KR20110059398A - Dispenser appratus and method for the same - Google Patents

Abstract

PURPOSE: A coating apparatus is provided to prevent the proceeding of a process in a state where the end of a nozzle is in contact with the upper part of a substrate and to easily set a reference point of a gap sensor. CONSTITUTION: A coating apparatus(2000) comprises a head block(2100). The head block includes: a discharge unit(2110) equipped with a nozzle discharging raw materials to a substrate; a gap sensor(2120) measuring the gap between a nozzle of the discharge unit and a substrate; a support unit(2130) in which the discharge unit is installed at one side thereof and the gap sensor is installed at the other side; a slide unit(2140) which liftes the discharge unit by counteraction when the nozzle of the discharge unit collides with the substrate; and a displacement detector(2150) sensing the movement in which the discharge unit is lifted by the slide unit.

Description

Dispenser appratus and method for the same}

TECHNICAL FIELD The present invention relates to a coating apparatus and a control method thereof, and more particularly, to a coating apparatus and a control method thereof, in which a measurement reference point of a gap sensor can be easily set.

Conventionally, a CRT (Cathode Ray Tube) is used as a display device. This has the disadvantage of being bulky and heavy. Recently, the use of liquid crystal display panels (LCDs), plasma display panels (PDPs), organic light emitting devices (OLEDs), and flat panel displays has increased. It is characterized by light weight, thinness and low power consumption.

In the case of such a flat panel display panel, a pair of flat panel type boards are bonded together and manufactured. That is, the lower substrate of the liquid crystal display panel and the upper substrate on which the color filter and the common electrode are formed are manufactured. Thereafter, a pattern made of a metal paste is formed on at least one of the upper substrate and the lower substrate for energizing the upper substrate and the lower substrate.

A coating apparatus for applying a metal paste to at least one of an upper substrate and a lower substrate includes a dispenser including a stage on which a substrate is placed, a nozzle for discharging a raw material, for example, metal paste, onto a substrate on the stage, and a gap between the substrate and the nozzle. and a sensor for measuring a gap, a driver for lifting and lowering the dispenser, a transfer unit for horizontally moving the dispenser, and a controller for controlling the operation of the dispenser.

In order to apply the metal paste onto the substrate using a conventional coating apparatus, a gap between the substrate and the nozzle is first measured using a sensor. Then, the dispenser is raised and lowered by the driving unit by the measured value to adjust the gap between the substrate and the nozzle. At this time, in order to accurately control the gap between the substrate and the nozzle, the measurement reference point of the gap sensor should be the upper surface of the substrate. To this end, conventionally, the touch sensor is disposed at the same height as the height at which the substrate is disposed. When the tip of the nozzle contacts the touch sensor by lowering the dispenser, a signal indicating that the nozzle and the touch sensor are in contact is transmitted to the gap sensor. In the gap sensor, the upper surface of the substrate is set as a measurement reference point by the transmitted signal. Thus, when controlling the gap between the substrate and the nozzle through the gap sensor, it was possible to set the upper surface of the substrate to be a reference point for measuring the gap between the substrate and the nozzle. However, when the end of the nozzle touches the touch sensor, the raw material remaining in the nozzle is buried in the touch sensor. If raw material gets on the touch sensor, measurement error may occur, so touch sensor should be cleaned. At this time, in general, the touch sensor is cleaned using a cleaning material such as acetone. There is a problem that the touch sensor is damaged by the cleaning material. This makes it impossible to precisely control the gap between the substrate and the nozzle, resulting in a defective element.

Accordingly, an embodiment of the present invention provides a coating apparatus that allows the discharge unit to move up and down by reaction when the nozzle of the discharge unit collides with the substrate, and detects the displacement unit to easily set the reference point of the gap sensor. do. In addition, an embodiment of the present invention provides a coating apparatus and a control method thereof that can stably apply a raw material on a substrate.

The coating apparatus according to the present invention comprises a discharge unit having a nozzle for discharging a raw material on a substrate, a gap sensor for measuring a gap between the nozzle of the discharge unit and the substrate, the discharge unit is mounted on one side A support part on which the gap sensor is mounted on the other side, a slide part which is disposed between the support part and the discharge unit to raise the discharge unit by reaction when the nozzle of the discharge unit collides with the substrate; The discharge unit includes a head block having a displacement detection unit for detecting a rising movement.

