KR20120041864A - Sticking debris removal device of glass surface - Google Patents

Sticking debris removal device of glass surface Download PDF

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Publication number
KR20120041864A
KR20120041864A KR1020100103235A KR20100103235A KR20120041864A KR 20120041864 A KR20120041864 A KR 20120041864A KR 1020100103235 A KR1020100103235 A KR 1020100103235A KR 20100103235 A KR20100103235 A KR 20100103235A KR 20120041864 A KR20120041864 A KR 20120041864A
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KR
South Korea
Prior art keywords
axis
foreign matter
axis robot
glass
attached
Prior art date
Application number
KR1020100103235A
Other languages
Korean (ko)
Inventor
안현구
Original Assignee
(주)이케이테크놀로지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)이케이테크놀로지 filed Critical (주)이케이테크놀로지
Priority to KR1020100103235A priority Critical patent/KR20120041864A/en
Publication of KR20120041864A publication Critical patent/KR20120041864A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/008—Manipulators for service tasks
    • B25J11/0085—Cleaning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)

Abstract

The present invention relates to an apparatus for removing a sticking foreign matter on a glass surface for removing foreign matter attached to a glass that is mounted on a stone washing table and cleaned in a dry cleaner. and; An ultrasonic oscillation unit 20 installed inside the stone panel 10 to oscillate by ultrasonic oscillation; A glass 20 adsorbed on the stone plate; An X-axis robot (30) installed on the stone platform to move in the X-axis direction; A Y-axis robot 40 installed in the vertical direction to the X-axis robot 30 and moving in the Y-axis direction; A Z-axis robot 50 installed in the vertical direction on the Y-axis robot 40 to move in the Z-axis direction; An ultrasonic vibration tip (60) attached to the plate via a Z-axis attachment plate (52) fixed to the Z-axis robot (50); A microscope camera 70 attached to the Z-axis attachment plate 52 to detect adherent foreign matter and fine particles; A gap sensor (80) attached to the Z-axis attachment plate (52) to move up and down by sensing the height of the adherent foreign matter or fine particles attached to the glass (20); Characterized in that it comprises integrally.

Description

Adhesive foreign material removal device on the glass surface {STICKING DEBRIS REMOVAL DEVICE OF GLASS SURFACE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for removing adherent foreign matter from a glass surface during a manufacturing process of LCD and semiconductor PDP. In particular, the present invention relates to an apparatus for removing an adherent foreign substance from a glass surface to fix and remove a foreign substance detected from the glass surface by vacuum and then vibrating with an ultrasonic tip. It is about.

During the manufacturing process of Liquid Crystal Display (hereinafter referred to as 'LCD') and Semiconductor Plasma Display Panel (hereinafter referred to as 'PDP') manufacturing process, foreign matter is generated on the surface of glass and treated as defective. Or waste of manpower and time due to foreign material inspection and removal.

In particular, the presence of foreign matter and fine particles fixed on the glass surface in the process has a problem that the yield of the product is reduced and the defect rate is increased.

The present invention has been made to solve the above-described problems, the object of the glass surface to improve the yield in the product inspection process by removing the adherent foreign matter by fixing the glass in a vacuum on the stone plate and then removed It is to provide a fixed foreign matter removal device.

Another object of the present invention is to remove the fine particles adhered to the glass surface by using ultrasonic vibration to remove the adherent foreign matter on the glass surface that can reduce the defect and the defective rate of the product employing the same without affecting the glass In providing.

The apparatus for removing adherent foreign matter on the glass surface according to the embodiment of the present invention is an apparatus for removing the adherent foreign matter on the glass surface for removing the foreign matter attached to the glass that is mounted on the stone panel and cleaned inside the dry cleaner, and stably adsorbs the glass. Vacuum stone plate 10 for mounting by; An ultrasonic oscillation unit 20 installed inside the stone panel 10 to oscillate by ultrasonic oscillation; An X-axis robot (30) installed on the stone platform to move in the X-axis direction; A Y-axis robot 40 installed in the vertical direction to the X-axis robot 30 and moving in the Y-axis direction; A Z-axis robot 50 installed in the vertical direction on the Y-axis robot 40 to move in the Z-axis direction; An ultrasonic vibration tip (60) attached to the plate via a Z-axis attachment plate (52) fixed to the Z-axis robot (50); A microscope camera 70 attached to the Z-axis attachment plate 52 to detect adherent foreign matter and fine particles; A gap sensor (80) attached to the Z-axis attachment plate (52) to move up and down by sensing the height of the adherent foreign matter or fine particles attached to the glass (20); It can be achieved by providing integrally.

