KR20100039965A - A vision inspection system for the five surface - Google Patents

Abstract

PURPOSE: A vision inspection system for five surfaces is provided to inspect not only two surfaces for semiconductor wafer or PCB but also five surfaces for solid state drive and to improve work efficiency by automatic inspecting five surfaces. CONSTITUTION: A vision inspection system for five surfaces(1000) comprises a main body(100), a first loader(200a), a second loader(200b), a first convey rail(300a), a second convey rail(300b), and a first vision inspecting unit(400). The first loader and the second loader are installed in the front both side of the main body and load a plurality of trays, wherein measured objects are loaded, to moves upwards and downwards. The first convey rail and the second convey rail are installed in the rear both side of the each loader and transfer the trays to the backward and forward. The first vision inspecting unit is installed between the convey rails and includes a first image acquisition part(410) and a second image acquisition part(420).

Description

A vision inspection system for the five surface}

The present invention relates to a five-sided vision inspection system for imaging the five surfaces of the measurement object and automatically inspects for defects according to the photographing results, and more particularly, a series of two-sided surfaces such as semiconductor wafers, PCBs, and module ICs of semiconductors. In addition to imaging, the present invention relates to a five-side vision inspection system capable of taking an image (front / back / left / right / bottom) such as a solid state drive (SSD).

[Document 1] Republic of Korea Patent Application 10-2007-31866 Name: Semiconductor Device Vision Inspection System

[Document 2] Republic of Korea Patent Application 10-2006-43900 Name: Vision Inspection System for Semiconductor Devices

In general, a memory module and a PCB are a circuit configured independently by soldering and fixing a plurality of ICs and components on one or both sides of a board, and are mounted on a main board to expand capacity or function.

The components such as the module IC of the semiconductor are important parts, and the reliability of the product is very important, so they are shipped to the product through strict quality inspection.

Therefore, PCB (Printed Circuit Board), semiconductor module IC, semiconductor wafer, etc. are manufactured through a series of processes, and then completed a precise inspection before shipment. These inspections not only have internal defects but also microscopic defects on their appearance. Even if it has a fatal effect on performance, not only the electrical motion test but also various tests such as visual inspection using a vision camera are performed.

This defect inspection is a patent application filed by the applicant [Patent 1] Korean Patent Application No. 10-2007-31866 Name: semiconductor device vision inspection system, and [Document 2] Korea Patent Application 10-2006-43900 Name: Vision of a semiconductor device Described in the inspection system.

Such a semiconductor device vision inspection system is an inspection system that is loaded and inspected automatically by the picker to the inspection equipment, and the inspected semiconductor is classified into an unloading cassette according to the inspection result.

However, in [Document 1] and [Document 2], it is a system for acquiring the double-sided image of the measurement object and reading the presence of a blemish.

As a result, measurement objects such as solid state drives (SSDs), which are in high demand for electronic products, have to shoot left / right / bottom images in addition to a series of two-sided imaging such as semiconductor wafers, PCBs, and module ICs of semiconductors. There is no equipment that can inspect the surface.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a multi-sided image such as a solid state drive (SSD) in addition to a series of two-sided imaging such as a semiconductor wafer, a PCB, and a module IC of a semiconductor (pre / post). / Left / right / bottom) to provide a five-side vision inspection system capable of imaging.

Another object of the present invention is to provide a five-side vision inspection system capable of photographing five-surface images by including a first inspection unit for photographing the front / rear image of a measurement object and a second inspection unit for inspecting left / right / bottom surfaces. have.

Furthermore, an object of the present invention, the first loader and the second loader, respectively installed on both sides of the front of the main body and mounted so that the plurality of trays accommodated in the measurement object can be raised or lowered; and, respectively A first conveying rail and a second conveying rail provided in the front-rear direction at the rear of the loader for transporting the tray in the front-rear direction; A first vision inspection unit having an image acquisition unit and a second image acquisition unit; and a third image acquisition unit and a fourth image acquisition unit provided between the respective transport rails to capture left and right images and a bottom image of the measurement object. And a second vision inspection unit provided with a fifth image acquisition unit; and a first transfer picker configured to pick up a measurement object to be vision inspected from the trays on the respective transport rails and transport the object through horizontal movement. A first picker moving means and a second picker moving means provided between the respective transport rails to guide the horizontal movement of the respective pickers; and a first transport rail behind the respective loaders; A reject tray provided between the second conveying rails and storing a defective object to be measured; And a sorting apparatus for classifying the vision inspection-completed measurement object into a reject tray and a tray taken out from each loader.

According to the five-side vision inspection system according to the present invention, in addition to a series of two-sided imaging such as semiconductor wafer, PCB and module IC of the semiconductor, a multi-sided (front / rear / left / right / bottom) image such as SSD (Solid State Drive) It is possible to shoot.

Therefore, there is an advantage to improve the work efficiency by automatically inspecting the existing left / right / bottom visual inspection.

Hereinafter, with reference to the accompanying drawings with respect to the five-side vision inspection system according to the present invention will be described in detail.

1 is a conceptual diagram of a five-sided vision inspection system according to the present invention.

