TWI807177B - Load port - Google Patents

Abstract

A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.

Description

load port

The present invention relates to a loading port.

A container such as a FOUP is known which stores substrates such as semiconductor wafers. Such containers are opened/closed in a load port provided in a processing facility to put in or take out substrates in the container. The loadport is provided with a dock plate on which the container is placed, and a mechanism configured to move the dock plate. The docking plate on which the container is placed is moved to a predetermined position, thereby opening/closing the container.

The loadport is connected and attached to a substrate transfer apparatus including a substrate transfer robot configured to transfer a substrate. The load port includes a port separated between the workspace of the substrate handling equipment and the outside plate. The opening portion formed in the port plate can be freely opened/closed by the port door. If the opening portion is accidentally opened in a state where the FOUP is not butted against the opening portion of the port plate, the work space is exposed to the outside. In this case, foreign objects may be undesirably caught between the port plate and the port door during movement of the port door. It is also necessary to prevent a part of the substrate transfer robot from protruding from the opening portion while it is operating.

Japanese Patent Laid-Open No. 2002-110756 discloses a loading port in which a double structure including a door configured to open/close an opening portion of a port plate and another door is employed and the doors are prevented from being simultaneously opened. Furthermore, Japanese Patent No. 3954714 discloses a loading port that opens an opening portion of a port plate under the condition of detecting that a cassette is placed on the loading port.

Therefore, it is necessary to reliably prevent accidental driving of the load port and the substrate transfer robot (substrate transfer device) to ensure the safety of the perimeter. In order to ensure the safety of the perimeter, a method is considered in which the status of various parts of the load port is detected by a plurality of sensors, and the port door and the substrate transfer robot are allowed to be driven only if the detection results satisfy predetermined conditions. However, an increase in the number of sensors leads to an increase in cost.

It is an object of the present invention to provide a loadport comprising a mechanism configured to detect the presence of a container on a docking plate and that the docking plate is positioned in a docking position.

According to an aspect of the present invention, there is provided a loading port, which includes: a port plate including an opening portion through which substrates can be put in and out; a placement table on which containers storing substrates are placed; a port door capable of opening/closing the opening portion and a door portion holding the container; and a driving mechanism configured to perform opening/closing operations of the port door, wherein the placement table includes: a base portion; The board moves between a first position close to the port door of the port plate to hold the side of the door portion and a second position away from the port plate; a first pin protruding over the butt plate and provided on the butt plate so as to be pushed downward; and a first detection unit provided on the base portion and configured to detect that the butt plate is positioned at the first position, the first detection unit includes: a movable member displaceable relative to the base portion in a moving direction in which the butt plate is moved by the moving mechanism; and a first sensor configured to detect displacement of the movable member , and the docking plate moves from the second position to the first position During the positioning process, the movable member is arranged at a position abutting against the first pin in the pushed-down state.

According to another aspect of the present invention, there is provided a loading port, which includes: a port plate including an opening portion through which substrates can be taken out and put in; a placement table on which containers storing substrates are placed; a port door capable of opening/closing the opening portion and a door portion holding the containers; and a driving mechanism configured to perform opening/closing operations of the port door, wherein the placement table includes: a base portion; The butt plate moves between a first position close to the port door of the port plate to hold a side portion of the door portion and a second position away from the port plate; a first pin protruding from the butt plate and provided on the butt plate so as to be pushed down; and a first detection unit disposed on the base portion and configured to detect that the butt plate is positioned at the first position, and the first detection unit includes a non-contact sensor that detects the first pin in a pushed down state during movement of the butt plate from the second position to the first position.

Further features of the invention will become apparent from the following description of exemplary embodiments, with reference to the accompanying drawings.

1: Load port

1a: Control unit

1b: Communication line

1c: Sensor group

2: port board

2a: Opening part

3: place table

4: Support part

5: container

6: Substrate delivery robot

7: Base part

8: Mobile mechanism

9: The first detection unit

9a: Bracket

10: Second detection unit

10a: Second sensor

11: The third detection unit

11a: The third sensor

12: Sensor

12a: plunger

13: Detection unit

13a: Detect target

14: Detection unit

14a: Light emitting element

14b: Light receiving element

30: Butt plate

31: Locating pin

32a: stopper

32F: Second pin

32L: The third pin

32R: first pin

33: Operation panel

34: Driving mechanism

35: Support part

35a: Internal space

35b: Elastic member

36: Concave part

37: Plate spring

37a: Sensor contacts

38: Bolt

40: Driving mechanism

41: port gate

42: Connecting components

43: Taiwan component

44: Actuator

45: Ball screw shaft

47: motor

48: Ball nut

50: container body

50a: opening part

51: cover

60: terminator

61: Articulated arm

62: Drive unit

80: rail components

81: Slider

81a: Joining member

81b: column

81c: Connection part

82: Driving mechanism

90:First sensor

90a: input shaft

91: Movable components

91a: roller part

820: drive unit

820a: motor

820b: output shaft

821: arm member

822: Cam follower

823: Cam plate

823a: Joining member

823b: Cam groove

823c: connection part

824: Rod

825: stopper

826: elastic member

H1: Attachment hole

H2: Attachment hole

L1: Lower position

L2: Orbit of light

PA: substrate conveying equipment

PP: side

S: workspace

ST1: state

ST2: state

ST11: Status

ST12: Status

ST21: Status

ST22: Status

S1~S9: steps

W: Substrate

Y1: Centerline of rotation

θ1: tilt angle

θ2: tilt angle

θ3: tilt angle

θ4: tilt angle

[FIG. 1] is a view showing the appearance of a loading port according to an embodiment of the present invention; [FIG. 2] is a view showing an internal mechanism and an example of use of the loading port shown in FIG. 1; [FIG. 3A] and [FIG. 3B] are views showing a displacement mode of a docking plate; [FIG. 4] is an explanatory view of a pin arrangement on a docking board; [FIG. 7B] is a sectional view taken along the line A-A in FIG. 7A; [FIG. 7C] is an explanatory view of the operation of the detection unit; [FIG. 8A] is a perspective view of the detection unit; [FIG. 8B] is a cross-sectional view of the pin support portion; [FIG. 10A] and [FIG. 10B] are flow charts showing an example of the processing of the control unit; [FIG. 11A] to [FIG. 11D] are explanatory views of the operation of the detection unit shown in FIG. 8A in another example of use; [FIG. 12A] to [FIG. 12D] are explanatory views of the operation of the detection unit of another example; [FIG. 13] is a view showing an example in which the container is placed in an inclined state; [FIG. 15] is a perspective view of a position adjustment bracket; [FIG. 16] is an explanatory view of another example of the detection unit; and [FIG. 17]] is an explanatory view of still another example of the detection unit.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. It should be noted that the following examples are not intended to limit the scope of the claimed invention category, and the present invention is not limited to inventions requiring all combinations of features described in the embodiments. Two or more of the features described in the embodiments may be combined as appropriate. Also, the same reference numerals are assigned to the same or similar configurations, and redundant descriptions thereof are omitted.

