KR20110024474A - Stage moving device - Google Patents

Abstract

PURPOSE: A stage moving device is provided to prevent a load port module from being damaged by fixing a foup using a cap. CONSTITUTION: A cylindrical shaft(240) passes through a hole formed on a connection plate and is connected to a cylinder unit. The cylindrical shaft horizontally moves by the piston movement of the cylinder unit. One end of a spring(300) is fixed to the end of the shaft and the other end thereof are fixed to one side of the connection plate. A pinch sensing plate is fixed to the shaft on the other side of the connection plate. A cap(250) is fixed to the end of the shaft, covers the spring and is separated from the connection plate. A controller transmits a control signal for controlling the piston movement of the cylinder unit to the cylinder unit.

Description

Stage mover {STAGE MOVING DEVICE}

The present invention relates to a stage shifting device in a load port module, and more particularly, by using a cap to securely secure the pull to facilitate the coupling of the pull door and the opener, and to attach a pinch sensor to recognize the pinch state, A stage moving device for preventing damage to the module.

The present invention relates to a stage moving device of a load port module.

As is well known, semiconductor devices are manufactured by carrying out various processing steps on a wafer. Therefore, it is necessary to convey to the semiconductor manufacturing apparatus which performs various processes with respect to a wafer. The wafer storage carrier is used for conveyance of this wafer, and it is a structure which can accommodate several wafer inside.

Therefore, a FOUP that seals the wafers aligned inside from the outside with a door on the front and loading / unloading of the fules mounted on one side of each process facility when these pools are transferred to each process facility. LOAD PORT MODULE is used to open and close the pull door while sealing the inside of the pull from the outside.

This is commonly referred to as FOUP OPENER, OPENER, FIMS OPENER.

1 is a perspective view showing a general load port module.

Referring to FIG. 1, when the pull 140 is seated on the stage 100, the general load port module moves the pull toward the opener 110 through a stage moving device (not shown).

Then, when the pull 140 abuts the opener 110, the pull door 150 is coupled with the opener 110, and the opener 110 and the pull door 150 are opened together so that the wafer loaded on the pull 140. Is moved to a semiconductor facility for use in the process.

At this time, the stage 100 is located in the undocking state where the stage 100 moves outward as much as possible so that the stage 100 is seated, and the stage 100 moves toward the opener 110 to be coupled with the opener 110. The abutment is called a docking state.

Here, the conventional stage shifting device does not recognize a pinch state caused by a foreign matter such as a wafer sandwiched between the pull door 150 and the opener 110, thereby causing damage to the equipment or firmly fixing the pull 140. In some cases, foreign substances were inserted into the interior.

An object of the present invention devised to solve the above problems is to provide a stage shifting device to securely secure the pull using a cap to facilitate the combination of the pull door and the opener, and to prevent the insertion of foreign matter.

In addition, another object of the present invention is to provide a position sensor that can determine whether the docking, docking to prevent malfunction, even after docking by pulling the shaft further toward the inner direction of the cylinder to release the cap by pressing the connecting plate It is to provide a stage shifting device that is securely attached to the opener and fixed to prevent the insertion of foreign matter.

In addition, another object of the present invention is to provide a stage moving device to prevent the damage to the load port module by attaching a pinch sensor unit for recognizing the pinch state occurs when the jamming occurs by foreign matter such as wafer between the pull door and the opener. to be.

In addition, another object of the present invention is to provide a stage shifting device that prevents the pinch sensor portion from recognizing the pinch state during stage movement by controlling the movement speed of the shaft, and enables more stable stage transfer.

Further, another object of the present invention is to provide a stage shifting device that is easy to manufacture, replace and construct by replacing one shaft with two shafts.

