KR20130135582A - Vision inspection module, and device inspection apparatus having the samem, and vision inspection method - Google Patents

Vision inspection module, and device inspection apparatus having the samem, and vision inspection method Download PDF

Info

Publication number
KR20130135582A
KR20130135582A KR1020120059285A KR20120059285A KR20130135582A KR 20130135582 A KR20130135582 A KR 20130135582A KR 1020120059285 A KR1020120059285 A KR 1020120059285A KR 20120059285 A KR20120059285 A KR 20120059285A KR 20130135582 A KR20130135582 A KR 20130135582A
Authority
KR
South Korea
Prior art keywords
light
inspection
image acquisition
unit
image
Prior art date
Application number
KR1020120059285A
Other languages
Korean (ko)
Inventor
유홍준
이상훈
김경호
Original Assignee
(주)제이티
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)제이티 filed Critical (주)제이티
Priority to KR1020120059285A priority Critical patent/KR20130135582A/en
Publication of KR20130135582A publication Critical patent/KR20130135582A/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

Abstract

The present invention relates to a device inspection apparatus, and relates to a vision inspection module for inspecting the appearance of the device, a device inspection device having the same, and a vision inspection method.
The present invention has been made to achieve the object of the present invention as described above, the present invention comprises: a light source unit for sequentially irradiating some of the plurality of measurement light having different optical characteristics to the inspection object; Disclosed is a vision inspection module including an image acquisition unit for acquiring an image of an inspection object to which the measurement light is irradiated by the light source unit.

Description

Vision inspection module, and device inspection apparatus having the same {Vision Inspection Module, and device inspection apparatus having the samem, and vision inspection method}

The present invention relates to a device inspection apparatus, and relates to a vision inspection module for inspecting the appearance of the device, a device inspection device having the same, and a vision inspection method.

After completion of the package process, the semiconductor device is shipped to the customer tray after the burn-in test and the like, and the semiconductor device is shipped with a marking process such as a serial number and a manufacturer's logo on the surface of the semiconductor device. .

In order to improve the reliability of the product, the semiconductor device is inspected for the appearance and surface condition of the semiconductor device such as whether the lead or the ball grid is broken, the crack is present, or the scratch is present. The vision test process is performed.

However, as the surface state inspection such as the appearance state of the semiconductor device and whether the marking is good or the like is added, it affects the time for performing the entire process according to the inspection time.

In particular, when the vision inspection process of the appearance state and the surface state of the semiconductor device is inefficient, there is a problem in that the productivity of the semiconductor device is reduced by lowering the overall working efficiency.

On the other hand, vision inspection of a semiconductor device performs an appearance inspection on a semiconductor device by irradiating light on the surface of the device, obtaining an image of the semiconductor device irradiated with light, and analyzing the acquired image.

Specifically, as the contents of the vision inspection of the device, to obtain the image of the two-dimensional shape on the top or bottom of the semiconductor device and to analyze the obtained image to check the surface state of the semiconductor device, that is, the presence of cracks, scratches, etc. There are two-dimensional vision inspection, three-dimensional vision inspection that checks an image of a semiconductor device for three-dimensional shape and analyzes the obtained image to check an abnormality of a lead of the semiconductor device, breakage of a ball, abnormality of a bump, and the like.

On the other hand, the target of vision inspection is expanded to include system LSIs such as CPUs and GPUs of smartphones and tablets, as well as memory devices among semiconductor devices.

And as the inspection target of the vision inspection expands, the contents of the vision inspection also become diversified.

An object of the present invention is to recognize the necessity as described above, while obtaining a plurality of measurement light with different optical characteristics, such as wavelength, to the inspection object sequentially to obtain an image of the inspection object irradiated with each measurement light to the inspection content It is to provide a vision inspection module, a device inspection device having it, and a vision inspection method capable of performing a vision inspection capable of more suitable vision inspection.

