KR20120018971A - Apparatus of discharging treating fluid - Google Patents

Abstract

PURPOSE: A treatment solution discharge device is provided to completely remove a minute liquid crystal remaining in a nozzle plane of a head. CONSTITUTION: A treatment solution discharge device comprises a base, a substrate support unit(100), a gantry(200) and a head cleaning unit. The substrate support unit is installed in the base. A substrate(S) is placed in the substrate support unit. The gantry is offered at the upper part of the movement route of the supporting substrate unit. The gantry is combined with a head(400) discharging the solution to the ink-jet method at the top of the substrate. The head cleaning unit is installed in the base. The head cleaning unit washes the nozzle plane of the head.

Description

Processing liquid discharge device {APPARATUS OF DISCHARGING TREATING FLUID}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing liquid ejecting apparatus, and more particularly, to an apparatus for ejecting a processing liquid onto a substrate by an inkjet method for ejecting droplets.

In recent years, liquid crystal displays have been widely used in display units of electronic devices such as mobile phones and portable computers. The liquid crystal display device comprises: a color filter substrate on which a black matrix, a color filter, a common electrode, and an alignment layer are formed; The liquid crystal is injected into a space between the thin film transistor (TFT), the pixel electrode, and the array substrate on which the alignment layer is formed, thereby obtaining an image effect by using a difference in refractive index of light due to the anisotropy of the liquid crystal.

An inkjet coating apparatus is used as an apparatus which apply | coats an alignment liquid or a liquid crystal on a color filter substrate and an array substrate. However, even after the liquid crystal is applied to the substrate and the liquid crystal remaining in the head is washed, there is a problem in that the fine liquid crystal remains in the head because the cleaning is not performed smoothly. For this reason, the problem that the film uniformity of the liquid crystal apply | coated to a board | substrate falls.

An object of the present invention is to provide a treatment liquid discharge device capable of efficiently removing the fine liquid crystal remaining on the nozzle face of the head.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a processing liquid discharge device according to an embodiment of the present invention is provided on a base and the base, a substrate support unit on which a substrate is placed, and an upper portion of a movement path of the substrate support unit. A head gantry (gentry) coupled to the heads for discharging the chemical liquid on the inkjet method and a head cleaning unit for cleaning the nozzle surface of the head, wherein the head cleaning unit includes a suction formed toward the head. A plurality of suction nozzles having holes are provided.

In addition, the suction nozzles may be arranged in the moving direction of the head.

In addition, the height of the end of the suction hole of the suction nozzle is characterized in that each different.

The apparatus may further include lifting members respectively coupled to the suction nozzles to adjust the height of each end of the suction holes of the suction nozzles.

The apparatus may further include pressure adjusting means coupled to each of the suction nozzles to independently adjust suction pressures of the suction holes of the suction nozzles.

In order to achieve the above object, the head cleaning unit according to the embodiment of the present invention is provided with a first suction nozzle and a second suction nozzle having a suction hole to suck the liquid crystal remaining on the nozzle surface of the head, the first suction The nozzle and the second suction nozzle are arranged in a line, and the height of the end of the suction hole of the first suction nozzle and the height of the end of the suction hole of the second suction nozzle are different from each other.

The apparatus may further include a first elevating member for adjusting the height of the suction hole of the first suction nozzle and a second elevating member for adjusting the height of the suction hole of the second suction nozzle, wherein the first elevating member and the second elevating member are provided. Independently controlled.

The apparatus may further include first pressure regulating means for adjusting the suction pressure of the suction hole of the first suction nozzle and second pressure regulating means for adjusting the suction pressure of the suction hole of the second suction nozzle, wherein the first pressure adjusting means and the first pressure adjusting means are provided. It is characterized in that the two pressure regulating means are independently controlled.

In order to achieve the above object, the head cleaning method of the treatment liquid discharge device according to the embodiment of the present invention sequentially sucks the liquid crystal remaining on the nozzle surface of the head with a plurality of suction nozzles provided with different distances from the head. It is characterized by washing.

Further, the liquid crystal is first sucked into the liquid crystal by the suction nozzle which is far from the head of the plurality of suction nozzles, and then the liquid crystal is sucked by the suction nozzle which is closest to the head of the plurality of suction nozzles.

In addition, the suction pressure is set differently between the plurality of suction nozzles.

