JP2000354816A - Method and apparatus for applying liquid material die bonding device using the apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method which can detect/set up the position of the application nozzle of a syringe in the mutually perpendicular X, Y, Z directions during the application of a liquid material easily and exactly without being affected manually and prevent the periphery from being fouled by the unnecessary liquid material around an application nozzle, an apparatus for the method, and a die bonding device using the apparatus. SOLUTION: A die bonding device 20 for applying an adhesive at prescribed positions has an application nozzle 25, a syringe 24 for supporting the adhesive in its inside, an orthogonal three-axes driving robot 26 for moving the syringe 24 in the mutually perpendicular X, Y, Z directions, and a position detecting means 34 for detecting the position of the tip of the nozzle 25 in the X, Y, Z directions.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid material applying apparatus and a liquid material applying method used for, for example, a die bonding apparatus for bonding a semiconductor element to a central position on a lead frame, and a die bonding apparatus using the same. Things.

[0002]

2. Description of the Related Art As a conventional liquid material application apparatus, for example, there is one as shown in FIG. The liquid material application device shown in FIG. 1 has an application nozzle 4 at the tip end, and a syringe 2 for holding a liquid material 3 inside is connected to a dispenser 1 and a hose 5. In such a dispensing type liquid material application device, after an operator holds the syringe 2 and brings the tip of the application nozzle 4 close to a predetermined liquid material application position, a certain amount of air is supplied from the dispenser 1 into the syringe 2. By being supplied, a fixed amount of the liquid material 3 is discharged from the application nozzle 4.

As a second conventional liquid material coating apparatus, there is one disclosed in Japanese Patent Application Laid-Open No. Hei 6-177184. As shown in FIG. 5, the second conventional liquid material application apparatus is affected by human influence by providing a detection means 12 having a table 10 for detecting the contact of the tip of the application nozzle 8 of the syringe 6. It is an object of the present invention to easily and accurately set the height of the tip of the application nozzle 8 during paste application, that is, an appropriate gap between the tip of the application nozzle 8 and a component to be applied.

Further, as a third conventional liquid material applying apparatus, there is one disclosed in Japanese Patent Application Laid-Open No. H8-24768. As shown in FIG. 6, the third conventional liquid material application apparatus discharges unnecessary adhesive 18 around the nozzle 13 by discharging compressed air from a blow pipe 15 to a drain box 17.
The purpose is to remove unnecessary adhesive 18 from the periphery of the nozzle 13 by blowing it inside, and to maintain the amount of application to the adhesive application position with high accuracy.

[0005]

However, in the first conventional liquid material coating apparatus, since the coating operation must be manually performed by an operator, the coating operation cannot be automated, and the influence of human operation is reduced. Due to this, there is a problem that the application amount of the liquid material to the application position cannot be maintained with high accuracy.

In the second conventional liquid material coating apparatus, the height of the tip of the application nozzle 8 can be easily and accurately adjusted by bringing the tip into contact with the upper surface of the table 10 of the detecting means 12. The position setting in the two horizontal directions (X, Y directions) perpendicular to each other must be visually confirmed by the operator. Therefore, the position setting in the X, Y directions of the application nozzle 8 depends on the skill of the operator. Error occurs. Further, since the tip of the application nozzle 8 is brought into contact with the table 10 of the detecting means 12, a mechanism for preventing the syringe 6 and the application nozzle 8 from being damaged due to the contact between the application nozzle 8 and the table 10 is required.

Further, in the third conventional liquid material applying apparatus, a blow pipe 15 for blowing compressed air is used.
And a drain box 17 for receiving the blown adhesive 18, but since the direction in which the compressed air escapes is not controlled, the mist of the blown adhesive 18 contaminates the members around the application nozzle. There was a problem that there was a possibility.

In view of the above problems, the present invention makes it possible to easily and accurately set the positions of the application nozzles of a syringe in the X, Y, and Z directions perpendicular to each other at the time of applying a liquid material, without being affected by human influence. A liquid material applying apparatus, a liquid material applying method, and a die bonding apparatus using the same, which can be detected and set, and can prevent unnecessary liquid material around the application nozzle from contaminating surrounding members. It is an object to provide

[0009]

In order to solve the above-mentioned problems, a liquid material applying apparatus, a liquid material applying method, and a die bonding apparatus using the same according to the present invention are configured as follows.