<First embodiment>

<Device Overview>

FIG. 1 is a view showing the appearance of a loading port 1 according to an embodiment of the present invention. FIG. 2 is a view showing an internal mechanism of the load port 1 and an example of use. In the drawings, arrows X and Y indicate horizontal directions orthogonal to each other, and arrow Z indicates a vertical direction. In addition, PP represents the side portion of the port plate 2 in the X direction. The meanings of these arrows also apply to other drawings.

The loadport 1 is a device for opening/closing a container 5 like a FOUP. The container 5 includes a box-shaped container main body 50 having an opening portion 50a for putting in or taking out a substrate W such as a semiconductor wafer in a side portion of the container main body; and a cover (door) 51 detachably attached to the opening portion 50a and closing the opening portion 50a. It should be noted that FIG. 2 shows a state in which the cover 51 is removed by the loadport 1 and the substrate transfer robot 6 can access the substrate W in the container 5 (open state).

The loading port 1 includes a port plate 2 , a placement table 3 on which a container 5 is placed, and a support portion 4 that supports the placement table 3 . The port plate 2 is a plate-shaped body extending in the Z direction. The port plate 2 includes an opening portion 2a through which the removed cover 51 can pass in the X direction. At least one load port 1 is attached to a substrate transfer apparatus PA including a substrate transfer robot 6 that transfers a substrate W. As shown in FIG. The substrate transfer robot 6 performs unloading of the substrate W from the container 5 on the load port 1 and loading of the substrate W into the container 5 on the load port 1 . The substrate transfer robot 6 includes a terminator 60 that holds the substrate W; an articulated arm 61 that holds the terminator 60 so that it can move at least freely forward and backward; and a drive unit 62 that moves the articulated arm 61 forward/backward, rotates, and moves up/down. In the above-described open state, when the substrate transfer robot 6 is brought into the container main body 50 communicating with the substrate transfer apparatus (substrate transfer module) PA, unloading and loading of the substrate W is performed.

The placement table 3 comprises a docking plate 30 on which the container 5 is placed. The butt plate 30 is provided with a plurality of positioning pins 31 that support the container 5 while positioning the container 5 , and a plurality of detection pins (second pin 32F, third pin 32L, and first pin 32R) configured to detect the presence of the container 5 . The placing table 3 includes a drive mechanism 34 for displacing the butt plate 30 in the X direction. Furthermore, the placement stand 3 has an operation panel 33 on its front surface. The operator can operate through The panel 33 carries out setting and operation commands of the loading port 1 .

The support portion 4 is a hollow body having a cuboid shape. The supporting part 4 is provided with a drive mechanism 40 . The drive mechanism 40 performs an opening/closing operation of the port door 41 . The port door 41 opens/closes the opening portion 2 a, and also holds the lid 51 of the container 5 and performs opening/closing operations of the container 5 . The driving mechanism 40 includes a mechanism configured to move the port door 41 holding the cover 51 between a closed position in which the cover 51 closes the opening portion 50a, a retracted position in which the cover 51 closes the opening portion 50a, and an open position in which the cover 51 retracts to the lower side of the lower edge of the opening portion 2a, and an open position. The port door 41 includes, for example, a clamping mechanism, and the port door 41 can thus clamp and hold the cover 51 . In addition, the port door 41 is provided with an operating mechanism (latch key) that operates opening/closing of a locking mechanism included in the cover 51 . This can detach the lid 51 from the container body 50 and attach the lid 51 to the container body 50 .

The drive mechanism 40 has the following arrangement. That is, the port gate 41 is supported by the connection member 42 extending in the Z direction. The connecting member 42 is supported by the table member 43 so as to be slidable in the X direction, and is moved in the X direction by an actuator 44 (for example, a ball screw or an electric cylinder). In addition, the ball nut engaged with the ball screw shaft 45 extending in the vertical direction 48 is fixed to the table member 43 . When the ball screw shaft 45 is rotated by the motor 47, the port door 41, the connection member 42, and the table member 43 move upward or downward integrally.

With the above structure, the driving mechanism 40 can move the port door 41 in the X direction and the Z direction. Accordingly, the cover 51 moves among a closed position, a retracted position, and an open position. It is to be noted that the mechanism for moving the port gate 41 is not limited thereto, and various mechanisms may be employed.

The loading port 1 is provided with a control unit 1a. The control unit 1a includes, for example, a processing unit represented by a CPU, a storage unit such as a RAM and a ROM, an input/output interface between an external device and the processing unit, and a communication interface for communicating with a computer such as a host computer or a peripheral device (substrate transfer apparatus PA, substrate transfer robot 6, etc.) via a communication line 1b. The drive mechanism 34, the actuator 44 and the motor 47 are controlled by the control unit 1a. In addition, the detection result of each sensor included in the sensor group 1c or the operator's operation via the operation panel 33 is recognized by the control unit 1a. The sensor group 1c includes a second sensor 10a, a third sensor 11a, a first sensor 90, etc., which will be described later.

<Displacement mode of docking plate>

3A and 3B are views showing displacement modes of the docking plate 30 and are plan views of the loading port 1 . In this embodiment, the drive mechanism 34 can move the docking plate 30 in the X direction.

FIG. 3A shows a state where the butt plate 30 is positioned at a position closest to the PP side with respect to the port plate 2 in the X direction (hereinafter, also referred to as a butt position). The opening/closing of the container 5 is performed at the docking position. FIG. 3B shows a state where the butt plate 30 is positioned at the position farthest from the port plate 2 (hereinafter, also referred to as a transfer position). The loading and unloading of the containers 5 onto the docking plate 30 and the unloading of the containers 5 from the docking plate 30 are performed at the transfer position.

<Structure of moving mechanism>

The structure of the drive mechanism 34 will be described. FIG. 4 is a plan view of the docking plate 30 and the drive mechanism 34 . FIG. 5 is a plan view of the drive mechanism 34 looking through the docking plate 30 . FIG. 6 is a right side view of the drive mechanism 34 . All figures show the state where the docking plate 30 is positioned at the docking position.