According to a feature of the present invention for achieving the object as described above, the present invention is a load port module, the plate-shaped stage that is loaded on the upper surface, the movement guide portion fixed to the lower surface of the stage, the movement guide portion Coupled to the stage slides, the support portion is connected to the body of the load port module, is installed in the vertical direction downward from the stage, the connection plate is formed hole, the cylinder portion fixed to one side of the support portion, the hole formed in the connection plate A cylindrical shaft penetrating and connected to the cylinder portion to move horizontally by a piston movement of the cylinder portion, one end of which is fixed to the end of the shaft, the other end of which is fixed to one side of the connecting plate, on the other side of the connecting plate Pinch detection plate fixed to the shaft, fixed to the end of the shaft to cover the spring, but only a certain distance from the connecting plate And a cap for exposing a portion of the spring so as to be spaced apart from each other, and a controller for transmitting a control signal for controlling the piston movement of the cylinder.

In addition, the stage shifting device is installed in the sensing sensor plate installed in the lower vertical direction to the connecting plate, when the stage is in the undocked position when the stage is in the undocked position, the sensor plate is located between, the undocking position for sensing the sensing sensor plate The docking position sensor is installed on the lower surface of the support side by side with the sensor and the undocking position sensor, and when the stage is in the docking position, the sensing sensor plate is positioned therebetween, and the docking position sensor and the control unit detect the sensing sensor plate. If the sensor detects the pressure, the piston sends a control signal to the cylinder to stop the movement of the shaft and stops the movement of the shaft.If the docking position sensor detects the sensing sensor plate, the shaft moves to the inside of the cylinder by the remaining cylinder stroke. To pull further and send a control signal to the cylinder .

The stage shifting device may further include a pinch sensor unit installed on the connecting plate and having a switch contact unit, and transmitting a pinch signal indicating a pinch state to the control unit when the pinch detection plate contacts the switch contact unit, wherein the control unit includes a docking position. When the sensor does not detect the sensing sensor plate and receives the pinch signal from the pinch sensor unit, the sensor unit may transmit a control signal to the cylinder unit to control the cylinder to push the shaft outward.

In addition, the control unit is characterized in that for transmitting a control signal for adjusting the moving speed of the shaft which is horizontally moved by the piston movement of the cylinder portion.

In addition, the shaft includes a first shaft having a pinch detection plate formed through the hole formed in the connecting plate, surrounding the outer circumferential surface and a second shaft connected to the first shaft to move horizontally by the piston movement of the cylinder portion. do.

According to the present invention as described above, it is possible to provide a stage shifting device to securely secure the pull using the cap to facilitate the coupling of the pull door and the opener, and to prevent the insertion of foreign matter.

In addition, according to the present invention is provided with a position sensor that can determine whether the docking, docking to prevent malfunction, and even after docking by pulling the shaft further toward the inner direction of the cylinder, the cap presses the connecting plate to the release opener It is possible to provide a stage shifting device which can be securely attached and fixed to prevent the insertion of foreign matter.

Further, according to the present invention, a pinch sensor unit for recognizing a pinch state occurring when a pinch occurs due to a foreign matter such as a wafer is provided between the pull door and the opener, thereby providing a stage shifting device that prevents damage to the load port module.

In addition, according to the present invention, by controlling the moving speed of the shaft, it is possible to provide a stage moving device that prevents the pinch sensor unit from recognizing the pinch state during stage movement, and enables more stable stage transfer.

In addition, according to the present invention by replacing one shaft with two shafts, it is possible to provide a stage shifting device that is easy to manufacture, replace and construct.

Specific details of other embodiments are included in the detailed description and the drawings.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Hereinafter, the present invention will be described with reference to the drawings for describing the stage moving apparatus according to embodiments of the present invention.

Figure 2 is a top perspective view showing a stage moving device according to a preferred embodiment of the present invention, Figure 3 is a bottom perspective view showing a stage moving device according to a preferred embodiment of the present invention, Figure 4 is a preferred embodiment of the present invention It is a side view which shows the stage shifter.

Stage moving apparatus 10 according to a preferred embodiment of the present invention is the stage 100, the movement guide portion 360, the support portion 210, the connecting plate 220, the cylinder portion 230, the shaft 240, the spring ( 300, a pinch detection plate 370, a cap 250, and a controller (not shown).