(1) A liquid material application device for applying a liquid material to a predetermined position, comprising a coating nozzle, which holds the liquid material inside, and X, Y, Z orthogonal to each other. A liquid material applying apparatus comprising: moving means for moving in the axial direction; and position detecting means for detecting a position of the tip of the application nozzle in the X, Y, and Z axis directions.

(2) The liquid material applying apparatus according to the above (1), further comprising a cleaning means for cleaning unnecessary liquid material around the tip of the applying nozzle.

(3) A liquid material application device for applying a liquid material to a predetermined position, comprising: a syringe for holding the liquid material therein; and X, Y, Z orthogonal to the syringe. The position detecting means detects the position by using a liquid material applying apparatus including a moving means moving in the axial direction and a position detecting means detecting the position of the tip of the application nozzle in the X, Y, and Z axis directions. The moving means moves the syringe by a necessary distance in the X, Y, and Z axis directions based on the position of the tip of the coating nozzle in the X, Y, and Z axis directions. Liquid material application method.

(4) In the liquid material applying method having the constitution (3), the liquid material applying apparatus has a cleaning means for cleaning unnecessary liquid material around the tip of the applying nozzle, and the cleaning means is provided with the applying nozzle. A liquid material applying method, characterized in that unnecessary liquid material around the front end of the liquid material is cleaned.

(5) A liquid material application device for applying a liquid material to a predetermined position, comprising a coating nozzle for holding the liquid material therein, and X, Y, and Z orthogonal to each other. A die bonding apparatus using a liquid material applying apparatus comprising: moving means for moving in the axial direction; and position detecting means for detecting the position of the tip of the application nozzle in the X, Y, and Z axis directions. .

(6) A liquid material application device for applying a liquid material to a predetermined position, comprising: a syringe having an application nozzle for holding the liquid material therein; and X, Y, and Z orthogonal to each other. The position detecting means detects the position by using a liquid material applying apparatus including a moving means moving in the axial direction and a position detecting means detecting the position of the tip of the application nozzle in the X, Y, and Z axis directions. A liquid material applying method in which the moving means moves the syringe by a required distance in the X, Y, and Z axis directions based on the position of the tip of the application nozzle in the X, Y, and Z axis directions. A die bonding apparatus characterized by using:

According to the liquid material applying apparatus and the liquid material applying method of the above constitutions (1) and (3), based on the position of the tip of the application nozzle in the X, Y and Z axis directions detected by the position detecting means. The moving means moves the syringe by a necessary distance in the X, Y, and Z axis directions.
It is possible to easily and accurately detect and set the positions of the application nozzles of the syringe in the X, Y, and Z directions orthogonal to each other during application of the liquid material without being affected by humans.

According to the liquid material applying apparatus and the liquid material applying method of the above constitutions (2) and (4), the cleaning means cleans the unnecessary liquid material around the tip end of the application nozzle. Unnecessary liquid material attached to the periphery can be prevented from flying and contaminating surrounding members.

Further, according to the die bonding apparatus of the above constitutions (5) and (6), the moving means is provided with the syringe based on the position in the X, Y and Z axis directions of the tip of the application nozzle detected by the position detecting means. Is moved by a necessary distance in the X, Y, and Z axis directions, so that the position of the application nozzle of the syringe in the X, Y, and Z directions orthogonal to each other at the time of applying the adhesive is artificially affected. And can be easily and accurately detected and set.

[0019]

Embodiments of the present invention will be specifically described below with reference to the drawings. 1 to 3
BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a diagram referred to for describing a first embodiment of a liquid material application device and a liquid material application method according to the present invention, and a die bonding device using the same.

FIG. 1 is a view showing a die bonding apparatus 20 according to a first embodiment of the present invention. In the figure, an orthogonal three-axis driving robot 26 (which can hold a syringe 24 on a base 22 of the die bonding apparatus 20 and move the syringe 24 in X, Y, and Z directions orthogonal to each other). Moving means) is provided.

The syringe 24 is an orthogonal three-axis drive robot 26
Is removably mounted on a mounting member 23 provided at the bottom.
A tube 30 is connected between the syringe 24 and the dispenser 28, and the dispenser 28 controls the discharge amount of the adhesive (liquid material) in the syringe 24.

In the movement range A of the application nozzle 25 of the syringe 24 on the base 22, an electronic component 32 such as a lead frame positioned is mounted on the orthogonal three-axis drive robot 2.
6 is arranged so as not to interfere with the origin position detecting operation of No. 6. Further, within the movement range A, a position detection unit 34 described below and a nozzle cleaning component 37 (cleaning unit) are arranged.