The discharge unit includes a syringe for storing the raw material, a nozzle connected to the syringe for discharging the raw material on the substrate, a syringe and a fixing portion to which the nozzle is mounted and fixed.

The support portion is provided with a stopper to protrude in the direction in which the discharge unit is arranged.

The fixing part includes a protrusion part of which a part is formed to protrude in the direction in which the stopper is disposed, and the protrusion part is disposed correspondingly to the upper side of the stopper.

The slide portion is disposed in the lower region of the stopper.

An LM guide is used as the slide part.

A linear encoder is used as the displacement detection unit.

The displacement detection unit includes a displacement sensor mounted on an upper portion of the fixing portion, and a scale mounted on an upper region of the stopper of the support portion so as to face the displacement sensor.

Preferably, the displacement sensor moves with the discharge unit.

The displacement detection unit and the gap sensor are connected in signal form.

When the rising of the discharge unit is detected through the displacement detection unit, a signal detected by the displacement detection unit is transmitted to the gap sensor.

In the gap sensor, the upper surface of the substrate is set as a measurement reference point by a signal transmitted from the displacement detection unit.

During the process of discharging the raw material onto the substrate through the nozzle, when the end of the nozzle collides with the upper surface of the substrate, the slide unit is operated by reaction to elevate the discharge unit.

It includes a driving unit for raising and lowering the entire head block.

The entire head block is lifted up and down by the drive unit, and the discharge unit constituting the head block is raised by the slide unit acting by reaction when the nozzle collides with the substrate.

The control method of the coating apparatus according to the present invention includes a discharge unit having a nozzle for discharging raw material onto a substrate, a gap sensor for measuring a gap between the nozzle of the discharge unit and the substrate, and the nozzle collides with the substrate. A control method of a coating apparatus comprising a slide unit for raising the discharge unit by a reaction when the reaction, a head block having a displacement detection unit for detecting the movement of the discharge unit is raised and a drive unit for lifting and lowering the head block, The head block is lowered using the driving unit to cause the nozzle end of the discharge unit to collide with the substrate, and the slide unit is operated by a reaction when the nozzle end of the discharge unit collides with the substrate. Raising, detecting the upward movement of the discharge unit through the displacement detection unit, through the displacement detection unit If the upward movement of the outlet unit is detected, transmitting the detected upward movement signal of the discharge unit to the gap sensor, and setting a measurement reference point for measuring a gap between the substrate and the nozzle in the gap sensor; do.

When the nozzle end of the discharge unit collides with the substrate, the slide unit operates to raise the discharge unit, and only the discharge unit constituting the head block rises.

The gap sensor address sets the upper surface of the substrate as a measurement reference point by a signal transmitted from the displacement detection unit.

After setting the measurement reference point of the gap sensor, by using the drive unit to raise and lower the entire head block to adjust the gap (gap) between the nozzle and the substrate.

After adjusting the gap between the nozzle and the substrate, in the step of applying the raw material on the substrate through the nozzle, the end of the nozzle during the process of discharging the raw material on the substrate through the nozzle When colliding with the upper surface of the substrate, the slide unit is operated by the reaction to lift the discharge unit.

As described above, when the nozzle of the discharge unit collides with the substrate, the slide unit connected to the discharge unit is operated by reaction. The discharge unit is raised by the operation of the slide unit, and the displacement detection unit detects that the lifting unit is lifted and lifted. The signal sensed by the displacement detection unit is transmitted to the gap sensor, and the gap sensor sets the upper surface of the substrate as a measurement reference point through the transmitted signal. Therefore, when measuring the gap between the substrate and the nozzle through the gap sensor, the upper surface of the substrate can accurately and easily set the reference point for measuring the gap between the substrate and the nozzle. Therefore, the mechanism point for measuring the gap between the substrate and the nozzle can be set without using a touch sensor as in the prior art.

In addition, it is possible to prevent the substrate from being scratched by the end of the nozzle during the process of applying the raw material on the substrate. That is, when the tip of the nozzle collides with the upper portion of the substrate by an error of the coating device while applying the raw material onto the substrate through the nozzle, the discharge unit is raised by the slide part. And the operation | movement of an application | coating device is complete | finished and an application | coating process is stopped. For this reason, it can prevent that a board | substrate is damaged by a nozzle by preventing a process from advancing in the state which the tip of a nozzle contacted the upper part of a board | substrate during an application | coating process.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. It will be apparent to those skilled in the art that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know. Like numbers refer to like elements in the figures.

