KR20120004068A - Module for picking up device, and device handler having the same - Google Patents

Abstract

PURPOSE: A device pickup module and a device handler including the same are provided to significantly reduce the processing speed and size of the device handler. CONSTITUTION: A pair of pickup parts(710) includes a plurality of pickup tools(711) for picking up a plurality of devices. A rotation movement part rotates the pair of pickup parts in order to alternatively locate the pair of pickup parts in a first position and second position. One pickup part among the pair of pickup parts is linearly moved when the pair of pickup parts is placed in the first position and second position. The phase difference of the first position and second position is 180 degrees.

Description

Device pick-up module and device handler having it {Module for picking up device, and device handler having the same}

The present invention relates to an element pickup module, and more particularly, to an element pickup module for picking up a plurality of elements such as an element, and an element handler for handling an element such as inspecting or classifying an element with the element pickup module. .

Semiconductor devices (hereinafter referred to as 'devices') undergo various tests such as electrical characteristics, heat or pressure reliability by the device inspection device, which is one of the device handlers, through many processes such as semiconductor process and packaging process.

As an example of a conventional device inspection apparatus, a loading unit in which a plurality of devices are loaded; A heating plate which receives the elements from the loading unit and heats them to a temperature for a test for a predetermined time; A test module for mounting a device heated in a heating plate to a test socket and performing a test on the device such as an electrical property; It is configured to include an unloading unit for classifying the elements according to the test results of the test module.

On the other hand, as the competition in the market is fierce, cost reduction is urgently required.

Therefore, the device inspection apparatus having the above-described configuration also needs to increase productivity by increasing the processing speed per unit time.

In addition, the device inspection apparatus is installed in a clean room that maintains a clean environment, so it is necessary to reduce the overall production cost of the device by reducing the space occupied by the device.

In particular, an element pickup module such as a pickup tool, such as picking up or transferring an element, is used in an element handler such as an element inspection device to greatly affect the size and structure of the element handler as well as the processing speed for the element.

Disclosure of Invention An object of the present invention is to provide a device pickup module and a device handler having the same, which can considerably reduce the processing speed of the device handler as well as the size of the device handler.

The present invention has been made to achieve the object of the present invention as described above, the present invention comprises a pair of pickups having a plurality of pickup tools for picking up a plurality of elements; A rotatable moving unit for rotating the pair of pickups such that the pair of pickups are alternately positioned at first and second positions each having a phase difference of 180 ° from each other; Disclosed is a device pick-up module including a linear moving unit for linearly moving at least one of the pair of pickup units when the pair of pickup units are located at the first position and the second position, respectively.

The rotary moving unit and the rotary driving unit; A pair of brackets; A pair of first rotating shafts rotatably installed on the pair of brackets and rotatably driven by the rotation driving unit; And a pair of guide blocks fixedly coupled to the pair of first rotational shafts to guide linear movement of the pickup unit, wherein the linear movement unit is coupled to the pair of pickup units, respectively, and linearly along the guide block. A pair of supporting blocks moving; It may include a linear driving unit for linearly driving the support block.

In addition, the rotary moving unit and the rotary driving unit; A pair of brackets; A first rotating shaft rotatably installed on the pair of brackets and rotatably driven by the rotation driving unit; And a pair of guide blocks fixedly coupled to the first rotation shaft, respectively, to guide linear movement of the pickup unit, wherein the linear movement unit is coupled to each of the pair of pickup units and linearly moves along the guide block. A pair of support blocks; It may include a linear driving unit for linearly driving the support block.

At least one of both ends of the first rotation shaft is coupled to the driven pulley, the driven pulley may be directly connected to the rotary driving unit or may be connected by a drive pulley and the belt is rotated by a drive belt.

The first position may be located above the bracket, and the second position may be positioned to face the first position about the first rotational axis.

The first position may be provided with a positioning plate formed with a plurality of guide holes for guiding the pickup and loading of the element corresponding to the position of the respective pickup tools of the pickup portion.

The guide hole formed in the alignment plate may have an inclined surface extending in an outward direction of the alignment plate on at least one surface of the upper and lower surfaces with respect to the vertical direction of the bracket.

The alignment plate may be provided with a taper hole into which the alignment pins installed in the respective pickup tools of the pickup unit are inserted.

Each pick-up tool of the pick-up unit is fine in the X-axis, Y-axis, and Z-axis directions to enable alignment by the alignment between the alignment pin and the taper hole when the coupling direction with the support block is called Z-axis. It may be installed to be movable.

The alignment plate may be coupled to an upper end of the pair of brackets.

Each pickup tool of the pickup unit may be coupled to a pneumatic transfer block coupled to the support block.

It may further include one or more pneumatic transmission member is installed to connect the pair of guide blocks to each other to receive the pneumatic pressure from the pneumatic generator installed in the outside to transfer the pneumatic pressure to the pickup tools of the pickup portion.

The linear driving unit is installed to move along the guide member installed in the guide block and a pair of moving blocks fixedly coupled to the support block; At least one cam member fitted with at least one of the pair of support blocks to move the support block along the guide member by rotation; It may include a cam rotation drive unit for rotating the cam member.

The cam rotation driving part is installed through the first rotation shaft so as to be rotatable with respect to the first rotation shaft, and the cam member is fixedly coupled to the cam shaft; It may include a rotary motor that is directly connected to the second rotary shaft, or is connected by a torque transmission unit for rotating the second rotary shaft. Here, the second rotary shaft may include a hollow cylinder in which a central portion communicates with the outside, and a pneumatic transfer line for transferring pneumatic pressure to the pickup tools of the pickup unit may be installed through the hollow cylinder.

The cam rotation driving unit may include a second rotation shaft through which the first rotation shaft is installed to be rotatable with respect to the first rotation shaft, and to which the cam member is fixedly coupled; It may include a rotary motor that is directly connected to the second rotary shaft, or is connected by a torque transmission unit for rotating the second rotary shaft. Here, the first rotating shaft may include a hollow cylinder in which a central portion communicates with the outside, and a pneumatic transfer line for transferring pneumatic pressure to the pickup tools of the pickup unit may be installed through the hollow cylinder.

The support block includes an insertion member protruding in the axial direction of the second rotating shaft, the cam member is formed with a guide groove for moving the insertion member is inserted, the guide groove is the cam member by the rotation of the Insertion member may be formed to increase or decrease the distance to the second rotation axis.

The guide groove forms a closed curve, and when the insertion member is located closest to the second axis of rotation in the closed curve, the smallest point and the farthest point in relation to the second axis of rotation are the maximum points. And the maximum point may be alternately located.

The cam member may rotate in one direction or reciprocate within a pre-installed reciprocating angle.

