JP7323939B2 - Resin sealing device and method for manufacturing resin-sealed product - Google Patents

Description

The present invention relates to a resin-sealing apparatus and a method of manufacturing a resin-sealed product.

2. Description of the Related Art In a resin sealing apparatus for sealing a workpiece with resin, preheating is performed before the workpiece is carried into a resin sealing mold.

Patent Literature 1 discloses a resin sealing device characterized in that a work heating unit is detachably integrated with a loader, and the work heating unit is movable to the vicinity of the resin sealing mold via the loader. It is The work is handed over from the index section to the work heating section via the work holding section of the loader hand. A work support position in the work heating unit is fixed with respect to the heater.

Japanese Patent Application Laid-Open No. 2004-140047

However, in the resin sealing apparatus disclosed in Patent Document 1, it is necessary to quickly transfer the workpiece from the loader hand to the workpiece heating section in order to avoid heating the loader hand. In addition, since the heater has a temperature sufficient to raise the temperature of the work supported at the fixed support position to a sufficient temperature, the work is strongly heated immediately after it is handed over to the work heating section. For this reason, the work may be damaged by a sudden temperature change.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a resin sealing apparatus and a method of manufacturing a resin-sealed product that can suppress damage to a work.

A resin sealing apparatus according to one aspect of the present invention is a resin sealing apparatus for resin-sealing a workpiece, and includes a workpiece heating unit for heating the workpiece, and a workpiece heated by the workpiece heating unit. and a work holding portion for holding the work to be conveyed to the sealing mold, wherein the work heating portion can change the support position of the work in the heater and the work heating portion relative to the heater in the thickness direction of the work. and a support position changing mechanism.

A method for manufacturing a resin-sealed product according to one aspect of the present invention includes placing a work in a work heating section of a loader, preheating the work while conveying it, and delivering the work from the work heating section to a loader hand. and loading the workpiece into the resin-sealed mold by a loader hand, and preheating the workpiece changes the support position of the workpiece in the workpiece heating unit relative to the heater in the thickness direction of the workpiece. Including.

ADVANTAGE OF THE INVENTION According to this invention, the resin sealing apparatus and the manufacturing method of the resin sealing product which can suppress the damage of a workpiece|work can be provided.

It is a top view showing roughly composition of a resin sealing device concerning a 1st embodiment. It is a sectional view showing roughly composition of a loader concerning a 1st embodiment. It is a figure which shows roughly the process in which a workpiece heating part receives a workpiece. It is a figure which shows roughly the process of a workpiece|work heating part supporting a workpiece|work in a 1st support position. It is a figure which shows roughly the process of a workpiece|work heating part supporting a workpiece|work in a 2nd support position. FIG. 4 is a diagram schematically showing a process in which the work heating section delivers the work to the work holding section; It is a sectional view showing roughly composition of a loader concerning a 2nd embodiment. It is a top view which shows roughly the structure of the resin sealing apparatus which concerns on 3rd Embodiment. It is a flowchart which shows the manufacturing process of the resin-sealed product which concerns on 4th Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings of each embodiment are examples, and the dimensions and shapes of each part are schematic, and the technical scope of the present invention should not be construed as being limited to the embodiments.

A configuration of a resin sealing device 1 according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2. FIG. FIG. 1 is a plan view schematically showing the configuration of the resin sealing device according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing the configuration of the loader according to the first embodiment.

An orthogonal coordinate system consisting of the X, Y and Z axes may be attached to each drawing for convenience in order to clarify the relationship between the drawings and to help understand the positional relationship of each member. be. A plane including the X-axis and the Y-axis is referred to as an "XY plane", the direction of the Z-axis arrow is upward, and the direction opposite to the Z-axis arrow is downward.

A resin sealing device (molding device) 1 is used to resin-seal (mold) a workpiece. As shown in FIG. 1, the resin-sealing apparatus 1 includes an in-module 10 for supplying a work to be resin-sealed, press modules 20, 30, 40, and 50 for resin-sealing the work, and a resin-sealed It has an out module 90 that collects the work. The resin sealing apparatus 1 also includes a transport mechanism having a guide section 300 , a loader 100 and an unloader 200 .

In the example shown in FIG. 1, the in-module 10, the press modules 20 to 50, and the out-module 90 are arranged side by side in the X-axis direction, and the loader 100 and the unloader 200 extend over each of these modules. It is configured to be movable along 300 . In this embodiment, the loader 100 includes a work heating section 110 and a loader hand 120 .

