KR20130076014A - Apparatus and method of suppling trays - Google Patents

Apparatus and method of suppling trays Download PDF

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Publication number
KR20130076014A
KR20130076014A KR1020110144394A KR20110144394A KR20130076014A KR 20130076014 A KR20130076014 A KR 20130076014A KR 1020110144394 A KR1020110144394 A KR 1020110144394A KR 20110144394 A KR20110144394 A KR 20110144394A KR 20130076014 A KR20130076014 A KR 20130076014A
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KR
South Korea
Prior art keywords
trays
unit
tray
front surface
picker
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Application number
KR1020110144394A
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Korean (ko)
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KR101411163B1 (en
Inventor
여형빈
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세메스 주식회사
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Priority to KR1020110144394A priority Critical patent/KR101411163B1/en
Publication of KR20130076014A publication Critical patent/KR20130076014A/en
Application granted granted Critical
Publication of KR101411163B1 publication Critical patent/KR101411163B1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/02Devices for feeding articles or materials to conveyors
    • B65G47/04Devices for feeding articles or materials to conveyors for feeding articles
    • B65G47/06Devices for feeding articles or materials to conveyors for feeding articles from a single group of articles arranged in orderly pattern, e.g. workpieces in magazines
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • Y10S414/137Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)

Abstract

The tray feeding device has an internal space for accommodating a plurality of trays and includes a receiving portion having an opened upper surface and a receiving surface, a tray supporting portion for receiving the trays of the receiving portion, And a buffer portion for supporting the trays so that the picker can pick up the trays without waiting time while the lifting portion descends to accommodate new trays into the receiving portion. Therefore, the picker can continuously pick up the trays, so that the productivity of the tray feeding apparatus can be improved.

Description

[0001] Apparatus and method for supplying trays [0002]

The present invention relates to a tray feeding apparatus and method, and more particularly, to a tray feeding apparatus and method for feeding a tray for receiving a sown semiconductor package.

Generally, a semiconductor package is manufactured by attaching a semiconductor chip on a semiconductor substrate so as to be electrically connected to each other, and molding the semiconductor substrate with an epoxy resin on the upper surface.

The semiconductor package manufactured as described above is subjected to a singulation process in which the packages connected to each other are cut by the lead frame and the single package cut out after the singulation process is processed according to a preset quality standard Loaded on a tray and moved for the next process.

The trays for loading the single package are supplied by a tray feeder. The tray supply device accommodates the trays and raises them so that the pickers can sequentially transport the trays. However, when the pickers all carry the trays stored in the tray supply device, new trays are supplied to the tray supply device. While the new trays are being supplied, the pickers can not transport the trays and thus remain in a standby state. Further, since the worker manually supplies the trays to the tray supply device, it takes a lot of time to supply the tray. Therefore, the waiting time of the picker is prolonged, so that the productivity of the tray feeding process may be reduced.

The present invention provides a tray feeding apparatus for feeding a tray so that a picker can transport the tray without waiting time.

The present invention provides a tray feeding method using the tray feeding apparatus.

The tray supply device according to the present invention includes an accommodating portion having an inner space for accommodating a plurality of trays and having an upper surface and a front surface opened, a support portion for supporting the trays of the accommodating portion, and a picker for picking up the trays through the upper surface A buffer for supporting the trays so that the picker can pick up the trays without waiting time while the lifting unit descends to accommodate new trays into the storage unit Section.

According to an embodiment of the present invention, the tray supply device may further include a transfer unit for transferring the trays to the inside of the storage unit through the front surface of the storage unit.

According to one embodiment of the present invention, the tray supply device is disposed on both sides of the storage part, and while the trays are supplied into the storage part, the front surface is opened and the supply of the trays into the storage part Closing the front surface to prevent the tray from being detached from the inside when the tray is completed.

According to an embodiment of the present invention, the tray supply device may further include a sensing unit connected to the storage unit and sensing a height of the elevating unit.