The stage 100 is loaded with the pull 140 on the upper surface, and is manufactured in a plate shape.

It is preferable that grooves or protrusions are formed on the upper surface of the stage 100 to engage with the lower surface of the extract 140 so that the extract 140 is seated and fixed.

The movement guide part 360 is fixedly installed on the lower surface of the stage, and slides the stage at the support part 210 to enable reciprocating movement.

The movement guide portion 360 is a linear motion slide slide (not shown) coupled to the stage 100 and coupled with the slide unit (not shown) and the support portion 210 to which the slide unit can reciprocate on and off. It is preferable to include.

The support part 210 is coupled to the movement guide part 360 to slide the stage 100 and is connected to the body 130 of the load port module.

By being connected to the body 130 of the load port module, the support portion 210 is fixed, and the cylinder portion 230 connected to the support portion 210 is also fixed to slide the stage 100 by the cylinder portion 230. have.

The connecting plate 220 is installed downward from the stage 100 in a vertical direction, and a hole is formed therein.

The connecting plate 220 connects the stage 100 with the shaft 240, the sensing sensor plate 310, the pinch sensor unit 320, and the spring 300 to connect the components according to the reciprocating movement of the stage 100. To work.

In addition, the connecting plate 220 has a hole formed therein, for the shaft 240 to penetrate.

The cylinder part 230 is fixedly installed on one side of the support part 210 and reciprocates the shaft 240 horizontally as the piston moves therein.

The cylinder unit 230 may be any one of a hydraulic cylinder, a pneumatic cylinder, and a gas cylinder.

The shaft 240 penetrates a hole formed in the connecting plate 220, and is connected to the inside of the cylinder 230 to horizontally move by a reciprocating motion of the piston of the cylinder 230.

The shape is preferably cylindrical, but may be the same as the shape of the hole formed in the connecting plate 220.

One end of the spring 300 is fixed to the end of the shaft 240, the other end is fixed to one side of the connecting plate 220.

That is, the shaft 240 penetrating through the connecting plate 220 is inserted into the spring 300, and the shaft 300 is fixedly installed between the end of the shaft 240 and the connecting plate 220.

The spring 300 is compressed by the shaft 240 is pulled inward by the cylinder portion 230, thereby pushing the connecting plate 220 with the elastic force of the compressed spring 300, and eventually the stage 100 plate Move to the opener 110 side.

The pinch detection plate 370 is fixedly installed on the shaft 240 at the other side of the connecting plate 220, and the shape of the pinch detection plate 370 is preferably a disc covering the outer circumferential surface of the shaft 240.

When the shaft 240 is pushed outward by the cylinder part 230 in the docked state, the pinch detection plate 370 is installed on the opposite side of the connecting plate 220 to which the spring 300 is connected. The connecting plate 220 is pushed outward, and thus the stage 100 is moved and undocked.

In addition, the pinch detection plate 370 detects a pinch state, which will be described later.

Cap 250 is fixed to the end of the shaft 240 is formed to cover a portion of the spring 300, and is spaced apart from the connecting plate 220.

Therefore, the cap 250 is fixedly installed at one end of the end of the shaft 240, one end is open and the shaft 240 is pulled inward in the main docking state, or foreign matter is loosened 140 and opener ( If the pinch state is pinched between the (110) is to contact the connecting plate 220.

In addition, when the pinch state occurs, the pinch detection plate 370 should touch the switch contact portion 330 of the pinch sensor unit 320 to detect the pinch state, so that the open end of the cap 250 and the connection plate 220 are It is desirable to have a constant separation distance.

This separation distance is adjustable according to the length of the cylinder portion 230, the size of the pull 140, the size of the load port module 1, but the pinch detection plate 370 should be in contact with the switch contact portion 330, the pinch It is preferable that the distance between the sensing plate 370 and the switch contact portion 330 is equal to or greater than.

Since the shape of the cap 250 should cover the spring 300, a cylindrical shape such as the spring 300 is preferable, and one end is fixed to the end of the shaft 240, and the other end is open.

