CN116435214A

CN116435214A - Resin sealing apparatus and method for manufacturing resin sealing product

Info

Publication number: CN116435214A
Application number: CN202210003078.3A
Authority: CN
Inventors: 高山凌; 柳泽高行; 小口达司; 佐藤洋平
Original assignee: Apic Yamada Corp
Current assignee: Apic Yamada Corp
Priority date: 2022-01-04
Filing date: 2022-01-04
Publication date: 2023-07-14

Abstract

The invention provides a resin sealing apparatus and a method for manufacturing a resin sealing product, which can inhibit damage to a workpiece. A resin sealing apparatus (1) for resin sealing a work (W) with a resin, comprising: a workpiece heating unit (110) for heating a workpiece (W); and workpiece holding sections (121, 122) for holding the workpiece (W) heated by the workpiece heating section (110) by conveying the workpiece to the resin sealing molds (21-51); the workpiece heating unit (110) is provided with heaters (113, 114) and a support position changing mechanism, and the support position changing mechanism can change the support position of the workpiece (W) in the workpiece heating unit (110) relative to the heaters (113, 114) in the thickness direction of the workpiece (W).

Description

Resin sealing apparatus and method for manufacturing resin sealing product

Technical Field

The present invention relates to a resin sealing apparatus and a method for manufacturing a resin sealed article.

Background

In a resin sealing apparatus for resin-sealing a work with a resin, the following operations are performed: preheating is performed before the workpiece is carried into the resin sealing mold.

Patent document 1 discloses a resin sealing apparatus in which a work heating unit is detachably integrated with a loader, and the work heating unit can be moved to the vicinity of a resin sealing mold via the loader. The workpiece is delivered from an index (index) section to a workpiece heating section via a workpiece holding section of the loader robot. The support position of the workpiece in the workpiece heating section is fixed with respect to the workpiece.

[ Prior Art literature ]

[ patent literature ]

Patent document 1 Japanese patent laid-open No. 2004-140047

Disclosure of Invention

[ problem to be solved by the invention ]

However, in the resin sealing apparatus described in patent document 1, in order to avoid heating of the loader robot, it is necessary to rapidly transfer the work from the loader robot to the work heating portion. Further, since the temperature of the heater is sufficient to raise the temperature of the workpiece supported at the fixed supporting position to a sufficient temperature, the workpiece is strongly heated immediately after being delivered to the workpiece heating section. Therefore, there is a case where the workpiece is damaged by a rapid temperature change.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a resin sealing apparatus capable of suppressing damage to a work and a method for manufacturing a resin sealing product.

[ means of solving the problems ]

A resin sealing apparatus of an embodiment of the present invention is a resin sealing apparatus for resin sealing a work with a resin, and includes: a workpiece heating unit for heating a workpiece; and a work holding unit for holding the work heated by the work heating unit by transferring the work to the resin sealing mold; the workpiece heating section includes a heater and a support position changing mechanism capable of changing a support position of the workpiece in the workpiece heating section relative to the heater in a thickness direction of the workpiece.

The method for manufacturing a resin seal according to an embodiment of the present invention includes: setting the workpiece in a workpiece heating part of the loader; preheating while conveying the workpiece; delivering the workpiece from the workpiece heating portion to a loader robot; carrying a workpiece into a resin sealing mold by using a loader manipulator; and preheating the workpiece includes changing a support position of the workpiece in the workpiece heating section relative to the heater in a thickness direction of the workpiece.

[ Effect of the invention ]

According to the present invention, a resin sealing apparatus and a method for manufacturing a resin sealed product capable of suppressing damage to a work can be provided.

Drawings

Fig. 1 is a plan view schematically showing the structure of a resin sealing apparatus according to a first embodiment.

Fig. 2 is a cross-sectional view schematically showing the structure of the loader according to the first embodiment.

Fig. 3 is a diagram schematically showing a process in which the workpiece heating section receives a workpiece.

Fig. 4 is a diagram schematically showing a process in which the workpiece heating section supports the workpiece at the first support position.

Fig. 5 is a diagram schematically showing a process in which the workpiece heating section supports the workpiece at the second support position.

Fig. 6 is a diagram schematically showing a process in which the workpiece heating section delivers a workpiece to the workpiece holding section.

Fig. 7 is a cross-sectional view schematically showing the structure of the loader according to the second embodiment.

Fig. 8 is a plan view schematically showing the structure of a resin sealing apparatus according to a third embodiment.

Fig. 9 is a flowchart showing a process for producing a resin seal according to the fourth embodiment.

[ description of symbols ]

1: resin sealing apparatus (Molding apparatus)

10: inner module

11A, 11B, 12A, 12B, 111A, 111B, 112A, 112B: side rail

13: index part

15: feeding box

17: web feeding unit

18: resin tablet

20-50: stamping module

21 to 51: resin sealing mould

90: outer module

91: pouring tray

93: pouring gate manipulator

95: storage material box

100: loading machine

101: base seat

110: workpiece heating part

110A: first workpiece heating part

110B: second workpiece heating part

111. 112: workpiece support

113. 114: heater

115A, 115B, 116A, 116B: spring

117: cylinder

118: thermal insulation cover

118a: pressing down part

118b: protruding part

120: loader manipulator

121. 122: workpiece holding part

125: holding hole for material sheet

127: shutter door

200: unloading machine

300: guide part

S10, S20, S30, S40: working procedure

W: workpiece

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings of the embodiments are illustrative, and the sizes and shapes of the parts are illustrative, and the technical scope of the invention of the present application should not be construed as being limited to the embodiments.

