accordingly, as shown in FIG. 5, between the lid member 54 and the terminal block 38, the terminal fixing wall 42, the upper sidewall 46 of the terminal block 38, and the upper plate portion 56 of the lid member 54. ) And the second space S2 surrounded by the side wall 58 is formed.

2 and 5, the external lead wires 62a (Vout), the external lead wires 62b (Vcc), and the external lead wires 62c (GND) are connected to the lead wire fixing portion 60. Insert into fixing section cutout groove (60a, 60b, 60c), respectively.

In this state, as shown in FIG. 6, the flange-shaped base end 66a which inserts the opening part 66b of the cover member 66 from the joint member 14 side, and protrudes inside the cover member 66 is shown. Is in contact with the flange portion 14a of the joint member 14. In addition, if necessary, the flange 14a of the joint member 14 and the base end 66a of the cover member 66 are fixed by welding or the like.

Finally, as shown in FIG. 1, the sealing resin part 68 is filled with the sealing resin which comprises an adhesive agent in the clearance gap S3 formed in the inside of the cover member 66 from the opening part 66b side of the cover member 66. ).

In this state, as shown in FIG. 1, the connecting portion 52 of the lead pin 34 of the pressure detecting element 16 and the terminal 48 connected to the external lead wire 62 is formed of the space forming member. In a space formed by the terminal blocks 38 constituting the first space forming member and the lid member 54 constituting the second space forming member of the space forming member, the spaces S1 and S2 not filled with the sealing resin. The state is arranged to be located.

In this state, the lead pin 34 of the pressure detecting element 16 and the connecting portion 52 of the terminal 48 connected to the external lead wire 62 are located in the space, and the state covered with the sealing resin as in the prior art no. Therefore, even when the pressure sensor is repeatedly heated or cooled, the thermal stress does not occur and thus is strong in the thermal shock test, and the insulation failure or short does not occur and thus does not affect the pressure detecting element, thus making it possible to detect the correct pressure. I can do it.

According to the pressure sensor 10 of this invention comprised in this way, the terminal block 38 is adjacent to the pressure detection element 16 with the pressure detection element 16 arrange | positioned so that the flow path 12 of the joint member 14 may face. ), And only the cover member 54 is disposed adjacent to the terminal block 38, the spaces S1 and S2 covering the pressure detecting element 16 by the cover member 54 and the terminal block 38 are provided. Is formed.

And one side is opened and the cover member 66 which the other base end 66a abuts on the joint member 14 is attached from the joint member 14 side. Next, the sealing resin constituting the adhesive is filled in the gap S3 formed inside the cover member 66 to form the sealing resin portion 68.

Accordingly, as shown in FIG. 1, the terminal 48 connected to the joint member 14, the pressure detecting element 16, the lead pin 34 of the pressure detecting element 16, and the external lead wire 62. The terminal block 38 for supporting the cover member and the lid member 54 are integrally sealed.

Therefore, since a complicated structure is unnecessary as in the conventional pressure sensor, the number of parts is small, so that time and effort are not required for assembly, and cost can be reduced.

Moreover, the terminal 48 connected to the joint member 14, the pressure detection element 16, the lead pin 34 of the pressure detection element 16, and the external lead wire 62 by the sealing resin which comprises an adhesive agent is carried out. Since the terminal block 38 and the lid member 54 are integrally sealed to each other, moisture does not penetrate from the outside, resulting in poor insulation, and does not affect the pressure detection element 16 such as corrosion. Accurate pressure can be detected.

In addition, as shown in FIG. 1, since the spaces S1 and S2 covering the pressure detecting element 16 are formed by the lid member 54 and the terminal block 38, the sealing resin penetrates into the inside to prevent the pressure detecting element ( 16), the pressure detecting element 16 is not damaged due to the thermal stress of the sealing resin, and accurate pressure can be detected.

In addition, since one side is opened and the other base end portion 66a attaches the cover member 66 in contact with the joint member 14 from the joint member 14 side, even when a tensile force is applied to the external lead wire 62, The proximal end 66a of the cover member 66 abuts against the joint member 14.

As a result, even if a force is applied to the sealing resin, no cracking or the like occurs in the sealing resin, and moisture does not penetrate from the outside, so that it does not affect the insulation failure or the pressure detecting element 16 such as corrosion. Detection can be performed.

In addition, the external lead wires 62a (Vout), the external lead wires 62b (Vcc), and the external lead wires 62c (GND), as indicated by arrows A in Figs. 1 and 2, indicate the cover member 54. It is inserted into and fixed to the fixing part cutout grooves 60a, 60b, and 60c of the lead wire fixing part 60 protruding outwardly to the side wall 58, respectively.