The present invention also provides a loading unit for loading one or more trays loaded with a plurality of elements; A first plate part which receives the elements from the tray of the loading part through a first transfer tool and heats them; An inverted loading unit for picking up elements from the first plate unit and inverting the bottoms of the elements to face upwards; A test module having test sockets in which each device is mounted to inspect electrical characteristics of the devices heated in the first plate unit; An element pick-up module having the configuration described above, receiving elements from the first position at the pickup unit, rotating the pickup unit to the second position, and mounting the elements picked up at the pickup unit to the test socket. A device pick-up module configured to test by a test module, and rotate the pick-up unit to a second position after the test module finishes the test; A third transfer tool for transferring elements from the first inverted loading portion to the pickup portion positioned at the first position, and a fourth transfer tool for picking up the tested elements from the pickup portion positioned at the first position; ; An inverse unloading unit configured to receive the elements from the fourth moving tool and invert them so as to face downward in the picked-up state; An unloading plate on which elements picked up by the reverse unloading unit are loaded; Disclosed is a device handler comprising: an unloading unit configured to classify and load elements loaded on the second plate unit according to a result of the test module through a second transfer tool.

The first plate portion may include a plate-like plate member having a plurality of loading grooves formed on an upper surface thereof so that the elements can be loaded, and a heating device installed on the inner or bottom surface of the plate member to heat the elements to a predetermined test temperature. Can be.

Loading grooves of the plate member may be arranged in accordance with the interval of the test sockets, or may be arranged in accordance with the interval corresponding to the interval of the receiving grooves of the tray.

The loading grooves of the plate member may be one half of the interval between the pickup tools forming the reverse loading portion.

The first plate portion may include a pair of plate members that may be moved alternately with each other.

The pair of plate members may be installed to alternately move a loading position capable of receiving elements from the tray of the loading unit and a transfer position capable of withdrawing the element from the reverse loading unit.

The pair of plate members are installed at intervals up and down so as not to interfere with each other, one or more guide members for guiding the linear movement of the plate member and a linear driving device for driving the linear movement of the plate member. can do.

The reverse loading unit is provided with a plurality of pick-up tools for picking up each element to transfer a plurality of elements, and the pick-up tools are supported and picked up elements from the first plate part in an XY direction by an XY linear moving device. It may include a support that is moved to.

The reverse loading unit may further include a rotation moving device for rotating the support unit to pick up the elements from the first plate part and rotate the inverted side so that the bottoms of the elements face upward.

The reverse unloading unit is provided with a plurality of pickup tools for picking up each element to transfer a plurality of elements, and the pickup tools are supported and installed in the XY direction by an XY linear moving device to load the elements onto the unloading plate. It may include a support that is moved to.

The reverse unloading unit may further include a rotation moving device that rotates the support to pick up the elements and rotate the bottom surfaces of the elements to rotate downward.

The third transfer tool and the fourth transfer tool may move in cooperation with each other through one moving device.

The device pick-up module according to the present invention is provided with a pair of pick-up parts which rotate in alternating rotation with each other, so that the device pick-up module is installed in an element handler for inspecting an element, thereby reducing the size of the device and improving an inspection speed of the element.

In particular, the device pick-up module according to the present invention uses any one of a pair of pick-up parts that rotate in rotation alternately with each other for the device exchange to receive the devices to be tested or deliver the tested devices and the other one for the device inspection As a result, the size of the installed device handler can be significantly reduced, and the inspection speed of the device can be remarkably improved by reducing the moving distance of the device.

In addition, the device handler including the device pick-up module according to the present invention can pick up the devices in a pair of pick-up unit, and rotate the pick-up unit alternately to be mounted on the test socket and detached to perform the test on the devices more quickly. In addition, there is an advantage that can reduce the size of the device.

In addition, the element handler including the element pick-up module according to the present invention comprises a pair of plate members moving alternately with each other the first plate portion for heating the elements before the test to increase the size of the device without increasing the size of the device There is an advantage that can sufficiently maintain the residence time for.

In particular, by arranging two or more of the pair of plate members in parallel with each other, it is possible to sufficiently achieve a residence time sufficient for heating of the elements, and there is an advantage that the transfer to the elements can be performed quickly.

1 is a plan view showing a device handler using a device pickup module according to the present invention.
FIG. 2 is a plan view illustrating an example of a heating plate of the device handler of FIG. 1.
3 is a cross-sectional view of the heating plate of FIG. 2.
4 to 6 are side views illustrating an operation process from the reverse loading unit to the reverse unloading unit of the device handler of FIG. 1.
7 is a side cross-sectional view illustrating another example of a device pickup module used in the device handler of FIG. 1.
8 is a plan view illustrating the device pickup module of FIG. 7.
9 is a side cross-sectional view illustrating a state in which the pickup unit is linearly moved in the device pickup module of FIG. 7.
FIG. 10 is a plan view illustrating a portion of a alignment plate of the device pickup module of FIG. 7.
FIGS. 11 and 12 are partial cutaway views illustrating a rotation state of a cam member corresponding to an operation process of the device pickup module of FIG. 7.
13 to 15 are side cross-sectional views and a plan view of a modified structure of the device pickup module of FIG. 7.

Hereinafter, a device handler using a device pickup module according to the present invention will be described in detail with reference to the accompanying drawings.

Device handlers according to the present invention, as shown in Figures 1 to 6, the loading unit 100 for loading the elements 10; A first plate part 200 receiving the elements 10 from the loading part 100; An inverted loading part 510 for picking up the elements 10 from the first plate part 200 and inverting the bottoms of the elements 10 to face upwards; A test module 300 having a plurality of test sockets 311 for testing electrical characteristics of the devices 10; An element pick-up module 700 which picks up the elements 10 from the inverse loading unit 510 and mounts the elements 10 picked up by the rotation in a test socket 311 to test and rotate the elements 10; An inversion unloading unit 520 which receives the elements 10 from the element pickup module 700 and inverts the bottom surfaces of the elements 10 to face downwards; A second plate part 400 which receives the elements 10 from the inverse unloading part 520 and is loaded; The unloading unit 600 classifies and loads the elements 10 according to the test result of the test module 300 from the second plate unit 400.

The loading unit 100 is a configuration in which one or more trays 20 in which a plurality of elements 10 are loaded are loaded, and various configurations are possible according to design and design.

For example, as shown in FIG. 1, the loading unit 100 includes a plurality of trays 20 that are appropriately arranged so that the first transfer tool 530 may pick up and transfer the element 10 without interruption. The tray 20 in which the elements 10 are empty may be configured to be replaced with the tray 20 in which the elements 10 are filled. Here, the tray 20 may be automatically transferred to a position where the first transfer tool 530 can withdraw the element 10 after the tray 20 of a predetermined bundle is loaded manually or automatically.

In this case, the empty tray 20 from which the elements 10 are drawn out may be transferred to the unloading unit 600 by a tray transfer unit (not shown), and may be transferred to the unloading unit 600 before being transferred to the unloading unit 600. It may be rotated in the tray inverting portion (not shown) to remove the element 10 that is not drawn out.

In addition, a tray buffer unit (not shown) may be additionally installed between the loading unit 100 and the unloading unit 600 in which the empty tray 20 may be temporarily loaded.

The tray 20 may be configured in various ways such that the receiving grooves 21 are formed according to a predetermined standard such as 8 × 16 so that a plurality of elements 10 may be loaded.

The device 10 to be inspected may be a memory semiconductor or a non-memory semiconductor such as a system LSI. In particular, the inspection object is preferably a system LSI, in particular, an element having a ball-shaped contact terminal formed on the bottom thereof.