Since the other end of the cap 250 is opened, the connection plate 220 is pressed in contact with the connecting plate 220 in the docking state or the pinch state, so that the cap 250 widens the pressured portion of the connecting plate 220 to be more stable. It is preferable to form a wide area in contact with the connecting plate 220 to push the connecting plate 220.

The controller (not shown) transmits a control signal for controlling the piston movement of the cylinder unit 230 to the cylinder unit 230.

That is, by controlling the piston movement of the cylinder portion 230, the movement of the shaft 240 is controlled, and eventually the reciprocating movement of the stage 100 can be controlled.

Therefore, the controller may control the movement of the stage 100 to the undocking position, the movement to the docking position, the stop at each position, and the like.

Referring to Figure 4, looks at the operation and operation of the stage moving device 10 according to a preferred embodiment of the present invention.

First, the unpacking stage 140 is loaded with a wafer 140 loaded thereon. After that, when the shaft 240 is pulled inwardly of the cylinder portion 230 by the piston movement of the cylinder portion 230, the spring 300 installed at the end of the shaft 240 is compressed by the connecting plate 220. .

The compressed spring 300 pushes the connecting plate 220 with its elastic force, and thus, the stage 100 slides the support part 210 by the moving guide part 360 installed on the lower surface and moves toward the opener 110. do.

If the shaft 240 continues to be pulled inwardly of the cylinder portion 230, the pull door 150 abuts the opener 110, and thus the stage 100 is no longer moved.

However, since the spring 300 is installed at the end of the shaft 240, the shaft 240 is moved in the inner direction of the cylinder portion 230 until the cap 250 touches the connecting plate 220.

At this time, the cap 250 is in contact with the connecting plate 220, the spring 300 is applied to give an additional force to the elastic force transmitted to the connecting plate 220 to press.

Therefore, the pull 140 can be brought into close contact with the opener 110 as much as possible, thereby preventing the inflow of foreign substances.

In addition, when only the spring 300 is installed, a reaction may occur when the pull 140 contacts the opener 110 due to the characteristics of the spring, and the stage 100 may be shaken. The cylinder portion 230 should pull the shaft 240 so as to compress this maximum.

However, when the cap 250 is installed, the cap 250 may be brought into close contact with the connecting plate 220 even when the shaft 240 is pulled only by the separation distance between the cap 250 and the connecting plate 220. If you pull only a short distance than if only 300) installed, you can get a greater close effect,

Since the cap 250 is much less elastic than the spring 300, there is no recoil at the moment when the pull 140 touches the opener 110, and the pull 140 can be firmly fixed to the opener 110. have.

In the stage shifting device 10 according to the preferred embodiment of the present invention, the stage shifting device 10 further includes a sensing sensor plate 310, an undocking position sensor 340, and a docking position sensor 350. The control unit transmits a control signal to the cylinder unit 230 according to the detection of each position sensor.

The sensing sensor plate 310 is installed in the vertical direction downward on the connecting plate 220.

Referring to FIG. 3, since the shape must pass between each position sensor, a thin plate shape is preferable, and it is preferable that the shape is installed in the connecting plate 220 and extends downward from the connecting plate 220 to be bent in an L shape. Do.

The undocking position sensor 340 is installed on the lower surface of the support 210, and when the stage 100 is in the undocking position, the sensing sensor plate 310 is positioned therebetween, and detects the sensing sensor plate 310.

The docking position sensor 350 is installed on the lower surface of the support 210 in parallel with the undocking position sensor 340, and when the stage 100 is in the docking position, the sensing sensor plate 310 is positioned therebetween, and the sensing sensor plate is provided. Sense 310.

The stage 100 is moved to the outside as much as possible so that the stage 100 can be seated, and is located in an undocking state, and the stage 100 moves toward the opener 110 to be brought into contact with the opener 110. The docking state is already described above,

Therefore, it is apparent to those skilled in the art that the undocked position refers to the position of the stage 100 in the undocked state, and the docked position refers to the position of the stage 100 in the docked state.

