KR20120127864A

KR20120127864A - Curl cutting device

Info

Publication number: KR20120127864A
Application number: KR1020110045614A
Authority: KR
Inventors: 오수환
Original assignee: 한미반도체 주식회사
Priority date: 2011-05-16
Filing date: 2011-05-16
Publication date: 2012-11-26

Abstract

PURPOSE: A curl removing apparatus is provided to ensure a stable curl cutting process by removing curls which are formed on one end of a lead frame and a pressurization portion which pressurizes the lead frame. CONSTITUTION: A lead frame is mounted on tables(100a,100b). A support block(110) supports the lead frame. A heating means(120) heats one end of the lead frame. A curl removing means(130) removes curls from the lead frame which is heated by the heating means. A transfer device(150) transfers the curl removing means.

Description

Curl Remover {CURL CUTTING DEVICE}

The present invention relates to a curl removing device having a cutting function for removing curls generated when molding a semiconductor package. More specifically, the present invention, in addition to the cavity in the molding process of the transfer molding apparatus, the resin remains in the receiver on the resin supply passage for temporarily receiving the molten resin to supply the resin or to distribute the resin to supply the molten resin into the cavity It relates to a curl removing device for removing the cured curl.

In general, a semiconductor package process for manufacturing a fine semiconductor chip (for example, an LED semiconductor chip) forms a package mold for a plurality of semiconductor chips disposed adjacent to a grid in a lead frame, and a semiconductor device (LED) is formed on the package mold. Device) and then a wire bonding process and an encapsulation molding process using an encapsulant are performed.

In this case, in the case of a molding process for forming a package mold, a transfer molding method may be used. That is, a molding process for forming a package mold in lead frame units may be performed by arranging a mold in which a resin supply passage and each package mold are partitioned on the lead frame, and then supplying molten resin into the resin supply passage. .

After the molding process for forming the package mold is completed, the molten resin is cured in the resin material supply passage to form unnecessary curl. Unnecessary curl serves as an obstacle in the subsequent process, there is a problem to lower the precision of the process.

In the molding process of the transfer molding apparatus, in addition to the cavity, the curled cured resin remains in the receiver on the resin supply flow path which temporarily receives the molten resin to supply the resin or flows the molten resin into the cavity to distribute the resin. An object of the present invention is to provide a curl removal device that can be easily removed.

In order to solve the above problems, the present invention provides a table on which a lead frame on which a package mold is formed by a transfer molding process is seated, heating means for heating the lead frame on which the package mold is formed, and a lead frame heated by the heating means. It provides a curl removing device comprising a curl removing means for removing the curl formed at one end, and a conveying means for conveying the curl removing means.

In addition, the table is provided with a pair in parallel, a pair of curl removal means may be installed so as to face opposite curl to remove the curl formed on the opposite side end of the pair of lead frames seated on the pair of tables.

In this case, it may further include a lead frame support means provided in the table to support at least one side of the lead frame.

The lead frame support means may be provided to support three side surfaces of the lead frame except the edge of the lead frame.

Here, the lead frame support means may be composed of at least one support block to prevent the lead frame from being separated.

In addition, the heating means may be provided in the table or the curl removing means.

In addition, the heating means may be selected from a hot wire, a hot plate or a hot air supply device embedded or mounted in the table or the curl removing means.

In this case, the curl removing means may include a pressing portion for pressing the upper surface of the edge of the lead frame seated on the table and a cutting portion for removing the curl.

The vertical thickness of the front end of the pressing unit may be smaller than the thickness of the rear end.

The cutting part may be branched at a rear end of the pressing part to be provided in parallel with the pressing part, and the cutting part may cut a curl formed at one end of the lead frame pressed by the pressing part.

In addition, the height of the lower surface of the pressing portion may be higher than the height of the lower surface of the cutting portion.

In addition, the heating means may be a heating wire embedded or mounted in at least one of the pressing portion and the cutting portion constituting the curl removing means.

In this case, the conveying means may convey a plurality of curl curl removing means together.

The conveying means may include an LM guide provided outside the table in parallel with the table, an LM block sliding on the LM guide, and a mounting member fixed to the LM block and mounted with the curl removing means.

Here, the driving means for driving the LM block may be any one of a ball screw, a conveyor belt, a cylinder or a linear motor.