Another object of the present invention is to perform a variety of vision inspection by obtaining an image of the inspection target irradiated with each measurement light while sequentially irradiating a plurality of measurement light with different optical characteristics, such as wavelength, to the inspection object An inspection module, a device inspection apparatus having the same, and a vision inspection method are provided.

The present invention has been made to achieve the object of the present invention as described above, the present invention comprises: a light source unit for sequentially irradiating some of the plurality of measurement light having different optical characteristics to the inspection object; Disclosed is a vision inspection module including an image acquisition unit for acquiring an image of an inspection object to which the measurement light is irradiated by the light source unit.

The measurement light may include at least two or more of white light, R, G, B, infrared light, and ultraviolet light.

The apparatus may further include an image synthesizing unit for synthesizing the images of the inspection targets irradiated by the measurement light.

The image acquisition unit may include a plurality of cameras corresponding to the number of measurement light beams.

A light splitting unit for dividing an image of the inspection target in correspondence to the number of the image acquisition units so that each image acquisition unit acquires an image for the inspection target; It may include a focus adjusting unit installed on the optical path between at least one of the image acquisition unit and the light splitter to adjust the focus of the image acquisition unit.

The image acquisition unit receives a first image receiving unit for receiving an image of the inspection object as a first light receiving path, and at least one second image receiving a second light receiving path divided by the light splitter in the first light receiving path. It may include acquisition units.

The second image acquisition unit may be provided in plural, and the light splitter may sequentially split light in correspondence to the number of the second image acquisition units in the first light receiving path.

The second image acquisition unit may be provided in plural, and the light splitter may split light simultaneously in correspondence with the number of the second image acquisition units in the first light receiving path.

The plurality of image acquisition units may be installed such that their light receiving axes are parallel to each other.

It may include a laser light irradiation unit for irradiating a laser light to the inspection object to adjust the focus of at least one of the plurality of image acquisition unit.

An objective optical system may be additionally installed between the light splitter and the inspection target.

The objective optical system is preferably capable of adjusting the magnification of the inspection object.

The objective optical system may include a plurality of objective lenses having different magnifications, and the plurality of objective lenses may be positioned by rotation on a light receiving path of the plurality of image capturing units to adjust the magnification of the inspection object.

The present invention also sequentially irradiates a portion of the plurality of measurement light having different optical characteristics to the inspection object by the light source unit, and sequentially acquires an image of the inspection object to which the measurement light is irradiated by the light source unit by the image acquisition unit. A vision inspection method for acquiring an image of an inspection object is disclosed.

The measurement light may include at least two or more of white light, R, G, B, infrared light, and ultraviolet light.

The apparatus may further include an image synthesizing unit for synthesizing the images of the inspection targets irradiated by the measurement light.

The vision inspection module, the device inspection apparatus having the same, and the vision inspection method according to the present invention sequentially irradiate the inspection object with a plurality of measurement light having different optical characteristics, such as wavelength, to display an image of the inspection object irradiated with each measurement light. There is an advantage that can perform a vision test that can be obtained by a vision test more suitable for the inspection contents.

In addition, the vision inspection module according to the present invention, the device inspection device and the vision inspection method having the image of the inspection target irradiated with each measurement light while sequentially irradiating a plurality of measurement light having different optical characteristics such as wavelength to the inspection target There is an advantage that can be obtained by performing a variety of vision inspection.

1 is a conceptual diagram showing a vision inspection module according to the present invention.
FIG. 2 is a conceptual view illustrating a device inspection apparatus in which the vision inspection module of FIG. 1 is installed.

Hereinafter, a vision inspection module and a device inspection apparatus having the same according to the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the vision inspection module 100 according to the present invention includes: a light source unit 30 which sequentially irradiates some of the plurality of measurement lights having different optical characteristics to the inspection object 1; It includes an image acquisition unit 10 for obtaining an image for the inspection object (1) irradiated with the measurement light by the light source unit (30).

In this case, the inspection target 1 is an object that requires inspection on the surface of a wafer state device, a device in a packaging process, a packaged device, as well as a substrate on which a semiconductor process such as a solar cell device or an LCD panel is performed. It is also possible.