The resin sealing device 1 is, for example, a resin sealing device that seals a workpiece W with resin. An example of the resin sealing apparatus is a transfer molding machine that pressurizes and heats resin to be injected into a cavity of a closed resin sealing mold (molding mold). In the example shown below, as an example of a resin sealing apparatus, an overall apparatus including a press module for resin sealing a workpiece will be described, but the resin sealing apparatus according to the present invention is not necessarily limited to the apparatus including the press module. Any device (for example, a loader, an in-module, etc.) having a work heating unit according to the present embodiment and used for resin sealing of a work may be used.

The work W includes an element (for example, a semiconductor element, a MEMS chip and/or an electronic device) to be resin-sealed by a resin-sealing apparatus, and a support for the element. The workpiece W is not limited, but may be, for example, a lead frame mounted with a semiconductor element, an interposer substrate mounted with a semiconductor element, or a carrier plate with an adhesive sheet to which a semiconductor element is temporarily attached. There may be. In the embodiments described later, a thin strip-shaped interposer substrate that warps or undulates when heated is used for explanation, but other works may be used.

The configuration of each module shown in FIG. 1 will be described below.

The in-module 10 includes a supply magazine 15 , an index section 13 and a tablet supply section 17 . The supply magazine 15 stores a plurality of works W before being sealed with resin so as to overlap in the Z-axis direction. A plurality of supply magazines 15 are arranged in a work supply unit that supplies works W to the index unit 13 . The index part 13 positions the orientation of the work W. As shown in FIG. For example, the index unit 13 is a rotatable table, and aligns two works W received from the supply magazine 15 so that the same sides face each other. The index section 13 supplies the two aligned works W to the work heating section 110 . The tablet supply unit 17 supplies the aligned plural resin tablets 18 to the loader hand 120 .

The press modules 20, 30, 40, 50 are provided with resin sealing molds 21, 31, 41, 51, respectively. The press modules 20 to 50 are arranged in the X-axis direction, and the resin sealing molds 21 to 51 are also arranged in the X-axis direction. Each of the resin sealing molds 21 to 51 is a pair of openable and closable molds, for example, composed of a lower mold and an upper mold. Each of the press modules 20 to 50 holds the workpiece W in a cavity formed inside each of the resin sealing dies 21 to 51 (between the lower die and the upper die). Each of the press modules 20 to 50 seals the element of the workpiece W with resin by injecting resin into the cavity. In this embodiment, the resin sealing apparatus 1 is equipped with, for example, four press modules, but the number of press modules can be changed as appropriate.

The out module 90 includes a degating pallet 91 , a degating hand 93 and a storage magazine 95 . The degating pallet 91 receives the workpiece W to which the unnecessary resin is connected from the unloader 200 and conveys it under the degating hand 93 . The degating hand 93 separates unnecessary resin from the conveyed workpiece W. As shown in FIG. The separated unnecessary resin is collected in a scrap box. The separated work W is stored in the storage magazine 95 . The storage magazine 95 stores a plurality of resin-sealed workpieces W stacked in the Z-axis direction. A plurality of storage magazines 95 are arranged in the work storage section for collecting the works W. As shown in FIG. The out module 90 is provided on the side opposite to the in module 10 when viewed from the press modules 20 to 50 . However, the arrangement of each module is not limited to the above, and the in-module 10 and the out-module 90 may be provided on the same side as viewed from the press modules 20-50.

The transport mechanism transports the workpiece W. As shown in FIG. Specifically, the loader 100 loads the workpiece W into one of the resin sealing molds 21-51. Also, the unloader 200 unloads the workpiece W from any one of the resin sealing molds 21-51. The guide section 300 extends in the X-axis direction across the in-module 10, the press modules 20 to 50, and the out-module 90. As shown in FIG. Each of the loader 100 and the unloader 200 is configured to be movable along the guide section 300 in the X-axis direction. The loader hand 120 is configured to be movable in the Y-axis direction. That is, the loader hand 120 is configured so as to be able to enter into each of the resin sealing molds 21 to 51 . Similarly, the unloader hand of the unloader 200 is configured so as to be able to enter into each of the resin sealing molds 21 to 51 .

The loader 100 has a base 101 configured to be movable along the guide section 300 . A workpiece heating unit 110 is mounted on the base 101 so as to be movable on the base 101 in the X-axis direction. A loader hand 120 having workpiece holding portions 121 and 122 is mounted on the base 101 so as to be separated from or approachable to the base 101 in the Y-axis direction. That is, in the loader 100 , the work heating section 110 is relatively movable with respect to the work holding sections 121 and 122 of the loader hand 120 .

