JP2013527920A - センサ - Google Patents

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Publication number
JP2013527920A
JP2013527920A JP2013503087A JP2013503087A JP2013527920A JP 2013527920 A JP2013527920 A JP 2013527920A JP 2013503087 A JP2013503087 A JP 2013503087A JP 2013503087 A JP2013503087 A JP 2013503087A JP 2013527920 A JP2013527920 A JP 2013527920A
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JP
Japan
Prior art keywords
frequency
sensor
inertial sensor
oscillator
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2013503087A
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English (en)
Japanese (ja)
Other versions
JP2013527920A5 (enExample
Inventor
マイケル、ダーストン
デイビッド、ビーズリー
ケビン、タウンセンド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silicon Sensing Systems Ltd
Original Assignee
Silicon Sensing Systems Ltd
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Filing date
Publication date
Application filed by Silicon Sensing Systems Ltd filed Critical Silicon Sensing Systems Ltd
Publication of JP2013527920A publication Critical patent/JP2013527920A/ja
Publication of JP2013527920A5 publication Critical patent/JP2013527920A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

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  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP2013503087A 2010-04-08 2011-04-05 センサ Pending JP2013527920A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1005875.8 2010-04-08
GBGB1005875.8A GB201005875D0 (en) 2010-04-08 2010-04-08 Sensors
PCT/EP2011/055285 WO2011124576A1 (en) 2010-04-08 2011-04-05 Sensors

Publications (2)

Publication Number Publication Date
JP2013527920A true JP2013527920A (ja) 2013-07-04
JP2013527920A5 JP2013527920A5 (enExample) 2014-05-15

Family

ID=42236016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013503087A Pending JP2013527920A (ja) 2010-04-08 2011-04-05 センサ

Country Status (7)

Country Link
US (1) US9162875B2 (enExample)
EP (1) EP2556334B1 (enExample)
JP (1) JP2013527920A (enExample)
KR (1) KR20130040877A (enExample)
CN (1) CN103097860B (enExample)
GB (1) GB201005875D0 (enExample)
WO (1) WO2011124576A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
JP2021005381A (ja) * 2019-06-25 2021-01-14 インフィニオン テクノロジーズ アクチエンゲゼルシャフトＩｎｆｉｎｅｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ ＡＧ 機能的クロックの生成
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012040194A1 (en) * 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Inertial sensor mode tuning circuit
CN103791897B (zh) * 2014-02-20 2016-05-11 北京华力创通科技股份有限公司 促使微机械陀螺快速起振的电路
CN103840825A (zh) * 2014-03-21 2014-06-04 合肥工业大学 全数字集成电容式传感器接口电路
GB2534562B (en) * 2015-01-26 2017-11-29 Atlantic Inertial Systems Ltd Gyroscope loop filter
JP2025503048A (ja) * 2022-01-28 2025-01-30 パナソニックＩｐマネジメント株式会社 容量性共振器を校正するための方法および装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09198807A (ja) * 1996-01-18 1997-07-31 Pioneer Electron Corp クロック抽出回路
JPH1183498A (ja) * 1997-09-02 1999-03-26 Sumitomo Precision Prod Co Ltd 半導体振動子の振動調整方法
JP2000018952A (ja) * 1998-07-01 2000-01-21 Aisin Seiki Co Ltd 角速度センサ
JP2000018951A (ja) * 1998-06-30 2000-01-21 Aisin Seiki Co Ltd 角速度検出方法および装置
JP2001512645A (ja) * 1997-02-24 2001-08-21 ザ チャールズ スターク ドレイパー ラボラトリー インコーポレイテッド 温度不感性シリコン発振器及びそれから形成された精密電圧基準
JP2004521335A (ja) * 2000-12-22 2004-07-15 ハネウェル・インターナショナル・インコーポレーテッド 急速始動共振回路制御
JP2009503474A (ja) * 2005-07-26 2009-01-29 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ヨーレートセンサの使用開始方法およびヨーレートセンサの使用開始のための回路装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4619001A (en) * 1983-08-02 1986-10-21 Matsushita Electric Industrial Co., Ltd. Tuning systems on dielectric substrates
GB2322196B (en) 1997-02-18 2000-10-18 British Aerospace A vibrating structure gyroscope
DE10240087C5 (de) * 2002-08-30 2011-12-01 Austriamicrosystems Ag Vibrationskreisel
JP4336946B2 (ja) 2003-03-20 2009-09-30 セイコーエプソン株式会社 回転角速度の測定方法および装置
DE102005043592A1 (de) * 2005-09-12 2007-03-15 Siemens Ag Verfahren zum Betrieb eines Vibrationskreisels und Sensoranordnung
JP4696996B2 (ja) * 2006-03-27 2011-06-08 パナソニック株式会社 慣性力センサ
US7434465B1 (en) * 2006-08-07 2008-10-14 Litton Systems Inc. Ring resonator gyroscope with cylindrical ring suspension
JP5286818B2 (ja) 2008-02-21 2013-09-11 セイコーエプソン株式会社 電気光学装置及び電子機器
WO2010092816A1 (ja) * 2009-02-13 2010-08-19 パナソニック株式会社 発振回路、発振回路の製造方法、この発振回路を用いた慣性センサ及び電子機器
JP5417115B2 (ja) 2009-10-16 2014-02-12 Ｗｉｎヒューマン・レコーダー株式会社 体温調節システム

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09198807A (ja) * 1996-01-18 1997-07-31 Pioneer Electron Corp クロック抽出回路
JP2001512645A (ja) * 1997-02-24 2001-08-21 ザ チャールズ スターク ドレイパー ラボラトリー インコーポレイテッド 温度不感性シリコン発振器及びそれから形成された精密電圧基準
JPH1183498A (ja) * 1997-09-02 1999-03-26 Sumitomo Precision Prod Co Ltd 半導体振動子の振動調整方法
JP2000018951A (ja) * 1998-06-30 2000-01-21 Aisin Seiki Co Ltd 角速度検出方法および装置
JP2000018952A (ja) * 1998-07-01 2000-01-21 Aisin Seiki Co Ltd 角速度センサ
JP2004521335A (ja) * 2000-12-22 2004-07-15 ハネウェル・インターナショナル・インコーポレーテッド 急速始動共振回路制御
JP2009503474A (ja) * 2005-07-26 2009-01-29 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ヨーレートセンサの使用開始方法およびヨーレートセンサの使用開始のための回路装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
JP2021005381A (ja) * 2019-06-25 2021-01-14 インフィニオン テクノロジーズ アクチエンゲゼルシャフトＩｎｆｉｎｅｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ ＡＧ 機能的クロックの生成
JP7050860B2 (ja) 2019-06-25 2022-04-08 インフィニオン テクノロジーズ アクチエンゲゼルシャフト 機能的クロックの生成

Also Published As

Publication number Publication date
GB201005875D0 (en) 2010-05-26
CN103097860B (zh) 2016-02-10
CN103097860A (zh) 2013-05-08
EP2556334B1 (en) 2018-08-22
WO2011124576A1 (en) 2011-10-13
EP2556334A1 (en) 2013-02-13
US20130199293A1 (en) 2013-08-08
US9162875B2 (en) 2015-10-20
KR20130040877A (ko) 2013-04-24

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