According to the present invention, the fine liquid crystal remaining on the nozzle face of the head can be completely removed.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the inkjet system liquid crystal coating installation.
FIG. 2 is a perspective view of the liquid crystal discharge part of FIG. 1.
3 is a plan view of the liquid crystal discharge part of FIG. 1.
4 is a diagram illustrating the first driving unit of FIG. 3.
FIG. 5 is a diagram illustrating a second driving unit of FIG. 3.
6 is a view illustrating a process of linear movement and rotation of the gantry.
7 is a view showing the side of the head moving unit of FIGS. 2 and 3.
8 is a front view of the first mobile unit of FIG. 7.
9 shows a nozzle inspection unit.
10 is a view schematically showing a head cleaning unit.
11 is an enlarged cross-sectional view showing the main portion of the head cleaning unit.
12 is an enlarged cross-sectional view showing another embodiment of the head cleaning unit.
13 is an enlarged cross-sectional view showing yet another embodiment of the head cleaning unit.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention. The problem, the problem solving means, and effects to be solved by the present invention described above will be easily understood through embodiments related to the accompanying drawings. Each drawing is partly or exaggerated for clarity. In adding reference numerals to the components of each drawing, it should be noted that the same components are shown with the same reference numerals as much as possible, even if displayed on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Hereinafter, a facility for applying the treatment liquid to the object by an inkjet method of discharging droplets, and a method of applying the treatment liquid to the object using the same will be described.

For example, the object may be a color filter (CF) substrate or a thin film transistor (TFT) substrate of a liquid crystal display panel, and the treatment liquid may be a red (R) liquid pigment (Liquid Crystal), an alignment liquid, and a pigment particle mixed in a solvent. , Green (G) and blue (B) ink. Polyimide may be used as the alignment liquid.

The alignment liquid may be applied to the entire surface of the color filter (CF) substrate and the thin film transistor (TFT) substrate, and the liquid crystal may be applied to the entire surface of the color filter (CF) substrate or the thin film transistor (TFT) substrate. The ink may be applied to the inner region of the black matrix arranged in a grid pattern on the color filter CF substrate.

In the present embodiment, the equipment using the liquid crystal as the processing liquid is described as an example, but the technical idea of the present invention is not limited thereto.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the inkjet system liquid crystal coating installation. The liquid crystal coating equipment 1 of FIG. 1 is a facility for applying liquid crystal to a substrate by an inkjet method of discharging droplets.

The substrate may be a color filter (CF) substrate or a thin film transistor (TFT) substrate of the liquid crystal display panel, and the liquid crystal may be applied to the entire surface of the color filter (CF) substrate or the thin film transistor (TFT) substrate.

Referring to FIG. 1, the liquid crystal coating apparatus 1 may include a liquid crystal discharge unit 10, a substrate transfer unit 20, a loading unit 30, an unloading unit 40, a liquid crystal supply unit 50, and a main control unit 90. ). The liquid crystal discharge part 10 and the substrate transfer part 20 may be disposed in a line in the first direction I and may be adjacent to each other. The liquid crystal supply unit 50 and the main controller 90 are disposed at positions facing the substrate transfer unit 20 with the liquid crystal discharge unit 10 as the center. The liquid crystal supply unit 50 and the main controller 90 may be arranged in a second direction (II). The loading unit 30 and the unloading unit 40 are disposed at positions facing the liquid crystal discharge unit 10 with respect to the substrate transfer unit 20. The loading unit 30 and the unloading unit 40 may be arranged in a line in the second direction (II).

Here, the first direction (I) is an arrangement direction of the liquid crystal discharge unit 10 and the substrate transfer unit 20, the second direction (II) is a direction perpendicular to the first direction (I) on the horizontal plane, the third direction (III) is a direction perpendicular to the first direction I and the second direction II.

The substrate to which the liquid crystal is to be applied is loaded into the loading unit 30. The substrate transfer unit 20 transfers the substrate loaded into the loading unit 30 to the liquid crystal discharge unit 10. The liquid crystal discharge unit 10 receives liquid crystal from the liquid crystal supply unit 50, and discharges the liquid crystal onto the substrate by an inkjet method of discharging liquid droplets. When the liquid crystal discharge is completed, the substrate transfer unit 20 transfers the substrate from the liquid crystal discharge unit 10 to the unloading unit 40. The substrate coated with the liquid crystal is carried out from the unloading part 40. The main controller 90 controls the overall operations of the liquid crystal discharge unit 10, the substrate transfer unit 20, the loading unit 30, the unloading unit 40, and the liquid crystal supply unit 50.