The workpiece heating unit 110 preliminarily heats the workpiece W before it is carried into the resin-sealed molds 21 to 51 (hereinafter referred to as “preheating”), and heats the workpiece W and the resin-sealed molds 21 to 51. reduce the temperature difference between The work heating section 110 is configured to be able to directly receive the work W from the index section 13 . The work heating section 110 has work support sections 111 and 112, heaters 113 and 114, and a support position changing mechanism.

Each of the work support portions 111 and 112 supports the work W supplied from the index portion 13 in order to heat it. Each of the work supporting portions 111 and 112 supports the work W such that the thickness direction of the work W is parallel to the Z-axis direction and the main surface of the work W is parallel to the XY plane. Work supporting portions 111 and 112 are separated from heaters 113 and 114 in the Z-axis direction. That is, the work supporting portions 111 and 112 support the work W at positions separated from the heaters 113 and 114, respectively. The work support portion 111 has a pair of side rails 111A and 111B that sandwich the work W in the X-axis direction. The work support portion 112 has a pair of side rails 112A and 112B that sandwich the work W in the X-axis direction. As a result, two workpieces W can be directly received by the two pairs of side rails 111A, 111B, 112A, 112B at positions away from the heaters 113, 114 by pushing them out from the index portion 13 in the Y direction.

The heater 113 heats the work W supported by the work support portion 111 , and the heater 114 heats the work W supported by the work support portion 112 . The heater 113 is provided such that a heating surface parallel to the XY plane faces the main surface of the work W supported by the work support portion 111 . The heater 114 is provided such that a heating surface parallel to the XY plane faces the main surface of the work W supported by the work support portion 112 . Heaters 113 and 114 are provided on a common base portion.

The support position changing mechanism is configured to be able to change the support position of the work W in the work heating unit 110 (the positions of the work support units 111 and 112) relative to the heaters 113 and 114 in the thickness direction of the work W. there is The support position changing mechanism has, for example, springs 115A, 115B, 116A, 116B, an air cylinder 117, and a heat retaining lid 118.

The spring 115A connects the base portion on which the heater 113 is provided and the side rail 111A so as to be able to expand and contract in the Z-axis direction. Similarly, the spring 115B connects the base portion and the side rail 111B so that they can expand and contract in the Z-axis direction. The spring 116A connects the base portion on which the heater 114 is provided and the side rail 112A so as to be able to expand and contract in the Z-axis direction. Similarly, the spring 116B connects the base portion and the side rail 112B so as to be able to expand and contract in the Z-axis direction.

An air cylinder 117, which is a drive mechanism, holds a heat-retaining lid 118 and moves the heat-retaining lid 118 in the Z-axis direction. The heat insulating lid 118 faces the heater 113 with the work support portion 111 interposed therebetween, and faces the heater 114 with the work support portion 112 interposed therebetween. The heat-retaining lid 118 prevents the heat radiated from the heaters 113 and 114 from escaping, thereby improving the heating efficiency of the work W and helping to maintain the temperature of the work W. In addition, the heat retaining lid 118 is provided with push-down portions 118a hanging from the outer sides of the side rails 111A, 111B, 112A, and 112B with the work W as a reference. The heat-retaining lid 118 is provided with a projecting portion 118b hanging down from the inside of the push-down portion 118a with the work W as a reference. An end portion (peripheral edge portion) of the work W is positioned between the protrusion 118b and the side rails 111A, 111B, 112A, 112B. The projecting portion 118b is configured such that the tip thereof is spaced apart from the undeformed workpiece W so as not to restrict elongation of the workpiece W due to preheating. On the other hand, the protruding portion 118b is configured such that the tip thereof contacts the work W warped by preheating, and restricts the work W from being greatly warped or fluttering.

When the air cylinder 117 expands, the heat retaining lid 118 comes into contact with the side rails 111A, 111B, 112A and 112B at the pressing portion 118a, and the springs 115A, 115B, 116A and 116B contract. That is, the work supporting portion 111 approaches the heater 113 in the Z-axis direction, and the work supporting portion 112 approaches the heater 114 in the Z-axis direction. When the air cylinder 117 contracts, the heat-retaining lid 118 separates from each of the side rails 111A, 111B, 112A, 112B, and each of the springs 115A, 115B, 116A, 116B expands. That is, the work supporting portion 111 is separated from the heater 113 in the Z-axis direction, and the work supporting portion 112 is separated from the heater 114 in the Z-axis direction.