The nozzle cleaning component 37 controls the blowing and suction of the compressed air by a control unit 38 via a pneumatic control component (not shown). The position detecting means 34 is also controlled by the control unit 38 via the detector 40. The control unit 38 has a setting unit 42 and controls the whole of the die bonding apparatus 20 by controlling the orthogonal three-axis driving robot 26 and the dispenser 28.

As shown in FIG. 2, the position detecting means 34
Each of the photoelectric sensors 35 and 36 includes a light emitting component 35a, 36a for generating the optical axis L1, L2, and a light receiving component 35b, 36b for receiving the optical axis L1, L2. ing. Photoelectric sensor 3
5 and 36 are provided such that the respective optical axes L1 and L2 have the same height, and the respective optical axes L1 and L2 are orthogonal to each other.

As shown in FIG. 3, the nozzle cleaning part 37 is formed in a cylindrical shape having an axis in the vertical direction, and the application nozzle 25 of the syringe 24 is inserted down into the center of the canopy plate 39. A nozzle insertion hole 41 is formed.
A taper surface 41a is formed in the lower half of the nozzle insertion hole 41. A blow hole 39a for blowing out compressed air is formed in the taper surface 41a. A suction hole 39b for sucking air and discharging the air to the outside is formed. A plurality of blow holes 39a and a plurality of suction holes 39b are formed at intervals in the circumferential direction, but may be formed in a ring shape continuous in the circumferential direction.

In FIG. 2, the detection origin P1, the position of the optical axis L1 of the photoelectric sensor 35 in the X direction, the position of the optical axis L2 of the photoelectric sensor 36 in the Y direction, the X of the detection origin P1 and each of the optical axes L1, L2. , Y, the relative distance x, y in the Y direction, the relative distance z between the detection origin P1 and each of the optical axes L1, L2 in the Z direction, the blow start position P2 of the tip of the application nozzle 25 in the Z direction in FIG. 3, and FIG. The application start position P3 is stored in the setting unit 42 in advance.

The detection origin P1 is defined by the coating nozzle 25.
Is set at a position that is slightly lower than the optical axes L1 and L2 and does not interfere with the photoelectric sensors 35 and 36, and the blow start position P2 of the tip of the application nozzle 25 in the nozzle cleaning part 37 is also lower than the blow hole 39a. Is set to be

The operation of the die bonding apparatus 20 according to the present embodiment having such a configuration will be described below.

First, the application nozzle 25 of the syringe 24 is moved to the detection origin P1 by the orthogonal three-axis driving robot 26 as shown in FIG. Next, the application nozzle 25 is set to X
In the direction, the application nozzle 25 is moved to the photoelectric sensor 35.
When the light axis L1 is shielded, the light receiving component 35b detects this and outputs a light shield signal, and the control unit 38 controls the orthogonal three-axis driving robot 26 based on the light shield signal to light the application nozzle 25. The axis L1 is stopped at a position where light shielding is maintained.

At this time, the control unit 38 determines the moving amount x of the coating nozzle 25 from the detection origin P1 to the optical axis L1 in the X direction.
Is detected and stored, whereby the application nozzle 2
The moving amount x from the optical axis L1 in the X direction 5 to the detection origin P1 can be easily obtained. Next, the application nozzle 25 moves by the movement amount x in the X direction and returns to the detection origin P1,
Stop.

Next, when the application nozzle 25 is moved in the Y direction and the application nozzle 25 shields the optical axis L2 of the photoelectric sensor 36, the light receiving component 36b detects this and outputs a light shielding signal, and Reference numeral 38 controls the orthogonal three-axis driving robot 26 based on the light shielding signal to stop the application nozzle 25 at a position where light shielding of the optical axis L2 is maintained.

At this time, the control unit 38 determines the moving amount y of the coating nozzle 25 from the detection origin P1 to the optical axis L2 in the Y direction.
Is detected and stored, whereby the application nozzle 2
The moving amount y from the optical axis L2 in the Y direction 5 to the detection origin P1 can be easily obtained.

