KR20100105906A - 유체유동측정 및 비례유체유동 제어장치 - Google Patents

유체유동측정 및 비례유체유동 제어장치 Download PDF

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Publication number
KR20100105906A
KR20100105906A KR1020107020098A KR20107020098A KR20100105906A KR 20100105906 A KR20100105906 A KR 20100105906A KR 1020107020098 A KR1020107020098 A KR 1020107020098A KR 20107020098 A KR20107020098 A KR 20107020098A KR 20100105906 A KR20100105906 A KR 20100105906A
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KR
South Korea
Prior art keywords
fluid
flow
pressure
flow rate
valve
Prior art date
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Ceased
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KR1020107020098A
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English (en)
Korean (ko)
Inventor
크리스토퍼 워고
칼 제이 니어마이어
지-화 슈
크레이그 엘 브로듀어
윌리엄 바써
Original Assignee
엔테그리스, 아이엔씨.
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Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20100105906A publication Critical patent/KR20100105906A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/44—Venturi tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/14—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring differences of pressure in the fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/02—Computing arrangements based on specific mathematical models using fuzzy logic

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Software Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Computational Mathematics (AREA)
  • Mathematical Optimization (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Algebra (AREA)
  • Artificial Intelligence (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Analysis (AREA)
  • Fuzzy Systems (AREA)
  • Pure & Applied Mathematics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Feedback Control In General (AREA)
KR1020107020098A 2002-07-19 2003-07-18 유체유동측정 및 비례유체유동 제어장치 Ceased KR20100105906A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39716202P 2002-07-19 2002-07-19
US60/397,162 2002-07-19

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020057001058A Division KR20050030204A (ko) 2002-07-19 2003-07-18 유체유동측정 및 비례유체유동 제어장치

Publications (1)

Publication Number Publication Date
KR20100105906A true KR20100105906A (ko) 2010-09-30

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ID=30771013

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020107020098A Ceased KR20100105906A (ko) 2002-07-19 2003-07-18 유체유동측정 및 비례유체유동 제어장치
KR1020057001058A Ceased KR20050030204A (ko) 2002-07-19 2003-07-18 유체유동측정 및 비례유체유동 제어장치

Family Applications After (1)

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KR1020057001058A Ceased KR20050030204A (ko) 2002-07-19 2003-07-18 유체유동측정 및 비례유체유동 제어장치

Country Status (9)

Country Link
US (4) US7292945B2 (https=)
EP (1) EP1540562A4 (https=)
JP (3) JP2005537464A (https=)
KR (2) KR20100105906A (https=)
CN (1) CN1682235A (https=)
AU (1) AU2003254011A1 (https=)
SG (1) SG144762A1 (https=)
TW (1) TWI287624B (https=)
WO (1) WO2004010086A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11518696B2 (en) 2018-08-29 2022-12-06 Mks Instruments Ozonated water delivery system and method of use