The tray supplying method according to the present invention includes the steps of feeding trays through the front surface to the inside of a receiving portion having an open top and a top surface, and raising and lowering the tray so that the picker can pick up the trays through the top surface. Supporting the trays with the buffer unit so that the picker can pick up the trays without waiting time when the ascending / descending unit reaches a predetermined height; and raising / lowering the elevating / lowering unit to accommodate new trays into the receiving unit .

According to an embodiment of the present invention, the upper limit and the lower limit of the lifting unit can be sensed using the sensing unit.

According to an embodiment of the present invention, in the step of supplying the trays to the inside of the receiving part, the opening and closing part opens the front surface, the elevating part raises the trays, supporting the trays with the buffer part, In the descending step, the opening / closing part may block the front surface to prevent the trays from being separated from the inside of the storage part.

The tray feeding apparatus and method according to the present invention can support existing trays while the new trays are being fed to the receiving section. Therefore, the picker can continuously transport the tray without waiting time.

In addition, since the conveying section supplies the trays to the receiving section, the trays can be supplied quickly and stably.

1 is a front view for explaining a tray feeding apparatus according to an embodiment of the present invention.
2 is a side view for explaining the tray feeding apparatus shown in FIG.
3 to 6 are front views for explaining a tray feeding method using the tray feeding apparatus shown in FIG.

Hereinafter, with reference to the accompanying drawings will be described in detail a tray supply apparatus and method according to an embodiment of the present invention. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

FIG. 1 is a front view for explaining a tray feeding apparatus according to an embodiment of the present invention, and FIG. 2 is a side view for explaining the tray feeding apparatus shown in FIG.

1 and 2, the tray supply apparatus 100 is for supplying trays to transport trays to a place where a picker (not shown) accommodates semiconductor packages, and includes a receiving unit 110, And includes a lifting unit 120, a buffer unit 130, a transfer unit 140, an opening / closing unit 150, and a sensing unit 160.

The storage unit 110 has an inner space for accommodating a plurality of trays (not shown). The trays may be stacked vertically in the interior space. For example, the receiving portion 110 may have a hexahedral shape having an internal space. At least the upper surface and the front surface of the receiving portion 110 are opened. The trays may be supplied to the inner space of the storage unit 110 through the opened front surface of the storage unit 110. [ The trays can be picked up by the picker through the open upper surface of the storage part 110. [

The storage unit 110 may further include a cover 111. [ The cover 111 is provided at the top of the open front of the storage unit 110 and supports the trays located at the top of the storage unit 110. Therefore, the cover 111 prevents the trays located at the upper end of the receiving part 110 from being separated from the receiving part 110.

The receiving portion 110 has a pair of grooves 112 at the upper end portions of both sides thereof. The picker can easily pick up the trays of the storage unit 110 through the grooves 112. [

The elevating part 120 supports the trays of the receiving part 110 and raises the trays so that the picker can pick up the trays through the upper surface.

The lifting unit 120 includes support bars 121, a guide member 122, a connection plate 123, and a first driver 124.

The support bars 121 support the trays. For example, the support bars 121 support the lower surface of the lowermost tray among the trays vertically stacked in the internal space of the storage unit 110. [ At least four support bars 121 may be provided to stably support the trays. For example, four support bars 121 may be provided to support the four corners of the lowermost tray.

The supporting bars 121 may extend in the vertical direction and penetrate the lower surface of the receiving part 110. [ The support bars 121 are movable in the vertical direction, i.e., up and down.

The guide member 122 is provided on the lower surface of the storage unit 110 and guides the movement of the support bars 121 in the vertical direction. Therefore, the support bars 121 can move up and down stably.

The connecting plate 123 is disposed below the receiving part 110 and connects the supporting bars 121. For example, the support bars 121 are connected to the upper surface of the connection plate 123.