Next, the application nozzle 25 of the syringe 24 is raised in the Z direction by the orthogonal three-axis driving robot 26, and the tip of the application nozzle 25 passes above the optical axis L2 of the photoelectric sensor 36 to release the light shielding. The optical axis L2 is set to the light receiving component 36b.
Receives light. Then, the light receiving component 36b detects this and outputs a light receiving signal, and the control unit 38 controls the orthogonal three-axis driving robot 26 based on the light receiving signal to release the application nozzle 25 from the light shielding of the optical axis L2. Immediately after the stop, it is stopped at a position immediately above the optical axis L2.

At this time, the control unit 38 determines the moving amount z of the coating nozzle 25 from the detection origin P1 to the optical axis L2 in the Z direction.
Is detected and stored, whereby the application nozzle 2
The moving amount z from the optical axis L2 in the Z direction 5 to the detection origin P1 can be easily obtained.

In this way, the photoelectric sensors 35, 36
The distance x, y, z from the optical axis L1, L2 of the detection origin P1 detected by the above to the distance from the optical axis L1, L2 of the coating start position P3 shown in FIG. Calculate the relative distance. In this calculation, the diameter of the application nozzle 25 is also stored in the setting unit 42 in advance, and the calculation is performed including the diameter of the application nozzle 25 in advance.

Based on the calculation of the relative distance, the application nozzle 25 of the syringe 24 is
To the application start position P3. After that, the setting unit 4
The application nozzle 25 moves along the movement locus of the application nozzle 25 stored in
And the coating operation can be performed.

The application nozzle 25 is cleaned by the nozzle cleaning part 37.
When the unnecessary adhesive around the discharge port is cleaned, the application nozzle 25 is moved by the orthogonal three-axis drive robot 26 to the position of the nozzle insertion hole 40 of the nozzle cleaning component 37 stored in the setting unit 42 in advance. Then, the application nozzle 25 is lowered, and its tip is lowered to the blow start position P2 in FIG. 3 and stopped.

Next, the air in the nozzle cleaning part 37 is sucked through the suction hole 39b to make the inside of the nozzle cleaning part 37 negative pressure, and the compressed air is blown out from the blow hole 39a. By blowing out the compressed air from the blow holes 39a, the unnecessary adhesive around the discharge port of the application nozzle 25 can be blown off and removed.

At this time, the amount of air sucked from the suction holes 39b is determined so that the inside of the nozzle cleaning part 37 maintains a negative pressure.
The relationship of the amount of compressed air blown out from the blow holes 39a is adjusted in advance.

Next, while the suction operation by the suction hole 39b and the blowing operation from the blow hole 39a are continued, the application nozzle 25 is raised to a predetermined height in the Z direction by the orthogonal three-axis driving robot 26 and stopped. Then, by stopping the suction operation by the suction hole 39b and the blowing operation from the blow hole 39a, the cleaning of the unnecessary adhesive around the discharge port of the application nozzle 25 is completed.

The unnecessary adhesive blown off by blowing compressed air from the blow holes 39a is dropped into the nozzle cleaning part 37 whose periphery is closed. Can be prevented from being contaminated.

In the above embodiment, the case where a photoelectric sensor is used as the position detecting means has been described. However, as the position detecting means of the present invention, a proximity sensor,
Other types of sensors using changes in magnetism and capacitance, ultrasonic waves, and the like may be used.

In the above embodiment, the case where an adhesive is used as the liquid material has been described. However, the liquid material does not need to be limited to the adhesive, and any other material such as a lubricant or a cleaning agent may be used. It can also be applied to liquid materials.

In the above embodiment, the case where the liquid material application apparatus of the present invention is applied to a die bonding apparatus has been described, but the liquid material application apparatus of the present invention may be applied to other apparatuses.

Although the embodiments of the present invention have been specifically described above, the present invention is not limited to the above-described embodiments, and various other modifications may be made based on the technical concept of the present invention. Can be changed.

[0046]

As described above, according to the liquid material applying apparatus and the liquid material applying method according to the first and third aspects of the present invention, the X, Y, Z of the tip of the application nozzle detected by the position detecting means. The moving means moves the syringe by a necessary distance in the X, Y, and Z axis directions based on the position in the axial direction, so that X, Y, X, Y, The position in the Z direction can be easily and accurately detected and set without being affected by humans.

According to the liquid material applying apparatus and the liquid material applying method according to the second and fourth aspects of the present invention, the cleaning means cleans the unnecessary liquid material around the tip of the application nozzle. It is possible to prevent unnecessary liquid material attached around the application nozzle from flying and contaminating surrounding members.