The first plate part 200 receives the elements 10 from the tray 20 of the loading part 100 through the first transfer tool 530 and temporarily loads the elements 10 to the reverse loading part 510. Various configurations are possible as a configuration.

On the other hand, it is necessary to heat to a predetermined temperature in the test for the element 10, for this purpose, the first plate portion 200 may be configured to heat the elements 10 loaded in advance, element 10 ) May be configured to heat to a constant temperature through a predetermined heating time, eg, a heating time of about 90 seconds or more.

As shown in FIGS. 1, 2, and 3, the first plate part 200 has a plate-like plate member 210 having a plurality of loading grooves 211 formed on an upper surface thereof so that the elements 10 can be loaded. And a heating device installed on the inner or bottom surface of the plate member 210 to heat the elements 10 to a predetermined test temperature. In this case, the device 10 is heated through a predetermined time, that is, a time for heating time or more when heating to the test temperature in consideration of the thermal shock caused by heating.

The plate member 210 may be configured integrally with the heating device or as a separate member, and a plurality of loading grooves 211 may be formed for loading the device 10.

And the loading grooves 211 of the plate member 210 may be arranged in accordance with the interval of the test socket 311 for efficient withdrawal of the reverse loading unit 510 which will be described later, in consideration of the size of the entire apparatus tray ( It is preferable to be disposed in accordance with the interval corresponding to the interval of the receiving grooves 21 of 20).

Furthermore, in order for the reverse loading section 510 to be withdrawn more efficiently, the spacing of the loading grooves 211 of the plate member 210 is 1 / time of the spacing of the pickup tools 511 constituting the reverse loading section 510. 2 is preferred.

Here, when the spacing between the loading grooves 211 of the plate member 210 is 1/2 of the spacing between the pick-up tools 511 of the reverse loading unit 510, the loading grooves 211 of the plate member 210 are formed. The elements 10 loaded in the filter 10 may be taken out one by one, so that adjustment of the horizontal and vertical intervals (pitch) of the pickup tools 511 of the reverse loading unit 510 is unnecessary.

At this time, the number of transverse and longitudinal directions of the loading groove of the plate member 210 is preferably made of multiples (2 times, 4 times, etc.) of the number of the pickup tool of the reverse loading unit 510.

Meanwhile, the first plate part 200 needs to stay for a time longer than a heating time to receive the elements 10 from the loading part 100 and to stably reach the test temperature. Since it affects the time to be delivered to), it is preferable that the first plate part 200 is loaded with as many elements 10 as possible.

However, as the number of elements 10 is loaded, the size of the first plate part 200 increases, resulting in an increase in the size of the device, thereby increasing the installation space of the device.

Therefore, the first plate part 200 needs to be configured to be able to load a larger number of elements 10 to sufficiently secure the residence time of the elements 10 without increasing the size of the device.

As illustrated in FIGS. 1, 2, and 3, the first plate part 200 may include a pair of plate members 210 that may be moved alternately with each other.

As shown in FIG. 2, the pair of plate members 210 may include a loading position and an inverted loading part 510 capable of receiving elements 10 from the tray 20 of the loading part 100. 10) is installed to move alternately transfer positions that can be withdrawn.

Here, the loading position means a position adjacent to the loading unit 100 on the basis of the copper wire (Y axis) connecting the loading unit 100 and the reverse loading unit 510, and the transfer position is the reverse loading unit 510. It means the position adjacent to.

In particular, the first plate part 200 may be configured by a pair of plate members 210 are arranged in parallel with each other so that the elements 10 can stay for a sufficient heating time, it may be composed of a total of four plate members (210). .

Meanwhile, as shown in FIG. 3, the pair of plate members 210 may be installed at intervals up and down so as not to interfere with each other, and at least one guide member for guiding linear movement of the plate member 210. 221 and the linear driving device 222 for driving the linear movement of the plate member 210 can be configured.

When the first plate part 200 is configured as described above, the residence time of the elements 10 can be sufficiently maintained without increasing the size of the device.

Furthermore, since the inversion loading unit 510 easily pulls out the elements 10 from the first plate unit 200, there is an advantage that the processing speed of the apparatus can be significantly increased.

In the first plate portion 200 having the configuration as shown in FIGS. 1 and 2, the elements 10 are located at the loading position of the plate member 210. The plate member 210 loaded by the transfer tool 530 and located at the same time in the transfer position is drawn out of the elements 10 by the reverse loading unit 510. Here, the plate member 210 is heated continuously by applying a predetermined heat until the elements 10 are withdrawn after loading.

Meanwhile, when the elements 10 are filled in the plate member 210 positioned at the loading position, and the elements 10 are emptied from the plate member 210 positioned at the delivery position, the pair of plate members 210 are mutually free. By alternately changing the position to perform the loading and withdrawal process of the device (10).

In particular, when the pair of plate members 210 are arranged in parallel with each other and composed of a total of four plate members 210, the loading and withdrawal of the elements 10 can be seamlessly performed without increasing the size of the device 10. Can significantly increase the speed of inspection.

The inverted loading unit 510 is a configuration for transferring the elements 10 from the first plate unit 200 to the test module 300 to the configuration of the first plate unit 200 and the test module 300. Therefore, various configurations are possible.

The reverse loading unit 510 is installed to support a plurality of pickup tools 511 and pickup tools 511 for picking up each element 10 so as to transfer the plurality of elements 10 and the first plate portion ( It may be configured to include a support portion 512 to be moved in the XY direction by the XY linear mobile device to withdraw the elements 10 from the 200.

The pick-up tools 511 of the inverted loading unit 510 have horizontal and vertical spacings in consideration of the case where the horizontal and vertical spacings of the first plate 200 and the test socket 311 of the test module 300 are different from each other. It may be configured to be adjustable, but as shown in Figures 1 and 4, the horizontal and vertical spacing can be fixed to enable the transfer of a larger number of elements (10).

In particular, when the pick-up tools of the first transfer tool 530 are arranged at 2 × 8, the pick-up tools 511 of the inverted loading part 510 may be 4 × 8 so as to enable the transfer of a larger number of elements 10. Can be deployed.

Meanwhile, the inversion loading unit 510 picks up the elements 10 from the first plate unit 200 to quickly test the test module 300 to be described later, and rotates the bottom surfaces of the elements 10 to face upward. It can be configured to.

The reverse loading unit 510 rotates the support unit 512 to pick up the elements 10 from the first plate part 200 and to rotate the bottom surfaces of the elements 10 upward so as to be reversed. 513 may further include.

The test module 300 is a component for inspecting electrical characteristics of the elements 10 heated in the first plate unit 200, and has a plurality of test sockets 311 to which each element 10 is mounted. The assembly is mounted on the main body of the device handler.

In this case, the test module 300 may be configured such that only the test socket 311 is replaced or replaced entirely according to the type of the device 10 and the test contents.

The test module 300 is configured to test electrical characteristics of the device 10 heated to a test temperature, for example, and may be variously configured according to a test, and a plurality of devices on which the devices 10 may be mounted. It comprises three test sockets (311).

Meanwhile, as illustrated in FIG. 1, the test module 300 opens only a part of the upper portion of the test chamber 350 so as not to disturb the transfer of the device 10 in order to stably test the devices 10. ) May be further included.