1 is a conceptual diagram of a coating apparatus according to an embodiment of the present invention. 2 is a cross-sectional view of the dispenser according to the embodiment of the present invention.

1 and 2, the coating apparatus includes a dispenser including a stage 1000 on which the substrate 100 is placed, and a nozzle 2112 for discharging raw material onto the substrate 100 placed on the stage 1000. And a control unit 400 that controls operations of the transfer unit 300, the transfer unit 300, and the dispenser 2000. In the embodiment, a metal paste is used as the coating material. Of course, the present invention is not limited thereto, and various coating materials may be used.

The stage 1000 is preferably manufactured in a shape corresponding to the substrate 100 in order to settle the substrate 100. In the embodiment, a rectangular substrate 100 is used as the substrate 100. Thus, the stage 1000 also uses the stage 1000 in a rectangular shape. Although not shown, the stage 1000 may be provided with a separate mounting means for placing the substrate 100. In this case, an electrostatic chuck or a vacuum fixing device may be used as the seating means. When using the vacuum fixing device, a plurality of holes communicating with the vacuum pump may be provided on the upper side of the stage 1000. Through this, the substrate 100 on which the substrate 100 is placed may be fixed onto the stage 1000.

The substrate 100 according to the embodiment may be any one of the upper substrate 100 and the lower substrate 100 used in the liquid crystal display panel. In this case, although not shown, the upper substrate 100 may include, for example, a color filter and a common electrode, and the lower substrate 100 may include, for example, a plurality of thin film transistors and a pixel electrode. Then, the liquid crystal is dropped into any one of the upper substrate 100 and the lower substrate 100. Thereafter, at least one of the upper substrate 100 and the lower substrate 100 is coated with a metal paste for energizing the upper substrate 100 and the lower substrate 100 by using the coating apparatus according to the embodiment.

The dispenser 2000 moves in the X-axis and Y-axis directions by the transfer part 300 to apply a raw material, for example, metal paste, onto the substrate 100. At this time, the transfer unit 300 moves the dispenser 2000 in the X-axis and Y-axis directions using a motor and a rail. Of course, various other means can be used. In addition, in the above description, the dispenser 2000 is moved horizontally in the X-axis and Y-axis directions. However, the present invention is not limited thereto, and the stage 1000 may move in the X-axis and Y-axis directions to apply a raw material on the substrate 100. In addition, both the stage 1000 and the dispenser 2000 may move in the X-axis and Y-axis directions to apply the raw material, and the stage 1000 may move in one axis direction and the dispenser 2000 may move in the other axis direction. It is also possible to apply the raw material.

Referring to FIG. 2, the dispenser 2000 includes a head block 2100 for applying a raw material onto the substrate 100 and a driving unit 2200 for lifting up and down the head block 2100. Here, a discharge unit 2110 having a nozzle 2112 for discharging raw material onto the substrate 100, a gap sensor 2120 for measuring a gap between the nozzle 2112 and the substrate 100, and a discharge unit at one side thereof. The discharge unit 2110 is disposed between the support unit 2130, the support unit 2130, and the discharge unit 2110, which are mounted in a shape in which the gap sensor 2120 is mounted on the other side and is extended in a vertical direction. It includes a slide unit 2140 for sliding in the vertical direction and the displacement detection unit 2150 installed on the discharge unit 2110 to detect the movement of the discharge unit 2110. Here, the slide unit 2140 according to the embodiment operates by reacting when the nozzle 2112 of the discharge unit 2110 collides with the substrate 100, thereby raising the discharge unit 2110. The stopper 2132 is mounted at one end of the support part 2130 in the direction in which the discharge unit 2110 is disposed, and the stopper 2132 restricts the lowering of the discharge unit 2110.

