KR20100058925A - Tilt type multi-turn reel-to-reel transfer machine - Google Patents

Abstract

PURPOSE: A tilt type multi-turn reel-to-reel transfer apparatus is provided to prevent the deformation or the damage of a substrate due to the overlapping of substrates. CONSTITUTION: A tilt type multi-turn reel-to-reel transfer apparatus comprises a supply reel(200), a transfer drum(400) and a receiving reel(300). In order that the direction in which a substrate(10) is transferred from the supply reel to the transfer drum is parallel to the direction in which the substrate is transferred to the receiving reel from the transfer drum, a supply rotary shaft(210) and a receiving rotary shaft(310) are formed to incline to the axial direction of a drum rotation shaft(410) or the drum rotary shaft is formed to incline at the deflection angle (B) to the axial direction of the receiving rotary shaft and the supply rotary shaft. The transfer drum is formed to be single layer or double layers.

Description

Tilt type multi turn reel to reel transfer device {TILT TYPE MULTI-TURN REEL-TO-REEL TRANSFER MACHINE}

The present invention relates to a tilt-type multi-turn reel to reel transfer device for transferring a substrate, in detail the transfer direction of the substrate supplied from the supply reel to the transfer drum and the transfer direction of the substrate supplied from the transfer drum to the collection reel parallel The present invention relates to a tilt type multi-turn reel to reel transfer device which prevents shear stress from occurring on a substrate and prevents the substrate from being overlapped or damaged by being damaged by one portion of the reel.

In general, in order to develop a superconducting application device that can improve electrical energy efficiency by using the property of zero electrical resistance, superconducting wire having excellent performance and low cost is needed.

Among these superconducting wires, high temperature superconducting wires have a higher critical temperature than metal-based superconducting wires cooled with expensive liquid helium, and thus can be used in cheap liquid nitrogen. Recently, in order to use such high-temperature superconducting wires as conductors for actual superconducting magnets and power devices, researches have been conducted to develop high-temperature superconducting wires with excellent current density performance, low cost, long length, and high mechanical strength. Actively in progress

To improve the current density of superconducting wires, we need to solve the weak link at the grain boundaries that act as a barrier to the current flow. The weaker coupling is achieved by reducing the misalignment angle between the superconducting crystal grains. As the performance improves, more current can flow.

In order to improve the critical current density, which is the most important characteristic for practical use, recently, the second generation ReBCO (Re; rare earth metal as Y, Sm, Gd, Ho, etc.) The study of the coated conductor (coated conductor) is in progress.

ReBCO thin film wires are biaxially oriented, and have a weaker bond compared to BSCCO first generation wires oriented in a single axis manufactured by PIT (Powder-In-Tube) method, so that the critical current density (Jc) is several times higher. Above all, the rate of Jc decrease is very small compared to the first generation wire rod even under the liquid nitrogen temperature magnetic field.

Currently, ReBCO 2nd generation multi-layer thin film type high temperature superconducting wire is manufactured by various thin film manufacturing methods in the world, but here, IBAD-MgO template process will be described.

First, in order for biaxial orientation of the superconducting layer, the underlying layer must be oriented first. For this purpose, IBAD (Ion-Beam Assisted Deposition) or ISD is mainly used on disordered crystalline stainless steel or Hastelloy alloy substrate. There is a method in which an oxide film is biaxially oriented and deposited by a PVD method such as (Inclined Substrate Deposition).

In order to prevent diffusion and lattice mismatch with the superconductor layer, several oxide buffer layers are further deposited on the template by a method such as PLD (Pulsed Laser Deposition) or Reactive Sputter. The ReBCO superconducting layer is deposited on the template coated with the buffer layer by EDDC, PLD, MOD, and MOCVD.

In order to coat the biaxially oriented IBAD-MgO layer, the subsequent oxide buffer layer, and the superconducting layer on the disordered metal substrate by the vacuum deposition method, the necessity of an apparatus for transferring the tape of a long line at regular intervals is increasing.

In order to speed up the process in vacuum deposition, the material evaporated from the target or source is driven by a multi-turn method rather than having only a single line of tape pass through the area where it is deposited on the substrate. It is possible to deposit in a large area.

The tension control multiturn reel to reel device is proposed in the Republic of Korea Patent Publication No. 07367377 which invented the tension of the substrate in the multi-turn part with respect to the transfer device.