The structure of the resin sealing apparatus 1 according to the embodiment of the present invention will be described with reference to fig. 1 and 2. Fig. 1 is a plan view schematically showing the structure of a resin sealing apparatus according to a first embodiment. Fig. 2 is a cross-sectional view schematically showing the structure of the loader according to the first embodiment.

In the drawings, orthogonal coordinate systems including X-axis, Y-axis, and Z-axis may be denoted for convenience in order to clarify the relationship between the drawings and to facilitate understanding of the positional relationship of the members. The explanation will be given with respect to the plane including the X axis and the Y axis being an "XY plane", the direction in which the arrow of the Z axis is directed being an upward direction, and the direction opposite to the direction in which the arrow of the Z axis is directed being a downward direction.

The resin sealing apparatus (molding apparatus) 1 is for resin sealing (molding) a work. As shown in fig. 1, the resin sealing apparatus 1 includes: an inner module 10 for supplying a work before resin sealing; the stamping module 20, the stamping module 30, the stamping module 40 and the stamping module 50 are used for carrying out resin sealing on the workpiece; and an outer module 90 for recovering the resin-sealed work. The resin sealing apparatus 1 includes a conveying mechanism including a guide 300, a loader 100, and an unloader 200.

In the example shown in fig. 1, the inner die 10, the press die 20 to the press die 50, and the outer die 90 are arranged in the X-axis direction, and the loader 100 and the unloader 200 are movable along a guide 300 extending over the respective dies. In the present embodiment, the loader 100 includes a workpiece heating unit 110 and a loader robot 120.

The resin sealing apparatus 1 is, for example, a resin sealing apparatus that resin-seals a work W. As an example of the resin sealing apparatus, there is a transfer molding machine that performs pressurization and heating by using a filling pressure of a resin injected into a cavity of a closed resin sealing mold (molding mold). In the examples shown below, the entire apparatus including the press module for resin-sealing the work is described as an example of the resin sealing apparatus, but the resin sealing apparatus of the present invention is not limited to the apparatus including the press module, and may be any apparatus (for example, a loader, an inner module, or the like) having the work heating portion of the present embodiment and used for resin sealing the work.

The work W includes an element (e.g., a semiconductor element, a Micro-Electro-Mechanical System (MEMS) chip, or/and an electronic device) resin-sealed by a resin sealing apparatus, and a support of the element. The work W is not limited, and may be, for example, a lead frame on which a semiconductor element is mounted, an interposer (interposer) substrate on which a semiconductor element is mounted, or a carrier plate (carrier plate) with an adhesive sheet on which a semiconductor element is temporarily attached. In the embodiment described below, the description has been made using a thin and long interposer substrate that is warped or undulated due to heating, but other work pieces may be used.

The configuration of each module shown in fig. 1 will be described below.

The inner module 10 includes a supply cassette (magazine) 15, an index portion 13, and a web supply portion 17. The plurality of work pieces W before resin sealing are housed in the supply magazine 15 so as to overlap in the Z-axis direction. A plurality of supply cassettes 15 are arranged in a work supply section that supplies works W to the index section 13. The index portion 13 positions the orientation of the work W. For example, the index portion 13 is a table rotatably provided so that the two works W received from the feed cassette 15 are arranged with the same sides facing each other. The index portion 13 supplies the two work pieces W arranged to the work piece heating portion 110. The web supply unit 17 supplies the aligned plurality of resin webs 18 to the loader robot 120.

The

press modules

20, 30, 40, 50 include a

resin sealing mold

21, 31, 41, and 51, respectively. The punching modules 20 to 50 are arranged in the X-axis direction, and the resin sealing molds 21 to 51 are also arranged in the X-axis direction. The resin sealing molds 21 to 51 are, for example, a pair of openable and closable molds including a lower mold and an upper mold. The press modules 20 to 50 hold the work W in cavities formed in the respective interiors (between the lower die and the upper die) of the resin sealing dies 21 to 51, respectively. The press modules 20 to 50 each seal the element of the work W by injecting resin into the cavity. In the present embodiment, the resin sealing apparatus 1 includes, for example, four press modules, but the number of press modules can be changed as appropriate.

The outer module 90 includes a de-gate pallet 91, a de-gate hand 93, and a receiver 95. The degating tray 91 receives the work W connected with the unnecessary resin from the unloader 200 and conveys the work W to the lower side of the degating robot 93. The gating robot 93 separates the unnecessary resin from the conveyed work W. The separated waste resin is recovered to a waste bin. The separated workpiece W is accommodated in the accommodating magazine 95. The plurality of resin-sealed workpieces W are stacked and accommodated in the accommodating magazine 95 in the Z-axis direction. A plurality of storage cassettes 95 are arranged in the workpiece storage section for collecting the workpieces W. The outer die block 90 is disposed on the opposite side of the inner die block 10 as viewed from the press die blocks 20 to 50. However, the arrangement of the respective modules is not limited to the above, and the inner module 10 and the outer module 90 may be provided on the same side as viewed from the press module 20 to the press module 50.