The drive mechanism 34 includes a base portion 7 and a movement mechanism 8 . The base portion 7 is a support for the entire drive mechanism 34, and is a plate-shaped member in this embodiment.

The movement mechanism 8 is arranged between the base part 7 and the docking plate 30 between. The moving mechanism 8 includes a rail member 80 and a slider 81 that moves on the rail member 80 . At the center of the base portion 7 in the Y direction, a rail member 80 extends in the X direction and is fixed to the base portion 7 . The sliding member 81 supports the butt plate 30 through a plurality of columns 81 b, and moves together with the butt plate 30 . The moving range of the slider 81 corresponds to the range between the docking position and the transfer position, and this range is the moving range of the docking plate 30 in the X direction. The slider 81 is engaged with the rail member 80 and is fixed to a plurality of engaging members 81 a that slide along the rail member 80 .

The moving mechanism 8 includes a drive mechanism 82 . The drive mechanism 82 is a mechanism that moves the slider 81 in the X direction. The drive mechanism 82 includes a drive unit 820 . The driving unit 820 includes a motor 820a as a driving source, and the driving force of the motor 820a is transmitted to the output shaft 820b via a transmission mechanism (gear mechanism, belt transmission mechanism, etc.) in the driving unit 820 . The output shaft 820b rotates around an axis in the Z direction. One end portion of the arm member 821 is fixed to the output shaft 820b. A cam follower 822 is provided at the other end portion of the arm member 821 . As the output shaft 820b rotates, the arm member 821 pivots on the X-Y plane.

The moving mechanism 8 includes a cam plate 823 . The cam plate 823 is fixed on an engaging member 823a which engages with the rail member 80 And slide along the rail member 80 . The cam plate 823 includes cam grooves 823b. The cam groove 823b is a through hole extending in the Y direction. The cam follower 822 engages with the cam groove 823b. The cam plate 823 moves in the X direction when the cam follower 822 moves in an arcuate trajectory relative to the output shaft 820b as the center according to the pivotal movement of the arm member 821 .

The cam plate 823 includes a connecting portion 823c, and the slider 81 includes a connecting portion 81c. The connection portions 823c and 81c are portions that connect the cam plate 823 and the slider 81 . The cam plate 823 and slider 81 may be rigidly connected. However, in this embodiment, the elastic member 826 is interposed between the cam plate 823 and the slider 81, and the elastic member 826 buffers the driving force transmission therebetween. That is, the cam plate 823 and the slider 81 are displaceable relative to each other in the X direction. Therefore, for example, even if a foreign matter is caught between the port plate 2 and the container 5 when the cam plate 823 is moved to the docking position, the elastic member is elastically deformed so that only a predetermined value or less of a load that never injures the operator is applied. Furthermore, at the same time, the container 5 , the cam plate 823 and the slider 81 can no longer be displaced in the direction of moving closer to the port plate 2 . Therefore, safe operation can be ensured.

The elastic member 826 may be rubber or the like, and in this embodiment is a coil spring. The rod 824 is inserted into the connection parts 823c and 81c And in the elastic member 826 . Each connecting portion 823c and 81c is a vertical wall standing in the Z direction, and includes a hole into which the rod 824 is inserted. A stopper 825 is provided at each end portion of the rod 824 . The elastic member 826 generates a biasing force in a direction in which the connecting parts 823c and 81c are separated, and the connecting parts 823c and 81c can move closer to or away from each other within the range of the two stoppers 825 . That is, the cam plate 823 and the slider 81 can move closer to or away from each other within the range of the two stoppers 825 . Normally, they are separated from each other by the distance between the two stoppers 825 due to the biasing force of the elastic member 826, and they can move closer to each other only when some external load acts.

The butt plate 30 is provided with three detection pins (a second pin 32F, a third pin 32L, and a first pin 32R). The second pin 32F, the third pin 32L, and the first pin 32R are presence sensors configured to detect whether the container 5 is present (placed) on the docking plate 30 . When the container 5 is properly placed on the docking plate 30, all the detection pins (the second pin 32F, the third pin 32L and the first pin 32R) are pushed down. The second pin 32F, the third pin 32L, and the first pin 32R are arranged so as to be positioned at vertices of an acute triangle in plan view of the butt plate 30 ( FIG. 4 ). If the container 5 is improperly placed in an inclined state or placed in a deviated position, the second pin 32F, the third pin 32L and the first pin At least one of 32R is not pushed down to a position where the detection pin will be detected by a sensor described later.

On the lower surface of the butting plate 30, a second sensor 10a for detecting the downward pushing of the second pin 32F is provided. The second pin 32F and the second sensor 10a form the second detection unit 10 configured to detect whether the container 5 is placed. Details of the second detection unit 10 will be described later with reference to FIGS. 7A to 7C . On the lower surface of the butting plate 30, a third sensor 11a for detecting the downward pushing of the third pin 32L is provided. The third pin 32L and the third sensor 11a form a third detection unit 11 configured to detect whether the container 5 is placed. The arrangement of the third detection unit 11 is the same as that of the second detection unit 10 . The downward pushing of the first pin 32R is detected by the first detection unit 9 . The first detection unit 9 is fixed to the base portion 7 by means of a bracket 9a. Details of the first detection unit 9 will be described with reference to FIGS. 9A to 10D .

The arrangement of the second detection unit 10 will be described with reference to FIGS. 7A to 7C . FIG. 7A is a bottom view of butt plate 30 near second pin 32F, and FIG. 7B is a cross-sectional view taken along line A-A in FIG. 7A. An L-shaped recess portion 36 is formed in the lower surface of the butt plate 30 , and the second pin 32F extends through the butt plate 30 in the recess portion 36 . An L-shaped leaf spring 37 is arranged in the recess portion 36, and only one end portion of the leaf spring 37 is connected by a bolt 38. is secured to the butt plate 30 . That is, the leaf spring 37 is cantilever-supported. The lower end of the second pin 32F abuts against the middle portion of the leaf spring 37 (in this embodiment, the bent portion of the leaf spring 37 ). The plate spring 37 functions as a return spring that biases the second pin 32F upward.

The other end portion of the leaf spring 37 is bent, and a sensor dog 37a is formed. The second sensor 10a is a photo interrupter and detects the presence of the sensor contact 37a between the light receiving element and the light emitting element. It should be noted that, as the second sensor 10a, a sensor other than a photointerrupter (for example, a micro switch sensor including a lever-shaped actuator) may also be used. In addition, the structure which does not use the plate spring 37 is also possible, and a photointerrupter and a micro switch sensor can be used together.

