KR20100109889A - Probe pin - Google Patents

Abstract

In the probe pin of this invention, the outer periphery of the insulator which inserted the conductive needle in the center is enclosed by the outer conductor arrange | positioned coaxially with a conductive needle, and the said insulator forms the through-hole which penetrates in the axial center direction of the said conductive needle. . Preferably, a plurality of the through holes are formed in the peripheral portion of the conductive needle. This enables use in a high frequency region.

Description

Probe pin {PROBE PIN}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to probe pins used for testing electrical characteristics of an IC chip or an electrical circuit on a substrate.

As the size and size of semiconductor devices become smaller and smaller, the arrangement pitch of these input / output terminals is also reduced as much as possible, and the probe pins are also reduced in size in response to the narrowing of the arrangement pitch of these input / output terminals.

As the probe pin,

(1) A conductive needle is inserted into the center of an outer conductor formed in a cylindrical shape with a void, and a spacer made of an insulating material is disposed in the axial center of the outer conductor, and the conductive needle is inserted into and supported by the spacer. (Eg, see Patent Document 1), or

(2) embedding the gap between the conductive needle and the outer conductor with an insulator made of a foamed resin material;

And the like have been proposed.

Japanese Patent Publication No. 2002-257849

In recent years, as the arrangement pitch of the input / output terminals narrows, the thinning of the probe pin increases, and the thinning is progressed to about 0.3 mm, but the thinning is further required.

In addition, in order to secure desired high frequency characteristics in the probe pin, it is also required to increase the dielectric constant of the insulator.

In addition, the probe pin presses the tip (inspection end) of the conductive needle to the inspection object with a predetermined pressure so that the conductive needle does not slide in the axial direction with respect to the insulator by the pressing reaction force. It is also desired to sufficiently secure the pulling strength in the axial direction of the conductive needle to the insulator.

In response to such a requirement, according to the conventional structure (1), since a gap as an air insulation layer is formed between the conductive needle and the outer conductor surrounding it, a certain dielectric constant can be obtained, but the air formed by the gap Since the insulating layer is divided by the spacer disposed in the axial direction, the gap between the gap and the spacer causes a high frequency reflection, making it difficult to use in a high frequency region of several giga or more.

Further, according to the conventional structure (1), in the structure of arranging the spacer in place in the axial direction to form the air insulation layer, the supporting length in the axial direction of the conductive needle penetrated and supported by the spacer is the length of the conductive needle. It is difficult to increase the pullout strength in the axial direction of the conductive needle while increasing the dielectric constant of the insulator while increasing the dielectric constant of the insulator.

In addition, in order to increase the dielectric constant of the insulator in the conventional structure (2), it is necessary to increase the foaming rate or increase the diameter of the insulator. However, as the present foam insulator, the desired strength (pulling strength of the conductive needle) is ensured. In addition, the foaming rate cannot be more than 50%, and the diameter of the insulator must be increased to secure desired high frequency characteristics. However, this makes it difficult to narrow the probe pins.

Further, in the conventional structure (2), the insulator is in long contact with the conductive needle in the axial direction, but since the insulator is formed by extrusion molding, the degree of adhesion of the insulator to the outer circumference of the conductive needle is low, so that It becomes difficult to make draw strength large enough.

In addition, in the conventional structure (2), in order to increase the dielectric constant of the insulator, it is necessary to increase the foaming rate or increase the diameter of the insulator. However, increasing the foaming rate of the insulator lowers the degree of adhesion between the insulator and the conductive needle, making it difficult to secure the desired pullout strength. Increasing the diameter of the insulator also hinders the miniaturization of the probe pin.

The present invention has been made in view of these points,

To provide probe pins for use in the high frequency range.

For the main purpose.

Also,

-Providing a probe pin that allows for use in the high frequency region while minimizing thinning,

-Securing sufficient pulling strength of the conductive needle

Also aims.

In order to achieve the above object, the probe pin of the present invention,

With a conductive needle,

An insulator disposed around the conductive needle, and

An outer conductor arranged concentrically with the conductive needle on an outer circumference of the insulator

And,

The insulator is provided with a through hole penetrating in the axial direction of the conductive needle.

According to this structure, since the air insulation layer formed by the space | gap continues in the axial center direction, favorable signal exchange without reflection is possible even in the high frequency area | region more than several groups is attained. Moreover, the space | gap which penetrates to an axial direction and forms an air insulation layer can be used as a path of a light beam.

