KR20130024856A - Robot arm structure and robot - Google Patents

Abstract

PURPOSE: An arm structure of a robot and the robot are provided to reduce height dimension of the entire robot by reducing the height of a first arm part which receives a first reducer, a second reducer, and a motor. CONSTITUTION: An arm structure of a robot comprises a fixed base part(21), a first arm part(22), a second arm part(23), a motor(53), a first conveyor belt(55), a second conveyor belt(56), and a relay member(54). The first arm part is connected to the fixed base part through a first speed reducer(51) and the second arm part is connected to the first arm part through a second speed reducer(52). The second conveyor belt conveys a driving force of the motor with respect to the relay member. The first conveyor belt conveys the driving force of the motor to the first speed reducer. The driving force of the motor is conveyed from the second conveyor belt through the relay member.

Description

Arm structure and robot of robot {ROBOT ARM STRUCTURE AND ROBOT}

The disclosed embodiment relates to an arm structure of a robot and a robot.

BACKGROUND ART Conventionally, a horizontal articulated robot is known as a robot for transporting a workpiece such as a glass substrate or a semiconductor wafer. The horizontal articulated robot includes, for example, a base, a first arm rotatably connected to the base via the first reducer, and a second arm rotatably connected to the first arm via the second reducer (eg, For example, refer patent document 1).

Patent Literature 1 discloses a technique of rotating both the first arm and the second arm using one driving unit. Specifically, in the technique described in Patent Document 1, the first timing belt is wound between the output shaft of the drive unit and the input shaft of the first reducer, and the second timing is between the output shaft of the drive unit and the input shaft of the second reducer. The belt is wound.

Thereby, the driving force of a drive part is simultaneously transmitted independently and independently with respect to a 1st timing belt and a 2nd timing belt, and a 1st arm and a 2nd arm rotate respectively by the drive force transmitted by each timing belt.

Japanese Patent No. 3881579

However, in the prior art, there is room for further improvement in that the robot can be miniaturized.

In particular, the robot which conveys a glass substrate, a semiconductor wafer, etc. may be installed in the vacuum chamber hold | maintained in reduced pressure. In such a case, by reducing the size of the robot, the volume of the vacuum chamber can be reduced, so that the pressure-reduced state can be easily maintained. For this reason, the request for miniaturization of the robot is strong.

An object of one embodiment is to provide an arm structure of a robot and a robot capable of miniaturizing a robot.

The arm structure of the robot of one embodiment of the embodiment includes a first member, a second member, a third member, a drive unit, a first transmission member, a second transmission member, and a relay member. The second member is rotatably connected to the first member via the first reducer. The third member is rotatably connected with the second member via the second reducer. The driving unit generates a driving force. The first transmission member transmits the driving force of the drive unit with respect to the input shaft of the first reducer. The second transmission member transmits the driving force of the drive unit with respect to the input shaft of the second reducer. The relay member extends along an axis parallel to the output axis of the drive and rotates about this axis. And either one of the first transmission member or the second transmission member also transmits the driving force of the drive unit to the relay member, and the other of the first transmission member or the second transmission member is one of the first transmission member or the second transmission member. The driving force transmitted from the through the relay member from the transmission.

According to one aspect of the embodiment, the robot arm structure and the robot which can miniaturize the robot can be provided.

1 is a schematic perspective view of a robot according to the first embodiment,
2 is a schematic side view illustrating a state in which a robot is installed in a vacuum chamber;
3 is a schematic sectional view showing an internal structure of a first arm portion;
4A is a sectional view seen from an AA line arrow shown in FIG. 3;
4B is a schematic sectional view when the inside of the first arm portion is viewed from the Y axis direction;
4C is a schematic sectional view when the inside of the first arm part is viewed from the Y axis direction;
5A is a schematic sectional view showing an internal structure of a first arm part according to the second embodiment;
5B is a schematic sectional view when the inside of the first arm portion according to the second embodiment is viewed from the Y axis direction;
It is a schematic cross section when the inside of a 1st arm part which concerns on 2nd Embodiment is seen from a Y-axis direction.

EMBODIMENT OF THE INVENTION Hereinafter, with reference to an accompanying drawing, embodiment of the arm structure of a robot disclosed in this application, and a robot is described in detail. The present invention is not limited to the embodiments shown below.

(First Embodiment)

First, the configuration of the robot according to the first embodiment will be described with reference to Fig. 1 is a schematic perspective view of a robot according to an embodiment.

As shown in FIG. 1, the robot 1 is a horizontal articulated robot provided with two expansion arms which expand and contract in the horizontal direction. Specifically, the robot 1 includes a trunk portion 10 and an arm unit 20.

The trunk portion 10 is a unit provided below the arm unit 20. This trunk | drum 10 is equipped with the lifting device in the cylindrical housing 11, and raises and lowers the arm unit 20 along a perpendicular direction using this lifting device.