Each position sensor is preferably formed in a U-shape so as to pass between the respective position sensors of the sensing sensor plate 310, and referring to FIG. 3, the sensing sensor plate 310 may be formed according to the reciprocating movement of the shaft 240. It passes through the position sensor so it is positioned side by side.

Each position sensor is a photosensor, and includes a light output unit for outputting light and a light input unit for sensing light output from the light output unit.

Accordingly, the light input unit detects light output from the light output unit, and when the sensing sensor plates 310 are positioned at each position sensor, the light is blocked by the light output unit so that the light can no longer be detected. ) Can be located.

Since the position of each position sensor needs to know the undocking and docking state, when the stage 100 is undocked and in the undocking position, the undocking position sensor is positioned so that the detection sensor plate 310 is positioned to cover the light. 340 should be installed on the lower surface of the support portion, and the docking position sensor 350 is also installed on the lower surface of the support portion so that the detection sensor plate 310 is positioned between and hides the light when the stage 100 is in the docked position. It is preferable to be.

When the undocking position sensor 340 detects the detection sensor plate 310, the controller stops the piston movement of the cylinder 230 to stop the movement of the shaft 240. Send to

This is to stop the stage 100 so that the pull 140 can be seated in the undocked state.

In addition, when the docking position sensor 350 detects the sensing sensor plate 310, the controller further pulls the shaft 240 in the inward direction of the cylinder part 230 by the remaining cylinder stroke, and maintains the state. It is characterized by sending a signal to the cylinder portion (230).

The cylinder stroke refers to the range in which the piston moves up and down in the cylinder. In the cylinder part 230, the piston is already compressed inwardly of the cylinder part 230, so that the piston travels in the entire stroke minus the distance the piston has already moved. The stroke remains.

Therefore, the shaft 240 may be further pulled in the inner direction of the cylinder portion 230 by the remaining stroke.

When the docking position sensor 350 detects the sensing sensor plate 310, the pull 140 and the opener 110 are in a docking state where the docking position is in contact with each other. Then, when the shaft 240 is further pulled, the shaft 240 is The inner space of the cap 250 and the connecting plate 220 is moved in the inward direction, so that the spring 300 is compressed and the cap 250 comes into contact with the connecting plate 220.

5A, 5B, and 5C are views illustrating a state in which a stage of a stage moving device moves according to an exemplary embodiment of the present invention.

5A, 5B, and 5C, the sensor further includes a sensor plate 310, an undocking position sensor 340, and a docking position sensor 350, and the controller is configured to provide a control signal to the cylinder unit according to the detection of each position sensor. It looks at the operation and action of the stage moving device 100, characterized in that for sending to (230).

First, the unpacking stage 140 is loaded with a wafer 140 loaded thereon. Then, when the shaft 240 is pulled inwardly of the cylinder portion 230 by the piston movement of the cylinder portion 230 for docking, the spring 300 installed at the end of the shaft 240 is connected to the connecting plate 220. Is compressed by.

The compressed spring 300 pushes the connecting plate 220 with its elastic force, and thus, the stage 100 slides the support part 210 by the moving guide part 360 installed on the lower surface and moves toward the opener 110. do.

In addition, as the connection plate 220 moves, the sensing sensor plate 310 also moves along.

When the shaft 240 continues to be pulled in the inner direction of the cylinder portion 230, the pull door 150 is brought into contact with the opener 110 to be in a docked state, and thus the sensing sensor plate 310 is docked at the docking position sensor 350. It goes in between.

As the docking position sensor 350 detects the sensing sensor plate 310, the control unit recognizes that the docking state and controls the cylinder unit 230 to pull the shaft 240 further inward. The pulling distance is as much as the remaining stroke of the cylinder, ie pulls the shaft 240 in the inner direction as much as possible.

The stage 100 does not move anymore because the pull 140 is in contact with the opener 110, but the spring 240 is installed at the end of the shaft 240, so that the shaft 240 has a cap 250. It moves inwardly of the cylinder portion 230 until it reaches the connecting plate 220.