In particular, the inspection of the inspection object 1 by this module can be a two-dimensional or three-dimensional vision inspection.

The light source unit 30 is irradiated with light perpendicular to the surface of the inspection object 1 or irradiates light with an inclination such that the irradiation angle of the light to the inspection object 1 may be variously set according to design and design. Can be.

In this case, the image acquisition unit 10 may also be installed with the light receiving axis, that is, the optical axis constituting the image acquisition unit 10 inclined to the surface of the inspection object (1).

As a specific example of the light source unit 30, as shown in FIG. 1, light is emitted to the inspection object 1 by a beam splitter 51 installed on the optical path 21 facing the inspection object 1. One or more light sources may be included, such as a first light source 31 to be irradiated, and a second light source 32 that directly irradiates light to the inspection object 1 as a ring-shaped light source.

In this case, the first light source 31 and the second light source 32 constituting the light source unit 30 may be controlled by the controller (not shown) to irradiate light to the inspection object 1 with a light amount suitable for vision inspection. .

The first light source 31 and the second light source 32 may be composed of various types of light sources, such as LED, laser, depending on the type and number of light sources, as shown in the example shown in Korea Patent No. 1108672 Can be.

On the other hand, the measurement light irradiated to the inspection object (1) by the light source unit 30 is characterized in that it is configured to sequentially irradiate light having a variety of characteristics for performing a variety of vision inspection.

In particular, the measurement light irradiated by the light source unit 30 may include at least two or more of white light, R, G, B, infrared and ultraviolet.

In this case, the light source unit 30 is controlled by a controller (not shown) to sequentially irradiate at least two or more of white light, R, G, B, infrared, and ultraviolet light, which are measurement light, to the inspection object 1 one by one.

Meanwhile, the light source unit 30 may irradiate two or more measurement lights simultaneously to the inspection object 1 in addition to sequentially irradiating two or more of white light, R, G, B, infrared rays and ultraviolet rays one by one. to be.

In this case, when the two or more measurement lights are irradiated to the inspection object 1 at the same time, they may interfere with each other.

In addition, the light source unit 30 is configured to irradiate a plurality of measuring light beams having different optical characteristics, so as to irradiate a plurality of measuring light beams in one module, or is composed of a plurality of light sources irradiating one or more measuring light beams. Various configurations are possible.

The image acquisition unit 10 is a configuration for acquiring an image of the inspection target 1 irradiated with the measurement light by the light source unit 30, and has a predetermined shooting area, such as a digital camera, relative to the measurement target. A line scanner or the like which acquires an image by moving may be used.

Here, the image acquisition unit 10 acquires an image in a state where the inspection object 1 is fixed, or moves relative to the inspection object 1, in particular, a state in which the inspection object 1 is moved, for example, an inspection object. Images can be acquired with relative movement with respect to the inspection object 1 in a direction parallel to the surface of (1).

The image acquisition unit 10 may be installed in a variety of ways, such as being fixed to the frame (not shown) or installed to be movable.

Meanwhile, the image acquisition unit 10 needs to be configured to be photographed according to optical characteristics such as infrared rays. As illustrated in FIG. 1, the image acquisition unit 10 may include a plurality of image acquisition units 11 and 12.

That is, the image acquisition unit 10 may include a plurality of cameras corresponding to the number of measurement lights, or may include a first camera capable of RGB photography, a second camera capable of infrared photography, a third camera capable of ultraviolet photography, and the like. Cameras with a combination.

In addition, each of the plurality of image acquisition units 11 and 12 corresponds to different depths of field, corresponds to different resolutions, or corresponds to optical characteristics irradiated by the light source unit 30. Under one condition, vision inspection is possible by one module.

Here, each of the image acquisition units 11 and 12 may have various configurations, such as having the same resolution or having a filter to receive only selected light such as infrared rays.

