KR20240001526A - A multiturn reel to reel transfer apparatus for tension-free - Google Patents

Abstract

The present invention relates to a multi-turn reel-to-reel transfer device used when depositing a specific material on a tape-type substrate.
The present invention includes a supply reel for supplying substrates while rotating synchronously with the rotation shaft, a collection reel for recovering the supplied substrates while rotating synchronously with the rotation shaft, and a moving distance of the supplied substrates provided between the supply reel and the collection reel. It includes a first guide drill that rotates by a first friction rotation axis, and a second guide drill that is formed identically to the first guide drill and is arranged to be spaced a predetermined distance apart, and rotates by a second friction rotation axis, The first friction rotation shaft and the second friction rotation shaft are formed to have a diameter smaller than the diameter of the space formed in the central portion of the first and second guide drills and rotate, and the first guide drill is connected to the first friction rotation shaft. It rotates by friction torque generated by rotation, and the second guide drill rotates by friction torque generated by rotation of the second friction rotation shaft.
According to the present invention, the tension applied to the front side of the collection reel can be controlled to be close to 0 based on the supply direction of the substrate.

Description

Tension-free multiturn reel to reel transfer apparatus {A multiturn reel to reel transfer apparatus for tension-free }

The present invention relates to a multi-turn reel-to-reel transfer device used when depositing a specific material on a tape-type substrate.

Generally, when depositing a specific material on a long tape-type substrate, a multi-turn reel-to-reel transfer device is used.

FIG. 1 is a diagram showing embodiments of a multi-turn reel-to-reel device according to the prior art. The multi-turn reel-to-reel device shown in (a) of FIG. 1 is provided between the supply reel 10 and the collection reel 20. The multi-turn reel (30) is structured to include an inner ring (32) and a bearing (34) centered on a rotating shaft (31), and the tension of the substrate transported by the multi-turn reel (30) is automatically adjusted by the rolling movement of the bearing. so that it can be adjusted.

However, in the multi-turn reel-to-reel transfer device configured as above, significant tension is generated in the collection reel 20 due to friction generated in the bearing, which damages the edge portion of the tape substrate, Such damage is aggravated as bearing friction increases during high-temperature deposition.

In addition, deposition particles generated during the deposition process may flow into and accumulate on the bearing 34 provided between the multi-turn reel 30 and the rotating shaft 31, which interferes with the smooth rotation of the bearing 34 and causes automatic There is a problem in that tension control function deteriorates.

In addition, the multi-turn reel-to-reel transfer device shown in (b) of FIG. 1 determines the transfer direction of the substrate supplied from the supply reel 10 to the transfer drum 40 and from the transfer drum 40 to the collection reel 20. By ensuring that the transfer direction of the supplied substrate is parallel, shear stress is prevented from forming on the substrate, thereby preventing overlapping substrates or tilting of the reel to one side.

For this purpose, the multi-turn reel-to-reel transfer device is installed on the frame (10) so that it is tilted by the deflection angle (B) with respect to the axial direction based on one of the supply rotation axis (11), collection rotation axis (21), and drum rotation axis (51). The supply reel 20 and the collection reel 30 are parallel to prevent shear stress from occurring on the side of the transferred substrate, and to prevent the substrate from being deformed or damaged due to the substrate being tilted to one side and being transferred overlapping. do.

However, even in the case of the prior art as described above, significant tension is still generated in the collection reel 20 during the deposition process, so improvement in this regard is required.

KR 10-0736377 B1 KR 10-1023231 B1

The purpose of the present invention is to allow the guide reel to rotate by friction with the guide reel rotation axis in a state where the guide reel rotation axis is installed to have a clearance from the center of the guide reel, so that the tension applied to the substrate can be controlled to be close to 0. It provides a free multi-turn reel-to-reel transfer device.

Another object of the present invention is to control the tension applied to the substrate to be close to 0 by varying the diameter of the guide reel rotation axis in consideration of the frictional force applied to the substrate by the cooling block when a cooling block is further provided to cool the substrate. The goal is to provide a tension-free multi-turn reel-to-reel transfer device that allows this.

