CN103097860B - 传感器 - Google Patents

传感器 Download PDF

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Publication number
CN103097860B
CN103097860B CN201180018073.8A CN201180018073A CN103097860B CN 103097860 B CN103097860 B CN 103097860B CN 201180018073 A CN201180018073 A CN 201180018073A CN 103097860 B CN103097860 B CN 103097860B
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CN
China
Prior art keywords
frequency
oscillator
sensor
inertial sensor
mems
Prior art date
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Application number
CN201180018073.8A
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English (en)
Chinese (zh)
Other versions
CN103097860A (zh
Inventor
M·德斯顿
D·贝斯里
K·汤森德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silicon Sensing Systems Ltd
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Silicon Sensing Systems Ltd
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Publication date
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Publication of CN103097860A publication Critical patent/CN103097860A/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
CN201180018073.8A 2010-04-08 2011-04-05 传感器 Active CN103097860B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1005875.8 2010-04-08
GBGB1005875.8A GB201005875D0 (en) 2010-04-08 2010-04-08 Sensors
PCT/EP2011/055285 WO2011124576A1 (en) 2010-04-08 2011-04-05 Sensors

Publications (2)

Publication Number Publication Date
CN103097860A CN103097860A (zh) 2013-05-08
CN103097860B true CN103097860B (zh) 2016-02-10

Family

ID=42236016

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180018073.8A Active CN103097860B (zh) 2010-04-08 2011-04-05 传感器

Country Status (7)

Country Link
US (1) US9162875B2 (enExample)
EP (1) EP2556334B1 (enExample)
JP (1) JP2013527920A (enExample)
KR (1) KR20130040877A (enExample)
CN (1) CN103097860B (enExample)
GB (1) GB201005875D0 (enExample)
WO (1) WO2011124576A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012040194A1 (en) * 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Inertial sensor mode tuning circuit
CN103791897B (zh) * 2014-02-20 2016-05-11 北京华力创通科技股份有限公司 促使微机械陀螺快速起振的电路
CN103840825A (zh) * 2014-03-21 2014-06-04 合肥工业大学 全数字集成电容式传感器接口电路
GB2534562B (en) * 2015-01-26 2017-11-29 Atlantic Inertial Systems Ltd Gyroscope loop filter
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
US10735006B1 (en) * 2019-06-25 2020-08-04 Infineon Technologies Ag Functional clock generation
JP2025503048A (ja) * 2022-01-28 2025-01-30 パナソニックＩｐマネジメント株式会社 容量性共振器を校正するための方法および装置

Citations (4)

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Publication number Priority date Publication date Assignee Title
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
WO2004020948A1 (de) * 2002-08-30 2004-03-11 Austriamicrosystems Ag Vibrationskreisel
CN1532524A (zh) * 2003-03-20 2004-09-29 日本碍子株式会社 激励振荡器主控振动的方法和系统
CN101263364A (zh) * 2005-09-12 2008-09-10 威迪欧汽车电子股份公司 用于运行振动陀螺仪的方法和传感器系统

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US4619001A (en) * 1983-08-02 1986-10-21 Matsushita Electric Industrial Co., Ltd. Tuning systems on dielectric substrates
JPH09198807A (ja) * 1996-01-18 1997-07-31 Pioneer Electron Corp クロック抽出回路
GB2322196B (en) 1997-02-18 2000-10-18 British Aerospace A vibrating structure gyroscope
JPH1183498A (ja) * 1997-09-02 1999-03-26 Sumitomo Precision Prod Co Ltd 半導体振動子の振動調整方法
JP2000018951A (ja) * 1998-06-30 2000-01-21 Aisin Seiki Co Ltd 角速度検出方法および装置
JP2000018952A (ja) * 1998-07-01 2000-01-21 Aisin Seiki Co Ltd 角速度センサ
US6585338B2 (en) * 2000-12-22 2003-07-01 Honeywell International Inc. Quick start resonant circuit control
DE102005034702A1 (de) 2005-07-26 2007-02-01 Robert Bosch Gmbh Verfahren und Schaltungsanordnung zur sicheren Inbetriebnahme eines Drehratensensors
JP4696996B2 (ja) * 2006-03-27 2011-06-08 パナソニック株式会社 慣性力センサ
US7434465B1 (en) * 2006-08-07 2008-10-14 Litton Systems Inc. Ring resonator gyroscope with cylindrical ring suspension
JP5286818B2 (ja) 2008-02-21 2013-09-11 セイコーエプソン株式会社 電気光学装置及び電子機器
WO2010092816A1 (ja) * 2009-02-13 2010-08-19 パナソニック株式会社 発振回路、発振回路の製造方法、この発振回路を用いた慣性センサ及び電子機器
JP5417115B2 (ja) 2009-10-16 2014-02-12 Ｗｉｎヒューマン・レコーダー株式会社 体温調節システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
WO2004020948A1 (de) * 2002-08-30 2004-03-11 Austriamicrosystems Ag Vibrationskreisel
CN1532524A (zh) * 2003-03-20 2004-09-29 日本碍子株式会社 激励振荡器主控振动的方法和系统
CN101263364A (zh) * 2005-09-12 2008-09-10 威迪欧汽车电子股份公司 用于运行振动陀螺仪的方法和传感器系统

Also Published As

Publication number Publication date
GB201005875D0 (en) 2010-05-26
CN103097860A (zh) 2013-05-08
EP2556334B1 (en) 2018-08-22
WO2011124576A1 (en) 2011-10-13
EP2556334A1 (en) 2013-02-13
US20130199293A1 (en) 2013-08-08
US9162875B2 (en) 2015-10-20
KR20130040877A (ko) 2013-04-24
JP2013527920A (ja) 2013-07-04

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