At this time, the cap 250 is in contact with the connecting plate 220, the spring 300 is applied to give an additional force to the elastic force transmitted to the connecting plate 220 to press.

Therefore, the pull 140 can be brought into close contact with the opener 110 as much as possible, thereby preventing the inflow of foreign substances.

Thereafter, when the transfer of the wafer loaded on the pool 140 to the semiconductor processing equipment is completed, the controller transmits a control signal for causing the cylinder unit 230 to push the shaft 240 outward.

As the shaft 240 moves, the pinch detection plate 370 installed on the shaft 240 pushes the connecting plate 220. Therefore, the stage 100 is pushed outward.

As a result, as the connection plate 220 moves, the sensing sensor plate 310 also moves outwardly and passes between the undocking position sensors 340.

Then, the undocking position sensor 340 detects the sensing sensor plate 310, and the controller detects that the docking state is in an undocking state, and causes the cylinder unit 230 to stop the piston movement of the cylinder unit 230 to stop the shaft 240. Send a control signal to the cylinder unit 230 to stop the movement.

As a result, as the shaft 240 stops, the stage 100 stops at an undocking position, and another pull 140 on which the wafer is loaded is seated on the stage 100, and the same process is repeated again.

Therefore, according to the present invention, by providing a position sensor that can determine whether the docking, docking to prevent malfunction, even after docking by pulling the shaft 240 in the inner direction of the cylinder portion 230 by the cap 250 Pressing the connecting plate 220 can provide a stage moving device that tightly fixed and fixed to the opener 110 to prevent the insertion of foreign matters (140).

In the stage moving device 10 according to the preferred embodiment of the present invention, the remaining cylinder stroke when the docking position sensor 350 detects the sensing sensor plate 310 is a shaft 240 for docking the stage 100. ) Is longer than the separation distance between the cap 250 and the connecting plate 220 when moving in the inner direction of the cylinder portion 230.

The remaining cylinder stroke should be longer than the separation distance between the cap 250 and the connecting plate 220, but by pulling the shaft 240 further, the cap 250 abuts on the connecting plate 220 and the cap 250 This is because the pressurization effect given by) can be obtained.

In the stage shifting device 10 according to the preferred embodiment of the present invention, the stage shifting device 10 further includes a pinch sensor unit 320 and the control unit externally the shaft 240 when a pinch state occurs. The control signal for pushing in the direction is transmitted to the cylinder unit 230.

6A, 6B, and 6C illustrate pinch actions of the stage moving device when a jam occurs between the pull and load port module doors according to a preferred embodiment of the present invention.

6A, 6B, and 6C, the operation and operation of the stage shifting device 10 further including the pinch sensor unit 320 will be described.

The pinch sensor unit 320 is installed on the connecting plate 220 and includes a switch contact unit 330. When the pinch detection plate 370 touches the switch contact unit 330, a pinch signal indicating a pinch state is transmitted to the control unit. send.

That is, when the cylinder unit 230 is normally docked in the process of pulling the shaft 240 inwardly or the foreign matter 600 such as a wafer is pinched between the release 140 and the opener 110, The abnormal stage 100 does not move.

However, since the spring 300 is installed between the end of the shaft 240 and the connecting plate 220, the shaft 240 is moved by the separation distance between the cap 250 and the connecting plate covering the spring 300 and the shaft ( The pinch detection plate 370 installed at 240 is also moved inward.

Accordingly, the pinch detection plate 370 moving along the shaft 240 moves toward the pinch sensor unit 320 installed in the connecting plate 220 and extending inwardly therefrom, and provided in the pinch sensor unit 320. The switch contact portion 330 is met.

The pinch sensor unit 320 is a micro switch. When the pinch sensor plate 370 touches the switch contact unit 330, the pinch sensor unit 320 transmits a pinch signal indicating a pinch state to the controller.

