KR20130031481A - Improved stage align device and method, and coating apparatus and printing apparatus having the same - Google Patents

Improved stage align device and method, and coating apparatus and printing apparatus having the same Download PDF

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Publication number
KR20130031481A
KR20130031481A KR1020110095077A KR20110095077A KR20130031481A KR 20130031481 A KR20130031481 A KR 20130031481A KR 1020110095077 A KR1020110095077 A KR 1020110095077A KR 20110095077 A KR20110095077 A KR 20110095077A KR 20130031481 A KR20130031481 A KR 20130031481A
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KR
South Korea
Prior art keywords
stage
alignment
axis
alignment device
substrates
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Application number
KR1020110095077A
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Korean (ko)
Inventor
류성훈
노상준
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주식회사 나래나노텍
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Priority to KR1020110095077A priority Critical patent/KR20130031481A/en
Publication of KR20130031481A publication Critical patent/KR20130031481A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • B23Q3/183—Centering devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • B23Q3/186—Aligning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention discloses an improved stage alignment apparatus and method and a coating apparatus and a printing apparatus having the same.
Stage alignment apparatus according to the present invention comprises one stage on which a plurality of substrates are mounted; One alignment device mounted to a lower portion of the one stage, for controlling alignment in the X, Y, Z, and θ-axis directions of the one stage; And first to fourth devices provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction. It includes a drive member.
In addition, the stage alignment method according to the present invention comprises the steps of: a) mounting a plurality of substrates on one stage; And b) controlling alignment of the one stage in the X-axis, Y-axis, Z-axis, and θ-axis directions using one alignment device mounted below the one stage.

Description

Improved Stage Alignment Device and Method and Coating Apparatus and Printing Apparatus Having the Same {Improved Stage Align Device and Method, and Coating Apparatus and Printing Apparatus Having the Same}

The present invention relates to an improved stage alignment apparatus and method, and a coating apparatus and a printing apparatus having the same.

More specifically, the present invention aligns two or more substrates simultaneously using one stage and one alignment device, thereby reducing the time required for alignment and thus the overall tact time. In addition, since the height difference of the plurality of substrates does not occur, the coating height / printing height is kept the same, thereby improving the coating quality / printing quality, and reducing the overall size of the coating device / printing device and the number of motors used to reduce manufacturing costs. Improved stage alignment apparatus and method which are saved, and a coating apparatus and a printing apparatus having the same.

Generally, in order to manufacture a flat panel display (FPD) such as a plasma display panel (PDP), a liquid crystal display panel (LCD) or an organic light emitting diode (OLED), a single large glass substrate or printed circuit is used. Several identical or different patterns (e.g., electrode circuit patterns, color filters, etc.) such as electrodes or dots on a printed circuit board (PCB) (hereinafter collectively referred to as "substrate") a color filter, a black matrix, or an external electromagnetic interference (EMI) filter, such patterns are for example photoresist (PR) liquid or copper (Cu), silver ( It is formed by a metal paste (hereinafter referred to collectively as " plating liquid ") such as Ag), aluminum (Al), or the like.

In order to fabricate the flat panel display (FPD) described above, the substrate must be positioned on the stage. Thereafter, for example, various processes such as a coating process or a pattern forming process, an exposure process, an etching process, or an adhesive application and bonding process are performed on a substrate located on the stage.

Figure 1a is a view showing a coating apparatus for manufacturing a FPD of the prior art.

More specifically, in the coating apparatus 100 illustrated in FIG. 1A, the substrate 110, which is a workpiece to be coated, is placed on the stage 140, and then the nozzle apparatus 120 attached to the gantry 130 is attached. The method of apply | coating the required coating liquid on the board | substrate 110, moving to a horizontal direction is used.

1B is a view showing a printing apparatus for pattern formation in the prior art.

Referring to FIG. 1B, for example, a printing apparatus for forming a pattern of a gravure offset method using a gravure roll (not shown) and a printing roll 120 is used.