The first driver 124 is provided on the lower surface of the storage part 110 to move the support bars 121 up and down. For example, the first driver 124 is connected to the connection plate 123. When the first actuator 124 moves the connection plate 123 up and down, the support bars 121 connected to the connection plate 123 also move up and down. Examples of the first actuator 124 include a cylinder, a ball screw, and a linear motor.

As described above, the elevating unit 120 stably supports the trays of the receiving unit 110 with the supporting bars 121, and can stably raise the trays sequentially to a height at which the pickers can pick them up have.

The buffer unit 130 is provided on both sides of the storage unit 110 and is positioned lower than a height at which the picker can pick up the buffer unit. For example, the buffer unit 130 may be disposed in each of the grooves 112 of the storage unit 110.

The buffer unit 130 may selectively support the trays. For example, the buffer unit 130 may be hinged to the storage unit 110 so as to protrude toward the inside of the storage unit 110. The buffer unit 130 maintains the horizontal state and the buffer unit 130 is pushed up by the trays by the force of the lifting unit 120 to raise the trays so that the horizontal state can be released have. When the lowermost tray rises to the buffer unit 130, the buffer unit 130 is removed due to the force of the trays pushing up the buffer unit 130, so that the buffer unit 130 maintains a plurality of horizontal states Thereby supporting the trays.

As another example, the buffer unit 130 may include a horizontal plate and a driver for horizontally moving the horizontal plate. The horizontal plate is not protruded toward the inside of the storage unit 110 until the lowermost tray rises to the buffer unit 130. When the lowermost tray rises to the buffer unit 130, A horizontal plate protrudes toward the inside of the receiving part 110 to support the trays.

The buffer unit 130 may support a plurality of trays by a height from the upper surface of the buffer unit 130 to the upper end of the storage unit 110. Therefore, the picker can pick up the trays supported by the buffer unit 130 without waiting time while the lifting unit 120 descends to accommodate new trays into the storage unit 110. [ However, since the buffer unit 130 does not lift the trays but only raises the trays, the picker must descend gradually to pick up the tray.

The transfer unit 140 is disposed on the inner bottom surface of the storage unit 110 and transfers the vertically stacked trays to the storage unit 110 through the front surface. The conveying unit 140 may include a conveyor belt 141 and a second driver 142.

The conveyor belt 141 is horizontally disposed on the inner bottom surface of the storage unit 110 and projects to the front surface of the storage unit 110. The pair of conveyor belts 141 may be disposed between the supporting bars 121 to prevent interference with the supporting bars 121 of the elevating part 120. [ A plurality of rollers other than the conveyor belt 141 may be provided. The trays stacked in the vertical direction are placed on the conveyor belt 141 outside the receiving part 110 and the trays can be conveyed to the inside of the receiving part 110 as the conveyor belt 141 rotates have.

The second driver 142 provides a driving force for rotating the conveyor belt 141. An example of the second driver 142 is a motor.

The transfer unit 140 can automatically transfer the trays to the inside of the storage unit 110 without an operator, so that the tray can be transferred quickly and stably.

The opening and closing part 150 selectively opens and closes the front surface of the storage part 110 and includes a pair of shutters 151 and third drivers 152 for moving the shutters 151 do.

The shutters 151 are disposed adjacent to the front surface on both sides of the receiving part 110 and extend in the vertical direction. At this time, the shutters 151 may be positioned between the height of the transfer unit 140 and the height of the cover 111. [ The shutters 151 can move between the front surface of the storage unit 110 and the both side surfaces. The shutters 151 open the front surface while the trays are supplied to the inside of the receiving part 110 and the trays are released from the inside when the feeding of the trays to the inside of the receiving part 110 is completed The front surface is cut off.

The third actuators 152 are provided on both sides of the storage part 110 and move the shutters 151 between the front surface of the storage part 110 and the both side surfaces.

Therefore, the opening / closing part 150 and the cover 111 prevent the trays in the receiving part 110 from being separated from the receiving part 110. [

The sensing unit 160 senses the height of the elevating unit 120 and includes a fixing member 161, a first sensor 162 and a second sensor 163.