The tension-free multi-turn reel-to-reel transfer device according to the present invention includes a supply reel for supplying substrates while rotating synchronously with the rotation shaft, a collection reel for recovering the supplied substrates while rotating synchronously with the rotation shaft, and the supply reel and the water reel. It includes a plurality of guide reels provided between the distance reels and a friction rotation axis for rotation of the guide reels, wherein the friction rotation axis is formed to have a diameter smaller than the diameter of the space formed in the central portion of the guide reel and rotates, The guide reel is characterized in that it is rotated by friction torque generated by rotation of the friction rotation shaft.

In another aspect, the tension-free multi-run reel-to-reel transfer device according to the present invention includes a supply reel for supplying substrates while rotating synchronously with the rotation shaft, a collection reel for recovering the supplied substrates while rotating synchronously with the rotation shaft, and the supply reel. It is provided between the reel and the collection reel to increase the moving distance of the supplied substrate, and includes a first guide drill that rotates by a first friction rotation axis, and a first guide drill that is formed in the same manner as the first guide drill and is arranged to be spaced a predetermined distance apart. It includes a second guide drill rotating by two friction rotation axes, wherein the first friction rotation axis and the second friction rotation axis are formed to have a diameter smaller than the diameter of the space formed in the central portion of the first and second guide drills. Rotates, the first guide drill rotates by friction torque formed by rotation of the first friction rotation shaft, and the second guide drill rotates by friction torque produced by rotation of the second friction rotation shaft. , the first friction rotation axis and the second friction rotation axis are characterized in that they rotate faster than the first guide drill and the second guide drill.

The tension of the substrate applied to the front of the collection reel based on the substrate supply direction is defined by the following equation.

T _One =T ₂ -N×(F ₃ +F ₄ ).............. formula

(Here, F ₃ is the rotational force of the first guide drill due to friction torque, F ₄ is the rotational force of the second guide drill due to friction torque, N is the number of guide reels, T ₁ is the tension applied to the front of the guide reel, T ₂ represents the tension applied to the rear of the supply reel)

The tension (T ₁ ) is characterized in that it is adjusted by varying the diameters of the first friction rotation axis and the second friction rotation axis.

A cooling block for cooling the substrate is further provided between the first guide drill and the second guide drill, and the tension (T ₁ ) is defined by the following equation.

T _One =T ₂ -N×(F ₃ +F ₄ -F ₅ )............................ formula

(Here, F ₃ is the rotational force of the first guide drill due to friction torque, F ₄ is the rotational force of the second guide drill due to friction torque, F ₅ is the frictional force of the cooling block, N is the number of guide reels, and T ₁ is the number. Tension applied to the front of the reel, T ₂ represents tension applied to the rear of the supply reel)

The tension-free multi-turn reel-to-reel transfer device according to the present invention is configured so that the guide reel provided between the supply reel and the collection reel rotates by the rotational friction force generated by contact with the friction rotation shaft.

In addition, the friction rotation axis is controlled to rotate faster than the guide reel, and through such control, the frictional force applied to the substrate moving between the guide reel and the collection reel can be controlled to be close to 0.

In addition, the tension-free multi-turn reel-to-reel transfer device controlled as described above can be adjusted by varying the diameter of the friction rotation shaft while maintaining other configurations such as the supply reel, collection reel, and frame, which allows various It can be easily applied to substrates of any width and length.

In addition, the tension-free multi-turn reel-to-reel transfer device according to the present invention can be applied even when a cooling block for cooling the substrate is included.

That is, the diameter of the guide reel rotation axis can be varied in consideration of the friction force applied to the substrate by the cooling block, so it has the advantage of being utilized in various deposition processes.

1 is a diagram showing embodiments of a multi-turn reel-to-reel device according to the prior art.
Figure 2 is a diagram for explaining an embodiment of a tension-free multi-turn reel-to-reel transfer device according to the present invention.
Figure 3 is a diagram for explaining the rotation principle of the guide reel, which is a major component of the present invention.
Figure 4 is a diagram for explaining the tension-free transfer process of a substrate using the present invention.
Figure 5 is a diagram for explaining a tension-free transfer process of a substrate according to another embodiment of the present invention.
Figure 6 is a diagram showing an example of a cooling block, which is a main component of the present invention.
Figure 7 is a view showing another embodiment of a cooling block, which is a main component of the present invention.