FIG. 7C shows a state where the second pin 32F is pushed down. When the container 5 is properly placed on the docking plate 30, the second pin 32F is pushed down by the weight of the container 5, as shown in Fig. 7C. Accordingly, the plate spring 37 is also pushed downward, the sensor contact 37a enters between the light receiving element and the light emitting element, and the second sensor 10a detects this. When the container 5 is unloaded from the docking plate 30 , the second pin 32F is returned to the position shown in FIG. 7B by the elastic biasing force of the leaf spring 37 .

The first detection unit 9 will be described with reference to FIG. 8A . The first detection unit 9 includes a first sensor 90 and a movable member 91 , and functions as a safety mechanism or safety component configured to prevent accidental operation of the loadport 1 or the substrate transfer robot 6 .

In this embodiment, the first sensor 90 is a rotary limit switch. The first sensor 90 includes a micro switch, and the circuit is turned on/off (the electrical contact is turned on/off) by the switch mechanism of the micro switch. When an external force is applied to the movable member 91 and the input shaft 90a is rotated by a predetermined angle around a rotation center line Y1 parallel to the predetermined Y direction, the micro switch is biased and turned on by a cam mechanism formed on the input shaft 90a and a plunger abutting against the cam mechanism and movable in the X direction. The first sensor 90 includes a resilient member that biases the input shaft 90a to the OFF position via a plunger. For this reason, when the external force applied to the movable member 91 is removed, the input shaft 90a returns to the OFF position, which is the initial position.

The movable member 91 is a lever member which has one end portion fixed to the input shaft 90 a and is capable of pivoting about the rotation center line Y1 . The movable member 91 includes a roller portion 91a rotatably provided at the other end portion. When an external force is applied to the movable member 91 and the movable member 91 is displaced (tilted) to the PP side in the X direction by a predetermined amount or more, the first sensing device 90 is opened. The first detection unit 9 is attached to the base portion 7 and the like so that the position of the roller portion 91 a in the Y direction becomes the same as the position of the first pin 32R in the Y direction. It is to be noted that, as the movable member 91, a structure not including the roller portion 91a may also be employed.

FIG. 8B is a sectional view showing the supporting structure of the first pin 32R. Unlike the remaining second pin 32F and third pin 32L, the first pin 32R is a pin whose length in the axial direction is long. A tubular support portion 35 supporting the first pin 32R is fixed to the butt plate 30 . The elastic member 35b is arranged in the inner space 35a of the support portion 35 . In this embodiment, the elastic member 35b is a coil spring mounted on the first pin 32R. The first pin 32R extends through the butt plate 30 and the support portion 35 . Furthermore, the stopper 32a is fixed to the first pin 32R. The stopper 32a is always biased upward by the elastic member 35b.

9A to 9D are explanatory views of the operation of the first pin 32R and the first detection unit 9 . As shown in FIG. 9D , the roller portion 91 a is arranged to abut against the first pin 32R pushed downward. In this embodiment, as shown in FIG. 9B , the roller portion 91 a is arranged to abut against even the first pin 32R that is not pushed down. However, the displacement amount (inclination angle) of the movable member 91 is also different depending on the contact portion.

FIG. 9A shows a state where the butt plate 30 is positioned at the transfer position. The container 5 is not present (not placed) on the butt plate 30, and by the bias of the above-mentioned elastic member 35b, the first pin 32R is positioned at the initial position. The movable member 91 is positioned at the initial position. FIG. 9B shows a state where the docking plate 30 has been moved from the state in FIG. 9A to the docking position. The container 5 is not placed on the butt plate 30, and the first pin 32R is still positioned at the initial position by the bias of the above-mentioned elastic member 35b. When the first pin 32R abuts against the roller portion 91a, the movable member 91 is slightly inclined from the initial position toward the side of the port plate 2 in the X direction. Since the lower end of the first pin 32R abuts slightly on the upper side of the center of the roller portion 91a, the movable member 91 is not greatly inclined, and the inclination angle θ1 is small. At the same time, the first sensor 90 of the movable member 91 is not turned on and remains off.

FIG. 9C shows a state where the butt plate 30 is positioned at the transfer position. FIG. 9C assumes a state where the container 5 properly exists on the butt plate 30 . The first pin 32R is pushed downward by the weight of the container 5, and the downward protrusion amount from the support portion 35 is large. FIG. 9D shows a state where the docking plate 30 has been moved from the state in FIG. 9C to the docking position. When the first pin 32R abuts against the roller portion 91a, the movable member 91 is inclined from the initial position toward the side of the port plate 2 in the X direction. Since the first pin 32R has the same height as the center of the roller portion 91a The angle of inclination θ2 (>θ1) of the movable member 91 is large if the angle of inclination θ2 (>θ1) of the movable member 91 is deeply pressed against the roller portion 91a. At the same time, the first sensor 90 of the movable member 91 is turned on.

As described above, according to the first detection unit 9 of this embodiment, it is possible not only to detect whether the container 5 exists (is properly placed) on the docking plate 30, but also to detect whether the container 5 exists on the docking plate 30 and whether the docking plate 30 is positioned at the docking position. Since two states can be detected by one first detection unit 9 , the placement of the container 5 on the butt plate 30 and the position of the butt plate 30 can be detected at relatively low cost.

The first detection unit 9 is arranged to correspond to the first pin 32R. The first pin 32R is one of the third pin 32L and the first pin 32R which are arranged on the side of the port plate 2 and spaced apart in the Y direction intersecting the moving direction of the butt plate 30 among the three detection pins (the second pin 32F, the third pin 32L, and the first pin 32R). The first pin 32R is arranged at a position where it is easy to detect a container placed in an inclined state on the butting plate 30 . Therefore, when this first pin 32R is detected by the first detection unit 9 , the reliability of container 5 placement detection can be increased.

Furthermore, since the first detecting unit 9 detects the first pin 32R arranged at a position close to one end side of the butt plate 30 in the Y direction, the first detecting unit 9 can be arranged near the base portion 7 in the Y direction. at one end position. On one end side of the base portion 7 in the Y direction, there is formed a relatively little free space where other mechanisms exist, and the first detection unit 9 can be arranged in this free space. Of course, the first detection unit 9 may be arranged to correspond to the third pin 32L, or may be arranged to correspond to the second pin 32F.