The lifting device includes, for example, a motor, a ball screw, a ball nut, and the like, and lifts and lowers the lifting flange portion 15 along the vertical direction by converting the rotational motion of the motor into a linear motion. As a result, the arm unit 20 fixed on the lifting flange portion 15 moves up and down.

The flange part 12 is formed in the upper part of the housing 11. The robot 1 is in the state provided in the vacuum chamber by the flange part 12 being fixed to the vacuum chamber. This point is demonstrated using FIG.

The arm unit 20 is a unit that connects to the trunk portion 10 via the lifting flange portion 15. Specifically, the arm unit 20 includes a fixed base portion 21, a first arm portion 22, a second arm portion 23, a movable base portion 24, and an auxiliary arm portion 25. It is provided. In addition, in this embodiment, the fixed base part 21, the 1st arm part 22, the 2nd arm part 23, and the movable base part 24 are the 1st member, the 2nd member, and the 3rd member, respectively. And a fourth member.

The fixed base portion 21 is rotatably supported with respect to the lifting flange portion 15. The fixed base part 21 is equipped with the turning device which consists of a motor, a reducer, etc., and rotates using this turning device.

Specifically, the turning device inputs the rotation of the motor via the transmission belt with respect to the reduction gear whose output shaft is fixed to the trunk portion 10. As a result, the fixed base portion 21 rotates in the horizontal direction with the output shaft of the reducer as the pivot axis.

In addition, the fixed base portion 21 includes a box-shaped accommodating portion maintained at atmospheric pressure therein, and includes a motor, a speed reducer, a transmission belt, and the like in the accommodating portion. Thereby, even when the robot 1 is used in the vacuum chamber, as described later, it is possible to prevent drying of lubricating oil such as grease, but also to prevent contamination of the inside of the vacuum chamber by dusting. Can be.

The upper end of the first arm portion 22 is rotatably connected to the upper portion of the fixed base portion 21 via a first speed reducer described later. Moreover, the base end part of the 2nd arm part 23 is rotatably connected to the upper part of the front-end | tip part of the 1st arm part 22 via the 2nd speed reducer mentioned later.

And the movable base part 24 is rotatably connected to the front-end | tip part of the 2nd arm part 23. As shown in FIG. The movable base part 24 is equipped with the end effector 24a for holding a workpiece in the upper part, and rotation of the 1st arm part 22 and the 2nd arm part 23 moves linearly according to an operation.

The robot 1 linearly moves the end effector 24a by operating the 1st arm part 22 and the 2nd arm part 23 synchronously. Specifically, the robot 1 rotates both the first reducer and the second reducer using one motor to operate the second arm portion 23 in synchronization with the first arm portion 22.

Specifically, in the robot 1, the amount of rotation of the second arm portion 23 relative to the first arm portion 22 is twice the amount of rotation of the first arm portion 22 relative to the fixed base portion 21. The first arm part 22 and the second arm part 23 are rotated as much as possible. For example, when the 1st arm part 22 rotates (alpha) degree with respect to the fixed base part 21, the robot 1 has the 2nd arm part 23 with respect to the 1st arm part 22, for example. The first arm portion 22 and the second arm portion 23 are rotated to rotate 2 [deg.]. Thereby, the robot 1 can linearly move the end effector 24a.

Drive mechanisms, such as a 1st reduction gear, a 2nd reduction gear, a motor, and a transmission belt, are accommodated in the inside of the 1st arm part 22 hold | maintained at atmospheric pressure from the viewpoint of contamination prevention in a vacuum chamber etc.

Here, when transmitting the driving force of one motor to two reducers, conventionally, both the transmission belt which transmits the driving force of a motor to the input shaft of one reducer, and the transmission belt which transmits to the input shaft of the other reducer are It was wound about the output shaft of the motor.

However, there exists a possibility that the height dimension of the 1st arm part 22 may not be made small enough by the winding method of such a transmission belt.

So, in the robot 1 which concerns on 1st Embodiment, the height dimension of the 1st arm part 22 is made small by devising the method of winding the transmission belt about a 1st reduction gear and a 2nd reduction gear, and the robot 1 It was supposed to miniaturize the whole. This point will be described in detail with reference to FIGS. 3 and 4A to 4C.

The auxiliary arm portion 25 moves in conjunction with the rotational operations of the first arm portion 22 and the second arm portion 23 so that the end effector 24a during movement always faces a constant direction. Link mechanism to regulate the rotation of the.

Specifically, the auxiliary arm portion 25 includes a first link portion 25a, an intermediate link portion 25b, and a second link portion 25c.