The discharge unit 2110 is a nozzle 2112 installed at a lower portion of the syringe 2111 in which the raw material is stored, for example, the metal paste, and discharges the raw material stored in the syringe 2111 onto the substrate 100. ), And a fixing portion 2113 to which the syringe 2111 and the nozzle 2112 are mounted and fixed. At this time, the nozzle 2112 and the syringe 2111 of the discharge unit 2110 can be detached from the fixing part 2113, so that the nozzle 2112 and the syringe 2111 can be replaced. In addition, the fixing portion 2113 is a straight portion 2113a extending in the vertical direction, the first protrusion 2113b and a straight portion 2113a which are located above the straight portion 2113a and protrude in the direction in which the stopper 2132 is disposed. The second protrusion 2113c is disposed below the first protrusion 2113b and protrudes in the opposite direction to the first protrusion 2113b. At this time, it is preferable to install the discharge unit 2110 so that the first protrusion 2113b is located on the upper side of the stopper 2132, and mount the syringe 2111 and the nozzle 2112 on the second protrusion 2113c. . In this way, the stopper 2132 is positioned below the first protrusion 2113b of the fixing part 2113 so that the lower part of the first discharge part of the fixing part 2113 is stopped by the lifting and lowering of the discharge unit 2110. 2132 may be in contact with or separated from. Therefore, the lowering of the first protrusion 2113b is limited by the stopper 2132.

The gap sensor 2120 measures the separation distance between the substrate 100 and the nozzle 2112, and moves the head block 2100 up and down through the driving unit 2200 according to the measurement result, so that the substrate 100 and the nozzle 2120. Keep the gap between 2112 always constant. The gap sensor 2120 uses a distance measuring sensor using light, for example, a laser. Although not illustrated by the gap sensor 2120 in the embodiment, a light emitting unit (not shown) for outputting the distance measuring light toward the substrate 100 and a light receiving unit for receiving the light emitted from the light emitting unit (not shown) ( Not shown). At this time, the light emitting unit (not shown) and the light receiving unit (not shown) is made of one body, it is preferable that the predetermined distance is disposed. In order to accurately measure the gap between the nozzle 2112 and the substrate 100 using the gap sensor 2120, the upper surface of the substrate 100 should be set to be a reference point. That is, the distance from which the nozzle 2112 is spaced apart from the upper surface of the substrate 100 should be measured using the upper surface of the substrate 100 as a reference point. This is because characteristics such as the shape and width of the pattern of the raw material applied on the substrate 100 vary depending on the gap between the nozzle 2112 and the substrate 100.

The slide part 2140 raises the discharge unit 2110 when the end of the nozzle 2112 of the discharge unit 2110 collides with the upper surface of the substrate 100. That is, when the end of the nozzle 2112 collides with the upper surface of the substrate 100, the slide unit 2140 connected to the discharge unit 2110 is operated by reaction to raise the discharge unit 2110. That is, in the exemplary embodiment, the discharge unit 2110 is raised when the end of the nozzle 2112 collides with the substrate 100 by using the slide portion 2140, thereby providing a substrate as a measurement reference point of the gap sensor 2120 ( 100) Detect the position of the upper surface. The slide part 2140 is installed to connect between the support part 2130 and the fixing part 2113 of the discharge unit 2110, and is preferably installed below the stopper 2132 of the support part 2130. In the embodiment, for example, the LM guide is used as the slide portion 2140. Of course, the present invention is not limited thereto, and any means capable of raising the discharge unit 2110 in the opposite direction may be used by using a force when the end of the nozzle 2112 collides with the upper surface of the substrate 100.

The displacement detection unit 2150 detects a movement in which the discharge unit 2110 is lifted by the slide unit 2140 when the tip of the nozzle 2112 of the discharge unit 2110 collides with the substrate 100, thereby causing a gap. It serves to easily set the reference point of the sensor 2120. In the embodiment, a linear encoder that measures position values using electrical or optical characteristics is used as the displacement detection unit 2150. Of course, the present invention is not limited thereto, and any means capable of detecting the movement of the discharge unit 2110 may be used. The displacement detection unit 2150 includes a displacement sensor 2151 mounted on an upper portion of the fixing unit 2113 of the discharge unit 2110 and a scale 2152 mounted on the support unit 2130 so as to face the displacement sensor 2151. . In the embodiment, a linear head is used as the displacement sensor 2151. The displacement detection unit 2150 is signaledly connected to the gap sensor 2120, and the signal sensed by the displacement detection unit 2150 is transmitted to the gap sensor 2120. Therefore, when the end of the nozzle 2112 collides with the upper surface of the substrate 100 and the movement of the discharge unit 2110 is lifted by the slide unit 2140 is detected by the displacement detection unit 2150, the detected signal is gap. Sent to sensor 2120. Through this, the gap sensor 2120 may set the upper surface of the substrate 100 as a reference point.