Moreover, in this invention, it is preferable to provide a plurality of said through-holes in the peripheral part of the said conductive needle. In this case, the void forming the air insulation layer penetrating in the axial direction can be used as the light beam passage, and one of the plurality of through holes is used as the incident passage of the light beam and the other through hole is used as the return passage of the reflective beam. It becomes possible to perform the position detection of the line part which touch-conducts a probe pin using this.

Moreover, it is preferable that some said through hole is arrange | positioned at the point symmetrical position with respect to the axial center of the said conductive needle. In this way, the incident path of the light beam and the return path of the reflected beam can be positioned at a diagonal position with respect to the conductive needle, and it becomes possible to accurately perform the position detection of the target site for contact conduction of the tip of the conductive needle. In addition, since the air insulation layer is at a point symmetrical position with respect to the axis of the conductive needle, the insulation balance at the outer circumference of the conductive needle is good and the electrical characteristics are also excellent.

Moreover, in this invention, it is preferable to comprise the said conductive needle with the tungsten material containing a tungsten alloy. By doing so, the strength and durability of the conductive needle are high, which makes it effective for thinning the probe pin.

Moreover, in this invention, it is preferable to make the porosity of the said insulator 60% or more. By doing so, the ratio of the voids (pores) in the gap between the conductive needle and the outer conductor can be sufficiently increased to increase the dielectric constant of the insulator, and the probe pin can be sufficiently narrowed while securing desired high frequency characteristics.

In the present invention,

The insulator is,

An inner layer body covering an outer circumferential surface of the conductive needle;

An outer layer body covering the inner circumferential surface of the outer conductor, and

A plurality of radial ribs protruding radially outward from the inner layer body connected to the inner peripheral side of the outer layer body

And,

It is preferable to provide the radial ribs continuously in the longitudinal direction of the conductive needle.

By doing so, since the air insulation layer formed by the voids is continuous in the longitudinal direction of the conductive needle, good signal exchange without reflection is possible even in a high frequency region of several or more. In addition, the ratio of the pores in the gap between the conductive needle and the outer conductor is sufficiently increased to increase the dielectric constant of the insulator, and sufficient thinning is possible while securing desired high frequency characteristics.

Moreover, in this invention, it is preferable to arrange | position the spirally wound taping layer as an insulating sheath on the outer peripheral surface of the said outer conductor, and to form this tapering layer by winding 1/2 wrap.

As a result, the insulating sheath of the probe pin is formed by a taping layer wound around 1/2 wrap, whereby the insulator is wound and fastened from the outer periphery to be tightly adhered to the conductive needle, resulting in a high pulling strength of the conductive needle.

In addition, since the insulating sheath of the probe pin is formed of a tape wrapped layer of 1/2 wrap, the insulator is strongly adhered to the conductive needle by winding fastening from the outer circumference, so that the pullout strength of the conductive needle is high.

In addition, when the insulating sheath of the probe pin is formed by a tapered layer in which the coil is double wound and overlapped by 1/2 wrap winding, the buckling strength of the entire probe pin becomes high, and when the inspection end of the conductive needle is pressed against the inspection object. It can be avoided that the probe pin largely buckles and deforms due to the pressing reaction force, and insufficient contact pressure to the inspection object can be avoided.

The outer circumferential surface of the taping layer, which becomes the outer circumferential surface of the probe pin, becomes a smooth surface without winding step by 1/2 wrap winding. Therefore, when the base of the probe pin is fixedly supported on the fixed plate, and the inspection end side of the probe pin is slidably supported by the sliding plate to approach the inspection object, the probe flexes and deforms by pressing reaction force against the inspection object. The pin can be slide-displaced smoothly with little resistance with respect to the sliding plate, and it becomes possible to press the test | inspection end of a conductive needle to a test | inspection object by appropriate contact pressure by the bending restoring force of a probe pin.

In addition, it is preferable that the outer conductor is formed by spirally winding a plurality of conductive wires, and the spiral winding direction of the taping layer and the spiral winding direction of the conductive wire are reversed. By doing so, the unwinding of the conducting wire and the unwinding of the taping layer are prevented from each other, and the buckling strength of the probe pin can be maintained high.