The test chamber 350 may have any structure as long as it can prevent a temperature change to the extent that it does not affect the test environment of the test module 300.

The device pick-up module 700 includes a pair of pickup parts 710 for alternately picking up a plurality of devices 10 so as to pick up the devices 10 at a first position, that is, at an element exchange position. The device 10, which is picked up by the pickup unit 710, is rotated to the second position, that is, the device test position, and is mounted on the test socket 311 to be tested by the test module 300. After completing the test in the test module 300, various configurations are possible as the pickup unit 710 is rotated to the second position.

As an example, the device pickup module 700 may include a pair of pick-up units 710 alternately picking up elements 10, and a pair of pick-up units 710 as illustrated in FIGS. 1 to 6. Rotation unit 720 for rotating the device between the element replacement position and the element test position, and the pickup unit 710 to mount or detach the elements 10 picked up in the pickup unit 710 on the test socket 311. It can be configured to include a linear moving unit for linear movement.

Here, the element exchange position refers to a position at which the inverted loading unit 510 and the inverted unloading unit 520 and the elements 10 can be exchanged, and the element test position indicates the elements 10 picked up by the pickup unit 710. Refers to a position where the test socket 311 can be mounted or removed.

The pair of pickup units 710 may include pickup tools 711 corresponding to the reverse loading unit 510 to receive the elements 10 from the reverse loading unit 510.

The pickup tool 711 is configured to pick up the elements 10 by forming a vacuum pressure on the suction head, and any configuration may be used as long as the pickup tool 711 may pick up the elements 10 using the vacuum pressure.

The pick-up tools 711 of the pair of pick-up units 710 may be arranged in various forms. When the first transfer tool 530 is 2 × 8 corresponding to the test socket 311, 4 × 8 It can be arranged as.

Meanwhile, the pickup unit 710 receives the elements 10 from the inverted loading unit 510 by a combination of rotation and shanghai, and inserts the elements 10 into the test socket 311 by rotation and shanghai. After the test, the devices 10 are transferred to the inverse unloading unit 520.

Therefore, the pair of pickup units 710 may be driven by various mechanisms for implementing a combination of rotation and shankdong.

For example, as shown in FIGS. 1 and 4, the device pickup module 700 rotates the rotation shaft 721 and the rotation shaft 721 to which the pair of pickup units 710 are coupled to face each other. When any one of the rotary moving unit 720 and the pickup unit 710 including the rotary driving unit 722 is positioned above the test socket 311, the pickup unit 710 is moved downwards so that the test socket ( 311) and may be configured to include a linear moving portion to be separated from the test socket 311 by moving upward after the test.

The linear moving part may be configured in various ways such as a screw jack according to the linear moving method.

The reverse unloading unit 520 is a configuration for inverting and receiving the elements 10 that have been tested in the test module 300 from the pickup unit 710, and then transferring the reversely loaded elements to the second plate unit 400. Since the configuration may be substantially the same as that of the unit 510, detailed description thereof will be omitted.

That is, the reverse unloading unit 520 supports and installs a plurality of pickup tools 521 and pickup tools 521 for picking up each element 10 so as to transfer the plurality of elements 10. It may include a support unit which is moved in the XY direction by the XY linear moving device and a rotating device for rotating and inverting the plurality of pickup tools 521 so as to withdraw the elements 10 from the plate portion 200.

The second plate unit 400 is a configuration for temporarily loading the elements 10 before the transfer to the unloading unit 600 according to the test result of the test module 300, the second plate 400 The plate member 410 is different from the plate member 210 of the first plate part 200 in which the elements 10 are to stay for a predetermined time or more, so that the plate member 410 is not restricted in the residence time, and thus the transfer speed of the elements 10, etc. In consideration of this, an appropriate number of loading grooves 411 may be configured to include one or more plate members 410.

Meanwhile, the plate member 410 may be additionally provided with a cooling device for cooling the heated element 10, and the plate member 210 may be configured integrally with the cooling device or as a separate member.

In some cases, the second plate part 400 may be configured similarly to the first plate part 200 in order to improve the unloading speed of the device 10.

Meanwhile, as illustrated in FIGS. 1 and 2, the transfer of the elements 10 between the inverted loading unit 510 and the test module 300, and between the test module 300 and the inverted unloading unit 520 is performed. It can be transferred by the third and fourth transfer tools (550, 560).

The third transfer tool 550 is configured to pick up the elements 10 inverted by the inversion loading unit 510 to the pick-up unit 710 of the element pick-up module 700 located at the element exchange position. After the test, the fourth transfer tool 550 picks up the elements 10 from the pick-up unit 710 of the device pick-up module 700 positioned at the element exchange position and inverts them upward. Configured to transfer).

The third transfer tool 550 and the fourth transfer tool 560 are installed by supporting a plurality of pickup tools 551 and 561 and pickup tools 551 and 561 capable of picking up the elements 10. It may be configured to include a moving device for moving the tools (551, 561).

In addition, the plurality of pickup tools 551 and 561 constituting the third transfer tool 550 and the fourth transfer tool 560 may be formed of the test socket 311 of the first plate part 200 and the test module 300. Although it may be configured to adjust the horizontal and vertical spacing in consideration of the case where the horizontal and vertical spacing is different from each other, as shown in FIGS. 1 and 4 so as to enable the transfer of a larger number of elements 10 And the vertical spacing can be fixed.

In addition, since the elements 10 picked up by the third transfer tool 550 are loaded after the fourth transfer tool 560 pulls the elements 10 out of the pick-up unit 710, the third transfer tool ( 550 and the fourth transfer tool 560 may be configured to move in conjunction with each other, in particular, the moving device for supporting the pickup tools (551, 561) may be configured as one.

The unloading unit 600 is configured to classify the elements 10 loaded on the second plate unit 400 through the second transfer tool 540 according to the test result of the test module 300.

The unloading unit 600 is configured similarly to the loading unit 100, and as an example, as shown in FIG. 1, an appropriate number of trays 20 are arranged according to classification criteria according to test results. The tray 20 filled with 10 may be configured to be automatically or manually replaced with the empty tray 20.

On the other hand, the empty tray 20, as described above, the empty tray 20 emptied from the loading unit 100 may be transferred by a tray transfer unit (not shown).

Meanwhile, the reverse loading tool 510, the reverse unloading tool 520, the first transfer tool 530, the second transfer tool 540, the third transfer tool 550, the fourth transfer tool 560 and the pickup The pick-up tools 511, 521, 531, 541, 551, 561, and 321 constituting the part 710 may be configured as a picker having an adsorption head for adsorbing the element 10 by vacuum pressure.

The transfer process of the elements 10 from the reverse loading tool 510 to the reverse unloading tool 520 having the above configuration will be described with reference to FIGS. 4 to 6.

First, the inversion loading tool 510 picks up the elements 10 from the first plate part 200 and inverts the same to that of FIG. 6.

When the inversion loading tool 510 picks up the elements 10 and is in a state as shown in FIG. 6, the third transfer tool 550 and the fourth transfer tool 560 are as shown in FIG. 4. In conjunction with each other, the upper portion of the reverse loading tool 510 and the pickup portion 710 is moved.