The conveying mechanism conveys the workpiece W. Specifically, the loader 100 carries the work W into any one of the resin sealing molds 21 to 51. The unloader 200 removes the work W from any one of the resin sealing molds 21 to 51. The guide 300 extends in the X-axis direction so as to traverse the inner module 10, the press module 20 to the press module 50, and the outer module 90. The loader 100 and the unloader 200 are each configured to be movable along the guide 300 in the X-axis direction. The loader robot 120 is configured to be movable in the Y-axis direction. That is, the loader robot 120 is configured to be able to enter the inside of each of the resin sealing molds 21 to 51. The unloader robot of the unloader 200 is also configured to be able to enter the inside of each of the resin sealing molds 21 to 51 in the same manner.

The loader 100 has a base 101 that is movable along a guide 300. The workpiece heating unit 110 is mounted on the base 101 so as to be movable in the X-axis direction on the base 101. The loader robot 120 having the workpiece holding portion 121 and the workpiece holding portion 122 is mounted on the base 101 so as to be separable or accessible in the Y-axis direction with respect to the base 101. That is, in the loader 100, the workpiece heating portion 110 is movable relative to the workpiece holding portion 121 and the workpiece holding portion 122 of the loader robot 120.

The work heating unit 110 performs preliminary heating (hereinafter, referred to as "preheating") before the work W is carried into the resin sealing molds 21 to 51, so as to reduce the temperature difference between the work W and the resin sealing molds 21 to 51. The workpiece heating section 110 is configured to be able to directly receive the workpiece W from the index section 13. The workpiece heating unit 110 includes a workpiece support 111, a workpiece support 112, a heater 113, a heater 114, and a support position changing mechanism.

The workpiece support 111 and the workpiece support 112 support the workpieces W supplied from the index 13, respectively. The workpiece support 111 and the workpiece support 112 support the workpiece W such that the thickness direction of the workpiece W is parallel to the Z-axis direction and the main surface of the workpiece W is parallel to the XY plane. The workpiece support 111 and the workpiece support 112 are separated from the heater 113 and the heater 114, respectively, in the Z-axis direction. That is, the workpiece support 111 and the workpiece support 112 support the workpiece W at positions separated from the heater 113 and the heater 114, respectively. The workpiece support portion 111 has a pair of

side rails

111A, 111B that clamp the workpiece W in the X-axis direction. The workpiece support 112 has a pair of side rails 112A, 112B that clamp the workpiece W in the X-axis direction. Thus, by extruding in the Y direction from the index portion 13, two workpieces W can be directly received by the pair of

side rails

111A, 111B, 112A, 112B at positions separated from the heater 113 and the heater 114.

The heater 113 heats the workpiece W supported by the workpiece support portion 111, and the heater 114 heats the workpiece W supported by the workpiece support portion 112. The heater 113 is provided such that a heating surface parallel to the XY surface faces the main surface of the workpiece W supported by the workpiece support section 111. The heater 114 is provided such that a heating surface parallel to the XY surface faces the main surface of the workpiece W supported by the workpiece support 112. The heater 113 and the heater 114 are provided in a common base portion.

The support position changing mechanism is configured to be able to change the support position of the workpiece W (the positions of the workpiece support portion 111 and the workpiece support portion 112) in the workpiece heating portion 110 with respect to the heater 113 and the heater 114 in the thickness direction of the workpiece W. The support position changing mechanism includes, for example, a spring 115A, a spring 115B, a spring 116A, a spring 116B, a cylinder 117, and a heat insulating cover 118.

The spring 115A connects the base portion provided with the heater 113 and the side rail 111A so as to be stretchable in the Z-axis direction. Similarly, the spring 115B connects the base portion and the side rail 111B so as to be stretchable in the Z-axis direction. The spring 116A connects the base portion provided with the heater 114 to the side rail 112A so as to be stretchable in the Z-axis direction. Similarly, the spring 116B connects the base portion and the side rail 112B so as to be stretchable in the Z-axis direction.

The air cylinder 117 as a driving mechanism holds the heat-insulating cover 118, and moves the heat-insulating cover 118 in the Z-axis direction. The heat-retaining cover 118 faces the heater 113 through the work support 111, and faces the heater 114 through the work support 112. The heat-retaining cover 118 is provided to cover the heater 113 and the heater 114 so as not to escape the radiant heat, thereby improving the heating efficiency of the workpiece W and contributing to the temperature maintenance of the workpiece W. The thermal insulation cover 118 is provided with a pressing portion 118a that hangs down from the outside of the side rails 111A, 111B, 112A, 112B with respect to the workpiece W. The heat-insulating cover 118 is provided with a protrusion 118b that depends from the inside of the pressing portion 118a with reference to the work W. The end portion (peripheral edge portion) of the workpiece W is located between the projection 118B and the side rail 111A, the side rail 111B, the side rail 112A, and the side rail 112B. The protruding portion 118b is configured to be separated from the workpiece W whose front end is not deformed, and does not limit the elongation of the workpiece W due to the preheating. On the other hand, the protruding portion 118b is configured to come into contact with the workpiece W whose front end is warped by preheating, and to restrict large warpage and wobbling of the workpiece W.

