KR20100077622A - Apparatus and method for sensing wafer of wafer transfer system - Google Patents

Apparatus and method for sensing wafer of wafer transfer system Download PDF

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KR20100077622A
KR20100077622A KR1020080135623A KR20080135623A KR20100077622A KR 20100077622 A KR20100077622 A KR 20100077622A KR 1020080135623 A KR1020080135623 A KR 1020080135623A KR 20080135623 A KR20080135623 A KR 20080135623A KR 20100077622 A KR20100077622 A KR 20100077622A
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wafer
sensor
light emitting
transfer system
alignment state
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KR1020080135623A
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Korean (ko)
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윤태호
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주식회사 동부하이텍
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Publication of KR20100077622A publication Critical patent/KR20100077622A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: A detecting device of a wafer for a wafer transfer system and a method thereof are provided to prevent a wafer from being transferred to a following process by determining the misalignment of a wafer based on the detection signal of a sensor. CONSTITUTION: A sensor(10) is installed to a sensor transferring axis. The sensor includes a light emitting device(11) and a light receiving device(12). The light emitting device moves along the sensor transferring axis. The light emitting device emits light in order to sense the alignment of a wafer. The light receiving device moves along the light emitting device. The light receiving device generates an electrical signal by receiving light emitted from the light emitting device. A control device(20) determines the quantity and the alignment state of a wafer based on the sensing signal of the sensor.

Description

웨이퍼이송시스템용 웨이퍼의 감지장치 및 방법{Apparatus and method for sensing wafer of Wafer Transfer System}Apparatus and method for sensing wafer of Wafer Transfer System

본 발명은 웨이퍼이송시스템용 웨이퍼의 감지장치 및 방법에 관한 것으로서, 더욱 상세하게는 웨이퍼이송시스템 상의 웨이퍼의 정렬상태를 확인하여 웨이퍼의 파손을 사전에 인지할 수 있도록 하는 웨이퍼이송시스템용 웨이퍼의 감지장치 및 방법에 관한 것이다. The present invention relates to an apparatus and method for detecting a wafer for a wafer transfer system. More particularly, the present invention relates to a wafer transfer system for detecting wafers in advance. An apparatus and method are provided.

일반적으로, 웨이퍼이송시스템(Wafer Transfer System,WTS)은 캐리어 스테이지의 웨이퍼를 SIC 보트 스테이지로 이송시키게 되는 바, 현재의 웨이퍼이송시스템은 포드(pod)에서의 웨이퍼 로딩 및 언로딩시에 웨이퍼를 감지해주는 센서가 장착되어 있지 않아 실제 웨이퍼의 수량이 파악되지 않고 있다.In general, a wafer transfer system (WTS) transfers wafers from a carrier stage to an SIC boat stage, where current wafer transfer systems detect wafers during wafer loading and unloading in pods. The actual wafer quantity is not known because the sensor is not installed.

또한, 상기 웨이퍼이송시스템에서 웨이퍼를 이송시 리테이너가 웨이퍼를 고정시키게 되는데, 이때 웨이퍼의 미스얼라인(mis align)으로 인하여 상기 웨이퍼가 겹치는 경우가 발생하게 된다.In addition, when the wafer is transferred in the wafer transfer system, the retainer fixes the wafer. At this time, the wafers overlap due to misalignment of the wafers.

이와 같은 경우에 상기 웨이퍼이송시스템 상에서 웨이퍼의 미스 얼라인을 감지하는 센서가 장착되어 있지 않아 한 슬롯에 웨이퍼가 겹쳐져 있는 상태로 로딩되어 진행하게 된다.In this case, the sensor for detecting the misalignment of the wafer is not mounted on the wafer transfer system, so that the wafer is loaded in a state where the wafer is overlapped.