In addition, it is preferable to provide a heat seal layer on the rear surface of the taping layer. By doing so, the tape layer can be wound on the outer conductor with high adhesiveness by heating after the wrap winding treatment or heating wrap, and the winding fastening effect is high, and the buckling strength of the probe pin becomes high. It becomes more effective for improvement.

In addition, the winding structure of the taping layer represented by 1/2 wrap winding in this invention means the structure which winds up a taping layer, laminating adjacent taping layers having 1/2 tape width by winding. .

The structure for supporting the probe pin of the present invention,

The base end side of the probe pin is fixedly supported on the fixed plate, the inspection end side of the probe pin is slidably supported on the sliding plate, and the fixed plate and the sliding plate having a fixed interval are relatively relatively to the inspection object. Approach / separation, the test stage of the probe pin is pressed against the test object.

According to this configuration, since the outer circumferential surface of the taping layer serving as the outer circumferential surface of the probe pin is a smooth surface without winding step by 1/2 wrap winding, the lower portion of the probe pin can slide upwardly with respect to the sliding plate. At the time, the lower portion of the probe pin at the through portion of the sliding plate can slide smoothly with less resistance.

In addition, since the insulating sheath of the probe pin is formed by a tapered layer in which the coil is double wound by 1/2 wrap winding, the buckling strength of the entire probe pin is high, and the inspection end of the conductive needle is pressed against the inspection object. At this time, a large buckling deformation by the pressure reaction force can be avoided beforehand.

Thus, according to the probe pin which concerns on this invention, it becomes possible to perform the test | inspection in the high high frequency area | region which the inspection was difficult conventionally with a stable characteristic.

In addition, it is possible to perform the inspection in a high frequency region, which has been difficult in the past, with a stable characteristic while minimizing the size.

In addition, it is possible to sufficiently secure the pull-out strength of the conductive needle, and to obtain a probe pin that enables use in a high-frequency region while achieving thinning.

1 is an external perspective view of a probe pin of a first embodiment of the present invention.
2 is a longitudinal cross-sectional view of the probe pin of the first embodiment.
3 is a cross-sectional view of the probe pin of the first embodiment.
4 is a schematic configuration diagram of a use form of each embodiment of the present invention.
It is a schematic diagram which shows the position detection form of each embodiment of this invention.
It is a longitudinal cross-sectional view which shows the principal part of the modification which differs in conductive needle tip shape.
It is a longitudinal cross-sectional view which shows the principal part of the modification which differs in conductive needle tip shape.
It is an external appearance perspective view of the probe pin of 2nd Embodiment of this invention.
8 is a longitudinal cross-sectional view of the probe pin of the second embodiment.
9 is an enlarged front view of a part of the probe pin of the second embodiment.
10 is a cross-sectional view of the probe pin of the second embodiment.
It is a schematic front view which shows the 1st state of the support structure of the probe pin of 2nd Embodiment.
It is a schematic front view which shows the 2nd state of the support structure of the probe pin of 2nd Embodiment.
It is an external appearance perspective view of the probe pin of 3rd embodiment of this invention.
It is a longitudinal cross-sectional view of the probe pin of 3rd Embodiment.
14 is a cross-sectional view of the probe pin of the third embodiment.

(First embodiment)

The external appearance of the probe pin 1A which concerns on 1st Embodiment of this invention is shown in FIG. 1, and the cross section is shown in FIG. 2, respectively. The probe pin 1A is coaxially circumferentially disposed with the conductive needle 2A, the insulator 3A in which the conductive needle 2A is inserted in the center, and the conductive needle 2A on the outer periphery of the insulator 3A. 4 A of external conductors, and 5 A of insulating sheaths which cover the outer periphery of 4 A of external conductors are provided. This probe pin 1A is comprised in the ultrafine linear shape whose length in an axial direction is about 20 mm, and an outer diameter is about 0.3 mm. 2 A of conductive needles are formed with the tungsten disconnection of about 0.1 mm in diameter, and the lower end used as a detection end is flat in this example. The outer conductor 4A is formed by spirally winding 20 tin-plated copper alloy thin wires having a diameter of 0.03 mm. The insulator 3A is made of an insulating resin material such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), the inner layer body 3Aa into which the conductive needle 2A is inserted, and the outer conductor 4A. The outer layer body 3Ab wound up is connected to the radial rib 3Ac, and the cross-sectional shape is formed in honeycomb form. In this example, the six through-holes 6A having a fan-shaped cross-sectional shape surrounded by the inner layer 3Aa, the outer layer 3Ab, and the radial ribs 3Ac are point symmetrical about the axis of the conductive needle 2A. The through holes 6A are formed at equal pitches in the circumferential direction, and each through hole 6A penetrates in the axial direction of the conductive needle and is opened at the upper and lower ends of the insulator 3A. 5 A of insulating sheaths are formed by winding PET tape of thickness 0.008 mm.

