AU2003254011A1 - Fluid flow measuring and proportional fluid flow control device - Google Patents

Fluid flow measuring and proportional fluid flow control device

Info

Publication number
AU2003254011A1
AU2003254011A1 AU2003254011A AU2003254011A AU2003254011A1 AU 2003254011 A1 AU2003254011 A1 AU 2003254011A1 AU 2003254011 A AU2003254011 A AU 2003254011A AU 2003254011 A AU2003254011 A AU 2003254011A AU 2003254011 A1 AU2003254011 A1 AU 2003254011A1
Authority
AU
Australia
Prior art keywords
fluid flow
control device
proportional
flow control
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003254011A
Other languages
English (en)
Other versions
AU2003254011A8 (en
Inventor
William Basser
Craig L. Brodeur
Karl J. Niermeyer
Jieh-Hwa Shyu
Christopher Wargo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of AU2003254011A8 publication Critical patent/AU2003254011A8/xx
Publication of AU2003254011A1 publication Critical patent/AU2003254011A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/44—Venturi tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/14—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring differences of pressure in the fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/02—Computing arrangements based on specific mathematical models using fuzzy logic

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Software Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Computational Mathematics (AREA)
  • Mathematical Optimization (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Algebra (AREA)
  • Artificial Intelligence (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Analysis (AREA)
  • Fuzzy Systems (AREA)
  • Pure & Applied Mathematics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Feedback Control In General (AREA)
AU2003254011A 2002-07-19 2003-07-18 Fluid flow measuring and proportional fluid flow control device Abandoned AU2003254011A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US39716202P 2002-07-19 2002-07-19
US60/397,162 2002-07-19
PCT/US2003/022533 WO2004010086A2 (en) 2002-07-19 2003-07-18 Fluid flow measuring and proportional fluid flow control device

Publications (2)

Publication Number Publication Date
AU2003254011A8 AU2003254011A8 (en) 2004-02-09
AU2003254011A1 true AU2003254011A1 (en) 2004-02-09

Family

ID=30771013

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003254011A Abandoned AU2003254011A1 (en) 2002-07-19 2003-07-18 Fluid flow measuring and proportional fluid flow control device

Country Status (9)

Country Link
US (4) US7292945B2 (https=)
EP (1) EP1540562A4 (https=)
JP (3) JP2005537464A (https=)
KR (2) KR20100105906A (https=)
CN (1) CN1682235A (https=)
AU (1) AU2003254011A1 (https=)
SG (1) SG144762A1 (https=)
TW (1) TWI287624B (https=)
WO (1) WO2004010086A2 (https=)

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US8155896B2 (en) 2012-04-10
JP2010072008A (ja) 2010-04-02
US20080033901A1 (en) 2008-02-07
SG144762A1 (en) 2008-08-28
EP1540562A2 (en) 2005-06-15
US20060162466A1 (en) 2006-07-27
US7885773B2 (en) 2011-02-08
JP5204204B2 (ja) 2013-06-05
AU2003254011A8 (en) 2004-02-09
TWI287624B (en) 2007-10-01
EP1540562A4 (en) 2006-11-22
US7447600B2 (en) 2008-11-04
US20090113985A1 (en) 2009-05-07
WO2004010086A2 (en) 2004-01-29
KR20050030204A (ko) 2005-03-29
JP2011138496A (ja) 2011-07-14
CN1682235A (zh) 2005-10-12
JP2005537464A (ja) 2005-12-08
KR20100105906A (ko) 2010-09-30
US20110248043A1 (en) 2011-10-13
TW200413699A (en) 2004-08-01
WO2004010086A3 (en) 2004-10-07
US7292945B2 (en) 2007-11-06

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