More specifically, the printing apparatus 101 of the prior art illustrated in FIG. 1B receives a coating liquid corresponding to the printing pattern from a gravure roll (not shown) provided with the printing pattern and transfers the printing pattern onto the substrate 110. A printing roll 120; A stage 140 on which the substrate 110 is mounted; A gantry 130 rotatably supporting the rotating shaft 122 of the printing roll 120 and reciprocating on the stage 140; An alignment device (150) mounted below the stage (140) to control alignment of the stage (140); And a main frame 160 on which the alignment device 150 is mounted.

In the above-described coating apparatus 100 and printing apparatus 101 of the prior art, the substrate 110 mounted on the stage 140 before applying the coating liquid for coating onto the substrate 110 or transferring the coating liquid for the printing pattern; Alignment between the nozzle device 120 (in the case of FIG. 1A) / printing roll 120 (in the case of FIG. 1B) should be made. In order to align the substrate 110 with the nozzle apparatus 120 / the printing roll 120, the lower part of the stage 140 controls the alignment of the X-axis, Y-axis, Z-axis and θ-axis of the stage 140. An alignment device 150 (not shown in FIG. 1A) to be used is mounted.

FIG. 1C is a top view and a side view schematically showing a stage alignment apparatus according to the prior art, and FIG. 1D is a side view schematically showing a printing apparatus according to the prior art. Here, although FIG. 1D exemplarily shows a printing apparatus 101 according to the prior art, a person skilled in the art uses the nozzle apparatus 120 instead of the printing roll 120, and the exemplary embodiment of FIG. 1D is illustrated in FIG. 1A. It will be appreciated that the coating device 100 may also be applied.

Hereinafter, the alignment device 150 and the alignment operation of the stage 140 in the printing apparatus 101 will be described for convenience of description.

1C and 1D, in the printing apparatus 101 according to the related art, two first and second stages 140a and 140b are positioned on the main frame 160, and the first and second stages ( The first and second substrates 110a and 110b are mounted on the 140a and 140b. In addition, first and second alignment devices 150a and 150b are mounted to the lower portions of the first and second stages 140a and 140b, respectively. That is, in the alignment apparatus 150 used in the prior art, the first and second alignment apparatuses 150a and 150b for individually aligning the first and second stages 140a and 140b are used.

More specifically, the first to fourth driving members M1, M2, M3, and M4 are mounted on the first alignment device 150a. In addition, the fifth to eighth drive members M5, M6, M7, and M8 are mounted on the second alignment device 150b.

Therefore, when the printing roll 120 is transferred onto the first substrate 110a, the printing roll 120 may be formed by using the first to fourth driving members M1, M2, M3, and M4 mounted on the first alignment device 150a. The alignment between the first substrate 110a and the printing roll 120 is achieved by controlling the alignment in the X-axis, Y-axis, Z-axis, and θ-axis directions of the first stage 140a.

Thereafter, when the printing roll 120 is transferred onto the second substrate 110b, the fifth to eighth driving members M5, M6, M7, and M8 mounted on the second alignment device 150b may be used. The alignment between the second substrate 110b and the printing roll 120 is achieved by controlling the alignment of the second stage 140b in the X-axis, Y-axis, Z-axis, and θ-axis directions.

For example, among the first to fourth driving members M1, M2, M3, and M4 and the fifth to eighth driving members M5, M6, M7, and M8 used in the above-described prior art, the first to third driving, for example. The members M1, M2 and M3 and the fifth to seventh driving members M5, M6 and M7 are respectively implemented as linear motors, and the fourth driving member M4 and the eighth driving member M8 are rotating motors, respectively. It can be implemented as.

In the above prior art, the use of two stages 140a and 140b and two alignment devices 150a and 150b to align the two substrates 110a and 110b is illustrated. It will be appreciated that when using more than one substrate, a plurality of alignment devices corresponding thereto should be used.

As described above, in the related art, since a printing operation is performed on a main frame 160 using a plurality of stages and a plurality of alignment devices, a printing pattern may be formed on a plurality of substrates in one printing process. That the advantage is achieved.

However, the above-described prior art still has the following problems.

1. Since the alignment is made for a plurality of substrates individually, the time required for alignment increases, so that the total process time increases.

