CN216899394U

CN216899394U - Same-cavity oil-filled type double-chip pressure sensor

Info

Publication number: CN216899394U
Application number: CN202220533962.3U
Authority: CN
Inventors: 常勋; 郑乐和; 李旭春; 杨亮
Original assignee: TIANSHUI HUATIAN SENSOR CO Ltd
Current assignee: TIANSHUI HUATIAN SENSOR CO Ltd
Priority date: 2022-03-11
Filing date: 2022-03-11
Publication date: 2022-07-05
Anticipated expiration: 2032-03-11

Abstract

A same-cavity oil-filled type double-chip pressure sensor comprises a metal shell, wherein grooves are respectively formed in the upper side surface and the lower side surface of the metal shell to serve as a first accommodating cavity and a second accommodating cavity, insulating liquid is filled in the first accommodating cavity, an insulating base is installed on the first accommodating cavity, a first groove and a second groove are formed in the insulating base, a pressure chip used for detecting the pressure of the insulating liquid is installed in the first groove, and a conditioning chip which is electrically connected with the pressure chip and used for processing pressure signals of the insulating liquid is installed in the second groove; the first opening part that holds the chamber is installed and is used for transmitting the pressure sensing diaphragm for inside insulating liquid with external force, and the second holds the intracavity and installs integrated passive component's compensating plate, and compensating plate and regulation chip pass through external terminal and connect external circuit. The utility model simplifies the structure of the pressure sensor, reduces the cost of the pressure sensor, reduces the production procedures, reduces the temperature response time of the pressure sensor and improves the stability of the pressure sensor.

Description

Same-cavity oil-filled type double-chip pressure sensor

Technical Field

The utility model relates to the field of pressure sensors, in particular to a same-cavity oil-filled type double-chip pressure sensor.

Background

A conventional oil-filled pressure sensor typically includes a metal housing, a fill fluid, a pressure sensing diaphragm, a pressure chip, and a conditioning chip. Because the pressure chip is embedded on the ceramic base, and the conditioning chip is welded on the external compensation plate and clings to the bottom surface of the second accommodating cavity of the shell, the technical structure is complex, the temperature response time is long, the production consumes labor hours, and the stability is poor.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solve the above problems in the prior art, and an object of the present invention is to provide a co-cavity oil-filled dual-chip pressure sensor, which can simplify the structure of the pressure sensor, reduce the cost of the pressure sensor, reduce the production processes, reduce the temperature response time of the pressure sensor, and improve the stability of the pressure sensor.

In order to achieve the purpose, the utility model has the following technical scheme:

the oil-filled double-chip pressure sensor comprises a metal shell, wherein grooves are respectively formed in the upper side surface and the lower side surface of the metal shell to serve as a first accommodating cavity and a second accommodating cavity, insulating liquid is filled in the first accommodating cavity, an insulating base is installed on the first accommodating cavity, a first groove and a second groove are formed in the insulating base, a pressure chip used for detecting the pressure of the insulating liquid is installed in the first groove, and a conditioning chip which is electrically connected with the pressure chip and used for processing pressure signals of the insulating liquid is installed in the second groove; the first opening part that holds the chamber is installed and is used for transmitting external force for the pressure sensing diaphragm of inside insulating liquid, and the second holds the intracavity and installs integrated passive component's compensating plate, and compensating plate and conditioning chip pass through external terminal and connect external circuit.

Preferably, the insulating base is a ceramic base, and the insulating liquid filled in the first accommodating cavity is silicone oil.

Preferably, the conditioning chip and the pressure chip are electrically connected through a conductive gold wire.

As preferred, metal casing run through first chamber and the second of holding and hold the chamber and offer the exhaust hole that is used for discharging the bubble, the exhaust hole is located pressure chip's below, and the exhaust hole switches on through blast pipe and external world.

Preferably, the metal shell penetrates through the first accommodating cavity and the second accommodating cavity and is provided with a through hole used for leading out the external terminal, and a glass blank wrapping the external terminal is arranged at the through hole.

Preferably, the metal shell penetrates through the first accommodating cavity and the second accommodating cavity to be provided with filling holes, and the insulating liquid is filled into the first accommodating cavity through the filling holes.

Preferably, the filling hole is sealed by a rigid sealing ball.

Preferably, the second accommodating cavity is filled with pouring sealant to cover the compensation plate.

Preferably, the pressure chip, the conditioning chip and the external terminal are coplanar with one end of the conditioning chip.

Compared with the prior art, the utility model has the following beneficial effects:

the utility model has the advantages that the upper side surface and the lower side surface of the metal shell are respectively provided with the grooves to form the first containing cavity for filling liquid and installing the functional module and the second containing cavity for installing the external compensation plate, the insulating base arranged in the first containing cavity is provided with the first groove and the second groove, the pressure chip is embedded in the first groove, the conditioning chip is embedded in the second groove and is electrically connected with the pressure chip, and the conditioning chip and the ceramic base form an independent functional module.