3A to 3D are cross-sectional views sequentially illustrating a method of setting a measurement reference point of a gap sensor of the coating apparatus according to an embodiment of the present invention and measuring a gap between the substrate and the nozzle using the measurement reference point. Hereinafter, referring to 3a to 3d, a measuring reference point of the gap sensor is set using the coating apparatus according to the embodiment, and a method of measuring the gap between the substrate and the nozzle using the same will be described.

Referring to FIG. 3A, first, the entire head block 2100 is lowered by using the driving unit 2200. At this time, as shown in Figure 3b it is preferable to lower until the end of the nozzle 2112 of the discharge unit 2110 is in contact with the upper surface of the substrate 100. When the end of the nozzle 2112 collides with the upper surface of the substrate 100 by the lowering of the head block 2100, the slide unit 2140 connected to the discharge unit 2110 is operated by reaction. In addition, the operation of the driver 2200 is terminated. Thus, as shown in FIG. 3C, the discharge unit 2110 is raised by the operation of the slide unit 2140. At this time, the support unit 2130 supporting the discharge unit 2110 does not rise, but only the discharge unit 2110 is raised by the slide unit 2140. As the discharge unit 2110 rises as described above, a lower portion of the first protrusion 2113b of the fixing portion 2113 and an upper portion of the stopper 2132 are separated. At this time, since the displacement sensor 2151 of the displacement detection unit 2150 is mounted on the discharge unit 2110, the displacement sensor 2151 rises together. The displacement sensor 2151 detects the upward movement of the discharge unit 2110 by reading the scale of the scale 2152 installed so as to face the displacement sensor 2151 and calculating the distance in units of distance. In brief, the ejection unit 2110 and the displacement sensor 2151 are raised by the slide unit 2140 as the nozzle 2112 collides with the substrate 100. Accordingly, the position of the displacement sensor 2151 before the end of the nozzle 2112 collides with the substrate 100 is different from the position of the displacement sensor 2151 after the end of the nozzle 2112 collides with the substrate 100. . Thus, using the scale 2152 displaces the sensor 2151 away from its initial position (the position at the scale 2152 of the displacement sensor 2151 before the end of the nozzle 2112 collides with the substrate 100). By detecting, the movement of the discharge unit 2110 is detected. At this time, the rising of the discharge unit 2110 means that the end of the nozzle 2112 and the substrate 100 are in contact, so that the starting point of the rising of the discharge unit 2110 is the measurement reference point of the gap sensor 2120. It means the upper surface. The upward movement signal of the discharge unit 2110 detected by the displacement detection unit 2150 is transmitted to the gap sensor 2120. The gap sensor 2120 sets the upper surface of the substrate 100 as a measurement reference point by the transmitted signal. As a result, when the gap between the substrate 100 and the nozzle 2112 is controlled by the gap sensor 2120, a reference point for measuring the gap between the upper surface of the substrate 100 and the nozzle 2112 is measured. It can be set as easily as possible.

Next, as shown in FIG. 3D, the gap between the substrate 100 and the nozzle 2112 is adjusted using the gap sensor 2120. That is, the gap between the substrate 100 and the nozzle 2112 is measured by irradiating light onto the substrate 100 from the gap sensor 2120. In this case, since the measurement reference point of the gap sensor 2120 is set in the same manner as above, the distance from which the nozzle 2112 is spaced apart from the upper surface of the substrate 100 may be accurately measured. As a result, the gap between the nozzle 2112 and the substrate 100 can be accurately adjusted.

In addition, although not shown, it is possible to prevent the substrate 100 from being scratched by the end of the nozzle 2112 during the process of applying the raw material on the substrate 100 according to the embodiment. That is, if the end of the nozzle 2112 collides with the upper surface of the substrate 100 due to an error of the waveguide device while applying the raw material onto the substrate 100 through the nozzle 2112, the slide portion 2140. The discharge unit 2110 is raised and lowered. And the operation | movement of an application | coating device is complete | finished and an application | coating process is stopped. Thus, by preventing the process from being carried out while the end of the nozzle 2112 is in contact with the upper surface of the substrate 100 during the coating process, it is possible to prevent the substrate 100 from being damaged by the nozzle 2112.

On the other hand, when the end of the nozzle 2112 collides with the upper surface of the substrate 100, the technique of raising the discharge unit 2110 by using a reaction is not limited to the structure of the coating apparatus described above, various structural changes are possible. .

1 is a conceptual diagram of the coating device according to an embodiment of the present invention

2 is a cross-sectional view of the dispenser according to an embodiment of the present invention.