It should be noted that in this embodiment, the first sensor 90 is not turned on in the state shown in FIG. 9B . As the first sensor 90, a sensor including a plurality of ON contacts and selectively turned on between the state shown in FIG. 9B and the state shown in FIG. 9D can be used. In the state shown in FIG. 9B , in a state where the container 5 is not placed on the docking plate 30 , the control unit 1 a can recognize that the docking plate 30 has been moved to the docking position.

<Processing example of the control unit>

An example of processing by the control unit 1a will be described. If the opening portion 2a of the port plate 2 is unnecessarily opened, the work space S is exposed to the outside, and, for example, the terminator 60 of the substrate transfer robot 6 undesirably protrudes to the outside. Also with the port door 41 , if the port door 41 is exposed to the outside during the movement of the port door 41 , foreign matter is undesirably caught between the port plate 2 and the port door 41 .

In this embodiment, the container 5 is suitably present in the docking The port door 41 is moved under at least one condition that the docking plate 30 is positioned in the docking position on the plate 30 . According to this, even if the opening portion 2a is opened, the container 5 exists in front of the opening portion 2a and closes the opening portion 2a. This prevents the port door 41 and the work space S from being exposed to the outside. 10A and 10B are flowcharts showing an example of processing by the control unit 1a.

For example, when the opening operation of the port door 41 is performed in a state where the container 5 is placed on the docking plate 30, the processing example shown in FIG. 10A is executed. An instruction for an opening operation is sent from, for example, a host computer to the control unit 1a via the communication line 1b.

In step S1, detection results of predetermined sensors in the sensor group 1c are acquired. The predetermined sensors include at least the second sensor 10 a , the third sensor 11 a and the first sensor 90 . In step S2, it is determined whether the detection result acquired in step S1 is a predetermined detection result. Here, the detection result being a predetermined detection result means a condition that at least the second sensor 10a, the third sensor 11a, and the first sensor 90 are all turned on, that is, the container 5 is properly present on the docking plate 30 and the docking plate 30 has been moved from the transfer position to the docking position. If the detection result is a predetermined detection result in step S2, the process proceeds to step S3. If the detection result is not the predetermined detection result, the process proceeds to step S4.

In step S4, error handling is performed. Here, for example, a notification indicating that the operation condition is not satisfied is sent to the host computer via the communication line 1b. Alternatively, the warning is notified to the operator by voice or display.

In step S3, an operation permission signal of the port gate 41 is sent to the control unit 1a. Accordingly, the port door 41 is caused to hold the cover 51 and move to the open position. Since it is confirmed in step S2 that the container 5 is properly present on the docking plate 30, and the opening portion 2a is closed at the docking position, the port door 41 and the working space S are not exposed to the outside during operation. That is, since the opening portion 2a is closed by the container 5, the work space S is not exposed to the outside through the opening portion 2a.

In step S5, detection results of predetermined sensors in the sensor group 1c are acquired. The main goal of this is operational validation. The predetermined sensors include at least a sensor that detects whether the port door 41 has been moved to the open position. The detection results of the second sensor 10a, the third sensor 11a, and the first sensor 90 can be covered again, although they are included in the detection result acquisition target in step S1.

The processing example shown in FIG. 10A is also applied when the closing operation of the port door 41 is performed in a state where the container 5 is placed on the abutment plate 30 . The command to close the operation is transmitted from, for example, the host computer via the communication line 1b to control unit 1a.

In step S1, detection results of predetermined sensors in the sensor group 1c are acquired. The predetermined sensors include at least the second sensor 10 a , the third sensor 11 a and the first sensor 90 . In step S2, it is determined whether the detection result acquired in step S1 is a predetermined detection result. Here, the detection result being a predetermined detection result means a condition that at least the second sensor 10a, the third sensor 11a, and the first sensor 90 are all turned on, that is, the container 5 is properly present on the docking plate 30 and the docking plate 30 has been moved from the transfer position to the docking position. If the detection result is a predetermined detection result in step S2, the process proceeds to step S3. If the detection result is not the predetermined detection result, the process proceeds to step S4.

In step S3, an operation permission signal of the port gate 41 is sent to the control unit 1a. Accordingly, the port door 41 is moved to the closed position. Since it is confirmed in step S2 that the container 5 is properly present on the docking plate 30, and the opening portion 2a is closed at the docking position, the port door 41 and the working space S are not exposed to the outside during operation. That is, since the opening portion 2a is closed by the container 5, the port door 41 is prevented from catching foreign matter.

In step S5, detection results of predetermined sensors in the sensor group 1c are acquired. The predetermined sensors include at least detecting whether the port gate 41 has Sensor moved to closed position. The detection results of the second sensor 10a, the third sensor 11a, and the first sensor 90 can be covered again, although they are included in the detection result acquisition target in step S1.

For example, when the operation of the substrate transfer robot 6 is performed in a state where the container 5 is placed on the docking plate 30 , the processing example shown in FIG. 10B is executed. Instructions for operations are transmitted from, for example, a host computer to the control unit of the substrate transfer robot 6 .

In step S6, detection results of predetermined sensors in the sensor group 1c are acquired. The predetermined sensors include at least the second sensor 10 a , the third sensor 11 a and the first sensor 90 . In step S7, it is determined whether the detection result acquired in step S6 is a predetermined detection result. If the detection result is a predetermined detection result, the process proceeds to step S8. If the detection result is not the predetermined detection result, the process proceeds to step S9. In step S9, error handling is performed. This is the same as the processing in step S4.

In step S8, an operation permission signal of the substrate transfer robot 6 is transmitted to the control unit of the substrate transfer robot 6 or the host computer via the communication line 1b. Accordingly, the operation of the substrate transfer robot 6 is started. Since the operation of the substrate transfer robot 6 is allowed at least only in a state where the opening portion 2a is closed by the container 5, the safety of the periphery can be ensured.

It should be noted that even if the container 5 is not placed, if the port door 41 is positioned at the closed position, the operation permission signal of the substrate transfer robot 6 can be sent. In this embodiment, if for some reason it is detected that the container 5 is not set in the state where the port door 41 is positioned at the open position, error processing may be performed to prohibit the operation of the substrate transfer robot 6 .

<Second Embodiment>

In the first embodiment, in the state shown in FIG. 9B , the first detection unit 9 is arranged such that the first pin 32R that is not pushed down abuts against the roller portion 91 a. However, the first detection unit 9 may be arranged such that the first pin 32R does not abut. 11A to 11D are explanatory views showing the operations of the first pin 32R and the first detection unit 9 of an example.