Therefore, even if a force is applied to the external lead wire 62, since the external lead wire 62 is fixed, no cracking or the like occurs in the soft sealing resin portion 68 made of the sealing resin constituting the adhesive, and moisture is absorbed from the outside. Since it does not penetrate and affect the insulation failure or corrosion of the pressure detecting element 16, accurate pressure can be detected.

In addition, the external lead wire 62 is in a state where the top and bottom thereof are separated from the lead wire fixing part 60. Accordingly, when curing the sealing resin constituting the adhesive, the sealing resin constituting the adhesive rises upward along the outer lead wire 62 by the surface tension, and protrudes from the upper end 68a of the sealing resin portion 68. It is possible to prevent the quality of appearance, etc. from being lowered.

In this case, as shown in FIG. 1, the upper end 68a of the sealing resin portion 68 has a height equal to or less than the height of the upper surface 60d of the lead wire fixing portion 60 of the lid member 54, Preferably, it is located between the upper surface 60d and the lower surface 60e of the lead wire fixing part 60.

≪ Example 2 >

7 is a longitudinal cross-sectional view of another embodiment of the pressure sensor of the present invention, FIG. 8 is a partially enlarged cross-sectional view of FIG. 7, and FIG. 9 is a diagram illustrating stress analysis.

The pressure sensor 10 of this embodiment is basically the same structure as the pressure sensor 10 shown in FIG. 1, and attaches | subjects the same member number to the same structural member, and the detailed description is abbreviate | omitted.

In the pressure sensor 10 of the present embodiment, as shown in FIGS. 7 and 8, the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38 is the sealing resin portion 68 and the pressure detecting element ( It is comprised smaller than the adhesive strength P2 between the element main bodies 18 of 16).

With such a configuration, as indicated by arrow C of FIG. 8, even when the sealing resin portion 68 shrinks due to thermal stress when used at a low temperature, adhesion between the sealing resin portion 68 and the terminal block 38 is performed. Since the strength is small, as indicated by arrow D in FIG. 8, the sealing resin portion 68 and the terminal block 38 are peeled off.

Therefore, the sealing property is involved between the sealing resin portion 68 forming the sealing portion and the element body 18 of the pressure detecting element 16, which is involved in waterproofness, that is, as shown in the part E enclosed in the ellipse of FIG. As a result, moisture does not penetrate from outside and affects poor insulation or pressure detection element 16, and the like, and accurate pressure can be detected.

In addition, in the pressure sensor 10 of the present embodiment, as shown in FIGS. 7 and 8, the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38 is the sealing resin portion 68 and the lid. It is comprised smaller than the adhesive strength P3 between members 54.

With such a configuration, as indicated by arrow C of FIG. 8, even when the sealing resin portion 68 shrinks due to thermal stress when used at a low temperature, adhesion between the sealing resin portion 68 and the terminal block 38 is performed. Since the strength is small, as indicated by arrow D in FIG. 8, the sealing resin portion 68 and the terminal block 38 are peeled off.

Thus, as shown in the part F enclosed in the water resistance, i.e., enclosed by the ellipse in FIG. 8, the sealing property is maintained between the sealing resin portion 68 and the lid member 54 forming the sealing portion, and thus, the external Moisture penetrates from and does not affect the insulation failure and the pressure detecting element 16 such as corrosion, so that accurate pressure can be detected.

In this case, as shown in FIG. 8, the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38 is placed between the sealing resin portion 68 and the element body 18 of the pressure detecting element 16. The method of setting smaller than the adhesive strength P2 and the adhesive strength P3 between the sealing resin portion 68 and the lid member 54 is not particularly limited.

In addition, as shown in FIG. 8, in a method of largely setting the adhesive strength P3 between the sealing resin portion 68 and the lid member 54, the sealing resin portion 68 contacts the lid member 54. The method of enlarging adhesiveness with the sealing resin part 68 can be employ | adopted to the surface 54a to be mentioned, for example by a plasma washing process, a UV process, the primer process by a silane coupling agent, etc.

For example, when the adhesive agent which comprises the sealing resin part 68 is urethane resin, as shown to the part E enclosed with the ellipse of FIG. 8, the sealing resin part 68 and pressure detection which form a sealing part are formed. Since the element main body 18 is metal, between the element main bodies 18 of the element 16, adhesive strength is large. For this reason, as a method of setting the adhesive strength P1 between the sealing resin part 68 and the terminal block 38 small, adhesive strength with respect to the urethane resin which comprises the terminal block 38 and the sealing resin part 68 is carried out. What is necessary is just to produce with relatively small PPS (polyphenylene sulfide) resin.