Further, according to the die bonding apparatus according to the fifth and sixth aspects of the present invention, based on the position in the X, Y and Z axis directions of the tip of the coating nozzle detected by the position detecting means, the moving means can be used. Is moved by a necessary distance in the X, Y, and Z axis directions, so that the position of the application nozzle of the syringe in the X, Y, and Z directions orthogonal to each other at the time of applying the adhesive is artificially affected. And can be easily and accurately detected and set.

[Brief description of the drawings]

FIG. 1 is a perspective view of a die bonding apparatus according to a first embodiment of the present invention.

FIG. 2 is a detailed enlarged perspective view of a position detecting means of the die bonding apparatus of FIG.

FIG. 3 is a sectional view of the nozzle cleaning component of FIG. 1;

FIG. 4 is a configuration diagram of a conventional liquid material application device.

FIG. 5 is a configuration diagram of a second conventional liquid material application device.

6A and 6B are diagrams illustrating a main part of a third conventional liquid material application apparatus, in which FIG. 6A illustrates an unnecessary adhesive around a nozzle, and FIG. It is a figure showing signs that an unnecessary adhesive is removed.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Dispenser, 2, 6 ... Syringe, 3 ... Liquid material, 4, 8 ... Application nozzle, 5 ... Hose, 10 ... Table, 12 ... Detection means, 13 ... Nozzle, 15 ... Blow pipe, 17 ... Drainage box, 18 adhesive, 20 die bonding apparatus, 22 base, 24 syringe, 25 application nozzle, 26 orthogonal three-axis driving robot, 28 dispenser, 30 tube, 32 electronic components, 34 position detection Means, 35, 36 ... photoelectric sensor, 35a, 36a ...
Light emitting parts, 35b, 36b light receiving parts, 37 ... nozzle cleaning parts, 38 ... control unit, 39 ... canopy plate, 39a ... blow holes, 39b ... suction holes, 40 ... detectors, 41 ... nozzle insertion holes, 41a ... taper Surface, 42: setting section, P1: detection origin, P2: blow start position, P3: coating start position, L
1, L2 ... optical axis

Claims (6)

[Claims] 1. A liquid material application device for applying a liquid material to a predetermined position, comprising: a syringe having an application nozzle for holding the liquid material therein; and X, Y, and Z axes orthogonal to each other. A liquid material applying apparatus, comprising: moving means for moving in a direction; and position detecting means for detecting the position of the tip of the application nozzle in the X, Y, and Z axis directions. 2. The liquid material applying apparatus according to claim 1, further comprising a cleaning unit for cleaning an unnecessary liquid material around a tip portion of the application nozzle. 3. A liquid material application device for applying a liquid material to a predetermined position, comprising: a syringe having an application nozzle for holding the liquid material therein; and X, Y, and Z axes orthogonal to each other. Using a liquid material coating apparatus including: a moving unit that moves in a direction; and a position detecting unit that detects a position of the tip of the coating nozzle in the X, Y, and Z-axis directions. A liquid characterized in that the moving means moves the syringe by a necessary distance in the X, Y, Z-axis directions based on the position of the tip of a coating nozzle in the X, Y, Z-axis directions. Material application method. 4. A liquid material application device having cleaning means for cleaning unnecessary liquid material around the tip of the application nozzle, wherein the cleaning means cleans unnecessary liquid material around the tip of the application nozzle. The method for applying a liquid material according to claim 3, wherein: 5. A liquid material application device for applying a liquid material to a predetermined position, comprising: a syringe having an application nozzle for holding the liquid material therein; and X, Y, and Z axes orthogonal to each other. 1. A die bonding apparatus, comprising: a liquid material applying apparatus including: a moving unit that moves in a direction; and a position detecting unit that detects a position of the tip of the application nozzle in the X, Y, and Z axis directions. 6. A liquid material application device for applying a liquid material to a predetermined position, comprising: a syringe having an application nozzle for holding the liquid material therein; and X, Y, and Z axes orthogonal to each other. Using a liquid material coating apparatus including: a moving unit that moves in a direction; and a position detecting unit that detects a position of the tip of the coating nozzle in the X, Y, and Z-axis directions. A liquid material applying method is used in which the moving means moves the syringe by a necessary distance in the X, Y, Z axis directions based on the position of the tip of the application nozzle in the X, Y, Z axis directions. A die bonding device characterized by the fact that