2. Since the height (alignment in the Z-axis direction) of the plurality of substrates is adjusted by using the plurality of stages and the plurality of alignment devices, a step may occur between the heights H1 and H2 of the plurality of substrates (FIG. 1D). Reference). In this case, the alignment time is further increased because the printing roll 120 or the nozzle device 120 in FIG. 1A must be moved up and down with respect to the substrate.

3. Even if the printing roll 120 or the nozzle device 120 moves up and down due to a step between the heights H1 and H2 of the plurality of substrates, it is not easy to maintain the coating height / print height for the plurality of substrates the same. Coating quality / printing quality may be reduced.

4. The aligning device must be used for a plurality of stages, increasing the overall size of the coating / printing device and the number of motors used. Thus, the overall manufacturing cost is increased.

Therefore, a new method for solving the above-mentioned problems is required.

The present invention is to solve the problems of the prior art described above, by aligning two or more substrates simultaneously using one stage and one alignment device, the time required for alignment and the entire process accordingly Since the tact time is reduced and the height difference of the plurality of substrates does not occur, the coating height / print height remains the same to improve the coating quality / print quality, the overall size of the coating device / printing device and the motor used An improved stage aligning apparatus and method and a coating apparatus and a printing apparatus having the same are provided to reduce the number of s.

According to a first aspect of the present invention, there is provided a stage alignment apparatus comprising: a stage on which a plurality of substrates are mounted; One alignment device mounted to a lower portion of the one stage, for controlling alignment in the X, Y, Z, and θ-axis directions of the one stage; And first to fourth devices provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction. It characterized in that it comprises a drive member.

According to a second aspect of the present invention, a coating apparatus includes a nozzle apparatus for applying a coating liquid onto a plurality of substrates; One stage on which the plurality of substrates are mounted; A gantry mounted with the nozzle device and reciprocating on the one stage; One alignment device mounted to a lower portion of the one stage and configured to control the alignment of the one stage; A first to fourth drive provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction; absence; And a main frame on which the one alignment device is mounted.

According to a third aspect of the present invention, there is provided a printing apparatus including a printing roll transferring a printing solution corresponding to the printing pattern from a gravure roll having a printing pattern and transferring the printing pattern onto a plurality of substrates; One stage on which the plurality of substrates are mounted; A gantry rotatably supporting a rotating shaft of the printing roll and reciprocating on the one stage; An alignment device mounted below the one stage and configured to control alignment in the X-axis, Y-axis, Z-axis, and θ-axis directions of the one stage; A first to fourth drive provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction; absence; And a main frame on which the one alignment device is mounted.

A stage alignment method according to a fourth aspect of the invention comprises the steps of: a) mounting a plurality of substrates on one stage; And b) controlling alignment of the one stage in the X-axis, Y-axis, Z-axis, and θ-axis directions using one alignment device mounted below the one stage. do.

Using the improved stage alignment apparatus and method of the present invention and the coating and printing apparatus having the same, the following advantages are achieved.

1. Alignment is performed for a plurality of substrates at the same time, thereby reducing the time required for alignment and thus the overall process time.

2. Since the heights of the plurality of substrates are adjusted by using one stage and one alignment device, generation of steps between the heights of the plurality of substrates is prevented. Therefore, there is no need to move the printing roll or nozzle device up and down relative to the substrate, so that the alignment time is further reduced.

3. The coating quality / print quality is improved because the coating height / print height for the plurality of substrates remains the same.

4. Since one alignment device is used, the overall size of the coating device / printing device and the number of motors used are reduced, thereby reducing the overall manufacturing cost.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

Figure 1a is a view showing a coating apparatus for manufacturing a FPD of the prior art.
1B is a view showing a printing apparatus for pattern formation in the prior art.
Figure 1c is a top view and side view schematically showing a stage alignment apparatus according to the prior art.
1D is a side view schematically showing a printing apparatus 101 according to the prior art.
2A is a top view and a side view schematically illustrating a stage alignment apparatus according to an embodiment of the present invention.
2B is a side view schematically showing a printing apparatus according to an embodiment of the present invention.
Figure 2c is a side view schematically showing a coating apparatus according to an embodiment of the present invention.
3 is a flowchart illustrating a stage alignment method according to an embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described with reference to embodiments and drawings of the present invention.