상기 웨이퍼이송시스템에 구비되어 있는 센서는 SIC 보트 스테이지에 웨이퍼가 존재하는지 그 존재유무만을 감지하므로 웨이퍼의 미스얼라인이 발생할 경우, 이를 전혀 감지하지 못하는 문제점이 있다.The sensor provided in the wafer transfer system only detects the presence or absence of a wafer in the SIC boat stage, and thus, if a misalignment occurs in the wafer, there is a problem in that it is not detected at all.

따라서, 본 발명은 상기와 같은 문제점을 해결하기 위하여 발명한 것으로서, 웨이퍼이송시스템 상의 웨이퍼의 수량 및 웨이퍼의 정렬 상태를 파악하여 웨이퍼의 파손을 사전에 인지하여 차후 공정으로의 이송을 방지할 수 있도록 하는 웨이퍼이송시스템용 웨이퍼의 감지장치 및 방법을 제공하고자 한다. Accordingly, the present invention is invented to solve the above problems, to grasp the number of wafers and the alignment state of the wafers on the wafer transfer system to recognize the breakage of the wafer in advance to prevent the transfer to the subsequent process. The present invention provides a wafer sensing device and method for a wafer transfer system.

상기와 같은 목적을 달성하기 위하여 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치는, 웨이퍼이송시스템(200)의 리테이너(210)가 웨이퍼(100)를 일정 간격을 두고 일렬로 배치 시, 상기 웨이퍼(100)의 정렬 상태를 감지하여 전기적 신호로 출력하는 센서장치(10); 상기 센서장치(10)의 감지신호를 기초로 웨이퍼(100)의 수량을 파악하는 동시에, 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 제어하는 제어장치(20)를 포함하여 구성된 것을 특징으로 한다. In order to achieve the above object, in the wafer transfer system wafer sensing apparatus according to the present invention, when the retainer 210 of the wafer transfer system 200 arranges the wafers 100 in a line at a predetermined interval, the wafers Sensor device 10 for detecting the alignment state of the 100 and outputting as an electrical signal; And a control device 20 for determining the quantity of the wafer 100 based on the detection signal of the sensor device 10 and determining and controlling the abnormality of the alignment state of the wafer 100. It is done.

바람직한 실시예로서, 상기 센서장치(10)는 웨이퍼이송시스템(200)의 웨이퍼(100)를 양측에서 지지해주는 동시에 그 센서장치(10)의 센서가 좌우로 이송되는 센서 이송축(15)에 장착되어 웨이퍼(100)의 수량 및 웨이퍼(100)의 정렬 상태를 감지할 수 있도록 하는 발광소자(11) 및 수광소자(12)로 이루어진 포토센서인 것을 특징으로 한다. In a preferred embodiment, the sensor device 10 supports the wafer 100 of the wafer transfer system 200 from both sides, and is mounted on the sensor feed shaft 15 through which the sensor of the sensor device 10 is moved from side to side. And a photo sensor comprising a light emitting element 11 and a light receiving element 12 to detect the quantity of the wafer 100 and the alignment state of the wafer 100.

상기 제어장치(20)는 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 웨이퍼(100)의 미스얼라인 발생 시, 알람 시그널을 발생시키는 경고부(21)와, 설비 가동을 정지시키는 비상 정지부(22)로 이루어진 것을 특징으로 한다. The control device 20 determines whether there is an abnormality in the alignment state of the wafer 100, and a warning unit 21 for generating an alarm signal when a misalignment occurs in the wafer 100, and an emergency for stopping the operation of the facility. Characterized in that it consists of a stop (22).