As shown in FIG. 1, the present invention includes a main body 100, a first loader 200a and a second loader 200b, a first transfer rail 300a and a second transfer rail 300b, and a first vision inspection unit. 400 and the second vision inspection unit 500, the first transfer picker (600a) and the second transfer picker (600b), the first picker moving means (700a) and the second picker moving means (700b), the reject tray ( 800, and the schematic diagram, including the sorting apparatus 900, relate to a five-sided vision inspection system 1000.

Here, the operation relation of the five-side vision inspection system 1000 will be omitted since it is a well-known technique described in detail in [Document 1] Korean Patent Application No. 10-2007-31866.

In addition, the second vision inspection unit 500 is disposed between the first conveyance rail 300a and the second conveyance rail 300b which are side surfaces of the first vision inspector 400.

The second vision inspection unit 500 is a structure that can be moved back and forth by itself so that the measurement object 580 vision inspection of the other measurement object 580 at the same time when the vision inspection through the first vision inspection unit 400.

Here, the first vision inspection unit 400 of the five-side vision audit system 1000 is provided with a series of first image acquisition units 410 and second image acquisition units 420, so that two surfaces of the measurement object 580 ( The second vision inspection unit 500 is provided with a third image acquisition unit 530, a fourth image acquisition unit 540, and a fifth image acquisition unit 550. 580) three sides (left / right / bottom).

FIG. 2 is a perspective view of the second vision inspection unit extracted from FIG. 1, and FIG. 3 is a side view of FIG. 2.

As shown in FIG. 2 and FIG. 3, the second vision inspection unit 500 is provided between the transfer rails 300a and 300b to capture the left and right images and the bottom image of the measurement object 580. The image acquisition unit 530, the fourth image acquisition unit 540, and the fifth image acquisition unit 550 are provided.

The second vision inspection unit 500 is largely composed of two parts, which is a guide plate 510 fixedly disposed between the first transfer rail 300a and the second transfer rail 300b, and the guide plate 510. It is composed of a conveying plate 520 is slidingly coupled on the conveyance back and forth.

This structure selectively transfers the transfer plate 520 to the first transfer picker 600a and the second transfer picker 600b so that the measurement object 580 performs other measurements while performing vision inspection through the first vision inspection unit 400. This is to enable vision inspection of the object 580 at the same time.

In this case, the transfer plate 520 has a structure in which a third image acquisition unit 530, a fourth image acquisition unit 540, and a fifth image acquisition unit 550 are disposed.

In addition, the first lighting unit 531 and the second lighting unit 541 are disposed in an upright position by forming a rectangular frame on both sides of the upper center of the transfer plate 520, between the first lighting unit 531 and the second lighting unit 541. The third lighting unit 551 is horizontally disposed in the same direction as the transfer plate 520. In this case, each of the lighting units 531, 541, 551 is provided with a structure capable of irradiating light on which a plurality of LEDs (not shown) are mounted on the inner side of the rectangular frame.

In addition, the first lighting unit 531 functions to illuminate the left side of the measurement object 580 so that the left image is acquired through the third image acquisition unit 530, and the second lighting unit 541 is the measurement object 580. The right image is applied to the right side to obtain the right image through the fourth image acquisition unit 540, and the third lighting unit 551 illuminates the bottom surface of the measurement object 580 to obtain the fifth image acquisition unit. In operation 550, a bottom image is obtained.

In the above, the third image acquisition unit 530 and the fourth image acquisition unit 540 measure the object 580 through the reflection plate 560 disposed diagonally to the sides of the first lighting unit 531 and the second lighting unit 541. Acquire a left and right surface image of).

The fifth image acquisition unit 550 acquires an image of the bottom surface of the measurement object 580 through the reflection plate 560 disposed obliquely on the bottom of the third lighting unit 551.

On the other hand, the guide plate 510 has a structure in which a cutout portion 511 having a center cut is further formed to avoid interference between the fifth image acquisition unit 550 and the reflection plate 560.

In addition, the first lighting unit 531 and the second lighting unit 541 is connected to the transfer cylinder 570 is a structure that is transported back and forth.

Hereinafter, with reference to the accompanying drawings with respect to the function of the second inspection unit will be described in detail.

4 is an operation diagram of the second inspection unit.

As shown in FIG. 4, when the measurement object 580 is first positioned between the first and second lighting units 531 and 541 through the transfer pickers 600a and 600b, the first and second lighting units 531 and 531 may be disposed. The light is irradiated to the left and right surfaces of the measurement object 580 through the illumination of the second lighting unit 541.

Then, the left and right surfaces of the measurement object 580 are photographed by the third image acquisition unit 530 and the fourth image acquisition unit 540 through the reflection plate 560, respectively.

In this case, the distance between the measurement object 580 and each of the lighting units 531, 541, 551 should be the same. The distance to the lighting units 531, 541, 551 must be adjusted.

In this case, the transport pickers 600a and 600b should be moved. In this case, the first lighting unit 531 is moved forward through the cylinder 570 or the second lighting unit is provided to provide a space for the transport pickers 600a and 600b to move. 541 must be forwarded through the cylinder 570.