The probe pin 1A is comprised as mentioned above, and as shown in FIG. 4, the board | substrate of the electrically conductive needle 2A in the pair of probe pin 1A electrically connected to the test | inspection apparatus 8 is board | substrate. The characteristics of the circuit are inspected by pressing the terminal of the IC chip 10 mounted on (9) or a predetermined line portion on the substrate 9 to flow a high frequency test signal through the positive probe pin 1A. Will be done.

In this case, since the air insulation layer formed by the through hole 6A is continuous in the axial center direction, good signal exchange without reflection can be performed even in a high frequency region of several or more. Moreover, 2 A of conductive needles are supported by the inner layer body 3Aa of 3 A of insulators in the substantially full length, and the pullout strength of 2 A of conductive needles is high.

In addition, as shown in FIG. 5, inspection light such as a laser beam is incident from the light emitting source 100 provided on the upper end of the through hole 6A of any one of the insulators 3A in the probe pin 1A. Irradiating toward the site, the reflected light is guided to the light receiver 101 through the through hole 6A for incidence and the other through hole 6A in the point symmetrical position, and the metal part serving as the inspection target from the change of the reflected light. The position of the terminal and the circuit pattern portion can be detected and used for positioning control of the probe pin 1A.

Hereinafter, the result of having compared the difference of the characteristic of the structure of 1st Embodiment and the conventional structure (with a foam insulator) is demonstrated below. Generally, the foaming degree in the conventional structure using a foam insulator, and the porosity (foaming degree = porosity) in the structure of 1st Embodiment,

Structure of First Embodiment: 60% Min

Conventional structure: 50% max

Becomes

Thus, the outermost diameters of the probe pins in the structure (60% porosity) and the conventional structure (50% foaming degree) of the first embodiment each provided with conductive needles having the same diameter are compared.

In the structure of the first embodiment,

Outer diameter: do1

Challenge needle diameter: di

Void: A1

Public rate: 0.6

If you do,

Porosity = A1 / [π / 4 × (do1 2 -di 2)]

Becomes

Here, substituting public rate = 0.6,

0.6 = A1 / [π / 4 × (do1 2 -di 2)]

Becomes

On the other hand, in the conventional structure,

Outer diameter: do2

Challenge needle diameter: di

Air gap: A2

Foam degree: 0.5

,

Foam Degree = A2 / [π / 4 × (do2 ² -di ² )]

Becomes

Here, when porosity = 0.5 is substituted, 0.5 = A2 / [π / 4 x (do2 ² -di ² )]. In addition, the space | gap here means the sum total of the void area in one cross section perpendicular | vertical to an axis line.

In order to make the electrical characteristics of the probe pin 1A of the first embodiment equal to those of the conventional structure, it is necessary to equalize the void A1 of the structure of the first embodiment and the void A2 of the conventional structure. (A1 = A2).

therefore,

0.6 × π / 4 × (do1 ² -di ² ) = 0.5 × π / 4 × (do2 ² -di ² )

Becomes

If you transform this expression,

do2 = √ [(0.6 / 0.5) × do1 ^2- (0.1 / 0.5) × di ² ]

Becomes

The following description is based on the assumption that the conductive needle diameter di is 0.1 mm and the outermost diameter d1 of the probe pin 1A is 0.2 mm. in this case,

do2 = [(0.6 / 0.5) × 0.2 ^2- (0.1 / 0.5) × 0.1 ² ] = 0.214

Becomes

Thus, do2: do1 = 0.214: 0.2 = 1.07: 1.0

Becomes In other words, in order to obtain the same electrical characteristics, the conventional structure requires an outer diameter of 1.07 times the structure of the first embodiment.