The curl removing device according to the present invention can quickly remove curls that may be generated during a transfer molding process by an automated curl removing device.

In addition, the curl removal device according to the present invention can facilitate the cutting process of the curl by lowering the hardness of the curl by preheating the curl before the curl removal process.

In addition, the curl removing device according to the present invention may be provided with a plurality of curl removing means can maximize the efficiency of the curl cutting process.

In addition, the curl removing means constituting the curl removing device according to the present invention can remove the curl formed on one end of the lead frame pressed by the pressing portion and the pressing portion for pressing the lead frame, thereby ensuring the stability of the curl cutting process can do.

1 illustrates a plan view of a general lead frame and a state in which a package mold is formed on the lead frame.
2 is a plan view and a front view of a curl removing device according to an embodiment of the present invention.
Figure 3 shows an embodiment of a curl removing means provided in the curl removing device of the present invention.
Figure 4 shows another embodiment of the curl removing means provided in the curl removing device of the present invention.
5 is a plan view and a front view of a state in which a lead frame with a package mold is mounted on a curl removing device according to the present invention.
6 is a front view of a process of removing curl in a state in which a lead frame having a package mold is mounted on the curl removing device according to the present invention.
7 is a plan view of a curl removing device according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like numbers refer to like elements throughout.

1 illustrates a plan view of a lead frame LF of a semiconductor package and a state in which a package mold pm is formed on the lead frame LF.

Specifically, FIG. 1A illustrates a plan view of a lead frame LF included in a semiconductor package, and FIG. 1B illustrates a state in which a package mold pm is formed on a lead frame LF of a semiconductor package. do.

In order to produce a fine semiconductor chip, a transfer molding process may be used. In addition, when the semiconductor chip is an LED chip, a primary molding process for mounting the LED elements constituting the LED chip and configuring a package mold (pm) for a wire bonding process may be performed.

The lead frame LF may be formed of a flat metal material, and may form a step, unevenness, or opening (h) by punching or etching on the surface thereof. That is, the step formed in the lead frame LF, the unevenness or the opening (h) is for the purpose of improving the adhesiveness with the resin and the like to be impregnated with the molding target resin.

As shown in FIG. 1A, a plurality of molding regions may be provided on a single lead frame LF. A total of four molding regions ma1 to ma4 may be provided in the lead frame LF illustrated in FIG. 1A.

Each molding region may be processed into a plurality of semiconductor chips in a lattice shape. That is, a large amount of fine semiconductor chips can be obtained by a dicing process after each process.

As shown in FIG. 1B, a plurality of package molds pm may be formed adjacent to each other in a lattice form after the molding process.

In addition, since the size of the package mold pm is small and the number is large, the process of forming the package mold pm may be a transfer molding process.

In the transfer molding process, in order to supply the resin uniformly to the entire molding region in the resin supply passage through which the resin is supplied, a receiver C1 may be provided to temporarily store the supplied resin, subdivide it, and distribute the resin.

The receiver C1 temporarily stores molten resin supplied through a resin supply passage (not shown) and supplies the granular resin through a detailed resin supply passage C2.

After the molding process for forming the package mold (pm) is completed, the molten resin is cured in the detailed resin supply passage C2 connecting the molding region in the receiver C1 and the receiver to form curls and the like. . The curls are preferably removed in a subsequent process because they cause deterioration of the precision of the process.

Conventionally, without separate preliminary work for removing curls, curls are removed from the lead frame LF by hand, but the cured resin is not cut well by the cutter, so the efficiency of the cutting process is reduced and the quality of the removed state is also reduced. The problem of not being constant may be solved through the curl removing device 1000 according to the present invention.

2 is a plan view and a front view of the curl removing device 1000 according to the present invention.

Curl removal apparatus 1000 according to the present invention is a table 100 on which the lead frame LF on which the package mold (pm) is formed by the transfer molding process is seated, and one end of the lead frame (LF) on which the transfer molding process is performed. Heating means 120 for heating, curl removal means 130 for removing the curl of the lead frame LF heated by the heating means 120, and transfer means for conveying the curl removing means 130 ( 150).

The curl removing device 1000 according to the present invention may remove curls formed at one end of the lead frame LF seated on the table 100.

The table 100 is a mounting means on which the curl removal target lead frame LF is seated. In the embodiment shown in FIG. 2, two tables 100 are provided in parallel.