In addition, as shown in FIG. 8, the adhesive strength P3 between the sealing resin portion 68 and the lid member 54 is larger than the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38. As a setting method, the sealing resin part 68 which forms the sealing part as shown to the part F enclosed with the ellipse of FIG. 8 using the cover member 54 made of metal, such as stainless steel and aluminum, for example. And the adhesive strength between the lid member 54 and the lid member 54 may be increased.

In addition, as shown in FIG. 8, the adhesive strength P3 between the sealing resin portion 68 and the lid member 54 is larger than the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38. As a setting method, when the adhesive agent which comprises the sealing resin part 68 is urethane resin, the material of the cover member 54 is adhere | attached with the urethane resin which comprises the sealing resin part 68, for example. What is necessary is just to produce with comparatively large strength, for example, ABS resin, PBT (polybutylene terephthalate) resin, etc.

FIG. 9 is a diagram illustrating stress analysis when the temperature is changed from 100 ° C. to −40 ° C., and as shown in FIG. 9A, the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38. Is large, between the sealing resin portion 68 forming the sealing portion and the element body 18 of the pressure detecting element 16, and between the sealing resin portion 68 and the lid member 54 forming the sealing portion. In (F), the stress value is as large as 15 MPa.

In contrast, as shown in FIG. 9B, when the adhesive strength P1 between the sealing resin portion 68 and the terminal block 38 is small, the sealing resin portion 68 and the pressure detection forming the sealing portion are formed. Between the element body 18 of the element 16 (E), between the sealing resin portion 68 forming the seal portion and the cover member 54 (F), the stress value is reduced to about one third to 6 MPa. It can be seen that.

1, 7, and 8, in the pressure sensor 10 of the present invention, the side wall 18a of the element body 18 of the pressure detecting element 16 and the inner wall of the cover member 66 are shown. The space S4 is formed between the 66c.

And the sealing resin part 68b which the sealing resin part flowed in also in this space S4 is formed.

For this reason, as shown in FIG. 9 which shows the stress analysis at the time of changing from 100 degreeC to -40 degreeC, in this sealing resin part 68b, it will be in a compressive stress state.

That is, the state in which the sealing resin portion 68b is in a compressed state means that the sealing resin portion 68a is between the side portion 18a of the element body 18 of the pressure detecting element 16 and the inner wall of the cover member 66. The force is applied to the direction which is hard to peel between 66c.

As a result, moisture does not penetrate from outside and affects the insulation failure and the pressure detecting element 16 such as corrosion, so that accurate pressure can be detected.

≪ Example 3 >

FIG. 10 is a longitudinal cross-sectional view of the pressure sensor for explaining a state in which a crack K occurs in the sealing resin portion 68 when the pressure sensor 10 of the present invention shown in FIG. 1 is repeatedly subjected to thermal stress. FIG. 11 is a partially enlarged sectional view of FIG. 10, FIG. 12 is a longitudinal sectional view of another embodiment of the pressure sensor of the present invention, and FIG. 13 is a partially enlarged sectional view of FIG.

The pressure sensor 10 of this embodiment is basically the same structure as the pressure sensor 10 of Embodiment 2 shown in FIG. 7 and FIG.

As shown in Figs. 10 and 11, in the pressure sensor 10 of the present invention according to the second embodiment shown in Figs. 7 and 8, for example, thermal stress is repeatedly applied in the range of 100 ° C to -40 ° C. When it receives, there exists a possibility that the crack K may generate | occur | produce in the sealing resin part 68.

That is, in the enlarged view of FIG. 11, as indicated by arrow C, the side of the sealing resin portion 68 and the terminal block 38 when the sealing resin portion 68 shrinks due to thermal stress by use under low temperature. Since the adhesive strength between them is small, as indicated by arrow D in FIG. 11, the sealing resin portion 68 and the terminal block 38 are peeled off.

And as shown in the enlarged view of FIG. 11, from the upper end vicinity of the part peeled between the sealing resin part 68 and the terminal block 38, the upper end 68a of the sealing resin part 68 toward an outer periphery direction. There is a possibility that a crack K leading to) may occur.

Thereby, moisture penetrates from the outside through the peeling part between the crack K, the sealing resin part 68, and the terminal block 38, and it will affect the insulation failure and corrosion of the pressure detection element 16, There is a possibility that the accurate pressure cannot be detected.

For this reason, in the pressure sensor 10 of this embodiment, as shown to FIG. 12 and FIG. 13, the crack prevention protrusion part 70 protrudes in the outer peripheral direction and is formed in the side wall 58 of the cover member 54. As shown in FIG.