In addition, in the above description, although the outermost diameter in the conventional structure which has the largest foaming degree (50%) was compared with the outermost diameter of the probe pin 1A of 1st Embodiment which has the minimum porosity (60%), conventionally The foaming degree of the insulator universally used in the structure is 48%, and the porosity of the insulator 3A for which the general purpose is expected in this embodiment is 61%. When this general purpose structure is compared with the said calculation formula, it becomes do2: do1 = 1.1: 1.0, and in order to acquire the same electrical characteristic, the conventional structure requires the outer diameter of 1.1 times the structure of 1st Embodiment.

(Modified example of the first embodiment)

1st Embodiment can also be implemented with the following forms.

(1) The tip shape of the conductive needle 2A is a conductive needle 2A 'having a thin shape as shown in FIG. 6A as well as the flat cut shape as described in the first embodiment described above, and FIG. 6B. The hook-shaped electrically conductive needle 2A "shown in the figure can be arbitrarily set corresponding to the inspection object.

(2) 2 A of conductive needles can use the tungsten disconnection which gold-plated as needed.

(3) The outer conductor 4A may be formed by winding a copper alloy tape.

(4) The number of the through holes 6A is not limited to the above description of the first embodiment, and may be an even number of four or eight, or an odd number of five or seven.

(5) The cross sectional shape of the through hole 6A may be implemented as a circle or a polygon.

(6) In the above description of the first embodiment, the radial rib 3Ac is formed in a straight line parallel to the axis center of the conductive needle 2A, but is continuously spirally smoothly along the longitudinal direction of the conductive needle 2A. You may do it.

(2nd embodiment)

EMBODIMENT OF THE INVENTION Hereinafter, some of 2nd Embodiment of this invention is described based on drawing. 7-10, the probe pin 1B which concerns on 2nd Embodiment of this invention is shown, FIG. 7 is an external perspective view of the probe pin 1B, FIG. 8 is a longitudinal cross-sectional view, FIG. An enlarged front view, FIG. 10 is a cross sectional view thereof.

The probe pin 1B is disposed on the outer periphery of the insulator 3B coaxially with the conductive needle 2B, the insulator 3B in which the conductive needle 2B is inserted in the center, and the conductive needle 2B. The outer conductor 4B and the taping layer 5B as an insulating sheath which covers the outer periphery of the outer conductor 4B are provided, and it is comprised by the ultrafine linear shape of about 20 mm in axial direction length, and 0.3 mm or less in outer diameter.

The conductive needle 2B is made of tungsten or a tungsten alloy and is formed of a single line having a diameter of about 0.1 mm. In this example, the lower end serving as the detection end is formed flat. The outer conductor 4B is formed by spirally winding 20 conductive wires 4Ba made of tin-plated copper alloy thin wires having a diameter of 0.03 mm.

The insulator 3B is formed of a resin material such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer) or FEP (tetrafluoroethylene hexafluoropropylene copolymer) on the outer circumference of the conductive needle 2B. It is formed by extrusion molding a foam material having a foam rate of several tens percent.

Taping layer 5B as an insulating sheath is a conductor 4Ba that forms an outer conductor 4C at intervals of overlapping a PET tape having a thickness of 0.004 mm by 1/2 (see FIG. 9) of the tape width w. It is formed by spiral winding (1/2 lap winding) in the reverse direction to the spiral winding direction of. In this way, the outer circumferential surface of the taping layer 5B wound around the 1/2 wrap is a smooth surface without winding step. Moreover, the heat-sealing layer 20 is formed in the back surface (inner surface) of the taping layer 5B, and the high adhesiveness of the taping layer 5B is high by the heating after the wrap winding process, or the wrap winding process while heating. It can be wound up by the outer conductor 4B.

In addition, with the winding structure of the taping layer 5B represented by "1/2 wrap winding" in this invention, as shown in FIG. 9 etc., it is 1/2 tape to tape the adjacent taping layers 5B by winding. The structure formed by winding the taping layer 5B while laminating with a width is said. Therefore, in the taping layer 5B after winding, in all cross sections, the tape thickness is the state which became twice the original tape thickness, and the tape surface becomes a smooth surface without a step | step.

The probe pin 1B which concerns on 2nd Embodiment is comprised as mentioned above, and as shown in FIG. 4, each electrically conductive needle 2B in the pair of probe pin 1B electrically connected to the test | inspection apparatus 8 is shown. ) Is pressed against the input / output terminal of the IC chip 10 mounted on the substrate 9 or a predetermined line portion on the substrate 9 so that a high frequency inspection signal flows to both probe pins 1B. The characteristic of the circuit is checked.