FIG. 2A is a top view and a side view schematically illustrating a stage alignment device according to an embodiment of the present invention, and FIG. 2B is a side view schematically showing a printing device according to an embodiment of the present invention.

2A and 2B, a stage alignment apparatus 250 according to an embodiment of the present invention may include one stage 240 on which a plurality of substrates 210a and 210b are mounted; One alignment device (250) mounted below the one stage (240) and configured to control alignment in the X, Y, Z and θ axis directions of the one stage (240); And the one alignment device 250, and the one alignment device 250 is linearly moved in the X-axis, the Y-axis, and the Z-axis and rotated in the θ-axis direction. The first to fourth drive members (M1, M2, M3, M4) are included.

2A and 2B together with FIG. 1B, the printing apparatus 201 according to an embodiment of the present invention transfers a coating liquid corresponding to the printing pattern from a gravure roll (not shown) provided with a printing pattern. A print roll 220 which receives and transfers the print pattern onto a plurality of substrates 210a and 201b; A stage 240 on which the plurality of substrates 210a and 210b are mounted; A gantry 130 rotatably supporting the rotating shaft 222 of the printing roll 220 and reciprocating on the one stage 240; One alignment device 250 mounted below the one stage 240 and controlling alignment of the one stage 240 in the X, Y, Z and θ-axis directions; The one alignment device 250 is provided, and the one alignment device 250 is driven to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction. First to fourth driving members M1, M2, M3, and M4; And a main frame 260 on which the one alignment device 250 is mounted.

In the stage alignment apparatus 250 and the printing apparatus 201 according to an embodiment of the present invention described above, for example, the first to third driving members M1, M2, M3, and M4 may be used. The driving members M1, M2, and M3 may be implemented as linear motors, respectively, and the fourth driving member M4 may be implemented as rotary motors.

Hereinafter, one alignment device 250 and one alignment operation of one stage 240 in the printing apparatus 201 according to one embodiment of the present invention will be described.

2A and 2B, in the printing apparatus 201 according to the exemplary embodiment of the present invention, only one stage 240 is positioned on the main frame 260, and a plurality of substrates are disposed on one stage 240. 210a and 210b are mounted.

Here, in the exemplary embodiment of the present invention, two substrates 210a and 210b are exemplarily mounted on one stage 240, but those skilled in the art will appreciate that three or more substrates may include one stage 240. It will be fully appreciated that it can be mounted on the.

In addition, only one alignment device 250 is mounted below one stage 240. Accordingly, one alignment device 250 used in an embodiment of the present invention aligns one stage 240 to simultaneously display a plurality of substrates 210a and 210b mounted on one stage 240. Align.

More specifically, the first to fourth driving members M1, M2, M3, and M4 are mounted on one alignment device 250.

As shown in FIG. 2B, when the printing roll 220 is transferred onto the first substrate 210a by the gantry 130 (see FIG. 1B), the first to second mounting units 250 may be mounted on one alignment device 250. By using the fourth driving members M1, M2, M3, and M4, the alignment of the X, Y, Z, and θ axes of one stage 240 is controlled to print with the first substrate 210a. Alignment between rolls 220 takes place.

Thereafter, even if the printing roll 220 is transferred onto the second substrate 210b, the alignment between the second substrate 210b and the printing roll 220 is already performed by one alignment device 250, so that the printing roll 220 is already transferred to the second substrate 210b. The alignment operation between the substrate 210b and the printing roll 220 is unnecessary. Therefore, since the plurality of substrates 210a and 210b are aligned at the same time by the alignment operation of one stage 240, an advantage of reducing the time required for alignment and the overall process time is achieved.