Hereinafter, some embodiments of the present invention will be described in detail through illustrative drawings. In adding reference numerals to components in each drawing, the same components are given the same reference numerals as much as possible even if they are shown in different drawings. It is listed. In addition, in the description of the embodiment, if it is determined that a specific description of a related known configuration or function interferes with the understanding of the embodiment of the present invention, the description is simplified or omitted, and a component is placed on one side of another component. When described as “equipped,” “installed,” or “in contact,” the component may be directly provided, installed, or in contact with one side of the other component, but another component is “provided” between each component. , it should be understood that it can be “installed” or “contacted.”

FIG. 2 is a diagram illustrating an embodiment of a tension-free multi-turn reel-to-reel transfer device according to the present invention.

As shown, the tension-free multi-turn reel-to-reel transfer device according to the present invention transfers a substrate for deposition of a material, includes a supply reel 100 for supplying the substrate, and a recovery device after the material is deposited on the substrate. It includes a collection reel 300 for this and a guide reel provided between the supply reel 100 and the collection reel 300 to increase the length of the substrate on which the deposition reaction occurs.

The supply reel 100 and the collection reel 200 are configured to rotate synchronously with a rotation axis provided in the center in a cylindrical shape, and as the supply reel 100 rotates, the substrate wound on the outside moves in the direction of the collection reel 200. It is transported via the guide reel.

The guide reel is located between the supply reel 100 and the collection reel 200, and is intended to expand the deposition reaction area of the substrate transported through the supply reel 100. A plurality of guide reels are arranged at regular intervals. Hereinafter, for convenience of explanation, the guide reel provided on the first friction rotation shaft 420 will be referred to as the first guide drill 400, and the guide reel provided on the second friction rotation shaft 620 will be referred to as the first guide reel 400. 2 It is explained separately by guide drill (600).

In addition, although not shown, a frame may be further provided inside the chamber to fix the supply reel 100, the collection reel 200, and the rotation axis of the guide reel. If necessary, the guide reels can be divided into two sets. They can be added in pairs.

Meanwhile, the supply reel 100 and the collection reel 200 are configured to rotate synchronously with the rotation axis as described above, but the guide reel is installed in a rotation structure using friction force.

That is, a first space 410 is formed in the central part of the first guide drill 400, and the first friction rotation axis 420 is formed in a smaller size than the first space 410 and is accommodated therein. .

In addition, in the case of the second guide drill 600, the second friction rotation axis 620 is accommodated in the second space 610 formed in the central portion, and the second friction rotation axis (620) is accommodated inside the second space 610. 620) is installed to form a gap with the second guide drill 600.

For more detailed explanation, Figure 3 shows a drawing to explain the rotation principle of the guide reel, which is a major component of the present invention, and Figure 4 shows a drawing to explain the tension-free transfer process of the substrate using the present invention.

Referring to these drawings, the first guide drill 400 is formed in a cylindrical shape, and a first space 410 in which the first friction rotation axis 420 is accommodated is provided in the central portion.

Here, the first space 410 is formed to have an inner diameter larger than the diameter of the first friction rotation shaft 420, and as a result, the first friction rotation shaft 420 and the first guide drill 400 are located in the receiving space. Only a portion of the upper side is contacted.

That is, the first guide drill 400, like the supply reel 100 and the collection reel 200, does not rotate synchronously with the rotation axis inserted, but is draped over the first friction rotation shaft 420 that is installed to be rotatable. It is installed and when the first friction rotation shaft 420 rotates faster than the first guide drill 400, frictional force occurs due to friction at the contact portion between the first guide drill 400 and the first friction rotation shaft 420. This can be expressed again as a formula as shown in Equation 1 below.

R _One F _One = R ₂ F ₃ ...................................Formula 1

Here, R ₁ represents the radius of the first friction rotation axis 420, R ₂ represents the radius of the first guide drill 400, and F ₁ represents the radius of the first guide drill 400 and the first friction rotation axis 420. ) represents the frictional force due to contact, and F ₃ represents the rotational force in the moving direction of the first guide drill 400.

That is, the first guide drill 400 is rotated by the friction force generated at the contact portion with the first guide drill 400 as the first friction rotation shaft 420 rotates.