If the docking position sensor 350 does not detect the sensing sensor plate 310 and receives the pinch signal from the pinch sensor unit 320, the controller may cause the cylinder unit 230 to move the shaft 240 to the cylinder unit ( It is characterized in that for transmitting a control signal to the cylinder 230 to control to push in the outer direction of 230.

That is, when the pinch signal is transmitted, as described above, the pinch signal is in a docking state or a foreign matter 600 such as a wafer is pinched between the pull 140 and the opener 110.

However, since the docking state is a normal operation, when the docking position sensor 350 does not detect the sensing sensor plate 310 and receives the pinch signal from the pinch sensor unit 320, the cylinder unit 230 causes the cylinder unit 230 to have a shaft ( A control signal for controlling the 240 to be pushed outward from the cylinder 230 is transmitted to the cylinder 230.

As a result, even if a pinch state occurs, the stage 100 is no longer prevented from moving, and the stage 100 is moved outward so that the undocking position sensor 340 detects the sensing sensor plate 310, and is undocked. It becomes a state.

Therefore, according to the present invention, a pinch sensor unit for recognizing a pinch state occurring when a pinch occurs due to a foreign matter such as a wafer is provided between the pull door and the opener, thereby providing a stage shifting device that prevents damage to the load port module.

In the stage moving device 10 according to a preferred embodiment of the present invention, the control unit is a cylinder unit 230 to control the control signal for adjusting the moving speed of the shaft 240 is horizontally moved by the piston movement of the cylinder unit 230 It is characterized by sending.

The moving speed of the shaft 240 is determined by the cylinder part 230 because the shaft 240 reciprocates according to the piston motion present in the cylinder part 230.

In particular, when the shaft 240 stops and then moves, it is important to pull the shaft 240 inwards with too much force, so that the pinch sensor 370 does not have time to recover the compressed spring 300. It may come into contact with the unit 320 and malfunction in a pinch state.

Therefore, the moving speed of the shaft 240 is preferably adjusted to increase slowly.

Similarly, when the shaft 240 moves and stops, it is preferable that the moving speed is adjusted to decrease slowly.

In addition, the speed when the shaft 240 is moving for docking and undocking the stage 100 is preferably constant.

This is because the stage 100 may be shaken if the speed is not constant and there is a risk of damage to the wafer loaded on the pool 140.

In addition, after the docking state, the shaft 240 is pulled by the remaining cylinder stroke, and in this case, it is preferable to pull slowly to reduce the moving speed during the movement.

This is to prevent damage to the cylinder portion 230.

Therefore, according to the present invention, by controlling the moving speed of the shaft 240, the stage to prevent the pinch sensor 320 is recognized as a pinch state during the stage 100 movement, and to enable a more stable stage 100 transfer The mobile device 10 can be provided.

7 is a side view showing a shaft and a cylinder according to a preferred embodiment of the present invention.

Referring to FIG. 7, in the stage moving apparatus 10 according to the preferred embodiment of the present invention, the shaft 240 includes a first shaft 400 and a second shaft 410.

The first shaft 400 has a pinch sensing plate 370 formed through the hole formed in the connecting plate 220 and surrounding the outer circumferential surface thereof.

The second shaft 410 is connected to the first shaft to move horizontally by the piston movement of the cylinder portion 230.

The first shaft 400 and the second shaft 410 may be connected by fasteners, and the first shaft 400 connected according to the horizontal movement of the second shaft 410 also moves horizontally.

The spring 300 may be changed in size in order to adjust the elastic force according to the size of the load port module 1, the loading amount of the pull 140, and the like, but the shaft 300 must be fitted to the shaft 240. 240, the entire diameter should be adjusted to the inner diameter of the spring (300).

However, when the shaft is divided and configured, only the first shaft 400 portion may be manufactured in accordance with the spring 300.

In addition, since the second shaft 410 reciprocates in the cylinder 230, the risk of wear and damage is great.

If the shaft is composed of one, the whole had to be replaced, but if composed of two shafts, the second shaft 410 may be replaced.

Therefore, according to the present invention, by replacing one shaft with two shafts, it is possible to provide a stage shifting device that is easy to manufacture, replace and construct.