Therefore, after the pair of lead frames (LF) are mounted together, curls can be removed at the same time. The table 100 may be provided in a spaced apart state, and the curl removing means 130 is transferred between the spaced tables 100 by a transfer means 150 to be described later, and at one end of the lead frame LF. The formed curls will be removed. This will be explained later.

A lead frame LF supporting means 110 provided on the table 100 may be further included to support at least one side of the lead frame LF seated on the table 100. The lead frame LF supporting means 110 supports three sides except for one side near the edge of the lead frame LF cut by the curl removing means 130 to prevent the lead frame from being displaced. It is fixed to prevent the support, as shown in Figure 2, the lead frame (LF) support means 110 may be composed of at least one or more support blocks.

Therefore, in the process of removing the curl of the lead frame LF, the side of the lead frame LF exposed to the side except for one side of the edge of the lead frame LF exposed to the side, during the curl removal process The lead frame LF is prevented from being separated or shifted in position to enable accurate curl cutting.

As shown in FIG. 2, the table 100 is provided with a pair of parallel spaced apart, and each of the table 100 has a support block 110 as a lead frame LF support means 110. It is provided.

In the embodiment illustrated in FIG. 2A, since the molding region (see FIG. 1) is continuously provided in the lead frame LF in the same direction, the table 100 may have a long rectangular shape.

One support block for supporting one side of each lead frame LF may be configured as one, but as shown in FIG. 2 (a), when the length of one side of the lead frame LF is long, 2 The support blocks may be provided in the table 100 in a state of being spaced apart.

As shown in FIG. 2A, the first table 100a and the second table 100b for seating the lead frame LF are first and fourth supports for supporting side surfaces of both ends in the longitudinal direction, respectively. Blocks 110 (1) and 110 (4) are provided, and the second side and the second support block having a long side opposite to the side opposite to the side opened to remove the curl by the curl removing means 130 are long. (110 (2), 110 (3)) is designed to be provided, but may be designed with only one support block in the center of the side (not shown).

According to the size and length of the lead frame LF, the number of support blocks 110 constituting the lead frame LF support means 110 may be flexibly applied.

The table 100 may be provided in pairs in parallel, and heating means (hot wire, hot plate, hot air supply, etc.) may be embedded or mounted in each table 100 at one end of the lead frame LF. .

2 (a) and 2 (b), the heating means 120 is embedded along the inner edge of the upper surface of the table 100 in the longitudinal direction of the table 100 As shown.

Specifically, the heating means 120 may be mounted along the longitudinal direction of the table 100 at one end of the upper surface of the table 100 in which the support block 110 is not disposed.

The heating means 120 serves to heat the edge of the lead frame LF so that the curl formed at one end of the lead frame LF is easily cut by the curl removing means 130 to be described later.

That is, the heating means 120 is a curl removal means 130 to be described later to preheat the curl formed at one end of the lateral direction of each lead frame (LF) to lower the hardness of the curl by the curl removal means 130 Can be easily cut or removed.

The molding material of the resin material is partially melted by the heating means 120 to lower the hardness, so that the curling by the curl removing means 130 may be easily removed.

Of course, since the curl is not heated and completely melted, but the temperature is preheated to alleviate the hardness of the curl, not only the edge of the lead frame but also the entire lead frame may be heated, but considering work efficiency and cost. It is more preferable to heat only one end of the lead frame in which the curl to be removed is formed.

The curl removing device 1000 according to the present invention includes a curl removing means 130 for removing curls of the lead frame LF heated by the heating means 120 and a conveying means for conveying the curl removing means 130. 150.

The curl removing means 130 cuts and removes the curl formed at one end of the lead frame LF. In the embodiment shown in Figure 2, the table 100 for mounting the lead frame (LF) is provided in two parallel, each of the curls formed at one end near the opposite side of the lead frame (LF) to be seated can be removed Can be.

The curl removing means 130 is transported along the longitudinal direction of the table 100 in a state of being mounted on the conveying means 150, and may remove curls. The conveying means 150 may be a mounting member 155 on which the curl removing means 130 is mounted, an LM block 153, and an LM guide 151.