Families Citing this family (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10130070A1 (de) * 2001-06-21 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
KR20100105906A (ko) 2002-07-19 2010-09-30 엔테그리스, 아이엔씨. 유체유동측정 및 비례유체유동 제어장치
US7412298B2 (en) * 2004-02-13 2008-08-12 Presswood Ronald G Method and system for morphometric analysis of human dental occlusal function and uses thereof
US6986359B2 (en) * 2004-03-09 2006-01-17 Mks Instruments, Inc. System and method for controlling pressure in remote zones
US8037896B2 (en) 2004-03-09 2011-10-18 Mks Instruments, Inc. Pressure regulation in remote zones
US6974788B2 (en) * 2004-03-12 2005-12-13 Chevron Oronite Company Llc. Zeolite Y alkylation catalysts
KR100859653B1 (ko) * 2004-05-25 2008-09-23 코비디엔 아게 유동 제어 장치용 유동 감시 시스템
US7117104B2 (en) 2004-06-28 2006-10-03 Celerity, Inc. Ultrasonic liquid flow controller
WO2006020870A1 (en) * 2004-08-13 2006-02-23 Entegris, Inc. System and method for calibration of a flow device
WO2006022495A1 (en) * 2004-08-21 2006-03-02 Lg Chem, Ltd. A capillary flow control module and lab-on-a-chip equipped with the same
KR100838129B1 (ko) * 2004-08-21 2008-06-13 주식회사 엘지생명과학 미세 유체 소자 및 이를 구비한 진단 및 분석 장치
WO2006022487A1 (en) * 2004-08-21 2006-03-02 Lg Chem. Ltd. Microfluidic device, and diagnostic and analytical apparatus using the same
KR100806568B1 (ko) * 2004-08-21 2008-02-28 주식회사 엘지생명과학 미세 유체 소자 및 이를 구비한 진단 및 분석 장치
GB0500223D0 (en) * 2005-01-07 2005-02-16 Imi Norgren Ltd Communication system
US7725270B2 (en) 2005-03-10 2010-05-25 Expro Meters, Inc. Industrial flow meter having an accessible digital interface
US20070016333A1 (en) * 2005-07-12 2007-01-18 Edwards Grant B Method and apparatus for controlling the valve position of a variable orifice flow meter
WO2007021883A1 (en) 2005-08-12 2007-02-22 Celerity, Inc. Ultrasonic flow sensor
US8211592B2 (en) 2005-09-15 2012-07-03 GM Global Technology Operations LLC Hydrophilic layer on flowfield for water management in PEM fuel cell
US7942069B2 (en) * 2006-03-09 2011-05-17 Entegris, Inc. Fluid handling device with isolating chamber
US7743670B2 (en) * 2006-08-14 2010-06-29 Applied Materials, Inc. Method and apparatus for gas flow measurement
US8171721B2 (en) * 2007-01-22 2012-05-08 International Engine Intellectual Property Company, Llc Closed loop control of exhaust system fluid dosing
US7782461B1 (en) * 2007-04-05 2010-08-24 Massey Sean J Flow rate measuring device
US7681460B2 (en) * 2007-04-20 2010-03-23 Gilbarco Inc. System and method for detecting pressure variations in fuel dispensers to more accurately measure fuel delivered
AU2008296167B2 (en) 2007-09-07 2013-03-28 Diversey, Inc. Material delivery systems and methods
US9555429B2 (en) * 2007-11-14 2017-01-31 Gojo Industries, Inc. Method and device for indicating future need for product replacement of random-use dispensing
US7757677B2 (en) * 2007-11-30 2010-07-20 Deere & Company EGR pulse attenuation
US8002898B2 (en) * 2007-12-19 2011-08-23 Diversey, Inc. Material delivery systems and methods
US8307907B2 (en) 2008-02-28 2012-11-13 Hale Products, Inc. Hybrid foam proportioning system
US8042376B2 (en) * 2008-06-02 2011-10-25 Gilbarco Inc. Fuel dispenser utilizing pressure sensor for theft detection
DE102008029469B3 (de) * 2008-06-20 2009-10-29 Airbus Deutschland Gmbh Luftfahrzeugleitungsüberwachungssystem und -verfahren, insbesondere für ein Luftfahrzeugflügelenteisungssystem und eine Luftfahrzeugklimaanlage
CN104310298B (zh) * 2008-08-28 2017-05-10 德卡产品有限公司 产品配制系统