When the cylinder 117 is extended, the heat-insulating cover 118 contacts the side rails 111A, 111B, 112A, and 112B with the pressing portion 118a, and the

springs

115A, 115B, 116A, and 116B contract, respectively. That is, the workpiece support 111 approaches the heater 113 in the Z-axis direction, and the workpiece support 112 approaches the heater 114 in the Z-axis direction. When the cylinder 117 is contracted, the heat-retaining cover 118 is separated from each of the side rails 111A, 111B, 112A, 112B, and the

springs

115A, 115B, 116A, 116B are respectively expanded. That is, the workpiece support 111 is separated from the heater 113 in the Z-axis direction, and the workpiece support 112 is separated from the heater 114 in the Z-axis direction.

The cylinder 117 and the thermal cover 118 are provided at positions separated from the loader robot 120 in the X-axis direction. Therefore, the support position changing mechanism is configured to be able to change the support position of the workpiece W at a position separated from the workpiece holding portion 121 and the workpiece holding portion 122 of the loader robot 120 in the horizontal direction. Here, the horizontal direction is a direction parallel to the XY plane. When the

springs

115A, 115B, 116A, and 116B are extended, the positions of the workpieces W supported by the

workpiece support portions

111 and 112 are set to the first support positions. When the

springs

115A, 115B, 116A, and 116B contract, the positions of the workpieces W supported by the

workpiece support portions

111 and 112 are set to the second support positions. That is, the first support position is separated from the

heater

113, 114, and the second support position is closer to the

heater

113, 114 than the first support position. The second support position is also separated from the heater 113 and the heater 114 in order to avoid uneven or abrupt temperature changes of the workpiece W. However, the support position changing mechanism may be configured so that the workpiece W can be brought into contact with each of the heater 113 and the heater 114.

Further, in the present embodiment, the distance in the Z-axis direction between the workpiece W and the heater 113 at the first support position of the workpiece support 111 and the distance in the Z-axis direction between the workpiece W and the heater 114 at the first support position of the workpiece support 112 are the same length. Likewise, the distance in the Z-axis direction between the workpiece W and the heater 113 at the second support position of the workpiece support 111 and the distance in the Z-axis direction between the workpiece W and the heater 114 at the second support position of the workpiece support 112 are the same length. When the workpiece support 111 is located at the first support position, the workpiece support 112 is also located at the first support position, and when the workpiece support 111 is located at the second support position, the workpiece support 112 is also located at the second support position. The reason for this is that: the work support 111 and the work support 112 are connected, and the heat-insulating cover 118 uniformly presses down both the work support 111 and the work support 112. However, the workpiece support 111 and the workpiece support 112 may be configured to be movable independently of each other. That is, when the workpiece support 111 is located at the first support position, the workpiece support 112 may be located at the second support position.

The support position changing mechanism may have a stopper for preventing the workpiece W from approaching the heater 113 and the heater 114 excessively. Further, stoppers may be provided to limit the extension of the

springs

115A, 115B, 116A, 116B to support the workpiece W at positions moderately separated from the

heaters

113, 114. The support position changing mechanism may also include a heat insulator that prevents the end of the workpiece W from being heated via the side rails 111A, 111B, 112A, and 112B.

The loader robot 120 includes a work holding portion 121, a work holding portion 122, a web holding hole 125, and a shutter 127.

The

work holding portions

121 and 122 are arranged in the X-axis direction. The

work holding portions

121 and 122 hold the work W heated by the work heating portion 110 by conveying the work W to any one of the resin sealing molds 21 to 51. Specifically, before the loader robot 120 enters the interior of any one of the resin sealing molds 21 to 51, the work holding portion 121 receives the work W preheated by the work supporting portion 111, and the work holding portion 122 receives the work W preheated by the work supporting portion 112. The loader robot 120 integrally carries the two works W held by the

work holding portions

121 and 122 into any one of the resin sealing molds 21 to 51, and delivers them to the upper surface of the lower mold.

The web holding hole 125 is provided between the work holding portion 121 and the work holding portion 122. The web holding hole 125 is for holding the resin web 18 by being conveyed to the resin sealing mold 21 to the resin sealing mold 51. Specifically, the web holding hole 125 accommodates the resin web 18 received from the web supply portion 17. The sheet holding hole 125 in which the resin sheet 18 is accommodated is blocked by a shutter 127. Thereby, the resin web 18 is held in the web holding hole 125 without falling down. The loader robot 120 carries the resin web 18 held in the web holding hole 125 into any one of the resin sealing molds 21 to 51 (more specifically, into a lower mold can (not shown)) and delivers it.

Next, the operation of the loader 100 will be described with reference to fig. 3 to 6. Fig. 3 is a diagram schematically showing a process in which the workpiece heating section receives a workpiece. Fig. 4 is a diagram schematically showing a process in which the workpiece heating section supports the workpiece at the first support position. Fig. 5 is a diagram schematically showing a process in which the workpiece heating section supports the workpiece at the second support position. Fig. 6 is a diagram schematically showing a process in which the workpiece heating section delivers a workpiece to the workpiece holding section.