The mounting member 155 is a member on which the curl removing means 130 is mounted, and the lead frame LF seated on the table 100 of the curl removing device 1000 shown in FIG. Since it is intended to remove the, the curl removing means 130 may be installed to face each other.

The pair of LM guides 151 are provided parallel to each table 100 on the outside of the pair of tables 100. The mounting member 155 is mounted in a direction perpendicular to the LM guide 151 or the table 100 on an upper end of the pair of LM blocks 153 that are slide driven on the pair of LM guides 151.

The driving means for sliding the LM block 153 on the LM guide 151 may be a ball screw or the like. The ball screw may be mounted inside the LM guide 151 or the like.

Therefore, when the LM block 153 is propelled and slidably displaced on the LM guide 151, the pair of curl removing means 130 mounted on the mounting member 155 fixed to the LM block 153 is provided on the table 100. ) To remove the curl formed at one end of the lead frame (LF) in the side direction.

That is, a pair of curl removal means 130 mounted on the mounting member 155 is mounted on the mounting member 155, but each lead is mounted when one mounting member 155 is propelled by the LM block 153. The curl formed at one end of the frame LF is removed together. The curl removing means 130 will be described with reference to FIG. 3.

3 shows an embodiment of the curl removing means 130 provided in the curl removing device 1000 of the present invention.

The curl removing means 130 is a means for removing the curl of the lead frame is lowered by the heating means. The curl removing means 130 may include a pressing part 131 for pressing an edge of the lead frame LF seated on the table 100 and a cutting part 135 for removing curl. The pressing unit 131 and the cutting unit 135 may be parallel, and the pressing unit 131 and the cutting unit 135 may be connected by the connection unit 133.

The pressing unit 131 fixes the material by pressing the upper surface of the lead frame, that is, the upper surface of the package mold in which there is a warpage, and restricts the movement of the lead frame during cutting of the cutting unit, and the cutting unit is formed in parallel. It serves to guide the movement of the 135.

The vertical thickness of the front end of the pressing unit 131 constituting the curl removing means may be configured to be thinner than the thickness of the rear end. That is, the entry surface 131s, which is a lower surface of the front end of the pressing unit 131, may be formed to be inclined.

The vertical thickness of the front end of the pressing unit 131 is configured to be thinner than the thickness of the rear end, so that the inclination is formed on the entry surface 131 s because of the transfer of the curl removing means 130 mounted on the mounting member 155. This is to allow the lead frame LF to enter the lower portion of the pressing unit 131 without interference.

The vertical thickness of the rear end of the pressing unit 131 is to have a height corresponding to the height of the upper surface of the lead frame LF of the lead frame LF inserted below the front end of the pressing unit 131 of the curl removing unit. The upper surface may be stably supported in contact with the lower surface of the pressing unit 131.

The cutting unit 135 is branched at the rear end of the pressing unit 131 and provided in parallel with the pressing unit 131, and the cutting unit 135 is a lead frame pressed by the pressing unit 131 ( The curl formed at one end of the LF) is cut.

The cutting unit 135 cuts curl formed at one end of the lead frame LF. The cutting surface of the cutting unit 135 may form a cutting surface 135s such that the thickness in the horizontal direction becomes thinner toward the front end of the cutting unit 135.

Lengths of the pressing unit 131 and the cutting unit 135 may be configured differently. In other words, the pressing part 131 has a length such that the pressing process of the upper surface of the edge of the lead frame LF is preceded by the cutting process of protruding in the lateral direction of the lead frame LF in the process of transferring the curl removing means. May be formed longer than the length of the cutting unit 135.

The cutting unit 135 may be integrally formed with the pressing unit 131, or may be fastened by the fastening member 137 as shown in FIG. 3.

As shown in FIG. 3B, the height h2 of the pressing part 131 is greater among the heights h1 and h2 of the lower surfaces of the pressing part 131 and the cutting part 135. Can be.

The pressing unit 131 presses and supports the upper surface of the lead frame LF, and the cutting unit 135 has a lower surface of the cutting unit 135 to remove the curl formed at one end of the lead frame LF as a whole. It may be disposed at a lower position than the lower surface of the pressing unit 131.

4 shows another embodiment of the curl removing means 130 provided in the curl removing device 1000 according to the present invention. Descriptions overlapping with those described with reference to FIG. 3 will be omitted.