1 is a perspective view of a tension control multiturn reel to reel device according to the prior art.

As shown, the tension-controlled multi-turn reel to reel device according to the prior art is composed of a supply reel 200 for supplying a substrate and a transfer drum 400 formed of a plurality of reels and the collection reel 300 winding the supplied substrate In addition, the transfer drum 400 is rotated about a rotation axis and at the same time, each turn reel is rotated in the bearing rolling, and the tension of the substrate transferred by the transfer drum 400 is automatically adjusted.

And, Figure 2 is a plan view of one drum reel to reel transfer device according to the prior art.

As shown, the conventional reel-to-reel transfer device is wound around the supply reel (not shown) while the feed reel (not shown) is rotated, as the transfer drum 400 is rotated in accordance with the rotation of the collecting reel (not shown) The substrate 10 may be collected by winding the superconducting tape 20 on which the superconducting material is deposited as the substrate 10 is transferred to the collecting reel through the transfer drum 400.

However, this configuration is such that the shear stress A in the lateral direction of the substrate 10 or the superconducting wire 20 at the point where the substrate 10 is provided to the transfer drum 400 and at the point where the transfer drum 400 is collected outside. ) Is generated, the substrate is deformed or damaged.

3 is a plan view of a two-drum reel to reel transfer device according to the prior art.

As shown, the prior art is composed of a frame 100, a supply reel 200, a collecting reel 300, and a transfer drum 400 is largely configured selectively.

First, the frame 100 is generally one side of the vacuum chamber is generally formed in one direction elongated, so that each device can be placed by fixing the supply reel 200 and the transfer drum 400 and the collection reel (300) do.

In addition, the supply reel 200 has a supply rotation shaft 210 connected to the rotation center is formed, rotated by the supply rotation shaft 210, the substrate 10 wound on the supply reel 200 transfer drum ( 400).

Meanwhile, while the substrate 10 passes through the transfer drum 400, a superconducting material 20 is formed by depositing a superconducting material on one side of the substrate 10, and the collection rotation shaft of the collection 300 will be described later. As the 310 is rotated, the superconducting tape 20 is collected on the collection reel 300.

Next, the transfer drum 400 is formed of one or more drums rotatable between the supply reel 200 and the collection reel 300, when the collection reel 300 is rotated by an external rotary drive device, The transfer drum 400 rotates the drum rotating shaft 410 at a constant speed so that the substrate 10 or the superconducting tape 20 is transported to the collection reel 300 while maintaining the tension, and the rotational speed of the drum rotating shaft 410 is rotated. Is set to be similar to the supply rotation shaft 210 and the collection rotation shaft 310, is formed so that the superconducting material can be deposited on one side of the wire rod 10 during transport.

However, in the conventional reel-to-reel transfer device, the direction in which the spiral is wound around the transfer drum 400 and the transfer direction of the substrate 10 supplied or collected from the supply reel 200 and the collection reel 300 are shifted, respectively. There is a problem that the substrate 10 or the superconducting tape 20 may not be wound correctly on the supply reel 200 and the collection reel 300.

In addition, when the displaced substrate 10 or the superconducting tape 20 is properly wound on the supply reel 200 or the collection reel 300, shear stress A is generated on the side surface, so that the substrate 10 overlaps during transportation. (overlap), the substrate 10 or the superconducting tape 20 is deformed or damaged by being pulled to one side of the reel.

In order to prevent the shear stress from occurring during the transfer of the substrate 10, a technique for transferring only one line in parallel with the traveling direction of the substrate and the longitudinal direction of the substrate, rather than the multi-turn reel-to-reel method, has been proposed. .

However, in order to improve the productivity of the deposition process, a multi-turn method that can use a large deposition area is required, and in the multi-turn process, the shear direction A must be prevented from acting by making the length direction of the substrate parallel to the traveling direction of the substrate. There is a problem.

Meanwhile, the substrate is sheared in the process of moving from the upper portion by arranging the upper transfer drum 400 and the lower transfer drum 400 of the multi-turn in the prior art by a predetermined deflection angle so as to transfer the substrate 10 in zigzag. In some cases, the shear stress is applied in the opposite direction during the transfer from the lower side, but the shear stress received from the upper side is offset by moving from the lower side.