Therefore, assuming that the friction torque generated on the first friction rotation shaft 420 and the rotation torque of the first guide drill 400 are the same, the size of the friction torque of the first friction rotation shaft 420 having a radius R ₁ ( R ₁ × F ₁ ) and the magnitude (R ₂ × F ₃ ) of the rotational torque of the first guide drill 400 having a radius R ₂ are the same.

Therefore, the rotational force (F ₃ ) in the moving direction of the first guide drill 400 is determined by the diameter of the first friction rotation shaft 420 and the contact between the first guide drill 400 and the first friction rotation shaft 420. It can be adjusted by varying the friction force (F ₁ ). In addition, the friction force (F ₁ ) can be adjusted according to the friction coefficient of the first friction rotation shaft 420 in contact with the inner diameter of the first guide drill 400, so that the surface of the outer surface of the first friction rotation shaft 420 The rotational force (F ₃ ) can also be varied through reforming.

Meanwhile, the above formula is applied in the same way when the second guide drill 600 is formed with the same structure as the first guide drill 400, and the tension applied to the front of the collection reel 200 based on the traveling direction T ₁ can be expressed as Equation 2 below.

T _One =T ₂ -N×(F ₃ +F ₄ )...................................Formula 2

Here, F ₃ represents the rotational force of the first guide drill 400 due to friction torque, F ₄ represents the rotational force of the second guide drill 600 due to friction torque, N is the number of guide reels, and T ₁ is The tension applied to the front of the collection reel 200, T ₂ , represents the tension applied to the rear of the supply reel 100.

That is, the tension (T ₁ ) applied to the front of the collection reel 200 is the rotational force (F 3 ) of the first guide drill 400 due to the friction tog and the rotational force (F ₃ ) of the second guide drill 400 due to the friction tog. It is equal to the difference between the rotational force (F ₄ ) multiplied by the number (N) of the guide reels (400, 600) and the tension (T ₂ ) applied to the rear of the supply reel (100).

Therefore, the tension-free multi-turn reel-to-reel transfer device according to the present invention uses the rotational force (T 1 ) of the first guide drill due to the friction torque so that the tension (T ₁ ) on the front side of the collection reel 200 has a value close to 0. Since F ₃ ) and the rotational force (F ₄ ) of the second guide drill due to friction torque can be adjusted, the substrate recovered through the collection reel 200 can be collected while minimizing the influence of tension.

That is, when the tension (T ₁ ) increases, the diameters of the first friction rotation axis 420 and the second friction rotation axis 620 are reduced, or the first friction rotation axis 420 and the second friction rotation axis ( The tension (T ₁ ) can be reduced by reducing the friction coefficient through surface modification of 620).

Meanwhile, the tension-free multi-turn reel-to-reel transfer device according to the present invention can be applied together with a cooling block for cooling the substrate.

Figure 5 is a diagram for explaining a tension-free transfer process of a substrate according to another embodiment of the present invention, in which a cooling block 500 is installed on the upper side of the substrate between the first guide drill 400 and the second guide drill 600. More is provided.

Meanwhile, since the friction force caused by the cooling block 500 provided as above is in the opposite direction to the substrate moving direction, the tension (T ₁ ) applied to the collection reel 200 can be expressed as Equation 3 below.

T _One =T ₂ -N×(F ₃ +F ₄ -F ₅ )...................................Formula 3

Here, F ₅ represents the friction force of the cooling block.

That is, even when the cooling block 500 is provided, the rotational force (F ₃ ) of the first guide drill due to the friction torque and the rotational force of the second guide drill due to the friction torque are similar to the above-described embodiment in consideration of the frictional force resulting from this. Since (F ₄ ) can be adjusted, the temperature of the substrate recovered through the collection reel 200 is prevented from rising and the substrate can be collected while minimizing the effect of tension.

Meanwhile, the cooling block 500 applied to the tension-free multi-turn reel-to-reel transfer device according to the present invention may have various embodiments.

Figure 6 is a diagram showing an example of a cooling block, which is a main component of the present invention. The cooling block 600 may be formed in a hollow shape filled with a refrigerant inside.