또한, 상기와 같은 목적을 달성하기 위한 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지방법은, 캐리어 스테이지의 웨이퍼(100)를 SIC 보트 스테이지로 이송시키는 과정에서, 포드(pod)에서의 웨이퍼(100) 로딩 및 언로딩시 리테이너(210)를 통해 웨이퍼(100)를 픽업(pick up)하는 단계; 상기 리테이너(210)에 의해 고정 배치되어 있는 다수개의 웨이퍼(100)의 정렬 상태를 센서 이송축(15)에 구비된 센서장치(10)가 동작하면서 웨이퍼(100)의 수량을 파악하고, 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하는 단계; 상기 웨이퍼(100)의 수량 및 정렬 상태를 파악하여 그 감지 신호를 제어장치(20)로 전송하는 단계;를 포함하여 이루어진 것을 특징으로 한다.In addition, the method for detecting a wafer for a wafer transfer system according to the present invention for achieving the above object, in the process of transferring the wafer 100 of the carrier stage to the SIC boat stage, the wafer 100 in the pod (pod) Picking up the wafer 100 through the retainer 210 during loading and unloading; While the sensor device 10 provided on the sensor feed shaft 15 operates the alignment state of the plurality of wafers 100 fixedly arranged by the retainer 210, the quantity of the wafers 100 is determined and the wafers ( Determining whether there is an abnormality in the alignment state of 100); And determining the quantity and alignment of the wafer 100 and transmitting the detection signal to the control device 20.

상기 센서장치(10)로부터 전송된 감지 신호를 기초로 상기 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 웨이퍼(100)의 미스얼라인 발생 시, 경고부(21)를 통해 알람 발생을 즉각적으로 수행하고, 비상 정지부(22)를 통해 설비 가동을 비상 정지시키는 조치를 실시하여 SIC 보트 스테이지로의 웨이퍼(100) 이송 동작을 중지시키는 단계를 더 포함하는 것을 특징으로 한다. On the basis of the detection signal transmitted from the sensor device 10 to determine whether the abnormality of the alignment state of the wafer 100, when the misalignment of the wafer 100 occurs, an alarm is generated through the warning unit 21 Immediately performing, and emergency stop the operation of the facility through the emergency stop 22, characterized in that it further comprises the step of stopping the wafer 100 transfer operation to the SIC boat stage.

이상에서 본 바와 같이, 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치 및 방법에 의하면, 웨이퍼의 이송 후, 웨이퍼의 정렬 상태를 웨이퍼이송시스 템에서 조기 감지하여 웨이퍼의 파손을 사전에 방지할 수 있도록 하는 효과가 있다.As described above, according to the wafer sensing apparatus and method of the wafer transfer system according to the present invention, after the wafer transfer, the wafer alignment state can be detected early in the wafer transfer system to prevent damage to the wafer in advance. It is effective.

이하, 첨부도면을 참조하여 본 발명의 구성에 대해 상세하게 설명하면 다음과 같다. Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

첨부한 도 1은 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치를 나타내는 구성도이고, 도 2는 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치를 나타내는 정면도이며, 도 3은 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치를 나타내는 측면도이다.1 is a configuration diagram showing a wafer sensing device for a wafer transfer system according to the present invention, FIG. 2 is a front view showing a wafer sensing device for a wafer transfer system according to the present invention, and FIG. It is a side view which shows the detection apparatus of the wafer for wafer transfer systems.

본 발명은 웨이퍼이송시스템(200)의 리테이너(retainer, 210)가 웨이퍼(100)를 정렬한 상태에서 고정하게 될 경우, 도 2 및 도 3에 도시된 바와 같이, 웨이퍼(100)가 일정 간격을 두고 일렬로 배치되는 바, 이러한 정렬 상태를 감지하여 전기적 신호로 출력하는 센서장치(10)와, 상기 센서장치(10)의 감지신호를 기초로 웨이퍼(100)의 수량을 파악하고, 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 알람 시그널을 전송하는 동시에, 설비 가동을 비상 정지시키는 제어장치(20)를 포함하여 구성된다.According to the present invention, when the retainer 210 of the wafer transfer system 200 is fixed while the wafer 100 is aligned, as shown in FIGS. 2 and 3, the wafer 100 has a predetermined interval. The sensor device 10 detects the alignment and outputs the electrical signal as an electrical signal, and the quantity of the wafer 100 is determined based on the detection signal of the sensor device 10, and the wafer 100 is disposed. It is configured to include a control device 20 for determining whether or not abnormality with respect to the alignment state) and transmits an alarm signal, and at the same time emergency stop operation of the facility.