The air cylinder 117 and the heat retaining lid 118 are provided at positions separated from the loader hand 120 in the X-axis direction. Therefore, the support position changing mechanism is configured to be able to change the support position of the work W at a position horizontally away from the work holding portions 121 and 122 of the loader hand 120 . Here, the horizontal direction is a direction parallel to the XY plane. The position of the work W supported by each of the work support portions 111 and 112 when the springs 115A, 115B, 116A and 116B are expanded is defined as a first support position. Also, the position of the work W supported by the work support portions 111 and 112 when the springs 115A, 115B, 116A and 116B are contracted is defined as a second support position. That is, the first support position is farther from the heaters 113, 114, and the second support position is closer to the heaters 113, 114 than the first support position. The second support position is also away from the heaters 113 and 114 in order to avoid temperature unevenness and sudden temperature changes of the workpiece W. However, the support position changing mechanism may be configured such that the workpiece W can contact the heaters 113 and 114, respectively.

In this embodiment, the distance in the Z-axis direction between the work W and the heater 113 at the first support position of the work support section 111 is the distance between the work W and the heater 114 at the first support position of the work support section 112. It is the same length as the distance in the Z-axis direction between them. Similarly, the distance in the Z-axis direction between the work W and the heater 113 at the second support position of the work support section 111 is the Z-axis distance between the work W and the heater 114 at the second support position of the work support section 112. It has the same length as the direction distance. When the work support portion 111 is positioned at the first support position, the work support portion 112 is also positioned at the first support position, and when the work support portion 111 is positioned at the second support position, the work support portion 112 is also positioned at the second support position. Located in This is because the work supporting portions 111 and 112 are connected and the heat insulating cover 118 uniformly presses down both the work supporting portions 111 and 112 . However, the work support part 111 and the work support part 112 may be configured to be movable independently of each other. That is, when the work support portion 111 is positioned at the first support position, the work support portion 112 may be positioned at the second support position.

The support position changing mechanism may have a stopper that prevents the workpiece W from approaching the heaters 113 and 114 too much. Further, a stopper may be provided to restrict the extension of the springs 115A, 115B, 116A, 116B so that the workpiece W is supported by the heaters 113, 114 at an appropriate distance. Further, the support position changing mechanism may have a heat insulating material that prevents the end of the work W from being heated via the side rails 111A, 111B, 112A, 112B.

The loader hand 120 has workpiece holding portions 121 and 122 , a tablet holding hole 125 and a shutter 127 .

The work holding portions 121 and 122 are arranged side by side in the X-axis direction. The work holding units 121 and 122 hold the work W heated by the work heating unit 110 in order to transport it to one of the resin sealing molds 21 to 51 . Specifically, before the loader hand 120 enters any one of the resin sealing molds 21 to 51, the work holding unit 121 receives the work W preheated by the work supporting unit 111, and the work holding unit 122 receives the workpiece W preheated on the workpiece support 112 . The loader hand 120 integrally loads the two workpieces W held by the workpiece holding parts 121 and 122 into one of the resin-sealed molds 21 to 51, and delivers them to the upper surface of the lower mold, for example.

The tablet holding hole 125 is provided between the work holding portion 121 and the work holding portion 122 . The tablet holding hole 125 holds the resin tablet 18 to convey it to the resin sealing molds 21-51. Specifically, the tablet holding hole 125 accommodates the resin tablet 18 received from the tablet supply section 17 . A tablet holding hole 125 that accommodates the resin tablet 18 is closed by a shutter 127 . Thereby, the resin tablet 18 is held in the tablet holding hole 125 without falling. The loader hand 120 carries the resin tablet 18 held in the tablet holding hole 125 into one of the resin sealing molds 21 to 51 (more specifically, the pot (not shown) of the lower mold). ,hand over.

Next, operation of the loader 100 will be described with reference to FIGS. 3 to 6. FIG. FIG. 3 is a diagram schematically showing the process in which the workpiece heating unit receives the workpiece. FIG. 4 is a diagram schematically showing a process in which the work heating section supports the work at the first support position; FIG. 5 is a diagram schematically showing a process in which the work heating section supports the work at the second support position. FIG. 6 is a diagram schematically showing a process in which the work heating section transfers the work to the work holding section.

As shown in FIG. 3, the index section 13 has a pair of side rails 11A and 11B capable of holding the work W, and the support position changing mechanism of the work heating section 110 is an extension of the pair of side rails 11A and 11B. It has a pair of side rails 111A and 111B configured to receive the workpiece W pushed out from the pair of side rails 11A and 11B along a line. The side rails 11A and 11B correspond to first side rails, and the side rails 111A and 111B correspond to second side rails. That is, the work W slides along the pair of side rails 11A and 11B and the pair of side rails 111A and 111B, and is handed over from the index section 13 to the work heating section 110. As shown in FIG. Similarly, the index section 13 has a pair of side rails 12A and 12B, and the support position changing mechanism of the work heating section 110 has a pair of side rails 112A and 112B. Thus, the work W is set on the heaters 113 and 114 by sliding from the sides of the heaters 113 and 114 .