FIG. 11A shows a state where the butt plate 30 is positioned at the transfer position. The container 5 is not placed on the butt plate 30, and the first pin 32R is positioned at the initial position by the bias of the above-mentioned elastic member 35b. The movable member 91 is positioned at the initial position. FIG. 11B shows a state where the docking plate 30 has been moved from the state in FIG. 11A to the docking position. The container 5 is not placed on the butt plate 30, and the first pin 32R is still positioned at the initial position by the bias of the above-mentioned elastic member 35b. The first pin 32R does not abut against the roller portion 91a, and The movable member 91 is still positioned at the initial position. At the same time, the first sensor 90 is not turned on and remains off.

θ2)。在此同時，可動構件91的第一感測器90被打開。 FIG. 11C shows a state where the docking plate 30 is positioned at the transfer position. FIG. 11C assumes a state where the container 5 is placed on the docking plate 30 . The first pin 32R is pushed downward by the weight of the container 5, and the downward protrusion amount from the support portion 35 is large. FIG. 11D shows the state where the docking plate 30 has been moved from the state in FIG. 11C to the docking position. When the first pin 32R deeply abuts against the roller portion 91a, the movable member 91 is inclined in the X direction from the initial position toward the PP side by an inclination angle θ3(

θ2). At the same time, the first sensor 90 of the movable member 91 is turned on.

<Third embodiment>

In the first embodiment, a rotary limit switch is used as the first sensor 90 . However, linear motion limit switches can be used. 12A to 12D are explanatory views showing the operation of the example. In the example shown in FIGS. 12A to 12D , the sensor 12 is used instead of the first sensor 90 . The sensor 12 is a linear motion limit switch configured to detect the X-direction displacement of the plunger 12a as the movable member.

Figure 12A shows the state of the docking plate 30 being positioned in the transfer position. state. The container 5 is not placed on the butt plate 30, and by the bias of the above-mentioned elastic member 35b, the first pin 32R is positioned at the initial position. The plunger 12a is positioned at the initial position. FIG. 12B shows the state where the docking plate 30 has been moved from the state in FIG. 12A to the docking position. The container 5 is not placed on the butt plate 30, and the first pin 32R is still positioned at the initial position by the bias of the above-mentioned elastic member 35b. Due to the offset in the Z direction, the first pin 32R does not abut against the plunger 12a, and the plunger 12a is still positioned at the initial position. Sensor 12 is not turned on.

FIG. 12C shows a state where the docking plate 30 is positioned at the transfer position. FIG. 12C assumes a state where the container 5 is placed on the docking plate 30 . The first pin 32R is pushed downward by the weight of the container 5, and the downward protrusion amount from the support portion 35 is large. Figure 12D shows the state where the docking plate 30 has been moved from the state in Figure 12C to the docking position. When the first pin 32R abuts against the plunger 12a, the plunger 12a is displaced from the initial position toward the side of the port plate 2 in the X direction. The sensor 12 is switched on to detect that the container 5 is placed on the docking plate 30 and that the docking plate 30 is positioned in the docking position.

<Fourth Embodiment>

As described in the first embodiment, if the container 5 is placed on the docking plate 30 Put in the inclined state, at least one of the second pin 32F, the third pin 32L, and the first pin 32R is not pushed downward. Therefore, this inappropriate placement state is detected. However, for example, if the inclination of the container 5 is small, the first pin 32R may be pushed down to some degree. Figure 13 shows an example. Referring to FIG. 13 , a container 5 indicated by a two-dot chain line shows an example of a container 5 properly placed on the docking plate 30, and a container 5 indicated by a solid line shows an example of a container 5 placed while being tilted in the Y direction (left side down and right side up in FIG. 13 ).

FIG. 14 shows the behavior of the first detection unit 9 in the case where the container 5 is placed while being tilted in the Y direction (as shown in FIG. 13 ) and the first pin 32R is pushed down. The two-dot chain line L1 indicates the locus of the position of the lower end of the first pin 32R in the case where the container 5 is properly placed on the docking plate 30 .

The state ST1 shows a state where the butt plate 30 is positioned at the transfer position. The container 5 (not shown) is placed in an inclined state on the butt plate 30, and the lower end of the first pin 32R does not reach the lower end position L1.

State ST2 shows a state where docking plate 30 has been moved from state ST1 to the docking position. When the first pin 32R abuts against the roller portion 91a, the movable member 91 is inclined by only an inclination angle θ4 from the initial position toward the side of the port plate 2 in the X direction.

When the inclination of the container 5 falls within the allowable range, there is no problem in the conveyance of the substrate W. However, if the inclination of the container 5 exceeds the allowable range, a problem may occur such that the terminator 60 of the substrate transfer robot 6 cannot transfer the substrate W properly. Therefore, it is preferable to distinguish the inclination of the container 5 that allows the transfer of the substrate W. For example, if the tilt angle of the movable member 91 is θ4 (<θ2), the first sensor 90 will not generate an ON signal. However, depending on individual differences or attachment errors of the first detection unit 9, for each loading port 1, the downward pushing amount of the first pin 32R and the inclination angle of the movable member 91 at which the first sensor 90 is opened do not have a predetermined relationship in some cases.

Therefore, a position adjustment mechanism for the first detection unit 9 can be provided. When the position of the first detection unit 9 can be adjusted for each loading port 1, the downward pushing amount of the first pin 32R and the inclination angle of the movable member 91 at which the first sensor 90 is opened can be adjusted to predetermined values, and it is possible to reliably detect that the container 5 placed on the docking plate 30 is in a posture exceeding the permissible inclination range.

The position adjustment mechanism can be any mechanism. As an example, the structure in which the bracket 9a has the attachment position adjustment function is simple. Fig. 15 is a perspective view of the bracket 9a having a position adjustment function.

The bracket 9 a is an L-shaped metal fitting, and includes an attachment hole H1 for attaching the first detection unit 9 to the bracket 9 a , and an attachment hole H2 for attaching the bracket 9 a to the base portion 7 . In the first detection unit 9, in the case of the first sensor 90, a screw hole (not shown) is formed. When a screw is inserted into the attachment hole H1 and fastened to the threaded hole, the first detection unit 9 is fixed to the bracket 9a. Threaded holes (not shown) are also formed in the base portion 7 . When a screw is fastened to the threaded hole through the attachment hole H2 , the bracket 9 a is fixed to the base portion 7 .