상기 센서장치(10)는 웨이퍼이송시스템(200)의 웨이퍼(100)를 양측에서 지지해주는 동시에 그 센서장치(10)의 센서가 좌우로 이송되는 한 쌍의 센서 이송축(15)에 장착되는 바, 웨이퍼(100)의 수량 및 웨이퍼(100)의 정렬 상태를 감지할 수 있도록 하는 발광소자(11) 및 수광소자(12)로 이루어진 포토센서이다.The sensor device 10 supports the wafer 100 of the wafer transfer system 200 from both sides, and is mounted on a pair of sensor feed shafts 15 to which the sensors of the sensor device 10 are transferred from side to side. The photo sensor includes a light emitting element 11 and a light receiving element 12 to detect the quantity of the wafer 100 and the alignment state of the wafer 100.

상기 발광소자(11)는 상기 센서 이송축(15)을 따라 이송하면서 상기 웨이퍼(100)의 정렬 상태를 감지하기 위해 빛을 방출하고, 상기 발광소자(11)에 대응하는 위치에 위치한 수광소자(12)는 발광소자(11)를 따라 동일 속도로 이송하면서 발광소자(11)로부터 발생되어 송신되는 빛을 수신하여 웨이퍼(100)에 의한 빛의 조도 변화에 의해 전기 신호를 발생시키게 된다. The light emitting element 11 emits light in order to detect the alignment state of the wafer 100 while transferring along the sensor feed shaft 15 and is located at a position corresponding to the light emitting element 11. 12 receives light generated and transmitted from the light emitting element 11 while transferring at the same speed along the light emitting element 11 to generate an electric signal by changing the illuminance of the light by the wafer 100.

즉, 수광소자(12)에서 수신된 빛의 조도 변화가 일정한 상태로 유지되는지 그 변화여부를 판단하여 일정한 신호가 발생되다가 특정 구간에서 이상 신호가 발생할 경우, 이를 웨이퍼(100)의 미스얼라인 상태로 판단하게 되는 것이다.That is, when a change in illuminance of light received from the light receiving element 12 is maintained in a constant state, it is determined whether or not the change is generated, and when an abnormal signal occurs in a specific section, this is a misaligned state of the wafer 100. Will be judged.

이때, 상기 센서 이송축(15)은 통상적인 솔레노이드 밸브를 포함하는 실린더장치로써, 상기 센서장치(10)의 발광소자(11) 및 수광소자(12)를 이송시키는 특성을 갖는 것이라면 어떠한 구성으로 이루어져도 무방하다. In this case, the sensor feed shaft 15 is a cylinder device including a conventional solenoid valve, and any configuration as long as it has a characteristic of conveying the light emitting element 11 and the light receiving element 12 of the sensor device 10. It is okay.

상기 제어장치(20)는 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 웨이퍼(100)의 미스얼라인 발생 시, 알람 시그널을 발생시키는 경고부(21)와, 설비 가동을 정지시키는 비상 정지부(22)로 이루어지는 바, 기존 설비의 센서의 전기 신호에 따라 제어하는 콘트롤러와 연계시켜 구성하여야 하며, 이를 만족하는 조건에서는 다양하게 변형하여 회로 구성할 수 있다.The control device 20 determines whether there is an abnormality in the alignment state of the wafer 100, and a warning unit 21 for generating an alarm signal when a misalignment occurs in the wafer 100, and an emergency for stopping the operation of the facility. Bar stop 22 is configured to be connected to the controller to control in accordance with the electrical signal of the sensor of the existing equipment, and in a condition that satisfies this can be variously modified circuit configuration.