In this case, the shear stress is canceled as a whole so that the shear stress felt in the supply reel 200 and the collecting reel 300 may be eliminated. However, in the multi-turn portion where the thin film is deposited, the substrate may be repeatedly subjected to shear stress (A) in the opposite direction while moving the substrate, thereby damaging the substrate.

In particular, when the substrate is transported at a high temperature of 600 ° C. or higher, the mechanical properties of the substrate are lowered, and plastic deformation may occur in the substrate due to the shear stress repeated in the opposite direction.

Korean Patent Application Publication No. 10-0834115 proposes an IBD system for manufacturing a metal wire having biaxial orientation.

The present invention relates to a system for producing a metal wire rod having biaxial orientation that can be used as a base material of a superconducting wire rod. The system for manufacturing a superconducting wire of the present invention has a first reel member and a second reel member for multiturning the metal wire in a deposition region so as to continuously deposit a biaxially oriented thin film on a metal wire which is a base material of the superconducting wire. An ion beam is applied to a reel to reel device, a heating member for heating a metal wire which is multiturned by the reel to reel device, a deposition member for depositing a material on the metal wire passing through the deposition region, and a thin film deposited on the metal wire. It comprises an ion implantation member for irradiation.

However, even in such a system, there is a problem in that the shear stress A generated in the multi-turn part is not taken into consideration and left unattended.

The present invention has been made to solve the problems described above, the horizontal rotation of the supply rotation axis and the collection rotation axis or drum rotation axis, so that the transfer direction of the substrate and the longitudinal direction of the substrate is generated to the side of the substrate to be transferred An object of the present invention is to provide a tilt-type multi-turn reel to reel transfer device to prevent the shear stress to prevent deformation and breakage of the substrate.

In order to achieve the above object, the present invention provides a reel-to-reel transfer device in which a tape-shaped substrate is wound around a supply reel, a transfer drum, and a collection reel in which a supply rotation shaft, a drum rotation shaft, and a collection rotation shaft are respectively formed at the center of rotation. The supply rotation shaft and the collection rotation shaft are formed to be inclined with respect to the axial direction of the drum rotation shaft such that the direction in which the substrate is transferred from the reel to the transfer drum and the direction in which the substrate is transferred from the transfer drum to the collection drum are parallel to each other, or the drum rotation shaft It is preferable to be inclined at an angle of deflection with respect to the axial direction of the said supply rotation shaft and the collection rotation shaft.

Here, the transfer drum is preferably made of a single layer or multiple layers.

The present invention comprises a housing having a rectangular shape and connected to the drum rotating shaft therein and having the transfer drum therein; Is formed on one side of the housing, the angle fixing portion for adjusting the direction of the drum rotation axis as the other side of the housing is horizontally rotated around one side of the housing; preferably further comprises.

Here, the angle fixing portion is preferably made of a hinge coupling.

Here, the angle fixing is preferably made of a bolt and nut or a hydraulic cylinder.

Here, it is preferable that the supply rotation shaft and the collection rotation shaft are each connected by one or more universal joints.

The present invention by the above configuration, the conveying direction of the substrate provided from the supply reel to the transfer drum is formed in parallel with the conveying direction provided from the transfer drum to the collection reel, to prevent the occurrence of shear stress on the side of the substrate to be transferred In this case, the substrate is transferred to one side so as to be overlapped, thereby preventing the substrate from being deformed or damaged.

(First embodiment)

4 is a plan view of the tilt-type multi-turn reel to reel transfer device of the first embodiment according to the present invention.

As shown, the tilt-type reel to reel transfer device according to the present invention is a device for transferring the substrate 10 to deposit a superconducting thin film, the supply reel 200 for supplying the substrate 10 largely, and It is formed between the collecting reel 300 and the supply reel and the supply reel 200 and the collection reel 300 is spaced apart at a predetermined interval, the substrate 10 is wound around the outer peripheral surface in the spiral direction and transported Superconducting material is connected to and fixed to the transfer drum 400 is deposited on one side of the substrate 10, and optionally connected to the supply reel 200 and the collection reel 300 and the transfer drum 400 Is done.

First, the supply reel 200 is made of a cylindrical reel bobbin, a long rod-shaped supply rotation shaft 210 is formed at the rotation center of the supply reel 200 in accordance with the rotation of the supply rotation shaft 210 The substrate 10 wound on the outside of the supply reel 200 is transferred to the collection reel 300 to be described later via the transfer drum 400.