In detail, in this embodiment, the cooling block 500 is arranged so that the hollow body 510 in which the internal space 512 is formed is in contact with the substrate S at multiple places on the substrate S, and the internal space ( 512) may be in communication with the coolant inlet pipe 514 and the coolant discharge pipe 516 connected to the outside of the chamber 800.

That is, the coolant supplied from the outside can be circulated inside the hollow body 510 through the coolant inlet pipe 514 and the coolant discharge pipe 516, and cooling is achieved by contacting the coolant with the substrate S. You can.

Figure 7 is a diagram showing another embodiment of the cooling block, which is a main component of the present invention. In this embodiment, the cooling block 500 is provided with a cooling pipe 532 in a solid body 530 made of a metal material with high thermal conductivity. The refrigerant transported along the cooling pipe 532 cools the solid body 530, and the solid body 530 is placed in contact with the substrate to achieve cooling.

Meanwhile, the coolant used in the cooling block 500 formed as shown in FIGS. 6 and 7 may be coolant, and when it is desired to lower the temperature of the substrate S, liquid nitrogen may be applied as needed.

100............ Supply reel 200............. Collection reel
400.......... 1st guide drill 410........ 1st space
420........First friction rotation axis 500.............Cooling block
600......... Second guide drill 610............ Second space
620......... Second friction rotation axis

Claims (5)

A supply reel for supplying substrates while rotating synchronously with the rotation axis;
A collection reel for recovering the supplied substrate while rotating synchronously with the rotation axis;
A plurality of guide reels provided between the supply reel and the collection reel; and
It includes a friction rotation axis for rotation of the guide reel,
The friction rotation shaft is formed to have a diameter smaller than the diameter of the space formed in the central portion of the guide reel and rotates,
The guide reel is a tension-free multi-turn reel-to-reel transfer device, characterized in that the guide reel is rotated by friction torque formed by rotation of the friction rotation shaft.
A supply reel for supplying substrates while rotating synchronously with the rotation axis;
A collection reel for recovering the supplied substrate while rotating synchronously with the rotation axis;
a first guide drill provided between the supply reel and the collection reel to increase the moving distance of the supplied substrate, and rotated by a first friction rotation axis;
A second guide drill is formed identically to the first guide drill, is arranged to be spaced a predetermined distance apart, and rotates by a second friction rotation axis,
The first friction rotation axis and the second friction rotation axis are formed to have a diameter smaller than the diameter of the space formed in the central portion of the first and second guide drills and rotate,
The first guide drill rotates by friction torque formed by rotation of the first friction rotation shaft, and the second guide drill rotates by friction torque produced by rotation of the second friction rotation shaft,
A tension-free multi-turn reel-to-reel transfer device, wherein the first friction rotation axis and the second friction rotation axis rotate faster than the first guide drill and the second guide drill.
According to claim 2,
Tension-free multi-turn reel-to-reel transfer device, characterized in that the tension of the substrate applied to the front side of the collection reel based on the supply direction of the substrate is defined by the following equation.
T ₁ = T ₂ - N×(F ₃ +F ₄ )...............Formula
(Here, F ₃ is the rotational force of the first guide drill due to friction torque, F ₄ is the rotational force of the second guide drill due to friction torque, N is the number of guide reels, T ₁ is the tension applied to the front of the guide reel, T ₂ represents the tension applied to the rear of the supply reel)
According to claim 3,
The tension (T ₁ ) is a tension-free multi-run reel-to-reel transfer device, characterized in that it is adjusted by varying the diameters of the first friction rotation shaft and the second friction rotation shaft.
According to claim 2,
A cooling block for cooling the substrate is further provided between the first guide drill and the second guide drill, and the tension (T ₁ ) is defined by the following equation. Tension-free multi-run reel-to-reel transfer Device.
T ₁ = T ₂ - N×(F ₃ +F ₄ -F ₅ )...................................Formula
(Here, F ₃ is the rotational force of the first guide drill due to friction torque, F ₄ is the rotational force of the second guide drill due to friction torque, F ₅ is the frictional force of the cooling block, N is the number of guide reels, and T ₁ is the number. Tension applied to the front of the reel, T ₂ represents tension applied to the rear of the supply reel)