상기 제어장치(20)는 상기 웨이퍼(100)의 미스얼라인 신호를 센서장치(10)로부터 전송받을 경우, 비상 정지 및 알람 시그널 발생을 위한 제어를 수행시키도록 구성된다. 여기에서 상기 제어장치(20)는 통상적으로 웨이퍼이송시스템(200) 내에 마련되어 비상 정지 제어를 수행하는 수단이며, 본 발명에 따른 실시예는 이러한 제어장치(20)를 활용하여 SIC 보트 스테이지로의 웨이퍼(100) 이송 동작을 중지시킬 수 있게 된다.The control device 20 is configured to perform control for emergency stop and alarm signal generation when the misalignment signal of the wafer 100 is transmitted from the sensor device 10. In this case, the control device 20 is typically provided in the wafer transfer system 200 and is a means for performing emergency stop control, and an embodiment according to the present invention utilizes the control device 20 to transfer the wafer to the SIC boat stage. (100) It is possible to stop the transfer operation.

이하, 상기와 같이 구성된 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지방법을 설명하면 다음과 같다. Hereinafter, a method of detecting a wafer for a wafer transfer system according to the present invention configured as described above will be described.

첨부한 도 4는 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지방법을 나타내는 플로우챠트이다. 4 is a flowchart illustrating a method of detecting a wafer for a wafer transfer system according to the present invention.

캐리어 스테이지의 웨이퍼(100)를 SIC 보트 스테이지로 이송시키는 과정에서, 포드(pod)에서의 웨이퍼(100) 로딩 및 언로딩시 리테이너(210)에 의해 웨이퍼(100)가 픽업(pick up)된다.In the process of transferring the wafer 100 of the carrier stage to the SIC boat stage, the wafer 100 is picked up by the retainer 210 when loading and unloading the wafer 100 in the pod.

상기 리테이너(210)에 의해 고정 배치되어 있는 다수개의 웨이퍼(100)의 정렬 상태를 센서 이송축(15)에 구비되어 있는 센서장치(10)가 동작하면서 웨이퍼(100)의 수량 및 웨이퍼(100)의 정렬 상태를 파악하여 그 감지 신호를 제어장치(20)로 전송하게 된다.While the sensor device 10 provided on the sensor feed shaft 15 operates the alignment state of the plurality of wafers 100 fixedly arranged by the retainer 210, the quantity of the wafers 100 and the number of wafers 100 are maintained. Determine the alignment state of the and transmits the detection signal to the control device (20).

상기 제어장치(20)는 상기 센서장치(10)로부터 전송된 감지 신호를 기초로 상기 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 웨이퍼(100)의 미스얼라인 발생 시, 설비 가동의 비상 정지 및 알람 발생을 즉각적으로 수행하는 조치를 실시하고, SIC 보트 스테이지로의 웨이퍼(100) 이송 동작을 중지시키게 된다.The control device 20 determines whether there is an abnormality in the alignment state of the wafer 100 on the basis of the detection signal transmitted from the sensor device 10, and when the misalignment of the wafer 100 occurs, Take measures to immediately perform emergency stops and alarms, and stop the wafer 100 transfer operation to the SIC boat stage.

이상에서는 본 발명의 바람직한 실시예에 대하여 도시하고 또한 설명하였으나, 본 발명은 상기한 실시예에 한정되지 않으며, 특허청구범위에서 청구된 본 발 명의 요지를 벗어남이 없이 당해 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형 실시가 가능한 것은 물론이고, 그와 같은 변경은 기재된 청구범위 내에 있게 된다.Although the above has been illustrated and described with respect to the preferred embodiments of the present invention, the present invention is not limited to the above-described embodiments, but in the art to which the present invention pertains without departing from the spirit of the invention as claimed in the claims. Various modifications can be made by those skilled in the art, and such modifications are intended to fall within the scope of the appended claims.

