KR20120135072A - Crucible apparatus, method for controlling crucible apparatus, film thickness measurement apparatus, and film deposition equipment with the same - Google Patents

Abstract

PURPOSE: A crucible apparatus, a control method thereof, an apparatus for measuring film thickness, and a thin film depositing apparatus including the same are provided to reduce energy by heating organic material and evaporating it. CONSTITUTION: Organic material is accepted in the inner side of a crucible(4C). A heating unit(45) is equipped in the crucible which can move upwards and downwards. The heating unit provides heat for evaporating the organic material. A driving unit moves the heating unit. A control unit controls the driving unit.

Description

Crucible Apparatus, Method for Controlling Crucible Apparatus, Film Thickness Measurement Apparatus and Thin Film Deposition Equipment Including the Same

The present invention relates to a crucible apparatus for providing an organic material required for thin film deposition, a method of controlling such a crucible apparatus, a device for measuring the thickness of the deposited thin film and a thin film deposition apparatus including the same.

An organic light emitting diode (OLED) refers to a self-luminous organic material that emits light by using an electroluminescence phenomenon that emits light when a current flows through a fluorescent organic compound. The organic light emitting diode display can be driven at low voltage, can be made thin, and has a wide viewing angle and fast response speed. Therefore, unlike a general liquid crystal display, the image quality does not change even when viewed from the side. There is no afterimage on the screen. In addition, the small screen has attracted great attention as a next-generation display device because it has an advantageous price competitiveness due to the image quality of LCD and simple manufacturing process.

It is a thin film deposition equipment that is necessary when producing displays or televisions for mobile communication terminals using organic light emitting diodes. The thin film deposition equipment is an important equipment for manufacturing organic light emitting diodes by depositing organic materials on a substrate. One.

FIG. 1 is a schematic view showing a configuration of a general thin film deposition apparatus. As shown in FIG. 1, a thin film deposition apparatus includes a chamber 910, and a substrate 905 is disposed in an upper space of the chamber 910. (Hereinafter, reference numerals omitted) are placed, and a crucible apparatus (see reference numerals 920 and 930) for providing an organic material for depositing a thin film on the substrate 905 is disposed in the lower space of the chamber 910.

The crucible device includes a crucible 920 in which organic materials are contained therein and a heating wire 930 wound over the outer circumference of the crucible 920. The organic material contained in the crucible 920 is evaporated as the crucible 920 is heated by the heating wire 930. The evaporated organic material rises as it is discharged through the injection means provided in the crucible 920, thereby reaching and depositing the substrate located in the upper space of the chamber 910 to form a thin film on the substrate.

Since the heating wire 930 heats the entire crucible 920, some organic materials that remain in the crucible 920 because they are not evaporated during the thin film deposition process are continuously exposed to high heat from the heating wire 930 from the beginning of the process, and the crucible 920 is heated. As the organic material is evaporated, the empty upper portion is continuously unnecessarily heated by the heat from the heating wire 930.

Organic materials exposed to high heat for longer than necessary may be denatured due to thermal decomposition, and thus may not be usable as an organic thin film material. In addition, continuously heating the entire crucible 920 in the thin film deposition process is a very inefficient method in terms of energy efficiency.

On the other hand, the inside of the chamber 910 is a film thickness measuring device for measuring the evaporation amount of the organic material from the crucible 920 to calculate the thickness of the thin film deposited on the substrate (the amount of evaporated organic material is converted into the thin film thickness deposited) It may be provided.

Korean Utility Model Registration No. 0218573 describes a film thickness monitor with a crystal sensor mounted on a monitor head, and a crystal that blocks some of the organic substances evaporated from the front of the film thickness meter. A film thickness measurement apparatus is described that includes a grid of a mesh structure that reduces the degree of deposition of organic material on a sensor and a grid support for supporting the grid.

In the case of the film thickness measuring apparatus described in Korean Utility Model Registration No. 0218573, the film thickness may be measured while blocking a part of organic material by the grid at the beginning of measurement, but thereafter, As the material accumulates, the grid of the mesh structure can be clogged, thereby making the film thickness measurement inaccurate or impossible.

The present invention provides a crucible apparatus and a control method thereof, and a thin film deposition apparatus including the same, which can effectively heat and evaporate organic substances contained in a crucible.

In addition, the present invention provides a film thickness measuring apparatus and a thin film deposition apparatus including the same that can improve the reliability of the film thickness measurement.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood from the following description if they are common knowledge (those skilled in the art to which the present invention belongs).

According to an embodiment of the present invention, the crucible containing an organic material therein; An elevating heating unit provided in the crucible so as to be movable in the vertical direction and providing heat for evaporating the organic material while moving; A crucible device including a drive unit for moving the lifting type heating unit is provided.

The crucible device according to an embodiment of the present invention may further include a control unit for controlling the driving unit to move the lifting type heating unit according to the height (amount) of the organic material contained in the crucible.

The crucible apparatus according to an embodiment of the present invention may further include a cooling unit for cooling the organic material in the crucible. The cooling unit may be provided at a lower portion of the lifting unit to move together with the lifting unit.

The control unit includes a detection sensor for detecting the height of the organic material contained in the crucible; It may include a control unit for controlling the operation of the drive unit in accordance with the detection signal from the detection sensor. Or, the control unit, the detection sensor for detecting the amount of evaporation per unit time of the organic material evaporated from the crucible; It may include a control unit for controlling the operation of the drive unit in accordance with the detection signal from the detection sensor.

The lifting type heating unit is composed of a plurality of unit heating units arranged in the vertical direction, the unit heating units may be capable of adjusting the heating temperature, respectively.

The elevating heating unit is moved up and down while being fitted to the outer circumference of the crucible, and at least a portion of the heating source provided in the up and down direction of the elevating heating unit has a different distance from the outer circumference of the crucible. It can be configured to be located in.

Crucible apparatus according to an embodiment of the present invention may further include an auxiliary heating unit for providing heat for maintaining the organic material evaporated from the crucible in the state of a gas. At this time, the auxiliary heating unit is provided on the elevated heating unit can be moved together with the elevated heating unit.

According to an embodiment of the present invention, the crucible containing an organic material therein; A plurality of stationary heating units provided in the crucible so as to be spaced apart from each other in the vertical direction to provide heat for evaporating organic materials; A crucible device including a control unit for selectively turning on and off the fixed heating units according to the height (amount) of the organic material contained in the crucible is provided. Such a crucible device may further include a cooling unit for cooling the organic material contained in the crucible.

The fixed heating units are configured to have a structure surrounding each of the outer circumference of the crucible, the heating temperature of each can be adjusted by the control unit. And, between the fixed heating unit may be interposed between the heat insulating member to prevent thermal interference between the neighboring fixed heating unit.

Crucible apparatus according to an embodiment of the present invention may further include a supply unit for supplying an organic material to the crucible. The control unit may control the supply unit so that the organic material is supplied from the supply unit to the crucible according to the height (amount) of the organic material contained in the crucible.