2 is a perspective view of the liquid crystal discharge part of FIG. 1, and FIG. 3 is a plan view of the liquid crystal discharge part of FIG. 1. 2 and 3, the liquid crystal discharge unit 10 may include a base B, a substrate support unit 100, a gantry 200, a gantry moving unit 300, inkjet head units 400, and head movements. The unit 500, the liquid crystal supply unit 600, the individual head control unit 700, the liquid crystal discharge amount measuring unit 800, the nozzle inspection unit 900, and the head cleaning unit 1000 are included.

Hereinafter, each configuration of the liquid crystal discharge unit will be described in detail.

Base (B) may be provided in a rectangular parallelepiped shape having a constant thickness. The substrate support unit 100 is disposed on the upper surface of the base B. The substrate support unit 100 has a support plate 110 on which the substrate S is placed. The support plate 110 may be a rectangular plate. The rotation driving member 120 is connected to the lower surface of the support plate 110. The rotation drive member 120 may be a rotation motor. The rotation drive member 120 rotates the support plate 110 about a rotation center axis perpendicular to the support plate 100.

When the support plate 110 is rotated by the rotation driving member 120, the substrate S may be rotated by the rotation of the support plate 110. When the long side direction of the cell formed on the substrate to which the liquid crystal is to be applied faces the second direction (II), the rotation driving member 120 may rotate the substrate such that the long side direction of the cell faces the first direction (I).

The support plate 110 and the rotation driving member 120 may be linearly moved in the first direction I by the linear driving member 130. The linear drive member 130 includes a slider 132 and a guide member 134. The rotation drive member 120 is installed on the upper surface of the slider 132. The guide member 134 extends in the first direction (I) at the center of the upper surface of the base (B). The slider 132 may include a linear motor (not shown), and the slider 132 is linearly moved in the first direction I along the guide member 134 by the linear motor (not shown).

The gantry 200 is provided at the top of the path through which the support plate 110 is moved. The gantry 200 is spaced apart from the upper surface of the base B in the upward direction, and the gantry 200 is disposed such that the longitudinal direction thereof faces the second direction II. The inkjet head unit 400 is coupled to the gantry 200 by the head moving unit 500. The inkjet head unit 400 may be linearly moved in the longitudinal direction of the gantry, that is, the second direction II by the head moving unit 500, and may also be linearly moved in the third direction III.

The gantry moving unit 300 linearly moves the gantry 200 in the first direction (I), or moves the gantry 200 so that the longitudinal direction of the gantry 200 is inclined in the first direction (I). Can be rotated. By the rotation of the gantry 200, the nozzles (not shown) of the inkjet head unit 400 are aligned in a direction inclined in the first direction I.

As described below, the gantry moving unit 300 may rotate the other end of the gantry 200 using one end of the gantry 200 as the rotation center. Alternatively, the gantry moving unit 300 may be configured to rotate the gantry 200 using the center of the gantry 200 as the rotation center.

The gantry driving unit 300 includes a first driving unit 310 and a second driving unit 320. The second drive unit 320 is provided at one end of the gantry 200, which is a rotation center, and the first drive unit 310 is provided at the other end of the gantry 200.

4 is a diagram illustrating the first driving unit of FIG. 3. Referring to FIG. 4, the first drive unit 310 includes a slider 312, a first rotation support member 314, and a first linear drive member 318. A guide rail 210 is provided along the longitudinal direction of the gantry 200 at the lower end side of the other end of the gantry 200, and the slider 312 is guided by the guide rail 210 to linearly move. The first rotary support member 314 is coupled to the lower end of the slider 312. The first rotation support member 314 may be a bearing capable of relative rotation of the upper and lower portions. The first linear drive member 318 is coupled to the bottom surface of the first rotational support member 314. The first linear drive member 318 linearly moves the first rotary support member 314 in the first direction (I).

The first linear drive member 318 includes a guide rail 315 and a slider 317. The guide rail 315 has a longitudinal direction toward the first direction I and is disposed at the other edge portion of the upper surface of the base B with respect to the guide member 134 of the substrate support unit 100. The slider 317 is movably coupled to the guide rail 315. The first rotary support member 314 is coupled to the upper surface of the slider 317. The slider 317 may have a built-in linear motor (not shown). The slider 317 linearly moves in the first direction I along the guide rail 315 by the driving force of the linear motor (not shown).

FIG. 5 is a diagram illustrating a second driving unit of FIG. 3. Referring to FIG. 5, the second driving unit 320 linearly moves one end of the gantry 200 in the first direction I when the gantry 200 moves linearly, and the gantry 200 when the gantry 200 rotates. It operates as the center of rotation.