Unlike the curl removing means 130 shown in FIG. 3, the heating wire 139 as a heating means is embedded in the pressing part 131 or the cutting part 135 of the curl removing device 1000 shown in FIG. 4. Illustrated. Specifically, FIG. 4 (a) illustrates a case in which a hot wire is embedded in the pressing unit 131 of the curl removing unit, and FIG. 4 (b) illustrates a case in which the hot wire 139 is embedded in the cutting unit 135. do. Of course, if the hot wire is embedded in both the pressing unit 131 and the cutting unit 135, it will be more advantageous to remove the curl. It may be designed by appropriately changing according to those skilled in the art.

Meanwhile, the hot wire may be embedded to be parallel to the pressing unit 131 or the cutting unit 135. In the embodiment illustrated in FIG. 4, the heating wire 139 is illustrated as being embedded in the pressing unit 131 or the cutting unit 135, but a method of mounting the surface may be used.

In FIG. 2, although the heating wire is mounted on the table 100 on which the lead frame LF is seated, the heating wire as the heating means is a pressing part 131 included in the curl removing means 130 in addition to the table 100. And / or embedded in the cutting unit 135, and may be mounted together with the table 100 as needed to facilitate the cutting process by the cutting unit 135 of the curl removing unit.

5 is a plan view and a front view of a state in which the lead frame LF in which the package mold PM is formed is mounted on the curl removing device 1000 according to the present invention, and FIG. 6 is a curl removing device 1000 according to the present invention. ) Shows a front view of a process of removing curl in a state in which the lead frame LF in which the package mold pm is formed is mounted.

Specifically, Figure 5 (a) shows a state in which the lead frame (LF) is mounted on the curl removing device 1000 according to the present invention, Figure 5 (b) is a curl removing device 1000 according to the present invention A process of removing curls of the leadframe LF is illustrated.

As described above, the first table 100a and the second table 100b for seating the lead frame LF are first and fourth support blocks 110 (1) for supporting side surfaces at both ends in the longitudinal direction, respectively. 110 (4) is provided, and the opposite side surface parallel to the side open to remove the curl by the curl removing means 130 has a long length so that the two second and third support blocks 110 (2), 110 (3)) is designed to be provided, but may be designed with only one support block in the center of the side (not shown).

Therefore, even when the curl removing means is transported by the curl transfer means 150, the horizontal movement of the lead frame LF is limited by the respective support blocks in the process of removing the curl.

Then, the curl removing means 130 is to remove the curl (C) is lowered by the heating means in the state mounted on the conveying means 150 for conveying the curl removing means 130.

In the embodiment shown in FIG. 5, the table 100 on which the lead frame LF is mounted is provided with a pair in parallel, and curls when the curl removing means 130 is transferred to the space between the spaced tables 100. Will be removed.

Since the pair of curl removal means 130 is mounted in the opposite direction to the mounting member 155 constituting the transfer means 150, the adjacent side of the lead frame (LF) seated on each table 100 By simultaneously removing the curl C of the edge, it is possible to increase the curl cutting efficiency.

The cutting surface of the cutting unit 135 of the curl removing unit 130 is a package mold of the detailed resin supply passage C2 and the receiver C1 protruding from the package mold pm formed in each lead frame LF. pm) and the detailed resin supply passage (C2) connecting the receiver can be removed together with the receiver (C1).

In this case, the cutting surface 135s of the cutting unit 135 cuts the detailed resin supply passage C1 according to the transfer of the transfer means 150, and is composed of the detailed resin supply passage C2 and the receiver C1. The curl may be separated from the package mold pm or the leadframe LF.

And, as shown in Figure 6, the transfer means 150 is a pair of LM block 153 and a mounting member 155 mounted on a pair of LM block 153 slides on the LM guide 151 ) And a plurality of curl removing means may be mounted on the mounting member 155. Therefore, the mounting member 155 may be configured to be long, and the number of tables 100 on which the lead frame LF may be mounted may be increased to remove curls during the transfer of the transfer means 150. In this case, the pressing portion of the curl removing means presses the upper surface of the package mold and the cutting portion cuts the curl near the package mold.

In addition, in addition to the LM guide 151 and the LM block 153, the driving means 150 for transferring the curl removing means 130 may be applied with various types of driving means.

For example, the driving means for driving the LM block may be a ball screw, a conveyor belt, a cylinder or a linear motor.