As shown in FIG. 5, the third transfer tool 550 and the fourth transfer tool 560 respectively pick up the elements 10 so that the third transfer tool 550 is connected to the pick-up unit 710 by the fourth transfer tool 550. The transfer tool 560 is mounted on the reverse unloading tool 520.

On the other hand, if the device 10 that has been tested by the fourth transfer tool 560 is picked up and the element 10 to be tested is loaded by the third transfer tool 550, as illustrated in FIG. 6, the pickup unit ( 710 is replaced by the pickup portion 710 toward the test socket 311 by the rotation by the rotation moving part (720). In this case, the third transfer tool 550 and the fourth transfer tool 560 are moved to pick up and load the device 10.

When the pick-up unit 710 loaded with the elements 10 to be tested is in a state facing the test socket 311, as shown in FIG. 4, the elements 10 loaded in the pick-up unit 710 are linear moving parts. It is mounted on the test socket 311 and tested.

At this time, the pickup portion 710 facing upward is made of the transfer of the elements 10 as described above.

The reverse unloading tool 520 that has received the tested devices 10 delivers the completed devices 10 to the second plate part 400 after the inversion as shown in FIG. 6.

Meanwhile, the device pickup module 700 used in the device handler described above includes a pair of pickup parts 710 for picking up the devices 10 to handle the device 10, such as to transport or inspect the device 10. As the configuration for the above, various configurations, such as the configuration shown in Figures 4 to 6 or the configuration as shown in Figures 7 to 12 are possible.

The device pick-up module 700 is a configuration as shown in FIGS. 4 to 6 as another example. As shown in FIGS. 7 to 12, a plurality of pick-up tools 711 picking up a plurality of devices 10. A pair of pick-ups 710 with ones; A rotation moving part for rotating the pair of pickup parts 710 so that the pair of pickup parts 710 are alternately positioned at the first position and the second position each having a phase difference of 180 ° from each other; Including a linear moving unit for linearly moving at least one of the pickup portion 710 of the pair of pickup portion 710 when the pair of pickup portion 710 is located in the first position and the second position, respectively Can be configured.

As described above, the pair of pick-up units 710 are configured to pick up the elements 10 by forming a vacuum pressure, and any configuration may be used as long as the pick-up units 710 may pick up the elements 10 using the vacuum pressure. It is possible.

The pick-up unit 710 includes a plurality of pick-up tools 711 for picking up each of the elements 10 to pick up the plurality of elements 10, and the pick-up tools 711 pick up the elements 10. It may be configured to include a pickup head (711a) for.

The pick-up tool 711 may be directly coupled to the support block 731 which will be described later, or may be coupled to the pneumatic transfer block 712 coupled to the support block 731 for smooth pneumatic transfer.

Meanwhile, the pickup unit 710 includes a plurality of pickup tools 711 and receives the element 10 from an element transfer tool such as the third and fourth transfer tools 550 and 560, and picks up the element 10. To be transmitted, an error may occur at an exchange position of the device 10 due to repeated rotation and linear movement.

Therefore, when the pickup tool 711 of the pickup unit 710 is referred to as the Z-axis coupling direction with the support block 731, the position alignment is possible by alignment between the alignment pin 713 and the tapered hole which will be described later. It can be installed so as to enable fine movement in the X-axis, Y-axis and Z-axis direction.

The alignment pins 713 are installed in each pickup tool 711 of the pickup unit 710 and inserted into a taper hole installed in the alignment plate 780 to be described later, so that the pickup tool 711 exchanges the elements 10. Make sure it is exactly where you can.

In addition, the alignment pin 713 is inserted into the tapered hole installed near the test socket 311 of the test module 300 so as to correspond to the test socket 311 of the test module 300, the pickup tool 711. ) To accurately mount the device 10 to the test socket 311.

Fine movement of the pick-up tools 711 of the pick-up unit 710 in the X-axis, Y-axis, and Z-axis directions is pneumatically applied to the pneumatic transfer block 712 to enable fine movement in each of the X-, Y-, and Z-axis directions. The transfer may be coupled to the support block, or the pneumatic transfer block 712 may be coupled to the support block 731 to enable the pivoting movement.

The rotation moving unit is configured to rotate the pair of pickup units 710 to the first position and the second position by rotation or reciprocating rotation in one direction, and various configurations are possible, and a rotation driving unit 724; A pair of brackets 725; A pair of first rotation shafts 726 rotatably installed on the pair of brackets 725 and rotatably driven by the rotation driving unit; It may be configured to include a pair of guide blocks 727 fixedly coupled to each of the pair of first rotary shafts 726 to guide the linear movement of the pickup unit 710.

Wherein the first position is located above the bracket 725, the second position is located opposite to the first position around the first axis of rotation 726, the first position is picked up elements with other transfer tools The second position may be defined as a test position for mounting the element 10 to the test socket 311 of the test module 300 by linear movement of the pickup unit 710.

The rotation driving unit 724 is configured to rotate the first rotation shaft 726 like the rotation motor, and is directly connected to the first rotation shaft 726 or a configuration for transmitting rotational force such as a combination of a belt and a pulley is indirectly mediated. Can be connected.

For example, at least one of the pair of first rotating shafts 726 is coupled to the driven pulley 726a, and the driven pulley 726a is driven by the rotation driving unit 724 and the driving pulley 724a. It may be connected by a drive belt 726b.

In addition, the driven pulley 726a is coupled to each of the pair of first rotating shafts 726 in order to transmit the rotational force to the first rotating shaft 726 more stably, and each driven pulley 726a is driven by the driving belt 726b. It is connected to a pair of drive pulley 724a.

Here, the pair of driving pulleys 724a is coupled to the rotation shaft 724e rotatably supported by the support bracket 724f, and further driven pulleys 724c and the rotation driving unit 724 further coupled to the rotation shaft 724e. It is coupled by the main drive pulley 724 and the drive belt 724b coupled to.

At this time, the combination of the belt and the pulley may be composed of a timing belt and a pulley for accurate rotation.

The bracket 725 may have any configuration as long as it supports the first rotation shaft 726, and one or more bearings 725a may be installed to smoothly rotate the first rotation shaft 726.

Meanwhile, in the first position, a position alignment plate 780 having a plurality of guide holes 781 formed to guide pickup and loading of the element 10 corresponding to the positions of the respective pickup tools 711 of the pickup unit 710 is provided. It can be installed additionally.

As shown in FIGS. 7 and 10, the alignment plate 780 includes a plate member 782 in which a plurality of guide holes 781 are formed to penetrate up and down so as to facilitate device exchange with other transfer tools. It can be composed of).

The plate member 782 may be any member as long as the guide holes 781 may be formed, and the plate member 782 may be replaced to effectively cope with the case in which the thickness and size thereof are different depending on the type of the device 10 to be handled. The upper end of the pair of brackets 725 may be detachably installed.

In addition, the guide hole 781 may be in an outward direction of the alignment plate 780 on at least one of the upper and lower surfaces of the bracket 725 based on the vertical direction of the bracket 725 so that the device 10 can be inserted smoothly. Enlarged inclined surfaces 783 and 784 may be formed.