The second drive unit 320 includes a second rotational support member 324 and a second straight drive member 328. The connection member 322 is coupled to one bottom surface of the gantry 200, and the second rotation support member 324 is coupled to the bottom surface of the connection member 322. The second rotation support member 324 may be a bearing capable of relative rotation of the upper and lower parts. The second linear drive member 328 is coupled to the bottom surface of the second rotation support member 324. The second linear drive member 328 linearly moves the second rotary support member 324 in the first direction (I). By linear movement of the second rotation support member 324, one end of the connection member 322 and the gantry 200 sequentially coupled to the upper portion is linearly moved.

The second straight drive member 328 includes a guide rail 325 and a slider 327. The guide rail 325 has a longitudinal direction toward the first direction (I) and is disposed on one side edge portion of the upper surface of the base B with respect to the guide member 134 of the substrate support unit 100. The slider 327 is movably coupled to the guide rail 325. The second rotating support member 324 is coupled to the upper surface of the slider 327. The slider 327 may have a built-in linear motor (not shown). The slider 327 linearly moves in the first direction I along the guide rail 325 by the driving force of the linear motor (not shown).

6 is a view illustrating a process of rotating and linearly moving the gantry. 3 and 6 omit the liquid crystal supply unit for convenience of drawing.

 4, 5, and 6, the gantry 200 is rotated by the first driving unit 310 and the second driving unit 320 to face a direction inclined in the first direction I. , May be linearly moved in the first direction (I).

In a state in which the second linear drive member 328 of the second drive unit 320 is fixed, the gantry when the first linear drive member 318 of the first drive unit 310 moves linearly in the first direction (I). 200 is rotated. This will be described in detail below.

First, the slider 317 of the first linear drive member 318 moves in the first direction I along the guide rail 315 by the driving force of the linear motor (not shown). At this time, one end of the gantry 200 is rotated by the second rotation support member 324 in a state in which there is no movement in the first direction I because the second linear driving member 328 is not driven.

As the slider 317 of the first linear drive member 318 moves in the first direction (I), the first rotary support member 314 disposed thereon moves in the first direction along the guide rail 315. Go straight to I). At the same time, the slider 312 coupled to the upper end of the first rotary support member 314 is rotated by the relative rotation between the top and the bottom of the first rotary support member 314, while the guide rail 210 provided in the gantry 200. Move to the lower side of the gantry 200 along. As a result, the gantry 200 rotates around the support position of the second drive unit 320, and the support position of the gantry 200 of the first drive unit 310 is moved to the outside of the other end. Through this operation, the gantry 200 may be rotated in a direction inclined in the first direction (I), whereby the inkjet head unit 400 is aligned in a direction inclined in the first direction (I).

As such, when the inkjet head unit 400 is aligned in the direction inclined in the first direction I, the liquid crystal discharge pitch may be flexibly adjusted in response to the pixel pitch change of the substrate S to which the liquid crystal is applied. Through this, the film uniformity of the liquid crystal applied to the substrate can be increased.

The gantry 200 may be rotated by the above method, and the slider 317 of the first linear drive member 318 and the slider of the second linear drive member 328 may be rotated in the gantry 200. 327 may additionally linearly move in the first direction (I). One end of the gantry 200 is linearly moved in the first direction I by the slider 327 of the second linear drive member 328, and the other end of the gantry 200 is the first linear drive member 318. The linear movement of the slider 317 in the first direction (I) is possible.

When the gantry 200 is fixed and the substrate moves in the first direction I, since the substrate needs to be moved from one side of the gantry 200 to the other side, the footprint of the facility may be increased. However, in the present invention, since the gantry 200 can be linearly moved in the first direction (I) in a state where the substrate is fixed or along with the linear movement of the substrate, the footprint of the equipment can be reduced.

The head moving unit 500 may be provided to the inkjet head unit 400, respectively. In the present embodiment, since three inkjet head units 400a, 400b, and 400c are provided by way of example, three head moving units 500 may also be provided to correspond to the number of heads. Alternatively, one head moving unit 500 may be provided, and in this case, the inkjet head unit 400 may be moved integrally instead of individually moving.

FIG. 7 is a side view of the head moving unit of FIGS. 2 and 3, and FIG. 8 is a front view of the first moving unit of FIG. 7.