The crucible may have a concave-convex structure so that the contact area with the organic material contained therein is increased.

According to an embodiment of the present invention, the step of moving the elevating heating unit provided in the crucible to be movable in the vertical direction to a predetermined height; A crucible apparatus control method is provided, including the step of lowering the moved lifting heating unit as the organic material contained in the crucible is evaporated and the height of the organic material is lowered (as the amount is reduced).

According to an embodiment of the present invention, a step of detecting and moving the height (amount) of the organic material contained in the crucible by the elevating heating unit provided to be movable up and down in the crucible; A crucible apparatus control method is provided, including the step of lowering the moved lifting heating unit as the organic material contained in the crucible is evaporated and the height of the organic material is lowered (as the amount is reduced).

The step of lowering the lifting type heating unit may detect the height (amount) of the organic material contained in the crucible, and lower the lifting type heating unit according to the detection result. Alternatively, if the evaporation amount of the organic material from the crucible is less than a predetermined amount, the lifting type heating unit may be lowered by a predetermined distance. Alternatively, the evaporation amount per unit time of the organic material evaporated from the crucible may be detected, and the heating unit may be lowered according to the detection result.

According to an embodiment of the present invention, a step of turning on all of the plurality of fixed heating units provided to be spaced apart from each other in the vertical direction in the crucible; As the organic material contained in the crucible is evaporated and the height of the organic material is lowered (as the amount is decreased), the method of controlling the crucible apparatus is provided.

Here, at least three stationary heating units are provided, and the step of turning on the stationary heating unit is to maintain the uppermost stationary heating unit at the organic material evaporation temperature and the stationary heating units located at the lower side to the organic material preheating temperature. You can keep it. And, when the stationary heating unit is off, the stationary heating unit located at the bottom of the process of converting the lower stationary heating unit adjacent to the stationary heating unit turned off from the organic material preheating temperature to the organic material evaporating temperature evaporates the organic material. The method may further include the step of continuing until the temperature is converted. That is, as the stationary heating unit is sequentially turned off, the stationary heating unit of the organic material preheating temperature is sequentially converted from the top into the organic material evaporation temperature.

According to an embodiment of the present invention, a plurality of fixed heating units provided to be spaced apart from each other in the crucible up and down in accordance with the height of the organic material is lowered (as the amount is reduced) by evaporating the organic material contained in the crucible from the top Turning on sequentially; A method of controlling a crucible device is provided that includes turning off the fixed heating unit in the on state sequentially from the top as the height of the organic material is lowered (as the amount is reduced) by evaporating the organic material contained in the crucible.

According to an embodiment of the present invention, a film thickness measuring device for calculating the thickness of the thin film deposited on the deposition target based on the state of the organic material (evaporation amount of the organic material) evaporated from the crucible; A film thickness measuring apparatus is provided that has a cylindrical shape and includes a guide shield connected to the film thickness meter to guide a portion of the organic material evaporated from the crucible to the film thickness meter.

The film thickness measuring apparatus according to the embodiment of the present invention may further include a shield heating unit for heating the guide shield.

The guide shield may include a fixing part mounted to the body of the film thickness meter; It may include an induction part connected to the tubular structure in front of the fixing part to induce the inflow of evaporation material.

According to an embodiment of the invention, the deposition chamber having a deposition space; A substrate support device for supporting a substrate on the deposition space; A thin film deposition apparatus including the crucible apparatus is provided to provide an organic material for thin film deposition on a substrate supported by the substrate support apparatus under the deposition space.

According to an embodiment of the invention, the deposition chamber having a deposition space; A substrate support device for supporting a substrate on the deposition space; A crucible device for providing an organic material for thin film deposition on a substrate supported by the substrate support device under the deposition space; Provided between the supported substrate and the crucible device in the deposition space to measure the thickness of the thin film deposited on the substrate is provided a thin film deposition apparatus including the film thickness measuring device.

The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings, in which: Means for solving various problems besides the means will be further presented below.

According to the present invention, the efficiency of the process for heating and evaporating an organic material, which is an organic thin film material, can be greatly improved. In other words, it can be expected to save energy, improve workability, minimize the loss of organic materials.

In addition, according to the present invention, in measuring the thickness of the deposited thin film, the reliability of the measurement can be maintained even if used for a long time, it is possible to continuously proceed without interruption of the thin film deposition process can greatly contribute to improving the efficiency of the process.

1 is a block diagram showing a general thin film deposition equipment.
2 is a block diagram showing a thin film deposition apparatus according to a first embodiment of the present invention.
3 is an exploded perspective view showing the crucible device shown in FIG.
4 and 5 are perspective views showing the operation of the injection hole opening and closing unit shown in FIG.
6 is a block diagram of a control unit for controlling the operation of the heater (heating unit) driving unit shown in FIG.
7 is a perspective view showing a state in which the heating unit is lowered in FIG.
FIG. 8 is an exploded perspective view showing the film thickness measuring apparatus shown in FIG. 2.
FIG. 9 is a cross-sectional view illustrating the guide shield shown in FIG. 8.
10 to 12 are cross-sectional views illustrating various modifications to the guide shield shown in FIG. 9.
13 and 14 are perspective views showing main parts of the thin film deposition apparatus according to the second embodiment of the present invention.
FIG. 15 is a block diagram of a control unit for controlling the operation of the heater (heating unit) shown in FIGS. 13 and 14.
16 to 18 are cross-sectional views showing the control process of the heater (heating unit) by the control unit shown in FIG.
19 is a block diagram showing the main part of the thin film deposition apparatus according to a third embodiment of the present invention.
20 is a configuration diagram showing the main part of the thin film deposition apparatus according to a fourth embodiment of the present invention.
FIG. 21 is a block diagram of a control unit for controlling the heater (heating unit) driving unit and the organic material supply pump shown in FIG. 20.
22 to 24 are configuration diagrams showing the descending process of the heater (heating unit) by the control unit shown in FIG.
25 is a configuration diagram showing the main part of the thin film deposition apparatus according to a fifth embodiment of the present invention.
26 is a configuration diagram showing the main part of the thin film deposition apparatus according to the sixth embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention. For reference, the size of the components, the thickness of the line, etc. shown in the drawings referred to for the description of the present invention may be somewhat exaggerated for ease of understanding. The terms used in the description of the present invention are defined in consideration of the functions of the present invention, and thus may vary depending on the user, the intention of the operator, customs, and the like. Accordingly, the definition of terms should be given based on the contents throughout the specification.

Figure 2 is a schematic diagram showing the configuration of a thin film deposition apparatus according to a first embodiment of the present invention. As shown in FIG. 2, the thin film deposition apparatus according to the first exemplary embodiment of the present invention includes a deposition chamber 2 and an inner space of the deposition chamber 2 in which a deposition space 22 capable of blocking an outside is provided therein. And a substrate support device 3 and a crucible device 4 disposed above and below the phosphorus deposition space 22, respectively.