In the case of this embodiment, the crack prevention protrusion 70 is formed in the lower part 58a of the side wall 58 of the cover member 54 and the part which contact | connects the upper side wall 46 of the terminal block 38. As shown in FIG.

12 and 13, the crack preventing protrusions 70 are formed on the side walls 58 of the lid member 54 in the circumferential direction, so that, for example, at 100 ° C, Even if it receives heat stress repeatedly in the range of 40 degreeC, generation | occurrence | production of the crack K which arises in the circumferential direction toward upper direction from the upper end vicinity of the part peeled between the sealing resin part 68 and the terminal block 38 is suppressed.

Further, even if a crack K occurs, the crack K abuts the crack preventing protrusion 70 and no further crack K proceeds.

As a result, moisture penetrates from the outside through the peeling portion between the crack K, the sealing resin portion 68, and the terminal block 38, thereby affecting insulation failure or corrosion on the pressure detecting element 16. No pressure can be detected accurately.

On the other hand, the shape, position, and number of the crack preventing protrusions 70 can be appropriately changed in the side wall 58 of the lid member 54.

12 and 13, the lower end 58a of the side wall 58 of the lid member 54 is formed in a portion that abuts the upper side wall 46 of the terminal block 38, thereby sealing. The generation | occurrence | production of the crack K which arises in the circumferential direction toward upper direction is suppressed from the upper end vicinity of the part peeled between the resin part 68 and the terminal block 38. As shown in FIG.

Moreover, even if the crack K generate | occur | produces, since it is excellent in the effect which the crack K contacts the crack prevention protrusion 70, and the crack K does not progress further, it is preferable.

In addition, as shown in FIG. 13, the protrusion distance T1 from the side wall 58 of the cover member 54 of the crack prevention protrusion 70 is not specifically limited, The crack generation suppression effect and the crack propagation prevention effect mentioned above are not specifically limited. In addition, in consideration of the distance between the side wall 58 of the lid member 54 and the inner wall 66a of the cover member 66, the sealing resin portion 68 may be changed as appropriate to facilitate sealing.

In addition, as shown in FIG. 13, the thickness T2 of the crack prevention protrusion 70 is not specifically limited, It changes suitably in consideration of the strength of the crack prevention protrusion 70, the sealing amount of the sealing resin part 68, etc. Just do it.

By configuring in this way, since the crack prevention protrusion 70 protrudes in the circumferential direction to the side wall 58 of the cover member 54, even if it receives a thermal stress repeatedly in the range of -40 degreeC from 100 degreeC, for example. The occurrence of the crack K occurring in the circumferential direction from the vicinity of the upper end of the part peeled off between the sealing resin portion 68 and the terminal block 38 upward is suppressed, and even if the crack K occurs, the crack ( K) abuts against the crack preventing protrusion 70 and no further crack K proceeds.

On the other hand, in the present embodiment, although the crack preventing protrusion 70 is formed by protruding the pressure sensor 10 of the present invention according to the second embodiment shown in Figs. 7 and 8, the first embodiment shown in Figs. Of course, it is also possible to protrude the crack preventing protrusion 70 from the pressure sensor 10 of the.

In addition, in this embodiment, like the pressure sensor 10 of this invention shown to FIG. 1 thru | or 8, the crack prevention protrusion 70 itself can also be comprised as the lead wire fixing part 60. FIG. On the other hand, of course, in addition to configuring the crack preventing protrusion 70 itself as the lead wire fixing portion 60, it is also possible to separately form the lead wire fixing portion 60 to protrude outward on the side wall 58 of the cover member 54. It is possible.

In the above, preferable embodiment of this invention was described. However, the present invention is not limited to this. For example, in the above embodiment, the terminal block 38 and the cover member 54 are different members, but the terminal block 38 and the cover member 54 are integrally formed. In addition, various changes are possible in the range which does not deviate from the objective of this invention.

The present invention can be applied to a liquid-sealed pressure sensor and a manufacturing method of the pressure sensor.