As shown in FIG. 4 , in the in-module 10 , the work support sections 111 and 112 of the work heating section 110 receive the work W from the index section 13 at a first support position away from the heaters 113 and 114 . At the first support position, the work W is hardly affected by the heaters 113 and 114 and is not heated. Therefore, when the work W is slidably pushed onto the heaters 113 and 114, it is possible to prevent the work W from warping or undulating due to uneven heating from the front end side to the rear end side in the pushing direction. can be done. At this time, the work heating unit 110 is separated from the area below the loader hand 120 in the X-axis direction and positioned below the heat insulating cover 118 . The air cylinder 117 has not lowered the heat-retaining lid 118 , and the heat-retaining lid 118 is separated from the work supporting portions 111 and 112 . Also, the tablet holding hole 125 of the loader hand 120 receives the resin tablet 18 from the tablet supply section 17 . Since the work heating unit 110 is separated from the loader hand 120 in the X-axis direction, the resin tablet 18 held in the tablet holding hole 125 is not affected by the heaters 113 and 114, and deterioration of the resin tablet 18 due to heating is suppressed. be.

As shown in FIG. 5, when preheating the work W is started, the air cylinder 117 lowers the heat retaining lid 118, and the heat retaining lid 118 pushes down the work supporting portions 111 and 112. As shown in FIG. The work supporting portions 111 and 112 of the work heating portion 110 hold the work W at the second supporting position closer to the heaters 113 and 114 than the first supporting position. At the second support position, the work W is heated to a desired temperature by heaters 113 and 114 . The temperature rise rate of the work W is adjusted by the distance from the heaters 113 and 114 of the second support position and the speed of movement from the first support position to the second support position, and the holding time of the work W at the second support position. preheat temperature is adjusted.

The work W may be preheated while the work W is being moved from the first support position to the second support position. Also, the workpiece W may be clamped in at least one position between the first support position and the second support position in order to heat the workpiece W in stages.

As shown in FIG. 6 , the work heating unit 110 that has heated the work W to a desired temperature moves below the loader hand 120 . Here, the work W is handed over to the work holding section 121 and the work holding section 122 of the loader hand 120 . The transfer of the work W from the work heating unit 110 to the loader hand 120 is performed in the press modules 20 to 50, for example, but may be performed in the in-module 10. FIG. From the viewpoint of suppressing a decrease in the temperature of the work W, it is desirable that the work W is delivered immediately before the loader hand 120 carries the work W into the resin sealing molds 21 to 51 .

As described above, the resin sealing apparatus 1 includes the work heating section 110 and the loader hand 120 having the work holding sections 121 and 122 . The work heating section 110 has a support position changing mechanism capable of changing the support position of the work W in the thickness direction of the work W, and the support position changing mechanism changes the positions of the work support sections 111 and 112 .
According to this, the temperature rise rate of the work W in the process of preheating the work W can be reduced compared to the configuration in which the relative positions of the work support portion and the heater are fixed. Therefore, it is possible to suppress damage to the work W and defective resin sealing due to uneven temperature of the work W and sudden temperature changes. In addition, when trying to suppress the temperature rise rate of the work in a configuration in which the relative positions of the work support part and the heater are fixed, it is necessary to temporarily stop the heater, and the output adjustment of the heater is completed. It is necessary to make the work wait until the However, according to the present embodiment, the heating speed of the workpiece W can be reduced while the outputs of the heaters 113 and 114 are kept constant, so the work efficiency is improved.

The support position changing mechanism may change the positions of the heaters 113 and 114 if the support position of the work W can be changed relative to the heaters 113 and 114 in the thickness direction of the work W. For example, the springs 115A, 115B, 116A, and 116B in this embodiment are omitted, and the work support portions 111 and 112 are fixed to the base portion. The heaters 113 and 114 provided on the base portion are omitted, and heaters are provided on the side of the heat insulating cover 118 facing the work W instead. According to this, the same effect as described above can be obtained. The support position changing mechanism may change the positions of both the work support portions 111 and 112 and the heaters 113 and 114 in the thickness direction of the work W.

The work heating section 110 and work holding sections 121 and 122 are provided in the loader 100 .
According to this, the work W can be preheated until just before the work W is loaded by the loader hand 120 . That is, the heating time can be lengthened, and the preheated workpiece W can be prevented from cooling down. From another point of view, the temperature rise rate of the workpiece W can also be reduced.