The wall of the deposition chamber 2 is provided with a substrate entrance 24 for carrying in the substrate 1 (hereinafter referred to as reference numeral) in the upper portion of the deposition space 22 and for carrying out the carried substrate. The substrate entrance 24 is opened and closed by the entrance opening and closing device 5. One or more substrate entrances 24 opened and closed by the door opening and closing device 5 may be provided to face each other. Although not shown, the deposition space 22 may be formed in a vacuum atmosphere by the exhaust device.

The substrate supporting apparatus 3 supports the substrate in the deposition space 22, and the crucible apparatus 4 is organic in order to deposit a thin film on the substrate supported by the substrate supporting apparatus 3 below the deposition space 22. Provide the substance. The substrate support device 3 supports the substrate so that the deposition surface (the surface on which thin film deposition is performed) of the substrate faces the crucible device 4 and is exposed. The crucible apparatus 4 includes a crucible 4C and a crucible heating means 4H. The crucible 4C contains organic material therein, and the crucible heating means 4H provides heat necessary for evaporating the organic material contained in the crucible 4C. For evaporating the organic material by the crucible heating means 4H, it is preferable to use a method of applying heat to the crucible 4C rather than a heating method of directly applying heat to the organic material. The organic material which rises as it evaporates and is discharged from the crucible 4C by the crucible heating means 4H is deposited upon reaching the substrate to form a thin film on the deposition surface of the substrate.

Reference numeral 6 denotes a shutter for blocking or releasing the movement path of the organic material rising from the crucible 4C to the substrate between the substrate support device 3 and the crucible device 4. The shutter 6 maintains the blocking of the organic material movement path during the thin film deposition process, and blocks the organic material movement path when the thin film deposition process is completed or stopped so that the organic material is no longer deposited on the substrate. Do not

Reference numeral 7 is a film thickness measuring apparatus for measuring the thickness of the thin film deposited on the deposition surface of the substrate in the thin film deposition process. The film thickness measuring device 7 is arranged between the supporting device 3 and the crucible device 4 so that there is no interference with the shutter 6. In one example, the film thickness measuring apparatus 7 may be installed on the wall of the deposition chamber 2.

The crucible apparatus 4 will be described in detail with reference to FIGS. 3 to 7.

3 is a perspective view of the crucible device 4, and as shown in FIG. 3, the crucible 4C is formed to be elongated laterally and has a container-like structure, and the crucible main body 41 and the crucible main body having an open top. A crucible cover 42 covering the open top of 41.

The crucible body 41 is composed of a bottom plate 41A formed to be flat and a wall erected along an edge portion of the bottom plate 41A. The wall is divided into four walls: the front wall 41B and the rear wall 41C, and the left wall 41D and the right wall 41E. The walls 41B, 41C, 41D, and 41E are all erected vertically, such that the shape of the flat cross section with respect to the outer circumference of the crucible main body 41 is constant. The left side wall 41D and the right side wall 41E are respectively connected to the both ends of the long side front wall 41B and the rear wall 41C.

The front and rear walls 41B and 41C are both formed in a continuous shape such that the straight portion 411 and the curved portion 412 alternate with each other. The straight portion 411 and the curved portion 412 of the front wall 41B and the straight portion 411 and the curved portion 412 of the rear wall 41C are arranged to be symmetrical to face each other. The curved portions 412 of the front wall 41B and the rear wall 41C are convexly formed outwardly opposite to the inside facing each other. The left and right walls 41D and 41E also have a curved shape that is convex outward like the curved portion 412. According to the walls 41B, 41C, 41D, and 41E, the crucible main body 41 has a roughly dumbbell-shaped concave-convex structure, so that the crucible main body 41 is simply flat without such concave-convex structure. In addition, the contact area with the organic material contained therein is increased, so that the evaporation time of the organic material by the crucible heating means 4H can be greatly shortened.

In relation to the crucible main body 41, three straight portions 411 of the front and rear walls 41B and 41C are respectively shown in the figure, but extend from the straight portions 411 and the straight portions 411. The number of curved portions 412 can be appropriately increased or decreased depending on the implementation conditions. In addition, the concave-convex structure of the crucible body 41 may be variously modified without being limited to the dumbbell type provided that the flat cross section of the crucible body 41 can be made constant. In addition, the uneven structure of the crucible main body 41 may be made to have the bottom plate 41A rather than the wall 41B, 41C, 41D, 41E, and the bottom plate 41A and the wall 41B, 41C, 41D, 41E. ) Everyone can have it.

The crucible lid 42 is preferably formed in a shape corresponding to the flat cross section of the crucible body 41. The crucible lid 42 is provided with one or more organic material injection holes 421 as injection means for injecting the organic material evaporated by the crucible heating means 4H onto the substrate supported by the substrate support device 3. .

The organic material injection hole 421 has a linear hole 422 formed on a linear hole 422 and a linear hole 422 formed of a long linear slit laterally (the longitudinal direction of the crucible cover 42). It consists of a plurality of point type holes (423) arranged at regular intervals (preferably equal intervals) to be spaced apart from each other along the longitudinal direction of. At this time, the plurality of pointed holes 423 is formed in a circular shape having a size that can extend the width of the linear hole 422 at the point of formation. That is, the diameter of the viscous hole 423 is larger than the width of the linear hole 422.

According to the crucible lid 42 having a combination organic material injection hole 421 composed of such linear and pointed holes 422 and 423, which serves as a nozzle, the linear hole 422 linearly introduces organic material into the substrate. The uniform hole can be sprayed, and the viscous hole 423 allows the organic material to be intensively sprayed onto the substrate in parts, so that the uniformity of the thin film can be adjusted while flexibly responding to the thin film deposition process conditions.

In relation to the organic material injection hole 421, four viscous holes 423 are illustrated in the drawing, but the number of the viscous holes 423 may be appropriately increased or decreased according to the implementation conditions. In addition, although the two outermost viscous holes 423 are shown respectively disposed at both ends of the linear hole 422, the position of the outermost viscous hole 423 is the position of the linear hole 422 on the linear hole 422 May be spaced apart from both ends.

The crucible device 4 further includes a linear hole opening and closing unit 43 and a pointed hole opening and closing unit 44.

The linear opening / closing unit 43 is rotatably connected in the front-rear direction by a hinge 432 at one of front and rear of the crucible cover 42 to cover or cover the top of the crucible cover 42 according to the rotation direction. And a linear hole cover 431 for releasing, and the point hole opening and closing unit 44 is rotatably connected to the front and rear direction by a hinge 442 at the other side of the front and rear of the crucible cover 42 and the crucible cover according to the rotation direction. A pointed hole cover 441 covering the upper portion of the 42 or releasing the state thus covered is included.

When the linear hole cover 431 is covered with the crucible cover 42, the linear hole cover 431 has auxiliary viscous holes 433 corresponding to each of the plurality of point holes 423, and the point hole cover 441 is covered with the crucible cover 42. It has an auxiliary linear hole 443 which is inconsistent with the pointed hole 423 but coincides with the linear hole 422. Of course, it is preferable that the auxiliary viscous hole 433 and the auxiliary linear hole 443 are formed in the shape corresponding to each of the matched viscous hole 423 and the linear hole 422, respectively.