That is, one side of the supply rotation shaft 210 is connected to the rotation center of the supply reel 200, the other side of the supply rotation shaft 210 is a deflection angle (B) with respect to the axial direction of the drum rotation shaft 430 to be described later It is connected to the frame 100 to be inclined.

Through the inclined supply reel 200, the substrate 10 supplied from the supply reel 200 to the transfer drum 400 is transferred, and the substrate 10 spirally wound around the transfer drum 400. The conveying direction in which the substrate 10 is collected from the conveying drum 400 to the collecting reel 300 to be described later becomes parallel, and the substrate 10 is twisted while being transferred from the supply reel 200 to the conveying drum 400. It is made to prevent the shear stress (A) generated on the side of the substrate 10.

Here, the supply reel 200 is provided with guide jaws (not shown) on both sides of the supply reel 200 to guide the transfer direction of the substrate 10, so that the substrate is not twisted or derailed the transfer direction ( 10) to guide the winding.

On the other hand, the rotational drive of the supply reel 200 is as follows.

In the first rotational drive, when the collection reel 300 rotated by the rotating means is rotated, the substrate 10 connected to the collection reel 300 is wound around the collection reel 300, and accordingly, the substrate 10 As the transfer drum 400 is rotated in one direction, the substrate 10 wound on the outer circumferential surface of the transfer drum 400 is transferred toward the collection reel 300, and the transfer drum 400 and the substrate rotated in this way. The supply reel 200 connected to the 10 is driven to rotate so that the substrate 10 wound on the supply reel 200 is transferred to the collection reel 300.

The second rotation means is implemented to transport the substrate 10 by rotating the supply reel 200 and the collecting reel 300 similarly as the supply rotation shaft 210 of the supply reel 200 is connected to the rotation means independently rotated Yes it is possible.

Next, the transfer drum 400 is formed of one or more drums, and is composed of a plurality of drums in a single layer or a plurality of drums. It is possible to rotate manually or rotate on its own, connected vertically to the frame 100 such as the wall of the vacuum chamber.

And, on the outer circumferential surface of the transfer drum 400, guide jaws (not shown) are formed on both sides so that the position of the substrate 10 to be transferred is not disturbed to guide the transfer direction of the substrate 10, and the transfer drum 400 ) And a superconducting material may be deposited on the substrate 10 through a deposition apparatus (not shown) spaced apart from each other.

When the substrate 10 is a superconducting material is deposited to become a superconducting tape 20, the substrate 10 is collected by a collection 300 while spirally winding the transfer drum 400.

At this time, the transfer drum 400 is rotated at a rotation speed corresponding to the supply reel 200 or the collection reel 300, the transfer drum 400 is composed of one large drum, two drums or one The large drum of is formed on the upper side, it can be carried out in various arrangements, such as consisting of a small drum on the lower side, two small drums on the upper side, two small drums on the lower side.

In addition, the drum rotating shaft 410 is connected to the center of rotation of the transfer drum 400, when the collector 300 to be described later is rotated, the drum rotating shaft 410 of the transfer drum 400 is rotated at the same time superconducting tape 20 ) Is transported.

Next, the collection reel (300) is similar in shape to the supply reel (200) referred to as a cylindrical reel shape, the guide jaw on both sides of the collection reel (300) to guide the conveying direction of the superconducting tape (20) (Not shown) is provided to guide the substrate 10 not to be twisted or to derail the conveying direction.

One side of the collection rotation shaft 310 long in one direction is connected to one side of the rotation center of the collection reel 300, and optionally the other side of the collection rotation shaft 310 is connected to the frame 100 to be described later.

In addition, the collection reel 300 is connected to the rotary drive device, provides power to transfer the substrate 10, and the deposited superconducting tape 20 is transported in parallel without being folded to be collected.

At this time, the direction in which the substrate 10 wound in the spiral direction in the transfer drum 400 is transferred, that is, the transfer direction of the substrate 10 transferred from the supply reel 200 to the transfer drum 400 and the conductive material Since the direction in which the superconducting tape 20, which is the deposited substrate 10, is transferred is different, the shear stress A is formed in the lateral direction of the substrate 10 or the superconducting tape 20, and the substrate 10 to which the substrate 10 is transferred is warped. It is easy to be transferred by shifting.