The base end portion of the first link portion 25a is rotatably connected to the fixed base portion 21, and is rotatably connected to the tip portion of the intermediate link portion 25b at the tip portion. In addition, the intermediate link portion 25b has a proximal end axially coaxial with a connecting axis of the first arm portion 22 and the second arm portion 23, and the distal end portion is rotatable with the distal end portion of the first link portion 25a. Is connected.

The second link portion 25c is rotatably connected to the intermediate link portion 25b at the proximal end, and rotatably connected to the proximal end of the movable base 24 at the distal end. Moreover, the movable base part 24 is rotatably connected with the front-end | tip part of the 2nd arm part 23 in the front end part, and is rotatably connected with the 2nd link part 25c in the base end part.

The first link portion 25a forms a first parallel link mechanism together with the fixed base portion 21, the first arm portion 22, and the intermediate link portion 25b. That is, when the first arm portion 22 rotates about the proximal end, the first link portion 25a and the intermediate link portion 25b are parallel to the first arm portion 22 and the fixed base portion 21, respectively. Rotate while maintaining state.

Moreover, the 2nd link part 25c forms the 2nd parallel link mechanism with the 2nd arm part 23, the movable base part 24, and the intermediate link part 25b. That is, when the second arm portion 23 rotates about the proximal end, the second link portion 25c and the movable base portion 24 are parallel to the second arm portion 23 and the intermediate link portion 25b, respectively. Rotate while maintaining one state.

The intermediate link portion 25b rotates while being in parallel with the fixed base portion 21 by the first parallel link mechanism. For this reason, the movable base part 24 of a 2nd parallel link mechanism also rotates, maintaining the state parallel to the fixed base part 21. FIG. As a result, the end effector 24a mounted on the upper portion of the movable base portion 24 moves linearly while maintaining the state parallel to the fixed base portion 21.

In this way, the robot 1 uses the two parallel link mechanisms of the first parallel link mechanism and the second parallel link mechanism to keep the direction of the end effector 24a constant. For this reason, compared with the case where a pulley or a transmission belt is provided in a 2nd arm part, and a direction of an end effector is maintained in a fixed direction using these pulleys or a transmission belt, oscillation resulting from a pulley or a transmission belt can be suppressed. Can be.

Moreover, since the rigidity of the whole arm can be improved by the auxiliary arm part 25, the vibration at the time of the operation of the end effector 24a can be reduced. Therefore, as compared with the case where the direction of the end effector is maintained in a constant direction by using a pulley or a transmission belt, the oscillation caused by the vibration during the operation of the end effector 24a can also be suppressed.

Moreover, the robot 1 which concerns on 1st Embodiment consists of two sets of telescopic arm parts comprised by the 1st arm part 22, the 2nd arm part 23, the movable base part 24, and the auxiliary arm part 25. As shown in FIG. Equipped. For this reason, the robot 1 carries out two operations, for example, taking out a workpiece | work from one conveyance position using one telescopic arm part, and bringing in a new workpiece to this conveyance position using the other telescopic arm part, etc. Can run in parallel at the same time.

Next, the state in which the robot 1 is installed in the vacuum chamber will be described with reference to FIG. 2. FIG. 2: is a schematic side view which shows the state which installed the robot 1 in the vacuum chamber.

As shown in FIG. 2, the robot 1 includes a flange 12 formed in the trunk portion 10 via a seal member with respect to an edge portion of the opening 31 formed in the bottom of the vacuum chamber 30. It is fixed. As a result, the vacuum chamber 30 is in a sealed state, and the inside is kept in a reduced pressure state by a decompression device such as a vacuum pump. In addition, the housing 11 of the body portion 10 protrudes from the lower portion of the vacuum chamber 30 and is located in a space in the support portion 35 that supports the vacuum chamber 30.

The robot 1 executes the conveyance work of the workpiece in the vacuum chamber 30. For example, the robot 1 moves the end effector 24a linearly using the 1st arm part 22 and the 2nd arm part 23, and the vacuum chamber 30 passes through the gate valve which is not shown in figure. The work is taken out from the other vacuum chamber connected with

Subsequently, after returning the end effector 24a, the robot 1 rotates the fixed base portion 21 in the horizontal direction about the pivot axis O, so that the arm 1 with respect to another vacuum chamber serving as a destination for the work. Unit 20 is matched. And the robot 1 carries in a workpiece into the other vacuum chamber used as the destination of a workpiece | work by linearly moving the end effector 24a using the 1st arm part 22 and the 2nd arm part 23. As shown in FIG. .

The vacuum chamber 30 is formed to match the shape of the robot 1. For example, as shown in FIG. 2, the recessed part is formed in the bottom surface in the vacuum chamber 30, and with respect to this recessed part, the fixed base part 21 and the elevating flange part 15 to another lower side. The part of the robot 1 which protrudes is accommodated. Thus, by forming the vacuum chamber 30 in accordance with the shape of the robot 1, the volume in a chamber can be made small. Therefore, it becomes possible to easily maintain the reduced pressure state of the vacuum chamber 30.