In addition, in the embodiment of the present invention, since the plurality of substrates 210a and 210b are mounted on one stage 240, the plurality of substrates 210a and 210b always maintain the same height H. Therefore, in a state where alignment between the first substrate 210a and the printing roll 220 is performed, the printing roll 220 transfers the printing pattern on the first substrate 210a and then prints the printing pattern on the second substrate 210b. When transferring, there is no need to adjust the vertical height of the printing roll 220. As a result, in the embodiment of the present invention, the time required for the alignment and the overall process time can be further reduced compared to the prior art.

Figure 2c is a side view schematically showing a coating apparatus according to an embodiment of the present invention.

Referring to FIG. 2C together with FIGS. 1A and 2A, a coating apparatus 200 according to an embodiment of the present invention may include a nozzle apparatus 220 for applying a coating liquid onto a plurality of substrates 210a and 201b; A stage 240 on which the plurality of substrates 210a and 210b are mounted; A gantry 130 mounted with the nozzle device 220 and reciprocating on the one stage 240; One alignment device (250) mounted below the one stage (240) and controlling alignment of the one stage (240); The one alignment device 250 is provided, and the one alignment device 250 is driven to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction. First to fourth driving members M1, M2, M3, and M4; And a main frame 260 on which the one alignment device 250 is mounted.

In the stage alignment apparatus 250 and the coating apparatus 200 according to an embodiment of the present invention described above, for example, the first to third driving members M1, M2, M3, and M4 may be used. The driving members M1, M2, and M3 may be implemented as linear motors, respectively, and the fourth driving member M4 may be implemented as rotary motors.

Hereinafter, one alignment device 250 and one alignment operation of one stage 240 in the coating apparatus 200 according to an embodiment of the present invention will be described. Referring back to FIG. 2C together with FIG. 2A, in the coating apparatus 200 according to an embodiment of the present invention, only one stage 240 is positioned on the main frame 260, and a plurality of stages 240 are located on one stage 240. The substrates 210a and 210b are mounted.

Here, in the exemplary embodiment of the present invention, two substrates 210a and 210b are exemplarily mounted on one stage 240, but those skilled in the art will appreciate that three or more substrates may include one stage 240. It will be fully appreciated that it can be mounted on the.

In addition, only one alignment device 250 is mounted below one stage 240. Accordingly, one alignment device 250 used in an embodiment of the present invention aligns one stage 240 to simultaneously freeze a plurality of 210a and 210b mounted on one stage 240. Due.

More specifically, the first to fourth driving members M1, M2, M3, and M4 are mounted on one alignment device 250.

As shown in FIG. 2B, when the nozzle apparatus 220 is transferred onto the first substrate 210a by the gantry 130 (see FIG. 1A), the first through the first to the mounting apparatus 250 may be mounted. The first substrate 210a and the nozzle are controlled by using the fourth driving members M1, M2, M3, and M4 to control the alignment of one stage 240 in the X-axis, Y-axis, Z-axis, and θ-axis directions. Alignment is made between the devices 220.

Thereafter, even though the nozzle apparatus 220 is transferred onto the second substrate 210b, the alignment between the second substrate 210b and the nozzle apparatus 220 is already performed by one alignment apparatus 250, so that the second apparatus 210 may be aligned. Alignment operation between the substrate 210b and the nozzle apparatus 220 is unnecessary. Therefore, since the plurality of substrates 210a and 210b are aligned at the same time by the alignment operation of one stage 240, the time required for the alignment and the overall process time are reduced.

In addition, in the embodiment of the present invention, since the plurality of substrates 210a and 210b are mounted on one stage 240, the plurality of substrates 210a and 210b always maintain the same height H. Therefore, in the state where the alignment between the first substrate 210a and the nozzle apparatus 220 is made, the nozzle apparatus 220 may apply the coating liquid on the first substrate 210a and then apply the coating liquid on the second substrate 210b. At this time, it is unnecessary to adjust the vertical height of the nozzle device 220. As a result, in the embodiment of the present invention, the time required for the alignment and the overall process time can be further reduced compared to the prior art.

3 is a flowchart illustrating a stage alignment method according to an embodiment of the present invention.