The support structure of the probe pin 1B at the time of performing the said characteristic test is shown to FIG. 11A and 11B. In this case, the probe pin 1B is maintained in the vertical position, and is penetrated and supported through the upper fixing plate 11 and the lower sliding plate 12, and the upper proximal end of the probe pin 1B is attached to the fixing plate 11. It is inserted and fixed, and the lower inspection end side of the probe pin 1B is inserted and supported by the sliding plate 12 so that it can slide up and down.

The fixed plate 11 and the sliding plate 12 which supported the probe pin 1B in the vertical position are raised and lowered integrally with each other in a state where the vertical gap is fixed, and the supported probe pin 1B is the inspection object S. Approach and move away.

The fixed plate 11 and the sliding plate 12 which are lifted up and down are inspected by the predetermined amount S even after the lower end (inspection end) of the conductive needle 2B of the probe pin 1B contacts the inspection target S. Is approached). In this case, as shown in FIG. 11B, the pressing reaction force against the inspection object S acts upward on the probe pin 1B, and the lower portion of the probe pin 1B is sliding plate 12 by this pressing reaction force. The probe pin 1B elastically flexes and deforms between the fixed plate 11 and the sliding plate 12, and the lower end (inspection end) of the conductive needle 2B is moved by the elastic restoring force. The test object S is pressed at a predetermined contact pressure.

Here, since the outer circumferential surface of the probe pin 1B, that is, the outer circumferential surface of the taping layer 5B, is a smooth surface without winding step, the lower portion of the probe pin 1B with respect to the sliding plate 12 as described above. When the slide is displaced upward, the lower portion of the probe pin 1B at the through portion of the sliding plate 12 can slide smoothly with less resistance.

In addition, since the insulating sheath of the probe pin 1B is constituted by the taping layer 5B in which the half wrap is wound, the insulator 3B is wound and fastened from the outer circumference and strongly adhered to the conductive needle 2B. The pullout strength of (2B) is high. In addition, since the insulating sheath of the probe pin 1B is formed by the taping layer 5B which is double-wound by the half wrap winding, the buckling strength of the whole probe pin 1B becomes high, as mentioned above. When the lower end (inspection end) of the electrically conductive needle 2B is pressed against the inspection object S, it is largely buckled and deformed by the pressing reaction force, and the reduction of the contact pressure to the inspection object S is avoided beforehand.

(Third embodiment)

12-14, the probe pin 1C which concerns on 3rd Embodiment of this invention is shown, FIG. 12 is an external perspective view of the probe pin 1C, FIG. 13 is a longitudinal cross-sectional view, and FIG. 14 is a cross-sectional view. to be.

The probe pin 1C of the present embodiment is coaxial with the conductive needle 2C, the insulator 3C in which the conductive needle 2C is inserted in the center, and the conductive needle 2C on the outer circumference of the insulator 3C. The outer conductor 4C arrange | positioned externally and the taping layer 5C as an insulating sheath which covers the outer periphery of the outer conductor 4C are provided, and the structure other than the insulator 3C is the same as that of 2nd Embodiment.

The insulator 3C in this embodiment is made of an insulating resin material such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), and covers the outer circumferential surface of the conductive needle 2C and is provided with an inner layer 3Ca. ), An outer layer 3Cb provided covering the inner circumferential surface of the outer conductor 4C, and a plurality of radial ribs projecting radially outward from the inner layer 3Ca and connected to the inner circumferential side of the outer layer 3Cb. It is formed in the honeycomb structure provided with (3Cc). Then, six through holes 6C having a fan-shaped cross-sectional shape surrounded by the inner layer 3Ca, the outer layer 3Cb, and the radial ribs 3Cc are arranged at equal pitches in the circumferential direction, and each through hole 6C. ) Is penetrated in the axial direction of the conductive needle to open at the upper and lower ends of the insulator 3C, and the porosity of the insulator 3C is 60% or more.

According to this insulator structure, since the air insulation layer formed by the through hole 6C is continuous in the axial direction, good signal exchange is possible even in a high frequency region of several or more.