Further, the work heating unit 110 is horizontally movable, and is configured to be able to change the support position of the work W at a position horizontally away from below the work holding units 121 and 122 .
According to this, it is possible to prevent the resin tablet 18 held by the loader hand 120 from being heated by the heaters 113 and 114 of the work heating unit 110 and deteriorating. Further, the heat retaining lid 118 and the like can be provided above the work support portions 111 and 112 of the work heating portion 110 without being obstructed by the work holding portions 121 and 122 when the support position changing mechanism is operated.

Note that the work heating unit 110 only needs to be movable relative to the work holding units 121 and 122 . For example, the work heating section 110 may be movable in the thickness direction of the work W below the work holding sections 121 and 122 . That is, the work heating unit 110 heats the work W at a heating position below the work holding units 121 and 122 and away from the work holding units 121 and 122, The workpiece W may be handed over to the workpiece holders 121 and 122 at a position closer to the workpiece holders 121 and 122 than the heating position. According to this, an effect similar to that described above can be obtained. In addition, the work holding portions 121 and 122 may be configured to be movable with respect to the work heating portion 110 .

Further, the work heating section 110 is configured to be able to directly receive the work W from the index section 13 that positions the orientation of the work W. As shown in FIG. The pair of side rails 111A and 111B constituting the work supporting portion 111 of the work heating portion 110 are arranged on the extension line of the pair of side rails 11A and 11B that hold the work W in the index portion 13. Receive the work W pushed out from 11B.
Even if the work heating unit 110 receives the work W directly from the index unit 13 as described above, the work heating unit 110 according to the present embodiment receives the work W from the index unit 13 . Since W is not heated, unevenness in temperature of the work W can be suppressed.

In the first embodiment, the transfer molding machine was described as an example, but the resin sealing apparatus 1 according to the embodiment of the present invention is not limited to this as long as it heats the workpiece W. do not have. For example, the resin-sealing apparatus 1 may be a compression molding machine that presses resin supplied to an open resin-sealing mold in conjunction with clamping of the resin-sealing mold. For example, in the case of using a compression molding mold having a cavity in the lower mold as an example of compression molding, the loader can be obtained by vertically inverting the configuration provided in FIG. According to this, the work holding parts 121 and 122 can receive the work W preheated by the work heating part 110 from above and deliver the work to the lower surface of the upper mold.

The configuration of a resin sealing device 1 according to another embodiment of the present invention will be described below. In addition, in the following embodiment, the description of matters common to the first embodiment will be omitted, and only the points of difference will be described. In particular, similar actions and effects due to similar configurations will not be mentioned successively.

<Second embodiment>
The configuration of the loader 100 according to the second embodiment will be described with reference to FIG. 7. FIG. 7 is a cross-sectional view schematically showing the configuration of the loader according to the second embodiment.

The work heating section 110 has a first work heating section 110A and a second work heating section 110B. Each of the first work heating section 110A and the second work heating section 110B has the same configuration as the work heating section 110 according to the first embodiment. That is, the first work heating section 110A has a first heater and a first support position changing mechanism capable of changing the support position of the work in the first work heating section relative to the first heater, The second work heating section 110B has a second heater and a second support position changing mechanism capable of changing the support position of the work in the second work heating section relative to the second heater. Each of the first support position changing mechanism and the second support position changing mechanism is configured to be able to change the position of the workpiece W independently of each other.

According to this, it is possible to lengthen the time from when the work heating section 110 receives the work W from the index section 13 to when it is handed over to the work holding sections 121 and 122 of the loader hand 120 . As a result, the temperature rise rate of the work W can be reduced, and the work W having a large heat capacity, such as a heat sink, can be preheated. Also, the frequency with which the loader 100 returns to the in-module 10 to receive the work W from the index unit 13 can be reduced. Therefore, the efficiency of conveying the work W is improved.

<Third Embodiment>
The structure of the resin sealing device 1 according to the third embodiment will be described with reference to FIG. 8. FIG. 8 is a plan view schematically showing the structure of the resin sealing device according to the third embodiment.

The work heating unit 110 is fixed to the in-module 10 . The loader hand 120 of the loader 100 receives the work W from the work heating section 110 in the in-module 10 and conveys it to one of the press modules 20-50.

<Fourth Embodiment>
A method for manufacturing a resin-sealed product according to the fourth embodiment will be described with reference to FIG. FIG. 9 is a flow chart showing a method for manufacturing a resin-sealed product according to the fourth embodiment. In this embodiment, for example, the resin sealing device according to the first embodiment is used.

First, a work is placed in the work heating section of the loader (S10).
Move the loader to the in-module. The work heating section receives the work directly from the index section at a first support position remote from the heater.