10, 100, 200 pressure sensor
12 Euro
14, 104, 204 joint member
14a flange
16, 102, 202 pressure detection element
18, 108 element body
18a side
20, 110 center opening
22, 112 Hermetic Glass
24, 114, 208 Diaphragm
26, 116 communicators
28, 118 Diaphragm Protective Cover
30, 120 liquid sealed chamber
32, 124, 210 sensor chip
34, 126, 214 lead pins
34a, 136 tip
36, 128 wire
38 terminal blocks
40, 148 pressure chamber
42 terminal fixing wall
42a insertion hole
44 Down Sidewall
46 upper sidewalls
48 terminals
48a outer end
50 mating steps
52, 64 connections
54 lid member
54a surface
56 upper plate
58 sidewalls
58a bottom
60 lead wire fixing part
60a ~ 60c fixing part incision groove
60d top
60e
62, 62a-62c, 132, 218 External lead wire
66, 106, 206 cover member
66a base
66b opening
66c inner wall
68, 68b sealing resin part
68a top
70 Crack Proof Projection
130 Oil Filling Pipe
131 Contact Pins
134 Flexible Printed Circuit (FPC)
138 Cover
140 caulking plate
142 sealant
144 niches
146 passage
150 Sealing Material (Mold Resin)
212 wire bonding
216 boards
220 cover
222, 224 sealing resin
K crack
P1, P2, P3 adhesive strength
S1 first space
S2 second space
S3 gap
S4 space

Claims (18)

A joint member having a flow path formed therein,
A pressure detecting element fixed to the joint member and arranged to face the flow path of the joint member for detecting a pressure of the fluid in the flow path;
And a cover member mounted from the joint member side, the one end being opened, and the other proximal end contacting the joint member. The method of claim 1,
A space forming member disposed to form a space covering the pressure detecting element;
A pressure sensor comprising an encapsulating resin portion filled in a gap formed inside the cover member to form an adhesive on the outside of the space forming member. 3. The method of claim 2,
The said space formation member is comprised from a 1st space formation member and the 2nd space formation member arrange | positioned above the said 1st space formation member, The pressure sensor characterized by the above-mentioned. The method of claim 3,
A first space forming member disposed adjacent to the pressure detecting element for supporting a terminal connected to the lead pin and the external lead of the pressure detecting element;
And a second space forming member disposed adjacent to the first space forming member so as to form a space covering the pressure detecting element together with the first space forming member. 5. The method according to any one of claims 2 to 4,
And a connecting portion of the terminal connected to the lead pin of the pressure detecting element and the external lead wire is formed by the space forming member so as to be located in the space not filled with the sealing resin. The method of claim 3,
The adhesive strength between the sealing resin portion and the first space forming member is smaller than the adhesive strength between the sealing resin portion and the pressure detecting element. The method of claim 3,
The adhesive strength between the sealing resin portion and the first space forming member is smaller than the adhesive strength between the sealing resin portion and the second space forming member. The method of claim 1,
A space is formed between the side of the pressure detecting element and the inner wall of the cover member,
The pressure sensor characterized in that the sealing resin in which the sealing resin is introduced into the space is formed. The method of claim 3,
Pressure sensor, characterized in that formed on the side wall of the second space forming member to protrude a crack prevention projection in the outer circumferential direction. Fixing the pressure detecting element to the joint member so as to face the flow path formed in the joint member to detect the pressure of the fluid in the flow passage formed in the joint member;
And a step of attaching a cover member in which one side is opened and the other proximal end abuts against the joint member from the joint member side. The method of claim 10,
Arranging a space forming member so as to form a space covering the pressure detecting element;
And a step of filling a sealing resin constituting an adhesive with a gap formed inside the cover member outside the space forming member to form a sealing resin portion. 12. The method of claim 11,
The said space formation member is comprised from a 1st space formation member and the 2nd space formation member arrange | positioned above the said 1st space formation member, The manufacturing method of the pressure sensor characterized by the above-mentioned. The method of claim 12,
Arranging a first space forming member adjacent to the pressure detecting element to support a terminal connected to the lead pin and the external lead of the pressure detecting element;
And arranging a second space forming member adjacent to the first space forming member so as to form a space covering the pressure detecting element together with the first space forming member. 14. The method according to any one of claims 11 to 13,
And a connecting portion of the terminal connected to the lead pin of the pressure detecting element and the external lead wire to be positioned by the space forming member so as to be located in the space not filled with the sealing resin. Manufacturing method. The method of claim 12,
The adhesive strength between the sealing resin portion and the first space forming member is smaller than the adhesive strength between the sealing resin portion and the pressure detecting element. The method of claim 12,
Adhesive strength between the said sealing resin part and a 1st space formation member is smaller than adhesive strength between the said sealing resin part and a 2nd space formation member, The manufacturing method of the pressure sensor characterized by the above-mentioned. The method of claim 10,
A space is formed between the side of the pressure detecting element and the inner wall of the cover member,
The manufacturing method of the pressure sensor characterized by the above-mentioned space, the sealing resin part in which the sealing resin part flowed in is formed. The method of claim 12,
A method of manufacturing a pressure sensor, wherein the crack preventing protrusion is formed on the sidewall of the second space forming member in a circumferential direction.

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