In addition, the space in the vacuum chamber 30 ensures a space in which the arm unit 20 which has taken the minimum swing posture and the space required for the arm unit 20 to elevate and lift by the lifting device. The minimum swing attitude is the attitude of the robot 1 whose rotation radius of the arm unit 20 around the pivot axis O is minimum.

Next, arrangement | positioning of the motor accommodated in the 1st arm part 22, a 1st reduction gear, a 2nd reduction gear, a transmission belt, etc. is demonstrated using FIG. FIG. 3: is a schematic cross section which shows the internal structure of the 1st arm part 22. FIG.

In addition, below, the extension direction of the 1st arm part 22 is made into the X-axis direction, and the direction orthogonal to the X-axis direction in a horizontal direction is made into the Y-axis direction. In addition, the direction orthogonal to the X-axis direction and the Y-axis direction, ie, the vertical direction, is taken as the Z-axis direction.

As shown in FIG. 3, the 1st arm part 22 is equipped with the box-shaped accommodating part 221 hold | maintained at atmospheric pressure inside. And the 1st arm part 22 is the 1st reduction gear 51, the 2nd reduction gear 52, the motor 53, the relay member 54, and the 1st transmission belt 55 in this accommodating part 221. As shown in FIG. ) And a second transfer belt 56 and the like.

Thus, the robot 1 which concerns on 1st Embodiment can prevent drying of lubricating oils, such as grease, by storing another member which used as a reducer, a motor, and a transmission belt in the accommodating part 221 hold | maintained at atmospheric pressure. In addition, contamination in the vacuum chamber 30 due to oscillation can be prevented.

The first decelerator 51 is disposed at the proximal end of the first arm portion 22, and rotatably connects the fixed base portion 21 and the first arm portion 22. In addition, the second reducer 52 is disposed at the distal end of the first arm portion 22, and rotatably connects the first arm portion 22 and the second arm portion 23.

The motor 53 is a drive unit for generating a driving force, and is disposed at approximately the center of the first arm unit 22. The relay member 54 extends along an axis parallel to the output axis of the motor 53 and is a member rotatable along this axis. This relay member 54 is disposed together with the motor 53 in the Y-axis direction.

The first transmission belt 55 is a first transmission member that transmits a driving force of the motor 53 with respect to the input shaft of the first reducer 51. Moreover, the 2nd transmission belt 56 is a 2nd transmission member which transmits the driving force of the motor 53 with respect to the input shaft of the 2nd reduction gear 52. As shown in FIG.

As shown in FIG. 3, the second transmission belt 56 includes a second pulley 521 fixed to the input shaft of the second reducer 52, and a third pulley 531 fixed to the output shaft of the motor 53. ) And the relay member 54. Further, the first transmission belt 55 is wound about the first pulley 511 and the relay member 54 fixed to the input shaft of the first reducer 51. As a result, the first transmission belt 55 transmits the driving force of the motor 53 transmitted from the second transmission belt 56 via the relay member 54 to the input shaft of the first reducer 51.

Thus, the robot 1 uses the 1st transmission belt 55 and the 2nd transmission belt 56 to drive the driving force of one motor 53, respectively, The 1st reduction gear 51 and the 2nd reduction gear 52 are as follows. By transmitting to, the first arm portion 22 and the second arm portion 23 are operated synchronously.

Next, arrangement | positioning of the motor 53 and the relay member 54 is demonstrated more concretely using FIG. 4A. FIG. 4A is a cross-sectional view seen from the arrow A-A shown in FIG. 3. FIG.

The motor 53 includes a motor main body 532, an output shaft 533 protruding vertically downward from the motor main body 532, a third pulley 531 fixed to the tip of the output shaft 533, A mounting flange 535 is provided between the motor main body 532 and the output shaft 533.

The motor 53 is disposed in the accommodating part 221 with the flange 535 supported against the support parts 222a and 222b protruding from the side wall of the accommodating part 221.

The relay member 54 includes a cylindrical main body portion 541, a rotation shaft 542 inserted through the body portion 541, a fourth pulley 543 fixed to the proximal end of the rotation shaft 542, and a rotation shaft ( And a fifth pulley 544 fixed to the tip of 542. In addition, the relay member 54 includes a mounting flange 545 under the main body portion 541.

The relay member 54 is disposed in the housing 221 in a state where the flange 545 is supported with respect to the support parts 222b and 222c protruding from the side wall of the housing 221. In addition, the fourth pulley 543 of the relay member 54 is disposed at the same height as the third pulley 531 of the motor 53.