Therefore, the collection rotation shaft 310 is formed to be inclined by the deflection angle (B) with respect to the axial direction of the drum rotation shaft 410, that is, the direction to be transferred from the supply reel 200 to the transfer drum 400, that is, the transfer The transfer direction of the substrate 10 spirally wound on the drum 400 and the collection direction in which the superconducting tape 20, which is the substrate 10 on which the superconducting material is deposited, are wound around the collection reel 300, are parallel. In order to prevent the substrate 10 from overlapping or twisting, the deflection angle B is formed to be equal to the angle in which the aforementioned supply reel 310 is inclined with respect to the vertical axis of the drum rotation shaft 410.

Finally, the frame 100 is formed in a bar (BAR) shape is formed long in the horizontal direction, made of a hard material for supporting the connected device, the lower side of the frame 100 is fixed to the ground fixed to the wedge.

Then, the frame 100, the supply reel 200, the collection reel 300 and the transfer drum 400, so as to stably support, the feed reel 200 and the number on both sides around the transfer drum 400 The peeling 300 is fixed to each installation, and there is no shaking when the substrate 10 or the superconducting tape 20 is transported, so that it can be transported by maintaining a tight tension.

(Second embodiment)

5 is a plan view of a tilt-type multi-turn reel to reel transfer device according to a second embodiment of the present invention.

As shown, the present invention, the frame 100 is formed selectively, the supply reel 200, the collection reel 300 and the transfer drum 400.

First, the frame 100 may be one side of the vacuum chamber by supporting other construction means, and any means capable of supporting the construction is possible.

The supply reel 200 and the collection reel 300 may have a circular reel shape, and the supply rotation shaft 210 and the collection rotation shaft 310 connected to the frame 100 may each adjust one or more angles. Connected to the universal joint 230, the substrate 10 or the superconducting tape 20 at the point that is transferred from the supply reel 200 to the transfer drum 400, or from the transfer drum 400 to the collection reel 300 After adjusting the direction of one side of the supply reel 200 and the collecting reel 300 so as to be transported in parallel without bending, the angle fixing part 250 to one side of the supply rotation shaft 210 and the collection rotation shaft 310 This tilt angle can be fixed.

Therefore, the universal joint 230 is a substrate 10 when the substrate 10 to be transferred is supplied from the supply reel 200 to the transfer drum 400, or from the transfer drum 400 to the collection reel 300, Or superconducting tape 20 to adjust a part of the angle of the axis of the supply rotation shaft 210 and the collection rotation shaft 310 so as to be transported in parallel without being configured to be movable in various directions.

The angle of inclination opposite to the supply rotation shaft 210 or the collection rotation shaft 310 in which the universal joint 230 is formed may be fixed to fix the angles of the supply rotation shaft 210 and the collection rotation shaft 310 adjusted as described above. An angle fixing part 250 formed of a support that can be supported is formed, and the angle fixing part 250 is capable of various fixing means such as a stopper.

(Third Embodiment)

6 is a plan view of a tilt-type multi-turn reel to reel transfer device according to a third embodiment of the present invention.

As shown, the present invention consists of a frame 100, supply reel 200, collection reel 300, transfer drum 400 and the housing 500, the frame 100 is optionally configured.

First, the frame 100 will be described. The frame 100 is made of a hard material having a bar shape in the horizontal direction, and the housing 500 including the supply reel 200, the collection reel 300, and the transfer drum 400 is stably fixed. As a result, the substrate 10 or the superconducting tape 20 is fixed to be free from shaking when the substrate 10 or the superconducting tape 20 is transferred.

Next, the supply reel 200 and the collection reel 300 will be described. One side of the long rod-shaped supply rotation shaft 210 is vertically connected to the rotation center of the supply reel 200, and the same long rod-shaped collection rotation shaft 310 is rotated at the center of the collection reel 300. One side is vertically connected.

The other sides of the supply rotation shaft 210 and the collection rotation shaft 310 are vertically connected to the frame 100, respectively.

On the outer circumferential surfaces of the supply reel 200 and the collection reel 300, a guide jaw (not shown) for guiding a direction so that the substrate 10 to be transferred is transferred without shear stress is formed, so that the direction of the substrate 10 to be transferred is It is prevented from being conveyed by twisting or being conveyed while being damaged by overlapping the substrate.