Furthermore, the insulating base adopts a ceramic base, the liquid filled in the first accommodating cavity is insulating liquid, such as silicon oil, so that the pressure chip, the conditioning chip and one end of the external terminal connected with the conditioning chip are coplanar, the conditioning chip and the pressure chip are electrically connected through conductive gold wires, and the oil-filled double-chip packaging in the same cavity is realized by utilizing a bonding technology.

Drawings

FIG. 1 is a schematic diagram of a half-section structure of an oil-filled dual-chip pressure sensor with the same cavity according to the present invention;

FIG. 2 is a three-dimensional partial cross-sectional view of the same-cavity oil-filled dual-chip pressure sensor of the present invention;

FIG. 3 is a top view of the same cavity oil filled dual chip pressure sensor of the present invention;

FIG. 4 is a bottom view of the same cavity oil filled dual chip pressure sensor of the present invention;

in the drawings: the manufacturing method comprises the following steps of 1-a metal shell, 1 a-a first containing cavity, 1 b-a second containing cavity, 2-an insulating base, 2 a-a first groove, 2 b-a second groove, 3-a pressure chip, 4-a conditioning chip, 5-a pressure sensing film, 6-an exhaust hole, 7-a glass blank, 8-a filling hole, 9-an external terminal, 10-insulating liquid, 11-pouring sealant, 12-a compensation plate, 13-a conductive gold wire and 14-a sealing ball.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples.

Referring to fig. 1-2, the oil-filled dual-chip pressure sensor provided by the utility model comprises a metal shell 1, an insulating base 2, a pressure chip 3, a conditioning chip 4, a pressure sensing film 5, a glass blank 7, an external terminal 9, an insulating liquid 10, a pouring sealant 11, a compensation plate 12, a conductive gold wire 13 and a sealing ball 14. Wherein, a first containing cavity 1a for filling insulating liquid 10 and installing functional modules and a second containing cavity 1b for installing an external compensation plate are formed on the metal shell 1. The insulating base 2 is formed with a first recess 2a capable of mounting the pressure chip 3 and a second recess 2b capable of mounting the conditioning chip 4. The pressure chip 3 is embedded in the first groove 2a of the insulating base 2 and used for checking the liquid pressure in the first accommodating cavity 1 a; the conditioning chip 4 is embedded in the second groove 2b of the insulating base 2 and is used for processing the liquid pressure signal detected by the pressure chip 3. The pressure chip 3 is connected with the conditioning chip 4 through a conductive gold wire 13. The pressure-sensitive film 5 is welded to the opening of the first containing chamber 1a, and an external medium force can be transmitted to the liquid in the first containing chamber 1a through the pressure-sensitive film 5. It has exhaust hole 6 to open on metal casing 1, and this exhaust hole 6 leads to with the external world through the blast pipe, and exhaust hole 6 link up first chamber 1a and the second chamber 1b that holds to prevent to hold at first chamber 1a and the second and hold the chamber 1b in the bubble production. The external connection terminal 9 is hermetically fitted and fixed into the metal case 1 by the sintered glass blank 7, and the other end of the external connection terminal 9 protrudes from the metal case 1. The metal case 1 of the present invention is further formed with a filling hole 8, and the filling hole 8 penetrates the first accommodating chamber 1a and the second accommodating chamber 1b, so that the first accommodating chamber 1a can be filled with liquid through the filling hole 8. The insulating liquid 10 is filled in the first accommodation chamber 1a of the metal case 1, and may be silicon oil or the like. The second receiving cavity 1b is filled with a potting adhesive 11 to protect the compensation plate 12 embedded in the second receiving cavity 1 b. The compensation plate 12 is typically a PCB board for integrating passive components. The filling hole 8 is sealed by a rigid sealing ball 14, the sealing ball 14 being made of a corrosion-resistant metal to prevent corrosion by the filling insulating liquid 10.

In the illustrated embodiment of the present invention, the bottom surface of the pressure chip 3 is attached and fixed to the bottom surface of the first receiving chamber 1a by high temperature epoxy glue. The bottom surface of the conditioning chip 4 is connected and fixed to the bottom surface of the second receiving chamber 1b by silicone rubber.

Referring to fig. 3-4, the utility model makes the pressure chip 3, the conditioning chip 4 and the external terminal 9 coplanar through the insulating base 2, and realizes the same-cavity oil-filled double-chip packaging by using the conductive gold wire 13 and adopting the bonding technology. The metal shell 1 forms a filling hole 8, penetrates through the first accommodating cavity 1a and the second accommodating cavity 1b, so that the insulating liquid 10 can be filled into the first accommodating cavity 1a through the filling hole 8, the filling hole 8 is sealed by using a rigid sealing ball 14, and the whole assembly is completed after the filling is finished.