도 1은 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치를 나타내는 구성도,1 is a block diagram showing an apparatus for detecting a wafer for a wafer transfer system according to the present invention;

도 2는 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치를 나타내는 정면도,2 is a front view showing a sensing device of a wafer for a wafer transfer system according to the present invention;

도 3은 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지장치를 나타내는 측면도,3 is a side view showing a sensing device for a wafer transfer system wafer according to the present invention;

도 4는 본 발명에 따른 웨이퍼이송시스템용 웨이퍼의 감지방법을 나타내는 플로우챠트이다. 4 is a flowchart illustrating a method of detecting a wafer for a wafer transfer system according to the present invention.

*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *

10 : 센서장치 11 : 발광소자10 sensor device 11 light emitting device

12 : 수광소자 15 : 센서 이송축12: light receiving element 15: sensor feed shaft

20 : 제어장치 21 : 경고부20: control unit 21: warning unit

22 : 비상 정지부22: emergency stop

Claims (7)

웨이퍼이송시스템(200)의 리테이너(210)가 웨이퍼(100)를 일정 간격을 두고 일렬로 배치 시, 상기 웨이퍼(100)의 정렬 상태를 감지하여 전기적 신호로 출력하는 센서장치(10); When the retainer 210 of the wafer transfer system 200 arranges the wafers 100 in a line at a predetermined interval, the sensor device 10 for detecting the alignment state of the wafer 100 and outputs the electrical signal; 상기 센서장치(10)의 감지신호를 기초로 웨이퍼(100)의 수량을 파악하는 동시에, 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 제어하는 제어장치(20)를 포함하여 구성된 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지장치.And a control device 20 for determining the quantity of the wafer 100 based on the detection signal of the sensor device 10 and determining and controlling the abnormality of the alignment state of the wafer 100. A wafer sensing device for a wafer transfer system. 제1항에 있어서,The method of claim 1, 상기 센서장치(10)는 웨이퍼이송시스템(200)의 웨이퍼(100)를 양측에서 지지해주는 동시에 그 센서장치(10)의 센서가 좌우로 이송되는 센서 이송축(15)에 장착되어 웨이퍼(100)의 수량 및 웨이퍼(100)의 정렬 상태를 감지할 수 있도록 하는 발광소자(11) 및 수광소자(12)로 이루어진 포토센서인 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지장치.The sensor device 10 supports the wafer 100 of the wafer transfer system 200 from both sides, and is mounted on the sensor transfer shaft 15 through which the sensor of the sensor device 10 is moved from side to side. Device for detecting a wafer for a wafer transfer system, characterized in that the photosensor consisting of a light emitting element (11) and a light receiving element (12) to detect the quantity and the alignment state of the wafer (100). 제2항에 있어서,The method of claim 2, 상기 발광소자(11)는 상기 센서 이송축(15)을 따라 이송하면서 상기 웨이퍼(100)의 정렬 상태를 감지하기 위해 빛을 방출하고, 수광소자(12)는 발광소자(11)를 따라 동일 속도로 이송하면서 발광소자(11)로부터 발생되어 송신되는 빛을 수신하여 웨이퍼(100)에 의한 빛의 조도 변화에 의해 감지 신호를 발생하는 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지장치.The light emitting element 11 emits light to detect the alignment state of the wafer 100 while transferring along the sensor feed shaft 15, and the light receiving element 12 has the same speed along the light emitting element 11. Receiving light transmitted from the light emitting element (11) while transferring to the wafer sensing device for a wafer transfer system, characterized in that for generating a detection signal by the change in the illuminance of the light by the wafer (100). 제1항에 있어서,The method of claim 1, 상기 제어장치(20)는 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 웨이퍼(100)의 미스얼라인 발생 시, 알람 시그널을 발생시키는 경고부(21)와, 설비 가동을 정지시키는 비상 정지부(22)로 이루어진 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지장치.The control device 20 determines whether there is an abnormality in the alignment state of the wafer 100, and a warning unit 21 for generating an alarm signal when a misalignment occurs in the wafer 100, and an emergency for stopping the operation of the facility. Wafer sensing device for a wafer transfer system, characterized in that consisting of a stop (22). 