The attachment hole H1 is a long hole extending in the Z direction. Therefore, it is possible to adjust the attachment position of the first detection unit 9 in the Z direction with respect to the bracket 9a. The attachment hole H2 is a long hole extending in the X direction. Therefore, it is possible to adjust the attachment position of the bracket 9 a in the X direction with respect to the base portion 7 . Therefore, it is possible to adjust the position of the first detection unit 9 in the Z direction and the X direction with respect to the first pin 32R.

When the position of the first detection unit 9 is adjusted, the first detection unit 9 is temporarily fixed to the base portion 7 via the bracket 9 a. As a test, the container 5 is intentionally placed on the docking plate 30 in a posture beyond the permissible range of inclination, and the output of the first sensor 90 is monitored when the docking plate 30 is moved from the transfer position to the docking position. If the first sensor 90 outputs ON signal, the position of the first detection unit 9 is inappropriate. Therefore, for example, the position of the first detection unit 9 in the X direction is adjusted toward the PP side. Alternatively, lower the position of the first detection unit 9 in the Z direction.

In addition, as a test, the container 5 in a normal posture within the allowable tilt range is placed on the docking plate 30, and the output of the first sensor 90 when the docking plate 30 is moved from the transfer position to the docking position is monitored. If the first sensor 90 does not output an ON signal, the position of the first detection unit 9 is inappropriate. Therefore, for example, the position of the first detection unit 9 in the X direction is adjusted toward the side opposite to the PP side. Alternatively, the position of the first detection unit 9 in the Z direction is raised. Therefore, the position of the first detection unit 9 can be appropriately adjusted, and the state in which the container 5 is placed in an inappropriate posture can be more reliably detected.

<Fifth Embodiment>

In the above-described embodiments, as the first detection unit 9, a contact type detection unit that contacts the first pin 32R is employed. However, a non-contact detection unit may also be used. FIG. 16 shows a non-contact detection unit 13 instead of the first detection unit 9 .

The detection unit 13 is a non-contact sensor, for example, a proximity The sensor detects the proximity of the detection target 13a, and is, for example, a magnetic proximity sensor, an electrostatic capacitive proximity sensor, or an electromagnetic induction proximity sensor. Although the detection target 13a is provided integrally at the lower end portion of the first pin 32R, preferably, the detection target 13a is provided integrally with the first pin 32R and is made of the same metal as the first pin 32R, for example, iron or aluminum, or, depending on the type of the proximity sensor below, only the detection target 13a is made of a magnet.

The magnetic proximity sensor is composed of a reed switch, a hall element or a magnetoresistive element. When a magnetic proximity sensor composed of a reed switch is used, the detection target 13a is made of a magnet, and the proximity of the detection target 13a is detected by physical operation of the reed switch due to magnetic attraction. When a magnetic proximity sensor composed of a Hall element or a magnetoresistive element is used, the proximity of the detection target 13a of the magnet is detected based on a change in the magnetic field or magnetic flux.

The capacitive proximity sensor includes detection electrodes and an oscillating circuit as a circuit for detecting capacitance changes of the detection electrodes. Since the capacitance of the detection electrode changes when the detection target 13 a approaches the circuit, the oscillation circuit can detect the proximity of the metal detection target 13 a through the change in the capacitance of the detection electrode.

The electromagnetic induction proximity sensor includes a detection coil that generates an alternating magnetic field. When the detection target 13a of the metal conductor is close to the alternating magnetic field, an eddy current (eddy current) is generated in the metal conductor to attenuate (damp) or stop the oscillation of the oscillation circuit in the sensor, thereby detecting the detection target 13a approaching the electromagnetic induction proximity sensor.

The state ST11 shows a case where the butting plate 30 has been moved to the docking position in a state where the container 5 is not placed on the butting plate 30 (a state where the first pin 32R is not pushed down). Since the detection target 13 a and the detection unit 13 are separated in the Z direction, the detection target 13 a is not detected by the detection unit 13 . Therefore, it was determined that the container 5 was not properly set.

The state ST12 shows a case where the butting plate 30 has been moved to the docking position in a state where the container 5 is properly placed on the butting plate 30 (a state where the first pin 32R is pushed down). Since the detection target 13 a and the detection unit 13 are adjacent, the detection target 13 a is detected by the detection unit 13 . Therefore, it was determined that the container 5 was properly placed.

If the detection unit 13 is a sensor that outputs a detection signal according to the proximity of the detection target 13a, it can also be detected that the container 5 described in the fourth embodiment is placed while being inclined in the Y direction, and the state in which the first pin 32R is not sufficiently pushed down.

FIG. 17 shows another non-contact detection unit 14 instead of the first detection unit 9 . FIG. 17 is a view in which the viewing direction is different from that of FIG. 16 . FIG. 17 shows the periphery of the first pin 32R viewed from a line of sight in the X direction. The detection unit 14 is an optical sensor including a light emitting element 14a and a light receiving element 14b, and is, for example, a photointerrupter. A two-dot chain line L2 indicates an orbit of light from the light emitting element 14a.

The state ST21 shows a case where the butting plate 30 has been moved to the docking position in a state where the container 5 is not placed on the butting plate 30 (a state where the first pin 32R is not pushed down). Since the first pin 32R does not block the track L2 of light, the detection unit 14 does not detect the first pin 32R. Therefore, it was determined that the container 5 was not properly set.

The state ST22 shows a case where the butting plate 30 has been moved to the docking position in a state where the container 5 is properly placed on the butting plate 30 (a state where the first pin 32R is pushed down). Since the first pin 32R blocks the track L2 of light, the detection unit 14 detects the first pin 32R. Therefore, it was determined that the container 5 was properly placed.

If the detection unit 14 is a sensor that outputs a detection signal according to the degree of blocking of the light track L2 by the first pin 32R (the degree of the light receiving amount of the light receiving element 14b), it can also be detected that in the fourth embodiment A state is described in which the container 5 is placed while being inclined in the Y direction, and the first pin 32R is not sufficiently pushed down.

The present invention is not limited to the foregoing embodiments, and various modifications/changes are possible within the spirit of the present invention.