The second transmission belt 56 is wound around the third pulley 531 of the motor 53 and the fourth pulley 543 of the relay member 54. This 2nd transmission belt 56 is also wound by the 2nd pulley 521 fixed to the input shaft of the 2nd reduction gear 52, as shown in FIG. Accordingly, the driving force of the motor 53 is transmitted to the input shaft of the second reducer 52 via the fourth pulley 543 and the second transmission belt 56 of the relay member 54.

In addition, a lid portion 224 is provided on the upper portion of the storage portion 221 to close the storage portion 221 so as to communicate with the outside. By removing this cover part 224, the motor 53 and the grease exchange of the 1st reduction gear 51 and the 2nd reduction gear 52 can be performed from the upper part of the accommodating part 221. In addition, the cover part 224 is fixed to the upper end of the accommodating part 221 via the sealing member. Thereby, the inside of the storage part 221 can be maintained at atmospheric pressure.

Next, the arrangement of the first reducer 51 and the second reducer 52 and the method of winding the first transfer belt 55 and the second transfer belt 56 will be described in more detail with reference to FIGS. 4B and 4C. do. 4B and 4C are schematic sectional views when the inside of the 1st arm part 23 is seen from the Y-axis direction. In addition, in order to make understanding easy, the relay member 54 is abbreviate | omitted in FIG. 4B, and the motor 53 is abbreviate | omitted in FIG. 4C.

As shown in FIG. 4B, the first speed reducer 51 includes a casing 512, an input shaft 513 protruding vertically upward from the casing 512, and a first fixed part of the tip of the input shaft 513. 1 pulley 511 and an output shaft 514 projecting vertically downward from the casing 512 bottom. The output shaft 514 of the first reducer 51 is fixed to the fixed base portion 21. In addition, the casing 512 of the first reducer 51 is fixed to the first arm portion 22.

Since the output shaft 514 of the first reducer 51 is fixed to the fixed base portion 21, the driving force of the motor 53 is input to the input shaft 513 of the first reducer 51, The first arm portion 22 rotates relatively.

The second reducer 52 includes an casing 522 and an input shaft 523 protruding vertically downward from the casing 522, a second pulley 521 fixed to the distal end of the input shaft 523, and a casing ( 522 has an output shaft 524 that projects vertically upwards from the top. The output shaft 524 of the second reducer 52 is fixed to the second arm portion 23. In addition, the casing 522 of the second reducer 52 is fixed to the first arm portion 22. When the driving force of the motor 53 is input to the input shaft 523 of the second reducer 52, the second arm portion 23 fixed to the output shaft 524 of the second reducer 52 rotates.

In this way, the first reducer 51 and the second reducer 52 are disposed in the accommodating portion 221 with the input shafts 513 and 523 facing in opposite directions. Specifically, in the first reducer 51, the input shaft 513 is disposed above, and in the second reducer 52, the input shaft 523 is disposed below.

In addition, as shown in FIG. 4B, the first reducer 51 and the second reducer 52 are disposed at approximately the same height as the motor 53. Specifically, in the first reducer 51 and the second reducer 52, the casing 512 of the first reducer 51 and the casing 522 of the second reducer 52 are perpendicular to each other (ie, the height direction). ) Are arranged to overlap each other.

Accordingly, the first pulley 511 of the first reducer 51 and the second pulley 521 of the second reducer 52 are disposed at different heights.

The second pulley 521 of the first pulley 511 and the second pulley 521 disposed at different heights is disposed at the same height as the third pulley 531 of the motor 53. The second transmission belt 56 which transmits the driving force of the motor 53 to the input shaft 523 of the second reducer 52 has the same height as that of the second pulley 521, the third pulley 531, and the same. It is wound around the 4th pulley 543 (refer FIG. 4C) of the relay member 54 arrange | positioned at.

The relay member 54 is used to transmit the driving force of the motor 53 to the first pulley 511 of the first reducer 51 disposed at a height different from that of the third pulley 531 of the motor 53. do.

Specifically, as shown in FIG. 4C, the first transmission belt 55 which transmits the driving force of the motor 53 to the input shaft 51 of the first reducer 51 is formed of the first reducer 51. The first pulley 511 is wound around the fifth pulley 544 of the relay member 54 disposed at the same height.

When the motor 53 is operated, the driving force of the motor 53 is transmitted by the second transmission belt 56 to the second pulley 521 of the second reducer 52 and the fourth pulley 543 of the relay member 54. Is passed on. In addition, when the rotation shaft 542 of the relay member 54 rotates, the fifth pulley 544 of the relay member 54 rotates, and the rotation of the fifth pulley 544 causes the first transmission belt 55 to rotate. It passes to the 1st pulley 511 of the 1st speed reducer 51 via it.