The fixing member 161 is provided to extend in a direction perpendicular to the lower surface of the receiving part 110.

The first sensor 162 and the second sensor 163 are provided at the upper end and the lower end of the fixing member 161 and are connected to the elevating portion 120, 123). The first sensor 162 senses an upper limit of the lifting unit 120 and the second sensor 163 senses a lower limit of the lifting unit 120. [ For example, when the first sensor 162 detects the connection plate 123, an upper end of the support bars 131 is the same height as the upper surface of the buffer unit 130 or the buffer unit 130. It may be slightly higher than the top of. When the second sensor 163 detects the connection plate 123, an upper end of the support bars 131 is positioned at the same height as the upper surface of the transfer unit 140 or slightly lower than an upper surface of the transfer unit 140. can do.

Therefore, the ascending and descending range of the lifting unit 120 can be accurately confirmed using the sensing unit 160. [ Therefore, it is possible to prevent the lifting unit 120 from being raised or lowered excessively.

The tray feeding apparatus 100 can quickly and stably supply the trays so that the picker can continuously convey the trays without waiting time.

3 to 6 are front views for explaining a tray feeding method using the tray feeding apparatus shown in FIG.

Referring to FIG. 3, the elevation part 120 is lowered so that the second sensor 163 detects the connection plate 123. Therefore, the upper ends of the support bars 131 may be positioned at the same height as the upper surface of the transfer unit 140 or slightly lower than the upper surface of the transfer unit 140.

Further, the shutters 151 are moved to both sides of the storage unit 110 so that the opening / closing unit 150 opens the front surface of the storage unit 110.

The trays stacked in the vertical direction are transported from the outside of the storage unit 110 to the transport unit 140 in a state in which the lifting unit 120 descends and the opening and closing unit 150 opens the front surface of the storage unit 110. [ The conveyor belts 141 are rotated so that the trays can be transferred to the inside of the receiving part 110 from the front surface of the receiving part 110. [ The transfer unit 140 can automatically transfer the trays to the inside of the storage unit 110 without an operator, so that the tray can be transferred quickly and stably.

4, when the trays are transported to the inside of the storage unit 110, the shutters 151 are moved to the front surface of the storage unit 110 so that the opening and closing unit 150 is moved to the storage unit 110, The front surface of the main body is cut off. Therefore, it is possible to prevent the trays in the storage unit 110 from being separated from the front surface of the storage unit 110.

Then, the lift unit 120 sequentially raises the trays in the storage unit 110 so that the picker can pick up the uppermost tray through the upper surface of the storage unit 110. At this time, the buffer unit 130 is pushed up by the trays by the force of the lifting unit 120 to raise the trays to release the horizontal state, or the horizontal plate of the buffer unit 130 It is possible to maintain a state in which it is not protruded toward the inside of the accommodating portion 110. [

Referring to FIG. 5, the first sensor 162 raises the elevation portion 120 to sense the connection plate 123. Therefore, the lifting unit 120 is positioned at a constant height, that is, the upper end of the support bars 131 is the same height as the upper surface of the buffer unit 130 or slightly higher than the upper surface of the buffer unit 130. Therefore, the buffer unit 130 can support the trays supported by the lifting unit 120. The trays are removed by the force of pushing up the buffer unit 130 so that the buffer unit 130 supports the trays while maintaining a plurality of horizontal states or the horizontal plate of the buffer unit 130 is supported by the receiving unit 110 So as to support the trays.

The buffer unit 130 may support a plurality of trays by a height from the upper surface of the buffer unit 130 to the upper end of the storage unit 110. Therefore, the picker can pick up the trays supported by the buffer unit 130 without waiting time while the lifting unit 120 descends to accommodate new trays into the storage unit 110. [ However, since the buffer unit 130 does not lift the trays but only raises the trays, the picker must descend gradually to pick up the tray.