As shown in fig. 3, the index portion 13 has a pair of

side rails

11A, 11B capable of holding the workpiece W, and the support position changing mechanism of the workpiece heating portion 110 has a pair of

side rails

111A, 111B, and the pair of

side rails

111A, 111B are configured to be capable of receiving the workpiece W extruded from the pair of

side rails

11A, 11B on the extension line of the pair of

side rails

11A, 11B. Side rails 11A, 11B correspond to the first side rail, and

side rails

111A, 111B correspond to the second side rail. That is, the workpiece W slides along the pair of

side rails

11A, 11B and the pair of

side rails

111A, 111B, and is delivered from the index portion 13 to the workpiece heating portion 110. Similarly, the index portion 13 has a pair of side rails 12A, 12B, and the support position changing mechanism of the workpiece heating portion 110 has a pair of side rails 112A, 112B. As described above, the workpiece W is placed on the heater 113 and the heater 114 by sliding from the side of the heater 113 and the heater 114.

As shown in fig. 4, in the inner module 10, the

workpiece support

111, 112 of the workpiece heating section 110 receives the workpiece W from the index section 13 at a first support position separated from the

heaters

113, 114. In the first supporting position, the workpiece W is hardly affected by the

heater

113, 114 and is not heated. Therefore, when the workpiece W is pushed in so as to slide on the heater 113 and the heater 114, the heating state is unbalanced from the front end side to the rear end side in the pushing direction, and the workpiece W is prevented from being warped or undulated. At this time, the workpiece heating section 110 is separated from the region below the loader robot 120 in the X-axis direction and is located below the heat insulating cover 118. The cylinder 117 does not lower the heat insulating cover 118, and the heat insulating cover 118 is separated from the work support 111 and the work support 112. In addition, the sheet holding hole 125 of the loader robot 120 receives the resin sheet 18 from the sheet supply portion 17. Since the workpiece heating section 110 is separated from the loader robot 120 in the X-axis direction, the resin web 18 held in the web holding hole 125 is not affected by the

heater

113, 114, and deterioration of the resin web 18 due to heating can be suppressed.

As shown in fig. 5, when preheating of the workpiece W is started, the air cylinder 117 lowers the heat-retaining cover 118, and the heat-retaining cover 118 presses the workpiece support 111 and the workpiece support 112. Then, the

workpiece support

111, 112 of the workpiece heating section 110 holds the workpiece W at a second support position closer to the

heater

113, 114 than the first support position. In the second supporting position, the workpiece W is heated to a desired temperature by the

heaters

113 and 114. The temperature rise of the workpiece W may be adjusted according to the distance between the second support position and the

heater

113, 114, or the moving speed from the first support position to the second support position, and the preheating temperature of the workpiece W may be adjusted according to the holding time at the second support position.

The preheating of the workpiece W may be performed during the movement of the workpiece W from the first support position to the second support position. In addition, in order to heat the workpiece W stepwise, the workpiece W may also stay at least one position between the first support position and the second support position.

As shown in fig. 6, the workpiece heating section 110 that heats the workpiece W to a desired temperature is moved below the loader robot 120. Here, the workpiece W is delivered to the workpiece holding portion 121 and the workpiece holding portion 122 of the loader robot 120. The transfer of the workpiece W from the workpiece heating section 110 to the loader robot 120 is performed in the press modules 20 to 50, for example, but may be performed in the inner module 10. In view of suppressing the temperature decrease of the workpiece W, the delivery of the workpiece W is desirably performed immediately before the loader robot 120 carries the workpiece W into the resin sealing mold 21 to the resin sealing mold 51.

As described above, the resin sealing apparatus 1 includes the workpiece heating section 110 and the loader robot 120 having the workpiece holding section 121 and the workpiece holding section 122. The workpiece heating section 110 includes a support position changing mechanism capable of changing the support position of the workpiece W in the thickness direction of the workpiece W, and the support position changing mechanism changes the positions of the workpiece support section 111 and the workpiece support section 112.

Accordingly, the temperature rising rate of the workpiece W in the step of preheating the workpiece W can be reduced as compared with a configuration in which the relative positions of the workpiece support portion and the heater are fixed. Therefore, damage to the work W or defective resin sealing due to temperature unevenness or abrupt temperature change of the work W can be suppressed. In addition, when the temperature rise of the workpiece is to be suppressed in a structure in which the relative positions of the workpiece support portion and the heater are fixed, countermeasures such as temporarily stopping the heater are required, and the workpiece is required to be put on standby until the output adjustment of the heater is completed. However, according to the present embodiment, the output of the heater 113 and the heater 114 can be kept constant, and the temperature rise rate of the workpiece W can be reduced, so that the work efficiency is improved.