4 and 5 are perspective views showing the operation of the injection hole opening and closing unit (that is, the linear hole opening and closing unit 43 and the pointed hole opening and closing unit 44). 4, when the linear hole cover 431 is closed to cover the crucible cover 42, the linear hole 422 is closed by the linear hole cover 431, and the plurality of the spot holes 423 are closed by the auxiliary Since the state of being opened by the puncture hole 433 is maintained, the organic material to be evaporated is injected through the plurality of open pit holes 423. On the contrary, as shown in FIG. 5, when the linear hole cover 431 covering the crucible cover 42 is opened and the point hole cover 441 is closed to cover the crucible cover 42 with the point hole cover 441, The plurality of viscous holes 423 are closed by the viscous hole cover 441, and the linear holes 422 are kept open by the auxiliary linear holes 443, so that the evaporated organic material is stored in the open linear holes ( 422).

As described above, when the linear holes and the viscous hole opening and closing units 43 and 44 are used, one of the linear holes 422 and the viscous holes 423 may be selectively closed during the thin film deposition process.

On the other hand, it is preferable that the linear holes and the linear hole opening and closing units 43 and 44 and the linear holes and the linear hole covers 431 and 441 have a weight capable of maintaining a closed state at their own weight. Of course, depending on the embodiment, the closed state of the linear hole and the pointed hole cover 431, 441 can be maintained by the locking means, respectively. In one example, the locking means may comprise a bolt. More specifically, the linear holes and the viscous hole covers 431 and 441 are provided with through holes into which the screw portions of the bolts are inserted, respectively, and the crucible cover 42 is provided with the linear and viscous holes when the linear and viscous hole covers 431 and 441 are closed. By tightening the closed linear hole cover 431 or the pointed hole cover 441 to the crucible cover 42 by providing female thread grooves coincident with the through holes of the covers 431 and 441, respectively, to prevent inadvertent opening. It can be.

Referring to FIG. 3, the crucible heating means 4H is a lifting type crucible heating unit 45 (hereinafter referred to as a heater) that applies heat to the crucible body 41, and a heater driving unit to lift and lower the heater 45. (46), a control unit (reference numeral 47 of FIG. 6) for controlling the operation of the heater drive unit 46 in accordance with the amount that is reduced by evaporation of the organic material contained in the crucible body 41 during the thin film deposition process.

The heater 45 is surrounded by the outer circumference (that is, wall) of the crucible body 41. To this end, the heater 45 is formed in an annular plate structure having an inner circumference corresponding to the outer circumference (approximately, dumbbell type) of the crucible body 41 and inserted into the outer circumference of the crucible body 41. Since the outer circumference of the crucible body 41 is constant, the heater 45 may move upward and downward in a state of being inserted into the crucible body 41. The heater 45 generates heat when power is supplied, and it is preferable that the heater 45 is made of a material (for example, a material containing silicon carbide) having a large heat resistance compared to the amount of current.

The heater drive unit 46 is coupled to form a screw rod 461, a screw rod 461 and a screw pair formed along the longitudinal direction on the outer circumference of the screw rod 461. A movable movable block 462 and a motor 463 for rotating the screw rod 461 in both directions. The screw rod 461 is arranged on the heater 45 side in the up and down direction parallel to the moving direction of the heater 45, and in this state, the screw rod 461 is rotatable to other configurations (for example, the base of the crucible device 4). Is fitted. The movable block 462 is coupled to the heater 45. The motor 463 may be directly connected to the upper end of the screw rod 461. The motor 463 can be supported by surrounding brackets (eg, the base of the crucible device 4, etc.) by means of a bracket.

When the heater driving unit 46 operates the motor 463, the screw rod 461 is rotated, and the movable block 462 is raised or lowered according to the rotation direction of the screw rod 461. At this time, the heater 54 moves up and down together with the movable block 462.

In Fig. 3, reference numeral 464 denotes a guide rod. The guide rod 464 is disposed in the up-down direction parallel to the moving direction of the heater 45 on the heater 45 side with the crucible body 41 between the screw rod 461 and in this state. For example, it is attached to the base of the crucible apparatus 4, etc.). The heater 45 is slidably coupled to the guide rod 464 along the guide rod 464, and the guide rod 464 guides the lifting movement of the heater 45.

FIG. 6 is a block diagram showing a control unit 47. As shown in FIG. 6, the control unit 47 detects and detects a detection sensor 471 for detecting a residual amount of organic material contained in the crucible body 41. And a controller 472 for operating the motor 463 according to the detection signal from the sensor 471. Since the organic material contained in the crucible body 41 is evaporated during the thin film deposition process and the amount thereof decreases as the process time elapses, the control unit 47 adjusts the heating position by the heater 45 accordingly. Change it appropriately.

Here, the detection sensor 471 may be a sensor for measuring the height of the organic material contained in the crucible body 41, or a sensor for measuring the weight of the organic material contained in the crucible body 41, and the like. In operation of the crucible apparatus 4 for the thin film deposition process, the controller 472 operates the motor 463 to raise the heater 45 to the highest point, and then the amount of organic material and the heater 45 in the crucible body 41. The optimum position of the heater 45 corresponding to the measured value from the detection sensor 471 is read from the positioning table of the heater 45 previously determined with respect to the correlation between the heating positions of the heaters. By repeating the descending process of operating the 463 and lowering the heater 45 to the desired optimum position, the position of the heater 45 is appropriately changed according to the amount of reduction of the organic material contained in the crucible body 41. 7 shows a state in which the heater 45 is lowered by this control process. For reference, the optimum position of the heater 45 referred to herein may be a position (height) capable of intensively providing heat from the heater 45 to the surface layer side of the organic material contained in the crucible body 41. .

On the other hand, here it was described that the heater 45 is raised to the highest point before the heater 45 is lowered according to the remaining amount of the organic material contained in the crucible body 41, but the control for the heater 45 is raised to the highest point. It may be made to move down to the optimum position corresponding to the measured value from the detection sensor 471 and to lower.

In addition, the lowering control of the heater 45 is lowered by a predetermined distance at a predetermined time interval using a timer or the like without detecting the amount of organic material in the crucible body 41 by a height measuring sensor or a weighing sensor. It may also be made in a way.

8 to 12, the film thickness measuring apparatus 7 will be described in detail.

2 and 8, the film thickness measuring apparatus 7 measures the thickness of the thin film deposited on the substrate based on the state of the organic material evaporated from the crucible 4C, that is, the evaporation amount or evaporation rate of the organic material. And a film thickness meter 71 configured to be calculated. As the film thickness meter 71, various known film thickness meters used in the thin film deposition equipment may be applied.