Referring to FIG. 6, the buffer 130 supports the trays supported by the lifting unit 120, so that the lifting unit 120 is lowered to accommodate new trays into the storage unit 110 . The lifting unit 120 is lowered until the second sensor 163 detects the connection plate 123.

3 to 6 are fed into the receiving part 110, the trays are raised by the elevating part 120, the trays are supported by the buffer part 130, And the step of lowering the part 120 is repeated.

The picker picks up the trays held in the buffer unit 130 until the new trays are fed into the receiving unit 110 and the elevator unit 120 raises the new trays. Thus, the tray feeding method can supply the tray so that the picker picks up the trays without delay.

As described above, the tray feeding apparatus and method according to the present invention can support existing trays while the new trays are being fed to the receiving section. Therefore, the picker can continuously transport the tray without waiting time.

In addition, since the conveying section supplies the trays to the receiving section, the trays can be supplied quickly and stably.

Therefore, productivity and reliability of the tray feeding process can be improved.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

100: tray feeder 110:
120: elevating part 130: buffer part
140: transfer part 150: opening /
160; Sensing unit 10: tray

Claims (7)

A receiving portion having an inner space for accommodating a plurality of trays and having an upper surface and a front surface opened;
A lifting unit supporting the trays of the storage unit and raising the trays inside the storage unit so that the picker can pick up the trays through the top surface; And
And a buffer portion for supporting the trays so that the picker can pick up the trays without waiting time while the elevator descends to receive new trays into the receiving portion.
The tray feeding apparatus according to claim 1, further comprising a conveying section provided at a lower portion of the receiving section, for conveying the trays to the inside of the receiving section through the front surface. The tray of claim 1, wherein the trays are disposed on both sides of the accommodating part, and the trays are separated from the interior when the tray is opened while the trays are supplied into the accommodating part and the supply of the trays is completed into the accommodating part. Tray supply apparatus further comprises an opening and closing portion for blocking the front surface to prevent being. The tray feeding apparatus of claim 1, further comprising a sensing unit connected to the storage unit and sensing a height of the lift unit. Supplying trays through the front surface into a receiving portion having an upper surface and a front surface opened;
A lifter raising the trays inside the housing so that a picker can pick up the trays through the top surface;
Supporting the trays with a buffer unit so that the picker can pick up the trays without waiting time when the elevator unit has a constant height; And
And the elevating part descends to receive new trays into the accommodating part.
The tray supply method according to claim 5, wherein the upper limit and the lower limit of the lifting unit are sensed using a sensing unit. 6. The method of claim 5, wherein the opening and closing portion opens the front surface, the lifting portion raises the trays, the trays are supported by the buffer portion, and the lifting portion lowers. In the step of the tray supply method, characterized in that the opening and closing block the front surface to prevent the tray from being separated from the inside of the receiving portion.
KR1020110144394A 2011-12-28 2011-12-28 Apparatus and method of suppling trays KR101411163B1 (en)

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Application Number Priority Date Filing Date Title
KR1020110144394A KR101411163B1 (en) 2011-12-28 2011-12-28 Apparatus and method of suppling trays

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KR20130076014A true KR20130076014A (en) 2013-07-08
KR101411163B1 KR101411163B1 (en) 2014-06-24

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190047899A (en) * 2017-10-30 2019-05-09 세메스 주식회사 Tray storage buffer and apparatus for transferring trays having the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281220A (en) * 1988-05-07 1989-11-13 Sanyo Electric Co Ltd Tray accommodating device
KR100392389B1 (en) * 2001-08-10 2003-07-23 삼성전자주식회사 User-tray stacker for test handler of semiconductor device
KR20050095014A (en) * 2004-03-24 2005-09-29 삼성전자주식회사 Tray loading/unloading appar atus for semiconductor package
KR100718847B1 (en) * 2006-06-15 2007-05-18 세크론 주식회사 Tray supply device for semiconductor package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190047899A (en) * 2017-10-30 2019-05-09 세메스 주식회사 Tray storage buffer and apparatus for transferring trays having the same

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