Further, if the support position of the workpiece W can be changed relative to the heater 113 and the heater 114 in the thickness direction of the workpiece W, the support position changing means may change the positions of the heater 113 and the heater 114. For example, the

springs

115A, 115B, 116A, and 116B of the present embodiment are omitted, and the

workpiece support

111 and 112 are fixed to the base portion. The heater 113 and the heater 114 provided in the base portion are omitted, and instead, the heater is provided on the side of the heat insulating cover 118 facing the workpiece W. Accordingly, the same effects as described can be obtained. The support position changing mechanism may change the positions of the workpiece support 111, the workpiece support 112, and both the heater 113 and the heater 114 in the thickness direction of the workpiece W.

The workpiece heating unit 110, the workpiece holding unit 121, and the workpiece holding unit 122 are provided in the loader 100.

Accordingly, the workpiece W can be preheated until immediately before the workpiece W is carried in by the loader robot 120. That is, the heating time can be prolonged, and the preheated workpiece W can be prevented from being lowered in temperature. In other respects, the temperature rise rate of the workpiece W can be reduced.

The workpiece heating unit 110 is movable in the horizontal direction, and is configured to be able to change the support position of the workpiece W at a position separated from the lower portions of the workpiece holding unit 121 and the workpiece holding unit 122 in the horizontal direction.

Accordingly, the resin sheets 18 held by the loader robot 120 can be prevented from being heated and deteriorated by the

heaters

113 and 114 of the workpiece heating section 110. In addition, when the support position changing mechanism is operated, the heat-retaining cover 118 and the like may be provided above the work support portion 111 and the work support portion 112 of the work heating portion 110 without being obstructed by the work holding portion 121 and the work holding portion 122.

The workpiece heating unit 110 may be movable relative to the

workpiece holding units

121 and 122. For example, the workpiece heating section 110 may be moved in the thickness direction of the workpiece W below the

workpiece holding sections

121 and 122. That is, the workpiece heating unit 110 may heat the workpiece W at a heating position below the

workpiece holding units

121 and 122, that is, at a position separate from the

workpiece holding units

121 and 122, and deliver the workpiece W to the

workpiece holding units

121 and 122 at a position below the

workpiece holding units

121 and 122, that is, at a position closer to the

workpiece holding units

121 and 122 than the heating position. Accordingly, the same effects as described can be obtained. The

workpiece holding portions

121 and 122 may be movable with respect to the workpiece heating portion 110.

The workpiece heating unit 110 is configured to be able to directly receive the workpiece W from the index unit 13 for positioning the orientation of the workpiece W. Then, the pair of

side rails

111A, 111B of the workpiece support portion 111 constituting the workpiece heating portion 110 receive the workpiece W extruded from the pair of

side rails

11A, 11B on the extension line of the pair of

side rails

11A, 11B sandwiching the workpiece W at the index portion 13.

As described above, even in the configuration in which the workpiece heating unit 110 directly receives the workpiece W from the index unit 13, the workpiece W is not heated when the workpiece W is received from the index unit 13 in the workpiece heating unit 110 according to the present embodiment, and thus, the temperature unevenness of the workpiece W can be suppressed.

In the first embodiment, the transfer molding machine has been described as an example, but the resin sealing apparatus 1 according to the embodiment of the present invention is not limited to this if it is an apparatus for heating the work W. For example, the resin sealing apparatus 1 may be a compression molding machine that pressurizes the resin supplied to the resin sealing mold in an open state in conjunction with the closing of the resin sealing mold. For example, in the case of using a compression molding die in which a cavity is provided in a lower die, a loader in which the structure provided in fig. 2 is inverted vertically may be used as an example of compression molding. Accordingly, the

work holding portions

121 and 122 can receive the work W preheated by the work heating portion 110 from above and deliver the work W to the lower surface of the upper die.

The structure of the resin sealing apparatus 1 according to another embodiment of the present invention will be described below. In the following embodiments, descriptions of matters common to the first embodiment will be omitted, and only the differences will be described. In particular, the same operational effects brought about by the same structure are not mentioned sequentially.

< second embodiment >

The structure of the loader 100 according to the second embodiment will be described with reference to fig. 7. Fig. 7 is a cross-sectional view schematically showing the structure of the loader according to the second embodiment.

The workpiece heating section 110 has a first workpiece heating section 110A and a second workpiece heating section 110B. The first and second

workpiece heating portions

110A and 110B each have the same structure as the workpiece heating portion 110 of the first embodiment. That is, the first workpiece heating section 110A includes a first heater and a first support position changing mechanism capable of changing the support position of the workpiece in the first workpiece heating section relative to the first heater, and the second workpiece heating section 110B includes a second heater and a second support position changing mechanism capable of changing the support position of the workpiece in the second workpiece heating section relative to the second heater. The first support position changing mechanism and the second support position changing mechanism are each configured to be capable of changing the position of the workpiece W independently of each other.

Accordingly, the time from the reception of the work W by the work heating unit 110 from the index unit 13 to the delivery of the work W to the

work holding units

121 and 122 of the loader robot 120 can be prolonged. This can reduce the temperature rise rate of the workpiece W, and can preheat the workpiece W having a large heat capacity, such as a heat sink. In addition, the frequency with which the loader 100 returns to the inner module 10 to receive the work W from the index portion 13 can be reduced. Therefore, the conveying efficiency of the workpiece W is improved.