7 shows a plan view of another embodiment of a curl removing device 1000 according to the present invention.

Description overlapping with the description with reference to FIGS. 1 to 6 will be omitted. In the above-described embodiment, the conveying means 150 for conveying the mounting member 155 on which the curl removing means 130 is mounted includes an LM guide 151 and an LM block 153, although not shown, conveying The driving force for the ball screw can be provided as described above.

However, in the embodiment shown in Figure 7, the driving force for the transfer of the conveying means 150 may be by the conveyor belt 158. That is, a method of fixing the mounting member 155 or the driving member 157 to the conveyor belt 158, driving the driving pulley 159 by rotating the driving motor 160, and driving the conveyor belt 158 Can be used. In addition, if the configuration can be transported with the curl removal means mounted, various transfer parts (ex, ball screw, conveyor belt, cylinder or linear motor) may be applied.

On the other hand, in the embodiments and drawings of the present invention, in consideration of the processing speed and efficiency, a pair of tables have been described as having a pair of curl removal means, but it is also possible to be provided with one table and one curl removal means, respectively. Do. Except for this configuration, all the constructions such as the removal means and the transfer means are the same as or correspond to the above-described embodiments.

However, by occupying only one table and one curl removal means, not a pair, the occupied area can be reduced, which is efficient for space utilization.

While the present invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims. . It is therefore to be understood that the modified embodiments are included in the technical scope of the present invention if they basically include elements of the claims of the present invention.

1000: curl remover 100: table
110: support means 120: heating means
130: curl removal means 131: pressure unit
135: cutting portion 137: fastening member
139: heating wire 150: transfer means
151: LM Guide 153: LM Block
155: mounting member 157: driving member
C: Curl C1: Receiver
C2: Supply Channel LF: Leadframe
PM: package mold

Claims

A table on which a lead frame on which a package mold is formed by a transfer molding process is seated;
Heating means for heating a lead frame on which the package mold is formed;
Curl removal means for removing curl formed at one end of the lead frame heated by the heating means; And,
And a conveying means for conveying the curl removing means.

The method of claim 1,
The table is provided with a pair in parallel, a pair of curl removal means characterized in that the pair of curl removal means is installed to face opposite to remove the curl formed at the opposite side end of the pair of lead frames seated on the pair of tables Removal device.

The method of claim 1,
And a leadframe support means provided on the table to support at least one side of the leadframe.

The method of claim 3,
The lead frame support means has one end formed with curl of the lead frame Curl removal device, characterized in that provided to support the three sides.

5. The method of claim 4,
The lead frame support means is curl removal device, characterized in that composed of at least one or more support blocks to prevent the lead frame from being separated.

The method of claim 1,
The heating means is a curl removing device, characterized in that provided in the table or the curl removing means.

The method according to claim 6,
And the heating means is any one of a hot wire, a hot plate, and a hot air supply device embedded or mounted in the table or the curl removing means.

The method of claim 1,
The curl removing device includes a curling unit for pressing the upper surface of the edge of the lead frame seated on the table and a cutting unit for removing the curl.

9. The method of claim 8,
Curing removal device, characterized in that the vertical thickness of the front end of the pressing portion is smaller than the thickness of the rear end.

9. The method of claim 8,
The cutting portion is branched at the rear end of the pressing portion is provided in parallel with the pressing portion, the cutting portion is curl removal device, characterized in that for cutting the curl formed on one end of the lead frame pressed by the pressing portion.

The method of claim 10,
The height of the lower surface of the pressing portion is curl removal device, characterized in that higher than the height of the lower surface of the cutting portion.

9. The method of claim 8,
The heating means is a curl removing device, characterized in that any one of a hot wire, a hot plate and a hot air supply device embedded or mounted in at least one of the pressing portion and the cutting portion.

The method of claim 1,
The conveying means is a curl removing device, characterized in that for conveying a plurality of curl curl removing means together.

The method of claim 13,
The conveying means includes an LM guide provided on the outside of the table in parallel with the table, an LM block that slides on the LM guide and a mounting member fixed to the LM block and mounted with the curl removing means. Device.

15. The method of claim 14,
The driving means for driving the LM block is a curl removing device, characterized in that any one of a ball screw, a conveyor belt, a cylinder or a linear motor.