Meanwhile, the vision inspection module 100 according to the present invention corresponds to the number of image acquisition units 11 and 12 so that each image acquisition unit 11 or 12 may acquire an image for the inspection target 1. It may further include a light splitting unit 52 for dividing the image of (1).

The light splitter 52 corresponds to the number of the image capturing units 11 and 12 so that each of the image capturing units 11 and 12 may acquire an image of the inspection target 1. Any configuration may be used as long as it is a structure capable of dividing a single light into two or more such as a translucent mirror and a prism.

When the second image acquisition unit 12 is provided in plural numbers, the light splitter 52 sequentially divides the light corresponding to the number of the second image acquisition units 12 in the first light receiving path 21. Can be configured.

In addition, when the second image acquisition unit 12 is provided in plural numbers, the light splitter 52 splits the light at the same time corresponding to the number of the second image acquisition units 12 in the first light receiving path 21. Can be configured.

In addition, when a plurality of image acquisition units 11 and 12 are installed, each of the image acquisition units 11 and 12 may be installed such that the light receiving axes R1 and R2 are parallel to each other. .

On the other hand, when a plurality of image acquisition units 11 and 12 are installed, at least some of the image acquisition units 11 and 12 may adjust the focus on the inspection object 1, that is, the image acquisition unit to adjust the DOF. A focus adjuster 41 or 42 may be additionally installed on the optical path between at least one of the 11 and 12 and the light splitter 52 to adjust the focus of the image acquirer 11 or 12. Can be.

The focus controllers 41 and 42 are installed on the optical paths 21 and 22 between at least one of the image acquisition units 11 and 12 and the light splitter 51 to correspond to the image acquisition units 11 and 12. Various configurations are possible as the configuration to adjust the focus of the.

For example, the focus adjusting units 41 and 42 may include one or more lenses (not shown), and a linear driving unit (not shown) for relatively linearly moving at least one of the lens and the image acquisition unit 11 along the light receiving axis. It can be configured to include.

Here, the focus adjusting units 41 and 42 may be installed in all or some of the plurality of image acquisition units 11 and 12.

Meanwhile, at least one of the plurality of image acquisition units 11 and 12 may be used to adjust the focus of each of the image acquisition units 11 and 12. In order to irradiate the laser light to the inspection object 1, a laser light irradiation unit 43 may be additionally installed.

The laser beam irradiator 43 may be used to irradiate a laser beam onto the surface of the inspection object 1 and to focus the image acquisition units 11 and 12 based on the laser beam irradiated on the surface of the inspection object 1. .

On the other hand, the vision inspection module 100 according to the present invention is a light path 21, by the optical system including at least one of a lens, a reflector, a translucent mirror between the image acquisition unit (11, 12) to the inspection object (1) 22) is formed.

In particular, the objective optical system 60 may be additionally installed between the light splitter 51 and the inspection target 1 among the optical paths 21 and 22 to adjust the magnification.

And the objective optical system 60 may be configured to enable a magnification control for the inspection object (1).

For example, the objective optical system 60 may include a plurality of objective lenses 61, 62, and 63 having different magnifications, and the plurality of objective lenses 61, 62, and 63 may include a plurality of image acquisition units 11 and 12. The magnification of the inspection object 1 may be adjusted by being positioned on the light receiving path 21 of the plurality of beams.

Meanwhile, the vision inspection module 100 according to the present invention examines the appearance state of the inspection object 1 by analyzing the acquired image by obtaining an image of the inspection object 1 to which the measurement light is irradiated corresponding to each measurement light. Done.

For example, the image may be utilized to identify damages such as thermal characteristics or cracks of the inspection object 1 through the image of the inspection object 1 irradiated with infrared rays.

In addition, a pattern having a high degree of integration is formed on the surface of the device to be inspected, and the degree of reflection of reflected light having different wavelengths such as R, G, and B as well as infrared light is changed, so that various patterns of images can be acquired. ), More accurate inspection is possible.

At this time, the image of the inspection object (1) is varied according to the type of measurement light, and each vision image is analyzed to perform vision inspection, while after synthesizing some images, the synthesized image is analyzed to diversify the inspection types or more accurately vision inspection. Can be performed.