7 to 8, the head moving unit 500 includes a first moving unit 520 and a second moving unit 540. The first moving unit 520 linearly moves the inkjet head unit 400a in the longitudinal direction of the gantry, that is, the second direction II, and the second moving unit 540 moves the inkjet head unit 400a in the third direction. It moves linearly to (III).

The first moving unit 520 includes guide rails 522a and 522b, sliders 524a and 524b, and a moving plate 526. The guide rails 522a and 522b extend in the second direction II and may be spaced apart in the third direction III on the front surface of the gantry 200. Sliders 524a and 524b are movably coupled to the guide rails 522a and 522b, and a linear driver, for example, a linear motor (not shown) may be built in the sliders 524a and 524b. The moving plate 526 is coupled to the sliders 524a and 524b. The upper region of the moving plate 526 is coupled to the slider 524a located above, and the lower region of the moving plate 526 is coupled to the slider 524b located below. As illustrated in FIG. 8, the moving plate 526 linearly moves in the second direction II along the guide rails 522a and 522b by a driving force of a linear motor (not shown). As such, as the inkjet head units 400a, 400b and 400c are individually moved along the second direction II, the distance between the inkjet head units 400a, 400b and 400c may be adjusted.

The second moving unit 540 includes a guide member 542, a slider 544, a detector 546, and a controller 548. The guide member 542 is coupled to the moving plate 526 of the first moving unit 520 and guides the linear movement of the slider 544 in the third direction (III). The slider 544 is coupled to the guide member 542 to be linearly movable, and the slider 544 may include a linear driver, for example, a linear motor (not shown). The inkjet head unit 400a is coupled to the slider 544 and is moved in the third direction III by linear movement of the slider 544 in the third direction III.

The detector 546 may be installed in the gantry 200, and detects a gap between the inkjet head unit 400a and the substrate S. The detector 546 may be a vision camera and is used for the purpose of positioning and checking the state of glass printing. The controller 548 generates a control signal corresponding to the detection signal of the detector 546 and transmits a control signal to the linear motor included in the slider 544 to control the driving of the linear motor. If it is determined that the distance between the inkjet head unit 400a and the substrate S is out of a predetermined reference value according to the detection result of the detector 546, the controller 548 controls the driving of the linear motor (not shown) to control the inkjet. The distance between the head unit 400a and the substrate S is adjusted.

The inkjet head unit 400 discharges liquid crystal droplets onto the substrate. The inkjet head unit 400 may be provided in plurality. In the present embodiment, an example in which three inkjet head units 400a, 400b, and 400c are provided will be described, but the present invention is not limited thereto. The inkjet head units 400 may be arranged side by side in a second direction (II) and coupled to the gantry 200.

The bottom of the inkjet head unit 400 is provided with a plurality of nozzles (not shown) for discharging liquid crystal droplets. For example, each head may be provided with 128 or 256 nozzles (not shown). The nozzles (not shown) may be arranged in a row at intervals of a predetermined pitch. The nozzles (not shown) may discharge the liquid crystal in an amount of μg.

In the case of the point dotting method using a conventional syringe, since the discharge pitch of the liquid crystal is large and the amount of the liquid crystal discharged is in mg unit, the liquid crystal does not spread evenly on the substrate due to the viscous flow resistance of the liquid crystal. There was a problem. However, in the present invention, since the liquid crystal is discharged in μg units through a plurality of nozzles (not shown) having a narrow pitch interval, the liquid crystal may be more evenly applied onto the substrate despite the viscous flow resistance of the liquid crystal.

Each inkjet head unit 400 may be provided with a number of piezoelectric elements corresponding to nozzles (not shown), and the droplet discharge amount of the nozzles (not shown) may be used to control the voltage applied to the piezoelectric elements. Can be adjusted independently.

The liquid crystal supply unit 600 includes a liquid crystal supply module 620 and a pressure regulation module 640. The liquid crystal supply module 620 and the pressure regulation module 640 may be coupled to the gantry 200. The liquid crystal supply module 620 receives the liquid crystal from the liquid crystal supply unit (reference numeral 50 of FIG. 1), and supplies the liquid crystal to the individual heads 410, 420, and 430. The pressure regulation module 640 adjusts the pressure of the liquid crystal supply module 620 by providing a positive pressure or a negative pressure to the liquid crystal supply module 620.

The head control unit 700 controls liquid crystal ejection of each of the heads 410, 420, and 430. The head control unit 700 may be disposed in the liquid crystal discharge unit 10 adjacent to the heads 410, 420, and 430. For example, the head control unit 700 may be disposed at one end of the gantry 200. In the present exemplary embodiment, the case in which the head control unit 700 is disposed at one end of the gantry 200 is described as an example, but the position of the head control unit 700 is not limited thereto.