Next, the work is preheated while being conveyed (S20).
Move the loader from the in-module to the press module. During this movement, the work heating unit changes the work support position from the first support position to the second support position closer to the heater than the first support position.

Next, the work is handed over from the work heating unit to the loader hand (S30).
In the loader, the work supporting portion is moved directly below the loader hand, and the work is handed over to the work holding portion of the loader hand.

Next, the workpiece is loaded into the resin-sealed mold by the loader hand (S40).
The loader hand enters the space between the upper and lower molds of the opened resin-sealed mold while being supported by the base of the loader, and the workpiece is placed on the mold surface of the lower mold. hand over. Thereafter, the loader hand is withdrawn from the resin-sealed mold, and the resin-sealed mold is clamped. A workpiece is placed in the cavity inside the clamped resin-sealing mold. Resin is injected into the cavity, and the injected resin is heated while being pressurized. After the resin is cured, the resin-sealed mold is opened, and the unloader hand unloads the resin-sealed workpiece from the resin-sealed mold.

Some or all of the embodiments of the present invention will be added below, and their effects will be described. In addition, the present invention is not limited to the following additional remarks.

According to one aspect of the present invention, there is provided a resin sealing apparatus for resin-sealing a work, which includes a work heating section for heating the work, and a resin sealing mold for the work heated by the work heating section. and a workpiece holding part for conveying the workpiece to a heater, and the workpiece heating part includes a heater, and a support position in which the supporting position of the workpiece in the workpiece heating part can be changed relative to the heater in the thickness direction of the workpiece. A resin encapsulation device is provided having a change mechanism. The support position changing mechanism is configured to be able to change the support position of the workpiece between a first support position away from the heater and a second support position closer to the heater than the first support position. Compared to a configuration in which the relative positions of the support portion and the heater are fixed, the temperature rise rate of the work in the process of preheating the work can be reduced. Therefore, it is possible to suppress damage to the workpiece and defective resin sealing due to uneven temperature of the workpiece and sudden temperature changes. In addition, when trying to suppress the temperature rise rate of the work in a configuration in which the relative positions of the work supporting portion and the heater are fixed, it is necessary to cool the heater once, and the work must be held until the output adjustment of the heater is completed. have to wait. However, according to the present embodiment, the work efficiency can be improved because the heating rate of the workpiece can be reduced while the output of the heater is kept constant.

As one aspect, a loader for conveying a workpiece to a resin-sealed mold is provided, and the loader has a workpiece heating section and a workpiece holding section.
According to this, the work can be preheated until just before the work is carried in by the loader hand. That is, the heating time can be lengthened, and the heating rate of the work can be reduced.

As one aspect, the work heating section is relatively movable with respect to the work holding section. The support position changing mechanism is configured to be able to change the support position of the work at a position horizontally spaced from below the work holding section.
According to this, it is possible to prevent the resin tablet held by the loader hand from being heated and deteriorated by the heater of the work heating unit. Further, when the support position changing mechanism is operated, a heat retaining lid or the like can be provided above the work supporting portion of the work heating portion without being obstructed by the work holding portion.

As one aspect, the work heating section is configured to be able to directly receive the work from the index section that positions the orientation of the work. The index section has a pair of first side rails capable of sandwiching the work, and the support position changing mechanism of the work heating section can receive the work pushed out from the first side rails on an extension line of the first side rails. and a pair of second side rails configured to:
Even if the work heating section receives the work directly from the index section in this way, the work heating section according to the present embodiment does not heat the work when receiving the work from the index section. temperature unevenness can be suppressed.

As one aspect, the work heating section has a first work heating section and a second work heating section, and the first work heating section is configured such that the support position of the work in the first heater and the first work heating section is set to the first work heating section. and a first support position changing mechanism that can be relatively changed with respect to the first heater, and the second work heating section changes the supporting position of the work in the second heater and the second work heating section to the second heater. and a second support position changing mechanism that can be changed relative to the workpiece, and each of the first support position changing mechanism and the second support position changing mechanism is configured to be able to change the position of the workpiece independently of each other. ing.
This can reduce the frequency with which the loader returns to the in-module to receive the work from the index section. Therefore, the work transfer efficiency is improved. Also, the time from when the work heating section receives the work from the index section to when it is handed over to the work holding section of the loader hand can be lengthened. Therefore, the heating rate of the workpiece can be further reduced.

According to one aspect of the present invention, a method for manufacturing a resin-sealed product includes: placing a work in a work heating section of a loader; preheating the work while conveying it; and carrying the workpiece into the resin-sealed mold by the loader hand. including changing
According to this, the temperature rise rate of the work in the process of preheating the work can be reduced. Therefore, it is possible to suppress damage to the workpiece and defective resin sealing due to uneven temperature of the workpiece and sudden temperature changes.