As described with reference to the Republic of Korea Utility Model No. 0218573 in the background technology of the above invention, in general, the film thickness meter 71 is the front of the monitor head or body 72 (hereinafter, referred to as the body). The crystal sensor 73 is provided, and the evaporation amount (or evaporation rate) with respect to the organic material from the crucible 4C is measured, and it is comprised so that the thickness of the thin film deposited on a board | substrate can be calculated.

As shown in FIGS. 8 and 9, in front of the film thickness meter 71, a guide shield 75 which guides a part of the organic material evaporated from the crucible 4C to the film thickness meter 71 is provided. Connected. The guide shield 75 is formed in a cylindrical structure in order to allow the organic material to pass through and reach the crystal sensor 73 of the film thickness gauge 71. The guide shield 75 is formed in a tubular structure in communication with the coupling portion 76 connected to the body 72 of the film thickness gauge 71 and the coupling portion 76 and in front of the coupling portion 76 to form an organic material. 71) and an introduction portion 77 leading to the side. For reference, the coupling portion 76 and the introduction portion 77 may be integral.

Herein, the coupling part 76 may be variously modified according to the structure of the body 72 of the film thickness meter 71 as long as it can be firmly connected to the body 72 of the film thickness meter 71. The introduction portion 77 has a cylindrical structure having a constant circumference (diameter) as shown in FIG. 9, a cylindrical structure in which the circumference extends or contracts toward the end (inlet side through which organic material is introduced) as shown in FIG. 10 or FIG. Various cylindrical structures capable of introducing organic materials such as cylindrical structures (not shown) in which reduction and repetition are repeated may be applied. As shown in Fig. 2, the introduction portion 77 is preferably disposed long so that its end is directed toward the injection means (i.e., the organic material injection hole 421) side of the crucible 4C in terms of organic material inflow efficiency. For reference, in Figs. 9 to 11, the same reference numerals are assigned to the same components.

The guide shield 75 is preferably made of stainless steel in order to maintain rigidity and minimize adhesion of organic materials, and can also treat the surface by sand blast.

In FIG. 2, reference numeral 79 denotes that the guide shield 75 is contaminated or the interior (path) of the guide shield 75 is heated as the organic material adheres to or accumulates in the guide shield 75 by heating the guide shield 75. A shield heating unit that prevents partial blockage. As the shield heating unit 79, a coil-type heater wound around the outside of the guide shield 75 may be applied. The shield heating unit 79 may be applied to various heating units capable of heating the guide shield 75 in addition to the coil heater. For example, the guide shield 75 may be heated by mounting a laser heater on the guide shield 75 side.

12 shows a through hole that allows the inside of the guide shield 75 to communicate with the outside at the end of the engaging portion 76 that meets the introduction portion 77 or at the end of the introduction portion 77 that meets the engagement portion 76. (78) illustrates that one or more than one may be formed. According to the through hole 78, the organic material can be more smoothly introduced into the guide shield 75. For reference, in FIG. 12, the same reference numerals are given to the same components as in FIGS. 9 to 11.

Next, another embodiment of a configuration similar to the first embodiment will be described. Other embodiments will be described with respect to other parts as compared to the first embodiment for clarity, etc. of the description, and only the corresponding parts will be shown in the drawings.

13 and 14 are perspective views of a crucible device as a main part of a thin film deposition apparatus according to a second embodiment of the present invention, and FIG. 15 is a control unit for controlling a heater of the crucible device shown in FIGS. 13 and 14. Is a block diagram for. As shown in Figs. 13 to 15, the thin film deposition apparatus according to the second embodiment of the present invention, when compared with the first embodiment, the other configuration and its operation are the same, the heater 45- 1,45-2,45-3 is provided with a plurality of and is not a lifting type, it is a fixed type, the control unit 47-1 is a crucible main body 41 to the heater (45-1, 45-2, 45-3) Depending on the amount of organic material contained in the on (on) and off (off) selectively, the point that further includes a heat insulating member 48 and the like is different. Let's take a closer look at these different points.

13 and 14, it is preferable to have three or more heaters 45-1, 45-2, and 45-3, where three heaters 45-1, 45-2, and 45-3 are provided. It will be described only with a). The heaters 45-1, 45-2, and 45-3 are mounted on the crucible body 41 at regular intervals so as to be spaced apart from each other in the vertical direction. Descriptions of other configurations, shapes, and the like of the heaters 45-1, 45-2, and 45-3 are the same as those of the first embodiment and will be omitted.

The heating temperature of the heaters 45-1, 45-2, 45-3 is controlled by the control unit 47-1, respectively. For reference, the heating temperature control of the heaters 45-1, 45-2, 45-3 is made in a manner that varies the amount of current supplied to the heaters 45-1, 45-2, 45-3, respectively. Can be.

The insulation member 48 is interposed at least one between the heater (45-1, 45-2, 45-3) to radiate thermal interference between the heaters 45-1, 45-2, 45-3 neighboring up and down prevent. Like the heaters 45-1, 45-2, and 45-3, the heat insulating member 48 is formed in an annular shape having an inner circumference corresponding to the outer circumference of the crucible body 41 and fitted to the outer circumference of the crucible body 41. It is mounted so as to surround the outer circumference of the crucible body 41. Preferably, the heat insulating member 48 is formed so that its width is larger than the heaters 45-1, 45-2, 45-3. According to the heat insulating member 48, it is possible to avoid the difficulty of temperature control for each heating area by the heaters 45-1, 45-2, 45-3.

Referring to FIG. 15, the control unit 47-1 detects the residual amount of organic material contained in the crucible body 41 (the height decreases gradually as the process time elapses since the evaporation during the thin film deposition process). A control unit 472-1 for selectively turning on and off the detection sensors 471-1 and the heaters 45-1, 45-2, and 45-3 according to detection signals from the detection sensors 471-1. Include. In this case, as the detection sensor 471-1, a sensor for measuring the height of the organic material of the organic material contained in the crucible body 41 or a sensor for measuring the weight of the organic material contained in the crucible body 41 may be applied. have.

In operation of the crucible apparatus for the thin film deposition process, the controller 472-1 controls all the heaters 45-1, 45-2, and 45-3 to on, and then the organic material contained in the crucible main body 41. The detection sensor 471 in the control table of the heaters 45-1, 45-2, and 45-3, which predetermines the correlation between the heating zones of the heaters 45-1, 45-2 and 45-3, which are arranged up and down. The remaining amount of the organic substance corresponding to the measured value from -1 and the heaters 45-1, 45-2, and 45-3 to be controlled are read out and turned off sequentially from the top heater 45-1. That is, when the amount of organic material contained in the crucible body 41 decreases (height is lowered) and goes out of the heating area (which may be a predetermined setting area) of the upper heater 45-1, the upper heater 45- 1) is turned off, and after the amount of organic material is further reduced to leave the heating area of the intermediate heater 45-2, the intermediate heater 45-2 is turned off. The organic material contained in the crucible body 41 is turned off when the lower heater 45-3 of the heater 45-3 is out of the heating area (the organic material may be completely exhausted or almost exhausted). The heating position of the heater 45 is appropriately changed in accordance with the decrease amount of.