Here, as mentioned above, in the prior art, both the transmission belt which transmits the driving force of a motor to the input shaft of a 1st reduction gear, and the transmission belt which transmits to the input shaft of a 2nd reduction gear are wound about the output shaft of a motor. .

When adopting such a method of winding the transmission belt, the pulley fixed to the input shaft of the first reducer, the pulley fixed to the input shaft of the second reducer and the pulley fixed to the output shaft of the motor are arranged at the same height. As a result, the 1st speed reducer (speed reducer arrange | positioned with the input shaft facing the direction opposite to the output shaft of a motor) protrudes large downward, and there exists a possibility that the height dimension of the 1st arm part which accommodates these may become large.

Therefore, in the robot 1 according to the first embodiment, the driving force of the motor 53 is transmitted to the first reducer 51 via the relay member 54 extending along an axis parallel to the output shaft 533 of the motor 53. It is assumed that a method of transmitting to the input shaft 513 of the By adopting this method, it is possible to remove the limitation of the arrangement of the first pulley 511 of the first reducer 51. As shown in FIG. 4B, the first reducer 51 is connected to the second reducer 52. It becomes possible to arrange | position at about the same height.

Thereby, in the conventional system, it is necessary to form a space corresponding to the height dimension of each of the reducers 51 and 52 above the first reducer 51 and below the second reducer 52. In the robot 1 according to the first embodiment, such a necessity is eliminated. For this reason, the space above the 1st reduction gear 51 and the lower part of the 2nd reduction gear 52 can be made small.

Therefore, in the robot 1 which concerns on 1st Embodiment, the height dimension of the 1st arm part 22 which accommodates the 1st reduction gear 51, the 2nd reduction gear 52, the motor 53, etc. can be made small. Therefore, the height dimension of the whole robot 1 can be made small. When the height dimension of the whole robot 1 becomes small, since the volume of the vacuum chamber 30 can be made smaller, it becomes easy to maintain the pressure reduction state in a chamber.

In the first embodiment, since the motor 53, the first reducer 51, the second reducer 52, and the like are concentrated in the storage portion 221 of the first arm portion 22, these are Maintenance of the motor 53, the first reducer 51, the second reducer 52, and the like can be easily performed.

For example, in the first reducer 51 and the second reducer 52, internal grease replacement may be regularly performed. Such a grease replacement operation includes an operation of connecting a grease tube for discharging grease to the first reducer 51 and the second reducer 52. In 1st Embodiment, the 1st reduction gear 51 and the 2nd reduction gear 52 are centered in the accommodating part 221, and only the cover part 224 of the 1st arm part 22 is isolate | separated, and 1st A grease tube can be mounted to both the reducer 51 and the second reducer 52. For this reason, grease exchange operation can be performed easily.

In the first embodiment, the motor 53 can also be easily replaced. That is, when the method of winding both the 1st transmission belt and the 2nd transmission belt about the 3rd pulley of a motor is employ | adopted, both of a 1st transmission belt and a 2nd transmission belt are isolate | separated from a 3rd pulley. Therefore, after mounting a motor again, tension adjustment using a tension pulley etc. is performed with respect to both a 1st transmission belt and a 2nd transmission belt.

In contrast, in the first embodiment, only the second transmission belt 56 is the transmission belt wound around the third pulley 531 of the motor 53. Therefore, the tension adjustment only needs to be performed for the second transmission belt 56, so that the adjustment time is shortened and the time required for motor replacement can be shortened.

As described above, in the first embodiment, the second transmission belt 56 further transmits the driving force of the motor 53 to the relay member 54, and the first transmission belt 55 is the second transmission belt ( The driving force of the motor 53 transmitted from 56 through the relay member 54 is transmitted to the first reducer 51. Therefore, the height dimension of a robot can be made small and a robot can be miniaturized.

Further, according to the first embodiment, the driving force of the motor 53 is not independently transmitted to each of the first transmission belt 55 and the second transmission belt 56, but through the second transmission belt 56. It is then delivered to the first transfer belt 55.

When the 2nd transmission belt 56 is driven by the motor 53, the 2nd transmission belt 56 may generate | occur | produce according to a load. When extension | strength generate | occur | produces in the 2nd transmission belt 56, the robot 1 will generate the delay of rotation resulting from extension | strength of the 2nd transmission belt 56. As shown in FIG. The delay of this rotation is transmitted to the second pulley 521 of the second reducer 52 and the fourth pulley 543 of the relay member 54.

In addition, when the 1st transmission belt 55 is driven by the 5th pulley 544 of the relay member 54, the 1st transmission belt 55 will generate | occur | produce according to a load. The extension of the first transmission belt 55 overlaps the extension of the second transmission belt 56 transmitted to the fourth pulley 543 of the relay member 54 so that the first pulley 511 of the first reducer 51 is extended. Is passed on.