As one aspect, preheating the work while conveying it means moving the support position of the work from a first support position away from the heater to a second support position closer to the heater than the first support position. including.
According to this, it is possible to reduce the temperature unevenness of the workpiece and suppress damage to the workpiece and defective resin sealing.

In one aspect, placing the work piece on the work heating portion of the loader includes receiving the work piece directly from an indexing portion that orients the work piece at the first support position.
Even if the work heating section receives the work directly from the index section in this way, the work heating section according to the present embodiment does not heat the work when receiving the work from the index section. temperature unevenness can be suppressed.

As described above, according to one aspect of the present invention, it is possible to provide a resin sealing apparatus and a method of manufacturing a resin-sealed product that can suppress damage to a work.

In addition, the embodiment described above is intended to facilitate understanding of the present invention, and is not intended to limit and interpret the present invention. The present invention may be modified/improved without departing from its spirit, and the present invention also includes equivalents thereof. In other words, any embodiment appropriately modified in design by a person skilled in the art is also included in the scope of the present invention as long as it has the features of the present invention. For example, each element provided in each embodiment and its arrangement, material, condition, shape, size, etc. are not limited to those illustrated and can be changed as appropriate. Moreover, each element provided in each embodiment can be combined as long as it is technically possible, and a combination thereof is also included in the scope of the present invention as long as it includes the features of the present invention.

1... resin sealing device,
10... in-module,
13... Index part,
18... resin tablet,
20 to 50... press module,
21 to 51: resin sealing mold,
90... out module,
100 loader,
110 ... work heating unit,
111, 112 ... Work support part,
113, 114 ... heaters,
115A, 115B, 116A, 116B...springs,
117... air cylinder,
118... Thermal insulation cover,
120... Loader hand,
11, 122... Work holding part,
125... Tablet holding hole,
127 ... shutter,
200 Unloader,
W... work,

Claims (11)

A resin sealing device for sealing a workpiece with resin,
Equipped with a loader that transports the workpiece to the resin-sealed mold,
The loader
a work heating unit that heats the work;
a workpiece holding unit that holds the workpiece heated by the workpiece heating unit in order to convey the workpiece to the resin sealing mold;
has
The resin sealing device, wherein the work heating section has a heater, and a support position changing mechanism capable of changing a support position of the work in the work heating section relative to the heater in a thickness direction of the work. The support position changing mechanism is configured to be able to change the support position of the workpiece between a first support position away from the heater and a second support position closer to the heater than the first support position.
The resin sealing device according to claim 1. The support position changing mechanism has a spring that changes the support position of the work by expanding or contracting in the thickness direction of the work,
The resin sealing device according to claim 1 or 2. The work heating unit is relatively movable with respect to the work holding unit,
The resin sealing device according to any one of claims 1 to 3 . The support position changing mechanism is configured to be able to change the support position of the work at a position horizontally away from the lower part of the work holding part,
The resin sealing device according to any one of claims 1 to 4 . The work heating unit is configured to be able to directly receive the work from an index unit that positions the orientation of the work.
The resin sealing device according to any one of claims 1 to 5 . The index part has a pair of first side rails capable of holding a workpiece,
The support position changing mechanism of the work heating unit has a pair of second side rails configured to receive the work pushed out from the first side rails on an extension line of the first side rails.
The resin sealing device according to claim 6. The work heating unit has a first work heating unit and a second work heating unit,
The first work heating section has a first heater, and a first support position changing mechanism capable of changing a support position of the work in the first work heating section relative to the first heater,
The second work heating section has a second heater, and a second support position changing mechanism capable of changing a support position of the work in the second work heating section relative to the second heater,
Each of the first support position changing mechanism and the second support position changing mechanism is configured to be able to change the position of the work independently of each other,
The resin sealing device according to any one of claims 1 to 7. placing the workpiece in the workpiece heating section of the loader;
preheating while conveying the work;
delivering the work from the work heating unit to a loader hand;
Loading the workpiece into the resin-sealed mold by the loader hand,
A method of manufacturing a resin-sealed product, wherein preheating the work includes changing a support position of the work in the work heating unit relative to the heater in a thickness direction of the work. Preheating the work while conveying includes moving the work support position from a first support position away from the heater to a second support position closer to the heater than the first support position,
A method for manufacturing a resin-sealed product according to claim 9 . placing the work piece on the work heating portion of the loader includes receiving the work piece directly from an indexing portion that orients the work piece at the first support position;
The method for manufacturing a resin-sealed product according to claim 10.