US8571817B2 (en) * 2008-09-10 2013-10-29 Palo Alto Research Center Incorporated Integrated vapor delivery systems for chemical vapor deposition precursors
JP5808537B2 (ja) * 2009-10-01 2015-11-10 株式会社堀場エステック 流量測定機構及びマスフローコントローラ
KR20110120424A (ko) * 2010-04-29 2011-11-04 충북대학교 산학협력단 기체 유량 센서
TWI439682B (zh) * 2010-07-26 2014-06-01 私立中原大學 Measuring device of viscosity and its measuring method
TWI447375B (zh) * 2010-07-26 2014-08-01 私立中原大學 Apparatus for measuring fluid viscosity and method thereof
KR101198137B1 (ko) 2010-09-03 2012-11-12 에스케이하이닉스 주식회사 라이트 드라이버 및 이를 이용한 반도체 메모리 장치와 프로그램 방법
CN102364046B (zh) * 2011-08-18 2014-04-02 西北工业大学 一种用于井下管道的多相流量计
US9690301B2 (en) * 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
US20130068309A1 (en) * 2011-09-15 2013-03-21 Robb Gary Anderson Position controller for pilot-operated electrohydraulic valves
US8920574B2 (en) 2011-10-21 2014-12-30 Ethicon, Inc. Instrument reprocessor and instrument reprocessing methods
DE102012004339B4 (de) * 2012-03-07 2013-09-26 Jenoptik Industrial Metrology Germany Gmbh Messkörper einer pneumatischen Messvorrichtung
CN102790002B (zh) * 2012-07-27 2015-02-11 京东方科技集团股份有限公司 柔性基板处理装置
US20140261421A1 (en) * 2013-03-15 2014-09-18 Apex Medical Corp. Gas flow detector and positive airway pressure apparatus containing the same
TWI594731B (zh) * 2013-03-15 2017-08-11 雃博股份有限公司 氣體流量偵測裝置及包含其之陽壓呼吸器
US9176089B2 (en) 2013-03-29 2015-11-03 Stmicroelectronics Pte Ltd. Integrated multi-sensor module
US9618653B2 (en) * 2013-03-29 2017-04-11 Stmicroelectronics Pte Ltd. Microelectronic environmental sensing module
RU2532489C1 (ru) * 2013-06-11 2014-11-10 Открытое акционерное общество "Инженерно-производственная фирма "СИБНЕФТЕАВТОМАТИКА" (ОАО ИПФ "СибНА") Способ калибровки мультифазных расходомеров в рабочих условиях
RU2015155886A (ru) * 2013-06-28 2017-06-30 Кэафьюжн 303, Инк. Система искусственной вентиляции легких
US9962514B2 (en) 2013-06-28 2018-05-08 Vyaire Medical Capital Llc Ventilator flow valve
US9541098B2 (en) 2013-06-28 2017-01-10 Vyaire Medical Capital Llc Low-noise blower
US9795757B2 (en) 2013-06-28 2017-10-24 Vyaire Medical Capital Llc Fluid inlet adapter
US9433743B2 (en) 2013-06-28 2016-09-06 Carefusion 303, Inc. Ventilator exhalation flow valve
US9746359B2 (en) 2013-06-28 2017-08-29 Vyaire Medical Capital Llc Flow sensor
US9707369B2 (en) 2013-06-28 2017-07-18 Vyaire Medical Capital Llc Modular flow cassette
TWI506251B (zh) * 2014-02-21 2015-11-01 Nuvoton Technology Corp 流體流量記錄裝置及方法
RU2596611C2 (ru) * 2014-05-14 2016-09-10 Акционерное общество "Инженерно-производственная фирма "Сибнефтеавтоматика" (АО "ИПФ "СибНА") Адаптивный способ измерения дебита продукции газоконденсатных скважин
WO2016046751A1 (en) * 2014-09-22 2016-03-31 Alimonti Claudio A flow-rate measuring system for drilling muds and/or for multiphase mixtures
EP3204733B1 (en) 2014-10-08 2022-05-11 Versum Materials US, LLC Low pressure fluctuation flow control apparatus and method
AU2015387477A1 (en) * 2015-03-25 2017-09-07 Landmark Graphics Corporation Fuzzy logic flow regime identification and control
CN105277007B (zh) * 2015-09-28 2017-05-03 广州罗杰韦尔电气有限公司 一种石墨冷凝器的控制系统及方法
TWI588451B (zh) * 2015-12-22 2017-06-21 Flowmeter non-contact and continuous sensing device and method
US10101194B2 (en) 2015-12-31 2018-10-16 General Electric Company System and method for identifying and recovering from a temporary sensor failure
CN106024677B (zh) * 2016-05-30 2019-07-19 上海华力微电子有限公司 防止工艺腔体排气管路逆流的系统