In addition, the conductive needle 2C is supported by the inner layer body 3Ca of the insulator 3C over its entire length, and the insulator 3C is wound by double taping by the taping layer 5C from the outer circumference to thereby conduct it. The needle 2C and the insulator 3C are in close contact with each other, and the drawing strength of the conductive needle 2C can be increased.

The result of having measured the pullout strength of the structure of this embodiment provided with the taping layer 5C, and the pullout strength of the conventional structure (without the insulating shell which consists of 5C of tapping layers) was as follows. That is, the pullout strength of the conventional structure was 1.04 N. In contrast, the pull-out strength of the present embodiment structure was 1.93 N. Also in this measurement result, it is clear that pullout strength is improving by employ | adopting this embodiment structure. In addition, in the said measurement, the pullout strength in the double structure (conductive needle) which has a length of 20.0 mm was measured.

[Modifications of Second and Third Embodiments]

These embodiments can also be implemented in the following forms.

(1) The shape of the inspection tip of the conductive needles 2B and 2C is not limited to the flat cut shape as described above. The shape can be arbitrarily set corresponding to the inspection object.

(2) As the conductive needles 2B and 2C, tungsten disconnection with gold plating may be used as necessary.

(3) The outer conductors 4B and 4C may be formed by winding a copper alloy tape.

(4) The number of through holes 6B and 6C formed in the insulators 3B and 3C is not limited to the above-described configuration, and an even number such as four or eight or an odd number such as five or seven. You can do it with a dog.

1A: probe pin
2A: conductive needle
3A: insulator
4A: outer conductor
6A: through hole
1B: probe pin
2B: Challenge Needle
3B: insulator
4B: outer conductor
5B: Taping Layer
1C: probe pin
2C: conductive needle
3C: insulator
3Ca: inner layer
3Cb: outer layer
3Cc: radial rib
4C: outer conductor
5C: taping layer

Claims (12)

A conductive needle,
An insulator disposed around the conductive needle, and
An outer conductor disposed coaxially with the conductive needle on an outer circumference of the insulator
And
The probe pin which provides the through-hole which penetrates in the axial direction of the said conductive needle in the said insulator. The probe pin according to claim 1, wherein a plurality of the through holes are provided in a peripheral portion of the conductive needle. The probe pin according to claim 2, wherein a plurality of said through holes are arranged at a point symmetrical position with respect to the axis of said conductive needle. The probe pin of claim 1, wherein the conductive needle is made of a tungsten material containing a tungsten alloy. The probe pin of claim 1, wherein the insulator has a porosity of at least 60 percent. The method of claim 1, wherein the insulator is
An inner layer body covering an outer circumferential surface of the conductive needle;
An outer layer body covering the inner circumferential surface of the outer conductor, and
A plurality of radial ribs protruding radially outward from the inner layer body connected to the inner peripheral side of the outer layer body
And a probe, wherein the radial rib is provided continuously in the longitudinal direction of the conductive needle. The probe pin according to claim 1, wherein a spirally wound taping layer is disposed on the outer circumferential surface of the outer conductor as an insulating sheath, and the taping layer is formed by half wrap winding. The probe pin according to claim 7, wherein the outer conductor is formed by spirally winding a plurality of conductive wires, and the spiral winding direction of the taping layer and the spiral winding direction of the conductive wire are reversed. The probe pin of claim 7, wherein a heat seal layer is provided on a rear surface of the taping layer. As a structure for supporting the probe pin according to claim 7,
The base end side of the probe pin is fixedly supported on the fixed plate, and the inspection end side of the probe pin is slidably supported on the sliding plate to inspect the fixed plate and the sliding plate having a fixed interval. Probe pin support structure to relatively close to the object to the target, and to press the test step of the probe pin to the test object. With a conductive needle,
An outer conductor disposed coaxially with a gap between the conductive needle, and
Insulator provided in the gap
The insulator is provided,
An inner layer body covering an outer circumferential surface of the conductive needle;
An outer layer body covering the inner circumferential surface of the outer conductor, and
A plurality of radial ribs protruding radially outward from the inner layer body connected to the inner peripheral side of the outer layer body
And a probe, wherein the radial rib is provided continuously in the longitudinal direction of the conductive needle. With a conductive needle,
An outer conductor disposed coaxially with a gap between the conductive needle, and
Insulator provided in the gap
And a spirally wound taping layer as an insulating sheath on an outer circumferential surface of the outer conductor, wherein the taping layer is formed by half wrap winding.

Images