At this time, the control unit 85, the ultrasonic oscillator 20, the X-axis robot 30, the Y-axis robot 40, the Z-axis robot 50 and the ultrasonic vibration tip (Tip) 60 and It is desirable to control the operation of the microscope camera 70 and the microscope camera 70.

According to the apparatus for removing the adherent foreign matter on the glass surface according to the embodiment of the present invention, by removing the adherent foreign matter, there is an effect of reducing the defective rate of the product to improve the yield, in particular by removing the fine foreign matter by using ultrasonic vibration This creates an effect that can be eliminated with minimal physical impact on the glass.

1 is an overall configuration diagram showing for explaining the configuration of the apparatus for removing adherent foreign matter on the glass surface according to an embodiment of the present invention,
FIG. 2 is a partially enlarged view showing an enlarged configuration of an 'A' part shown in FIG. 1;
Figure 3 is an internal configuration showing a detailed configuration of the apparatus for removing the adherent foreign matter on the glass surface according to an embodiment of the present invention,
Figure 4 is an operation explanatory view for explaining the operation of the adhesion foreign matter removal apparatus of the glass surface according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

(Example)

FIG. 1 is an overall configuration diagram illustrating a configuration of an apparatus for removing adherent foreign matter on a glass surface according to a preferred embodiment of the present invention, and FIG. 2 is an enlarged view of a configuration of an 'A' part illustrated in FIG. 1. 3 is an enlarged view showing an internal configuration showing a detailed configuration of the apparatus for removing the adherent foreign matter on the glass surface according to a preferred embodiment of the present invention, Figure 4 is a removal of the adherent foreign matter on the glass surface according to a preferred embodiment of the present invention Operational explanatory diagrams for explaining the operation of the apparatus are respectively shown.

The apparatus for removing adherent foreign matter on the glass surface according to the present invention 100 is an apparatus for removing the adherent foreign matter on the glass surface for removing the foreign matter attached to the glass that is mounted on the stone panel and cleaned in the dry cleaner, and stably adsorbs the glass. Vacuum (Vacuum) stone panel 10 for mounting by; An ultrasonic oscillation unit 20 installed inside the stone panel 10 to oscillate by ultrasonic oscillation; An X-axis robot (30) installed on the stone platform to move in the X-axis direction; A Y-axis robot 40 installed in the vertical direction to the X-axis robot 30 and moving in the Y-axis direction; A Z-axis robot 50 installed in the vertical direction on the Y-axis robot 40 to move in the Z-axis direction; An ultrasonic vibration tip (60) attached to the plate via a Z-axis attachment plate (52) fixed to the Z-axis robot (50); A microscope camera 70 attached to the Z-axis attachment plate 52 to detect adherent foreign matter and fine particles; A gap sensor (80) attached to the Z-axis attachment plate (52) to move up and down by sensing the height of the adherent foreign matter or fine particles attached to the glass (20); Characterized in that it comprises integrally.

Brief description of the symbols of the major parts given in the drawings as follows.

Numeral 10 shows a vacuum stone tablet having a vacuum adsorption function to vacuum the glass mounted on the upper portion, and numeral 15 shows a conventional glass employed for LCD or PDP. 20 shows an ultrasonic wave oscillator for vibrating the inner space of the vacuum stone plate 10.

Further, reference numeral 30 denotes an X axis robot installed on the vacuum stone platform 10 to move in the X axis direction, and reference numeral 40 is installed on the X axis robot 30 in the vertical direction. And a Y axis robot for moving in the Y direction, and a reference numeral 50 is installed in the vertical direction to the Y axis robot 40 to move in the Z axis direction. Reference numeral 52 is an attachment plate attached to the Z-axis robot 50 is a Z-axis attachment plate.