The alignment plate 780 may further include a taper hole (not shown) into which the alignment pins 713 installed in the pickup tools 711 of the pickup unit 710 are inserted.

The tapered hole is preferably formed so that the inlet portion is larger than the outer diameter of the end of the alignment pin 713 so that the alignment pin 713 can be easily inserted.

The pair of first rotating shafts 726 are rotatably installed on the brackets 725 and fixedly coupled to the guide block 727 for guiding linear movement of each pickup unit 710.

When the pair of first rotating shafts 726 are rotated by the fixed coupling with the guide block 727, the guide block 727 is also rotated together to show the pickup 710 coupled to the guide block 727. And as shown in FIG. 9 (FIGS. 11 and 12), the first and second positions are alternately rotated.

The guide block 727 is configured to support the pair of pickups 710 so that the pair of pickups 710 can be moved up and down relatively, and the linear movement of the pair of pickups 710 is possible. Any configuration can be used as long as it can be supported.

As an example of the guide block 727, it may be composed of a plate member coupled to each of the first rotary shaft 726.

In addition, one or more guide members 727a may be installed to guide the movement of the plate member.

The guide member 727a may be installed on the plate member in pairs symmetrically from side to side with respect to the first rotation shaft 726.

The pair of guide blocks 727 may be installed to connect to each other to receive air pressure from an externally installed pneumatic generator (not shown) to transfer air pressure to the pickup tools 711 of the pickup unit 710. It may further comprise a pneumatic transfer member (727b).

The linear moving unit is configured to linearly move the pair of pickup units 710 in a radial direction about the first rotational axis 726, and the pair of pickup units 710 are coupled to each other and guide block 727. A pair of support blocks 731 each linearly moving along; It may be configured to include a linear driving unit for linearly driving the support block 731.

The linear drive unit is installed to move along the guide member 727a installed in the guide block 727, respectively, and a pair of moving blocks 734 fixedly coupled to the support block 731; One or more cam members 735 fitted to at least one of the pair of support blocks 731 to linearly move the support block 734 by the guide of the guide member 727b by rotation; It may be configured to include a cam rotation driving unit for rotating the cam member 735.

The cam rotation driving unit is installed through the first rotation shaft 726 so as to be rotatable about the first rotation shaft 726 and the second rotation shaft (761) to which the cam member 735 is fixedly coupled; It may be configured to include a rotary motor 762 directly connected to the second rotary shaft 761, or connected by a rotation force transmission unit to rotate the second rotary shaft 761.

The second rotation shaft 761 is configured to rotate the cam member 735, and includes a hollow cylinder in which one or more slots 761a are formed so that the center portion communicates with the outside, and the pickup tool of the pickup unit 710 is provided. A pneumatic delivery line (not shown) for delivering pneumatics to the 711 may be installed through the hollow and the slot 761a of the hollow cylinder.

In addition, one or more bearing members 766 may be installed between the first rotation shaft 726 and the second rotation shaft 761 so that rotation is not hindered by the first rotation shaft 726.

The rotary motor 762 is configured to rotate the second rotary shaft 761, and is directly coupled to the second rotary shaft 761 to rotate the second rotary shaft 761, or as shown in FIG. The second rotation shaft 761 may be rotated by the driving belt 762c connecting the driving pulley 762a installed on the rotation shaft of the motor 762 and the driven pulley 762d coupled to the second rotation shaft 761.

As described above, the driving belt and the pulley are preferably used with the timing belt and the pulley for the accuracy of rotation.

The support block 731 includes an insertion member 734a protruding in the axial direction of the second rotation shaft 761, and the cam member 735 has a guide groove 735a through which the insertion member 734a is inserted and moved. The guide groove 735a is formed such that the insertion member 734a increases or decreases the distance to the second rotation shaft 731 by the rotation of the cam member 735.

The insertion member 734a may be integrally formed with the support block 731 or as shown in FIG. 7, and may be coupled to the support block 731 by a fastening member 734b such as a bolt.

The guide groove 735a may be formed in various shapes. As shown in FIGS. 11 and 12, for example, the guide groove 735a may have a closed curve. When the close position is the minimum point and the farthest position with respect to the second rotation axis is the maximum point, the closed curve may be alternately located at the minimum and maximum points.

The cam member 735 is a configuration for linearly moving the insertion member 734a inserted and coupled by rotation with respect to the second rotation shaft 761 by reciprocating between a minimum point and a maximum point. Can be rotated at or within the pre-installed reciprocating angle.

Here, when the cam member 735 rotates to linearly move the pickup unit 710, the first rotating shaft 726 is fixed so that each pickup unit 710 is linearly moved in a first position and a second position. do.

On the other hand, the cam member 735 is a configuration for linearly moving the support block 731, in addition to the fitting coupling with the support block 731, the elastic member and the support block for imparting an elastic force in the radial direction of the first rotation shaft 726 Various configurations are possible, including a member for linearly moving the 731 in a radial direction and linearly moving with the elastic member.

Referring to the operation of the device pickup module 700 having the above configuration in detail as follows.

First, the devices 10 are transferred to the pickup unit 710 of the device pickup module 700 as follows.

The third transfer tool 550 picks up the elements 10 from the reverse loading unit 510 and moves to the upper portion of the pick-up unit 710 of the element pickup module 700.

When the third transfer tool 550 is moved above the pickup portion 710 of the device pickup module 700, each of the pair of pickup portions 710 is fixed to the first position and the second position. Keep it. Here, the pick-up unit 710 maintains a state moved upward as shown in FIGS. 7 and 11.

The third transfer tool 550 moves on the pickup portion 710 of the device pick-up module 700 and releases the vacuum pressure to drop the elements 10, and the dropped elements 10 are positioned on the alignment plate. The guide holes 781 of the 780 are adsorbed and fixed to the pickup tool 711 of the pickup unit 710 in the first position.

The elements 10 are smoothly moved to the respective guide holes 781 by the inclined surface 783 formed in the guide holes 781.

On the other hand, the pick-up unit 710 located in the first position may have the elements 10 tested in the test module 300 picked up, and the fourth transfer before the third transfer tool 550 moves upward. The devices 10 may be picked up by the tool 560 to transfer the devices 10 to the inversion unloading unit 520 described above.

In particular, the element 10 is picked up by the fourth transfer tool 560 from the pick-up portion 710 located at the first position and by the third transfer tool 550 to the pick-up portion 710. Place, that is, element replacement may be performed by interlocking the third transfer tool 550 and the fourth transfer tool 560.

Meanwhile, when the elements 10 are received by the pickup unit 710 positioned in the first position, the pickup unit 710 positioned in the second position may be a pickup element (as shown in FIGS. 7 and 11). 10) are linearly moved to the test socket 311 of the test module 300 to perform a test for each device (10).

The pickup unit 710 positioned at the first position finishes the pickup of the elements 10, and the pickup unit 710 positioned at the second position finishes the test of the elements 10. 9 and 12 move each pickup portion 710 in the radial direction, close to the second axis of rotation 761, ie from the maximum point to the minimum point.

The movement of the pickup unit 710 as described above is implemented by operating the linear drive unit as follows.