캐리어 스테이지의 웨이퍼(100)를 SIC 보트 스테이지로 이송시키는 과정에서, 포드(pod)에서의 웨이퍼(100) 로딩 및 언로딩시 리테이너(210)를 통해 웨이퍼(100)를 픽업(pick up)하는 단계;In the process of transferring the wafer 100 of the carrier stage to the SIC boat stage, picking up the wafer 100 through the retainer 210 when loading and unloading the wafer 100 in the pod. ; 상기 리테이너(210)에 의해 고정 배치되어 있는 다수개의 웨이퍼(100)의 정렬 상태를 센서 이송축(15)에 구비된 센서장치(10)가 동작하면서 웨이퍼(100)의 수량을 파악하고, 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하는 단계;While the sensor device 10 provided on the sensor feed shaft 15 operates the alignment state of the plurality of wafers 100 fixedly arranged by the retainer 210, the quantity of the wafers 100 is determined and the wafers ( Determining whether there is an abnormality in the alignment state of 100); 상기 웨이퍼(100)의 수량 및 정렬 상태를 파악하여 그 감지 신호를 제어장치(20)로 전송하는 단계;를 포함하여 이루어진 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지방법.Detecting the quantity and alignment of the wafers (100) and transmitting the detection signal to the control device (20). 제5항에 있어서,The method of claim 5, 상기 센서장치(10)로부터 전송된 감지 신호를 기초로 상기 웨이퍼(100)의 정렬 상태에 대한 이상 여부를 판별하여 웨이퍼(100)의 미스얼라인 발생 시, 경고부(21)를 통해 알람 발생을 즉각적으로 수행하고, 비상 정지부(22)를 통해 설비 가동을 비상 정지시키는 조치를 실시하여 SIC 보트 스테이지로의 웨이퍼(100) 이송 동작을 중지시키는 단계를 더 포함하는 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지방법.On the basis of the detection signal transmitted from the sensor device 10 to determine whether the abnormality of the alignment state of the wafer 100, when the misalignment of the wafer 100 occurs, an alarm is generated through the warning unit 21 Immediately performing an emergency stop of the facility operation through the emergency stop section 22 to stop the transfer operation of the wafer 100 to the SIC boat stage. Wafer Detection Method. 제5항 또는 제6항에 있어서,The method according to claim 5 or 6, 상기 센서장치(10)는 발광소자(11)가 센서 이송축(15)을 따라 이송하면서 상기 웨이퍼(100)의 정렬 상태를 감지하기 위해 빛을 방출하고, 상기 발광소자(11)에 대응하는 위치에 위치하는 수광소자(12)는 발광소자(11)를 따라 동일 속도로 이송하면서 그 발광소자(11)로부터 송신되는 빛을 수신하여 정렬 상태의 웨이퍼(100)에서 발생하는 빛의 조도 변화를 감지하는 것을 특징으로 하는 웨이퍼이송시스템용 웨이퍼의 감지방법.The sensor device 10 emits light to detect the alignment state of the wafer 100 while the light emitting element 11 is transported along the sensor feed shaft 15, and a position corresponding to the light emitting element 11. The light receiving element 12 positioned at the light emitting device 11 receives light transmitted from the light emitting element 11 while moving at the same speed along the light emitting element 11 to detect a change in illuminance of light generated from the wafer 100 in an aligned state. Method for detecting a wafer for a wafer transfer system, characterized in that.
KR1020080135623A 2008-12-29 2008-12-29 Apparatus and method for sensing wafer of wafer transfer system KR20100077622A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109188868A (en) * 2018-09-20 2019-01-11 深圳市矽电半导体设备有限公司 Wafer handling equipment and the litho machine for applying it

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109188868A (en) * 2018-09-20 2019-01-11 深圳市矽电半导体设备有限公司 Wafer handling equipment and the litho machine for applying it
CN109188868B (en) * 2018-09-20 2024-02-02 矽电半导体设备(深圳)股份有限公司 Wafer blanking device and photoetching machine applying same

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