Reference numeral 60 installed on the Z-axis attachment plate 52 shows an ultrasonic vibration tip for grinding the adherent foreign matter or fine particles attached to the glass 15 by ultrasonic vibration, and reference numeral 70 denotes the glass 15. ) Shows a microscope camera for detecting the adherent foreign matter or fine particles attached to, and the reference numeral 80 denotes a gap sensor (gap) for adjusting the vertical height according to the height of the adherent foreign matter or fine particles detected by the microscope camera 70. and a reference numeral 85 denotes a control unit (Micro Controller) for controlling the ultrasonic wave oscillation unit 20 and the operating unit, respectively, and may be configured inside or outside the device.

Next, reference numeral 90 denotes a dry cleaner for cleaning the glass 15 in a semiconductor process, reference numeral 92 denotes a dry cleaner head corresponding to all of the dry cleaners, and reference numeral 95 denotes a vacuum stone plate. A conveyor for conveying 20 is shown, and reference numeral 100 denotes a sticking foreign matter removing apparatus of the glass surface in this configuration, respectively.

First, with reference to Figure 1 will be described the configuration and operation of the adhesion of the foreign matter removing apparatus 100 of the glass surface according to an embodiment of the present invention.

The apparatus 100 for removing adherent foreign matter on the glass surface according to the present invention is mounted on a vacuum stone panel 10 for vacuum adsorption of the glass 15 to be moved and inspected.

Here, the X-axis robot 30 and the Y-axis robot 40 is moved on the vacuum stone plate 10, the Z-axis robot 50 is installed in the vertical direction to the Y-axis robot 40 ) Is moved to a position where a fixed foreign matter or fine particles (not shown) are detected through the microscope camera 70 connected through the Z-axis attachment plate 52.

The ultrasonic vibration tip (Tip) 60 installed on the Z-axis attachment plate 52 attached to the Z-axis robot 50 moves to the position where the adherent foreign matter or the fine particles are present, and then from the ultrasonic oscillator 20 By repeatedly applying a shock to the adherent foreign matter or fine particles using the generated ultrasonic vibration, the operation to dismantle, decompose and remove the adherent foreign matter is performed.

2 to 3 it can be seen in more detail the detailed configuration of the apparatus 100 for removing the adherent foreign matter on the glass surface according to an embodiment of the present invention.

That is, the Z-axis attachment plate 52 attached to the Z-axis robot 50 is provided with a microscope camera 70 for detecting the adherent foreign matter and fine particles, it can be detected by the engineer or electronic method. .

The Z-axis attachment plate 52 may be attached to the Z-axis attachment plate 52 attached to the Z-axis robot 50 in accordance with the size or height of the adherent foreign matter and the fine particles detected by the microscope camera 70. A gap sensor 80 for moving in the vertical direction is provided.

In addition, the Z-axis attachment plate 52 attached to the Z-axis robot 50 has a height through the gap sensor 80 for sticking foreign matter or fine particles detected by the microscope camera 70. When it is adjusted to the ultrasonic vibration tip (Tip) (60) for crushing and removing it for ultrasonic vibration is installed. Of course, the ultrasonic vibration generated at this time is provided from the ultrasonic oscillation unit 20, but may also be applied to the vacuum separately from the outside to remove the adherent foreign matter or fine particles.

Of course, the operation of the X-axis robot 30, the Y-axis robot 40, the Z-axis robot 50, the ultrasonic wave oscillator 20 and the ultrasonic vibration tip 60 and the like described above is installed separately Controlled by (85), the operation thereof will not be described separately.

If the removal process of the foreign matter or fine particles are arranged in sequence as follows.

First, if it detects the detection of foreign matter or fine particles through the inspection of the microscope camera 70,

Secondly, the moving glass 15 is fixed on the vacuum stone plate 10 with a vacuum.

Third, the controller 80 transfers the X-axis robot 30, the Y-axis robot 40, and the Z-axis robot 50 so as to approach the position of the detected foreign matter or fine particles.