3A to 3D are cross-sectional views sequentially illustrating a method of setting a measurement reference point of a gap sensor of the coating apparatus according to an embodiment of the present invention and measuring a gap between the substrate and the nozzle using the measurement reference point.

<Explanation of symbols for the main parts of the drawings>

2100: head block 2110: discharge unit

2112: nozzle 2120: gap sensor

2130: support portion 2140: slide portion

2150: displacement detection unit 2200: drive unit

Claims (20)

A discharge unit having a nozzle for discharging the raw material on the substrate; A gap sensor measuring a gap between the nozzle of the discharge unit and the substrate; A support unit on which one side of the discharge unit is mounted and the other side of the gap sensor is mounted; A slide unit disposed between the support unit and the discharge unit to raise the discharge unit by a reaction when a nozzle of the discharge unit collides with a substrate; And a head block provided with a displacement detection unit for detecting a movement of the discharge unit ascending by the slide unit. The method according to claim 1, The discharge unit includes a syringe for storing the raw material, a nozzle connected to the syringe for discharging the raw material on the substrate, the syringe and the fixing portion fixed to the nozzle is mounted. The method according to claim 1, And a stopper is installed on the support to protrude in the direction in which the discharge unit is disposed. The method according to claim 2, And the fixing part includes a protrusion part partially formed to protrude in the direction in which the stopper is disposed, and the protrusion part is disposed to correspond to the upper side of the stopper. The method according to claim 1, And the slide portion is disposed in a lower region of the stopper. The method according to claim 1, Applicator using the LM guide as the slide portion. The method according to claim 1, And a linear encoder using the displacement detection unit. The method of claim 7, And the displacement detection unit includes a displacement sensor mounted on an upper portion of the fixing portion, and a scale mounted on an upper region of the stopper of the support portion so as to face the displacement sensor. The method according to claim 8, And the displacement sensor moves together with the discharge unit. The method according to claim 1, And the displacement detection unit and the gap sensor are connected in signal form. The method according to claim 10, And when the rising of the discharge unit is detected through the displacement detection unit, a signal sensed by the displacement detection unit is transmitted to a gap sensor. The method of claim 11, And the gap sensor sets the upper surface of the substrate as a measurement reference point by a signal transmitted from the displacement detection unit. The method according to claim 1, And a slide unit is operated by a reaction by lifting and lowering the discharge unit when the end of the nozzle collides with the upper surface of the substrate during the process of discharging the raw material onto the substrate through the nozzle. The method according to claim 1, Applicator comprising a drive for raising and lowering the entire head block. The method according to claim 1, And the entire head block is lifted up and down by the drive unit, and the discharge unit constituting the head block is lifted by the slide unit acting in reaction when the nozzle collides with the substrate. A discharge unit having a nozzle for discharging raw material onto a substrate, a gap sensor for measuring a gap between the nozzle of the discharge unit and the substrate, and raising the discharge unit by reaction when the nozzle collides with the substrate A control method of an applicator including a slide unit for driving, a head block having a displacement detection unit for detecting a movement of the discharge unit, and a driving unit for raising and lowering the head block, Lowering the head block by using the driving unit so that the nozzle end of the discharge unit collides with the substrate; A slide unit is operated by a reaction when the nozzle end of the discharge unit collides with a substrate to raise the discharge unit; Detecting an upward movement of the discharge unit through the displacement detection unit; When the upward movement of the discharge unit is detected through the displacement detection unit, a measurement reference point for transmitting the detected upward movement signal of the discharge unit to the gap sensor and measuring a gap between the substrate and the nozzle in the gap sensor Control method of the coating device comprising the step of setting. 18. The method of claim 16, And a slide unit is operated by a reaction when the nozzle end of the discharge unit collides with the substrate to raise the discharge unit, wherein only the discharge unit constituting the head block rises. 18. The method of claim 16, And the gap sensor sets the upper surface of the substrate as a measurement reference point by a signal transmitted from the displacement detection unit. 18. The method of claim 16, And setting a measurement reference point of the gap sensor, and then adjusting the gap between the nozzle and the substrate by raising and lowering the entire head block using the driving unit. The method of claim 19, After adjusting the gap between the nozzle and the substrate, in the step of applying the raw material on the substrate through the nozzle, the end of the nozzle during the process of discharging the raw material on the substrate through the nozzle A control method of a coating apparatus for lifting and lowering the discharge unit when the slide unit is operated by reaction when colliding with the upper surface of the substrate.

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