Meanwhile, in this case, the heaters 45-1, 45-2, and 45-3 are turned off before the heaters 45-1, 45-2, and 45-3 are turned off according to the remaining amount of organic material contained in the crucible body 41. Although all have been described as being turned on, the heaters 45-1, 45-2, and 45-3 do not turn on all of the heaters and have a heating area corresponding to the measured value from the detection sensor 471-1. And after turning on all the heaters located on the lower side, it can be made to turn off sequentially from the top heater of the heater in the on state. That is, when the crucible apparatus for the thin film deposition process is operated, if the residual amount of organic material corresponding to the measured value from the detection sensor 471-1 is out of the heating region of the upper heater 45-1, the intermediate heater 45 After only -2) and the lower heater 45-3 are turned on, the intermediate heater 45-2 is sequentially turned off according to the amount of reduction of the organic material contained in the crucible body 41.

When the controller 472-1 controls the heaters 45-1, 45-2, and 45-3 to on, the heater on the uppermost side of the heaters controlled to be on evaporates the organic material to evaporate the organic material. The temperature is maintained, and the remaining heaters located at the lower side are maintained at the organic material preheating temperature for preheating the organic material (see FIG. 16).

The controller 472-1 is a lower heater adjacent to the heater (for example, the upper heater 45-1) that is controlled to be off when the heaters 45-1, 45-2, and 45-3 are turned off. The process of converting (for example, the intermediate heater 45-2) from the organic material preheating temperature to the organic material evaporation temperature is continuously performed until the lowermost heater 45-3 is converted to the organic material evaporation temperature. In this regard, FIG. 17 shows that the amount of organic material leaves the heating zone of the upper heater 45-1 so that the upper heater 45-1 is turned off and the intermediate heater 45-2 evaporates the organic material at the preheating temperature of the organic material. It shows the state converted to temperature. 18 shows that the amount of organic material is further reduced to leave the heating zone of the intermediate heater 45-2 so that the intermediate heater 45-2 is turned off and the lower heater 45-3 evaporates the organic material at the organic material preheating temperature. It shows the state converted to temperature.

On the other hand, the conversion from the preheating temperature of the organic material to the evaporation temperature of the organic material, including the turning off of the heaters 45-1, 45-2, and 45-3, uses a timer or the like without detecting a height sensor or a weighing sensor. It can also be made at a predetermined time interval.

According to the control unit 47-1, the second embodiment can prevent the organic material from being denatured by being exposed to high heat for a long time, and of course, the evaporation rate of the organic material is delayed since the organic material is preheated and then evaporated. Can be prevented.

Unlike the above description, when the crucible apparatus for the thin film deposition process is operated, the controller 472-1 sequentially turns on the heater to the organic material evaporation temperature according to the amount of the organic material to be reduced, The controlled heaters can be turned off sequentially. That is, the heaters are sequentially turned on from a heater located at an upper side (for example, may be an upper heater 45-1 or an intermediate heater 45-2), and the heater located at a lower side is organic. When the material evaporation temperature is turned on, the process of turning off the upper heater adjacent to the heater controlled to this ion (or turning off the upper heater 45-1 when the intermediate heater 45-2 is controlled to on) is repeated. It is. At this time, the lower heater (lower heater 45-3 when the middle heater 45-2 is controlled to be on) adjacent to the heater turned on at the organic material evaporation temperature may be controlled to the organic material preheating temperature. have.

19 is a block diagram showing the main part of the thin film deposition apparatus according to a third embodiment of the present invention. As shown in FIG. 19, in the case of the thin film deposition apparatus according to the third embodiment of the present invention, compared with the first embodiment, the control unit is an organic material for the other components and their actions are the same. The only difference is that the evaporation amount of the organic material is detected without detecting the remaining amount of, and thus the motor 463 of the heater driving unit (reference numeral 46 in FIG. 3) is controlled.

The control unit of the third embodiment includes a detection sensor for detecting the amount of evaporation of organic substances from the crucible (4C in FIG. 3) and a control unit 472 for controlling the operation of the motor 463 according to the detection signal from the detection sensor. Include. Specifically, the control unit 472 moves the heater (reference numeral 45 in FIG. 3) to a predetermined height, and then the heater is preset if the evaporation amount measurement value from the organic material evaporation detection sensor is less than the predetermined evaporation amount setting value. By repeating the descending process of controlling the operation of the motor 463 so as to descend by a predetermined distance, the position of the heater is appropriately changed according to the amount of reduction of organic substances contained in the crucible.

A film thickness meter (reference numeral 71 of FIG. 8) may be used to detect the amount of evaporated organic material. According to the crystal sensor 73 of the film thickness meter, the amount of evaporated organic material may be detected.

The evaporation amount set value may be a range for the amount of organic material to be evaporated when the heater is positioned at the optimum position. During the thin film deposition process, the organic material is evaporated and the amount (height) of the organic material is reduced. However, if the heater is not lowered, the amount of the evaporated organic material is inevitably reduced. At this time, the measured value from the crystal sensor 73 becomes less than the set amount of evaporation, and accordingly, the controller 472 controls the motor 463 to lower the heater by a predetermined distance.

Such a third embodiment may be constructed based on the second embodiment rather than the first embodiment.

FIG. 20 is a block diagram showing a crucible device which is a main part of a thin film deposition apparatus according to a fourth embodiment of the present invention, and FIG. 21 shows a heater driving unit 46-1 and an organic material supply pump shown in FIG. 20. This is a block diagram of the controlling unit to control. As shown in Fig. 20 and Fig. 21, the thin film deposition apparatus according to the third embodiment of the present invention, when compared with the first embodiment, the crucible (4C) for the other configuration and its operation are the same Applying an organic material injector 4J mounted to the crucible 4C as a spraying means for injecting organic material from the crucible 4C, the configuration of the crucible heating means is different, and cooling the crucible 4C. The crucible cooling unit 4R and the crucible 4C for the organic material supply unit 4F for supplying the organic material is different. Looking at these differences in detail as follows.

The crucible 10 may have a cylindrical shape having a circular cross section, but is not necessarily limited thereto. For example, the crucible 10 may have a polygonal cross section.

The organic material injector 4J connects the organic material injection head 210 having the organic material injection hole 212 and the organic material injection head 210 and the crucible 4C to collect organic materials evaporated from the crucible 4C. The connection pipe 220 is provided to the organic material injection head 210. The organic material injection head 210 is preferably disposed above the crucible 4C. The connecting pipe 220 includes a first pipe 222 connected to the organic material injection head 210 and a second pipe 224 connected to an upper portion of the crucible 4C. The first pipe 222 and the second pipe 224 is detachably connected to each other by flange joints using bolts and nuts.