If the size of the measurement object is different and the distance between the first lighting unit 531 and the measurement object 580 is adjusted, the second lighting unit 541 is moved forward to secure a space for the transport pickers 600a and 600b to move.

When the distance between the second lighting unit 541 and the measurement object 580 is adjusted, the first lighting unit 531 is moved forward to secure a space for the transport pickers 600a and 600b to move.

Thereafter, when acquiring the bottom image of the measurement object 580 through the fifth image acquisition unit 550, the transport pickers 600a and 600b should descend to the third lighting unit 551. The lighting unit 531 and the second lighting unit 541 are moved forward to provide a space for the transport pickers 600a and 600b to descend.

When the transport pickers 600a and 600b are lowered and the distance between the third light unit 551 and the measurement object 580 is adjusted, the third image unit 551 and the reflector 560 are measured by the fifth image acquisition unit 550. A bottom image of the object is obtained.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, various other modifications and variations may be made without departing from the spirit and scope of the invention. Accordingly, it is intended that the appended claims cover such modifications and variations as fall within the true scope of the invention.

1 is a conceptual diagram of a five-sided vision inspection system according to the present invention,

2 is a perspective view of the second vision inspection unit extracted from FIG.

3 is a side view of FIG.

4 is an operation diagram of the picker and the second inspection unit;

<Description of the symbols for the main parts of the drawings>

100: main body

200a: first loader 200b: second loader

210: tray

300a: first conveyance rail 300b: second conveyance rail

400: first vision inspection unit 410: first image acquisition unit

420: second image acquisition unit

500: second vision audit unit 510: guide plate 511: incision

520: transfer plate

530: third image acquisition unit 531: first lighting unit

540: fourth image acquisition unit 541: second lighting unit

550: fifth image acquisition unit 551: third lighting unit

560: reflector

570: transfer cylinder

580: measuring object

600a: first transport picker 600b: second transport picker

700a: first picker moving means 700b: second picker moving means

800: reject tray

900: sorting device

1000: 5-sided vision inspection system

Claims (4)

In the vision inspection system that photographs the surface image and automatically inspects for defects according to the photographing result, Main body 100; First and second loaders 200a and 200b which are respectively installed at both front sides of the main body 100 and are stacked to allow the plurality of trays 210 containing the measurement object 580 to be raised or lowered; A first transfer rail 300a and a second transfer rail 300b which are provided in the front-rear direction at the rear of the loaders 200a and 200b to transfer the tray 210 in the front-rear direction; A first is provided between each of the conveying rail (300a, 300b) is provided with a pair of first image acquisition unit 410 and the second image acquisition unit 420 for taking a front and rear image of the measurement object 580 Vision inspection unit 400; The third image acquisition unit 530, the fourth image acquisition unit 540, and the fifth image which are provided between the transfer rails 300a and 300b to photograph the left and right images and the bottom image of the measurement object 580. A second vision inspection unit 500 provided with an acquisition unit 550; The first transport picker 600a and the second transport picker 600b are provided to pick up the measurement object 580 to be vision inspected from the trays 210 on the transport rails 300a and 300b and transport them through horizontal movement. ; First picker movement means (700a) and second picker movement means (700b) provided between the transfer rails (300a, 300b) to guide horizontal movement of the transfer pickers (600a, 600b); A reject tray 800 provided between the first conveying rail 300a and the second conveying rail 300b at the rear of each of the loaders 200a and 200b and storing the defective article measuring object 580; And Five sides characterized in that it comprises a sorting device 900 for classifying the vision-tested measurement object 580 to the reject tray 800 and the tray 210 to be taken out from each loader (200a, 200b) Vision inspection system. The method of claim 1, The second vision inspection unit 500, A guide plate 510 fixed between the first conveying rail 300a and the second conveying rail 300b; A transfer plate 520 slidingly coupled to the guide plate 510 and transferred to the transfer rails 300a and 300b; A first lighting unit 531 and a second lighting unit 541 formed of a rectangular frame arranged upright on both sides of an upper center of the transfer plate 520, A third lighting unit 551 comprising a rectangular frame horizontally disposed in the same direction as the transfer plate 520 between the first lighting unit 531 and the second lighting unit 541; A third image acquisition unit 530 and a fourth image acquiring the left and right surface images of the measurement object 580 through the reflection plate 560 disposed on the side surfaces of the first lighting unit 531 and the second lighting unit 541. Image acquisition unit 540, Five-sided vision inspection system, characterized in that consisting of a fifth image acquisition unit 550 for acquiring the bottom surface image of the measurement object 580 through the reflecting plate 560 disposed on the bottom of the third lighting unit 551 . 3. The method of claim 2, The first lighting unit (531) and the second lighting unit (541) is a five-sided vision inspection system, characterized in that connected to the transfer cylinder (570). 3. The method of claim 2, The guide plate 510 may further include a cutout 511 having a center cut in order to avoid interference between the fifth image acquisition unit 550 and the reflection plate 560 attached to the bottom surface of the transfer plate 520. 5-sided vision inspection system.

Images