Although not shown, the head control unit 700 is electrically connected to the respective heads 410, 420, 430 and applies a control signal to the respective heads 410, 420, 430. Each of the heads 410, 420, and 430 may be provided with a number of piezoelectric elements (not shown) corresponding to the nozzles (not shown), and the head control unit 700 controls the voltages applied to the piezoelectric elements to control the nozzles. It is possible to adjust the discharge amount of the droplet (not shown).

The liquid crystal discharge amount measuring unit 800 measures the liquid crystal discharge amount of the individual heads 410, 420, and 430. Specifically, the liquid crystal discharge amount measuring unit 800 measures the liquid crystal amount discharged from all nozzles (not shown) for each of the individual heads 410, 420, and 430. By measuring the liquid crystal discharge amount of the individual heads 410, 420, 430, the presence or absence of abnormalities of nozzles (not shown) of the individual heads 410, 420, 430 may be confirmed. That is, when the liquid crystal discharge amounts of the individual heads 410, 420, 430 deviate from the reference value, it can be seen that at least one of the nozzles (not shown) is abnormal. It may be disposed on one side of the (100). The liquid crystal discharge amount measuring unit 800 may have first to third liquid crystal discharge amount measuring units 800a, 800, and 800c.

The nozzle inspection unit 900 checks the abnormality of the individual nozzles provided to the heads 410, 420, and 430 through optical inspection. When it is determined that there is an abnormality in the unspecified nozzle, when the liquid crystal discharge amount measuring unit 800 confirms whether there is an abnormality in the macroscopic nozzle, the nozzle inspection unit 900 checks the entirety of the nozzles while confirming the abnormality of the individual nozzles. You can proceed.

The nozzle inspection unit 900 may be disposed on one side of the substrate support unit 100 on the base B. The heads 410, 420, 430 may be moved in the first direction (I) and the second direction (II) by the gantry moving unit 300 and the head moving unit 500 to be positioned above the nozzle inspection unit 900. . The head moving unit 500 may move the heads 410, 420, 430 in the third direction III to adjust the vertical distance between the heads 410, 420, 430 and the nozzle inspection unit 900.

9 is a view showing a nozzle inspection unit.

Referring to FIG. 9, the nozzle inspection unit 900 may include a first nozzle inspection member 920, a first driving member 940, a second nozzle inspection member 960, and a second driving member 980 and a recovery member. 990. The first nozzle inspecting member 920 inspects whether the nozzles of the heads 410, 420, and 430 eject liquid crystals, that is, whether the nozzles are clogged. The first drive member 940 moves the first nozzle inspection member 920 in the alignment direction of the nozzles. The second nozzle inspecting member 960 inspects whether the nozzles are aligned. The second drive member 980 moves the second nozzle inspection member 960 in the alignment direction of the nozzles. In FIG. 9, the nozzles are aligned in the second direction II.

The first nozzle inspecting member 920 includes a bath 922, a light emitting unit 924, and a light receiving unit 926. The bath 922 is provided in a cylindrical shape having an open top and accommodates liquid crystals that are discharged from the nozzles (not shown) of the heads 410, 420, and 430 and drop. The light emitting unit 924 is disposed at one upper side of the bath 922, and the light receiving unit 926 is disposed to face the light emitting unit 924 at the other upper side of the bath 922. The light emitter 924 emits an optical signal, and the light receiver 926 receives the light signal emitted by the light emitter 924. The liquid crystal discharged from the nozzles (not shown) of the heads 410, 420, and 430 passes through the region between the light emitting unit 924 and the light receiving unit 926, and it is determined whether the liquid crystal falls due to the difference in the amount of light received by the light receiving unit 926. Can be detected. If it is determined that the liquid crystal falls normally, it can be seen that there is no clogging of nozzles (not shown) of the heads 410, 420, and 430.

The first drive member 940 includes a guide member 942, a slider 944, and a driver 946. The guide member 942 extends in the second direction (II) on the upper surface of the base (B). Slider 944 may have a built-in driver 946, such as a linear motor. The slider 944 is driven by the driver 946 and linearly moved in the second direction II along the guide member 942. The bath 922 is disposed in the slider 944, and the bath 922 is linearly moved in the second direction (II) by the linear movement of the slider 944 in the second direction (II).