As such, the rotational delay transmitted to the second reducer 52 is due only to the elongation of the second transmission belt 56, and the rotational delay transmitted to the first reducer 51 is dependent upon the elongation of the second transmission belt 56. The extension of the first transfer belt 55 is due to the overlapped synthetic extension.

(Second Embodiment)

By the way, the winding method of the 1st transmission belt 55 and the 2nd transmission belt 56 is not limited to the example shown in 1st Embodiment. So, below, another example of the winding method of the 1st transmission belt 55 and the 2nd transmission belt 56 is demonstrated using FIGS. 5A-5C.

5: A is a schematic cross section which shows the internal structure of the 1st arm part 22a which concerns on 2nd Embodiment. 5B and 5C are schematic sectional views when the inside of the 1st arm part 22a which concerns on 2nd Embodiment is seen from the Y-axis direction.

In addition, in order to make understanding easy, the relay member 54 is abbreviate | omitted and shown in FIG. 5B, and the motor 53 and the 2nd relay member 57 are abbreviate | omitted and shown in FIG. 5C. In addition, in the following description, about the part same as the already demonstrated part, the same code | symbol as the already demonstrated part is attached | subjected, and the overlapping description is abbreviate | omitted.

As shown in FIG. 5A, the robot 1a according to the second embodiment includes a second relay member 57 in addition to the relay member 54. The relay member 54 and the second relay member 57 are arranged side by side along the Y-axis direction in the vicinity of the motor 53.

In addition, a third transmission belt 58 is wound around the second relay member 57 and the third pulley 531 of the motor 53. The distance between the second relay member 57 and the motor 53 is short compared with the distance between the motor 53 and the first reducer 51 or the distance between the motor 53 and the second reducer 52. Thus, the third transmission belt 58 is short compared with the first reducer 51 and the second reducer 52.

The first transmission belt 55a transmitting the driving force of the motor 53 with respect to the input shaft 513 of the first reducer 51 is the first pulley 511 of the first reducer 51, the relay member 54. And the second relay member 57. In addition, the second transmission belt 56a which transmits the driving force of the motor 53 with respect to the input shaft 523 of the second reduction gear 52 is the second pulley of the relay member 54 and the second reduction gear 52 ( 521).

As shown in FIG. 5B, the second relay member 57 has the same configuration as the relay member 54. Specifically, the second relay member 57 includes a cylindrical main body 571, a rotation shaft 572 inserted through the main body 571, and a sixth pulley fixed to the proximal end of the rotation shaft 572 ( 573 and a seventh pulley 574 fixed to the distal end of the rotation shaft 572.

The sixth pulley 573 is disposed at the same height as the third pulley 531 of the motor 53, and the seventh pulley 574 is disposed at the same height as the first pulley 511 of the first reducer 51. do. The third transmission belt 58 is wound between the sixth pulley 573 and the third pulley 531, and the first transmission belt 55a is wound between the seventh pulley 574 and the first pulley 511. Lose. Further, the first transmission belt 55a is also wound around the fifth pulley 544 of the relay member 54 (see FIG. 5C).

5C, the second transmission belt 56a is wound about the fourth pulley 543 of the relay member 54 and the second pulley 521 of the second reducer 52.

When the motor 53 is operated, the driving force of the motor 53 is transmitted to the sixth pulley 573 of the second relay member 57 by the third transmission belt 58. In addition, when the rotation shaft 572 of the second relay member 57 rotates, the seventh pulley 574 of the second relay member 57 rotates, and the rotation of the seventh pulley 574 causes the first transmission belt to rotate. It is transmitted to the first pulley 511 of the first reducer 51 and the fifth pulley 544 of the relay member 54 via the 55a.

As the rotation shaft 542 of the relay member 54 rotates, the fourth pulley 543 of the relay member 54 rotates, and the rotation of the fourth pulley 543 causes the second transmission belt 56a to rotate. It is transmitted to the second pulley 521 of the second reducer 52 via.

As described above, in the second embodiment, the second relay member 57 and the second extending along the rotation shaft 572 parallel to the output shaft 533 of the motor 53 and rotatable about the rotation shaft 572. A third transmission member for transmitting the driving force of the motor 53 to the relay member 57 is further provided. And in 2nd Embodiment, the 1st transmission belt 55a sends the driving force of the motor 53 transmitted from the 3rd transmission belt 58 via the 2nd relay member 57 to the relay member 54 further. We decided to send.

That is, in 2nd Embodiment, these 1st transmission belts 55a do not directly sense the 1st transmission belt 55a and the 2nd transmission belt 56a with respect to the 3rd pulley 531 of the motor 53. As shown in FIG. And a third transmission belt 58 shorter than the second transmission belt 56a.