In addition, the collection reel 300 is first rotated by a rotation driving means to collect the substrate 10, and thus the drum shaft 410 of the transfer drum 400 and the supply reel 200 connected to the substrate 10. And the supply rotation shaft 210 is rotated, respectively, the substrate 10 is transferred to the collection reel 300, the transfer drum 400 and the supply reel of the transfer drum 400 according to the rotational speed of the collection reel (300) The rotation speed of 200 is determined.

Next, the transfer drum 400 will be described. The transfer drum 400 is a drum formed long in the longitudinal direction, is composed of a single layer or a plurality of layers are combined in various numbers, one side of the drum rotation shaft 410 is connected to both sides of the center of rotation of the transfer drum 400, respectively The other side of the drum rotation shaft 410 is connected to the inner side opposite of the housing 500 to be described later.

Through this configuration, as one side of the housing 500 is rotated in the horizontal direction, the drum rotation shaft 410 is made to be inclined with respect to the axial direction of the supply rotation shaft 210 and the collection rotation shaft 310.

Next, the housing 500 will be described. The housing 500 is formed in a rectangular shape with an empty inside, the transfer drum 400 is installed in the inner side is connected to the drum rotation shaft 410, the outer side is connected to the frame 100, the angle is An angular fixation 510 consisting of adjustable hinge couplings is formed.

Here, the angle fixing part 510, one side of the housing 500 and the frame 100 is configured to be fixed by adjusting the degree of rotation of one side of the housing 500 by a hinge coupling or a hydraulic cylinder.

The angle fixing unit 510 may be fixed by adjusting the angle of the housing 500 at various angles, and may be installed at various positions between the frame 100 and the housing 500 according to a design. .

That is, by adjusting the direction of the housing 500 by using the angle fixing portion 510, the transfer direction of the substrate 10 wound on the transfer drum 400 installed in the housing 500 and the supply reel ( The conveying direction is parallel to the substrate 10 or the superconducting tape 20 wound on the 200 and the collecting reel 300 to prevent the shear stress A generated in the axial direction, thereby preventing deformation of the substrate 10 or Allow the superconducting tape 20 to be conveyed.

Hereinafter will be described the operation of the present invention.

First, as the collection reel 300 connected to the rotary motor (not shown) is rotated, the supply reel 200 and the transfer drum 400 connected to the collection reel 300 and the substrate 10 are rotated. The substrate 10 wound on the supply reel 200 becomes a superconducting tape 20 in which a superconducting material is deposited while being wound in a spiral direction on the transfer drum 400, and is disposed in one direction on the collecting reel 300. It is wound up and collected.

When the superconducting material is deposited, the substrate 10 is heated to a predetermined temperature by a heater, and then the substrate 10 is deposited with the superconducting material by a deposition apparatus installed at a predetermined interval from the transfer drum 400. It becomes a superconducting tape 20, the supply reel 200 is continuously rotated in one direction by the rotational force of the collecting reel 300, the substrate 10 is continuously supplied to the transfer drum 400, the transfer drum ( As collected from 400 to the collection reel 300, the superconducting tape 20 of the long line is made by supplying the substrate 10, deposition of the superconducting material, and continuous collection.

At this time, the drum rotation shaft 410 is independently rotated horizontally by the deflection angle (B) with respect to the axial direction of the supply rotation shaft 210 and the collection rotation shaft 310, or one side of the housing 500 is the supply rotation shaft 210 And inclined by a deflection angle B relative to the collection rotation shaft 310, or the supply rotation shaft 210 and the collection rotation shaft 310 by the deflection angle B with respect to the drum rotation shaft 410. Is formed to be inclined, the transfer direction from the transfer drum 400 to the collection reel 300 is parallel, the transfer direction of the substrate 10 is supplied to the transfer drum 400 from the supply reel 200, and the transfer The transfer direction of the superconducting tape 20 supplied from the drum 400 to the collecting reel 300 is parallel so that the substrate 10 or the superconducting tape 20 to be transported is overlapped by one side, or the substrate 10 or the superconducting Shear stress is generated in both directions of the tape 20 so that the substrate 10 or It is possible to prevent the conductive tape 20 is damaged.