The second nozzle inspection member 960 includes a frame 962, an illuminator 964, and an imager 966. The frame 962 may be disposed adjacent to the bath 922 of the first nozzle inspection member 920 along the second direction II. In the frame 962, an illuminator 964 and a camera 966 are disposed. The illuminator 964 irradiates light onto the nozzle faces of the inspected heads 410, 420 and 430, and the imager 966 captures the nozzle faces of the heads 410, 420 and 430 to which the illuminator 964 is irradiated to obtain images of the nozzles. . From the acquired image, it is determined whether the nozzles are aligned in position.

The second drive member 980 includes a slider 984 and a driver 986. Slider 984 may have a built-in driver 986, such as a linear motor. The slider 984 is driven by the driver 986 and is linearly moved in the second direction II along the guide member 942. The frame 962 of the second nozzle inspection member 960 is disposed on the slider 984, and the frame 962, the illuminator 964, and the camera 966 are moved by the linear movement of the slider 984 in the second direction (II). ) Is linearly moved in the second direction (II).

The recovery member 990 recovers the liquid crystal discharged from the bath 922. The recovery member 990 includes a housing 992 and a recovery container 994. The housing 992 is disposed under the bath 922 and provides a space for receiving the recovery container 994. The recovery container 994 is moved to the space of the housing 992 by a sliding method, separated and inserted, and recovers the liquid crystal discharged from the bath 922. The recovered liquid crystal can be recycled.

10 is a view schematically showing a head cleaning unit.

11 is an enlarged cross-sectional view showing the main portion of the head cleaning unit.

12 is an enlarged cross-sectional view showing another embodiment of the head cleaning unit.

13 is an enlarged cross-sectional view showing yet another embodiment of the head cleaning unit.

10 and 11, the head cleaning unit 1000 performs a purging process and a suction process. Purging is a process of spraying a part of the liquid crystal contained in the heads 410, 420, and 430 at high pressure. The suction process is a process of sucking and removing liquid crystal remaining on the nozzle faces of the heads 410, 420, and 430 after a purging process.

The head cleaning unit 1000 may be coupled to an outer wall of the bath 922, and sucks liquid crystal remaining on the nozzle surfaces of the heads 410, 420, and 430 to enter the bath 922. The head cleaning unit 1000 and the first nozzle inspection member 940 of the nozzle inspection unit 900 may use one bath 922 in common or separately. The bath 922 may accommodate the liquid crystal discharged during the purging process of the heads 410, 420, and 430, and may also accommodate the liquid crystal discharged during the inspection of whether the nozzles of the heads 410, 420, 430 are discharged. have.

The head cleaning unit 1000 includes a suction nozzle 1100, a support member 1200, a lifting member 1300, and a pressure adjusting means 1400. The support member 1200 supports the lifting member and the pressure regulating means.

A plurality of suction nozzles 1100 are provided along the moving direction of the heads 410, 420, and 430. The suction nozzle 1100 is provided with suction lines 1112 and 1122 for sucking the chemical liquid remaining on the nozzle surfaces of the heads 410, 420, and 430 at the center and suction holes 1114 formed toward the nozzle surfaces of the head formed at the ends of the suction lines. 1124). The plurality of suction nozzles 1100 are provided spaced apart from the nozzle faces of the heads 410, 420, and 430. When cleaning the nozzle surface of the head, it is possible to provide different spacing between the plurality of suction nozzles 1100 and the nozzle surfaces of the heads 410, 420, and 430. That is, the heights of the end portions of the suction holes 1114 and 1124 of the plurality of suction nozzles 1100 may be differently provided.

The first suction nozzle disposed among the plurality of suction nozzles 1110 and 1120 based on the moving direction of the heads 410, 420, and 430 is called a first suction nozzle 1110, and the next suction nozzle is disposed as a second suction nozzle 1120. Assume that As shown in FIG. 10, the gap GAP1 between the first suction nozzle 1110 and the nozzle surfaces of the heads 410, 420, 430 is the gap GAP2 between the second suction nozzle 1120 and the nozzle surfaces of the heads 410, 420, 430. A plurality of suction nozzles 1110 and 1120 are arranged to be larger. This removes the fine liquid crystal remaining by the second suction nozzle moving along the first suction nozzle even though the liquid crystal remaining on the nozzle surface of the head removed first as the first suction nozzle moves along the moving direction of the head remains fine. To do this. That is, by arranging the plurality of suction nozzles 1110, 1120, 1130 such that the interval between the plurality of suction nozzles 1110, 1120, 1130 and the nozzle surfaces of the heads 410, 420, 430 gradually decreases, Even if the size of the liquid crystals gradually decreased, the liquid crystals could be efficiently removed.