For example, the image of the inspection object 1 by R, G, and B and the image of the inspection object 1 by ultraviolet rays may be synthesized to examine the correlation between appearance and thermal characteristics.

The vision inspection module 100 according to the present invention further includes an image synthesizing unit (not shown) for synthesizing the images of the inspection object 1 irradiated by the measurement light.

The image synthesizing unit synthesizes images of the inspection object 1 irradiated by the measurement light, and may be configured together with a controller or the like as a circuit or software configuration rather than a physical configuration.

The vision inspection module 100 having the above configuration irradiates a portion of the plurality of measurement lights having different optical characteristics such as wavelengths to the inspection target 1 sequentially by the light source unit and emits the measurement light by the light source unit 30. A vision inspection method of acquiring an image of the inspection object 1 is performed by sequentially obtaining the image of the inspection object 1 by the image acquisition units 10; 11 and 12.

The vision inspection module having the configuration as described above may be applied to various devices as a module for performing vision inspection on an inspection object.

As an example, the vision inspection module 100 according to the present invention may be applied to a device inspection apparatus for performing a vision inspection on a device.

In this case, the device may be a device in a wafer state, a device in a packaging process, a device in which packaging is completed, or a substrate in which a semiconductor process such as a solar cell device or an LCD panel substrate is performed.

Hereinafter, a device inspection apparatus to which the vision inspection module 100 according to the present invention is applied will be described in detail with reference to the accompanying drawings.

Device inspection apparatus according to the present invention, as shown in Figure 2, the loading unit 400 for loading the inspection object (1) by loading a plurality of inspection objects (1) in the tray (2); The first pick-up tool 600 installed on one side of the loading unit 400 and picking up at least one inspection object 1 from the loading unit 400 and reloading the tray 2 of the loading unit 400 after vision inspection. )and; A first vision inspection unit (101) including a vision inspection module (100) according to the present invention and performing vision inspection on the bottom of the inspection object (1) picked up and transported by the first pick-up tool (600); According to the vision inspection result of the first vision inspection unit 101 may include an unloading unit 300 for classifying the inspection object and loading on the tray (2).

In this case, the tray 2 is a configuration for transporting the inspection object 1 to be seated, and various configurations are possible, such as a seating groove 2a in which the inspection object 1 is seated.

The loading unit 400 is a configuration for supplying the inspection target 1, which is an inspection target, to the first vision inspection unit 101, and is provided with a plurality of inspection targets in a state of being seated in the seating groove 2a formed in the tray 2. 1) by transporting the first vision inspection unit 101 is configured to inspect.

The loading unit 400 may be configured in various ways. As shown in FIG. 2, the guide unit 410 and the tray 2 for guiding the movement of the tray 2 in which the plurality of inspection objects 1 are stacked are provided. ) May include a driving unit (not shown) for moving along the guide unit 410.

The first pick-up tool 600 is composed of a plurality of pickers (not shown) installed in the support bracket 630, the support bracket 630 moves along the transfer tool guide 601 installed in the main body 10 It is possible to install.

The pickers are devices for picking up and transporting the inspection object 1, and may be configured in various ways, and may be configured in various arrangements, such as 1 × 8 and 2 × 8. It may be configured to include a suction head for generating a vacuum pressure to attract and pick up the inspection object (1).

The unloading unit 300 has a configuration similar to that of the loading unit 400, and according to the number of inspection results of the inspection object 1, good quality G, defective 1 or abnormal 1 (R1), defective 2 or abnormal 2 It is possible to constitute a plurality of pieces so as to give a classification level such as (R2).

That is, the unloading unit 300 loads a good tray unit for loading the inspection object, which is inspected as a result of the vision inspection, into the tray 2, and a test object 1, which has been inspected as being poor as a result of the vision inspection, on the tray. Various configurations are possible, including one or more sorting trays.