Meanwhile, as shown in FIG. 5, when the supply rotation shaft 210 and the collection rotation shaft 310 are fixedly installed at an inclination angle B with respect to the drum rotation shaft 410, the supply rotation shaft 210 and the collection shaft are collected. The universal joint 230 formed on one side of the rotary shaft 310 to allow the supply rotation shaft 210 and the collection rotation shaft 310 to freely adjust the direction, the substrate supplied from the supply reel 200 to the transfer drum 400 The transfer direction of 10 and the transfer direction of the superconducting tape 20 supplied from the transfer drum 400 to the collection reel 430 are formed to be parallel.

As shown in FIG. 6, when one side of the housing 500 is formed to be inclined by a deflection angle B relative to the supply rotation shaft 210 and the collection rotation shaft 310, the housing 500 may be disposed at one side of the housing 500. An angle fixing part 510 is formed so that the angle can be freely adjusted with respect to the frame 100, and the transfer direction of the substrate 10 supplied from the supply reel 200 to the transfer drum 400 and the transfer drum 400. The superconducting tape (2) supplied to the collecting reel 430 in the () is formed to be parallel.

The foregoing has outlined rather broadly the features and technical advantages of the present invention in order that the patent claims of the invention that follow may be better understood. Additional features and advantages that constitute the claims of the present invention will be described in detail below. It should be appreciated by those skilled in the art that the conception and specific embodiments of the invention disclosed may be readily used as a basis for designing or modifying other structures for carrying out similar purposes to the invention.

In addition, such modifications or altered equivalent structures by those skilled in the art as a basis for modifying or designing the structures and embodiments of the invention disclosed in the present invention to other structures for carrying out the same purposes of the present invention are patents Various changes, substitutions and changes may be made without departing from the spirit or scope of the invention as set forth in the claims.

1-a perspective view of a tension control reel to reel device according to the prior art.

Figure 2-a plan view of a one drum reel to reel transfer device according to the prior art.

3-a plan view of a two-drum reel to reel transfer device according to the prior art.

4-a plan view of a tilt-type multi-turn reel to reel transfer device according to a first embodiment of the present invention.

5-a plan view of a tilt-type multi-turn reel to reel transfer device according to a second embodiment of the present invention.

6-a plan view of a tilt-type multi-turn reel to reel transfer device according to a third embodiment of the present invention.

** Description of the symbols for the main parts of the drawings **

10 substrate 20 superconducting tape

100: frame 200: supply reel

210: supply rotation shaft 230: universal joint

250: angle fixing 300: collection

310: collection axis of rotation 400: transfer drum

410: drum rotating shaft 500: housing

510: angle fixing A: shear stress

B: deflection angle

Claims (6)

The supply rotating shaft 210, the drum rotating shaft 410 and the collecting rotating shaft 310 are respectively wound around the supply reel 200, the transfer drum 400 and the collecting reel 300 formed at the center of rotation of the tape-shaped substrate 10. In the reel to reel conveying device, The supply rotation shaft (A) such that the direction in which the substrate 10 is transferred from the supply reel 200 to the transfer drum 400 and the direction in which the substrate 10 is transferred from the transfer drum 400 to the collection reel 300 are parallel to each other. 210 and the collection rotation shaft 310 is formed to be inclined with respect to the axial direction of the drum rotation shaft 410, or the drum rotation shaft 410 is deflected with respect to the axial direction of the supply rotation shaft 210 and the collection rotation shaft 310 Tilt-type multi-turn reel to reel transfer device characterized in that formed inclined at an angle (B). The method of claim 1, wherein the transfer drum 400, Tilt type multi-turn reel to reel transfer device characterized in that consisting of a single layer or a double layer. The method of claim 1, A housing 500 formed in a quadrangular shape and connected to the drum rotation shaft 410 to have a transfer drum 400 therein; Is formed on one side of the housing 500, the angle fixing portion 510 for adjusting the direction of the drum rotation shaft 410 as the other side of the housing 500 is rotated horizontally around one side of the housing 500 Tilt-type multi-turn reel to reel transfer device characterized in that it further comprises. The method of claim 3, wherein the angle fixing unit 510, Tilt-type multi-turn reel to reel transfer device characterized in that the hinge combination. The method of claim 3, wherein the angle fixing unit 510, Tilt-type multi-turn reel to reel feed device characterized in that consisting of a bolt and nut or a hydraulic cylinder. According to claim 1, wherein the supply rotation shaft 210 and the collection rotation shaft 310, Tilt-type multi-turn reel to reel transfer device, characterized in that each connected by one or more universal joints.

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