Fourth, after confirming the coordinates of the foreign matter in the approached position to operate the gap sensor 80 to adjust the height.

Fifth, by vibrating the ultrasonic vibration tip 60 by the size of the detected foreign matter (size) to move and remove the shape of the foreign material at the same time as the vibration.

Sixth, the operation is then passed through a dry cleaner (90).

Next, with reference to Figure 4 will be described in detail the operation of the apparatus 100 for removing the adherent foreign matter on the glass surface according to an embodiment of the present invention.

As shown in FIG. 4, when the adherent foreign matter or fine particles pulverized and removed by the above-described configuration and operation enter the dry cleaner 90 for the cleaning process, they move through the conveyor 95. do.

At this time, when the vacuum stone panel 10 equipped with the glass 15 enters the whole (FRONT PART) of the dry cleaner 90, the adherent foreign matter or fine particles that are crushed and remain as the cleaning air is discharged. The inhalation process is repeated. Accordingly, the adherent foreign matter or the fine particles present on the glass 15 surface is sucked and completely removed from the glass surface.

 Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention described in the claims below. Can be understood.

10: vacuum stone tablet 15: glass
20: ultrasonic oscillator 30: X-axis robot
40: Y axis robot 50: Z axis robot
52: Z-axis attachment plate 60: ultrasonic vibration tip
70: microscope camera 80: gap sensor
85: Micro Controller 90: Dry Cleaner
92: dry cleaner head 95: conveyor
100: adhesion foreign matter removal device on the glass surface

Claims (2)

In the sticking of foreign matter on the glass surface to remove the foreign matter attached to the glass that is mounted on the stone panel and cleaned inside the dry cleaner,
A vacuum (Vacuum) stone panel 10 for stably adsorbing glass and mounting the glass;
An ultrasonic oscillation unit 20 installed inside the stone panel 10 to oscillate by ultrasonic oscillation;
An X-axis robot (30) installed on the stone platform to move in the X-axis direction;
A Y-axis robot 40 installed in the vertical direction to the X-axis robot 30 and moving in the Y-axis direction;
A Z-axis robot 50 installed in the vertical direction on the Y-axis robot 40 to move in the Z-axis direction;
An ultrasonic vibration tip (60) attached to the plate via a Z-axis attachment plate (52) fixed to the Z-axis robot (50);
A microscope camera 70 attached to the Z-axis attachment plate 52 to detect adherent foreign matter and fine particles;
A gap sensor (80) attached to the Z-axis attachment plate (52) to move up and down by sensing the height of the adherent foreign matter or fine particles attached to the glass (20); And
A control unit (Micro Controller) 85 for controlling the ultrasonic oscillation unit 20 and the operation unit;
Apparatus for removing adherent foreign matter on the surface of the glass, characterized in that the integrally provided with. According to claim 1, The control unit 85, The ultrasonic oscillation unit 20, the X-axis robot 30, the Y-axis robot 40, the Z-axis robot 50 and the ultrasonic vibration tip (Tip) 60 and the microscope camera 70 and the adherent foreign matter removal device 100 of the glass surface, characterized in that for controlling the operation of the microscope camera (70).
KR1020100103235A 2010-10-22 2010-10-22 Sticking debris removal device of glass surface KR20120041864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100103235A KR20120041864A (en) 2010-10-22 2010-10-22 Sticking debris removal device of glass surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100103235A KR20120041864A (en) 2010-10-22 2010-10-22 Sticking debris removal device of glass surface

Publications (1)

Publication Number Publication Date
KR20120041864A true KR20120041864A (en) 2012-05-03

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Application Number Title Priority Date Filing Date
KR1020100103235A KR20120041864A (en) 2010-10-22 2010-10-22 Sticking debris removal device of glass surface

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI703098B (en) * 2015-04-22 2020-09-01 美商康寧公司 Glass manufacturing apparatus facilitating separation of a glass ribbon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI703098B (en) * 2015-04-22 2020-09-01 美商康寧公司 Glass manufacturing apparatus facilitating separation of a glass ribbon

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