Each unloading unit 300 includes a guide unit 310 installed in parallel with one side of the loading unit 400, and a driving unit (not shown) for moving the tray 2 along the guide unit 310. It can be configured.

Meanwhile, the tray 2 may be transported by a tray transfer device (not shown) between the loading unit 400 and the unloading unit 300, and the inspection object 1 may be loaded in the unloading unit 300. It may further include a bin tray 200 for supplying the empty tray (2) that is not.

In this case, the bin tray 200 includes a guide part 210 installed in parallel with one side of the loading part 400, and a driving part (not shown) for moving the tray 2 along the guide part 210. Can be configured.

In addition, the unloading unit 300 may separately install a second pick-up tool 620 for transferring the inspection object 1 between the unloading units 300 according to the classification level of each unloading unit 300. Can be.

The first vision inspection unit 101 includes a vision inspection module 100 illustrated in FIG. 1, and includes a vision inspection for a bottom surface of the inspection object 1 that is picked up and transported by the first pick-up tool 600, in particular. Perform 3D vision inspection.

On the other hand, the device inspection apparatus according to the present invention is installed on the moving path of the tray 2 in the loading unit 400, the second vision inspection unit 500 for inspecting the upper surface of the inspection object (1) loaded on the tray (2) It may further include.

The second vision inspection unit 500 performs a vision inspection by relative movement, that is, X-axis movement, Y-axis movement, XY-direction movement, rotational movement, etc. with the inspection object 1, so that the modular two-dimensional vision inspection unit It may include a guide portion (510, 540) for guiding the movement in the X-axis direction and Y-axis direction of the (530).

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It is to be understood that both the technical idea and the technical spirit of the invention are included in the scope of the present invention.

10: image acquisition unit 30: light source unit

Claims (16)

A light source unit which sequentially irradiates some of the plurality of measurement light having different optical characteristics to the inspection object;
And an image acquisition unit for acquiring an image of the inspection target to which the measurement light is irradiated by the light source unit. The method according to claim 1,
The measurement light is a vision inspection module, characterized in that it comprises at least two or more of white light, R, G, B, infrared and ultraviolet. The method according to claim 1,
And an image synthesizing unit for synthesizing the images of the inspection targets irradiated by the respective measurement light beams. The method according to claim 1,
The image acquisition unit
Vision inspection module, characterized in that it comprises a plurality of cameras corresponding to the number of the measurement light. The method of claim 4,
A light splitting unit for dividing an image of the inspection target in correspondence to the number of the image acquisition units so that each image acquisition unit acquires an image for the inspection target;
And a focus control unit installed on an optical path between at least one of the image acquisition units and the light splitter to adjust a focus of the image acquisition unit. The method of claim 4,
The image acquisition unit
A first image acquisition unit receiving an image for the inspection object as a first light receiving path, and one or more second image acquisition units receiving a second light receiving path divided by the light splitter in the first light receiving path; Vision inspection module, characterized in that. The method of claim 6,
The second image acquisition unit is provided in plurality,
And the light splitting unit sequentially splits light in the first light receiving path corresponding to the number of the second image acquisition units. The method of claim 6,
The second image acquisition unit is provided in plurality,
And the light splitter divides light at the same time in correspondence with the number of the second image acquisition units in the first light receiving path. The method of claim 4,
And the plurality of image acquisition units are installed such that their light receiving axes are parallel to each other. The method of claim 4,
Vision inspection module, characterized in that it comprises a laser light irradiation unit for irradiating a laser light to the inspection object to adjust the focus of at least one of the plurality of image acquisition unit. The method according to claim 5,
Vision inspection module, characterized in that an additional object optical system is installed between the light splitter and the inspection target. The method of claim 11,
The objective optical system is a vision inspection module, characterized in that the magnification control for the inspection object. The method of claim 11,
The objective optical system includes a plurality of objective lenses having different magnifications,
And the plurality of objective lenses are positioned on the light receiving path of the plurality of image acquisition units by rotation to adjust magnification for the inspection object. Some of the plurality of measurement lights having different optical characteristics are sequentially irradiated to the inspection object by the light source unit, and images of the inspection object irradiated with the measurement light by the light source unit are sequentially obtained by the image acquisition unit to the inspection object. Vision inspection method to obtain an image. According to claim 14,
The measurement light comprises at least two or more of white light, R, G, B, infrared and ultraviolet. The method according to claim 14,
And an image synthesizing unit for synthesizing the images of the inspection targets irradiated by the respective measurement light beams.
KR1020120059285A 2012-06-01 2012-06-01 Vision inspection module, and device inspection apparatus having the samem, and vision inspection method KR20130135582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120059285A KR20130135582A (en) 2012-06-01 2012-06-01 Vision inspection module, and device inspection apparatus having the samem, and vision inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120059285A KR20130135582A (en) 2012-06-01 2012-06-01 Vision inspection module, and device inspection apparatus having the samem, and vision inspection method