As a result, when the motor 53 is replaced, the first transmission belt 55a and the second transmission belt 56a do not have to be removed. Thus, after the motor 53 is mounted, these first transmission belts are mounted. There is no need to perform tension adjustment on the 55a and the second transfer belt 56a.

In addition, when the motor 53 is replaced, the third transmission belt 58 is removed, but the third transmission belt 58 is compared with the first transmission belt 55a and the second transmission belt 56a. Since it is short, the tension adjustment after attaching the motor 53 is easy.

Moreover, in each embodiment mentioned above, the 2nd transmission belts 56 and 56a transmit the driving force of the motor 53 with respect to the relay member 54, and the 1st transmission belts 55 and 55a are the relay members 54. In addition, in FIG. It is assumed that the driving force of the motor 53, which is transmitted via the T1, is transmitted to the first speed reducer 51. However, the present invention is not limited thereto, but the first transmission belts 55 and 55a transmit the driving force of the motor 53 to the relay member 54, and the second transmission belts 56 and 56a are the relay member 54. May be transmitted to the second reducer 52.

In addition, in each embodiment mentioned above, although the example at the time of using a transmission belt as a transmission member was demonstrated, the transmission member may be a transmission member other than a transmission belt made into a chain and a tooth. In addition, when using a chain as a transmission member, a sprocket may be used instead of a pulley. In addition, when using a gear as a transmission member, you may use a gear instead of a pulley.

In addition, although each case mentioned above demonstrated the example in the case of using the robot 1, 1a in the vacuum chamber 30, it is also possible to use the robot 1, 1a in air | atmosphere.

New effects or modifications can be easily derived by those skilled in the art. For this reason, the broad form which concerns on this invention is not limited to the specific detailed and representative embodiment which also described the table | surface as mentioned above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

1, 1a: robot 10: body part
11 housing 12 flange portion
15: lifting flange portion 20: arm unit
21: fixed base portion 22, 22a: first arm portion
221: accommodating part 224: cover part
23: second arm portion 24: movable base portion
24a: end effector 25: auxiliary arm part
30: vacuum chamber 51: first reducer
511: first pulley 512: casing
513: input axis 514: output axis
52: second reducer 521: second pulley
522: casing 523: input shaft
524: output shaft 53: motor
531: third pulley 532: motor body portion
533: output shaft 54: relay member
541: main body 542: rotation axis
543: fourth pulley 544: fifth pulley
55, 55a: first transmission belt 56, 56a: second transmission belt
57: second relay member 571: main body
572: axis of rotation 573: sixth pulley
574: 7th Pulley 58: Third Transmission Belt

Claims (8)

The first member,
A second member rotatably connected to the first member via a first reducer,
A third member rotatably connected to the second member via a second reducer,
A driving unit for generating a driving force,
A first transmission member for transmitting a driving force of the drive unit with respect to an input shaft of the first reducer;
A second transmission member for transmitting a driving force of the drive unit with respect to an input shaft of the second reducer;
A relay member extending along an axis parallel to the output axis of the drive unit, the relay member being rotatable about the axis,
One of the first transmission member or the second transmission member also transmits a driving force of the drive unit with respect to the relay member,
The other side of the said 1st transmission member or the said 2nd transmission member transmits the driving force of the said drive part transmitted from the one of the said 1st transmission member or the said 2nd transmission member via the said relay member.
Arm structure of the robot. The method of claim 1,
The first reducer and the second reducer are arranged such that the input shafts face each other in the reverse direction, and at least a part of the casing overlaps each other in the height direction,
The said drive part is provided in the position in which an output shaft overlaps with an input shaft of one of the said 1st speed reducer and the said 2nd speed reducer in a height direction.
Arm structure of the robot. 3. The method according to claim 1 or 2,
A second relay member extending along an axis parallel to the output axis of the drive unit and rotatable about the axis;
Further comprising a third transmission member for transmitting a driving force of the drive unit with respect to the second relay member,
One of the first transmission member or the second transmission member further transmits the driving force of the drive unit transmitted from the third transmission member via the second relay member to the relay member.
Arm structure of the robot. The method according to any one of claims 1 to 3,
At least the driving unit, the first decelerator, the second decelerator, and the relay member are accommodated in an accommodating portion formed inside the second member and maintained at atmospheric pressure.
Arm structure of the robot. The method of claim 4, wherein
The second member further includes a cover portion for closing the receiving portion in communication with the outside.
Arm structure of the robot. 6. The method according to any one of claims 1 to 5,
A fourth member rotatably connected to the third member,
And a ring mechanism for restricting rotation of the fourth member when the second member and the third member rotate.
Arm structure of the robot. 7. The method according to any one of claims 1 to 6,
The arm structure of the robot is disposed in a chamber maintained at a reduced pressure state
Arm structure of the robot. The arm structure as described in any one of Claims 1-7 is provided.
robot.

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