< third embodiment >

The structure of the resin sealing apparatus 1 according to the third embodiment will be described with reference to fig. 8. Fig. 8 is a plan view schematically showing the structure of a resin sealing apparatus according to a third embodiment.

The work heating portion 110 is fixed to the inner module 10. The loader robot 120 of the loader 100 receives the workpiece W from the workpiece heating section 110 in the inner module 10, and conveys the workpiece W to any one of the press modules 20 to 50.

< fourth embodiment >, a third embodiment

A method for producing the resin seal according to the fourth embodiment will be described with reference to fig. 9. Fig. 9 is a flowchart showing a method for producing a resin seal according to the fourth embodiment. In this embodiment, for example, the resin sealing apparatus of the first embodiment can be used.

First, a workpiece is set in a workpiece heating section of a loader (S10).

The loader is moved to the inner module. The workpiece heating portion directly receives the workpiece from the index portion at a first support position separate from the heater.

Next, preheating is performed while conveying the workpiece (S20).

The loader is moved from the inner module to the ram module. During this movement, the workpiece heating portion changes the support position of the workpiece from the first support position to a second support position closer to the heater than the first support position.

Next, the workpiece is delivered from the workpiece heating section to the loader robot (S30).

In the loader, the workpiece support portion is moved to a position immediately below the loader robot, and the workpiece is delivered to the workpiece holding portion of the loader robot.

Next, the work is carried into the resin sealing mold by the loader robot (S40).

The loader robot enters a space between the upper die and the lower die of the resin-sealed die after the die opening in a state supported by the base portion of the loader, and delivers the work to the die face of the lower die. And then the loader manipulator withdraws from the resin sealing mold, and the resin sealing mold is closed. A work is disposed in a cavity inside the resin-sealed mold after the mold is closed. And injecting resin into the cavity, wherein the injected resin is heated while being pressurized. After the resin is hardened, the resin sealing mold is opened, and the unloading machine manipulator removes the resin-sealed workpiece from the resin sealing mold.

Hereinafter, some or all of the embodiments of the present invention will be described with reference to the drawings. The present invention is not limited to the following descriptions.

According to an embodiment of the present invention, there may be provided a resin sealing apparatus for resin sealing a work with a resin, the resin sealing apparatus including: a workpiece heating unit for heating a workpiece; and a work holding unit for holding the work heated by the work heating unit by transferring the work to the resin sealing mold; the workpiece heating section has a heater and a support position changing mechanism capable of changing a support position of the workpiece in the workpiece heating section relative to the heater in a thickness direction of the workpiece. The support position changing mechanism is configured to be capable of changing a support position of the workpiece to a first support position separated from the heater and a second support position closer to the heater than the first support position.

Accordingly, the temperature rising rate of the workpiece in the step of preheating the workpiece can be reduced as compared with a structure in which the relative positions of the workpiece support portion and the heater are fixed. Therefore, damage to the work or defective resin sealing due to temperature unevenness or abrupt temperature change of the work can be suppressed. In addition, when the temperature rise of the workpiece is to be suppressed in a structure in which the relative positions of the workpiece support portion and the heater are fixed, the heater needs to be temporarily cooled, and the workpiece needs to be standby until the output adjustment of the heater is completed. However, according to the present embodiment, the output of the heater can be kept constant, and the temperature rise rate of the workpiece can be reduced, so that the work efficiency is improved.

As an embodiment, a loader for transferring a workpiece to a resin sealing mold is included, the loader having a workpiece heating portion and a workpiece holding portion.

Accordingly, the workpiece can be preheated until immediately before the workpiece is carried in by the loader manipulator. That is, the heating time can be prolonged, and the temperature rise rate of the workpiece can be reduced.

As an embodiment, the workpiece heating portion is relatively movable with respect to the workpiece holding portion. The support position changing mechanism is configured to be able to change the support position of the workpiece at a position separated from the lower side of the workpiece holding portion in the horizontal direction.

Accordingly, the resin material sheet held by the loader robot can be prevented from being heated by the heater of the workpiece heating section and deteriorating. In addition, when the support position changing mechanism is operated, a heat-retaining cover or the like may be provided above the workpiece support portion of the workpiece heating portion without being obstructed by the workpiece holding portion.

As an embodiment, the workpiece heating section is configured to be able to directly receive the workpiece from an index section that positions the orientation of the workpiece. The index portion has a pair of first side rails capable of holding the workpiece, and the support position changing mechanism of the workpiece heating portion has a pair of second side rails configured to be capable of receiving the workpiece extruded from the first side rails on an extension line of the first side rails.

As described above, even in the configuration in which the workpiece heating portion directly receives the workpiece from the index portion, the workpiece is not heated when the workpiece heating portion of the present embodiment receives the workpiece from the index portion, and thus, the temperature unevenness of the workpiece can be suppressed.

As an embodiment, the workpiece heating section has a first workpiece heating section having a first heater and a first support position changing mechanism capable of changing a support position of the workpiece in the first workpiece heating section relative to the first heater, and the workpiece heating section has a second heater and a second support position changing mechanism capable of changing a support position of the workpiece in the second workpiece heating section relative to the second heater, and the first support position changing mechanism and the second support position changing mechanism are respectively configured to be capable of changing the position of the workpiece independently of each other.