In an alternative embodiment, the first groove 2a formed on the insulating base 2 is square, the first groove 2a is rectangular, and the first groove 2a and the second groove 2b formed on the insulating base 2 are at an angle of 30 ° with respect to each other.

Therefore, the utility model simplifies the structure of the pressure sensor, reduces the cost of the pressure sensor, reduces the production procedures, reduces the temperature response time of the pressure sensor and improves the stability of the pressure sensor.

The assembly process of the same-cavity oil-filled type double-chip pressure sensor comprises the following steps:

1. the insulating base 2 is embedded in the first accommodating cavity 1a of the metal shell 1;

2. the pressure chip 3 is embedded in the first groove 2a of the insulating base 2;

3. the conditioning chip 4 is embedded in the second groove 2b of the insulating base 2;

4. the pressure chip 3, the conditioning chip 4 and the external terminal 9 are coplanar, and the conductive gold wire 13 is used for realizing double-chip packaging by adopting a bonding technology;

5. welding a pressure sensing diaphragm 5 on the opening of the first containing cavity 1a by a welding technology, and transmitting the external medium pressure to the liquid in the first containing cavity 1a through the pressure sensing diaphragm 5;

6. a filling hole 8 is formed in the metal case 1 to penetrate the second accommodating chamber 1b and the first accommodating chamber 1 a. Filling liquid 10 is injected into the first accommodating cavity 1a through the filling hole 8, and the pressure chip 3 and the conditioning chip 4 are immersed;

7. embedding a compensation plate 12 of an external circuit in the second accommodating cavity 1 b;

8. the second accommodating cavity 1b is filled with a potting adhesive 11, which plays the roles of insulation, dust prevention and protection of the external compensation plate 12.

9. The fill hole 8 is sealed by a rigid sealing ball 14.

The above-mentioned embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, and it will be apparent to those skilled in the art that the technical solutions can be modified and replaced easily without departing from the spirit and principle of the present invention, and the modifications and the replacements also fall within the protection scope covered by the claims.

Claims

1. The oil-filled type double-chip pressure sensor is characterized by comprising a metal shell (1), wherein grooves are respectively formed in the upper side surface and the lower side surface of the metal shell (1) and serve as a first containing cavity (1a) and a second containing cavity (1b), insulating liquid (10) is filled in the first containing cavity (1a) and an insulating base (2) is installed, a first groove (2a) and a second groove (2b) are formed in the insulating base (2), a pressure chip (3) used for detecting the pressure of the insulating liquid (10) is installed in the first groove (2a), and a conditioning chip (4) which is electrically connected with the pressure chip (3) and used for processing the pressure signal of the insulating liquid (10) is installed in the second groove (2 b); the opening part of the first accommodating cavity (1a) is provided with a pressure sensing film (5) for transmitting external force to the internal insulating liquid (10), the second accommodating cavity (1b) is internally provided with a compensating plate (12) of an integrated passive element, and the compensating plate (12) and the conditioning chip (4) are connected with an external circuit through an external terminal (9).

2. The co-cavity oil-filled dual-chip pressure sensor according to claim 1, wherein the insulating base (2) is a ceramic base, and the insulating liquid (10) filled in the first accommodating cavity (1a) is silicone oil.

3. The same-cavity oil-filled type dual-chip pressure sensor according to claim 1, wherein the conditioning chip (4) and the pressure chip (3) are electrically connected through a conductive gold wire (13).

4. The co-cavity oil-filled type dual-chip pressure sensor according to claim 1, wherein the metal shell (1) penetrates through the first accommodating cavity (1a) and the second accommodating cavity (1b) and is provided with an exhaust hole (6) for exhausting bubbles, the exhaust hole (6) is located below the pressure chip (3), and the exhaust hole (6) is communicated with the outside through an exhaust pipe.

5. The co-cavity oil-filled type dual-chip pressure sensor according to claim 1, wherein the metal shell (1) penetrates through the first accommodating cavity (1a) and the second accommodating cavity (1b) to form a through hole for leading out the external terminal (9), and a glass blank (7) wrapping the external terminal (9) is arranged at the through hole.

6. The co-cavity oil-filled dual-chip pressure sensor according to claim 1, wherein the metal shell (1) penetrates through the first accommodating cavity (1a) and the second accommodating cavity (1b) to form a filling hole (8), and the insulating liquid (10) is filled into the first accommodating cavity (1a) through the filling hole (8).

7. The co-chamber oil-filled dual-chip pressure sensor according to claim 6, wherein the fill hole (8) is sealed by a rigid sealing ball (14).

8. The same-cavity oil-filled dual-chip pressure sensor as in claim 1, wherein the second receiving cavity (1b) is filled with a pouring sealant (11) covering the compensation plate (12).

9. The co-cavity oil-filled dual-chip pressure sensor according to claim 1, wherein the pressure chip (3), the conditioning chip (4) and the external terminal (9) are coplanar with one end of the conditioning chip (4) connected thereto.