DE102016112093B4 (de) * 2016-07-01 2020-08-27 Dspace Digital Signal Processing And Control Engineering Gmbh Verfahren zur Regelung eines Volumenstroms und Prüfstand zur Simulation eines Flüssigkeitskreislaufs
US10429330B2 (en) 2016-07-18 2019-10-01 Stmicroelectronics Pte Ltd Gas analyzer that detects gases, humidity, and temperature
US10254261B2 (en) 2016-07-18 2019-04-09 Stmicroelectronics Pte Ltd Integrated air quality sensor that detects multiple gas species
US10401207B2 (en) 2016-09-14 2019-09-03 GE Oil & Gas UK, Ltd. Method for assessing and managing sensor uncertainties in a virtual flow meter
US11940318B2 (en) 2016-09-27 2024-03-26 Baker Hughes Energy Technology UK Limited Method for detection and isolation of faulty sensors
US10557812B2 (en) 2016-12-01 2020-02-11 Stmicroelectronics Pte Ltd Gas sensors
CN106730545B (zh) * 2016-12-26 2020-05-19 威特龙消防安全集团股份公司 细水雾灭火系统添加剂计量注入系统
US10949909B2 (en) * 2017-02-24 2021-03-16 Sap Se Optimized recommendation engine
CN107265563A (zh) * 2017-08-07 2017-10-20 西南石油大学 一种串联式文丘里管空化装置
WO2019031056A1 (ja) * 2017-08-09 2019-02-14 Ckd株式会社 流量計
DE102017215436A1 (de) * 2017-09-04 2019-03-07 Krones Ag Vorrichtung und Verfahren zur Pasteurisierung und Abfüllung von Medium
US10955394B2 (en) * 2017-10-12 2021-03-23 Waters Technologies Corporation System and method for diagnosing a condition of a restrictor
JP7137921B2 (ja) * 2017-11-07 2022-09-15 株式会社堀場エステック 気化システム及び気化システム用プログラム
CN107961042B (zh) * 2017-12-01 2023-06-09 无锡市尚沃医疗电子股份有限公司 智能化呼气采样方法和装置
US10704938B2 (en) 2018-01-31 2020-07-07 Hydroacoustics, Inc. Pumpjack production well including fluid sensor having 2-dimensional venturi and capacitive flow sensor
US11906336B2 (en) 2018-01-31 2024-02-20 Hydroacoustics Inc. Pumpjack production well including venturi fluid sensor and capacitive flow sensor
US11821293B2 (en) 2018-02-07 2023-11-21 Hydroacoustics. Inc. Oil recovery tool and system
US12173587B2 (en) 2018-02-07 2024-12-24 Hydroacoustics Inc. Oil recovery tool and system
CN111936719B (zh) 2018-02-07 2023-09-26 液压声学公司 采油工具和系统
KR102051468B1 (ko) * 2018-07-24 2019-12-03 엘에프에너지(주) 쓰레기 매립지내 발생가스 포집장치
US10890474B2 (en) * 2018-09-18 2021-01-12 Swagelok Company Fluid monitoring module arrangements
CN109058522B (zh) * 2018-10-22 2024-05-10 广州海鸥住宅工业股份有限公司 水龙头组件
CN111103020B (zh) * 2018-10-29 2022-06-03 北京七星华创流量计有限公司 流量检测装置、流量控制系统及流量检测方法
CN111122519B (zh) * 2018-10-30 2023-07-18 重庆民泰新农业科技发展集团有限公司 原子荧光仪用闭环流量控制系统及控制方法
CN113574348B (zh) * 2019-02-15 2026-04-17 富俊水创新有限责任公司 流体用量监控系统
US11415594B2 (en) * 2019-05-30 2022-08-16 AirFlow Direction, Inc. Directional differential pressure detector for indicating potential or actual directional air flow
EP4603226A3 (en) 2019-11-27 2025-10-22 Diversified Fluid Solutions, LLC On-demand in-line-blending and supply of chemicals
US12285783B2 (en) 2020-05-27 2025-04-29 Viavi Solutions Inc. Monitoring air pressure and flow in a fiber cleaning device
CN112098268A (zh) * 2020-09-16 2020-12-18 巫协森 线上测量溶液自动校正液位、容量与浓度方法及系统
US11874028B2 (en) * 2021-03-22 2024-01-16 Rheem Manufacturing Company Modulating gas orifice
EP4433782A4 (en) * 2021-11-16 2025-10-08 Services Petroliers Schlumberger CALIBRATED VIRTUAL FLOW METER
CN114487390B (zh) * 2022-01-29 2023-03-17 美昕医疗器械(昆山)有限公司 用于检测医用导流装置中的液体流动的检测盒及检测系统
TWI820721B (zh) * 2022-05-23 2023-11-01 國立臺灣海洋大學 流體監測裝置
US20240385024A1 (en) * 2023-04-23 2024-11-21 Service Insight LLC Exterior gauge component for fuel level monitoring that is compatible with different tank gauge heads