7: Base part

8: Mobile mechanism

9: Detection unit

9a: Bracket

10a: Sensor

30: Butt plate

31: Locating pin

32F: detection pin

32R: detection pin

34: Driving mechanism

35: Support part

80: rail components

81: Slider

81a: Joining member

81b: column

81c: Connection part

82: Driving mechanism

90: sensor

91: Movable components

91a: roller part

820: drive unit

820a: motor

820b: output shaft

821: arm member

822: Cam follower

823: Cam plate

PP: side

Claims (14)

A loadport comprising: a port plate including an opening portion through which a substrate can be inserted and removed; a placing table on which the container for storing the substrate is placed; A port door capable of opening/closing the opening portion and holding the door portion of the container; and a driving mechanism configured to perform an opening/closing operation of the port door, Among them, the placement table includes: base part; a docking plate on which the container is placed; a movement mechanism disposed on the base portion and configured to support the docking plate and move the docking plate between a first position close to the port plate retaining a side of the door portion and a second position remote from the port plate; a first pin protruding from and disposed on the butt plate so as to be pushed downward; and a first detection unit, disposed on the base portion and configured to detect that the docking plate is positioned in the first position, The first detection unit includes: a movable member capable of being displaced relative to the base portion in a moving direction of the docking plate by the moving mechanism; and a first sensor configured to detect the displacement of the movable member, and During movement of the abutment plate from the second position to the first position, the movable member is arranged in a position against the first pin in a pushed-down state. The loading port according to claim 1, further comprising a control unit configured to determine whether the docking plate has reached the first position based on the detection result of the first sensor, and drive the driving mechanism as a condition when it is determined that the docking plate has reached the first position. As for the loading port of claim 1, it also includes: a second detection unit configured to detect whether the container is placed on the docking plate; and a third detection unit configured to detect whether the container is placed on the docking plate, Wherein, the second detection unit includes: a second pin protruding from and disposed on the butt plate so as to be pushed downward; and a second sensor, supported on the docking plate and configured to detect that the second pin has been pushed downward, and The third detection unit includes: a third pin protruding from and disposed on the butt plate so as to be pushed downward; and A third sensor is supported on the docking plate and configured to detect that the third pin has been pushed. Such as the loading port of claim 3, wherein, two of the first pin, the second pin, and the third pin are arranged on one side of the port plate in the moving direction while being separated in a direction crossing the moving direction, The rest of the pins except the two pins are arranged farther from the port plate in the direction of movement than the two pins, and In a plan view of the butt plate, the first pin, the second pin and the third pin are arranged to be positioned at the vertices of an acute triangle. The load port of claim 4, wherein the first pin is one of the two pins. The loading port according to claim 3, further comprising a control unit configured to determine whether the docking plate has reached the first position based on the detection result of the first sensor, and drive the drive mechanism under at least one condition that determines that the docking plate has reached the first position, Wherein, when the second sensor detects the downward push of the second pin, the third sensor detects the downward push of the third pin, and the first sensor detects that the docking plate is positioned at the first position, the control unit starts the opening/closing operation of the port door through the driving mechanism. The loading port according to claim 3, further comprising a control unit configured to determine whether the docking plate has reached the first position based on the detection result of the first sensor, and drive the drive mechanism under at least one condition that determines that the docking plate has reached the first position, Wherein, a substrate transfer module is provided on the side of the port plate, and a substrate transfer robot is provided in the substrate transfer module, the substrate transfer robot is configured to put in or take out the substrate between the substrate transfer module and the container through the opening portion, and When the second sensor detects the downward push of the second pin, the third sensor detects the downward push of the third pin, and the first sensor detects that the docking plate is positioned at the first position, the control unit sends a signal for allowing the substrate transfer robot to operate. A loadport comprising: a port plate including an opening portion through which a substrate can be inserted and removed; a placing table on which the container for storing the substrate is placed; A port door capable of opening/closing the opening portion and holding the door portion of the container; and a driving mechanism configured to perform an opening/closing operation of the port door, Among them, the placement table includes: base part; a docking plate on which the container is placed; a movement mechanism disposed on the base portion and configured to support the docking plate and move the docking plate between a first position proximate to the port plate retaining a side of the door portion and a second position remote from the port plate; a first pin protruding from and disposed on the butt plate so as to be pushed downward; and a first detection unit disposed on the base portion and configured to detect that the docking plate is positioned at the first position, and The first detection unit includes a non-contact sensor that detects the first pin in a state of being pushed down during the process of the butt plate moving from the second position to the first position. The loading port as claimed in claim 8, further comprising a control unit configured to determine whether the docking plate has reached the first position based on the detection result of the non-contact sensor, and drive the driving mechanism as a condition when it is determined that the docking plate has reached the first position. Such as the loading port of claim item 8, it also includes: a second detection unit configured to detect whether the container is placed on the docking plate; and a third detection unit configured to detect whether the container is placed on the docking plate, Wherein, the second detection unit includes: a second pin protruding from and disposed on the butt plate so as to be pushed downward; and a second sensor, supported on the docking plate and configured to detect that the second pin has been pushed downward, and The third detection unit includes: a third pin protruding from and disposed on the butt plate so as to be pushed downward; and A third sensor is supported on the docking plate and configured to detect that the third pin has been pushed. Such as the loading port of claim item 10, wherein, Two of the first pin, the second pin, and the third pin are arranged on one side of the port plate in the moving direction of the butting plate while being separated in a direction crossing the moving direction, The rest of the pins except the two pins are arranged farther from the port plate in the direction of movement than the two pins, and In a plan view of the butt plate, the first pin, the second pin and the third pin are arranged to be positioned at the vertices of an acute triangle. The load port of claim 11, wherein the first pin is one of the two pins. The loading port according to claim 10, further comprising a control unit configured to determine whether the docking plate has reached the first position based on the detection result of the non-contact sensor, and drive the driving mechanism under at least one condition that determines that the docking plate has reached the first position, Wherein, when the second sensor detects the downward push of the second pin, the third sensor detects the downward push of the third pin, and the non-contact sensor detects that the docking plate is positioned at the first position, the control unit starts the opening/closing operation of the port door through the driving mechanism. The loading port according to claim 10, further comprising a control unit configured to determine whether the docking plate has reached the first position based on the detection result of the non-contact sensor, and drive the driving mechanism under at least one condition that determines that the docking plate has reached the first position, Wherein, a substrate transfer module is provided on the side of the port plate, and a substrate transfer robot is provided in the substrate transfer module, the substrate transfer robot is configured to put in or take out the substrate between the substrate transfer module and the container through the opening portion, and When the second sensor detects the downward push of the second pin, the third sensor detects the downward push of the third pin, and the non-contact sensor detects that the docking plate is positioned at the first position, the control unit sends a signal for allowing the substrate transfer robot to operate.

Images