Accordingly, the frequency with which the loader returns to the inner module to receive the work from the index portion can be reduced. Therefore, the conveying efficiency of the workpiece is improved. In addition, the time from the reception of the work by the work heating portion to the delivery of the work to the work holding portion of the loader robot can be prolonged. Therefore, the temperature rise rate of the workpiece can be further reduced.

According to an embodiment of the present invention, a method for manufacturing a resin seal includes: setting the workpiece in a workpiece heating part of the loader; preheating while conveying the workpiece; delivering a workpiece from the workpiece heating portion to a loader robot; carrying a workpiece into a resin sealing mold by using the loader manipulator; preheating the workpiece includes changing a support position of the workpiece in the workpiece heating section relative to the heater in a thickness direction of the workpiece.

Accordingly, the temperature rising speed of the workpiece in the step of preheating the workpiece can be reduced. Therefore, damage to the work or defective resin sealing due to temperature unevenness or abrupt temperature change of the work can be suppressed.

As an embodiment, preheating while conveying the workpiece includes moving a support position of the workpiece from a first support position separated from the heater to a second support position closer to the heater than the first support position.

Accordingly, temperature unevenness of the work can be reduced, and damage to the work or defective resin sealing can be suppressed.

As an embodiment, positioning the workpiece to the workpiece heating portion of the loader includes directly receiving the workpiece from an index portion that positions an orientation of the workpiece in the first support position.

As described above, according to an embodiment of the present invention, a resin sealing apparatus and a method for manufacturing a resin sealed product capable of suppressing damage to a workpiece can be provided.

The embodiments described above are for easy understanding of the present invention, and are not intended to limit the present invention. The present invention can be modified/improved without departing from the gist thereof, and equivalents thereof are also included in the present invention. That is, those skilled in the art can appropriately change the design of each embodiment as long as the features of the present invention are provided, and the present invention is also included in the scope of the present invention. For example, the elements and their arrangement, materials, conditions, shapes, sizes, and the like included in each embodiment are not limited to examples, and may be appropriately changed. Further, each element included in each embodiment may be combined as long as the technology is feasible, and the combination of these elements is also included in the scope of the present invention as long as the features of the present invention are included.

Claims

1. A resin sealing apparatus for resin sealing a work with a resin, the resin sealing apparatus comprising:

a workpiece heating unit for heating a workpiece; and

a work holding unit for holding the work heated by the work heating unit by transferring the work to a resin sealing mold; and is also provided with

The workpiece heating section includes a heater and a support position changing mechanism capable of changing a support position of the workpiece in the workpiece heating section relative to the heater in a thickness direction of the workpiece.

2. The resin sealing apparatus according to claim 1, wherein,

the support position changing mechanism is configured to be capable of changing a support position of a workpiece to a first support position separated from the heater and a second support position closer to the heater than the first support position.

3. The resin sealing apparatus according to claim 1 or 2, wherein,

comprising a loader for conveying a work to the resin sealing mold,

the loader has the work heating portion and the work holding portion.

4. A resin sealing apparatus according to claim 3, wherein,

the workpiece heating portion is relatively movable with respect to the workpiece holding portion.

5. The resin sealing apparatus according to claim 4, wherein,

the support position changing mechanism is configured to be able to change the support position of the workpiece at a position separated from the lower side of the workpiece holding portion in the horizontal direction.

6. The resin sealing apparatus according to claim 5, wherein,

the workpiece heating section is configured to be able to directly receive a workpiece from an index section that positions an orientation of the workpiece.

7. The resin sealing apparatus according to claim 6, wherein,

the index portion has a pair of first side rails capable of holding a workpiece,

the support position changing mechanism of the workpiece heating section has a pair of second side rails configured to be able to receive a workpiece extruded from the first side rail on an extension line of the first side rail.

8. The resin sealing apparatus according to claim 1 or 2, wherein,

the workpiece heating part is provided with a first workpiece heating part and a second workpiece heating part,

the first workpiece heating section has a first heater and a first support position changing mechanism capable of changing a support position of a workpiece in the first workpiece heating section relative to the first heater,

the second workpiece heating section has a second heater and a second support position changing mechanism capable of changing a support position of the workpiece in the second workpiece heating section relative to the second heater,

the first support position changing mechanism and the second support position changing mechanism are each configured to be capable of changing the position of the workpiece independently of each other.

9. A method for producing a resin seal, comprising:

setting the workpiece in a workpiece heating part of the loader;

preheating while conveying the workpiece;

delivering a workpiece from the workpiece heating portion to a loader robot; and

carrying a workpiece into a resin sealing mold by using the loader manipulator; and is also provided with

Preheating the workpiece includes changing a support position of the workpiece in the workpiece heating section relative to the heater in a thickness direction of the workpiece.

10. The method for producing a resin seal according to claim 9, wherein,

preheating while conveying the workpiece includes moving a support position of the workpiece from a first support position separated from the heater to a second support position closer to the heater than the first support position.

11. The method for producing a resin seal according to claim 10, wherein,

the workpiece heating portion for positioning the workpiece in the loader includes an index portion for directly receiving the workpiece from the index portion for positioning the orientation of the workpiece in the first support position.