KR20130125703A - 스크루 진공 펌프 - Google Patents

스크루 진공 펌프 Download PDF

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Publication number
KR20130125703A
KR20130125703A KR1020127030638A KR20127030638A KR20130125703A KR 20130125703 A KR20130125703 A KR 20130125703A KR 1020127030638 A KR1020127030638 A KR 1020127030638A KR 20127030638 A KR20127030638 A KR 20127030638A KR 20130125703 A KR20130125703 A KR 20130125703A
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KR
South Korea
Prior art keywords
rotor
screw
male
female
lead
Prior art date
Application number
KR1020127030638A
Other languages
English (en)
Korean (ko)
Inventor
다다히로 오미
이사오 아쿠츠
Original Assignee
고쿠리츠다이가쿠호진 도호쿠다이가쿠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고쿠리츠다이가쿠호진 도호쿠다이가쿠 filed Critical 고쿠리츠다이가쿠호진 도호쿠다이가쿠
Publication of KR20130125703A publication Critical patent/KR20130125703A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1020127030638A 2010-05-24 2011-05-13 스크루 진공 펌프 KR20130125703A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2010-118315 2010-05-24
JP2010118315 2010-05-24
PCT/JP2011/061077 WO2011148797A1 (ja) 2010-05-24 2011-05-13 スクリュー真空ポンプ

Publications (1)

Publication Number Publication Date
KR20130125703A true KR20130125703A (ko) 2013-11-19

Family

ID=45003789

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127030638A KR20130125703A (ko) 2010-05-24 2011-05-13 스크루 진공 펌프

Country Status (5)

Country Link
US (1) US20130058823A1 (de)
JP (1) JPWO2011148797A1 (de)
KR (1) KR20130125703A (de)
DE (1) DE112011101773T5 (de)
WO (1) WO2011148797A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101712962B1 (ko) * 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6155423B2 (ja) * 2013-12-02 2017-07-05 株式会社飯塚鉄工所 スクリュー真空ポンプ
WO2015083195A1 (ja) * 2013-12-02 2015-06-11 株式会社飯塚鉄工所 スクリュー真空ポンプ
JPWO2015128906A1 (ja) * 2014-02-28 2017-03-30 国立大学法人東北大学 スクリュー排気ポンプ用のオイル供給部品及びその部品を備えたスクリュー排気ポンプ
WO2019210053A1 (en) * 2018-04-27 2019-10-31 Carrier Corporation Screw compressor with external motor rotor
CN112943603B (zh) * 2021-01-27 2022-12-02 宁波市润桥工业设计有限公司 一种充排可控的螺杆泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01267384A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd 勾配歯を有するスクリューロータ
JPH02283898A (ja) * 1989-04-21 1990-11-21 Hitachi Koki Co Ltd ねじ溝分子ポンプ
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH08100779A (ja) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd 真空ポンプ
JP2004263629A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi スクリュー真空ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101712962B1 (ko) * 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프
WO2017052114A1 (ko) * 2015-09-24 2017-03-30 이인철 냉각장치를 갖춘 진공펌프
US10690135B2 (en) 2015-09-24 2020-06-23 In Cheol Lee Vacuum pump with cooling apparatus

Also Published As

Publication number Publication date
US20130058823A1 (en) 2013-03-07
DE112011101773T5 (de) 2013-03-14
WO2011148797A1 (ja) 2011-12-01
JPWO2011148797A1 (ja) 2013-07-25

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