The organic material flowing into the organic material injection head 210 via the connection pipe 220 is injected into the organic material injection hole 212. The organic material injection hole 212 is preferably disposed to face the substrate. The organic material injection hole 212 may be composed of a single or a plurality of linear holes or a viscous hole, or a hole in which the linear hole and the viscous hole shown in the first embodiment are combined (reference numeral 421 of FIG. 3). May be In the case where the organic material injection hole 212 is composed of a combination of a linear hole and a viscous hole, the organic material injection head 210 has a linear hole opening and closing unit (reference numeral 43 in FIG. 3) and a pointed hole opening and closing unit of the first embodiment. (44 in Fig. 3) can be fitted to close the linear or pointed holes.

The crucible heating means includes a heater 45-4 of a lift type, a heater drive unit 46-1 for lifting a heater 45-4, and a heater according to a reduction amount of organic substances contained in a crucible 4C during a thin film deposition process. And a control unit (see detection sensor and control unit in FIG. 21) for controlling the operation of the drive unit 46-1.

The heater 45-4 includes a heating source and a mounting housing in which the heating source is embedded. The mounting housing has a structure that is inserted into the outer periphery of the crucible 4C so as to be movable. The heating source may be a heating wire, but is not necessarily limited thereto. The heating source may be arranged to have a structure that spirally surrounds the outer circumference of the crucible 4C.

The heater driving unit 46-1 has a stator 310 having a long structure in the vertical direction, and a linear body having a mover 320 connected to the heater 45-4 by linear movement in the vertical direction with respect to the stator 310. It may be a motor. At this time, the stator 310 may be erected on the base 49 of the crucible device.

The control of the heater driving unit 46-1 by the control unit is a method of properly lowering the heater 45-4 according to the remaining amount of the organic material shown in the first embodiment, or the organic material shown in the third embodiment. A method of properly lowering the heater 45-4 may be applied according to the evaporation amount of.

The crucible cooling unit 4R is provided at the lower portion of the heater 45-4 to move up and down with the heater 45-4. The crucible cooling unit 4R prevents the organic material from being denatured by the high heat from the heater 45-4. That is, as shown in FIGS. 22 to 24, the organic material located below the heating area by the heater 45-4 is cooled to prevent denaturation of the organic material. For reference, in FIG. 24, the crucible cooling unit 4R is out of the crucible 4C due to the lowering of the heater 45-4.

Such a crucible cooling unit 4R includes a cooling source. For example, it may have a cooling passage through which a cooling medium such as cooling water flows. The cooling flow path may be configured to have a structure that spirally surrounds the outer circumference of the crucible 4C.

The organic material supply unit 4F connects the organic material storage tank 410, the organic material storage tank 410, and the crucible 4C, in which organic materials for supplying the crucible 4C are stored, to the organic material storage tank ( The organic material supply line 420, which provides an organic material transport path between the 410 and the crucible 4C, and an organic material supply pump 430 installed on the organic material transport line 420. When the organic material supply pump 430 is operated, the organic material stored in the organic material storage tank 410 is transferred along the organic material transfer line 420 and supplied to the crucible 4C. The organic material storage tank 410 or the organic material storage tank 410 and the organic material supply pump 430 may be disposed outside the deposition chamber (reference numeral 2 of FIG. 2). The organic material transfer line 420 is preferably connected to the lower portion of the crucible 4C.

Referring to FIG. 21, the controller controls the operation of the organic material supply pump 430 according to the detection signal from the detection sensor. For example, when the measured value from the detection sensor is less than the predetermined remaining set value, the operation of the organic material supply pump 430 is turned on so that the organic material is supplied to the crucible 4C, and thus the measured value from the detection sensor is When the remaining amount exceeds the set value, the operation of the organic material supply pump 430 may be turned off to stop the supply of the organic material. To this end, the detection sensor is preferably a sensor for measuring the height or weight of the remaining amount of the organic material.

According to the organic material supply unit 4F and the control unit as described above, when the remaining amount of organic material in the crucible 4C is less than the remaining amount set value, the organic material can be efficiently filled in the crucible 4C.

Meanwhile, although the mover 320 has been described as being connected to the heater 45-4, the mover 320 may be connected to the crucible cooling unit 4R.

25 is a configuration diagram showing the main part of the thin film deposition apparatus according to a fifth embodiment of the present invention. As shown in FIG. 25, in the case of the thin film deposition apparatus according to the fifth embodiment of the present invention, as compared with the fourth embodiment, the heater 45-4 has the same configuration and its action are all the same. ) Is composed of a plurality of unit heaters (101, 102, 103), and differs only in that it is configured to be able to adjust the heating temperature of these unit heaters (101, 102, 103), respectively.

The unit heaters 101, 102, 103 are arranged in a line in the vertical direction. In FIG. 25, the unit heaters 101, 102, 103 disposed as described above are adjacent to each other, but the unit heaters 101, 102, 103 may be spaced apart from each other.

The heating temperature of each unit heater (101, 102, 103) can be controlled by a control unit (see FIG. 21). Accordingly, by adjusting the unit heaters 101, 102 and 103 to different heating temperatures, some of the unit heaters 101, 102 and 103 are used as auxiliary heaters to keep the organic material evaporated from the crucible 4C in a gaseous state (prevent state change). Or as a preheater for preheating the organic material to be heated to the evaporation temperature of the organic material. In FIG. 25, the heater 45-4 is illustrated as being composed of three unit heaters 101, 102, and 103. Accordingly, the unit heater of reference numeral 101 is an auxiliary heater, and the unit heater of 102 is an organic material for evaporating organic materials. The main heater 103, which provides the evaporation temperature, may be used as a preheating heater. That is, according to the relative positional relationship between the unit heaters (101, 102, 103) it can be used as an auxiliary heater, main heater, preheating heater. When the heating temperature of the unit heater used as the auxiliary heater is higher than the heating temperature of the main heater, the rising speed of the evaporated organic material may be further increased.

26 is a configuration diagram showing the main part of the thin film deposition apparatus according to the sixth embodiment of the present invention. As shown in FIG. 26, in the case of the thin film deposition apparatus according to the sixth embodiment of the present invention, when compared with the fourth embodiment, the heater 45-4 is the same in all other configurations and functions thereof. The only difference is that at least a part of the heating source incorporated in the) is configured not to be located at the same distance from the outer circumference of the crucible 4C but to be located at a different separation position at a separation position.

According to the heating source structure of the heater 45-4, even if the heating temperature of the heating source is the same, the heating temperature provided according to the separation distance between the heating source and the crucible 4C can be varied. In other words, a portion far away from the heating source at the outer circumference of the crucible 4C is provided with a relatively low heating temperature, and conversely, a portion relatively close from the heating source is provided with a relatively high heating temperature. . In the case of the fifth embodiment, the heater 45-4 is composed of a plurality of unit heaters (reference numerals 101, 102, and 103 in FIG. 25), and the organic materials evaporated by adjusting the heating temperatures of the heating sources of these unit heaters, respectively. Is maintained in a gaseous state, provides a heating temperature for evaporating organic material, or preheats the organic material. However, the sixth embodiment changes the separation distance between the heating source of the heater 45-4 and the crucible 4C. It is possible to maintain a gaseous state of the evaporated organic material, provide a heating temperature for evaporating the organic material, and preheat the organic material.