Those skilled in the art will appreciate that the present invention can be embodied in other specific forms without changing the technical spirit or essential features of the present invention. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is indicated by the scope of the claims, which will be described later rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalent concept are included in the scope of the present invention. Should be interpreted.

1 is a perspective view showing a general load port module.

2 is a top perspective view showing a stage moving device according to a preferred embodiment of the present invention.

3 is a bottom perspective view showing a stage moving device according to a preferred embodiment of the present invention.

4 is a side view showing a stage moving device according to a preferred embodiment of the present invention.

5A, 5B, and 5C are views illustrating a state in which a stage of a stage moving device moves according to an exemplary embodiment of the present invention.

6A, 6B, and 6C illustrate pinch actions of the stage moving device when a jam occurs between the pull and load port module doors according to a preferred embodiment of the present invention.

7 is a side view showing a shaft and a cylinder according to a preferred embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

1: load port module 10: stage feeder

100: stage 110: opter

130: body of the load port module 140: loosening

150: pull door 210: support portion

220: connecting plate 230: cylinder portion

240: shaft 250: cap

300: spring 310: detection sensor plate

320: pinch sensor unit 330: switch contact unit

340: undocking position sensor 350: docking position sensor

Claims (6)

In the load port module, A plate-shaped stage on which an unwind is loaded; A moving guide part fixed to the bottom of the stage; A support part coupled to the movement guide part to slide the stage and connected to the body of the load port module; A connection plate installed in a vertical direction downward from the stage and having holes formed therein; A cylinder unit fixed to one side of the support unit; A cylindrical shaft penetrating a hole formed in the connecting plate and connected to the cylinder to move horizontally by a piston movement of the cylinder; One end is fixed to the end of the shaft, the other end is fixed to one side of the connecting plate spring; A pinch detection plate fixed to the shaft at the other side of the connection plate; A cap fixedly installed at the end of the shaft to cover a portion of the spring and spaced apart from the connecting plate; And A control unit which transmits a control signal for controlling the piston movement of the cylinder unit to the cylinder unit; Stage moving device comprising a. The method of claim 1, The stage moving device, A sensing sensor plate installed in the connection plate in a vertical downward direction; An undocking position sensor installed on a lower surface of the support part and positioned between a sensing sensor plate and a sensing sensor plate when the stage is in an undocking position; And A docking position sensor installed on a lower surface of the support side by side with the undocking position sensor and having a sensing sensor plate interposed therebetween when the stage is in a docking position and sensing the sensing sensor plate; More, The control unit, When the undocking position sensor detects the sensing sensor plate, it sends a control signal to the cylinder to stop the movement of the shaft by stopping the piston movement of the cylinder, And when the docking position sensor detects the sensing sensor plate, the shaft is further pulled inward into the cylinder portion by the remaining cylinder stroke, and a control signal is transmitted to the cylinder portion to maintain the state. The remaining cylinder stroke when the docking position sensor detects the detection sensor plate is And a distance longer than a distance between the cap and the connecting plate when the shaft is moving inwardly of the cylinder portion for docking the stage. 3. The method of claim 2, The stage moving device, A pinch sensor unit installed at the connecting plate and having a switch contact unit, and transmitting a pinch signal indicating a pinch state to the control unit when the pinch detection plate contacts the switch contact unit; More, The control unit, When the docking position sensor does not detect the sensing sensor plate and receives the pinch signal from the pinch sensor unit, the stage movement is characterized by transmitting a control signal to the cylinder unit for controlling the cylinder unit to push the shaft outward. Device. The method of claim 4, wherein the control unit, And a control signal for controlling the movement speed of the shaft which is horizontally moved by the piston movement of the cylinder portion. The method of claim 1, wherein the shaft, A first shaft having a pinch sensing plate formed through the hole formed in the connecting plate and surrounding the outer circumferential surface; And A second shaft connected to the first shaft and horizontally moved by a piston movement of the cylinder portion; Stage moving device comprising a.

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