The second rotary shaft 761 is rotated by the rotational drive of the rotary motor 762 constituting the cam rotary drive, and the cam member coupled to the second rotary shaft 761 by the rotation of the second rotary shaft 761 ( 735 is rotated.

When the cam member 735 is rotated, the guide groove 735a is also rotated together, and the insertion member 734a fixedly coupled to the support block 731 and fitted into the guide groove 735a rotates the guide groove 735a. By the relative movement in the radial direction of the second rotary shaft (761). In this case, the insertion member 734a may be linearly moved only by a state in which rotational movement is impossible by coupling with the support block 731.

Meanwhile, the pickup part 710 coupled to the support block 731 by linear movement along the guide member 727a of the support block 731 is shown in FIGS. 9 and 12 in the state shown in FIGS. 7 and 11. Will move linearly.

When the pair of pickup units 710 respectively complete the linear movement, the pickup unit 710 positioned at the first position by the rotary move unit is moved to the second position, and the pickup unit 710 positioned at the second position Moves to the first position.

Here, the pair of pick-up units 710 may include a guide block coupled to the first rotation shaft 726 by the rotation of the first rotation shaft 726 by the rotational driving of the rotation drive unit. 727 is rotated.

In addition, the guide member 727a installed in the guide block 727 is also rotated, and the support block 731 is coupled by the moving block 734 by the rotation of the guide member 727a and supports the pickup parts 710. As a result, the pickup 710 is rotated.

On the other hand, when the pair of pickups 710 are exchanged to the first position and the second position by the rotary mover, the pair of pickups 710 are linearly moved from the minimum to the maximum by the linear mover, respectively. In the pick-up unit 710 positioned at the first position, element exchange is performed with the third and fourth transfer tools 550 and 560 described above, and the test module 300 is provided at the pick-up unit 710 positioned at the second position. A test socket 311 is inserted into the test socket 311 to test the elements 10.

Here, when the pair of pickup parts 710 are moved from the minimum point to the maximum point, they are installed on the alignment plate 780 by the alignment pins 713 installed on each pickup tool 711 of the pickup part 710. Insertion into the tapered hole allows the pick-up tool 711 to be accurately positioned at the position where the element 10 can be replaced.

On the other hand, the rotary mover for rotating the pair of pick-up units 710 and the shank movement, that is, the linear movement portion for linear movement can be various configurations depending on the implementation of the rotational movement and linear movement.

13 to 15 are side cross-sectional views and a plan view of a modified structure of the device pickup module of FIG. 7.

Unlike the configuration shown in FIGS. 7 to 9, the rotatable moving unit and the linear moving unit place the cam member 725a between the ends of the pickup unit 710 and the bracket 725, and the guide block 727. It may be configured to be positioned between both ends of the cam member (725a) and the pickup portion (710).

In contrast to the configuration illustrated in FIGS. 7 to 9, the configuration illustrated in FIGS. 13 to 15 may include the first rotation shaft 726 and the second rotation shaft 761, respectively, and the second rotation shaft 763 and the first rotation shaft 736. Can be replaced with

That is, the cam rotation driving unit is provided with a pair of second rotation shafts 736 through which the first rotation shaft 763 penetrates so as to be rotatable with respect to the first rotation shaft 763 and the cam member 735 is fixedly coupled; It may be configured to include a rotary motor that is directly connected to the second rotary shaft 736, or is connected by a rotation force transmission unit to rotate the second rotary shaft 736.

In this case, the first rotary shaft 736 includes a hollow cylinder in which a central portion communicates with the outside, similar to the configuration of the second rotary shaft 761 in FIGS. 7 and 9, and includes pickup tools of the pickup unit 710. A pneumatic delivery line for delivering pneumatics may be installed through the hollow cylinder.

When the rotary mover and the linear mover are configured as shown in FIGS. 13 to 15, it is possible to prevent twisting of the pneumatic transfer line as compared to the configuration illustrated in FIGS. 7 to 9.

Operations of the pickup module illustrated in FIGS. 13 to 15 are similar to those of the pickup module illustrated in FIGS. 7 to 9, and thus detailed descriptions thereof will be omitted.

That is, the shanghai movement, that is, the linear movement of the pair of pickup portions 710 operates as follows.

The second rotary shaft 736 is rotated by the rotary motor, the cam member 735 fixedly coupled to the second rotary shaft 736 by the rotation of the rotationally driven second rotary shaft 736 is rotated.

When the cam member 735 rotates, the insertion member 734a linearly moves up and down by the coupling relationship between the cam member 735 and the insertion member 734a.

Linear movement of the insertion member 734a induces movement of the pickup 710 which is ultimately fixedly coupled to the insertion member 734a.

By the same principle as above, the pickup unit 710 is linearly moved up and down.

On the other hand, the pair of pick-up unit 710 is rotated to move up and down alternately with each other operates as follows.

The first rotary shaft 763 is rotated by a rotary motor, and the rotation of the rotary driven first rotary shaft 763 rotates the guide block 727 fixedly coupled to the first rotary shaft 763.

The guide member 727a installed in the guide block 727 is also rotated by the rotation of the guide block 727, and is coupled by the moving block 734 by the rotation of the guide member 727a. The supporting block 731 is rotated to support and thus rotate the pickup unit 710.

Meanwhile, when the first rotation shaft 763 is rotated, the second rotation shaft 736 may be synchronized to rotate together in the same direction or in the opposite direction. Here, the second rotary shaft 736 has an advantage of preventing the twisting of the pneumatic transmission line when rotated in synchronization with the rotation of the first rotary shaft 763.

Since the above has been described only with respect to some of the preferred embodiments that can be implemented by the present invention, the scope of the present invention, as is well known, should not be construed as limited to the above embodiments, the present invention described above It will be said that both the technical idea and the technical idea which together with the base are included in the scope of the present invention.

100: loading portion 200: first plate portion
300: test module 400: second plate portion
510: reverse loading unit 520: reverse unloading unit
600: unloading unit
700: device pickup module

Claims (32)