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US546979A (en) * 1895-09-24 Railway-gate
JPS62259016A (ja) * 1986-04-25 1987-11-11 Tokyo Keiki Co Ltd 流量測定装置
JP2962793B2 (ja) * 1990-05-28 1999-10-12 大和製衡株式会社 流量制御装置
JP3182807B2 (ja) * 1991-09-20 2001-07-03 株式会社日立製作所 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム
JPH067715A (ja) * 1992-06-29 1994-01-18 Asahi Sanac Kk 塗料流量制御装置
JPH06168134A (ja) * 1992-11-30 1994-06-14 Nec Corp ファジイ制御のためのファジイ推論プロセッサ
JP2850082B2 (ja) * 1993-03-31 1999-01-27 モトローラ株式会社 ファジイ推論のｍｉｎ−ｍａｘ 演算回路
JPH0713632A (ja) * 1993-06-25 1995-01-17 Kubota Corp 水道用バルブの制御用コントローラ
US6041320A (en) * 1993-08-23 2000-03-21 Fisher Controls International, Inc. Multi-region fuzzy logic control system with auxiliary variables
US5475614A (en) * 1994-01-13 1995-12-12 Micro-Trak Systems, Inc. Method and apparatus for controlling a variable fluid delivery system
JPH07319551A (ja) * 1994-05-23 1995-12-08 Hitachi Ltd 流量制御方法及びその装置
JPH0863235A (ja) * 1994-08-24 1996-03-08 Burutsukusu Instr Kk 差圧式質量流量コントロール装置
JP3519539B2 (ja) * 1996-02-21 2004-04-19 愛三工業株式会社 流量調整装置
US6601005B1 (en) * 1996-11-07 2003-07-29 Rosemount Inc. Process device diagnostics using process variable sensor signal
US5890490A (en) * 1996-11-29 1999-04-06 Aylsworth; Alonzo C. Therapeutic gas flow monitoring system
US6253624B1 (en) * 1998-01-13 2001-07-03 Rosemount Inc. Friction flowmeter
JP2000249579A (ja) * 1999-03-01 2000-09-14 Japan National Oil Corp 流量測定方法及びそれを利用した差圧式流量計
US6352001B1 (en) * 1999-08-30 2002-03-05 General Electric Company Non-iterative method for obtaining mass flow rate
US6868739B1 (en) * 1999-10-19 2005-03-22 Transonic Systems, Inc. Method and apparatus to measure blood flow by an introduced volume change
US6578435B2 (en) 1999-11-23 2003-06-17 Nt International, Inc. Chemically inert flow control with non-contaminating body
US6874480B1 (en) * 2000-07-03 2005-04-05 Combustion Dynamics Corp. Flow meter
US6564824B2 (en) * 2001-04-13 2003-05-20 Flowmatrix, Inc. Mass flow meter systems and methods
US6662140B2 (en) 2001-06-12 2003-12-09 Rolls-Royce Canada Limited Fuzzy logic estimator for minimizing signal measurement inaccuracy effects in a signal processing system
US6766817B2 (en) * 2001-07-25 2004-07-27 Tubarc Technologies, Llc Fluid conduction utilizing a reversible unsaturated siphon with tubarc porosity action
US7136767B2 (en) * 2002-06-24 2006-11-14 Mks Instruments, Inc. Apparatus and method for calibration of mass flow controller
US7809473B2 (en) * 2002-06-24 2010-10-05 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
KR20100105906A (ko) 2002-07-19 2010-09-30 엔테그리스, 아이엔씨. 유체유동측정 및 비례유체유동 제어장치
US7285255B2 (en) * 2002-12-10 2007-10-23 Ecolab Inc. Deodorizing and sanitizing employing a wicking device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11518696B2 (en) 2018-08-29 2022-12-06 Mks Instruments Ozonated water delivery system and method of use

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US20080033901A1 (en) 2008-02-07
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US20060162466A1 (en) 2006-07-27
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US7447600B2 (en) 2008-11-04
US20090113985A1 (en) 2009-05-07
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WO2004010086A2 (en) 2004-01-29
KR20050030204A (ko) 2005-03-29
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CN1682235A (zh) 2005-10-12
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