The elevating member 1300 linearly moves the first and second suction nozzles 1110 and 1120 in the vertical direction. The lifting member 1300 adjusts the heights of the suction holes 1114 and 1124 of the first and second suction nozzles 1110 and 1120. That is, when the nozzle surfaces of the heads 410, 420, 430 are cleaned, the suction nozzles 1110, 1120 are relative to the nozzle surfaces of the heads 410, 420, 430 as the first and second suction nozzles 1110, 1120 are moved up and down. The height is changed.

The elevating member 1300 includes a moving shaft 1154 and a driver 1156. The lifting member 1300 is fixedly coupled to the movement shaft 1154 which is moved up and down by the driver 1156 on the outer walls of the first and second suction nozzles 1110 and 1120, respectively. The elevating member 1300 is coupled to the first and second suction nozzles 1110 and 1120 so that their respective heights can be independently adjusted.

Although the heights of the end portions of the suction holes 1114 and 1124 of the first and second suction nozzles 1110 and 1120 may be fixed, the first and second suction nozzles 1110 and 1120 may be fixed. The lifting member 1300 is coupled to the suction nozzle so that the heights of the end portions of the first and second suction nozzles 1110 and 1120 are adjusted.

The pressure adjusting means 1170 changes the suction pressure of the suction holes 1114 and 1124 of the plurality of suction nozzles 1100. The pressure adjusting means 1400 is coupled to the plurality of suction nozzles 1100, respectively, to adjust suction pressures of the suction holes 1114 and 1124, respectively. By measuring the remaining amount of the liquid crystal remaining on the nozzle surface of the head (410, 420, 430) by setting different pressure values to correspond to the change in the remaining amount of the liquid crystal to adjust the pressure of each suction nozzle (1110, 1120) differently. According to an embodiment, the first suction nozzle 1110 having a large distance between the nozzle face of the head 410, 420, 430 and the suction nozzle to remove the liquid crystal having a relatively large size of the liquid crystal remaining on the nozzle face of the head 410, 420, 430. ), A large suction pressure value is set, and a second suction nozzle having a small gap between the nozzle surfaces of the heads 410, 420, 430 and the suction nozzle to remove the fine liquid crystal remaining after the first suction nozzle 1110 passes. In the case of 1120, a suction pressure value relatively smaller than the first suction nozzle 1110 is set.

As such, by adjusting the pressure and height of the plurality of suction nozzles 1110, 1120, and 1130, the fine liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430 may be quickly and completely removed during the cleaning process of the heads 410, 420, 430. .

In this embodiment, the head cleaning unit 1000 consists of a plurality of suction nozzles 1100 including first and second suction nozzles 1110 and 1120. However, the suction nozzle 1100 may be configured as one to provide a head cleaning unit including a plurality of suction lines 1112 and 1122 and suction holes 1114 and 1124 therein.

In addition, this embodiment provides a head cleaning unit 1000 for cleaning the nozzle surfaces of the heads 410, 420, 430 while the heads 410, 420, 430 move. But. As the head cleaning unit 1000 moves, the head cleaning unit 1000 may be provided to clean the nozzle surfaces of the heads 410, 420, and 430.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

B base 100 substrate support unit
200 gantry 300 gantry moving unit
400 head 500 head moving unit
600 liquid crystal supply unit 700 head control unit
800 Liquid Crystal Discharge Measurement Unit 900 Nozzle Inspection Unit
1000 head cleaning units
1100 Head cleaning member 1200 Recovery member
1110,1120 Suction Nozzle 1130 Support Member
13001400 lifting member 1170 pressure regulating means

Claims (2)

In the inkjet type treatment liquid discharge device,
Base;
A substrate support unit installed on the base and on which a substrate is placed;
A gantry provided on an upper portion of a movement path of the substrate support unit, to which heads for discharging the chemical liquid on the substrate are coupled; And
Is installed on the base, and includes a head cleaning unit for cleaning the nozzle surface of the head,
The head cleaning unit,
A plurality of suction nozzles having suction holes formed toward the head are provided in the moving direction of the head,
And a height at each end of the suction holes of the suction nozzles is different from each other. The method of claim 1,
And a pressure adjusting means respectively coupled to the suction nozzles to independently adjust suction pressures of suction holes of the suction nozzles.

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