KR20130040877A - 센서들 - Google Patents

센서들 Download PDF

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Publication number
KR20130040877A
KR20130040877A KR1020127029198A KR20127029198A KR20130040877A KR 20130040877 A KR20130040877 A KR 20130040877A KR 1020127029198 A KR1020127029198 A KR 1020127029198A KR 20127029198 A KR20127029198 A KR 20127029198A KR 20130040877 A KR20130040877 A KR 20130040877A
Authority
KR
South Korea
Prior art keywords
frequency
sensor
oscillator
mems
inertial sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020127029198A
Other languages
English (en)
Korean (ko)
Inventor
마이클 더스턴
데이비드 비즐리
케빈 타운젠드
Original Assignee
실리콘 센싱 시스템즈 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 실리콘 센싱 시스템즈 리미티드 filed Critical 실리콘 센싱 시스템즈 리미티드
Publication of KR20130040877A publication Critical patent/KR20130040877A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
KR1020127029198A 2010-04-08 2011-04-05 센서들 Ceased KR20130040877A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1005875.8 2010-04-08
GBGB1005875.8A GB201005875D0 (en) 2010-04-08 2010-04-08 Sensors
PCT/EP2011/055285 WO2011124576A1 (en) 2010-04-08 2011-04-05 Sensors

Publications (1)

Publication Number Publication Date
KR20130040877A true KR20130040877A (ko) 2013-04-24

Family

ID=42236016

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127029198A Ceased KR20130040877A (ko) 2010-04-08 2011-04-05 센서들

Country Status (7)

Country Link
US (1) US9162875B2 (enExample)
EP (1) EP2556334B1 (enExample)
JP (1) JP2013527920A (enExample)
KR (1) KR20130040877A (enExample)
CN (1) CN103097860B (enExample)
GB (1) GB201005875D0 (enExample)
WO (1) WO2011124576A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170104497A (ko) * 2015-01-26 2017-09-15 애틀랜틱 이너셜 시스템스 리미티드 자이로스코프 루프 필터

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012040194A1 (en) * 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Inertial sensor mode tuning circuit
CN103791897B (zh) * 2014-02-20 2016-05-11 北京华力创通科技股份有限公司 促使微机械陀螺快速起振的电路
CN103840825A (zh) * 2014-03-21 2014-06-04 合肥工业大学 全数字集成电容式传感器接口电路
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
US10735006B1 (en) * 2019-06-25 2020-08-04 Infineon Technologies Ag Functional clock generation
JP2025503048A (ja) * 2022-01-28 2025-01-30 パナソニックＩｐマネジメント株式会社 容量性共振器を校正するための方法および装置

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US4619001A (en) * 1983-08-02 1986-10-21 Matsushita Electric Industrial Co., Ltd. Tuning systems on dielectric substrates
JPH09198807A (ja) * 1996-01-18 1997-07-31 Pioneer Electron Corp クロック抽出回路
GB2322196B (en) 1997-02-18 2000-10-18 British Aerospace A vibrating structure gyroscope
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
JPH1183498A (ja) * 1997-09-02 1999-03-26 Sumitomo Precision Prod Co Ltd 半導体振動子の振動調整方法
JP2000018951A (ja) * 1998-06-30 2000-01-21 Aisin Seiki Co Ltd 角速度検出方法および装置
JP2000018952A (ja) * 1998-07-01 2000-01-21 Aisin Seiki Co Ltd 角速度センサ
US6585338B2 (en) * 2000-12-22 2003-07-01 Honeywell International Inc. Quick start resonant circuit control
DE10240087C5 (de) * 2002-08-30 2011-12-01 Austriamicrosystems Ag Vibrationskreisel
JP4336946B2 (ja) 2003-03-20 2009-09-30 セイコーエプソン株式会社 回転角速度の測定方法および装置
DE102005034702A1 (de) 2005-07-26 2007-02-01 Robert Bosch Gmbh Verfahren und Schaltungsanordnung zur sicheren Inbetriebnahme eines Drehratensensors
DE102005043592A1 (de) * 2005-09-12 2007-03-15 Siemens Ag Verfahren zum Betrieb eines Vibrationskreisels und Sensoranordnung
JP4696996B2 (ja) * 2006-03-27 2011-06-08 パナソニック株式会社 慣性力センサ
US7434465B1 (en) * 2006-08-07 2008-10-14 Litton Systems Inc. Ring resonator gyroscope with cylindrical ring suspension
JP5286818B2 (ja) 2008-02-21 2013-09-11 セイコーエプソン株式会社 電気光学装置及び電子機器
WO2010092816A1 (ja) * 2009-02-13 2010-08-19 パナソニック株式会社 発振回路、発振回路の製造方法、この発振回路を用いた慣性センサ及び電子機器
JP5417115B2 (ja) 2009-10-16 2014-02-12 Ｗｉｎヒューマン・レコーダー株式会社 体温調節システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170104497A (ko) * 2015-01-26 2017-09-15 애틀랜틱 이너셜 시스템스 리미티드 자이로스코프 루프 필터

Also Published As

Publication number Publication date
GB201005875D0 (en) 2010-05-26
CN103097860B (zh) 2016-02-10
CN103097860A (zh) 2013-05-08
EP2556334B1 (en) 2018-08-22
WO2011124576A1 (en) 2011-10-13
EP2556334A1 (en) 2013-02-13
US20130199293A1 (en) 2013-08-08
US9162875B2 (en) 2015-10-20
JP2013527920A (ja) 2013-07-04

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Patent event date: 20121107

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