Publications (1)

Publication Number Publication Date
KR20130135582A true KR20130135582A (en) 2013-12-11

Family

ID=49982791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120059285A KR20130135582A (en) 2012-06-01 2012-06-01 Vision inspection module, and device inspection apparatus having the samem, and vision inspection method

Country Status (1)

Country Link
KR (1) KR20130135582A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102011417B1 (en) 2018-06-04 2019-08-16 주식회사 옵티바이오 Triple magnification type machine vision inspection module
CN112683912A (en) * 2020-11-27 2021-04-20 成都数之联科技有限公司 Cloth cover defect visual detection method and device
KR20210148782A (en) 2020-06-01 2021-12-08 주식회사 엘지화학 Detection Device for Surface Defects of Material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102011417B1 (en) 2018-06-04 2019-08-16 주식회사 옵티바이오 Triple magnification type machine vision inspection module
KR20210148782A (en) 2020-06-01 2021-12-08 주식회사 엘지화학 Detection Device for Surface Defects of Material
CN112683912A (en) * 2020-11-27 2021-04-20 成都数之联科技有限公司 Cloth cover defect visual detection method and device

Similar Documents

Publication Publication Date Title
KR101108672B1 (en) Vision inspection apparatus and vision inspection method therefor
JP6820891B2 (en) Wafer inspection system and method
KR101638883B1 (en) System and method for inspecting a wafer
US6522777B1 (en) Combined 3D- and 2D-scanning machine-vision system and method
US8408379B2 (en) Parts manipulation, inspection, and replacement
US7773209B2 (en) Method and apparatus for parts manipulation, inspection, and replacement
KR101646743B1 (en) System and method for inspecting a wafer
KR101013573B1 (en) Appearance inspecting method of semiconductor chip and its device
TWI699318B (en) Electronic component handler and electronic component tester
WO2019118960A1 (en) Unscanned optical inspection system using a micro camera array
KR20090117660A (en) Multiple surface inspection system and method
KR20130135582A (en) Vision inspection module, and device inspection apparatus having the samem, and vision inspection method
KR20130135583A (en) Vision inspection module and device inspection apparatus having the same
KR100991511B1 (en) a vision inspection system for the five surface
CN111819435A (en) Visual inspection module, component inspection system thereof and component inspection method thereof
US20120105869A1 (en) Three dimensional inspection and metrology based on short pulses of light
KR102046081B1 (en) Vision Inspection Module and device inspection apparatus
KR20180099390A (en) Device inspection system
KR101784987B1 (en) Vision inspection module and device inspection system having the same
US20220059377A1 (en) Inspection device, resin molding apparatus, and method of manufacturing resin molded product
JP2017015481A (en) Electronic component conveyance device and electronic component inspection device
JP2017015482A (en) Electronic component conveyance device and electronic component inspection device
KR20230094914A (en) Semiconductor package inspection apparatus and semiconductor package inspection method
KR102594344B1 (en) Device handler
KR20230094090A (en) Semiconductor package inspection apparatus and semiconductor package inspection method

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application