In FIG. 26, the heating source of the heater 45-4 is configured to have a structure that gradually moves away from the outer circumference of the crucible 4C as the upper side of the crucible 4C, but the heating source of the heater 45-4 is a crucible It may be configured to have a structure that gradually moves away from the outer circumference of the crucible 4C toward the lower side rather than the upper side of the 4C. Alternatively, the heating source of the heater 45-4 may be configured such that the upper part and the lower part are relatively far from the outer circumference of the crucible 4C, and the middle portion between the upper part and the lower part has a structure relatively close to the outer circumference of the crucible 4C. As such, the heating source structure of the heater 45-4 may be variously changed depending on the implementation conditions.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

1 substrate 2 deposition chamber
3: substrate support device 4: crucible device
4C: Crucible 4F: Organic material supply unit
4H: Crucible heating unit 4R: Crucible cooling unit
7: film thickness measuring instrument 22: deposition space
45, 45-1, 45-2, 45-3, 45-4: Crucible heating unit (heater)
46, 46-1: heater driving unit 47, 47-1: control unit
48: insulation member 71: film thickness meter
72: body 73: crystal sensor
75: guide shield 79: shield heating unit

Claims (30)

A crucible containing organic material therein;
A heating unit provided in the crucible so as to be movable in the vertical direction and providing heat for evaporating the organic material;
Crucible apparatus comprising a drive unit for moving the heating unit. The method according to claim 1,
Crucible apparatus further comprising a control unit for controlling the drive unit to move the heating unit in accordance with the height of the organic material contained in the crucible. The method according to claim 2, wherein the control unit,
A detection sensor detecting a height of the organic material contained in the crucible;
Crucible apparatus including a control unit for controlling the operation of the drive unit in accordance with the detection signal from the detection sensor. The method according to claim 2, wherein the control unit,
A detection sensor detecting an evaporation amount per unit time of the organic material evaporated from the crucible;
Crucible apparatus including a control unit for controlling the operation of the drive unit in accordance with the detection signal from the detection sensor. The method according to claim 1,
The heating unit is a crucible apparatus for moving the shank while being fitted to the outer circumference of the crucible. The method according to claim 1,
Crucible apparatus further comprising a supply unit for supplying an organic material to the crucible. The method according to claim 1,
Crucible apparatus further comprises a cooling unit for cooling the organic material contained in the crucible. The method of claim 7,
The cooling unit is a crucible device provided to be movable together with the heating unit in the lower portion of the heating unit. A crucible containing organic material therein;
A plurality of heating units provided in the crucible so as to be spaced apart from each other in the vertical direction to provide heat for evaporating the organic material;
A crucible apparatus comprising a control unit for selectively turning on or off the heating units according to the height of the organic material contained in the crucible. The method according to claim 9,
The heating unit has a crucible device having a structure surrounding the outer periphery of the crucible, respectively. The method according to claim 9 or 10,
The crucible apparatus further comprises a heat insulating member interposed between the heating units to prevent thermal interference between the neighboring heating units. The method according to claim 9,
The heating unit is a crucible device in which the heating temperature is respectively controlled by the control unit. The method according to claim 1,
The crucible is a crucible device having a concave-convex structure so that the contact area with organic materials contained therein is increased. The method according to claim 2,
Crucible apparatus further comprising a supply unit for supplying an organic material to the crucible. The method according to claim 14,
The control unit is a crucible apparatus for controlling the supply unit so that the organic material is supplied to the crucible from the supply unit. The method according to claim 9,
Crucible apparatus further comprises a cooling unit for cooling the organic material contained in the crucible. The method according to claim 1,
The heating unit is composed of a plurality of unit heating units arranged in the vertical direction,
The unit heating unit is a crucible device capable of adjusting the heating temperature, respectively. The method according to claim 1,
The heating unit is Shanghaidong while being fitted to the outer circumference of the crucible,
Crucible apparatus is configured so that at least a portion of the heating source provided in the heating unit in the vertical direction is different from the distance from the outer circumference of the crucible. The method according to claim 1,
Crucible apparatus further comprises an auxiliary heating unit for providing heat for maintaining the organic material evaporated from the crucible in a gaseous state. Detecting and moving the height of the organic material contained in the crucible to a heating unit provided to be movable upward and downward in the crucible;
Crucible control method comprising the step of lowering the moved heating unit, the organic material contained in the crucible evaporated to lower the height of the organic material. The method of claim 20,
The step of lowering the heating unit detects the height of the organic material contained in the crucible, and the crucible apparatus control method for lowering the heating unit according to the detection result. The method of claim 20,
The step of lowering the heating unit detects the evaporation amount per unit time of the organic material evaporated from the crucible, and lowering the heating unit according to the detection result. Turning on all of the plurality of heating units provided in the crucible to be spaced apart from each other in the vertical direction;
Crucible apparatus control method comprising the step of turning off the heating unit sequentially from the top as the organic material contained in the crucible evaporated to lower the height of the organic material. 24. The method of claim 23,
In the step of turning on the plurality of heating units, the heating unit at the uppermost side is maintained at an organic material evaporation temperature, and the heating unit located at the lower side is maintained at an organic material preheating temperature for preheating the organic material.
The control method further comprises the step of converting the heating unit of the organic material preheating temperature to the evaporation temperature of the organic material sequentially from the top as the heating unit is sequentially turned off (off). Turning on a plurality of heating units provided in the crucible to be spaced apart from each other in a vertical direction from the top as the organic material contained in the crucible is evaporated to lower the height of the organic material;
Crucible apparatus control method comprising the step of turning off the heating unit in the on (on) state from the top sequentially as the height of the organic material is lowered. A film thickness measuring device for measuring the evaporation amount of the organic material evaporated from the crucible to calculate the thickness of the film deposited on the deposition target;
And a guide shield formed in a cylindrical shape and connected to the film thickness meter to guide a part of the organic material evaporated from the crucible to the film thickness meter. 27. The method of claim 26,
The film thickness measuring apparatus further comprises a shield heating unit for heating the guide shield. The method of claim 26, wherein the guide shield,
A fixing part mounted to the body of the film thickness meter;
A film thickness measuring apparatus including an induction part connected to the tubular structure in front of the fixing part to induce the inflow of evaporation material. A deposition chamber having a deposition space;
A substrate support apparatus for supporting a substrate on the deposition space;
A thin film deposition apparatus comprising a crucible apparatus according to claim 1 or 9 as providing an organic material for thin film deposition on a substrate supported by the substrate support apparatus at a lower portion of the deposition space. A deposition chamber having a deposition space;
A substrate support apparatus for supporting a substrate on the deposition space;
A crucible device for providing an organic material for thin film deposition on a substrate supported by the substrate support device at the bottom of the deposition space;
A thin film deposition apparatus comprising a film thickness measuring apparatus according to claim 26, which measures the thickness of a thin film deposited on a substrate provided between the supported substrate and the crucible device in the deposition space.

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