A pair of pickups having a plurality of pickup tools for picking up a plurality of elements;
A rotatable moving unit for rotating the pair of pickups such that the pair of pickups are alternately positioned at first and second positions each having a phase difference of 180 ° from each other;
And a linear moving unit configured to linearly move at least one of the pair of pickup units when the pair of pickup units are located at the first position and the second position, respectively. The method according to claim 1,
The rotary moving unit and the rotary driving unit; A pair of brackets; A pair of first rotating shafts rotatably installed on the pair of brackets and rotatably driven by the rotation driving unit; And a pair of guide blocks fixedly coupled to the pair of first rotating shafts to guide linear movement of the pickup unit,
The linear moving unit includes a pair of support blocks each coupled with the pair of pickup units and linearly moving along the guide block; Device pickup module comprising a linear drive for linearly driving the support block. The method according to claim 1,
The rotary moving unit and the rotary driving unit; A pair of brackets; A first rotating shaft rotatably installed on the pair of brackets and rotatably driven by the rotation driving unit; A pair of guide blocks fixedly coupled to the first rotation shaft, respectively, for guiding linear movement of the pickup unit;
The linear moving unit includes a pair of support blocks each coupled with the pair of pickup units and linearly moving along the guide block; Device pickup module comprising a linear drive for linearly driving the support block. The method according to claim 3,
At least one of both ends of the first rotary shaft is coupled to the driven pulley,
The driven pulley is a device pickup module, characterized in that connected directly to the rotary drive unit or connected by a drive pulley and a belt rotated by a drive belt. The method according to claim 2 or 3,
And the first position is located above the bracket, and the second position is positioned opposite to the first position with respect to the first rotational axis. The method according to claim 2 or 3,
And a position alignment plate having a plurality of guide holes for guiding pickup and stacking of elements corresponding to the positions of respective pickup tools of the pickup unit. The method of claim 6,
The guide hole formed in the alignment plate is a device pick-up module, characterized in that the inclined surface extending in the outward direction of the alignment plate on at least one surface of the upper and lower surfaces based on the vertical direction of the bracket. The method of claim 6,
And a tapered hole into which the alignment pins installed in the respective pickup tools of the pickup unit are inserted. The method according to claim 8,
Each pick-up tool of the pick-up unit is fine in the X-axis, Y-axis, and Z-axis directions to enable alignment by the alignment between the alignment pin and the taper hole when the coupling direction with the support block is called Z-axis. Device pickup module, characterized in that installed to be movable. The method according to claim 5,
And the position alignment plate is coupled to an upper end of the pair of brackets. The method according to claim 2 or 3,
Each pickup tool of the pickup unit is characterized in that coupled to the pneumatic transfer block coupled to the support block. The method according to claim 2 or 3,
Device pickups further comprises one or more pneumatic transfer member is installed to connect the pair of guide blocks to each other to receive the pneumatic pressure from the external pneumatic generator device to transfer the pneumatic pressure to the pickup tools of the pickup portion module. The method according to claim 2,
The linear driving unit is installed to move along the guide member installed in the guide block and a pair of moving blocks fixedly coupled to the support block;
At least one cam member fitted with at least one of the pair of support blocks to move the support block along the guide member by rotation;
Device pickup module, characterized in that it comprises a cam rotation drive unit for rotating the cam member. The method according to claim 13,
The cam rotation drive unit
A second rotary shaft installed through the first rotary shaft to enable rotation with respect to the first rotary shaft and to which the cam member is fixedly coupled;
And a rotation motor connected directly to the second rotation shaft or connected by a rotation force transmission unit to rotate the second rotation shaft. The method according to claim 3,
The linear driving unit is installed to move along the guide member installed in the guide block and a pair of moving blocks fixedly coupled to the support block;
At least one cam member fitted with at least one of the pair of support blocks to move the support block along the guide member by rotation;
Device pickup module, characterized in that it comprises a cam rotation drive unit for rotating the cam member. The method of claim 12,
The cam rotation drive unit
A pair of second rotating shafts through which the first rotating shaft is installed so as to be rotatable with respect to the first rotating shaft, and to which the cam member is fixedly coupled;
And a rotation motor connected directly to the second rotation shaft or connected by a rotation force transmission unit to rotate the second rotation shaft. The method according to claim 16,
The first rotary shaft includes a hollow cylinder in which the central portion is in communication with the outside,
The device pickup module, characterized in that the pneumatic transfer line for delivering the pneumatic to the pickup tools of the pickup unit is installed through the hollow cylinder. The method according to any one of claims 13 to 17,
The support block includes an insertion member protruding in the axial direction of the second rotary shaft,
The cam member is formed with a guide groove for moving the insertion member is inserted,
The guide groove is a device pickup module, characterized in that the insertion member is formed to increase or decrease the distance to the second rotation axis by the rotation of the cam member. The method according to claim 18,
The guide groove forms a closed curve, and when the insertion member is closest to the second axis of rotation in the closed curve, the smallest point and the farthest point with respect to the second axis of rotation are the maximum points.
The closed curve is a device pickup module, characterized in that located in the alternate between the minimum point and the maximum point. The method according to claim 18,
The cam member is rotated in one direction, element pickup module, characterized in that for reciprocating rotation within a pre-installed reciprocating angle. A loading unit in which one or more trays in which a plurality of elements are loaded are loaded;
A first plate part which receives the elements from the tray of the loading part through a first transfer tool and heats them;
An inverted loading unit for picking up elements from the first plate unit and inverting the bottoms of the elements to face upwards;
A test module having test sockets in which each device is mounted to inspect electrical characteristics of the devices heated in the first plate unit;
The device pickup module according to any one of claims 13 to 17, wherein the devices picked up at the first position are transferred to the pickup unit, and the elements picked up at the pickup unit are rotated by the pickup unit to the second position. An element pick-up module mounted on a test socket for testing by the test module, and rotating the pick-up unit to a second position after the test module is finished;
A third transfer tool for transferring elements from the first inverted loading portion to the pickup portion positioned at the first position, and a fourth transfer tool for picking up the tested elements from the pickup portion positioned at the first position; ;
An inverse unloading unit configured to receive the elements from the fourth moving tool and invert them toward the lower side in the picked-up state;
An unloading plate on which elements picked up by the reverse unloading unit are loaded;
And an unloading unit configured to classify and load elements loaded on the second plate unit according to a result of the test module through a second transfer tool. The method according to claim 21,
The first plate portion includes a plate-like plate member having a plurality of loading grooves formed on an upper surface thereof to allow the elements to be loaded, and a heating device installed on the inner or bottom surface of the plate member to heat the elements to a predetermined test temperature. Device handler, characterized in that. The method according to claim 22,
The loading grooves of the plate member are arranged in accordance with the interval of the test sockets, or the device handler, characterized in that arranged in the interval corresponding to the interval of the receiving grooves of the tray. The method according to claim 22,
The loading grooves of the plate member are element handlers, characterized in that half of the interval of the pickup tools forming the reverse loading portion. The method according to claim 22,
And the first plate part comprises a pair of plate members which can be moved alternately with each other. The method according to claim 25,
And the pair of plate members are installed to alternately move a loading position capable of receiving the elements from the tray of the loading unit and a transfer position of the reverse loading unit capable of withdrawing the element. The method according to claim 25,
The pair of plate members are installed at intervals up and down so as not to interfere with each other, one or more guide members for guiding the linear movement of the plate member and a linear driving device for driving the linear movement of the plate member. Device handler, characterized in that. The method according to claim 21,
The reverse loading unit is provided with a plurality of pick-up tools for picking up each element to transfer a plurality of elements, and the pick-up tools are supported and picked up elements from the first plate part in an XY direction by an XY linear moving device. Device handler comprising a support that is moved to. 29. The method of claim 28,
And the reverse loading unit further comprises a rotation moving device which rotates the support to pick up the elements from the first plate part and rotate the inverted side so that the bottoms of the elements face upward. The method according to claim 21,
The reverse unloading unit is provided with a plurality of pickup tools for picking up each element to transfer a plurality of elements, and the pickup tools are supported and installed in the XY direction by an XY linear moving device to load the elements onto the unloading plate. Device handler comprising a support that is moved to. The method of claim 30,
And the reverse unloading unit further comprises a rotation device for rotating the support to pick up the elements and rotate the bottom of the elements to rotate downward. The method according to claim 21,
And the third transfer tool and the fourth transfer tool move in cooperation with each other through one moving device.

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