Referring to FIG. 3 together with FIGS. 2A to 2C, a stage alignment method 300 according to an embodiment of the present invention may include a) mounting a plurality of substrates 210a and 210b on one stage 240. Step 310; And b) aligning the X-axis, Y-axis, Z-axis and θ-axis directions of the one stage 240 using one alignment device 250 mounted below the one stage 240. Controlling 320.

In the stage alignment method 300 according to an embodiment of the present invention described above, the step b) is the first to fourth driving members M1, M2, M3, The alignment device 250 is linearly moved in the X-axis, the Y-axis, and the Z-axis direction using M4), and driven to rotate in the θ-axis direction.

In addition, the first to third drive members (M1, M2, M3) used in step b) are each implemented as a linear motor, and the fourth drive member (M4) used in step b) is a rotary motor. Is implemented.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

100,200: coating apparatus 101,201: printing apparatus
110, 110a, 110b, 210a, 210b: substrate 120, 220: nozzle device / print roll
122,222: rotating shaft 130: gantry 140,140a, 140b, 240: stage
150, 150a, 150b, 250: alignment device 160, 260: main frame
M1, M2, M3, M4, M5, M6, M7, M8: Drive member

Claims (10)

In the stage aligning device,
One stage on which a plurality of substrates are mounted;
One alignment device mounted to a lower portion of the one stage, for controlling alignment in the X, Y, Z, and θ-axis directions of the one stage; And
A first to fourth drive provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction; absence
Stage alignment apparatus comprising a. The method of claim 1,
The first to third driving members are each implemented as a linear motor,
The fourth drive member is implemented by a rotary motor
Stage alignment device. The method of claim 2,
The first to third driving members drive the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions,
The fourth driving member drives the one alignment device to rotate in the θ-axis direction.
Stage alignment device. In the coating apparatus,
A nozzle device for applying the coating liquid onto the plurality of substrates;
One stage on which the plurality of substrates are mounted;
A gantry mounted with the nozzle device and reciprocating on the one stage;
One alignment device mounted to a lower portion of the one stage and configured to control the alignment of the one stage;
A first to fourth drive provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction; absence; And
A main frame on which the one alignment device is mounted
≪ / RTI > 5. The method of claim 4,
The first to third driving members are each implemented as a linear motor,
The fourth drive member is implemented by a rotary motor
Coating device. In the printing apparatus,
A printing roll which transfers the printing pattern onto a plurality of substrates by receiving a coating liquid corresponding to the printing pattern from a gravure roll having a printing pattern;
One stage on which the plurality of substrates are mounted;
A gantry rotatably supporting a rotating shaft of the printing roll and reciprocating on the one stage;
An alignment device mounted below the one stage and configured to control alignment in the X-axis, Y-axis, Z-axis, and θ-axis directions of the one stage;
A first to fourth drive provided in the one alignment device and driving the one alignment device to linearly move in the X-axis, Y-axis, and Z-axis directions and to rotate in the θ-axis direction; absence; And
A main frame on which the one alignment device is mounted
Printing apparatus comprising a. The method according to claim 6,
The first to third driving members are each implemented as a linear motor,
The fourth drive member is implemented by a rotary motor
printer. In the stage alignment method,
a) mounting a plurality of substrates on one stage; And
b) controlling alignment in the X, Y, Z, and θ axes of the one stage using one alignment device mounted below the one stage;
Stage alignment method comprising a. The method of claim 8,
The step b) is to linearly move the one alignment device in the X-axis, the Y-axis and the Z-axis direction by using the first to fourth drive member provided in the one alignment device, A stage alignment method performed by driving to rotate in the θ-axis direction. The method of claim 9,
The first to third driving members used in the step b) are each implemented as a linear motor,
The fourth drive member used in the step b) is implemented by a rotary motor
Stage alignment method.
KR1020110095077A 2011-09-21 2011-09-21 Improved stage align device and method, and coating apparatus and printing apparatus having the same KR20130031481A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101597352B1 (en) 2015-04-09 2016-02-25 서울과학기술대학교 산학협력단 Stage 4 axis parallel alignment device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101597352B1 (en) 2015-04-09 2016-02-25 서울과학기술대학교 산학협력단 Stage 4 axis parallel alignment device

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